CN109574475A - Quartz suction pen welding method - Google Patents
Quartz suction pen welding method Download PDFInfo
- Publication number
- CN109574475A CN109574475A CN201811460999.2A CN201811460999A CN109574475A CN 109574475 A CN109574475 A CN 109574475A CN 201811460999 A CN201811460999 A CN 201811460999A CN 109574475 A CN109574475 A CN 109574475A
- Authority
- CN
- China
- Prior art keywords
- suprasil
- turntable
- piece
- flame
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 239000010453 quartz Substances 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000003466 welding Methods 0.000 title claims abstract description 13
- 229910001882 dioxygen Inorganic materials 0.000 claims abstract description 10
- 238000000137 annealing Methods 0.000 claims abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229940037003 alum Drugs 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
- C03B23/203—Uniting glass sheets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Adornments (AREA)
Abstract
A kind of quartz suction pen welding method, comprising: 1, flame polish after annealing is handled after upper and lower suprasil piece numerical control processing；2, upper and lower suprasil piece is mechanically polished to mirror status；3, upper and lower suprasil piece is being fused together with hydrogen-oxygen gas flame；4, vacuum pump is opened while burning supreme suprasil piece with hydrogen-oxygen gas flame to vacuumize, while motor drives turntable to rotate automatically, it is allowed to be fused together with lower suprasil piece.
Description
Technical field
The invention belongs to field of semiconductor fabrication processes, in particular to a kind of quartz suction pen welding method.
Background technique
In 8 inches or more integrated circuit silicon chip diffusion silicon wafer processing procedures, need quartz suction pen as transmission carrier.It is existing to add
Work technique is to heat diameter with hydrogen-oxygen gas flameWelding rod connect upper and lower level quartz plate, had with reaching centre
Groove, side have suction hole, and the other side has the quartz suction pen product of suction hole.There are recessed to product appearance for technique at present
It is convex, and yield rate only has 20%.This is because welding process be easy to cause deformation, once deformation meeting is so that quartz plate can glue up and down
It is combined.
Summary of the invention
The present invention provides a kind of quartz suction pen welding methods, and the method increase the welding yields of quartz suction pen.
One of the embodiment of the present invention, a kind of quartz suction pen welding method realize the party using quartz suction pen welder
Method, the welder include:
Turntable, the turntable have motor to drive and rotate；
The central supported of flame gun support frame, the flame gun support frame and turntable covers connection,
Flame gun is mounted on the top of flame gun support frame,
Upper suprasil piece, opaque quartz piece and the lower suprasil piece that quartz suction pen includes, dispose after stacking gradually
At the top of the central rotating shaft of turntable, the central rotating shaft of turntable passes through the central supported set of turntable, and central supported set covers at center
Outside shaft,
Vacuum pump is placed on turntable, for extracting vacuum,
Water-cooled condenser, one end connect vacuum pump connection, and the other end connects the second suprasil component.
Welding method for quartz suction pen includes:
1, flame polish, annealing after upper and lower suprasil piece numerical control processing；
2, upper and lower suprasil piece is mechanically polished to mirror status；
3, upper and lower suprasil piece is being fused together with hydrogen-oxygen gas flame；
4, vacuum pump is opened while burning supreme suprasil piece with hydrogen-oxygen gas flame to vacuumize, drive turntable in motor
While automatic rotation, it is allowed to be fused together with lower suprasil piece.
The present invention first mechanically polishes two sides quartz plate to mirror status using the principle for inhaling vacuum, by chemical clear
After washing, two panels quartz plate is attached together with vacuum pump under hydrogen-oxygen gas flame.Appearance is in one after finished product, and yield rate exists
80% or more.
Detailed description of the invention
The following detailed description is read with reference to the accompanying drawings, above-mentioned and other mesh of exemplary embodiment of the invention
, feature and advantage will become prone to understand.In the accompanying drawings, if showing by way of example rather than limitation of the invention
Dry embodiment, in which:
Welder structural schematic diagram in Fig. 1 embodiment of the present invention.
Welder front view in Fig. 2 embodiment of the present invention.
1 --- flame gun, 2 --- flame gun support frame, 3 --- water-cooled condenser, 4 --- turntable, it is motor-driven
Rotatable turntable.
5 --- vacuum pump, 6 --- the first suprasil component, 7 --- the second suprasil component, 8 --- impermeable alum
English component.
Specific embodiment
According to one or more embodiment, as illustrated in fig. 1 and 2, a kind of quartz suction pen welder, which includes:
Turntable, the turntable have motor to drive and rotate；The central supported of flame gun support frame, the flame gun support frame and turntable, which covers, to be connected
It connects；Flame gun is mounted on the top of flame gun support frame；First suprasil component, opaque quartz component and second are transparent
Quartz member, is placed in the top of the central rotating shaft of turntable after stacking gradually, the central rotating shaft of turntable passes through the center branch of turntable
Support set, central supported set cover outside central rotating shaft；Vacuum pump is placed on turntable；Water-cooled condenser, one end connect vacuum pump
Connection, the other end connect the second suprasil component.First suprasil component and the second suprasil component can be above and below
Suprasil piece.
According to one or more embodiment, the welding method of quartz suction pen welder includes:
1, flame polish, annealing after upper and lower suprasil piece numerical control processing；
2, upper and lower suprasil piece is mechanically polished to mirror status；
3, upper and lower suprasil is being fused together with hydrogen-oxygen gas flame；
4, vacuum pump is opened while burning supreme suprasil with hydrogen-oxygen gas flame to vacuumize, drive turntable certainly in motor
While dynamic rotation, it is allowed to be fused together with lower suprasil.
It is worth noting that although foregoing teachings are by reference to several essences that detailed description of the preferred embodimentsthe present invention has been described creates
Mind and principle, it should be appreciated that, the invention is not limited to the specific embodiments disclosed, the division also unawareness to various aspects
Taste these aspect in feature cannot combine, it is this divide merely to statement convenience.The present invention is directed to cover appended power
Included various modifications and equivalent arrangements in the spirit and scope that benefit requires.
Claims (1)
1. a kind of quartz suction pen welding method, which is characterized in that realize this method, the weldering using quartz suction pen welder
Connection device includes:
Turntable, the turntable have motor to drive and rotate；
The central supported of flame gun support frame, the flame gun support frame and turntable covers connection,
Flame gun is mounted on the top of flame gun support frame,
Upper suprasil piece, opaque quartz piece and the lower suprasil piece that quartz suction pen includes are placed in after stacking gradually and turn
The top of the central rotating shaft of disk, the central rotating shaft of turntable pass through the central supported set of turntable, and central supported set is covered in central rotating shaft
Outside,
Vacuum pump is placed on turntable, for extracting vacuum,
Water-cooled condenser, one end connect vacuum pump connection, and the other end connects the second suprasil component,
Welding method for quartz suction pen includes:
1, flame polish is used after upper and lower suprasil piece numerical control processing, is made annealing treatment；
2, upper and lower suprasil piece is mechanically polished to mirror status；
3, upper and lower suprasil piece is being fused together with hydrogen-oxygen gas flame；
4, vacuum pump is opened while burning supreme suprasil piece with hydrogen-oxygen gas flame to vacuumize, drive turntable automatic in motor
While rotation, it is allowed to be fused together with lower suprasil piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811460999.2A CN109574475A (en) | 2018-12-01 | 2018-12-01 | Quartz suction pen welding method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811460999.2A CN109574475A (en) | 2018-12-01 | 2018-12-01 | Quartz suction pen welding method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109574475A true CN109574475A (en) | 2019-04-05 |
Family
ID=65925753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811460999.2A Pending CN109574475A (en) | 2018-12-01 | 2018-12-01 | Quartz suction pen welding method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109574475A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101993191A (en) * | 2009-08-18 | 2011-03-30 | 深圳市大族激光科技股份有限公司 | Laser welding method and laser welding fixture |
| CN103332854A (en) * | 2013-06-28 | 2013-10-02 | 湖北新华光信息材料有限公司 | Oxy-hydrogen torch sealing machine |
| CN203826360U (en) * | 2014-05-07 | 2014-09-10 | 宁波富星太阳能有限公司 | Quartz suction pen for silicon wafer |
| CN206595242U (en) * | 2017-03-08 | 2017-10-27 | 苏州阿特斯阳光电力科技有限公司 | A kind of quartz suction pen |
| CN207031258U (en) * | 2017-07-19 | 2018-02-23 | 大庆佳昌晶能信息材料有限公司 | Oxyhydrogen flame nozzle for circular quartz channel closure |
| CN107735371A (en) * | 2015-07-15 | 2018-02-23 | 贺利氏石英美国有限责任公司 | For the technique for being connected opaque vitreosil with transparent vitreosil |
| CN108863028A (en) * | 2017-05-10 | 2018-11-23 | 张忠恕 | A kind of Novel quartz pipe processing method |
-
2018
- 2018-12-01 CN CN201811460999.2A patent/CN109574475A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101993191A (en) * | 2009-08-18 | 2011-03-30 | 深圳市大族激光科技股份有限公司 | Laser welding method and laser welding fixture |
| CN103332854A (en) * | 2013-06-28 | 2013-10-02 | 湖北新华光信息材料有限公司 | Oxy-hydrogen torch sealing machine |
| CN203826360U (en) * | 2014-05-07 | 2014-09-10 | 宁波富星太阳能有限公司 | Quartz suction pen for silicon wafer |
| CN107735371A (en) * | 2015-07-15 | 2018-02-23 | 贺利氏石英美国有限责任公司 | For the technique for being connected opaque vitreosil with transparent vitreosil |
| CN206595242U (en) * | 2017-03-08 | 2017-10-27 | 苏州阿特斯阳光电力科技有限公司 | A kind of quartz suction pen |
| CN108863028A (en) * | 2017-05-10 | 2018-11-23 | 张忠恕 | A kind of Novel quartz pipe processing method |
| CN207031258U (en) * | 2017-07-19 | 2018-02-23 | 大庆佳昌晶能信息材料有限公司 | Oxyhydrogen flame nozzle for circular quartz channel closure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190405 |