CN109557675B - Long-focus deep laser beam homogenizing optical system based on aspherical mirror aberration effect - Google Patents
Long-focus deep laser beam homogenizing optical system based on aspherical mirror aberration effect Download PDFInfo
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- CN109557675B CN109557675B CN201811575955.4A CN201811575955A CN109557675B CN 109557675 B CN109557675 B CN 109557675B CN 201811575955 A CN201811575955 A CN 201811575955A CN 109557675 B CN109557675 B CN 109557675B
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Abstract
The invention discloses a long-focus deep laser beam homogenizing optical system based on aspherical mirror aberration effect, which comprises a beam homogenizing aspherical mirror group and a long-focus deep spherical collimating mirror group, wherein: the light beam homogenizing aspheric lens group comprises a negative focal power meniscus concave lens, a first positive focal power meniscus convex lens, a negative focal power meniscus concave lens containing an aspheric surface, a negative focal power biconcave lens and a second positive focal power meniscus convex lens; the long-focal-depth spherical collimating lens group comprises a third positive focal power meniscus convex lens, a negative focal power concave lens, a positive focal power convex lens and a negative focal power meniscus concave lens; the lenses are coaxially arranged in sequence in the direction of propagation of light. The optical system can convert the Gaussian beam into the flat-topped Gaussian beam with uniform distribution, provides a high-quality and high-efficiency laser beam for strong laser damage measurement, laser cleaning, laser polishing and laser combustion diagnosis, and promotes the deep development of the fields.
Description
Technical Field
The invention belongs to the field of laser application optics, and relates to a uniformization optical system for Gaussian beam energy spatial distribution of continuous laser and pulse laser.
Background
The interaction of strong laser and materials, laser cleaning, laser polishing, laser cladding and laser combustion diagnosis are the hot research fields of the development of laser application technology in recent years. The interaction between strong laser and material inevitably damages or destroys the surface and the inside of the material, and currently, the damage threshold (i.e. the average laser power density or energy density acting on the surface of the material to cause damage) is usually used internationally to quantitatively evaluate the extent of the damage effect. However, the light beams output by the laser are generally gaussian or gaussian-like distributed light spots, the light spots have the characteristic of energy distribution with a high middle part and weak two sides, and when the light beams are applied to the material, the energy distribution of each point in space is not uniform when the material and the laser interact with each other, so that the average laser power density or the average energy density is adopted to represent the laser damage threshold value, and the unified specification and standard are not provided. Even if the average power/energy density is the same for different laser manufacturers, the peak power/energy density of the laser is not always completely consistent due to different laser parameters (such as laser pulse width, beam quality, etc.). These problems will cause the research using different lasers to have no comparability and reference, and bring great trouble to the establishment of the quantitative evaluation laser damage standard.
Laser cleaning, laser polishing and laser cladding are also important research fields of the current laser application technology. Compared with the traditional chemical cleaning, the laser cleaning method can effectively reduce the damage degree to the environment. Compare in manual cleaning, can greatly promote abluent efficiency. Therefore, laser cleaning is known as a green cleaning mode in the 21 st century, and is expected to be applied to important engineering fields of aerospace, high-speed rail, ocean, nuclear power and the like in the future. However, at present, most of laser cleaning adopts a galvanometer scanning type cleaning mode, and the oscillating mirror inside the laser cleaning head is utilized to rotate rapidly, so that laser spots act on the surface of a workpiece to be cleaned point by point, and the cleaning is completed. One of the disadvantages of this method is that the light spot distribution is not uniform during cleaning, which results in high efficiency of the center position of the light spot during cleaning and low two sides of the light spot, i.e. the cleaning efficiency is not high enough. When the cleaning is often carried out once, the center of the light spot is thoroughly cleaned, and the two sides are leaked or not cleaned completely.
Laser combustion diagnosis is an advantageous means for studying large and medium-sized combustion devices such as aircraft engines and gas turbines. The laser combustion diagnosis can obtain information such as temperature and component distribution inside a combustion field through laser in a non-contact manner, so as to guide optimization and improvement of an actual combustion device. Planar laser induced fluorescence is a laser measurement technology for diagnosing a combustion field by using a sheet beam, and the laser sheet beam shaping system is used for shaping a beam output by a laser and further injecting the shaped beam into a measured combustion area. However, the output of the existing laser is not a beam with uniform energy distribution, and the output line spot is also non-uniformly distributed after passing through the shaping system, and if the beam is used for measuring the combustion field, the signal-to-noise ratio of the detected signal is also inconsistent (the signal-to-noise ratio of some regions is high, and the signal-to-noise ratio of some regions is low), which greatly affects the final measurement accuracy.
Disclosure of Invention
The invention aims to provide a long-focus deep laser beam homogenizing optical system based on an aspherical mirror aberration effect, which can convert a Gaussian beam into a flat-top Gaussian beam with uniform energy distribution, provide a high-quality and high-efficiency laser beam for strong laser damage measurement, laser cleaning, laser polishing and laser combustion diagnosis, and promote the deep development of the fields.
The purpose of the invention is realized by the following technical scheme:
the utility model provides a long focus depth laser beam uniformization optical system based on aspherical mirror aberration effect, includes beam uniformization aspherical mirror group and long focus depth spherical collimating mirror group, wherein:
the light beam homogenizing aspheric lens group comprises a negative focal power meniscus concave lens, a first positive focal power meniscus convex lens, a negative focal power meniscus concave lens containing an aspheric surface, a negative focal power biconcave lens and a second positive focal power meniscus convex lens;
the long-focal-depth spherical collimating lens group comprises a third positive focal power meniscus convex lens, a negative focal power concave lens, a positive focal power convex lens and a negative focal power meniscus concave lens;
the negative focal power meniscus concave lens, the first positive focal power meniscus convex lens, the negative focal power meniscus concave lens containing the aspheric surface, the negative focal power biconcave lens, the second positive focal power meniscus convex lens, the third positive focal power meniscus convex lens, the negative focal power concave lens, the positive focal power convex lens and the negative focal power meniscus concave lens are sequentially and coaxially arranged in the light transmission direction.
Compared with the prior art, the invention has the following advantages:
1. the optical system of the invention utilizes the aberration effect of the aspherical mirror to project the region with stronger energy distribution in the middle of the Gaussian beam to the edge region through the aberration effect so as to achieve the purpose of uniform beam energy distribution.
2. The optical system can promote the problem that the damage standards of strong laser are not uniform, not only can improve the efficiency of the application fields of laser cleaning and laser polishing engineering, but also can improve the signal to noise ratio and the measurement precision of the laser combustion diagnosis field, and provides important technical support for the development of the fields.
3. Compared with the common laser beam homogenizing method, the optical system has the advantages of simple structure, easiness in processing, low cost and good beam homogenizing effect (the highest beam homogenizing effect can reach more than 98%).
4. The invention can be widely applied to the research fields of laser cleaning, laser polishing, laser cladding, quantitative evaluation of laser damage threshold, laser combustion field measurement and the like, can provide uniform and high-beam-quality flat-topped Gaussian laser beams for laser cleaning, laser polishing, strong laser and material damage mechanisms, application research and laser combustion diagnosis technology, can greatly improve the laser cleaning and laser polishing efficiency, promote the establishment of unified and standard laser on material damage threshold evaluation standards, and improve the signal-to-noise ratio and measurement accuracy of signals in laser combustion diagnosis.
Drawings
FIG. 1 is a schematic structural diagram of a long-focus-depth laser beam uniformization optical system according to the present invention;
FIG. 2 shows the spot energy distribution at the focus (beam uniformity 98%);
FIG. 3 shows the spot energy distribution at 100mm from the focal point (98% beam uniformity);
figure 4 shows the spot energy distribution at-100 mm from the focal point (95% beam uniformity).
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings, but not limited thereto, and any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention shall be covered by the protection scope of the present invention.
As shown in fig. 1, the long-focus deep laser beam uniformization optical system based on the aspherical mirror aberration effect provided by the present invention is composed of a beam uniformization aspherical mirror group and a long-focus deep spherical collimating mirror group, wherein:
the light beam homogenizing aspheric lens group consists of a negative focal power meniscus concave lens 1, a first positive focal power meniscus convex lens 2, a negative focal power meniscus concave lens 3 containing an aspheric surface, a negative focal power biconcave lens 4 and a second positive focal power meniscus convex lens 5;
the long focal depth spherical collimating lens group consists of a third positive focal power meniscus convex lens 6, a negative focal power concave lens 7, a positive focal power convex lens 8 and a negative focal power meniscus concave lens 9;
the negative focal power meniscus concave lens 1, the first positive focal power meniscus convex lens 2, the negative focal power meniscus concave lens 3 containing an aspheric surface, the negative focal power biconcave lens 4, the second positive focal power meniscus convex lens 5, the third positive focal power meniscus convex lens 6, the negative focal power concave lens 7, the positive focal power convex lens 8 and the negative focal power meniscus concave lens 9 are coaxially arranged in sequence in the light transmission direction.
In the invention, the negative focal power meniscus concave lens 1, the first positive focal power meniscus convex lens 2, the negative focal power meniscus concave lens 3 containing aspheric surfaces, the negative focal power biconcave lens 4, the second positive focal power meniscus convex lens 5, the third positive focal power meniscus convex lens 6, the negative focal power concave lens 7, the positive focal power convex lens 8 and the negative focal power meniscus concave lens 9 are all made of F _ SILICA (fused SILICA) and coated with antireflection coatings, and the transmittance of each lens is ensured to be 99.9%.
In the present invention, the negative focal power meniscus concave lens 1, the first positive focal power meniscus convex lens 2, the negative focal power meniscus concave lens 3 containing an aspheric surface, the negative focal power biconcave lens 4, the second positive focal power meniscus convex lens 5, the third positive focal power meniscus convex lens 6, the negative focal power concave lens 7, the positive focal power convex lens 8, and the negative focal power meniscus concave lens 9 are sequentially arranged along the light propagation direction, and the surface shape, the curvature radius and the interval of 18 mirror surfaces (the interval refers to the physical distance from the center position of the mirror surface to the center of the next adjacent mirror surface, and so on) are respectively: convex spherical surface, 10.55mm, 4.062 mm; the concave spherical surface is 7.809mm and 6.069 mm; concave spherical surface, -26.507mm, 4.606 mm; convex spherical surface, -11.379mm, 10.620 mm; aspherical concave, -13.422mm, 3.065 mm; convex spherical surface, -32.824mm, 2.003 mm; concave spherical surface, -51.004mm, 3.072 mm; the concave spherical surface is 19.7mm and 21.834 mm; concave spherical surface, -39.519mm, 6.768; convex spherical surface, -24.834mm, 2.001 mm; a convex spherical surface, 27.599mm and 8.845 mm; the concave spherical surface is 251.38mm and 10.716 mm; concave spherical surface, -22.763mm, 4.61 mm; convex spherical surface, -170.08mm, 6.04 mm; concave spherical surface, -600.036mm, 6.621 mm; convex spherical surface, -43.026mm, 7.231 mm; concave spherical surface, -30.851mm, 5.018 mm; convex spherical surface, -41.139 mm.
In the invention, the spacing medium among the negative focal power meniscus concave lens 1, the first positive focal power meniscus convex lens 2, the negative focal power meniscus concave lens 3 containing the aspheric surface, the negative focal power biconcave lens 4, the second positive focal power meniscus convex lens 5, the third positive focal power meniscus convex lens 6, the negative focal power concave lens 7, the positive focal power convex lens 8 and the negative focal power meniscus concave lens 9 is air.
In the invention, the working wavelength of the optical system is 1064nm and 1080nm, the focal depth is +/-100 mm, and the focal length is 1000 mm.
In the invention, the optical system homogenizes the Gaussian beam to no less than 95%.
In the present invention, specific technical features of the optical system are shown in table 1, and data units in the table are mm.
TABLE 1
The data for the front concave aspherical surface lens having the negative aspherical power meniscus concave lens 3 of the order 5 are shown in Table 2, where k is the coefficient of the quadratic surface and a2、a4、a6、a8Are high-order aspheric coefficients.
TABLE 2
| Serial number | k | a2 | a4 | a6 | a8 |
| 5 | -3.74 | 0 | 0 | 0 | 0 |
In the present invention, the results of the actual spot uniformity simulation of the optical system at the focal point and ± 100mm from the focal point are shown in fig. 2, 3 and 4. As can be seen from fig. 2 to 4, the initial gaussian beam is shaped into a flat-top gaussian beam with uniform energy distribution after passing through the optical system of the present invention, and the energy uniformity of the shaped flat-top gaussian beam at a distance of ± 100mm from the focal point is 95% at the minimum and 98% at the maximum. The optical system has the advantages of long focal depth (+/-100 mm) and good energy uniformity (not less than 95%), and has the characteristics of simple structure, easy processing, low cost, long focal depth and good light beam uniformity effect compared with other laser beam uniformity methods.
Claims (5)
1. A long-focus deep laser beam uniformization optical system based on aspherical mirror aberration effect is characterized in that the optical system comprises a beam uniformization aspherical mirror group and a long-focus deep spherical collimating mirror group, wherein:
the light beam homogenizing aspheric lens group comprises a negative focal power meniscus concave lens, a first positive focal power meniscus convex lens, a negative focal power meniscus concave lens containing an aspheric surface, a negative focal power biconcave lens and a second positive focal power meniscus convex lens;
the long-focal-depth spherical collimating lens group comprises a third positive focal power meniscus convex lens, a negative focal power concave lens, a positive focal power convex lens and a negative focal power meniscus concave lens;
the negative focal power meniscus concave lens, the first positive focal power meniscus convex lens, the negative focal power meniscus concave lens containing the aspheric surface, the negative focal power biconcave lens, the second positive focal power meniscus convex lens, the third positive focal power meniscus convex lens, the negative focal power concave lens, the positive focal power convex lens and the negative focal power meniscus concave lens are sequentially and coaxially arranged in the light transmission direction;
the negative focal power meniscus concave lens, the first positive focal power meniscus convex lens, the negative focal power meniscus concave lens containing aspheric surfaces, the negative focal power biconcave lens, the second positive focal power meniscus convex lens, the third positive focal power meniscus convex lens, the negative focal power concave lens, the positive focal power convex lens and the negative focal power meniscus concave lens are all made of F _ SILICA and are coated with antireflection films, and the transmittance of each lens is ensured to be 99.9%;
the negative focal power meniscus concave lens, the first positive focal power meniscus convex lens, the negative focal power meniscus concave lens containing the aspheric surface, the negative focal power biconcave lens, the second positive focal power meniscus convex lens, the third positive focal power meniscus convex lens, the negative focal power concave lens, the positive focal power convex lens and the negative focal power meniscus concave lens are respectively the surface type, the curvature radius and the interval of 18 mirror surfaces which are sequentially arranged along the propagation direction of light: convex spherical surface, 10.55mm, 4.062 mm; the concave spherical surface is 7.809mm and 6.069 mm; concave spherical surface, -26.507mm, 4.606 mm; convex spherical surface, -11.379mm, 10.620 mm; aspherical concave, -13.422mm, 3.065 mm; convex spherical surface, -32.824mm, 2.003 mm; concave spherical surface, -51.004mm, 3.072 mm; the concave spherical surface is 19.7mm and 21.834 mm; concave spherical surface, -39.519mm, 6.768; convex spherical surface, -24.834mm, 2.001 mm; a convex spherical surface, 27.599mm and 8.845 mm; the concave spherical surface is 251.38mm and 10.716 mm; concave spherical surface, -22.763mm, 4.61 mm; convex spherical surface, -170.08mm, 6.04 mm; concave spherical surface, -600.036mm, 6.621 mm; convex spherical surface, -43.026mm, 7.231 mm; concave spherical surface, -30.851mm, 5.018 mm; convex spherical surface, -41.139 mm.
2. The aspheric aberration effect based long depth of focus laser beam uniformization optical system as claimed in claim 1, wherein the spacing medium between said negative power meniscus concave lens, said first positive power meniscus convex lens, said aspheric negative power meniscus concave lens, said negative power biconcave lens, said second positive power meniscus convex lens, said third positive power meniscus convex lens, said negative power concave lens, said positive power convex lens, said negative power meniscus concave lens is air.
3. The aspheric mirror aberration effect based long focal depth laser beam uniformizing optical system as claimed in claim 1, wherein the optical system has working wavelength of 1064nm and 1080nm, focal depth of ± 100mm, and focal length of 1000 mm.
4. The aspheric aberration effect based long-focus depth laser beam uniformizing optical system as claimed in claim 1 or 3, wherein the degree of uniformization of the optical system to the gaussian beam is not less than 95%.
5. The aspheric aberration effect based tele depth laser beam uniformizing optical system as claimed in claim 1 wherein the data of the front mirror surface of the aspheric negative power meniscus concave lens is: conic coefficient k is-3.74, high-order aspheric coefficient a2、a4、a6、a8Are all 0.
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Effective date of registration: 20230413 Address after: 200000 building 10, No. 860, Xinyang Road, Lingang New District, China (Shanghai) pilot Free Trade Zone, Fengxian District, Shanghai Patentee after: Shanghai Jinze Biotechnology Co.,Ltd. Address before: 150000 No. 92, West Da Zhi street, Nangang District, Harbin, Heilongjiang. Patentee before: HARBIN INSTITUTE OF TECHNOLOGY |