CN109556997A - The triple channel emerging system of real-time detection particle size and property - Google Patents
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- 238000011897 real-time detection Methods 0.000 title claims abstract description 19
- 238000001069 Raman spectroscopy Methods 0.000 claims abstract description 65
- 230000003287 optical effect Effects 0.000 claims abstract description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000002356 laser light scattering Methods 0.000 claims abstract description 5
- 239000013307 optical fiber Substances 0.000 claims abstract 4
- 239000000835 fiber Substances 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 9
- 238000009738 saturating Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000001228 spectrum Methods 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000005465 channeling Effects 0.000 claims description 3
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- 238000005259 measurement Methods 0.000 abstract description 9
- 230000035945 sensitivity Effects 0.000 abstract description 3
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- 239000008896 Opium Substances 0.000 abstract 1
- 229960001027 opium Drugs 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 16
- 238000001514 detection method Methods 0.000 description 7
- 239000003153 chemical reaction reagent Substances 0.000 description 4
- 238000000790 scattering method Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 238000001237 Raman spectrum Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000011514 reflex Effects 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000701 chemical imaging Methods 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
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- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000003500 flue dust Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
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- 238000003384 imaging method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
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- 239000005416 organic matter Substances 0.000 description 1
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- 235000009566 rice Nutrition 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
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- 238000005139 ultra-violet Raman spectroscopy Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/075—Investigating concentration of particle suspensions by optical means
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Abstract
The invention discloses the triple channel emerging systems of a kind of real-time detection particle size and property, including laser beam, cylinder microscope group, reflecting mirror, beam splitting chip, varifocus objective, particle to be measured, optical filter, lens, laser camera, optical fiber, Raman spectrometer and Fluorescence Spectrometer and notebook, the laser beam collides with after focusing with particle to be measured through reflecting, collision causes laser light scattering, and the Raman light and fluorescence being excited are generated, form three scattering laser, Raman light and fluorescence channels；Three kinds of light such as the scattering laser, Raman light and fluorescence are all generated from same target, their signal is relevant, and is fused together, and both can detect particle size or detectable particle properties.Triple channel emerging system provided by the invention has many advantages, such as to detect that speed is fast, distance is remote, not sample preparation, do not contact, is not afraid of that sunlight, high sensitivity and measurement range are wide, can carry out the real-time detection of a variety of particles such as water quality, haze and opium fontanel.
Description
Technical field
The invention belongs to optics into spectral imaging technology field, and in particular to the three of a kind of real-time detection particle size and property
Channel emerging system.
Background technique
With the continuous development of economy and society, people are higher and higher to the quality requirement of life, it is often necessary to particle into
The certain detection of row, including its size and property.Such as domestic water, the quality of water quality can be learnt by detecting, in addition, greatly
Flue dust problem in gas is all drastically influencing people's lives including the haze problem got worse in recent years.If energy
It is enough that these particles are detected, its size and property are analyzed, corresponding solution can be also found, promote people energetically
Quality of life.
The method of detection of particles size has very much, including sieve method, sedimentation, air permeability method, image method, laser method, resistance
Method, electron microscopy and supercritical ultrasonics technology etc., most methods all use physical principle, need to sample to pre-process and observe again, formality
Complexity, speed are slower.Wherein, optical means especially laser scattering method, because it is not required to prepare sample, and speed is fast, distance is remote,
High sensitivity, measurement range are big, are increasingly valued by people.But its shortcomings that be disturbed by ambient light it is larger, because
This limits its application range.Though this also makes in addition, it is that laser scattering method can survey particle size but cannot measure for what substance
Its application is very restricted.
Summary of the invention
Aiming at the problems existing in the prior art, the invention proposes one kind is added Raman channel in laser light scattering system
With fluorescence channel and system that triple channel is fused together, which can both survey particle size or survey particle properties.
The invention discloses the triple channel emerging systems of a kind of real-time detection particle size and property, including laser beam, column
Face microscope group, reflecting mirror, beam splitting chip are several, varifocus objective, particle to be measured, optical filter is several, lens are several, laser camera, light
Fine, Raman spectrometer and Fluorescence Spectrometer and notebook；The laser beam is after cylinder microscope group beam-expanding collimation by the first beam splitting chip
The reflection of center sub-fraction, the laser after reflection are focused on particle to be measured by varifocus objective, collide, touch with particle to be measured
It hits and causes laser light scattering, and generate the Raman light and fluorescence being excited；By the laser of the first beam splitting chip other parts and pass through
The Raman light and fluorescence of entire beam splitting chip, are respectively formed three scattering laser, Raman light and fluorescence channels；In scattering laser channel
In, it is collected after optical filter and lens by laser camera by the laser that the second beam splitting chip reflects, for measuring particle
Size and concentration；In Raman optical channel, another beam splitting chip (third point is encountered by the Raman light that the second beam splitting chip penetrates again
Beam piece) it is reflected, the Raman light reflected enters drawing through lens and fiber optic bundle again after filtering off remaining laser through long pass filter
Graceful spectrometer, for measuring the property of intended particle；In fluorescence channel, the fluorescence that is penetrated by third beam splitting chip through optical filter and
Enter Fluorescence Spectrometer after lens and fiber optic bundle, for further measuring the property of particle.
Further, the triple channel emerging system further includes notebook, the scattering laser, Raman light and fluorescence etc. three
Kind of light is all generated from same target, their signal be it is relevant, they are fused together and carries out interpretation with notebook.
Further, the laser beam is UV laser beam, and the diameter of the UV laser beam is 2.5mm, wavelength 532
Or 266nm.
Further, the cylinder microscope group is 1, and the beam splitting chip is 3, and the optical filter is 3, and the lens are
3.
Further, wherein the center sub-fraction of the first beam splitting chip is coated with the narrow of be all-trans laser but saturating Raman light and fluorescence
Band deielectric-coating, other regions of the beam splitting chip are then the quartz glass for being coated with anti-reflection film, saturating laser, Raman light and fluorescence.
As a kind of concrete scheme, the particle to be measured is particle in water, and particle is located across the stream of glass container in water
In water.
As another concrete scheme, the particle to be measured is haze, stack effluents etc..
The invention also discloses the triple channel emerging systems of a kind of real-time detection particle size and property, and the system is by dividing
Beam piece reflects respectively or transmission laser, Raman light and fluorescence, is formed and collects three laser, Raman light and fluorescence channels；It is transmiting
In laser channeling, the laser of transmission is collected after optical filter and lens by laser camera again, for measuring particle
Size and concentration；In Raman optical channel, the Raman light that is reflected by third beam splitting chip remaining laser is filtered off through optical filter after again
Enter Raman spectrometer through lens and fiber optic bundle, for measuring the property of intended particle；In fluorescence channel, by third beam splitting chip
The fluorescence of transmission enters Fluorescence Spectrometer after optical filter and lens and fiber optic bundle, for further measuring the property of particle.
Further, the laser beam is the laser of wavelength 532nm or 266nm, and the particle to be measured is particle in water, water
Middle particle is located across in the flowing water of glass container.
Further, the cylinder microscope group is 1, and the varifocus objective is 1, and the beam splitting chip is 3, the optical filtering
Piece be 3, it is described relaying and at spectrum lens be 3, the laser camera be 1, the spectrometer be 2, the notes
This is 1, but can slightly be changed.
Compared with prior art, the beneficial effects of the present invention are:
(1) detection speed is fast.As long as using time several seconds of this system detection water quality, and it was super to use traditional method to need
Spend a few houres.
(2) it does not need to sample, does not need to contact yet, do not add any reagent, therefore not will cause secondary pollution yet.
(3) can detection of particles size, also can detection of particles property.
(4) if with 266nm, not by the interference of environment light and sunlight.
(5) far measuring distance, high sensitivity.
(6) measurement dynamic range is big, and measurable particle size can be from 0.02 μm to 2000 μm.
Detailed description of the invention
Fig. 1 is scattering laser, Raman light provided by the embodiment of the present invention, fluorescence triple channel water quality measurement system.
Fig. 2 is laser light blockage method, Raman light provided by the embodiment of the present invention, fluorescence triple channel water quality measurement system.
Specific embodiment
Below in conjunction with attached drawing and specific embodiment, the present invention will be described in detail, specific embodiment therein and explanation
Only it is used to explain the present invention, but not as a limitation of the invention.
As shown in Figure 1, a specific embodiment of the invention provides a kind of scattering laser, Raman light, fluorescence triple channel
Water quality measurement system.In this specific embodiment, the triple channel for disclosing a kind of real-time detection water quality particle size and property is melted
Collaboration system, including laser beam 10, cylinder microscope group 20, steering reflection mirror 30, the first beam splitting chip foveal reflex region 40, the first beam splitting
Piece 50, varifocus objective 60, flowing water 70, particle to be measured 80, glass container 90, the second beam splitting chip 100, optical filter 110, lens 120,
Laser camera 130, third beam splitting chip 140, long pass filter 150, lens 160, fiber optic bundle 170, Raman spectrometer 180, filter
Mating plate 190, lens 200, fiber optic bundle 210, Fluorescence Spectrometer 220 and notebook 230, the laser beam 10 expand through cylinder microscope group 20
It is totally reflected through reflecting mirror 30 by the foveal reflex region 40 of the first beam splitting chip 50 after beam collimation, the laser after reflection is by varifocus objective
60 focus on the glass container 90 of flowing water 70, collide with particle 80 to be measured therein, and collision causes laser light scattering, and
Generate the Raman light and fluorescence being excited；First beam splitting chip penetrates laser, entire first beam splitting except excentral other parts
Piece transmission Raman light and fluorescence are respectively formed three scattering laser, Raman light and fluorescence channels；In scattering laser channel, quilt
The laser of second beam splitting chip 100 reflection is collected after optical filter 110 and lens 120 by laser camera 130, obtains not
Same angle of scattering and signal strength is used to measure the size and concentration of particle to be measured；The Raman light penetrated by the second beam splitting chip 100
Encounter third beam splitting chip 140 again with fluorescence to be separated, Raman light is reflected, and fluorescence is transmitted；In Raman channel, by
The Raman light of three beam splitting chips 140 reflection enters Raman spectrometer 180 through long pass filter 150 and lens 160 and fiber optic bundle 170,
For measuring the property of particle to be measured；In fluorescence channel, the fluorescence transmitted by third beam splitting chip 140 is through optical filter 190 and thoroughly
Enter Fluorescence Spectrometer 220 after mirror 200 and fiber optic bundle 210, for further measuring the property of particle to be measured；The scattering swashs
Three kinds of light such as light, Raman light and fluorescence all from same target generate, their signal be it is relevant, they are fused together use
Notebook 230 carries out correct interpretation.
The specific working mode of embodiment illustrated in fig. 1 is as follows: the 266nm UV laser beam or 532nm that diameter is 2.5mm
Green laser beam 10 encounters beam splitting chip 50 center one after being reflected after two 20 beam-expanding collimations of cylinder microscope group by reflecting mirror 30 is small
Part 40 is totally reflected, because region is coated with the narrowband deielectric-coating of be all-trans laser but saturating longer wavelengths of Raman light and fluorescence thus,
Other regions of beam splitting chip are then the quartz glass for applying anti-reflection film, can allow laser, Raman light and fluorescence almost 100% all-pass
Cross, this unprecedented special designing can allow laser almost 100% reflection, can also allow laser 95% above by.Laser
It is focused on the particle to be measured 80 in the glass container 90 of flowing water 70 and collided therewith by varifocus objective 60, swash because ultraviolet
Light and green laser are very strong, and the diameter of focus on light beam can also excite Raman in 1-2mm or so, therefore it may include that many diameters are
0.02 μm to 2000 μm of particle.Collision also generates the Raman light and fluorescence being excited in addition to causing back scattering.They pass through
The second beam splitting chip 100 is encountered after first beam splitting chip 50, this beam splitting chip reflection laser transmits longer Raman light and fluorescence.By
The laser of two beam splitting chips 100 reflection generated by particle 80 to be measured scattering by after optical filter 110 and lens 120 by CCD laser
Camera 130 collects the size and concentration for removing to measure particle 80 to be measured because the size of particle to be measured 80 and how much with scattering
Intensity is related with angle.After the Raman light and fluorescence of transmissive encounter third beam splitting chip 140, spectral bandwidth is Raman spectrum width
Raman light is reflected, and enters Raman spectrum through lens 160 and fiber optic bundle 170 after remaining laser is filtered off through long pass filter 150
Instrument 180 goes to measure what substance particle 80 to be measured is.The wavelength of transmission is greater than the fluorescence of Raman (generally in shortwave light area
Domain) it goes further to measure what object is target be into Fluorescence Spectrometer 220 after optical filter 190 and lens 200 and fiber optic bundle 210
Matter.Substance especially organic matter in water, their the fluorescence orders of magnitude more several than Raman light intensity, and different organic matters can generate
The fluorescence of different wave length is easy to them to be distinguished.Because these three light are all generated from same target, their letter
Number be it is relevant, can be fused together and make correct interpretation with notebook 230.
In addition, 4 powers of graceful signal and wavelength are inversely proportional, the 266nm laser of 6.5mw or the 213nm laser of 2.7mw are suitable
In the 785nm laser of 500mw, therefore 785nm laser of the Raman that generates of the 266nm laser of 75mw at least than 500mw generates
Raman is 10 times strong, along with ultraviolet Raman is not by environment light interference, separates with fluorescence, there is pre- resonance effects, signal-to-noise ratio can also be again
At least 10 times of enhancing, total is 100 times at least strong, therefore we can not have to glass container and directly laser is squeezed into and makees field in water
Measurement, because ultraviolet channel does not have the interference of sunlight.
If with time several seconds of three-channel system detection water quality, and need to be more than a few houres using traditional method, and
And the biochemical reagents for also wanting use cost relatively high, biochemical reagents will cause secondary pollution, therefore do not sample, do not contact, no
Add biological reagent, only several seconds can scene measure the property of the size of particle 80 to be measured and distribution and particle to be measured 80 and dense
The triple channel optical method of degree is undoubtedly the best way, and this method can also be used to the size and property of layering actual measurement haze particle
The discharge of matter and smokestack.
Another big advantage of this triple channel emerging system be the measurable particle size of laser scattering method from 0.02 μm to
2000 μm, dynamic range is especially big, it, which can not only survey size and size distribution, also can measure particle properties with Raman and fluorescence.By
It is directly collided with solids in laser, not only the signal of Ultraviolet Raman Spectroscopy is very strong, and not by environment light and sunlight
Interference.Also just because of being ultraviolet laser, not only not by ambient light interference, but also different organic matters can be generated with different fluorescence,
Therefore it is easy to them to be distinguished.Because three kinds of signals come from same target, the judgement made together by them will ten
Divide correct.In addition, this triple channel emerging system can not sample discontiguous remote (such as several meters to several hundred rice) directly
Measurement, this is also that method for distinguishing can not be accomplished.
In addition to surveying particle size with laser scattering method, also commonly uses imaging method and light blockage method carries out such work, such as Fig. 2 institute
Show, the present invention provides the triple channel emerging systems of another real-time detection particle size and property.By 532nm green laser
The laser that 210 (transmitance is higher in water for this laser) issue shines beam splitting chip at directional light through 211 beam-expanding collimation of cylindrical mirror
On 212, the anti-longer wavelengths of Raman light of its saturating laser and fluorescence (the saturating Raman of the such backward-reflected laser of Fig. 1 and fluorescence can also be changed to),
Laser line focus lens 213 are irradiated in the glass container 90 of flowing water 70, there is particle of different sizes in water, because laser beam has
1-2mm may include many 0.02 μm to 2000 μm of particles.Particle can be light-blocking, and small particles gear (resistance) light is few, after lens 221
80 received signal of camera is strong, but shared picture dot number in image is few, therefore can intuitively and correctly measure particle to be measured
80 size and distribution, only dynamic range is limited and cannot measure the property of particle 80 to be measured, we add it thus
Raman and fluorescence become triple channel.As shown in Fig. 2, laser collides the Raman of particle to be measured generation after 80s and fluorescence is scattered back point
Beam piece 212 simultaneously encounters second piece of beam splitting chip 231, and the shorter Raman light of wavelength is reflected, and controls through long pass filter 246 remaining sharp
It is converged on slit 242 after light by relay lens 241, is then collimated into directional light by the first one-tenth spectrum lens 243 and is mapped to grating 244
Make dispersion, is finally collected on back-illuminated CCD or CMOS linear array or planar array detector 240 by the second one-tenth spectrum lens 245 and goes out Raman light
Spectrum.Enter Fluorescence Spectrometer 230 through optical filter 232 and lens 233 through the fluorescence of beam splitting chip 231.We do not use up herein
Fine Coupler slot but direct-coupling, optical energy loss greatly reduce, we are to grating without the reflecting mirror of F/4 and with F/2's
Lens, luminous flux increase by 4 times, and this new design makes overall gain at least and can be improved 10 times.Other principles and effect have above
Narration is not repeated herein.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to restrict the invention, all in essence of the invention
Made any modification, equivalent replacement and improvement etc., should be included in protection scope of the present invention within mind and spirit
Within.
Claims (10)
1. the triple channel emerging system of a kind of real-time detection particle size and property, including a laser beam, a cylinder microscope group, one are instead
Penetrate several mirror, an at least beam splitting chip, a varifocus objective, a particle to be measured, an at least optical filter, an at least lens, a laser shine
Camera, an optical fiber, a Raman spectrometer and with a Fluorescence Spectrometer, it is characterised in that: the laser beam is expanded through cylinder microscope group
It is reflected after collimation by the reflecting mirror, the laser after reflection is focused on the particle to be measured by the varifocus objective, waits for micrometer with this
Grain collides, and collision causes laser light scattering, and generates the Raman light and a fluorescence being excited；It should by beam splitting chip reflection
Laser transmits the Raman light and the fluorescence, is respectively formed three scattering laser, the Raman light and the fluorescence channels；It is scattered at this
It penetrates in laser channeling, is gathered up after the optical filter and the lens by the laser camera by the laser that the beam splitting chip reflects
Come, for measuring the size and concentration of the particle to be measured；In the Raman optical channel, the Raman light penetrated by the beam splitting chip is again
Secondary to be reflected by another beam splitting chip, the Raman light reflected is after optical filter filters off the laser of remnants again through the lens
Enter the Raman spectrometer with the optical fiber, for measuring the property of the particle to be measured；It is saturating by the beam splitting chip in the fluorescence channel
The fluorescence crossed is transmitted again by another beam splitting chip, and the fluorescence being transmitted is through optical filter and the lens and the optical fiber
Enter the Fluorescence Spectrometer afterwards, for further measuring the physical property of the particle to be measured.
2. the triple channel emerging system of a kind of real-time detection particle size and property according to claim 1, feature exist
In: it also wraps one and includes notebook, three kinds of light such as the scattering laser, the Raman light and the fluorescence are all generated from same target, they
Signal be it is relevant, they are fused together and carries out interpretation with the notebook.
3. the triple channel emerging system of a kind of real-time detection particle size and property according to claim 2, feature exist
In: the laser beam is UV laser beam, and the diameter of the UV laser beam is 2.5mm, and wavelength is 532nm or 266nm.
4. the triple channel emerging system of a kind of real-time detection particle size and property according to claim 3, feature exist
In: the cylinder collimation microscope group is 1, and the varifocus objective is 1, and the beam splitting chip is 3, and the optical filter is 3, institute
Stating relay lens is 3, and the laser camera is 1, and the spectrometer is 2, and the notebook is 1.
5. the triple channel emerging system of a kind of real-time detection particle size and property according to claim 4, feature exist
In: the center sub-fraction of one of them beam splitting chip is coated with the be all-trans laser but a narrowband of the saturating Raman light and fluorescence Jie
Plasma membrane, other regions of the beam splitting chip are then the quartz glass for being coated with anti-reflection film.
6. the triple channel emerging system of a kind of real-time detection particle size and property according to claim 5, feature exist
In: the particle to be measured is particle in water, and particle is located across in the flowing water of a glass container in water.
7. the triple channel emerging system of a kind of real-time detection particle size and property according to claim 5, feature exist
In: the particle to be measured is haze, stack effluents etc..
8. the triple channel emerging system of a kind of real-time detection particle size and property according to claim 1, feature exist
In: the laser reflected by the beam splitting chip center sub-fraction is returned after focusing on the particle to be measured by the Particle Scattering to be measured should
Therefore beam splitting chip can transmit the laser, the Raman light and the fluorescence through the rest part of the beam splitting chip, be respectively formed this thoroughly
Penetrate three laser, the Raman light and the fluorescence channels；In the laser channeling, by the Particle Scattering to be measured and the beam splitting chip is penetrated
The laser reflected again by one second beam splitting chip, collected after the optical filter and the lens by the laser camera,
It is used to measure the size and concentration of the particle to be measured according to the size of angle of scattering and signal strength；In the Raman optical channel, thoroughly
Cross second beam splitting chip but after the Raman light that is reflected by a third beam splitting chip filters off remaining laser through the long pass filter again
Enter the Raman spectrometer through the lens and the fiber optic bundle, for measuring the property of the particle to be measured；In the fluorescence channel, quilt
The fluorescence of third beam splitting chip transmission enters the Fluorescence Spectrometer after optical filter and the lens and the fiber optic bundle, for into
The property of the particle to be measured is determined in one pacing.
9. the triple channel emerging system of a kind of real-time detection particle size and property according to claim 8, feature exist
In: the wavelength of the laser beam is 532nm (easily permeable) or 266nm (Raman is strong), and the particle to be measured is particle in water, the water
Middle particle is located across in the flowing water of glass container.
10. the triple channel emerging system of a kind of real-time detection particle size and property according to claim 9, feature exist
In: the collimating cylindrical objective lens are 1, and the varifocus objective is 1, and the beam splitting chip is 3, and the optical filter is 3,
It is described relaying and at spectrum lens be 3, the laser camera be 1, the spectrometer be 2, the notebook be 1.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114002146A (en) * | 2021-06-02 | 2022-02-01 | 杭州赫太克科技有限公司 | Three-probe patrol instrument |
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