CN109556837B - Method for measuring sensitivity of photoelectric cathode of image intensifier - Google Patents
Method for measuring sensitivity of photoelectric cathode of image intensifier Download PDFInfo
- Publication number
- CN109556837B CN109556837B CN201811390161.0A CN201811390161A CN109556837B CN 109556837 B CN109556837 B CN 109556837B CN 201811390161 A CN201811390161 A CN 201811390161A CN 109556837 B CN109556837 B CN 109556837B
- Authority
- CN
- China
- Prior art keywords
- image intensifier
- cathode
- sensitivity
- photocathode
- fluorescence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention belongs to the technical field of low-light level image intensifiers, and relates to a method for measuring the sensitivity of a photocathode of an image intensifier, which comprises the following steps: (1) irradiating a photocathode of an image intensifier with laser, wherein the image intensifier does not apply working voltage; (2) use ofThe photomultiplier receives the fluorescence emitted by the photocathode and measures the intensity of the fluorescence; (3) the cathode sensitivity of the image intensifier is calculated using the following formula:
wherein R is the cathode sensitivity of the image intensifier0Tube core sensitivity of the image intensifier, I is fluorescence intensity of cathode of the image intensifier, I0The cathode fluorescence intensity of the image intensifier die. The method has the advantages of simple measurement method, convenient operation and high measurement precision, and solves a series of problems existing in the prior production, acceptance and quality control processes of the image intensifier, thereby improving the production efficiency of the image intensifier.
Description
Technical Field
The invention belongs to the technical field of low-light-level image intensifiers, and relates to a method for measuring the sensitivity of a photocathode of an image intensifier.
Background
The low-light level image intensifier (hereinafter referred to as image intensifier) is the core of the low-light level night vision device, and the performance of the low-light level image intensifier determines the quality of the low-light level night vision device. The image intensifier consists of a tube core and a special high-voltage power supply, wherein the tube core consists of a cathode glass window 1, a photocathode 2, a micro-channel plate (MCP)3, a fluorescent screen 4 and a fiber output window 5. As shown in fig. 1, the cathode glass window 1 is used for supporting a photocathode film layer, the photocathode 2 is used for weak light imaging, the microchannel plate 3 is used for electron amplification, the fluorescent screen 4 is used for image display, and the optical fiber output window 5 is used for supporting the fluorescent screen 4. The photocathode film layer is a film layer provided at the interface between the cathode glass window 1 and the photocathode 2.
The voltage applied to the photocathode 2 is-1000V, the voltage applied to the input end of the microchannel plate 3 is-800V, the voltage applied to the output end of the microchannel plate 3 is 0V, the voltage applied to the fluorescent screen 4 is +6000V, when a weak light image is incident on the image intensifier, incident light penetrates through the cathode glass window 1 to reach the photocathode 2 and excites photoelectrons, and the photoelectrons move towards the input end of the microchannel plate 3 and enter the microchannel plate 3 for multiplication under the action of the voltage of 200V applied between the photocathode 2 and the microchannel plate 3. After the multiplied photoelectrons are output from the output end of the microchannel plate 3, the multiplied photoelectrons move towards the fluorescent screen 4 under the action of 6000V voltage between the microchannel plate 3 and the fluorescent screen 4 and bombard the fluorescent screen 4 to emit light, thereby realizing the enhancement of the weak light image.
The main performance parameters of the image intensifier include gain, resolution and signal-to-noise ratio. The gain represents the amplification capability of the image intensifier on weak light, the resolution represents the resolution capability of the image intensifier on image details, and the signal-to-noise ratio represents the suppression capability of the image intensifier on noise. Among the main performance parameters of the image intensifier, gain is one of the most important performance parameters. The image intensifier gain is proportional to the product of cathode sensitivity, microchannel plate gain and luminescent screen luminous efficiency, as follows:
where G is the gain of the image intensifier, R is the cathode sensitivity, η is the screen luminous efficiency, V is the screen voltage, and m is the geometric magnification of the image intensifier.
In the manufacturing process of the image intensifier, the tube core and the special high-voltage power supply are manufactured and tested respectively, and the qualified tube core and the special high-voltage power supply are integrated and packaged together to form the complete image intensifier. The integrated package of the die and the dedicated high voltage power supply is bonded, sealed and fixed in a plastic housing using silicone rubber. After the image intensifier is integrated and packaged, various performance parameters of the image intensifier, such as gain, resolution, signal-to-noise ratio, equivalent background illumination and the like, need to be tested, and the image intensifier can leave a factory after being qualified. However, in the performance parameter testing process of the image intensifier, the cathode sensitivity, the microchannel plate gain and the luminescent efficiency of the fluorescent screen cannot be measured in the image intensifier after the encapsulation is finished, and can only be measured on a tube core before the encapsulation, which brings a series of problems to the production, acceptance and quality control of the image intensifier. For example, in the production process of the image intensifier, after the tube core is integrated and packaged with a special high-voltage power supply, various tests such as high and low temperature, damp and hot, aging, service life and the like are carried out. After these experiments, if the gain of the image intensifier is reduced, it is possible that the cathode sensitivity of the die, the microchannel plate gain, the luminescent efficiency of the phosphor screen, or the phosphor screen voltage is reduced according to equation (1). Since the image intensifier screen luminous efficiency, screen voltage and intensifier geometric magnification do not vary, the only cause of image intensifier gain reduction may be cathode sensitivity or microchannel plate gain reduction. If the gain of the microchannel plate is reduced, it is only necessary to adjust the voltage of the microchannel plate once, but if the cathode sensitivity of the image intensifier is reduced, this means that the cathode sensitivity of the image intensifier is unstable, and the image intensifier is defective.
Because the image intensifier can not measure the cathode sensitivity and the microchannel plate gain after the integrated packaging is finished, when the gain of the image intensifier is reduced, the image intensifier can only be unpacked, a tube core and a special high-voltage power supply are separated, the cathode sensitivity of the tube core and the microchannel plate gain are respectively tested, and then whether the photoelectric cathode is in a problem or the microchannel plate is in a problem is judged. This process is time consuming and labor intensive because it involves unsealing the image intensifier.
Disclosure of Invention
In order to solve the problem that the cathode sensitivity of the image intensifier cannot be tested after the encapsulation is finished, the invention provides a method for measuring the photocathode sensitivity of the image intensifier, and the problem of measuring the cathode sensitivity of the image intensifier is effectively solved.
The invention adopts the following design structure and design scheme: a method of measuring the sensitivity of an image intensifier photocathode, the method comprising the steps of: step 1: illuminating a photocathode (2) of an image intensifier with laser light, while the image intensifier does not apply an operating voltage step 2: using a photomultiplier tube to receive fluorescence emitted by the photocathode (2) and measuring the intensity of the fluorescence; and step 3: the cathode sensitivity of the image intensifier is calculated using the following formula:
wherein R is the cathode sensitivity of the image intensifier0Die sensitivity for image intensifier, I is imageFluorescence intensity of the intensifier cathode, I0The cathode fluorescence intensity of the image intensifier die.
Further, the laser is a near-infrared laser.
Further, the near-infrared laser is near-infrared laser with the wavelength range of 800 nm-950 nm.
Further, die sensitivity R of the image intensifier0And cathode fluorescence intensity I of image intensifier tube core0Testing and recording is performed prior to die integration packaging like the booster.
Further, the photomultiplier is a near-infrared photomultiplier.
Furthermore, the near-infrared laser is focused by the half-reflecting mirror (7) and the objective lens (8) and then projected onto the photocathode (2), and the fluorescence emitted by the photocathode (2) is focused on the near-infrared photomultiplier (11) after passing through the objective lens (8), the half-reflecting mirror (7), the eyepiece lens (9) and the groove filter (10).
The invention principle is as follows: the photocathode emits fluorescence under the irradiation of laser, and for the same image intensifier, the intensity of the fluorescence emitted by the image intensifier is in direct proportion to the cathode sensitivity of the image intensifier, so that the change of the sensitivity of the photocathode can be reflected on the change of the fluorescence intensity. The method is adopted to measure the cathode sensitivity of an image intensifier, and the tube core of the image intensifier has sensitivity R to the cathode of the tube core of the image intensifier before integrated packagingoAnd the intensity I of the fluorescence of the image intensifier tube coreoAnd testing and recording the measurement data, and when measuring the sensitivity of the photocathode of the image intensifier later, only measuring the fluorescence intensity of the photocathode of the image intensifier, and calculating the sensitivity of the cathode of the image intensifier.
The invention adopts near infrared light of 800 nm-950 nm to excite the fluorescence of the polybase cathode, because the long-wave absorption threshold of the polybase cathode is 950nm, and the wavelength of the fluorescence of the polybase cathode is larger than that of the excitation light and usually exceeds 950 nm. Therefore, when the near infrared light in the wavelength range is adopted to excite the fluorescence of the polybase cathode, the excited near infrared light has little or no absorption to the polybase cathode, so that the fluorescence signal is strong and easy to detect. On the contrary, if short-wave light, such as 505nm laser, is used to excite fluorescence, the fluorescence emitted from the cathode is about 700nm, so the fluorescence is absorbed by the cathode, and the fluorescence signal is rather weak, which is not good for signal detection. However, if fluorescence of the polybase cathode is excited by light having a wavelength of more than 950nm, the polybase cathode does not absorb light having a wavelength of more than 950nm and thus does not generate fluorescence, and therefore, the optimal fluorescence excitation light wavelength for the cathode is in the range of 800nm to 950 nm.
Compared with the prior art, the invention has the following beneficial effects: the method for measuring the sensitivity of the photocathode of the image intensifier, provided by the invention, overcomes the technical problems in the prior art, effectively solves the problem of measuring the sensitivity of the cathode of the image intensifier, is simple in measuring method, convenient to operate and high in measuring precision, and solves a series of problems existing in the processes of production, acceptance and quality control of the image intensifier, thereby improving the production efficiency of the image intensifier.
Drawings
Fig. 1 is a schematic diagram of a prior art image intensifier configuration of the method of the present invention.
FIG. 2 is a schematic diagram of the image intensifier photocathode sensitivity measurement of the method of the present invention.
Wherein the figure is marked as 1-cathode glass window; 2-a photocathode; 3-microchannel plate; 4-a fluorescent screen; 5-fiber output window; 6-near infrared semiconductor laser; 7-a half-mirror; 8-an objective lens; 9-ocular lens; 10-a trench filter; 11-near infrared photomultiplier tube; 12-photomultiplier tube power supply; 13-sample stage.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
The method for measuring the sensitivity of the photocathode of the image intensifier adopts the measuring device shown in figure 2 to carry out measurement. According to the light projection direction, the near infrared semiconductor laser 6 emits near infrared semiconductor laser light to irradiate the half mirror 7, an objective lens 8 is arranged below the half mirror 7, and meanwhile, the objective lens 8 is arranged above an image intensifier, and the image intensifier is placed on a sample platform 13. An eyepiece 9, a trench filter 10, a near-infrared photomultiplier 11, and a photomultiplier power supply 12 are provided in this order above the half mirror 7.
A beam of light emitted by the near-infrared semiconductor laser 6 is focused by the half-reflecting mirror 7 and the objective lens 8 and then projected onto the photocathode 2, fluorescence emitted by the photocathode 2 is focused on the near-infrared photomultiplier 11 by the eyepiece 9 after passing through the objective lens 8, the half-reflecting mirror 7 and the groove filter 10, and output current of the near-infrared photomultiplier 11 is amplified and finally displayed on a display. The trench filter 10 functions to filter out reflected light of a wavelength emitted by the near-infrared semiconductor laser 6, so that the near-infrared photomultiplier tube 11 receives only fluorescence emitted by the photocathode 2.
Example 1
An image intensifier die is selected, numbered 5210 #. Before 5210# image intensifier tube core integrated package, tube core sensitivity R of the image intensifier is respectively measured0And the cathode fluorescence intensity I of the image intensifier tube core0. Measurement of cathode fluorescence intensity I of 5210# image intensifier tube core0When the laser is turned on, the near-infrared semiconductor laser 6 and the photomultiplier tube power supply 12 are turned on to operate stably. The adopted near-infrared semiconductor laser 6 is a 808nm single-mode round spot laser, and the adopted photomultiplier is a near-infrared photomultiplier 11.
An optical power meter is placed on a sample stage 13, then an objective lens 8 is focused on the input end face of the power meter, and simultaneously the output power of the near-infrared semiconductor laser 6 is adjusted so that the output power of the near-infrared semiconductor laser 6 is 45 mW. The optical power meter is removed and the 5210# image intensifier die is placed on the sample stage 13 with its photocathode 2 end facing up towards the objective lens 8. Focusing the objective lens 8 on the photocathode surface of the tube core of the image intensifier, opening the light shielding plate of the near infrared photomultiplier 11, and measuring the intensity I of the fluorescence0。
Measuring the cathode fluorescence intensity I of the 5210# image intensifier tube core0Later, the 5210# image intensifier die is integrated with a dedicated high voltage power supply to form a complete image intensifier for the image intensifierThe gain of the image intensifier is adjusted, and parameters such as the gain, the equivalent background illumination, the resolution and the like of the image intensifier are measured. The gain value measured was 9800cd/m2Lx, which is the initial value.
Then, high and low temperature and aging tests are sequentially carried out. The gain of the image intensifier is measured again after the experiment is completed. The measurement results showed that the gain of the image intensifier was 7690cd/m2Lx, which was lower than the initial value. The image intensifier is placed on a sample stage 13, the photocathode 2 is directed upward to the objective lens 8, the objective lens 8 is focused on the photocathode surface of the image intensifier, the light shielding plate of the near-infrared photomultiplier tube 11 is opened, the fluorescence intensity I of the cathode of the image intensifier is measured again, and the measurement data are shown in table 1.
Table 1 image intensifier test data in example 1
| Performance parameter | R0(μA/lm) | I0(Counts) | I(Counts) |
| Measured value | 847 | 1175 | 1183 |
As can be seen from the measured data, the fluorescence intensity I of the cathode of the image intensifier is 1183, and the fluorescence intensity I of the cathode of the 5210# image intensifier tube core01175 and the initial value of the cathode sensitivity is 847 muA/lm, the cathode sensitivity of the image intensifier is
There is substantially no change from the initial value.
This shows that the reason for the gain reduction of the image intensifier after the tests of high and low temperature is not the sensitivity reduction of the photocathode, but the gain reduction of the microchannel plate, so the image intensifier can be shipped only by adjusting the gain of the image intensifier again without being unpacked.
Example 2
An image intensifier die is selected, numbered 5130 #. Before 5130# image intensifier tube core integrated package, tube core sensitivity R of the image intensifier is respectively measured0And the cathode fluorescence intensity I of the image intensifier tube core0. Measuring the cathode fluorescence intensity I of 5130# image intensifier tube core0When the laser is turned on, the near-infrared semiconductor laser 6 and the photomultiplier tube power supply 12 are turned on to operate stably. The adopted near-infrared semiconductor laser 6 is a 808nm single-mode round spot laser, and the adopted photomultiplier is a near-infrared photomultiplier 11.
An optical power meter is placed on a sample stage 13, then an objective lens 8 is focused on the input end face of the power meter, and simultaneously the output power of the near-infrared semiconductor laser 6 is adjusted so that the output power of the near-infrared semiconductor laser 6 is 45 mW. The optical power meter is removed and the 5130# image intensifier tube core is placed on the sample stage 13 with its photocathode 2 end facing up towards the objective lens 8. Focusing the objective lens 8 on the photocathode surface of the tube core of the image intensifier, opening the light shielding plate of the near infrared photomultiplier 11, and measuring the intensity I of the fluorescence0。
After the tube core of the 5130# image intensifier is measured, the fluorescence intensity I of the cathode0And then, a 5130# image intensifier tube core and a special high-voltage power supply are integrated together to form a complete image intensifier, the gain of the image intensifier is adjusted, and parameters such as the gain, the equivalent background illumination, the resolution and the like of the image intensifier are measured. The gain value measured was 9800cd/m2Lx, which is the initial value.
Then, high and low temperature and aging tests are sequentially carried out. The gain of the image intensifier is measured again after the experiment is completed. The measurement results showed that the gain of the image intensifier was 7690cd/m2Lx, which was lower than the initial value. The image intensifier is placed on a sample stage 13, the photocathode 2 is directed upward to the objective lens 8, the objective lens 8 is focused on the photocathode surface of the image intensifier, the light shielding plate of the near-infrared photomultiplier tube 11 is opened, the fluorescence intensity I of the cathode of the image intensifier is measured again, and the measurement data are shown in table 2.
Table 2 image intensifier test data in example 2
| Performance parameter | Ro(μA/lm) | Io(Counts) | I(Counts) |
| Measured value | 797 | 1211 | 992 |
As can be seen from the measured data, the fluorescence intensity I of the image intensifier is 992, and the fluorescence intensity I of the 5130# image intensifier tube core01211% of the total image area, and an initial cathode sensitivity of 797 muA/lm, the cathode sensitivity of the image intensifier obtained thereby is
Is reduced compared to the initial value.
This indicates that the gain reduction of the image intensifier is caused by the decrease of the sensitivity of the photocathode after the experiments of high and low temperature, etc., and the cathode sensitivity of the image intensifier is degraded. The image intensifier is a defective product and needs to be unpacked, replaced and packaged again.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions.
Claims (3)
1. A method of measuring the sensitivity of an image intensifier photocathode, comprising the steps of:
step 1: irradiating a photocathode (2) of an image intensifier tube core by adopting near-infrared laser with the wavelength ranging from 800nm to 950nm, wherein the image intensifier tube core does not apply working voltage;
step 2: using a photomultiplier tube to receive fluorescence emitted by the photocathode (2) and measuring the intensity of the fluorescence;
and step 3: integrating the image intensifier die with a dedicated high voltage power supply to form a complete image intensifier, calculating the cathode sensitivity of the image intensifier using the following formula:R=R 0 ×(I÷I 0 ) Wherein R is the cathode sensitivity of the image intensifier0Tube core sensitivity of the image intensifier, I is fluorescence intensity of cathode of the image intensifier, I0The cathode fluorescence intensity of the image intensifier tube core;
die sensitivity R of the image intensifier0And cathode fluorescence intensity I of image intensifier tube core0Testing and recording are performed prior to die integration packaging like the booster.
2. The method of measuring the sensitivity of an image intensifier photocathode according to claim 1, wherein the photomultiplier tube is a near infrared photomultiplier tube.
3. The method for measuring the sensitivity of the photocathode of the image intensifier as recited in claim 2, characterized in that the near infrared laser is focused by the half-mirror (7) and the objective (8) and then projected onto the photocathode (2), and the fluorescence emitted by the photocathode (2) is focused on the near infrared photomultiplier (11) after passing through the objective (8), the half-mirror (7), the eyepiece (9) and the trench filter (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811390161.0A CN109556837B (en) | 2018-11-21 | 2018-11-21 | Method for measuring sensitivity of photoelectric cathode of image intensifier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811390161.0A CN109556837B (en) | 2018-11-21 | 2018-11-21 | Method for measuring sensitivity of photoelectric cathode of image intensifier |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109556837A CN109556837A (en) | 2019-04-02 |
| CN109556837B true CN109556837B (en) | 2021-08-27 |
Family
ID=65866725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811390161.0A Active CN109556837B (en) | 2018-11-21 | 2018-11-21 | Method for measuring sensitivity of photoelectric cathode of image intensifier |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109556837B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111610002B (en) * | 2020-05-27 | 2021-11-05 | 北方夜视技术股份有限公司 | Method for measuring cathode close-proximity distance of image intensifier |
| CN112798231B (en) * | 2021-01-14 | 2023-02-10 | 北方夜视技术股份有限公司 | Method for testing memory effect of micro-channel plate of low-light-level image intensifier |
| CN112880974B (en) * | 2021-01-14 | 2023-04-11 | 北方夜视技术股份有限公司 | Detection device, fixture and method for influence of MCP reflectivity on cathode sensitivity |
| CN112904103B (en) * | 2021-01-14 | 2023-08-18 | 北方夜视技术股份有限公司 | Method for measuring absorptivity and sensitivity of same polybasic photocathode |
| CN113432833B (en) * | 2021-06-15 | 2022-09-16 | 北方夜视技术股份有限公司 | Device and method for testing stability of photo-cathode of image intensifier tube after illumination |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100343655C (en) * | 2004-06-18 | 2007-10-17 | 中国科学院上海有机化学研究所 | Online self-calibration laser induced fluorescence detection method based on electric charge coupling apparatus |
| CN100439931C (en) * | 2005-11-29 | 2008-12-03 | 吉林大学 | Electro-optical detector capable of calibrating voltage |
| CN103735249B (en) * | 2013-12-27 | 2015-04-22 | 中国科学院苏州生物医学工程技术研究所 | Fluorescence detector |
| CN106403843A (en) * | 2016-12-09 | 2017-02-15 | 哈尔滨工业大学 | Contour scanning measurement device and method for large-aperture high-curvature optical element based on confocal microscopy |
| CN106646067A (en) * | 2017-01-23 | 2017-05-10 | 海南展创光电技术有限公司 | Automatic static state testing table for photomultiplier |
-
2018
- 2018-11-21 CN CN201811390161.0A patent/CN109556837B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN109556837A (en) | 2019-04-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109556837B (en) | Method for measuring sensitivity of photoelectric cathode of image intensifier | |
| CN111060516B (en) | Multi-channel in-situ detection device and method for subsurface defects of optical element | |
| US8354638B2 (en) | Electron detection device and scanning electron microscope | |
| CN109374265B (en) | Method for measuring cathode close-proximity focusing distance of super-second-generation image intensifier | |
| CN109580569A (en) | The detection device of coating slurry | |
| JPS63198251A (en) | Photoelectron multiplier tube | |
| JP2010528287A (en) | Inspection system and method for extending the detection range of an inspection system by forcing the photodetector to a non-linear region | |
| KR102014570B1 (en) | Photomultiplier tube with extended dynamic range | |
| CN109273345B (en) | Non-contact object surface charge photomultiplier amplifier | |
| EP0731488A1 (en) | Microchannel plate and photomultiplier tube | |
| US10748737B2 (en) | Electron beam generation and measurement | |
| TWI827582B (en) | System and method for photocathode illumination inspection | |
| JP7158494B2 (en) | Metrology for Organic Light Emitting Diode Fabrication Using Photoluminescence Spectroscopy | |
| JP2011138684A (en) | Transmission-type photoelectric cathode and measuring device equipped therewith | |
| US10431441B2 (en) | Reducing calibration of components in an imaging plate scanner | |
| CN112798231B (en) | Method for testing memory effect of micro-channel plate of low-light-level image intensifier | |
| CN111521889B (en) | Method for measuring noise factor of microchannel plate | |
| TW201334016A (en) | Method and system for identifying defects on substrate | |
| WO2013168488A1 (en) | Charged particle beam microscope | |
| Pollehn | Evaluation of image intensifiers | |
| JP4824527B2 (en) | Sample analyzer | |
| KR102678962B1 (en) | System and method for photomultiplier image correction | |
| CN115424912B (en) | Ultrafast scanning electron microscope system and application method thereof | |
| JP2019146338A (en) | Method of predicting life of solar cell module | |
| CN115144158A (en) | Device and method for testing optical feedback characteristic of image tube of low-light-level image intensifier |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |