CN109545805A - A kind of semiconductor chip packaging method - Google Patents
A kind of semiconductor chip packaging method Download PDFInfo
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- CN109545805A CN109545805A CN201811341259.7A CN201811341259A CN109545805A CN 109545805 A CN109545805 A CN 109545805A CN 201811341259 A CN201811341259 A CN 201811341259A CN 109545805 A CN109545805 A CN 109545805A
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- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 36
- 239000004065 semiconductor Substances 0.000 title claims abstract description 29
- 239000011241 protective layer Substances 0.000 claims abstract description 60
- 239000010410 layer Substances 0.000 claims description 133
- 229910052751 metal Inorganic materials 0.000 claims description 54
- 239000002184 metal Substances 0.000 claims description 54
- 230000004888 barrier function Effects 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000007711 solidification Methods 0.000 claims description 3
- 230000008023 solidification Effects 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 13
- 238000012856 packing Methods 0.000 description 13
- 239000011521 glass Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 239000004033 plastic Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000003292 glue Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 239000012780 transparent material Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000003999 initiator Substances 0.000 description 3
- -1 polysiloxanes Polymers 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001684 chronic effect Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000001795 light effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/1469—Assemblies, i.e. hybrid integration
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
This application discloses a kind of semiconductor chip packaging methods; the packaging method includes: offer chip; the chip includes front and back; the front of the chip is provided with photosensitive area and multiple pads around photosensitive area; the front of the chip is formed with transparent protective layer, and the transparent protective layer covers the photosensitive area and multiple pads of the chip；The back side of the chip is formed with through-hole, and multiple pads expose from the through-hole；Multiple pads of the chip are penetrated into the through-hole and circuit board electrical connection.By the above-mentioned means, the application can be improved the photosensitive effect of chip.
Description
Technical field
This application involves technical field of semiconductors, more particularly to a kind of semiconductor chip packaging method.
Background technique
Chip with photosensitive area is the highly important component part of picture pick-up device, for the photosensitive area for protecting chip, is commonly used
Packaging method include: to increase transparent glass cover board in the top of the photosensitive area of chip to protect the photosensitive area of chip.
Present inventor has found in chronic study procedure, on the one hand, due to transparent glass cover sheet thickness generally compared with
Thickness can occur refraction, reflection and energy loss etc., the photosensitive effect of chip can be made to be deteriorated when light penetrates transparent glass；It is another
Aspect, by glue connection between transparent glass cover board and chip, after using for a longer period, glue is easy to fall off, and extraneous dust is easy
Into the photosensitive area of chip, and then influence the photosensitive effect of chip.
Summary of the invention
The application can be improved the sense of chip mainly solving the technical problems that provide a kind of semiconductor chip packaging method
Light effect.
In order to solve the above technical problems, the technical solution that the application uses is: providing a kind of semiconductor chip packaging
Method, the packaging method include: offer chip, and the chip includes front and back, the front setting thoughts of the chip
Light area and multiple pads around photosensitive area, the front of the chip are formed with transparent protective layer, the transparent protective layer
Cover the photosensitive area and multiple pads of the chip；The back side of the chip is formed with through-hole, and multiple welderings
Disk exposes from the through-hole；Multiple pads of the chip are penetrated into the through-hole and circuit board electrical connection.
Wherein, the offer chip includes: offer disk, and the disk is equipped with the chip of multiple matrix arrangements, the core
Scribe line is equipped between piece, the disk includes front and the back side, front, that is, disk front of the chip, the core
The back side of piece, that is, disk back side, the front of the chip is provided with photosensitive area and the pad around photosensitive area；?
The disk front formed transparent protective layer, the transparent protective layer cover the chip the photosensitive area and the weldering
Disk；Through-hole is formed in the position that the back side of the disk corresponds to the scribe line, so as to be located at the multiple of the scribe line two sides
The pad exposes from the through-hole；The disk and transparent protective layer between the two neighboring through-hole are cut, to obtain list
Chips.
Wherein, it is described the disk front formed transparent protective layer include: the front of the disk using spin coating,
The mode of dispensing or printing forms the transparent protective layer, and solidifies the transparent protective layer.
Wherein, it is described make the transparent protective layer solidify include: by ultraviolet light irradiates or toast in the way of make it is described
Transparent protective layer solidification.
Wherein, the position that the back side in the disk corresponds to the scribe line forms through-hole, so as to be located at described draw
The pad of the chip of film trap two sides exposes from the through-hole, and before, the packaging method includes: described transparent
Substrate is arranged far from the side of the disk in protective layer；The back side of the disk is ground, so that the thickness of the disk is less than
Equal to predetermined thickness.
Wherein, the position that the back side in the disk corresponds to the scribe line forms through-hole, so as to be located at described draw
Multiple pads of film trap two sides expose from the through-hole, comprising: in the back of the disk in the way of machine cuts
The position that face corresponds to the scribe line forms the through-hole, so as to be located at multiple pads of the scribe line two sides from described
Expose in through-hole.
Wherein, back side direction size of the through-hole from the pad side to the chip is gradually increased.
Wherein, multiple pads by the chip include: in institute through the through-hole and circuit board electrical connection
It states and forms metal wiring layer again in through-hole, one end of wiring layer is electrically connected the metal with the pad of the chip again；It will
The metal other end of wiring layer and the circuit board electrical connection again.
Wherein, described that metal wiring layer again is formed in the through-hole, before, the packaging method includes: in the core
The back side of piece and the region of the through-hole form the first mask layer, and correspond to the position of the pad in first mask layer
Form the first opening；The first seed layer is formed far from the surface of the chip in first mask layer；In first seed
Layer forms the second mask layer far from the surface of the chip, and the second opening is formed on second mask layer；Described
Metal wiring layer again is formed in two openings；Remove described first of second mask layer and the metal again other than wiring layer
Seed layer.
Wherein, first seed layer for removing second mask layer and the metal again other than wiring layer,
Later, the packaging method further include: the metal again wiring layer back to the chip surface be arranged the first barrier layer, and
Third opening is formed on the first barrier layer；Soldered ball is set in the third is open, the soldered ball is electrically connected with the circuit board
It connects.
The beneficial effect of the application is: it is in contrast to the prior art, it is transparent in packaging method provided herein
Protective layer is directly to be formed in chip front side, on the one hand, which can control the thickness of transparent protective layer, relative to traditional
The mode of transparent glass is set, and the thickness of transparent protective layer is less than the thickness of transparent glass, and then can reduce light refraction, anti-
Penetrate with energy loss etc., improve the photosensitive effect of chip；On the other hand, since transparent protective layer is directly formed in chip front side,
Transparent protective layer and the probability that chip front side is detached from are lower, and then reduce the dustless requirement to use environment.
Detailed description of the invention
In order to more clearly explain the technical solutions in the embodiments of the present application, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, the drawings in the following description are only some examples of the present application, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.Wherein:
Fig. 1 is the flow diagram of one embodiment of the application semiconductor chip packaging method；
Fig. 2 is the flow diagram of mono- embodiment of step S101 in Fig. 1；
Fig. 3 is the structural schematic diagram of corresponding one embodiment of semiconductor packing device of step S201-S204 in Fig. 2；
Fig. 4 is the flow diagram of mono- embodiment of step S103 in Fig. 1；
Fig. 5 is the structural schematic diagram of corresponding one embodiment of semiconductor packing device of step S301-S308 in Fig. 4；
Fig. 6 is the structural schematic diagram of one embodiment of the application semiconductor packing device；
Fig. 7 is the structural schematic diagram of another embodiment of the application semiconductor packing device.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of embodiments of the present application, rather than whole embodiments.Based on this
Embodiment in application, those of ordinary skill in the art are obtained every other under the premise of not making creative labor
Embodiment shall fall in the protection scope of this application.
Referring to Fig. 1, Fig. 1 is the flow diagram of one embodiment of the application semiconductor chip packaging method, the encapsulation
Method includes:
S101: providing chip, and chip includes front and back, and the front of chip is provided with photosensitive area and is located at photosensitive area week
The multiple pads enclosed, the front of chip are formed with transparent protective layer, and transparent protective layer covers the photosensitive area and multiple pads of chip；
The back side of chip is formed with through-hole, and multiple pads expose from through-hole.
Specifically, the photosensitive area of chip is more part and parcel in semiconductor packing device, extraneous if photosensitive area is exposed
Particulate matter is easy to pollute photosensitive area, influences the imaging effect of photosensitive area, and therefore, carrying out protection to the photosensitive area of chip is
Very necessary.
In one embodiment, referring to Figure 2 together and Fig. 3, wherein Fig. 2 is mono- embodiment of step S101 in Fig. 1
Flow diagram, Fig. 3 be Fig. 2 in corresponding one embodiment of semiconductor packing device of step S201-S204 structural representation
Figure.Above-mentioned steps S101 is specifically included:
S201: providing disk 1, and disk 1 is equipped with the chip 10 of multiple matrix arrangements, is equipped with scribe line 12 between chip 10,
Disk 1 includes front 14 and the back side 16, and the front 14 of chip 10 is the front 14 of disk 1, and the back side 16 of chip 10 is disk 1
The back side 16, the front 14 of chip 10 are provided with photosensitive area 100 and the pad 102 around photosensitive area 100.Specific structure is as schemed
Shown in 3a.
S202: transparent protective layer 18 is formed in the front 14 of disk 1, transparent protective layer 18 covers the photosensitive area of chip 10
100 and pad 102.
Specifically, in an application scenarios, as shown in Figure 3b, transparent protective layer 18 also covers the corresponding area of scribe line 12
Domain；Certainly, in other application scenarios, transparent protective layer 18 can also be made only to cover the photosensitive area 100 and pad 102 of chip 10,
Without cover or only part covering the corresponding region of scribe line 12.
In another application scenarios, the method for forming transparent protective layer 18, which may is that, utilizes rotation in 10 front 14 of chip
The mode of painting, dispensing or printing forms transparent protective layer 18, and solidifies transparent protective layer 18, is formed using the above method transparent
The thickness of protective layer 18 can achieve micron level, relative to the mode of traditional setting transparent glass, transparent protective layer 18
Thickness is less than the thickness of transparent glass, and then can reduce light refraction, reflection and energy loss etc., improves the photosensitive of chip 10
Effect.The material of transparent protective layer 18 can be inorganic transparent material, for example, silicon nitride, silicon oxynitride etc., are also possible to organic
Transparent material, for example, polysiloxanes etc..In addition, the cured mode of transparent protective layer 18 is made to can be ultraviolet light irradiation or high
Which kind of mode is the mode of temperature baking, specifically use, and can determine according to initiator added by transparent protective layer 18 is prepared, if drawing
Hair agent is photoinitiator (for example, 2- hydroxy-2-methyl -1- phenylacetone, 1- hydroxycyclohexyl phenyl ketone etc.), then utilizes purple
The mode of outside line irradiation；If initiator is thermal initiator (for example, benzoyl peroxide etc.), in the way of high-temperature baking.
S203: at the back side of disk 1 16, the position of corresponding scribe line 12 forms through-hole 11, so as to be located at 12 two sides of scribe line
Multiple pads 102 expose from through-hole 11.
Specifically, in an application scenarios, before step S203, method provided herein further include: saturating
Substrate is arranged far from the side of chip 10 in bright protective layer 18；The back side 16 of abrasive disk 1 so that the thickness of disk 1 be less than etc.
In predetermined thickness.Specifically, side of the transparent protective layer 18 far from chip 10 can be fixed by can remove glue film etc. with substrate.
In addition, 1 thickness of disk generally directly taken from Feng Ce factory is larger, therefore in the present embodiment, need the back side one of disk 1
Side is ground, so that its thickness is less than or equal to predetermined thickness, such as predetermined thickness is 100um, the thickness of disk 1 after grinding
For 50,60,80um etc..
In another application scenarios, please refer to Fig. 3 c, the material of chip 10 is generally silicon, due to silicon electric conductivity itself compared with
Difference, therefore to achieve the purpose that pad is electrically connected with subsequent conditioning circuit plate, through-hole 11 can be formed at the back side of chip 10 16.At one
In embodiment, the state that disk 1 can first be arranged makes it have the side of pad 102 and is located below；Then in disk 1 back to pad
102 position forms through-hole 11.For example, using the mode of machine cuts in the position of the corresponding scribe line 12 in the back side of disk 1 16
It sets to form through-hole 11, so that the multiple pads 102 for being located at 12 two sides of scribe line expose from through-hole 11.Certainly in other application field
Jing Zhong can also be used other modes and form through-hole 11, and the application is not construed as limiting this.In the present embodiment, through-hole 11 is from pad
102 sides to the back side of chip 10,16 direction size is gradually increased, and multiple pads 102 expose from through-hole 11.For each weldering
For disk 102, expose from through-hole 11 in whole or in part.
S204: the disk 1 and transparent protective layer 18 between two neighboring through-hole 12 are cut, to obtain single chip 10.
Specifically, in an application scenarios, as shown in Figure 3d, the cutting modes such as plasma can be used and cut away adjacent two
Disk 1 and transparent protective layer 18 between a through-hole 12, and then obtain single chip 10.
It is after first uniformly forming transparent protective layer on disk, then to be cut into the side of single chip in above embodiment
Method in other embodiments, after disk can also being first cut into single chip, is formed one by one for single chip certainly
Transparent protective layer, the application are not construed as limiting this.
S102: the pad of chip is penetrated into through-hole and circuit board electrical connection.
Specifically, in one embodiment, above-mentioned steps S102 is specifically included: being formed metal in through-hole and is routed again
Layer, the pad electrical connection of metal wiring layer one end chip again, the other end and circuit board electrical connection of metal wiring layer again.
In an application scenarios, referring to Figure 4 together and Fig. 5, Fig. 4 be Fig. 1 in mono- embodiment of step S103 stream
Journey schematic diagram, Fig. 5 are the structural schematic diagram of corresponding one embodiment of semiconductor packing device of step S301-S308 in Fig. 4.On
Step S103 is stated to specifically include:
S301: the first mask layer 20 is formed at the back side of chip 10 16 and the region of through-hole, and in the first mask layer 20
The position of corresponding pad 102 forms the first opening 200.
Specifically, Fig. 5 a is please referred to, in one embodiment, first in the back side of chip 10 16 and through-hole (Fig. 5 a
In do not indicate) surface in region coats one layer of first mask layer 20, then first is covered by exposure development or other means
The position of the corresponding pad 102 of film layer 20 forms the first opening 200, so that pad 102 exposes.In an application scenarios, first
The material of mask layer 20 is that photoresist, silica, silicon nitride, amorphous carbon are one such or several.
S302: the first seed layer 22 is formed far from the surface of chip 10 in the first mask layer 20.
Specifically, Fig. 5 b is please referred to, the material of the first seed layer 22 is that titanium, aluminium, copper, gold, silver are one such or several
Mixture, formed the first seed layer 22 technique be sputtering technology or physical gas-phase deposition.
S303: the second mask layer 24 is formed far from the surface of chip 10 in the first seed layer 22, and in the second mask layer 24
It is upper to form the second opening 240.
Specifically, Fig. 5 c is please referred to, in one embodiment, first on the first surface of the seed layer 22 far from chip 10
One layer of second mask layer 24 is coated, the second opening is then formed in the second mask layer 24 by exposure development or other means
240, the second opening 240 is located at 102 top of pad.In an application scenarios, the material of the second mask layer 24 is photoresist, oxygen
SiClx, silicon nitride, amorphous carbon are one such or several.
S304: metal wiring layer 26 again are formed in the second opening 240.
Specifically, Fig. 5 d is please referred to, in one embodiment, can use electroplating technology shape in the second opening 260
At metal wiring layer 26 again, the material of metal wiring layer 26 again is copper or other suitable metals.In the present embodiment, metal
The height of wiring layer 26 is identical as the depth of the second opening 240 again, in other embodiments, the height of metal wiring layer 26 again
It may be lower than the depth of the second opening 240.
S305: the second mask layer 24 of removal and metal the first seed layer 22 other than wiring layer 26 again.
Specifically, Fig. 5 e is please referred to, in one embodiment, can be removed the second mask layer 24 first with photoetching process
It removes, the first seed layer 22 exposed；Then the part the exposed using wet-etching technology or dry etch process removal
One seed layer 22 only retains the first seed layer 22 below metal again wiring layer 26, wherein pad 102, the first seed layer
22, wiring layer 26 is electrically connected metal again.
It in one embodiment, can be directly by structure shown in Fig. 5 e and circuit board electrical connection；In other embodiment party
In formula, please continue to refer to Fig. 4 and Fig. 5, the mode for planting ball can also be taken to be electrically connected；Specific subsequent step is as follows:
S306: in metal, back to the surface of chip 10 the first barrier layer 28 is arranged in wiring layer 26 again, and on the first barrier layer
Third opening 280 is formed on 28；
Specifically, Fig. 5 f is please referred to, the material on the first barrier layer 28 has insulation characterisitic in one embodiment can
To form third opening 280 on the first barrier layer 28 in the way of photoetching or other etchings.
S307: soldered ball 21 is set in third opening 280.
Specifically, Fig. 5 g is please referred to, soldered ball 21 directly can be set in third opening 280, for example, existing using ball attachment machine
Third 280 interplantation soldered balls 21 of opening, the material of soldered ball 21 are tin or tin alloy.Wherein, soldered ball 21 and metal wiring layer 26 again
Electrical connection；In another application scenarios, the mode that ball lower metal layer can also be formed on metal again wiring layer 26 is planted
Ball, the application are not construed as limiting this.For example, can the first barrier layer far from chip surface formed second of sublayer, second
Sublayer can be formed using the method for sputtering: for example, being initially formed one layer of titanium layer, then being sputtered one layer of layers of copper on titanium layer and formed；?
Second of sublayer forms third mask layer far from the surface of chip, and corresponds to the position that third is open on third mask layer and formed
4th opening；Ball lower metal layer is formed in the 4th opening, the material of ball lower metal layer can be metallic copper, can be using plating
Mode formed；Remove corresponding second of sublayer below third mask layer and third mask layer；Position is corresponded in ball lower metal layer
Formation soldered ball is set, soldered ball can be fallen on to the position of corresponding ball lower metal layer by ball attachment machine, is formed using reflux；Its
In, wiring layer is electrically connected again for soldered ball, ball lower metal layer, second of sublayer, metal.
S308: soldered ball and circuit board electrical connection.
Specifically, Fig. 5 h is please referred to, is electrically connected soldered ball 21 with circuit board 23 using the mode of heat reflux.By above-mentioned
Mode, so that chip 10 is electrically connected with circuit board 23.
It in another embodiment, is the waterproof performance for enhancing semiconductor packing device, after above-mentioned steps S102,
Method provided herein further include: by the area filling plastic packaging material between transparent protective layer and circuit board, to form plastic packaging
Layer, plastic packaging layer do not cover the corresponding transparent protective layer of photosensitive area of chip.For example, can be in transparent protective layer far from circuit board one
Side setting protection glue film, to control the height of plastic packaging layer, so that the distance between plastic packaging layer and circuit board are equal to or less than thoroughly
The distance between bright protective layer and circuit board.
The semiconductor chip packaging device using acquisition prepared by above-mentioned semiconductor chip packaging method is done into one below
Walk explanation.
Referring to Fig. 6, Fig. 6 is the structural schematic diagram of one embodiment of the application semiconductor packing device.The semiconductor package
Filling device includes:
Chip 10, chip 10 include front 14 and the back side 16, and the front 14 of chip 10 is provided with photosensitive area 100 and is located at sense
Multiple pads 102 around light area 100；The position of the corresponding multiple pads 102 of chip 10 is provided with through-hole (not indicating), chip 10
Multiple pads 102 expose from through-hole, for single pad 102, expose from through-hole in whole or in part；One
In a application scenarios, through-hole can be formed by modes such as machine cuts, and through-hole is from 102 side of pad to the back side of chip 10 16
Direction size is gradually increased.
Transparent protective layer 18, positioned at the front 14 of chip 10 and the photosensitive area 100 and pad 102 of covering chip 10；Specifically
Ground, transparent protective layer 18 can be formed by the mode of spin coating, dispensing or printing, and transparent protective layer 18 is through ultraviolet irradiation or baking
Mode solidify after material, for example, its material can be inorganic transparent material (for example, silicon nitride, silicon oxynitride etc.) or
Organic transparent material (for example, polysiloxanes etc.), the application is not construed as limiting this.
Circuit board 23 is electrically connected with the pad 102 of chip 10 through through-hole.
In one embodiment, metal wiring layer 26 again can be introduced in semiconductor packing device, pass through metal cloth again
Line layer 26 is electrically connected chip 10 and circuit board 25.Specifically, please continue to refer to Fig. 6, semiconductor packages device provided herein
Part further includes metal wiring layer 26 again, positioned at the back side of chip 10 16 and is extended into through-hole, one end of metal wiring layer 26 again
It is electrically connected with pad 102, the other end of wiring layer 26 is electrically connected metal with circuit board 25 again.
In another embodiment, please continue to refer to Fig. 6, above-mentioned semiconductor device further include: the first mask layer 20, position
Between the back side of chip 10 16 and metal again wiring layer 26, and the position of the corresponding pad 102 of the first mask layer 20 is provided with the
One opening (not indicating)；First seed layer 22 is located at the first mask layer 20 and metal again between wiring layer 26, and pad 102, the
Wiring layer 26 is electrically connected again for one seed layer 22, metal.
In yet another embodiment, the mode of setting soldered ball 21 can also be taken to be electrically connected chip 10 with circuit board 25.
Referring to Fig. 6, semiconductor packing device provided herein further include: the first barrier layer 28 is routed again positioned at metal
26 side far from chip 10 of layer, and third opening (not indicating) is formed on the first barrier layer 28；Soldered ball 21, is opened positioned at third
In mouthful, and wiring layer 26, circuit board 23 are electrically connected again with metal.
In yet another embodiment, the mode that soldered ball is arranged in above-described embodiment can be also other, for example, passing through setting
The mode of ball lower metal layer.Specifically, referring to Fig. 7, Fig. 7 is the structure of another embodiment of the application semiconductor packing device
Schematic diagram, details are not described herein for part same with the above-mentioned embodiment.Semiconductor packages device provided in the present embodiment
Part further include: the first barrier layer 28 positioned at metal side of the wiring layer 26 far from chip 10 again, and is formed on the first barrier layer 28
There is third to be open (not indicating)；Second of sublayer 30, covering third opening, and the first barrier layer 28 is set far from chip 10
Side；Ball lower metal layer 32 is set to side of second of the sublayer 30 far from chip 10；Soldered ball 34 is set to ball lower metal layer
32 sides far from chip 10；Wherein, wiring layer 26 is electrically connected again for soldered ball 34, ball lower metal layer 32, second sublayer 30, metal
It connects.
In another embodiment, the thickness of chip 10 is less than or equal in semiconductor packing device provided herein
Predetermined thickness, predetermined thickness can for 100um etc., the thickness of chip 10 can for 50,60,80um etc..
To sum up, being in contrast to the prior art, transparent protective layer is straight in packaging method provided herein
It connects and is formed in chip front side, on the one hand, which can control the thickness of transparent protective layer, relative to traditional transparent glass of setting
The thickness of the mode of glass, transparent protective layer is less than the thickness of transparent glass, and then can reduce light refraction, reflection and energy damage
Lose etc., improve the photosensitive effect of chip；On the other hand, since transparent protective layer is directly formed in chip front side, transparent protective layer
The probability being detached from chip front side is lower, and then reduces the dustless requirement to use environment.
The foregoing is merely presently filed embodiments, are not intended to limit the scope of the patents of the application, all to utilize this
Equivalent structure or equivalent flow shift made by application specification and accompanying drawing content, it is relevant to be applied directly or indirectly in other
Technical field similarly includes in the scope of patent protection of the application.
Claims (10)
1. a kind of semiconductor chip packaging method, which is characterized in that the packaging method includes:
Chip is provided, the chip includes front and back, and the front of the chip is provided with photosensitive area and is located at photosensitive area week
The multiple pads enclosed, the front of the chip are formed with transparent protective layer, and the transparent protective layer covers the described of the chip
Photosensitive area and multiple pads；The back side of the chip is formed with through-hole, and multiple pads expose from the through-hole；
Multiple pads of the chip are penetrated into the through-hole and circuit board electrical connection.
2. packaging method according to claim 1, which is characterized in that the offer chip includes:
Disk is provided, the disk is equipped with the chip of multiple matrix arrangements, is equipped with scribe line, the disk packet between the chip
Include front and the back side, front, that is, disk front of the chip, the back side, that is, disk back side of the chip, institute
The front for stating chip is provided with photosensitive area and the pad around photosensitive area；
Transparent protective layer is formed in the front of the disk, the transparent protective layer covers the photosensitive area and the institute of the chip
State pad；
Through-hole is formed in the position that the back side of the disk corresponds to the scribe line, so as to be located at the multiple of the scribe line two sides
The pad exposes from the through-hole；
The disk and transparent protective layer between the two neighboring through-hole are cut, to obtain single chip.
3. packaging method according to claim 2, which is characterized in that the front in the disk forms transparency protected
Layer include:
The transparent protective layer is formed in the way of spin coating, dispensing or printing in the front of the disk, and is made described transparent
Protective layer solidification.
4. packaging method according to claim 3, which is characterized in that described to make the transparent protective layer solidification include:
By ultraviolet light irradiates or toast in the way of solidify the transparent protective layer.
5. packaging method according to claim 2, which is characterized in that the back side in the disk corresponds to the scribing
The position of slot forms through-hole, so that the pad for being located at the chip of the scribe line two sides exposes from the through-hole,
Before, the packaging method includes:
Substrate is set far from the side of the disk in the transparent protective layer；The back side of the disk is ground, so that described
The thickness of disk is less than or equal to predetermined thickness.
6. packaging method according to claim 2, which is characterized in that the back side in the disk corresponds to the scribing
The position of slot forms through-hole, so that the multiple pads for being located at the scribe line two sides expose from the through-hole, comprising:
The through-hole is formed in the position that the back side of the disk corresponds to the scribe line in the way of machine cuts, so that position
Multiple pads in the scribe line two sides expose from the through-hole.
7. packaging method according to claim 6, which is characterized in that the through-hole is from the pad side to the chip
Back side direction size be gradually increased.
8. packaging method according to claim 1, which is characterized in that described to penetrate multiple pads of the chip
The through-hole includes: with circuit board electrical connection
Metal wiring layer again is formed in the through-hole, the pad of one end of wiring layer and the chip is electric again for the metal
Connection；
By the metal other end of wiring layer and the circuit board electrical connection again.
9. packaging method according to claim 8, which is characterized in that the metal that formed in the through-hole is routed again
Layer, before, the packaging method includes:
The first mask layer is formed at the back side of the chip and the region of the through-hole, and corresponds to institute in first mask layer
The position for stating pad forms the first opening；
The first seed layer is formed far from the surface of the chip in first mask layer；
The second mask layer is formed far from the surface of the chip in first seed layer, and is formed on second mask layer
Second opening；
Metal wiring layer again is formed in second opening；
Remove first seed layer of second mask layer and the metal again other than wiring layer.
10. packaging method according to claim 9, which is characterized in that the removal second mask layer and described
Metal first seed layer other than wiring layer again, later, the packaging method further include:
In the metal, back to the surface of the chip the first barrier layer is arranged in wiring layer again, and forms on the first barrier layer the
Three openings；
Soldered ball, the soldered ball and the circuit board electrical connection are set in the third is open.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811341259.7A CN109545805A (en) | 2018-11-12 | 2018-11-12 | A kind of semiconductor chip packaging method |
| PCT/CN2019/082313 WO2020098215A1 (en) | 2018-11-12 | 2019-04-11 | Semiconductor chip packaging method and packaging apparatus |
| US17/317,260 US11948960B2 (en) | 2018-11-12 | 2021-05-11 | Semiconductor packaging method and semiconductor package device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201811341259.7A CN109545805A (en) | 2018-11-12 | 2018-11-12 | A kind of semiconductor chip packaging method |
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| CN109545805A true CN109545805A (en) | 2019-03-29 |
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| CN201811341259.7A Pending CN109545805A (en) | 2018-11-12 | 2018-11-12 | A kind of semiconductor chip packaging method |
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| CN111524924A (en) * | 2020-04-07 | 2020-08-11 | 甬矽电子(宁波)股份有限公司 | Chip packaging method and chip packaging structure |
| WO2023207238A1 (en) * | 2022-04-24 | 2023-11-02 | 华为技术有限公司 | Electronic device, and circuit board and manufacturing method therefor |
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| CN111524924A (en) * | 2020-04-07 | 2020-08-11 | 甬矽电子(宁波)股份有限公司 | Chip packaging method and chip packaging structure |
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Application publication date: 20190329 |