CN109531435B - Electrostatic controllable abrasive particle flow machining system based on charge tip aggregation effect - Google Patents
Electrostatic controllable abrasive particle flow machining system based on charge tip aggregation effect Download PDFInfo
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- CN109531435B CN109531435B CN201910077017.XA CN201910077017A CN109531435B CN 109531435 B CN109531435 B CN 109531435B CN 201910077017 A CN201910077017 A CN 201910077017A CN 109531435 B CN109531435 B CN 109531435B
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- 239000002245 particle Substances 0.000 title claims abstract description 137
- 230000000694 effects Effects 0.000 title claims abstract description 25
- 238000004220 aggregation Methods 0.000 title claims abstract description 13
- 230000002776 aggregation Effects 0.000 title claims abstract description 13
- 238000003754 machining Methods 0.000 title claims description 19
- 230000010349 pulsation Effects 0.000 claims abstract description 39
- 238000009826 distribution Methods 0.000 claims abstract description 37
- 230000001105 regulatory effect Effects 0.000 claims abstract description 29
- 239000007921 spray Substances 0.000 claims abstract description 28
- 230000005684 electric field Effects 0.000 claims abstract description 27
- 238000001179 sorption measurement Methods 0.000 claims abstract description 9
- 230000003068 static effect Effects 0.000 claims abstract description 9
- 230000005611 electricity Effects 0.000 claims abstract description 4
- 238000003756 stirring Methods 0.000 claims description 12
- 239000006061 abrasive grain Substances 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 230000005686 electrostatic field Effects 0.000 abstract description 6
- 239000003792 electrolyte Substances 0.000 abstract description 4
- 238000005111 flow chemistry technique Methods 0.000 abstract description 2
- 238000005498 polishing Methods 0.000 description 21
- 239000012530 fluid Substances 0.000 description 7
- 230000006698 induction Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000002120 nanofilm Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000004512 die casting Methods 0.000 description 1
- 238000004720 dielectrophoresis Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
The invention discloses an electrostatic controllable abrasive particle flow processing system based on charge tip aggregation effect, which comprises an abrasive particle flow collecting box, an electric field generator, a high-voltage electrostatic generator, a pulsation regulating device, a die-matching adsorption platform, a control system, a processing spray head, a rotary driving device and an abrasive particle flow circulating system, wherein a workpiece is fixed on the die-matching adsorption platform, the processing spray head is fixed on the pulsation regulating device, the high-voltage electrostatic generator is fixed on the processing spray head to apply static electricity to the passing abrasive particle flow, and the pulsation regulating device regulates the position of the processing spray head in the horizontal and vertical directions and drives the processing spray head to rotate in a pulsation mode; the electric field generator is an external device and generates a uniform electric field on the surface of the workpiece; according to the invention, the abrasive particle flow taking the non-electrolyte as the carrier is electrified after passing through the high-voltage electrostatic field, so that the distribution of the abrasive particles in the flow field is controllable, and the negative effects of uneven abrasive particle size and large-particle-size abrasive particles in processing are reduced.
Description
Technical Field
The invention relates to the field of abrasive particle flow machining, is suitable for grinding and polishing the surfaces of workpieces such as optical elements and amorphous film substrates, and particularly relates to an electrostatic controllable abrasive particle flow machining system based on a charge tip aggregation effect.
Background
The nano film material is a popular field of scientific research internationally, has unique surface effect, volume effect, quantum size effect, macroscopic quantum tunnel effect and the like, and shows various peculiar force, electric, optical, magnetic, thermal effect and chemical activity, thereby having wide application prospect in the fields of microelectronics, optics, energy sources and the like. The substrate (such as monocrystalline silicon, silicon carbide and the like) is an indispensable material in the preparation process of the nano-film, and has important roles of supporting the film and improving the film characteristics. Indexes such as surface roughness, dislocation morphology, residual stress and the like of the substrate affect thickness uniformity, surface defects and the like of the nano film, and the performance of a final product is determined. Therefore, the preparation is less, no damage is caused, and the ultra-smooth and high-precision substrate is one of the problems which need to be solved in the research field of the nano thin film. Fluid polishing is one of the important means to obtain ultra-smooth surfaces and is of interest to researchers. Float polishing, bath polishing, magnetic fluid polishing, electrorheological fluid polishing, magnetorheological fluid polishing, fluid vibration polishing, ultrasonic magnetorheological composite polishing, jet polishing, dynamic pressure suspension polishing, dielectrophoresis polishing, gas-liquid-solid three-phase abrasive particle flow polishing and other technologies. Studies have shown that: the formation of a less, atraumatic ultra-smooth surface depends on the contact of the abrasive particles with the surface of the workpiece. The fluid polishing adopts a processing mode without tools or direct action of tools, so that soft contact between abrasive particles and a workpiece is well realized, and deterioration and subsurface damage of the workpiece layer are reduced. The current fluid polishing technology has more or less the following problems: the cutting effect of the abrasive particles and the workpiece is weaker, the controllability is poorer, and the effective processing participation rate of the abrasive particles is insufficient, so that the processing efficiency is lower; the requirements on the technical level and the operating environment are high, the adaptability of the workpiece is poor, the control difficulty of partial process parameters affecting the processing effect is high, and the like. Therefore, on the premise of ensuring less and no damage to the surface of the substrate, the realization of ultra-smooth surface processing with higher efficiency is a technical problem which needs to be solved urgently at present.
Disclosure of Invention
The invention aims to solve the defects of low processing efficiency, low resource utilization rate, difficult improvement of processing quality and the like in the existing processing, and provides an electrostatic controllable abrasive particle flow processing system based on a charge tip aggregation effect, which has the characteristics of high processing efficiency, resource recycling rate, automation degree and processing quality.
The invention realizes the above purpose through the following technical scheme: the static controllable abrasive particle flow machining system based on the charge tip aggregation effect comprises an abrasive particle flow collecting box, an electric field generator, a high-voltage electrostatic generator, a pulsation regulating device, a negative pressure die distribution system, a control system, a machining spray head, a rotary driving device and an abrasive particle flow circulating system, wherein the negative pressure die distribution system is arranged in the abrasive particle flow collecting box, a workpiece is fixed on the negative pressure die distribution system through the adsorption effect of the negative pressure die distribution system, the machining spray head is arranged above the workpiece and is fixed on the pulsation regulating device, the high-voltage electrostatic generator is fixed on the machining spray head and is used for applying static electricity to abrasive particle flows passing through the machining spray head, and the pulsation regulating device is used for regulating the positions of the machining spray head and the high-voltage electrostatic generator in the horizontal and vertical directions and driving the machining spray head to rotate in a pulsation mode; the abrasive particle flow collecting box is connected with the abrasive particle flow circulating system through a pipeline and is in abrasive particle circulation, the electric field generator is external equipment, and the electric field generator generates a uniform electric field on the surface of the workpiece; the rotary driving device is connected with the negative pressure die distribution system through a rotary shaft penetrating through the abrasive particle flow collecting box and drives the negative pressure die distribution system to rotate;
the negative pressure die matching system comprises an upper end cover, a lower base, a negative pressure generator and an air pipe, wherein the upper end cover is fixed above the lower base, a sealed air cavity is formed between the upper end cover and the lower base, a groove for placing a workpiece is formed in the upper end cover, a plurality of adsorption holes communicated with the air cavity are uniformly distributed on the bottom surface of the groove, an air outlet is formed in the lower end cover, the negative pressure generator is connected with the air outlet on the lower base through the air pipe, and when in operation, the negative pressure generator pumps air in the air cavity through the air pipe, so that the workpiece is adsorbed on the groove of the upper end cover;
the device comprises a pulse rotating device, an X-axis linear module and a Z-axis linear module, wherein the modules between the X-axis are horizontally fixed at the upper end of an abrasive particle flow collecting box, the Z-axis linear module is arranged on a sliding block of the X-axis linear module, and the pulse rotating device is arranged on the sliding block of the Z-axis linear module; the high-voltage electrostatic generator is arranged on the pulsation rotating device;
the abrasive particle flow circulation system comprises a filter, a stirring device, an abrasive particle pump and a pipeline, wherein the filter, the stirring device and the abrasive particle pump are sequentially connected through the pipeline, the filter is connected with the discharge port at the bottom of the abrasive particle flow collection box through the pipeline, the discharge port of the abrasive particle pump is connected with a processing spray head through the pipeline, and the processing spray head is arranged on a slide block of the Z-axis linear module;
the abrasive grain pump, the motor of the stirring device, the negative pressure generator, the electric field generator, the high-voltage electrostatic generator and the pulsation regulating device are all connected with the control system.
Further, the negative pressure die matching system further comprises a pressure feedback sensor for detecting the position of the workpiece, and the pressure feedback sensor is arranged on the upper end cover.
Further, an electric slip ring is arranged on the rotating shaft, and an output line of the pressure feedback sensor and the air pipe are connected to the inside of the rotating shaft through the electric slip ring and are respectively connected to the control system and the negative pressure generator through the inside of the rotating shaft.
The invention comprises the following steps when in specific work:
the first step: the negative pressure die distribution mode is utilized to ensure that a workpiece is fixed on a negative pressure die distribution system, a pressure feedback sensor is arranged in the negative pressure die distribution system, the on-line detection and the repeated installation and positioning problems are realized through the pressure feedback sensor, the bottom surface of the workpiece is adsorbed by negative pressure, the workpiece is placed in the negative pressure die distribution system, and the negative pressure die distribution system solves the problems of uncontrollable abrupt change of edge contact pressure and uneven material removal and solves the edge effect;
and a second step of: placing the negative pressure die distribution system in an abrasive particle flow collecting box, and connecting the rotary driving device with the negative pressure die distribution system through a rotary shaft penetrating through the bottom of the abrasive particle flow collecting box to finish erection of the polishing system on the frame workbench;
and a third step of: the method comprises the steps of combining an electrostatic induction principle and a coulomb law, enabling abrasive particles taking a non-electrolyte as a carrier to pass through a high-voltage electrostatic field, enabling the abrasive particles passing through a high-voltage electrostatic generator to carry a certain charge by utilizing the electrostatic induction principle, and spraying the abrasive particles to a workpiece through a processing nozzle; because the abrasive particles with different particle diameters have different electric charge amounts after passing through the same electrostatic field, the aggregation and diffusion phenomenon caused by the vibration of the charged particles is utilized, and the fine particles are repelled by the large particles when the charged amount of the fine particles is more, so that the speed difference phenomenon exists among the particles with different particle diameters, the separation of the large particle diameter particles and the small particle diameter particles doped in the abrasive particle flow is realized, the probability of collision between the large particles and the surface of a workpiece is reduced, the uniformity of the particle diameters of the abrasive particles acting on the workpiece is better, and the negative influence of the large particle diameter abrasive particles in the processing is reduced;
fourth step: an electric field is applied to the surface of the workpiece, the distribution characteristics of negatively charged abrasive particles in the impact area of the positively charged workpiece surface are changed through the charge tip aggregation effect, the impact probability of the abrasive particles on the microscopic surface wave crest of the workpiece is increased, and the removal of the workpiece surface wave crest is accelerated. The existence of the externally applied electric field on the surface of the workpiece also improves the probability of the whole charged abrasive particles colliding with the surface of the workpiece, and improves the effective participation rate of the abrasive particles in the processing process, thereby improving the processing efficiency.
Fifth step: the X-axis linear module and the Z-axis linear module of the pulsation regulating device are regulated to enable the processing spray head to face to a proper processing position, the pulsation rotating device of the pulsation regulating device is utilized to carry out rotation with periodically changing swing frequency and swing angle amplitude in a pulsation mode, and the direction of the processing spray head is changed through regulating and controlling the pulsation frequency and the swing angle, so that the optimal polishing alternating force acting on a workpiece is obtained; the high-quality surface is obtained on the premise of ensuring high-efficiency removal.
Sixth step: the abrasive particles are collected through the abrasive particle flow circulation system, the abrasive particles in the abrasive particle flow collection box firstly pass through the filter, then are sent into the pressurizing pump through the stirring device, and are sent into the static generator again, so that the abrasive particles are recycled to uniformly remove the surface of the workpiece, and the workpiece is machined.
The invention has the beneficial effects that: on the basis of the existing fluid polishing technology, the invention combines the electrostatic induction principle and the coulomb law, so that the abrasive particle flow taking the non-electrolyte as the carrier is charged after passing through a high-voltage electrostatic field, the distribution of the abrasive particles in the flow field is controllable, and the negative influence of uneven abrasive particle size and large-particle-size abrasive particles in the processing is reduced. Meanwhile, an electric field is applied to the surface of the workpiece, the distribution characteristics of negatively charged abrasive particles in the impact area of the positively charged workpiece surface are changed through the charge tip aggregation effect, the impact probability of the abrasive particles on the microscopic surface wave crests of the workpiece is increased, and the removal of the workpiece surface wave crests is accelerated. In addition, the existence of the externally applied electric field on the surface of the workpiece also improves the probability of the whole charged abrasive particles colliding with the surface of the workpiece, namely improves the effective participation rate of the abrasive particles in the processing process, thereby improving the processing efficiency. Furthermore, by combining a pulsation mode, the inflow angle of abrasive particles is periodically swung, and the optimal polishing alternating force acting on a workpiece is obtained by effectively regulating and controlling the pulsation frequency and the swing angle, so that the high-quality surface is obtained on the premise of high-efficiency removal.
Drawings
Fig. 1 is a schematic structural diagram of an electrostatically controllable abrasive particle stream processing system based on the charge tip focusing effect of the present invention.
Fig. 2 is a schematic top view of a negative pressure die-casting system according to the present invention.
Fig. 3 is a schematic diagram of a front view cross-sectional structure of a negative pressure die-matching system according to the present invention.
Fig. 4 is a schematic view of a workpiece subjected to charged abrasive particles generated by an inventive electrostatic generator.
Fig. 5 is a schematic view of the distribution of charged abrasive particles of a workpiece without an applied electric field according to the present invention.
FIG. 6 is a schematic view of the distribution of charged abrasive particles on the surface of a workpiece when an electric field is applied in accordance with the present invention.
In the figure, a 1-high-voltage electrostatic generator, a 2-workpiece, a 3-negative pressure die distribution system, a 4-electric slip ring, a 5-negative pressure generator, a 6-control system, a 7-filter, an 8-stirring device, a 9-abrasive particle pump, a 10-processing nozzle, an 11-pulsation regulating device, a 12-abrasive particle flow collecting box, a 13-upper end cover, a 14-lower base, a 15-air pipe, a 16-pipeline, a 17-adsorption hole, a 18-pressure feedback sensor, a 19-pressure feedback sensor output line, a 20-air outlet, a 21-rotating shaft, 22-positively charged abrasive particles, 23-negatively charged abrasive particles, 24-externally applied electric fields and 25 actual surfaces of the workpiece are arranged.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
as shown in fig. 1 to 6, an electrostatically controllable abrasive particle stream processing system based on a charge tip aggregation effect comprises an abrasive particle stream collecting box 12, an electric field generator, a high-voltage electrostatic generator 1, a pulsation regulating device 11, a negative pressure die distribution system 3, a control system 6, a processing nozzle 10, a rotation driving device and an abrasive particle stream circulating system, wherein the negative pressure die distribution system 3 is arranged in the abrasive particle stream collecting box 12, a workpiece 2 is fixed on the negative pressure die distribution system 3 through the adsorption effect of the negative pressure die distribution system 3, the processing nozzle 10 is arranged above the workpiece 2 and is fixed on the pulsation regulating device 11, the high-voltage electrostatic generator 1 is fixed on the processing nozzle 10 for applying static electricity to abrasive particle streams passing through the processing nozzle 10, and the pulsation regulating device 11 regulates the positions of the processing nozzle 10 and the high-voltage electrostatic generator 1 in the horizontal and vertical directions and drives the processing nozzle 10 to rotate in a pulsation manner; the abrasive particle flow collecting box 12 is connected with an abrasive particle flow circulating system through a pipeline 16 and is in abrasive particle circulation, the electric field generator is external equipment, and the electric field generator generates a uniform electric field on the surface of the workpiece 2; the rotation driving device is connected with the negative pressure die matching system 3 through a rotation shaft 21 penetrating through the abrasive particle flow collecting box 12 and drives the negative pressure die matching system 3 to rotate.
The negative pressure die matching system comprises an upper end cover 13, a lower base 14, a negative pressure generator 5 and an air pipe 15, wherein the upper end cover 13 is fixed above the lower base 14, a sealed air cavity is formed between the upper end cover 13 and the lower base 14, a groove for placing a workpiece 2 is formed in the upper end cover 13, a plurality of adsorption holes 17 communicated with the air cavity are uniformly distributed in the bottom surface of the groove, an air outlet is formed in the lower end cover, the negative pressure generator 5 is connected with the air outlet 20 in the lower base 14 through the air pipe 15, and air in the air cavity is pumped away through the air pipe 15 when the negative pressure generator 5 works, so that the workpiece 2 is adsorbed on the groove of the upper end cover 13.
The pulsation regulating device 11 comprises a pulsation rotating device, an X-axis linear module and a Z-axis linear module, wherein the modules between the X-axis are horizontally fixed at the upper end of the abrasive particle flow collecting box 12, the Z-axis linear module is arranged on a sliding block of the X-axis linear module, and the pulsation rotating device is arranged on the sliding block of the Z-axis linear module; the high voltage electrostatic generator 1 is mounted on a pulsating rotation device.
The bottom of the abrasive particle flow collecting box 12 is provided with a discharge port, the abrasive particle flow circulating system comprises a filter 7, a stirring device 8, an abrasive particle pump 9 and a pipeline 16, the filter 7, the stirring device 8 and the abrasive particle pump 9 are sequentially connected through the pipeline 16, the filter 7 is connected with the discharge port at the bottom of the abrasive particle flow collecting box 12 through the pipeline 16, the discharge port of the abrasive particle pump 9 is connected with a processing spray head 10 through the pipeline 16, and the processing spray head 10 is arranged on a slide block of the Z-axis linear module;
the abrasive grain pump 9, the motor of the stirring device 8, the negative pressure generator 5, the electric field generator, the high-voltage electrostatic generator 1 and the pulsation regulating device 11 are all connected with the control system 6.
The negative pressure die matching system further comprises a pressure feedback sensor 18 for detecting the position of the workpiece 2, and the pressure feedback sensor 18 is arranged on the upper end cover 13.
The rotating shaft 21 is provided with an electrical slip ring 4, and the sensor output line 19 and the air pipe 15 are connected to the inside of the rotating shaft 21 through the electrical slip ring and connected to the control system 6 and the negative pressure generator 5 respectively through the inside of the rotating shaft 21.
The invention comprises the following steps when in specific work:
the first step: the negative pressure die distribution mode is utilized to ensure that the workpiece 2 is fixed on the negative pressure die distribution system 3, a sensor 18 is arranged in the negative pressure die distribution system 3, the on-line detection and the repeated installation and positioning problems are realized through the sensor 18, the bottom surface of the workpiece 2 is adsorbed through the negative pressure, the workpiece 2 is arranged in the negative pressure die distribution system 3, the problem that the abrupt change of the edge contact pressure is uncontrollable and the material removal is uneven is solved by the negative pressure die distribution system 3, and the edge effect is solved;
and a second step of: placing the negative pressure die distribution system 3 in the abrasive particle flow collecting box 12, and connecting the negative pressure die distribution system 3 by a rotary driving device through a rotary shaft 21 penetrating through the bottom of the abrasive particle flow collecting box 12 to finish the erection of the polishing system on the frame workbench;
and a third step of: the static induction principle and the coulomb law are combined, so that the abrasive particle flow taking the non-electrolyte as a carrier is charged after passing through a high-voltage electrostatic field, the abrasive particle passing through the high-voltage static generator 1 carries a certain charge by utilizing the static induction principle, and the abrasive particle is sprayed onto a workpiece 2 through a processing nozzle; because the abrasive particles with different particle diameters have different electric charge amounts after passing through the same electrostatic field, the aggregation and diffusion phenomenon caused by the vibration of the charged particles is utilized, and the fine particles are repelled by the large particles when the charged amount of the fine particles is more, so that the speed difference phenomenon exists among the particles with different particle diameters, the separation of the large particle diameter particles and the small particle diameter particles doped in the abrasive particle flow is realized, the probability of collision between the large particles and the surface of the workpiece 2 is reduced, the uniformity of the particle diameters of the abrasive particles acting on the workpiece 2 is better, and the negative influence of the large particle diameter abrasive particles in the processing is reduced;
fourth step: an electric field is applied to the surface of the workpiece 2, the distribution characteristics of negatively charged abrasive particles in the impact area of the surface of the positively charged workpiece 2 are changed through the charge tip aggregation effect, the impact probability of the abrasive particles on the microscopic surface wave crest of the workpiece 2 is increased, and the removal of the surface wave crest of the workpiece 2 is accelerated. The existence of the external electric field on the surface of the workpiece 2 also improves the probability of the whole charged abrasive particles colliding with the surface of the workpiece 2, and improves the effective participation rate of the abrasive particles in the processing process, thereby improving the processing efficiency.
Fifth step: the X-axis linear module and the Z-axis linear module of the pulsation regulating device 11 are regulated to enable the processing spray head to face to a proper processing position, the pulsation rotating device of the pulsation regulating device 11 is utilized to carry out rotation with periodically changing swing frequency and swing angle amplitude in a pulsation mode, and the direction of the processing spray head is changed through regulating and controlling the pulsation frequency and the swing angle, so that the optimal polishing alternating force acting on the workpiece 2 is obtained; the high-quality surface is obtained on the premise of ensuring high-efficiency removal.
Sixth step: the abrasive particles are collected through the abrasive particle flow circulation system, the abrasive particles in the abrasive particle flow collection box 12 firstly pass through a filter, then are sent into a pressurizing pump through a stirring device, and are sent into an electrostatic generator again, so that the abrasive particles are recycled to uniformly remove the surface of the workpiece 2, and the workpiece 2 is machined.
The above embodiments are only preferred embodiments of the present invention, and are not limiting to the technical solutions of the present invention, and any technical solution that can be implemented on the basis of the above embodiments without inventive effort should be considered as falling within the scope of protection of the patent claims of the present invention.
Claims (1)
1. An electrostatically controllable abrasive particle stream processing system based on charge tip aggregation effect, characterized in that: the abrasive grain flow machining device comprises an abrasive grain flow collecting box (12), an electric field generator, a high-voltage electrostatic generator (1), a pulsation regulating device (11), a negative pressure die distribution system (3), a control system (6), a machining spray head (10), a rotary driving device and an abrasive grain flow circulating system, wherein the negative pressure die distribution system (3) is arranged in the abrasive grain flow collecting box (12), a workpiece (2) is fixed on the negative pressure die distribution system (3) through the adsorption effect of the negative pressure die distribution system (3), the machining spray head (10) is arranged above the workpiece (2) and the machining spray head (10) is fixed on the pulsation regulating device (11), the high-voltage electrostatic generator (1) is fixed on the machining spray head (10) and is used for applying static electricity to abrasive grain flow passing through the machining spray head (10), and the pulsation regulating device (11) is used for regulating the positions of the machining spray head (10) and the high-voltage electrostatic generator (1) in the horizontal and vertical directions and driving the machining spray head (10) to rotate in a pulsation mode. The abrasive particle flow collecting box (12) is connected with the abrasive particle flow circulating system through a pipeline (16) and is in abrasive particle circulation, the electric field generator is external equipment, and the electric field generator generates a uniform electric field on the surface of the workpiece (2); the rotary driving device is connected with the negative pressure die matching system (3) through a rotary shaft (21) penetrating through the abrasive particle flow collecting box (12) and drives the negative pressure die matching system (3) to rotate;
the negative pressure die distribution system (3) comprises an upper end cover (13), a lower base (14), a negative pressure generator (5) and an air pipe (15), wherein the upper end cover (13) is fixed above the lower base (14), a sealed air cavity is formed between the upper end cover (13) and the lower base (14), a groove for placing a workpiece (2) is formed in the upper end cover (13), a plurality of adsorption holes (17) communicated with the air cavity are uniformly distributed on the bottom surface of the groove, an air outlet is formed in the lower end cover, the negative pressure generator (5) is connected with the air outlet (20) on the lower base (14) through the air pipe (15), and when the negative pressure generator (5) works, air in the air cavity is pumped away through the air pipe (15), so that the workpiece (2) is adsorbed on the groove of the upper end cover (13);
the pulsation regulating device (11) comprises a pulsation rotating device, an X-axis linear module and a Z-axis linear module, wherein the modules between the X-axis are horizontally fixed at the upper end of the abrasive particle flow collecting box (12), the Z-axis linear module is arranged on a sliding block of the X-axis linear module, and the pulsation rotating device is arranged on a sliding block of the Z-axis linear module; the high-voltage electrostatic generator (1) is arranged on the pulsation rotating device;
the abrasive particle flow circulation system comprises a filter (7), a stirring device (8), an abrasive particle pump (9) and a pipeline (16), wherein the filter (7), the stirring device (8) and the abrasive particle pump (9) are sequentially connected through the pipeline (16), the filter (7) is connected with the discharge port at the bottom of the abrasive particle flow collection box (12) through the pipeline (16), the discharge port of the abrasive particle pump (9) is connected with a processing spray head (10) through the pipeline (16), and the processing spray head (10) is arranged on a sliding block of the Z-axis linear module;
the motor, the negative pressure generator (5), the electric field generator, the high-voltage electrostatic generator (1) and the pulsation regulating device (11) of the abrasive grain pump (9) and the stirring device (8) are all connected with the control system (6);
the negative pressure die matching system (3) further comprises a pressure feedback sensor (18) for detecting the position of the workpiece (2), and the pressure feedback sensor (18) is arranged on the upper end cover (13);
the sensor output line (19) and the air pipe (15) are connected to the inside of the rotating shaft (21) through the electrical slip ring, pass through the inside of the rotating shaft (21), enable the sensor output line (19) to be connected with the control system (6) through the inside of the rotating shaft (21), and enable the air pipe (15) to be connected with the negative pressure generator (5).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910077017.XA CN109531435B (en) | 2019-01-27 | 2019-01-27 | Electrostatic controllable abrasive particle flow machining system based on charge tip aggregation effect |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910077017.XA CN109531435B (en) | 2019-01-27 | 2019-01-27 | Electrostatic controllable abrasive particle flow machining system based on charge tip aggregation effect |
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| Publication Number | Publication Date |
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| CN109531435A CN109531435A (en) | 2019-03-29 |
| CN109531435B true CN109531435B (en) | 2024-02-27 |
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| CN111940066B (en) * | 2019-05-16 | 2022-06-28 | 北京大地高科地质勘查有限公司 | Electrostatic-assisted coal sample grinding method |
| CN111823127A (en) * | 2020-08-01 | 2020-10-27 | 贵州安吉华元科技发展有限公司 | Irregular-shape abrasive flow cleaning and finishing device |
| CN115122158B (en) * | 2022-05-24 | 2023-07-21 | 上海国阳机电设备有限公司 | Steel plate polishing device and polishing process thereof |
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