CN109521352A - Flying probe tester - Google Patents

Abstract

The present invention provides a kind of flying probe testers comprising: installation base portion；Processing unit, comprising: X-axis component, X-axis component include a pair of of X-axis linear guidance device and an X-axis driving device；Y-axis component, Y-axis component guide measuring head on test platform along Y-motion, and the both ends of Y-axis component are slidably connected with two X-axis linear guidance devices respectively；Measuring head connect with Y-axis component and the side of Y-axis component is arranged in；Equipoising support apparatus, it is connect with Y-axis component, the torque opposite effect torque that Equipoising support apparatus applies Y-axis component and measuring head generates Y-axis component, X-axis driving device connect with Y-axis component and Y-axis component is driven to slide along X-axis linear guidance device, and the center line that X-axis driving device deviates a pair of of X-axis linear guidance device is arranged between a pair of of X-axis linear guidance device.Y-axis driven end is swung excessive when the present invention is solved the problems, such as because of the longer generation high torque of measuring head cantilever and unilateral driving.

Description

Flying probe tester

Technical field

The present invention relates to circuit board testing technical fields, and in particular to a kind of flying probe tester.

Background technique

Electrical property detection is the processing procedure that PCB has to pass through in the fabrication process, and flying probe tester is by contact side at present Formula detects the mainstream test equipment of PCB electrical property, mainly has to the test request of flying probe tester currently on the market: accurate fortune Dynamic control, reliable electric property, quick testing efficiency and various power of test, and good mechanical structure is to realize to survey Try the key of accurate rate.

Flying probe tester mainly includes that the probe that can independently fast move being driven by motor can be installed in X-axis and Y-axis Or the jig equipped with dials, mainly contact progress is carried out in the mobile realization of Z-direction and the solder joint of pcb board using probe Electric measurement.Due to the functional requirement of flying probe tester, Y-axis can be generally respectively erected in two parallel X-axis, be flown simultaneously Jig, the fixture of clamping fixture and each control route for connecting with control device are usually mounted on the measuring head of needle test machine Deng, therefore there are certain weight for measuring head itself, and in order to realize dials moving freely in test zone, usual jig The side of Y-axis is installed to by cantilever level, cantilever has certain length in the horizontal direction, therefore due to the self weight of measuring head Certain torque can be generated to Y-axis.

And as the size of electronic product single PCS in need of test is increasing, necessarily lead to test process Measuring head grip size increases with it, and the size of original cantilever is unable to satisfy the installation space of larger-size fixture, usually logical It crosses increase jib-length to solve the above problems, and brings new problem after jib-length increase, i.e., the component of original Y-axis is because of cantilever The torque for increasing and bearing increases, and torque increase causes Y-axis modular construction to be easy to appear swing in the X-axis direction, so as to cause Y The service life reduction of shaft assembly influences the accuracy of test result simultaneously because swinging makes it be lower in the measuring accuracy of X-axis.

Horizontal flying probe testing machine in the prior art is in the stage developed to high-speed, high precision, and in the prior art Horizontal flying probe testing machine be mostly single motor side driving bridge formula structure, due to load weight, bridge structure, rigidity It is horizontal to realize at present so that the precision improvement of unilateral drive-type flying probe tester is more difficult with the restriction of the factors such as damping The requirements for high precision of formula flying probe tester generallys use Double-edge type driving and replaces unilateral driving, but bilateral drive, and dynamic structure is necessarily led Cost is caused to be substantially increased.Alternatively, flying probe tester use in drive formula structure, by driving device setting bridge medium position (i.e. Drive end), grid beam two sides, that is, driven end, the span for relatively reducing bridge thus reduces driven end and drive end precision is inconsistent The problem of.But the structure driven in using can make test section superstructure become complex, and equipment cost rises, and installation difficulty increases Greatly.It is limited simultaneously by girder span, test zone is unfit to do too big, thus the pcb board size that can be tested will be also limited.

Summary of the invention

The main purpose of the present invention is to provide a kind of flying probe testers, to solve installation measuring head in the prior art Priming device due to measuring head cantilever is longer to guide device generate high torque and when unilateral driving Y-axis driven end starting with Excessive problem is swung when stopping.

To achieve the above object, the present invention provides a kind of flying probe testers, comprising: installation base portion is horizontally disposed with, is used for The processed material for having flexible and thin shape is installed；Processing unit, processing unit are controlled as close to or far from installation base portion It advances, and processing unit is advanced close to installation base portion to execute processing on processed material；Image pick-up device, for examining Survey the position of the opposite installation base portion of specified portions of processed material；And mobile unit, for specified based on processed material Partial detected position and so that processed material is moved to the designated position on installation base portion, wherein processing unit is equipped with Multiple pressing elements, pressing element are retractedly moved relative to installation base portion, and in the finger of image pick-up device detection processed material Before the position for determining part, pressing element presses processed material near the specified portions of processed material, with tight with installation base portion Contiguity touching；Wherein, it advances in processed material of the processing unit on installation base portion so as on processed material at execution Before reason, multiple pressing elements press processed material, to be in close contact with installation base portion；Processing unit includes: X-axis component, X-axis group Part guides measuring head on test platform along X-motion；X-axis component includes a pair of X-axis being arranged in parallel on horizontal base Linear guidance device and an X-axis driving device；Y-axis component, Y-axis component guide measuring head on test platform along Y-axis Movement, the both ends of Y-axis component are slidably connected with two X-axis linear guidance devices respectively；Measuring head connect and is arranged with Y-axis component In the side of Y-axis component；Equipoising support apparatus is connect with Y-axis component, and Equipoising support apparatus applies to Y-axis component and measuring head The torque opposite effect torque that Y-axis component is generated；Wherein, X-axis driving device connect with Y-axis component and drives Y-axis component It is slided along X-axis linear guidance device, the center line that X-axis driving device deviates a pair of of X-axis linear guidance device is arranged in a pair of of X-axis Between linear guidance device.

Further, Y-axis component includes Y-axis straight line priming device and Y-axis driving device, and Equipoising support apparatus includes: Supporting mechanism, the horizontal end of supporting mechanism are equipped with measuring head, and supporting mechanism exists along Y-axis straight line priming device guidance measuring head Horizontal in-plane moving；Balancing device, balancing device are connect with supporting mechanism, balancing device to Y-axis straight line priming device apply with The torque opposite effect torque that measuring head generates Y-axis straight line priming device.

Further, balancing device and measuring head are separately positioned on the two sides of Y-axis straight line priming device.

Further, supporting mechanism includes mounting rack, and mounting rack is slidably connected with Y-axis straight line priming device, balancing device The side of mounting rack is set, is horizontally installed with cantilever in the other side of mounting rack, the other end of cantilever is equipped with measuring head.

Further, balancing device is and Y-axis straight line priming device balance guide rail disposed in parallel, balance guide rail and installation Frame is slidably connected.

Further, mounting rack includes the first link block and the second link block, the first link block and Y-axis straight line priming device It is slidably connected, the second link block is slidably connected with balance guide rail.

Further, balancing device include the guide rail being arranged along the reverse extending line of cantilever and on guide rail it is slidable Clump weight.

Further, X-axis straight line priming device and Y-axis straight line priming device are linear mould group.

Further, balancing device includes be separately positioned on Y-axis straight line priming device two sides and setting in parallel flat Weigh guide rail.

Further, supporting mechanism includes mounting rack, and mounting rack is slidably connected with Y-axis straight line priming device, balances guide rail It is slidably connected with mounting rack

Further, Y-axis straight line priming device is screw rod.

Further, balance guide rail is linear guide.

Further, the X-axis linear guidance device at least adjacent to X-axis driving device side is heavy-load type linear guide.

Further, the X-axis linear guidance device at least adjacent to X-axis driving device side is roller-type linear guide.

Further, the X-axis linear guidance device close to X-axis driving device side is roller-type linear guide, far from X-axis The X-axis linear guidance device of driving device side is ball linear guide.

Further, X-axis driving device includes motor and the X-axis screw rod connecting with motor output end, X-axis screw rod and X Axis linear guidance device is arranged in parallel, and X-axis screw rod is connect with Y-axis component.

Further, Y-axis component includes: that Y-axis pedestal, the Y-axis linear guidance device being set on Y-axis pedestal and Y-axis are driven Dynamic device, the both ends of Y-axis pedestal are slidably connected with X-axis linear guidance device respectively, and Y-axis pedestal and X-axis screw rod are cooperatively connected.

Further, the feed screw nut being cooperatively connected with screw rod or screw rod sliding block are additionally provided on Y-axis pedestal.

Further, stating Y-axis linear guidance device is linear mould group, and linear mould group includes Y-axis linear guide and is set to Y Screw rod in axis linear guide.

Further, X-axis component further includes the fulcrum bearing that X-axis screw rod is fixedly mounted.

Further, Y-axis pedestal includes: the first sliding part and the second sliding part, is filled respectively with two X-axis straight line guidance It sets and is slidably matched, the first sliding part is arranged close to motor；Support portion is connected between the first sliding part and the second sliding part, the The length of the extending direction along X-axis linear guidance device of one sliding part is greater than the prolonging along X-axis linear guidance device of support portion The width in direction is stretched, to increase span of the Y-axis pedestal on X-axis linear guidance device.

Further, the first sliding part and support portion form T-shaped structure.

Further, the angle of the first sliding part and support portion, which is equipped with, reinforces stabilizers.

Further, the first sliding part, support portion and reinforcement stabilizers form triangular structure.

Further, the length of the extending direction along X-axis linear guidance device of the first sliding part and support portion along hanging down Directly in the length ratio of the extending direction of X-axis linear guidance device in the range of 1/8~2/3.

Further, processing unit is subjected to digital control, to advance close to or far from installation base portion.

Further, multiple pressing elements are prompted to mobile close to installation base portion, thus press processed material, with installation base Portion is in close contact.

Further, processing unit is equipped with multiple inspection detectors, examines detector and is formed in as printed base plate The multiple contacts being formed on processed material, conductive examine thus is executed on processed material.

Technical solution of the present invention has the advantages that

1. flying probe tester provided by the invention, by being set in the position of center line for deviateing a pair of of X-axis linear guidance device The X-axis driving device set reduces driving device to the distance of driven end, and then reduces X-axis driving device to the power of driven end Square, so that making driven section of swing reduces.Side by not installing measuring head on priming device is provided with balancing device, makes Balancing device applies priming device and loads the torque opposite effect torque that generates to priming device, loaded pair with abatement The torque of priming device, to extend the service life of priming device and improve its radial accuracy.

2. flying probe tester provided by the invention, for linear actuator balance guide rail disposed in parallel, and balance guide rail It is slidably connected with mounting rack, balance guide rail applies linear actuator and load to straight line priming when Equipoising support apparatus works The torque opposite effect torque that device generates, to cut down load to the torque of straight line mould group, to extend the service life of mould group and mention Its high radial accuracy；Also, it is formed together with linear actuator balance guide rail disposed in parallel and linear actuator to support machine The two-wire of structure supports, and improves the operation stability of supporting mechanism.

3. flying probe tester provided by the invention, the side for not installing measuring head on priming device is arranged along the cantilever Reverse extending line setting guide rail and can on guide rail slidable clump weight, drawn by clump weight and guide rail to described Dynamic device applies and the torque opposite effect torque for loading and generating to the priming device.Thus abatement load is to priming The torque of device, to extend the service life of priming device and improve its radial accuracy.

4. flying probe tester provided by the invention has additional balance guide rail in the two sides of lead screw, passes through the ipsilateral peace of measuring head Dress guide rail stretches out the physical length of lead screw to shorten cantilever to reduce load to the torque of lead screw, while again in the another of lead screw Side is provided with guide rail to provide opposite torque to lead screw to the torque that further abatement load generates lead screw, extends lead screw Service life and improve its radial accuracy.

5. a kind of flying probe tester with balancing device provided by the invention is provided with test in the side of Y-axis mould group Head, while the other side of Y-axis mould group being provided with balance guide rail, it is produced by setting balance guide rail with cutting down load to straight line mould group Raw torque, to extend the service life of Y-axis mould group and improve its radial accuracy.

6. a kind of flying probe tester with balancing device provided by the invention is equipped with balance in the two sides of Y-axis lead screw Guide rail, by stretching out the length of Y-axis lead screw to shorten cantilever in the ipsilateral installation guide rail of measuring head to reduce load to Y-axis lead screw The torque of generation, while guide rail is provided with to provide opposite torque to lead screw to further cut down in the other side of lead screw again The torque to straight line Y-axis lead screw is loaded, extends the service life of lead screw and improves its radial accuracy.

7. the X-axis linear guidance device by will be close to X-axis driving device is set the present invention provides a kind of flying probe tester It is set to heavy-load type linear guide, improves the distortion resistance of drive end linear guidance device, so that linear guidance device is being held When by radial force, the deformation of generation reduces, and keeps linear motion of the Y-axis component on linear guidance device, so that test Movement it is more steady.The X-axis linear guidance device far from X-axis driving device is set as ball linear guide simultaneously, has one Fixed stabilization.

8. the present invention provides a kind of flying probe tester, X-axis driving device is eccentrically set on a pair of of X-axis linear guidance device Between, and be connected on matrix by support base, so that structure becomes easy, installation difficulty is reduced, and then reduces cost, simultaneously Various sizes of PCB test board can also be placed.

9. the present invention provides a kind of flying probe tester, X-axis driving device uses motor as power source, motor output end with The connection of X-axis screw rod, X-axis screw rod is arranged in parallel with X-axis linear guidance device, X-axis screw rod and Y-axis component use feed screw nut or Screw rod sliding block is cooperatively connected, so that linear condition is presented in the accelerator of Y-axis component, accelerator is more steady, is conducive to control The motion state of Y-axis component processed.

10. the present invention provides a kind of flying probe tester, it is arranged between the center line for deviateing a pair of of X-axis linear guidance device X-axis driving device reduces X-axis driving device to the torque of driven end, so that making driven section of swing reduces.It will be close to simultaneously The X-axis linear guidance device of X-axis driving device is set as heavy-load type linear guide, so that the bearing capacity of straight line guiding mechanism mentions Height reduces its deformation in load-bearing, to improve the smooth degree of Y-axis component movement.

Detailed description of the invention

It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor It puts, is also possible to obtain other drawings based on these drawings.In the accompanying drawings:

Fig. 1 is the front view of the flying probe tester provided in the first embodiment of the invention；

Fig. 2 is the top view of flying probe tester shown in FIG. 1；

Fig. 3 is the structural schematic diagram of the flying probe tester provided in second of embodiment of the invention；

Fig. 4 is the structural schematic diagram of the flying probe tester provided in the third embodiment of the invention；

Fig. 5 is the top view of the flying probe tester provided in the 4th kind of embodiment of the invention；

Fig. 6 shows the schematic top plan view of the embodiment five of flying probe tester according to the present invention；

Fig. 7 shows the partial structure diagram of the flying probe tester of Fig. 6；

Fig. 8 shows the structural schematic diagram of the pedestal of the flying probe tester of Fig. 6, interconnecting piece and guide rail；

Fig. 9 is showing the perspective view of punch device corresponding with processing equipment according to a sixth embodiment of the present invention；

Figure 10 is showing the cross-sectional view of the front side of punch device, wherein printed base plate is mounted on die unit；

Figure 11 is showing the cross-sectional view of the front side of punch device, wherein printed base plate is pressed down on by pressing element；

Figure 12 is showing the cross-sectional view of the front side of punch device, wherein printed base plate be perforated template pressing；

Figure 13 is showing the cross-sectional view of the front side of punch device, wherein printed base plate is perforated to be formed wherein Through-hole；

Figure 14 is showing the enlarged drawing in the left side of punch device shown in Fig. 10；

Figure 15 is showing the cross-sectional view of the front side of base board inspection apparatus according to a seventh embodiment of the present invention；

Figure 16 is showing the cross-sectional view of the major part of base board inspection apparatus, and the base board inspection apparatus is pressed with pressing element Press printed base plate；

Figure 17 is showing the cross-sectional view of the major part of base board inspection apparatus, the top inspection of the base board inspection apparatus Detector is tested to contact with printed base plate；

Figure 18 is showing the cross-sectional view of the major part of base board inspection apparatus, the lower inspection of the base board inspection apparatus Detector is contacted with printed base plate；With

Figure 19 is showing the amplification sectional view of the upper left of base board inspection apparatus shown in figure 15.

Specific embodiment

Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.

Embodiment 1

The present invention provides a kind of plane formula flying probe tester, and wherein the flying probe tester includes pedestal 1, and 1 level of pedestal is set It sets, pedestal 1 as shown in Figure 1 is frame-type structure, and middle part constitutes test zone 11.Wherein flying probe tester further include: fixed A pair of of the X-axis component 2 being installed on pedestal 1, two groups of X-axis components 2 are set in parallel to each other on the opposite both sides of pedestal 1, X-axis Component 2 guides measuring head in test zone 11 along X-motion.Above X-axis component 2, across two groups of X-axis components 2 simultaneously Y-axis component 4 is vertically arranged with X-axis component 2, the side of Y-axis component 4 is equipped with rotary test head (being not shown), Y For guiding measuring head in test zone 11 along Y-motion, Y-axis component 4 is connected to shaft assembly 4 by the installation of Y-axis pedestal 3 On X-axis component 2, the both ends of Y-axis pedestal 3 are slidably connected with two X-axis components 2 respectively.

As shown in Fig. 2, measuring head is installed on cantilever 9 by fixture 10, wherein fixture 10 can be fixture component or control Tool.Cantilever 9 is horizontally set on the end of Y-axis component 4, and wherein cantilever 9 and the Z axis pedestal 7 being vertically arranged on Y-axis component 4 are sliding Dynamic connection, cantilever 9 (can be axially moved along Z axis) along 7 vertical motion of Z axis pedestal, while cantilever 9 is also the rotation base of measuring head Seat, the shaft 12 that measuring head can be arranged on cantilever 9 rotate.

Every group of X-axis component in the present embodiment includes the linear mould group of X-axis and is mounted on its end for driving linear mould The X-axis driving motor of group movement, Y-axis component include the linear mould group of Y-axis and are mounted on Y-axis end for driving linear mould group to move Y-axis driving motor 8.The linear mould group of X-axis and the linear mould group of Y-axis in the present embodiment respectively include the guide rail made of channel steel again With the lead screw being arranged in U-bar guide rail, X-axis driving motor drives the rotation of the lead screw in its mould group to drive Y-axis component along X Axis axial movement, Y-axis driving motor 8 drive the lead screw rotation in its mould group to drive measuring head along Y-motion, that is, pass through X-axis mould group and Y-axis mould group can be achieved measuring head and move in the test zone of workbench 11.

It wherein as shown in Figure 2, is that larger sized jig can be installed, it usually needs pass through and increase what cantilever 9 stretched out Length is realized.The length increase of cantilever 9 causes its end to easily cause Y-axis component 4 to the increase of the radial torque of Y-axis component 4 Generation radially wobbles, and influences its radial accuracy and service life.It therefore, is the radial accuracy and service life that improve Y-axis component, Flying probe tester in the present embodiment is additionally provided with Equipoising support apparatus, the power for providing and measuring head generates Y-axis component 4 Square opposite effect torque.

Wherein Equipoising support apparatus includes supporting mechanism and balancing device, and the supporting mechanism in the present embodiment includes that setting exists On connection Y-axis component 4 and link block connected to it 6, the top of link block 6 are equipped with the Z that horizontal end is equipped with measuring head Axis pedestal, wherein link block 6 is slidably connected with Y-axis component 4, and link block 6 guides measuring head to transport in the horizontal plane along Y-axis component 4 It is dynamic.

Balancing device in the present embodiment is balance guide rail 5, and balance guide rail 5 and measuring head are separately positioned on the linear mould of Y-axis The two sides of group, and balance guide rail 5 and be arranged in parallel with the linear mould group of Y-axis.It wherein include that first be fixedly connected connects on link block 6 Block and the second link block are connect, wherein the first link block is slidably connected with the linear mould group of Y-axis, the second link block and balance guide rail 5 are sliding Dynamic connection.First link block and the second link block can both be integrated setting, i.e., on one component machine-shaping have respectively with Balance two parts of guide rail and the linear mould group cooperation of Y-axis, or split settings, i.e., machine-shaping has the first link block respectively Assembling installation is carried out again with the second link block later period.Wherein balance guide rail 5 and the linear mould group setting spaced apart of Y-axis, reason More big by upper balance guide rail 5 and the interval of the linear mould group of Y-axis, the balanced action played is better, and big to meet bearing strength Use environment, balance guide rail 5 use roller-type guide rail, the bearing capacity and rigidity of roller guide are all bigger than spherical guide, fit For the biggish device of load.It is simultaneously the stress condition of the further monitoring linear mould group of Y-axis, can be set in the linear mould group of Y-axis Set the force snesor for detecting its stress condition.

Embodiment 2

In second embodiment of the present invention, the basic structure of flying probe tester is the same as example 1, with embodiment one The difference is that the setting of balancing device.In the embodiment two, balancing device includes setting along the reverse extending line of cantilever 9 The clump weight guide rail 13 set, and the slidable clump weight 14 on clump weight guide rail 13.Wherein clump weight guide rail 13 can pass through The end for being mounted on link block 6 is arranged in connecting component, and clump weight guide rail 13 and cantilever 9 are arranged in the two of link block 6 Side.During clump weight 14 and clump weight guide rail 13 are slidably connected, by adjust clump weight 14 and the linear mould group of Y-axis away from From adjustable balancing device to the torque of the linear mould group of Y-axis, thus what abatement or payment measuring head applied the linear mould group of Y-axis Torque improves the radial accuracy and service life of the linear mould group of Y-axis.Certainly, due to power that measuring head applies the linear mould group of Y-axis Square changes with the variation of the change in location and jig size of measuring head, therefore clump weight 14 may also set up and weight guide 13 Dismountable connection, and there is the clump weight of various different sizes to can be used for cooperating from clump weight guide rail to meet different use rings Border.It, can be in the linear mould group of Y-axis for the stress condition of the further monitoring linear mould group of Y-axis similarly preferably in 3 It is also equipped with the force snesor for detecting its stress condition.

Embodiment 3

In third embodiment of the present invention, the basic structure of flying probe tester is same as the previously described embodiments, with above-mentioned reality Example is applied the difference is that the setting of balancing device and the setting of Y-axis component.In the embodiment three, Y-axis component is used Screw rod 15；And balancing device includes the balance guide rail 5 for being separately positioned on Y-axis screw rod two sides and setting in parallel, with embodiment 1 In balance guide rail it is similar, two balance guide rails 5 are separately positioned on the two sides of straight line screw rod 15, and spaced apart with screw rod Setting, theoretically the interval of two balance guide rails 5 and Y-axis screw rod 15 the big, and the balanced action played is better, and to meet The big use environment of bearing strength, the balance guide rail in the embodiment also use roller-type guide rail, the bearing capacity of roller guide It is all bigger than spherical guide with rigidity, it is suitable for the biggish device of load.It is simultaneously the stress condition of further monitoring Y-axis screw rod, The force snesor for detecting its stress condition can be set on Y-axis screw rod.

As the embodiment of replacement, when Y-axis component is set as screw rod, balancing device can also be to include along cantilever 9 The clump weight guide rail of reverse extending line setting, and the slidable clump weight on guide rail.Wherein clump weight guide rail can pass through company The end for being mounted on link block 6 is arranged in relay part, and clump weight guide rail and cantilever 9 are arranged in the two sides of link block 6.? During clump weight and clump weight guide rail are slidably connected, by adjusting clump weight adjustable balance at a distance from Y-axis screw rod Device improves the radial direction of Y-axis screw rod to cut down or offset the torque that measuring head applies Y-axis screw rod to the torque of Y-axis screw rod Precision and service life.It certainly is the stress condition of further monitoring Y-axis screw rod, also setting detects its stress on Y-axis screw rod The force snesor of situation.

Flying probe tester provided by the invention with balancing device, by not installing measuring head on Y-axis component Side is provided with balancing device connected to it, to cut down load to the torque of Y-axis component, to extend the service life of Y-axis component And improve its radial accuracy.

Embodiment 4

The present invention provides a kind of flying probe tester, and wherein the flying probe tester includes horizontal base 1, and pedestal is horizontally disposed, Horizontal base 1 as shown in Figure 5 is frame-type structure, and middle part constitutes test zone.The wherein flying probe tester in the present embodiment Further include: a pair of of the X-axis component 2 being fixedly installed on horizontal base 1, two groups of X-axis components 2 are set in parallel to each other in horizontal base On the opposite both sides of seat 1, X-axis component 2 guides Y-axis component 3 in test zone along X-motion.It is horizontal above X-axis component 2 Y-axis component 3 has been vertically arranged across two groups of X-axis components 2 and with X-axis component 2, measuring head 34, Y is installed on Y-axis component 3 For shaft assembly 3 for guiding measuring head in test zone along Y-motion, Y-axis component 3 is connected to X by the installation of Y-axis pedestal 33 On shaft assembly 2, the both ends of Y-axis pedestal 33 are slidably connected with two X-axis components 2 respectively.

In the flying probe tester of the present embodiment, X-axis component 2 includes the X-axis straight line that a pair is arranged in parallel on horizontal base 1 21, X-axis driving devices 22 of guide rail and fulcrum bearing 23, as shown in figure 5, the X-axis driving device 22 in the present embodiment includes electricity The one end of X-axis screw rod 221, X-axis screw rod 221 and X is arranged in machine and the X-axis screw rod 221 connecting with motor output end, motor Axis linear guide 21 is arranged in parallel, and the position of center line that wherein X-axis screw rod 221 deviates a pair of of X-axis linear guide 21 is mounted on one To between X-axis linear guide 21；X-axis screw rod 221 is connect with Y-axis component 3.Fulcrum bearing 23 is for fixed support X-axis screw rod 221.X It is fixed on a testing machine that axis driving motor 222 and X-axis screw rod 221 pass through the support base 23 being arranged on test platform.

Y-axis component 3 in the present embodiment includes Y-axis pedestal 33, the Y-axis linear guidance device being set on Y-axis pedestal 33 31 and the Y-axis driving motor 32 positioned at 31 end of Y-axis linear guidance device.The wherein Y-axis linear guidance device in the present embodiment 31, which can be used linear mould group, can also be used lead screw, wherein linear mould group includes linear guide and the silk that is set in linear guide Bar.The both ends of Y-axis pedestal 33 are slidably connected with X-axis linear guide 21 respectively, and Y-axis pedestal 33 is connect with X-axis screw rod 221, Y-axis base Seat 33 lower section be additionally provided with X-axis screw rod 221 be cooperatively connected feed screw nut perhaps screw rod sliding block passes through feed screw nut or silk The cooperation guidance Y-axis pedestal 33 of bar sliding block and X-axis screw rod 221 is axially moved along X-axis.

In order to enable pendulum motion of the pedestal at 3 both ends of Y-axis component in X-axis linear guide 21 minimizes unanimously, X-axis Driving device 22 may be alternatively mounted at the center of Y-axis component 3, but will cause the globality of test zone using above-mentioned setting It is destroyed, the test board of larger area can not be placed.However, by the unilateral setting of X-axis driving device 22 in side X-axis linear guide On 21, one end swing that Y-axis component 3 can be caused not connect with X-axis driving device 22 is excessive, therefore, the position of disalignment Both it ensure that the space requirement of test zone, while also having effectively reduced separate 22 side of X-axis driving device on Y-axis component 3 It swings.

As shown in figure 5, the X-axis linear guide 21 close to 22 side of X-axis driving device is set as roller line slideway 211, X-axis linear guide 21 far from 22 side of X-axis driving device is set as ball linear guide 212, due to the carrying of roller guide Power and rigidity are all higher than common guide rail, while roller guide has the ability of good anti-lateral deformation, therefore in Y-axis component 3 when starting or stoping, and it is smaller that deformation quantity occurs under the lateral forces that Y-axis component 3 generates for roller guide, therefore motion process More stable, therefore the swing of the Y-axis pedestal 33 far from 22 side of X-axis driving device can also reduce.

The sliding block matched with a pair of of X-axis linear guide 21 is equipped in the present embodiment on the Y-axis pedestal 33 at both ends.It is theoretical On, 33 both ends of Y-axis pedestal and the contact area of X-axis linear guide 21 are bigger, and Y-axis component 3 supports more stable, the fortune of Y-axis component 3 It is dynamic more steady.It is simultaneously the stress condition of further monitoring X-axis linear guide 21, can be led in the X-axis straight line of side or two sides Setting detects the force snesor of its stress condition on rail 21.

As interchangeable embodiment, two sides X-axis linear guide 21 can be set as roller-type linear guide, with into one Step reduces the swing far from 22 end of X-axis driving device.Be simultaneously the stress condition of monitoring X-axis linear guide 21, can in side or Setting detects the force snesor of its stress condition in the X-axis linear guide 21 of person two sides.Using the flying probe tester of this scheme, both The integrality that ensure that test zone space, also ensures the stability of test machine assembly operating, to make the precision of test machine It is ensured.Meanwhile compared to the flying probe tester of bilateral driving, cost and installation difficulty are also reduced.

The present invention provides a kind of flying probe tester, and X-axis is arranged between the center line for deviateing a pair of of X-axis linear guidance device Driving device reduces X-axis driving device to the torque of driven end, so that making driven section of swing reduces.It will be close to X-axis simultaneously The X-axis linear guidance device of driving device is set as heavy-load type linear guide, so that the bearing capacity of straight line guiding mechanism improves, subtracts Its small deformation in load-bearing, to improve the smooth degree of Y-axis component movement.

Embodiment 5

As shown in fig. 6, the flying probe tester of the present embodiment includes: 10, two X-axis linear guidance devices 20, Y-axis bases of pedestal Seat 30 and X-axis driving device；Two X-axis linear guidance devices 20 are arranged at intervals on pedestal 10；Y-axis pedestal 30 slideably connects It connects on two X-axis linear guidance devices 20；X-axis driving device is arranged on pedestal 10 and close to an X-axis straight line guidance dress 20 settings are set, X-axis driving device driving Y-axis pedestal 30 is moved along the extending direction of X-axis linear guidance device 20；Y-axis pedestal 30 Include: the first sliding part 31, the second sliding part 32 and support portion 33, the first sliding part 31 and the second sliding part 32 respectively with two X-axis linear guidance device 20 is slidably matched, and the first sliding part 31 is arranged close to X-axis driving device；Support portion 33 is connected to first Between sliding part 31 and the second sliding part 32, the length of the extending direction along X-axis linear guidance device 20 of the first sliding part 31 Greater than the width of the extending direction along X-axis linear guidance device 20 of support portion 33, drawn with increasing Y-axis pedestal 30 in X-axis straight line Lead the span on device 20.

Using the flying probe tester of the present embodiment, the first sliding part 31 is arranged close to X-axis driving device, Y-axis pedestal 30 It is driving end close to one end of X-axis driving device, the other end of the separate X-axis driving device of Y-axis pedestal 30 is driven end, also It is to say, one end where the first sliding part 31 is driving end, and one end where the second sliding part 32 is driven end.First sliding part The length of 31 extending direction along X-axis linear guidance device 20 is greater than the prolonging along X-axis linear guidance device 20 of support portion 33 The width for stretching direction, in this way in the case where not changing overall structure, by driving end in the extension of X-axis linear guidance device 20 Span on direction increases the intensity of Y-axis pedestal so that the length-width-ratio of Y-axis pedestal 30 becomes smaller, when X-axis driving device drives Y When one end of the close X-axis driving device of axis pedestal 30, the swing of the driven end of Y-axis pedestal 30 is smaller, to reduce driven end Swing, improve positioning accuracy.

In the present embodiment, as shown in Figure 7 and Figure 8, the first sliding part 31 and support portion 33 form T-shaped structure.In this way So that support portion 33 is connected to the middle part of the first sliding part 31, guarantee operation of first sliding part on X-axis linear guidance device It is more stable.Certainly, the first sliding part and support portion can also be L-shaped,

In the present embodiment, the angle of the first sliding part 31 and support portion 33, which is equipped with, reinforces stabilizers 40.Reinforce stablizing Portion 40 can reinforce the intensity of Y-axis pedestal 30, and enhancing structure stability is effectively reduced the swing of driven end.Preferably, first Sliding part 31, support portion 33 and reinforcement stabilizers 40 form triangular structure.The structure of triangle is more stable.Specifically, first When sliding part 31 and support portion 33 form T-shaped structure, stabilizers 40 can be reinforced in two angle settings, it can also be one Stabilizers 40 are reinforced in a angle setting, this is required depending on the specific structure situation of flying probe tester.Preferably, Y-axis Pedestal 30 and reinforcement stabilizers 40 are integrally formed and are arranged, easy to process, reduce cost.

In the present embodiment, the length and support of the extending direction along X-axis linear guidance device 20 of the first sliding part 31 The length ratio along the extending direction perpendicular to X-axis linear guidance device 20 in portion 33 is in the range of 1/8~2/3.Namely It says, the pendulum of driven end is effectively reduced in the range of 1/8~2/3 in the ratio between the ratio between longest width and total length of Y-axis pedestal It is dynamic, reach optimal performance in the limited situation of increase in a limited space.

A kind of specification of flying probe tester in the prior art is as follows: Y-axis pedestal is in rectangular configuration, and Y-axis pedestal is in X Span on direction is 115mm, and the length of Y-axis pedestal in the Y direction is 920mm, the stress width of Y-axis pedestal in the Y direction For 60mm.As shown in figure 8, a kind of specification of the flying probe tester of the present embodiment is as follows: width X1 of the support portion in X-direction It is 370mm for 115mm, the span X2 of the first sliding part in the X direction, the width Y1 of the first sliding part in the Y direction is 60mm, the The stress width Y2 of one sliding part and reinforcement stabilizers in the Y direction is 150mm, and the length Y3 of Y-axis pedestal in the Y direction is 920mm.By above-mentioned comparison it is found that compared with prior art, the Y-axis pedestal of the present embodiment expands 3.2 times in the X direction, phase When expanding 3.2 times in the arm of force, the power being able to bear also just expands 3.2 times, and the Y-axis pedestal of the present embodiment is in the Y direction 2.5 times of stress width expansion, force analysis Y-axis pedestal self-strength expands 5 times, so that anti-swing ability can generally expand It is 3~5 times big.

In the present embodiment, as shown in fig. 6, X-axis driving device includes motor 51, screw rod 52 and nut, motor 51 is fixed On pedestal 10, screw rod 52 is rotatably arranged in the output axis connection on pedestal 10 and with motor 51, and nut is fixed on support It is threadedly coupled in portion 33 and with screw rod 52.Motor is rotated by the screw rod of leading screw and nut mechanism, what drive was connect with wire rod thread Nut is mobile, and then drives support portion 33 mobile.Certainly, the mobile structure of driving support portion is not limited in leadscrew-nut mechanism One kind may be arranged as hydraulic, air pressure, gear drive or other kinds of drive, and this is no longer going to repeat them.

In the present embodiment, X-axis driving device further includes spaced two support bases 53, the both ends difference of screw rod 52 It is mounted on two support bases 53.It is easily installed lead screw in this way.

In the present embodiment, flying probe tester further includes the second guide rail 61, slide 62 and test suite, and the second guide rail 61 is set It sets in support portion 33 and perpendicular to X-axis linear guidance device 20, slide 62 is slidably disposed on the second guide rail 61, test group Part is arranged on slide 62, and test suite tests circuit board.Test suite both can prolonging along X-axis linear guidance device Direction (i.e. X to) movement is stretched, can also be moved along the extending direction (i.e. Y-direction) of the second guide rail,

In the present embodiment, test suite includes test bench 71, motor, fixture 72 and testing needle, and test bench 71 is fixed on On slide, motor is fixed on test bench 71, and fixture 72 is slidably disposed on test bench 71, and testing needle is arranged in fixture 72 On, the glide direction of fixture 72 is perpendicular to the extending direction of X-axis linear guidance device 20 and the extending direction of the second guide rail 61.It surveys Test point can be moved along Z-direction.Preferably, test suite further includes rotary support 73, and fixture 72 is arranged by rotary support 73 On test bench 71.

Embodiment 6

By the processing equipment of the description of reference Fig. 9 to 14 according to a sixth embodiment of the present invention.Fig. 9 shows punching (or drilling) The general configuration of equipment 11 (relative to " processing equipment " of the invention), wherein arrow F indicates forward direction.Punch device 11 Die unit (die unit) 15 including perforation unit 13 (relative to " handling implement "), with 13 relative positioning of punch member (relative to " installation base portion "), mobile unit 19 and image pick-up device 21, wherein mobile unit 19 remains mounted on mold list Member 15 on the printed base plate 17 (relative to " substance to be processed ") with flexible thin plate-like shape and allow the printed base plate court Designated position on die unit 15 is advanced, which detects the printing base positioned relative to die unit 15 The positioning of the specified portions of plate 17.

Perforation unit 13 is equipped with multiple pressing elements (presser) 45, these pressing elements retractedly protrude out so as to close or remote It is mobile from die unit 15.The specified portions of printed base plate 17 are referring to the reference marker (reference for being attached to printed base plate 17 Mark) or the specific part of the wiring pattern of printed base plate 17, wherein it can be often simply referred to as " reference marker ".One A or multiple reference markers are attached to the designated position of printed base plate 7, and are imaged by image pick-up device 21, to detect Position of the printed base plate 17 relative to die unit 15.It is not shown, still punch device 11 is equipped with for installation It is controlled in the control unit that the operation of various mechanisms and component wherein is controlled, and equipment for manipulating their operation Platform.

Mobile unit 19 includes the first holding mechanism 23 and the second holding mechanism 25, for supporting the first and second holding machines The holding mechanism supporting structure 27 of structure 23 and 25 and the supporting structure for allowing holding mechanism supporting structure 27 freely to advance are mobile Mechanism 28.Supporting structure mobile mechanism 28 allows holding mechanism supporting structure and the first and second holding mechanisms 23 and 25 edge together X-axis line direction (that is, longitudinal direction of die unit 15) and along Y-axis line direction (its in a horizontal plane with X-axis line direction hang down Directly) freely advance.Supporting structure mobile mechanism 28 also allows holding mechanism supporting structure 27 (dimensionally vertical along z axis direction In X-axis line direction and Y-axis line direction) axially turn round.The specific configuration of supporting structure mobile mechanism 28 is known, bearing knot Structure mobile mechanism 28 is with the mobile mechanism for including motor, guide rail and ball screw (ball screw) and has motor With the swing mechanism of rotating shaft.

First holding mechanism 23 and the second holding mechanism 25 are equipped with maintaining part 23a and 25a, keep for place at its end The given end portion of printed base plate 17.Printed base plate 17 maintained portion 23a first and 25a are kept；Then, supporting structure mobile mechanism Thus 28 operations establish printed base plate 17 relative to the specified fixed of die unit 15 to move holding mechanism supporting structure 27 Position.

Holding mechanism supporting structure 27 can advance to extend and reduce in the first holding mechanism 23 and the second holding machine The distance between structure 25, wherein can the width relative to printed base plate 17 along X-axis line direction suitably adjust the first holding machine The distance between structure 23 and the second holding mechanism 25.That is, keeping the first and second of the opposite side corner sections of printed base plate 17 to keep Mechanism 23 and 25 suitably advances to extend the distance between first and second holding mechanisms to prevent ripple to be formed in printing In substrate 17.

Image pick-up device 21 is designed to (not show by the additional mobile mechanism particularly suitable for image pick-up device 21 It freely advances along X-axis line direction and along Y-axis line direction out), wherein CCD camera (not shown) is attached to be filled in image pickup Set the end of the arm 21a extended on 21 side.The details of the mobile mechanism of image pick-up device 21 is known, image pickup The mobile mechanism of device 21 includes the mobile member and motor unit with motor, guide rail and ball screw.

In addition to aforementioned mechanism, punch device 11 is also equipped with image processing apparatus, for storing the memory of various data And microcomputer.The image that microcomputer processing is picked up by the CCD camera of image pick-up device 21, to calculate printing base Position of the reference marker of plate 17 relative to die unit 15.Based on reference marker by calculating position, mobile unit 19 operates Holding mechanism supporting structure 27 along X-axis line direction and Y-axis line direction to advance, or line direction is axially turned round about the z axis, thus Establish specified positioning of the printed base plate 17 relative to die unit 15.

In the positioning of printed base plate 17, the maintaining part 23a and 25a of the first and second holding mechanisms 23 and 25 only keep printing Opposing corner areas on the side of brush substrate 17.Ripple is generated in printed base plate 17 due to traveling in order to prevent (waviness), mobile unit 19 control maintaining part 23a and 25a so as to be relevant to die unit 15 along Y-axis line direction backward or Obliquely move backward printed base plate 17.

Perforation unit 13 can pass through perforation unit mobile mechanism (not based on digital control (numerical control) Show) it is freely travelled along z axis direction.As shown in Figure 10 to 13, perforation unit 13 includes base frame 29, is fixed to base portion The punching base plate 31 of the lower surface of frame 29 is fixed to and punches the perforated board 33 of the lower surface of base plate 31, has cylinder The punch 35 and punching template (stripper) 37 of shape, wherein punch is through perforated board 33 so that end is fixed thereon To the lower surface of punching base plate 31.Punch 35 is used to punch so as to shape the printed base plate 17 being mounted on die unit 15 At designation hole.Punching template 37 is used to press the upper surface of printed base plate 17 when punching printed base plate 17 with punch 17.

Punch 35 is inserted through the through-hole 37a through the central part of punching template 37, freely to go along through-hole 37a Into.Base plate 31 is punched, perforated board 33 and punching template 37 are formed as rectangular shape, wherein perforated board 33 and punching template 37 The two rectangular shape having the same is smaller than punching base plate 31；The thickness for punching base plate 31 is smaller than punching template 37；Punching The thickness of plate 33 is about punching the half of the thickness of base plate 31.

Four with cylindrical shape guide post 39 through punching 31 four corners of base plate is firmly-fixed to punching The four corners of base plate 31.It is inserted into from the middle section of the punching downward projection of guide post 39 of base plate 31 through punching mould In the through-hole 37b of the four corners of plate 37.Control punching template 37 prevents further with gap S or more far from perforated board 33 The mechanism (not shown) of (see Figure 10 and 1) is plugged between punching base plate 31 or perforated board 33 and punching template 37.

Guide bushing (guide bush) 40 is placed at the top of through-hole 37b of punching template 37, to allow to punch Template 37 is guided the guidance of column 39 and moves freely through along the axial direction of guide post 39 (that is, z axis direction in Fig. 9), In, when punching template 37 is moved along guide post 39, they reduce the frictional resistance occurred in through-hole 37.In guide bushing 40 Under 37 through-hole 37b of punching template internal diameter it is more bigger than the outer diameter of guide post 39, and the internal diameter and guide post of guide bushing 40 39 roughly same outer diameter.Four compressed springs 41 are placed near punch 35, and this four compressed springs with each other it Between phase equi-angularly space (that is, 90 °) be axially arranged around punch 35.

Lower surface and the punching template of punching base plate 31 are compressed and are plugged on through the compressed spring 41 of perforated board 33 Between 37 upper surface.Punching template 37 is orthogonally pressed by compressed spring 41 to be located slightly away from perforated board 33.Four steps Through-hole 43 (see Figure 14) is formed as surrounding four compressed springs 41 and between phase isogonism each other in punching template 37 Axially it is arranged every (that is, 90 °).The top (with 33 relative positioning of perforated board) of step through-hole 43 has major diameter, and under it Portion has minor diameter, wherein step part 43a is formed in the middle position of step through-hole 43 along the longitudinal direction.

In Figure 14, the pressing element (presser) 45 with cylindrical shape is inserted into step through-hole 43 and is located in Near the punch 35 of perforation unit 13, wherein card division (jaw) 45a of pressing element is formed in the middle section of pressing element generally Side.For simplicity, make the office in the space between pressing element 45 and right side and left side guide post 39 of Figure 10 to 14 using double dot dash line Disconnect to portion.The upper end of the card division 45a of pressing element 45 by compressed spring 47 lower end press, and the lower end of card division 45a with The step part 43a of step through-hole 43 is contacted.

In the above structure, compressed spring 47 promotes pressing element 45 mobile towards die unit 15, so that pressing element 45 is from beating Hole unit 13 is prominent, so as to mobile close to or far from die unit 15.That is, pressing element 45 is fixed to perforation unit 13, so that Before the decline of perforation unit 13 contacts to punching template 37 with printing base portion 17, the end of pressing element is contacted with printed base plate 17. Compressed spring 47 has spring constant, so that they are generated relatively in the most compressed state within the scope of its compression/extension Lesser compressive load.Alternatively, compressed spring 47 can be replaced to press by using using the air spring of compressed air Pressing element 45, or can remove compressed spring 47 and suitably set pressing element 45 weight, this allow pressing element 45 due to The weight of themselves and be forced to move down.

The top of step through-hole 43 has major diameter, the outer diameter and compressed spring 47 than the card division 45a of pressing element 45 Outer diameter is bigger, and the lower part of step through-hole 43 has minor diameter, more bigger than the outer diameter in card division 45a pressing element 45 below. The top of compressed spring 47 is inserted into perforated board 33 and the through-hole of punching base plate 33, and it is logical that these through-holes are relevant to step Hole 43 is coaxially formed.Compressed spring 47 is plugged on the upper end of the card division 45a of pressing element 45 and the lower end of standing screw 49 Between, which is screwed into the internal screw thread on the through-hole top of punching base plate 31.

As described above, compressed spring 47 is inserted into the through-hole and punching template 37 of punching base plate 31 and perforated board 33 Step through-hole 43 in.This eliminates the needs prepared for storing the particular chamber of compressed spring 47.The present embodiment can be with Changed by the thickness and size and the spring constant of compressed spring 47 that suitably change punching base plate 31 and perforated board 33 Become, mode is that compressed spring 47 is inserted into the through-hole of perforated board 33 and the step through-hole 43 of punching template 37 or only It is inserted into the step through-hole of punching template 37, thus fixed spring 49 is attached in perforated board 33 or punching template 37.

Die unit 15 is placed under punching template 37, and including on base portion 51, the upper surface fixed to base portion 51 Mold 55 on mold base plate 53 and upper surface fixed to mold base plate 53.Printed base plate 17 is mounted on the upper of mold 55 On surface, i.e., in mounting surface.Mold base plate 53 and mold 55 have rectangular plate shape, wherein the thickness of mold base plate 53 It spends bigger than the thickness of mold 55.

Perforation (punch hole) 55a with cylindrical shape for being inserted into 35 lower end of punch is formed to run through The center of mold 55 in mounting surface in printed base plate 17.Pass through the punch being inserted into the perforation 55a of mold 55 35 pairs of printed base plates 17 being mounted on mold 55 punch.The internal diameter of perforation 55a is more bigger than the outer diameter of punch 35.Than perforation 55a bigger through-hole 53a is formed to penetrate through the center of mold base plate 53, the perforation 55a coaxial communication with mold 55.Separately Outside, it is formed at the four corners of mold base plate 53 for being inserted into the through-hole 53a of the lower end of guide post 39.

As shown in figure 14, step through-hole 57 is formed at the four corners of mold 55, and with for making guide post 39 Lower end insertion guide bushing 59 engage.Step through-hole 57 is positioned as with the through-hole 53b of mold base plate 53 coaxially Connection.The internal diameter of guide bushing 59 is more smaller than the internal diameter of through-hole 53b, but more bigger than the outer diameter of guide post 39.Card division 59a is formed In the lower end of guide bushing 59.Step through-hole 57 has step part 57a, so that compared with upper part, its underpart Diameter increases.Guide bushing 59 be maintained at step through-hole 57 step part 57a and mold base plate 53 upper surface it Between.When four guide posts 39 decline and its lower end is guided the guidance of bushing 59 simultaneously, punch 35 can be made accurately along Z axis It is moved along the perforation 55a of mold 55 in line direction.

Perforation unit 11 with above structure is used for according to series of steps (1) to (10) in specified location to printing Substrate 17 is punched.

(1) firstly, between the maintaining part 23a of the first holding mechanism 23 of adjustment and the maintaining part 25a of the second holding mechanism 25 Distance, to match the distance between the opposite end of printed base plate 17；The opposing corner areas maintained portion 23a of printed base plate 17 and 25a is kept；Then, the distance between the first holding mechanism 23 and the second holding mechanism 25 slightly extend, corrugated to prevent At in printed base plate 17.

(2) operation of supporting structure mobile mechanism 28 is mobile first and second holding mechanisms 23 and 25 --- their holding Portion 23a and 25a keep printed base plate 17, thus establish specified positioning of the printed base plate 17 relative to die unit 15, mode It is to be located in the reference marker of printed base plate 17 just under the punch 35 of perforation unit 13.

(3) mobile mechanism of perforation unit 13 declines perforation unit 13 along z axis direction, so that four pressing elements 45 Lower end directly presses the reference marker (or their close position) of printed base plate 17, thus weakens or eliminate printed base plate 17 Present on be bent or wrinkle (by Figure 10 " W " indicate).As shown in figure 11, the reference marker of printed base plate 17 is in close contact The upper surface of the mold 55 of die unit 15.At this point, compressed spring 47 forces pressing element 45 to be pressed into printed base plate 17 and mold 55 are in close contact.

(4) upper surface of the mold 55 of die unit 15 is in close contact due to the pressing of pressing element 45 in printed base plate 17 Under state, the arm 21a of image pick-up device 21 is advanced by its mobile mechanism, so that CCD camera is just located in printing On the reference marker of substrate 17.

(5) CCD camera picks up the image of the reference marker of printed base plate 17；Then, image is processed, to calculate print Position of the reference marker of brush substrate 17 relative to die unit 15.

(6) based on reference marker by calculating position, mobile unit 19 operates supporting structure mobile mechanism 28, so as to along Y Axis direction moves backward the first and second holding mechanisms 23 and 25 backward or obliquely --- their maintaining part 23a and 25a Printed base plate 17 is kept, thus printed base plate 17 is located in the designated position on the upper surface of the mold 55 of die unit 15 Place.

In the above case said, it is located at the center of 35 punched hole of device to be perforated when printed base plate 17 has one When reference marker, the position of printed base plate 17 is adjusted, so that reference marker coaxially matches the axis of punch 35.Work as printing When substrate 17 has multiple reference markers, reference marker is calculated relative to the position of die unit 15, is then based on reference to mark Note by calculating position come calculate the printed base plate 17 that device 35 to be perforated is got hole center, thus position printed base plate 17, so that the axis of each of hole matching punch 35 in center calculated.In this regard, the position of reference marker and shape is wanted It is stored beforehand in memory (not shown) at the relationship between the center in the hole on printed base plate 17.In above situation In, setting accuracy of the printed base plate 17 on die unit 15 can be increased, mode is to keep printing base by mobile The maintaining part 23a and 25a of first and second holding mechanisms 23 and 25 of plate 17 and so that printed base plate 17 is located in die unit 15 Mold 55 upper surface on specified location after, the CCD camera of image pick-up device 21 picks up printed base plate 17 The image of reference marker, to determine the position of reference marker again, wherein when printed base plate 17 is not located in mold 55 When specified location on upper surface, the first and second holding mechanisms 23 and 25 are advanced again, to position printed base plate 17 In specified location.After moving repeatedly the first and second holding mechanisms 23 and more than 25 times, it can further improve printing base Setting accuracy of the plate 17 on die unit 15.

(7) next, punch operation in order not to interfere punch 35, the arm 21a of image pick-up device 21 are single from punching The downside of member 13 is displaced outwardly.

(8) perforation unit 13 is declined by its mobile mechanism along z axis direction, thus makes the lower end of punching template 37 The upper surface of printed base plate 17 is contacted, as shown in figure 12.At this point, printed base plate 17 is pressed into die unit by four pressing elements 45 On 15 upper surface, the compressive load of the pressing element is increased by compressed spring 47, and printed base plate 17 by punching template 37 by into One step is pressed on the upper surface of die unit 15.

(9) perforation unit 13 is further declined by its mobile mechanism along z axis direction, is existed from there through punch 35 Hole is formed in printed base plate 17.The resolution element (extract element) of the printed base plate 17 as caused by punching is via wearing Hole 55a and through-hole 53a are fallen.

More than, due to the compression of compressed spring 41, the punching template 37 contacted with printed base plate 17 does not decline further, and It is directed towards the rise of perforated board 33.In addition, due to the compression of compressed spring 47, four pressing elements 45 contacted with printed base plate 17 not into The decline of one step, and its card division 45a is retracted into the through-hole of perforated board 33.

(10) next, perforation unit 13 by its mobile mechanism along z axis direction be moved upwards up to initial position (see Fig. 9).

Punch operation for printed base plate 17 is completed by abovementioned steps (1) to (10).

Punch operation is not required to be limited to above-mentioned steps (1) to (10), can be with modifications or changes sequence.Sixth embodiment It is designed to execute step (4) after step (3), wherein in step (3), perforation unit 13 declines to make pressing element 45 Printed base plate 17 is pressed, printed base plate 17 is in close contact with the upper surface of the mold 55 of die unit 15 again, in step (4), The arm 21 of image pick-up device 21 is advanced by mobile mechanism, so that CCD camera to be located on printed base plate 17.Replacement Ground can execute step (3) after executing step (4).

In step (3), (8), (9) and (10), perforation unit 13 is controlled as down or up.Alternatively, mold list Member 15 can be controlled as by its mobile mechanism it is down or up, without allow 13 declines of perforation unit/rising or with Decline/rising of perforation unit 13 is associated.In brief, the present invention needs perforation unit 13 close to or far from die unit 15 Mold 55 it is mobile, and need perforation unit 13 mobile close to die unit 15, so as to the printing to being mounted on mold 55 Substrate 17 is punched.

In the above modification, it is necessary to from 23 He of the first and second holding mechanisms before die unit 15 is down or up 25 maintaining part 23a and 25a discharges printed base plate 17, without considering step (1).In order to based on the ginseng calculated in step (5) It examines the position of label and beats other holes in printed base plate 17, it is necessary to repeat step (6), (8), (9) and (10).

As described above, the punch device 11 of the present embodiment is designed so that the directly pressing of pressing element 45 will be filled by image pickup Position near near 17 reference marker of printed base plate of 21 detections is set, to make printed base plate 17 be in close contact die unit 15 Mold 55 upper surface.This allows to reliably make reference marker will be by the detection of image pick-up device 21, printed base plate 17 Specified portions be in close contact mold 5 upper surface.That is, the CCD camera of image pick-up device 21 can accurate pick up printing The image of the reference marker of substrate 17, the upper surface of the printed base plate 17 be perforated before punch operation template 37 pressing.By This, can accurately detect positioning of the printed base plate 17 relative to mold 55 before punch operation.

The present embodiment is designed so that pressing element 45 is mounted in the perforation unit 13 for punching in printed base plate 17, The printed base plate is suitably close to or separate mold 55 is mobile and is then fitted in precisely on the upper surface of mold 55. That is, when perforation unit 13 is mobile close to or far from mold 55, pressing element 45 is correspondingly close to or far from being mounted on the upper of mold 55 Printed base plate 17 on surface is mobile.This eliminates the needs of other units dedicated for mobile pressing element 45.It is possible thereby to logical The quantity of reduction component is crossed to reduce the overall size of punch device 11.

Perforation unit 13 is advanced by digital control by its mobile mechanism；Therefore, travel distance is by highly precisely Control.Pressing force can be subtly adjusted in the case where considering characteristic, bending and the wrinkle of printed base plate 17, passed through as a result, Pressing element 45 suitably presses printed base plate 17.Apply small pressing force so that printed base plate 17 is tight to printed base plate 17 in pressing element 45 In the state of the upper surface for touching touch tool 55, the first and second holding mechanisms 23 and 25 --- its maintaining part 23a and 25a are kept Printed base plate 17 --- it is advanced by control accurately to establish specified positioning of the printed base plate 17 on 55 upper surface of mold.By This, can further improve setting accuracy of the printed base plate 17 relative to the mold 55 of die unit 15.

When die unit 15 be based on it is digital control only travelled upwardly along z axis direction by its mobile mechanism when, or When both die unit 15 and perforation unit 13 are based on digital control traveling, the pressure for pressing printed base plate 17 can use 45 adjustment setting accuracy of tool.Since perforation unit 13 is equipped with " retractible " pressing element 45, these pressing elements can be close or remote Mold 55 from die unit 15 is mobile, it is possible to prevent pressing element 45 from interfering punch operation, wherein as pressing element 45 retracts simultaneously Far from mold 55, punched in printed base plate 17 by perforation unit 13.Thus, it is possible to by punch device 11 in printed base plate Hole is not formed in 17 troublesomely.

The punch device of the present embodiment is designed to compressed spring 47 and pressing element 45 is promoted to press printed base plate 17, the printing base Thus plate is in close contact the upper surface of mold 55.Simple and cheap structure in this way, can reliably make printed base plate 17 are in close contact the upper surface of mold 55, and pressing element 45 can reliably be made to retract far from mold 55.The present embodiment is beaten Hole equipment is characterized in that pressing element 45 is before perforation unit 13 shifts near the printed base plate 17 being mounted on the upper surface of mold 55 Printed base plate 17 is pressed, to be in close contact printed base plate 17.

I.e., it is possible to pass through punching after printed base plate 17 is pressed by pressing element 45 and is in close contact the upper surface of mold 55 Unit 13 forms hole in printed base plate 17.In addition, before the punching template 37 of perforation unit 13 contacts printed base plate 17, print Brush substrate 17 is pressed from the pressing element 45 outstanding of perforation unit 13.This makes that the upper of mold 55 can be in close contact in printed base plate 17 In the state of surface, gap is formed between the punching template 37 and printed base plate 17 of perforation unit 13.That is, image pick-up device 21 CCD camera positioning in the gap, so as to pick up printed base plate 17 reference marker image.

In addition, pressing element 45 is arranged in the punch device 11 of the present embodiment near the punch 45 of perforation unit 13.This makes Can be in close contact the upper surface of mold 55 in printed base plate 17 and approach simultaneously will be formed on 17 pore location of printed base plate Close position by pressing element 45 press in the state of, hole is formed in printed base plate 17 by the punch 35 of perforation unit 13. This further improves the accuracy for forming hole in printed base plate 17 by punch device 11.

Embodiment 7

Next, the seventh embodiment of the present invention will be described with reference to Figure 15 to 19, wherein identical with component in Fig. 9 to 6 Component is presented with like reference characters；Thus it is necessary to its repeated explanation is omitted or simplified.Figure 15 shows that substrate inspection is set Standby 61 construction, with respect to the processing equipment of seventh embodiment of the invention.Base board inspection apparatus 61 examines electrical conductivity Whether correctly established in the wiring pattern (not shown) of the printed base plate 63 with flexible plate shape.Specifically, make more It is a that detector is examined to be in close contact multiple electric contacts on printed base plate 63, to examine its electrical conductivity.

Base board inspection apparatus 61 includes installation base portion 64, mobile unit 19, and detector cells 65 and lower part inspection are examined in top Detector cells 66, verification unit 67, upper portion connecting structure 69 and lower part connection unit 71 and image pick-up device 21 are tested, Wherein, the installation base portion 64 is for installing printed base plate 63, and the mobile unit 19 is for remaining mounted on table on installation base portion 64 Printed base plate 64 on face and the mobile printed base plate in designated position installed on 64 upper surface of base portion so as to direction that is used to advance, should It examines detector cells 65 and lower inspection detector cells 66 to be fixed to and examines detector mobile unit (not shown) simultaneously in top It is driven to be moved simultaneously or respectively along the vertical direction vertical with the installation upper surface of base portion 64, the verification unit 67 packet Include judging unit 67a and the control unit for being controlled the various units and element that are mounted in base board inspection apparatus 61 (illustrating below its detailed content), portion connecting structure 69, which is used to for verification unit 67 to be connected to top, on this examines detector 65, The lower part connection unit 71 is used to verification unit 67 being connected to lower inspection detector 66, and the image pickup units 21 are for examining Survey position of the specified portions of printed base plate 63 relative to installation base portion 64.

It examines detector mobile unit to execute and detector cells 65 and lower inspection detector cells 66 is examined to top Digital control, top examines detector cells and lower inspection detector cells to be thus controlled as moving in the vertical direction.Print The specified portions of brush substrate 63 are attached to the reference mark of the specific part of 63 wiring pattern of printed base plate 63 or printed base plate Note.For convenience, it is referred to as " reference marker " in the following description.Specifically, one or more reference markers are attached to The designated position of printed base plate 63, and be imaged by image pick-up device 21, to detect the printing on installation base portion 64 The position of substrate 63.It is not shown, base board inspection apparatus 61 includes for being controlled its various unit and component The operating console of the various units and component of control unit and permission user's operation base board inspection apparatus 61.Control unit includes The various units of equipment 61 and the various programs of component are examined in CPU, RAM and ROM, ROM storage for operation substrate.

In addition to foregoing units and device, base board inspection apparatus 61 further includes image processing unit, for storing various data Memory and microcomputer.Microcomputer carries out at image the image picked up by the CCD camera of image pick-up device 21 Reason, to calculate position of the reference marker (one or more) of printed base plate 63 relative to installation base portion 64.Based on reference mark Remember (one or more) by calculating position, the operation of mobile unit 19 supporting structure mobile mechanism 28, so as to the left side in Figure 15 Right direction or the mobile holding mechanism supporting structure 27 of vertical direction perpendicular to Figure 15 paper, and make its around vertical direction axially Thus specified positioning of the printed base plate 63 relative to installation base portion 64 is established in revolution.

Due to establishing positioning by mobile printed base plate 63, the corner of the printed base plate 63 keeps machine by first and second The maintaining part 23a and 25a of structure 23 and 25 are kept, so maintaining part 23a and 25a can be orthogonally along across the directions of Figure 15 paper It moves backward simultaneously far from installation base portion 64, to prevent ripple to be formed in printed base plate 63.Base board inspection apparatus 61 further includes Measuring unit with circuit, for measuring the detection for examining the top of detector cells 65 that detector 73 is examined to export from top The detection signal of the lower inspection detector 74 of signal and lower inspection detector cells 66 output.

Measuring unit examines the output of detector 73 to examine letter via the top connecting line 69a of top connection unit 69 to top Number, it also examines the output of detector 74 to examine signal to the lower part via the lower part connecting line 71a of lower part connection unit 71, then detects Unit receives the inspection for being detected as the electric contact of printed base plate 73 from top inspection detector 73 and lower inspection detector 74 Survey signal.The RAM for the control unit being mounted in base board inspection apparatus 61 can be stored for holding to detection signal with reloading The conductive various data examined of row.Based on the program and data being stored in ROM and RAM, it is single that the CPU of control unit is based on measurement The measurement result of member determines electrical conductivity.The judging unit 67a of verification unit 67 includes CPU and measuring unit.

Detector cells 65, lower inspection detector cells 66 can be examined into top according to the specification of printed base plate 63 It is replaced with installation base portion 64 new.It includes three parallel arranged rectangular slabs that detector cells 65 are examined on top, that is, on Detector 73 is examined on portion base plate 75a, the first upper board 76a and the second upper board 77a and multiple tops.As shown in figure 19, Multiple through-holes 81 for running through the first upper board 76a are positioned as opposite with multiple through-holes 83 for running through the second upper board 77a.Top inspection Detector 73 is tested to be inserted into through-hole 81 and through-hole 83.

Due to the row for the electric contact that the arrangement of through-hole 81 and the arrangement matching of through-hole 83 are formed on 63 surface of printed base plate Column, so the arrangement of the electric contact of the arrangement matching printed base plate 63 of detector 73 is examined on top.Including flexible nichrome wire The lower end of top cable 85a be electrically connected to the upper end that detector 73 is examined on top, and to be electrically connected to top connection single for the upper end Member 69, is thus electrically connected to verification unit 67 for the top connecting line 69a of top connection unit 69.

Four through-holes 78 (see Figure 19) are formed in the first upper board 76a, are collectively arranged in the first upper board to surround Examine a part of detector 73 in top in the central part of 76a.The top of four cylinder spring maintaining parts 87 is logical with four Hole 87 engages, these spring maintaining part upper ends closure, open at its lower end.Keep four cylinder spring maintaining parts 87 of compressed spring 47 Lower end link the second upper board 77a upper surface.That is, four spring maintaining parts 87 are across and fixed to the first upper board 76a And second between upper board 77a.The internal diameter through-hole 89 smaller than the internal diameter of spring maintaining part 87 is formed in the second upper board 77a, The surface of second upper board is protected in the specified location connection spring that the axis with spring maintaining part 87 is correspondingly axially arranged Hold the lower end in portion 87.

With stepped cylindrical shape and on it at end there is the pressing element 45 of card division 45a to be inserted into through-hole 89, wherein The upper end of card division 45a is installed in the lower end pressing of the compressed spring 47 in spring maintaining part 87, so that the lower end of card division 45a The upper end of the opening of contact through hole 89.The internal diameter of through-hole 89 is more bigger than the outer diameter of the lower part of the pressing element 45 lower than card division 45a.That is, Compressed spring 47 is compressed and is plugged between the closure upper end of spring maintaining part 87 and the upper end of the card division 45a of pressing element 45.

Compressed spring 47 promotes pressing element 45 to decline towards installation base portion 64, wherein pressing element 45 examines detector list from top Member 65 is downwardly projected, so as to mobile close to or far from installation base portion 64.Before top examines detector cells 65 to decline, pressing element 45 orthogonally protrude below top inspection detector 73, so that pressing element 45 presses printed base plate 63 compresses the compression bullet simultaneously Spring 47.That is, pressing element 45, which is attached to top in specified location, examines detector cells 65, these designated positions contact pressing element 45 Printed base plate 63, so as to top examine detector cells 65 decline and top examine detector 73 lower end contact really Printed base plate 63 is pressed before printed base plate 63.Specifically, pressing element 45 is arranged in top and examines near detector 73 and at them Between.

Upper base plate 75a has frame-like shape, has the rectangular through-hole 91 divided therethrough.First upper board 76a is thinner and smaller than upper base plate 75a.The four corners of first upper board 76a are fixed via four the first upper post 93a To the lower surface of top base plate 75a.Second upper board 77a has thickness identical with the first upper board 76a, but ratio first Upper board 76a is small.Second upper board 77a is fixed to the four of the lower surface of the first upper board 76a via four the second upper post 95a A corner.

The external screw thread at the first upper end upper post 93a is formed in engage with the internal screw thread being formed in upper base plate 75a, The internal screw thread at the first lower end upper post 93a is formed simultaneously to engage via bolt (not shown) with the first upper board 76a.Separately Outside, it is formed in the external screw thread at the second upper end upper post 95a to engage with the internal screw thread being formed in the first upper board 76a, simultaneously The internal screw thread at the second lower end upper post 95a is formed in engage via bolt (not shown) with the second upper board 77a.

As shown in figure 19, it includes detector 73a and insulation tube 73b that detector 73 is examined on top, these detectors 73a includes Tungsten material simultaneously has thin bar shape, these insulation tubes are used to coat the central part of detector 73a.The upper end of detector 73a is passed through The through-hole of the first upper board 76a is worn, so as to prominent towards upper base plate 75a, while the lower end of detector 73a is on second The through-hole of portion plate 77a, to be downwardly projected from the second upper board 77a.That is, insulation tube 73b is plugged on the first upper board 76a and Between two upper board 77a.

The protrusion length ratio of the upper end detector 73a projected upwards from the upper surface of the first upper board 76a is from the second top The protrusion length of the lower end plate 77a downward projection of detector 73a is longer.With upper detector unit 65 vertically under Drop, the lower end of detector 73a and is formed in the contact formed on the surface of printed base plate 63.Under the cable 85a of top End is linked to the upper end of the detector 73a projected upwards from the first upper surface upper board 76a.

Quantity, the quantity of top cable 85a and the top connecting line of top connection unit 69 of top inspection detector 73 The quantity of 69a is all identical as the quantity of electric contact being formed on 63 surface of printed base plate.For convenience, Figure 15 to 10 is shown These a small amount of components.When top examines the contact of detector 73 to be formed in the electric contact on 73 surface of printed base plate, relative to upper Detector 73 is examined to establish electrical conduction in portion, wherein to judge whether to examine detector 73 and printed base plate on top based on resistance Electrical conduction has been correctly established between 63.Specifically, top examines detector 73 to will test signal via top connection unit 69 It exports to the judging unit 67a of verification unit 67, so that the determining electrical conduction with printed base plate 63 of judging unit 67a.

The resistance for being in advance based on the high quality of products of printed base plate 63, which determines, examines critical value；It is then detected that printed base plate The resistance of 63 examined article, to determine tested measuring resistance to the ratio for examining critical value, thus judge whether relative to The examined article of printed base plate 63 establishes good electrical conduction.For the electrical conduction of the examined article with printed base plate 63 It is related it is conductive examine, can be with when tested measuring resistance is to examining the ratio of critical value to be less than predetermined designated ratio value The product of judgement preferably, when the ratio is greater than designated ratio value, it can be determined that be defective substandard products.For with printed base plate The related insulation test of insulation characterisitic of 63 examined article, when tested measuring resistance is specified to examining the ratio of critical value to be greater than When ratio value, it can be determined that product preferably, when the ratio is less than designated ratio value, it can be determined that be defective substandard products. The above judgment method is applied similarly to the conductive inspection on lower inspection detector cells 66, and details will be retouched later It states.Similarly, various electrical inspections can be executed, such as insulation test and static capacity are examined.

The a part of similar of detector cells 65 is examined on the basic structure of lower inspection detector cells 66 and top, under this Detector cells are examined not have spring maintaining part 87, pressing element 45 and compressed spring 47 and vertically run in structure in portion ?.Specifically, include top examine detector cells 65 in upper base plate 75a, the first upper board 76a, the second top Plate 77a, the first upper post 93a, the second upper post 95a, top examine detector 73 and top cable 85a to examine with lower part is included in Test lower base plate 75b, the first lower panel 76b, the second lower panel 77b, the first lower post 93b, in detector cells 66 Two lower post 95b, lower inspection detector 74 are identical with lower cable 85b.

Lower inspection detector 74 is electrically connected to verification unit 67 via lower cable 85b and lower portion connecting structure 71.Under Portion examine the quantity of the lower part connecting line 71a of the quantity of detector 74, the quantity of lower cable 85b and lower portion connecting structure 71 with The number of electrical contacts being formed on 63 back side of printed base plate that experience is examined is identical.For convenience, these in Figure 15 to 19 Quantity is fewer than actual quantity.

As shown in figure 19, multiple through-hole 64a are formed in installation base portion 64 in specified location, these designated positions are under The position of the lower inspection detector 74 of detector cells 66 is examined to match in portion.When the upper end of lower inspection detector 74 is inserted When entering into the through-hole 64a of installation base portion 64 to contact the electric contact being formed on 63 back side of printed base plate, lower inspection is visited It surveys between device 74 and establishes electrical conduction, judge whether to establish electrical conduction relative to printed base plate 63 hereby based on resistance.This point On, the quantity of the quantity for the electric contact being formed on 63 back side of printed base plate and the electric contact being formed on 63 surface of printed base plate It is identical or different.

Execute conductive inspection on printed base plate 63 according to step (1) to (10) by using base board inspection apparatus 61.

The distance between maintaining part 23a and 25a of (1) first and second holding mechanism 23 and 25 are set to and printing base The distance between the opposite end of plate 63 is identical, keeps the opposing corner areas of printed base plate 63 with maintaining part 23a and 25a as a result,；So Afterwards, the distance between first and second holding mechanisms 23 and 25 are widened, to prevent ripple to be formed on printed base plate 63.

(2) operation of supporting structure mobile mechanism 28 is mobile first and second holding mechanisms, 23 He of direction installation base portion 64 25 --- its maintaining part 23a and 25a keeps printed base plate 63, specified on installation base portion 64 thus to establish printed base plate 63 Positioning, the reference marker of printed base plate 64 are located in top and the top of detector cells 65 are examined to examine under detector 73.

(3) mobile mechanism's operation is makes top that detector cells 63 be examined vertically to decline, so that four pressing elements 45 lower end directly presses the close position near the reference marker of printed base plate 63, thus makes print shown in Figure 15 to 11 On brush substrate 63 it is that may be present bending or wrinkle W be straightened.The back side of the printed base plate 63 including reference marker is completely tight as a result, The upper surface of contiguity touching installation base portion 64, as shown in figure 16.At this point, compressed spring 47 forces pressing element 45 to press printed base plate 63, Thus the printed base plate 63 is in close contact the upper surface of installation base portion 64.

(4) in the state that printed base plate 63 is pressed by pressing element 45 and is in close contact the upper surface of installation base portion 64, with the The abovementioned steps of six embodiments are similar, and mobile mechanism's operation is the arm 21a of mobile image pick device 21, wherein image pickup The CCD camera of device 21 is just located on the reference marker of printed base plate 63.

(5) CCD camera picks up the image of the reference marker of printed base plate 63；Then, image is processed, to calculate print Position of the reference marker of brush substrate 63 relative to installation base portion 64.

(6) position based on the reference marker calculated in step (5), mobile unit 19 operate supporting structure mobile mechanism 28, so that edge suitably moves backward the first and second holding mechanisms 23 and 25 across the direction of Figure 15 paper --- its maintaining part 23a and 25a keeps printed base plate 63, thus establishes specified positioning of the printed base plate 63 on the upper surface of installation base portion 64.

More than, at least two reference markers are attached to printed base plate 63, so that their positions relative to installation base portion 64 It sets and is calculated；Then, the printed base plate compared with the regular position for the printed base plate 63 being regularly mounted on installation base portion 64 63 inclinations angle and position deviation are calculated and for establishing specified positioning of the printed base plate 63 on installation base portion 64.

Setting accuracy of the printed base plate 63 on installation base portion 64 can be increased, mode is once first and second protect It holds mechanism 23 and 25 --- its maintaining part 23a and 25a keeps printed base plate 63 --- to be positioned relative to installation base portion 64, then prints The reference marker of brush substrate 63 is imaged by the CCD camera of image pick-up device 21, to detect its position, wherein work as printing When substrate 63 is not located at the specified location on installation base portion 64, the first and second holding mechanisms 23 and 25 --- it is kept Portion 23a and 25a keep printed base plate 63 --- it advances again, it is specified fixed on installation base portion 64 to establish printed base plate 63 Position.After moving repeatedly the first and second holding mechanisms 23 and more than 25 times, it can further improve printed base plate 63 and install Setting accuracy on base portion 64.

(7) top examines detector 73 to interfere conductive inspection in order to prevent, and the arm 21a of image pick-up device 21 is from being mounted on Printed base plate 63 on installation base portion 64 is displaced outwardly.

(8) next, mobile mechanism's operation upper part examines detector cells 65, vertically further to decline, with So that top examines the lower end in contact of detector 73 to be formed in the electric contact on 63 surface of printed base plate, as shown in figure 17.At this Under kind state, conductive examine is executed on the surface of printed base plate 63.At this point, four pressing elements that lower end is contacted with printed base plate 63 45 no longer decline, further to compress the compressed spring 47, so that, as the upper end of pressing element 45 is close to spring maintaining part 87 Upper end, compressive load is applied to pressing element 45, and pressing element 45 is thus further towards the upper surface pressing printing base of installation base portion 64 Plate 63.

(9) next, mobile mechanism operates, so that lower inspection detector cells 66 vertically rise, so that The upper end of the lower inspection detector 74 of lower inspection detector cells 66 is inserted into the through-hole 64a of installation base portion 64, and Then the electric contact being formed on 63 back side of printed base plate is contacted, as shown in figure 18.In this state, in printed base plate 63 Conductive examine is executed on the back side.

Due to lower inspection detector 74 (its quantity is equal to the quantity that detector 73 is examined on top) contact printed base plate 63 Electric contact on the back side, and top examines detector 73 to contact the electric contact on the surface of printed base plate 63, lower inspection detection Device 74 is electrically connected to top via printed base plate 63 and examines detector 73, thus, it is possible to execute conduction for detector 73 and 74 It examines.

(10) finally, top examines detector cells 65 to rise to its initial position by its mobile mechanism, and lower part Detector cells 66 are examined to drop to its initial position by its mobile mechanism, base board inspection apparatus 61 is by such as Figure 15 as a result, It is shown such to reset.

Thus, it is possible to which conductive inspection is completed on printed base plate 63 according to abovementioned steps (1) to (10).

The present embodiment can be modified by suitably changing the sequence and content of step (1) to (10).The present embodiment quilt It is designed as executing step (4) after step (3), wherein in step (3), top examines the decline of detector 65 to make to press 45 pressing printed base plate 63 of tool, upper surface of the printed base plate 63 thus with installation base portion 64 is in close contact, in step (4), figure As the arm 21a movement of pick device 21, CCD camera is just located on printed base plate 63.Alternatively, it can hold Step (3) are executed after row step (4).

The present embodiment is designed to execute step (9) after step (8), wherein in step (8), top, which is examined, to be visited It surveys device 65 to decline, to make top that detector 73 be examined to contact the electric contact on the surface of printed base plate 63, and thus print Conductive inspection is executed on substrate 63, in step (9), lower inspection detector 66 rises, to make lower inspection detector 74 The electric contact on 63 back side of printed base plate is contacted, and thus executes conductive examine on printed base plate 63.Alternatively, step (8) (9) sequence can be changed as follows:

Firstly, lower inspection detector 66 rises, to contact lower inspection detector 74 on 63 back side of printed base plate Electric contact；Then, top examines detector 65 to decline, so as to the surface for making top that detector 73 be examined to contact printed base plate 63 On electric contact.Alternatively, it may be performed simultaneously top and examine the decline of detector 65 and the rising of lower inspection detector 66, To make top examine detector 73 and lower inspection detector 74 while to contact the electricity on the surface and the back side of printed base plate 63 Thus contact executes the conductive inspection on printed base plate 63.

In order to be formed in printed base plate based on the position of the reference marker of the printed base plate 63 of detection in step (5) It executes additional conductive on other electric contacts in 63 to examine, step (6), (8), (9) and (10) can be repeatedly performed, to incite somebody to action Next designated position being examined on the upper surface for moving partially into installation base portion 64 of printed base plate 63, thus executes additional Conductive examine.

As described above, the base board inspection apparatus 61 of the present embodiment is designed so that the directly pressing close position of pressing element 45, These close positions are close will be by the reference marker for the printed base plate 63 that image pick-up device 21 is imaged, to make printed base plate 63 It is in close contact installation base portion 64.This allows to reliably make the reference marker of printed base plate 63 (will be by image pick-up device 21 Imaging) it is in close contact the upper surface of installation base portion 64.That is, the CCD camera of image pick-up device 21 can be to printed base plate 63 Reference marker imaging, the surface of the printed base plate is examined the top of detector cells 65 to examine and is visited in conductive examine by top Device 73 is surveyed to press；Pacifying thus, it is possible to accurately detect printed base plate 63 using image pick-up device 21 before conduction is examined Fill the position on base portion 64.

The present embodiment is designed so that, can be moved close to or detector cells are examined on the top far from installation base portion 64 65 are equipped with pressing element 45, wherein top examines detector cells 65 to move close to installation base portion 64, so as to being mounted on installation base Electric contact on the surface of printed base plate 63 on the upper surface in portion 64 executes conductive examine；Simply will thus, it is possible to pass through It is close to or far from installation base portion 64, to keep pressing element 45 mobile for close to or far from installation that top, which examines detector cells 65 mobile, Printed base plate 63 on the upper surface of installation base portion 64.This is eliminated using other mechanisms dedicated for mobile pressing element 45 It needs；It is possible thereby to reduce the overall size of base board inspection apparatus 61 by the quantity for reducing component.

Since to examine detector cells 65 to undergo by its mobile unit digital control on top, so its travel distance quilt Highly precisely control.It is contemplated that the characteristic of printed base plate 63, bending and wrinkle are applied to printed base plate subtly to adjust The pressing force of 63 pressing element 45.Furthermore it is possible to by suitably moving the first and second holding mechanisms 23 and 25 --- it keeps Portion 23a and 25a keep printed base plate 63 --- and specified positioning of the printed base plate 63 on the upper surface of installation base portion 64 is established, And pressing element 45 applies the pressing force of " fine " to printed base plate 63, to be in close contact the upper surface of installation base portion 64.Therefore, may be used Further to improve setting accuracy of the printed base plate 63 on installation base portion 64.

Since top examines detector cells 65 to be equipped with pressing element 45, the pressing element is retractedly close to or far from installation base portion 64 is mobile, it is possible to prevent pressing element 45 --- when top examines the decline of detector cells 65 so as to on 63 surface of printed base plate Electric contact when executing conductive examine the pressing element retract away from installation base portion 64 --- interference is conductive to be examined；Thus, it is possible to not have Have and conductive examine reliably troublesomely is executed to the electric contact on the surface of printed base plate 63.Because base board inspection apparatus 61 is set Be calculated as so that compressed spring 47 promote pressing element 45 press printed base plate 63, be in close contact installation base portion 64 upper surface, so It so that printed base plate 63 is in close contact the upper surface of installation base portion 64, and simple and cheap structure can be passed through Pressing element 45 is set to retract away from installation base portion 64.

According to base board inspection apparatus 61, the decline of detector cells 65 is examined on top and close to the upper surface of installation base portion 64 On printed base plate 63 before, pressing element 45 press printed base plate 63 so that top examine detector 73 lower end in contact printing Substrate 63.This allows to press printed base plate 63 to after being in close contact the upper surface of installation unit 64 in pressing element 45, use Detector 73 is examined to execute conductive examine to the electric contact on the surface of printed base plate 63 in portion；Thus, it is possible in printed base plate 63 On be appropriately performed conductive inspection.

Because examining detector cells 65 outstanding from top before top examines detector 73 to contact printed base plate 63 Pressing element 45 presses printed base plate 63, it is possible thereby between being formed between the lower end and printed base plate 63 that detector 73 is examined on top Gap, wherein the printed base plate has been placed as being in close contact the upper surface of installation base portion 64 and being pressed by pressing element 45.That is, The CCD camera of image pick-up device 21 can place in the gap, so as to the reference marker imaging to printed base plate 63.

In base board inspection apparatus 61, pressing element 45 is placed on top and the top of detector cells 65 is examined to examine detector Near 73 and between.That is, top examines detector 73 to contact printed base plate 63, and pressing element 45 to experienced conductive inspection The close close position of electric contact on the surface of printed base plate 63 is pressed, to make printed base plate 63 be in close contact installation The upper surface of unit 64；Thus, it is possible to highly precisely execute conductive examine to the electric contact on the surface of printed base plate 63.

6th and the 7th embodiment is exemplary and unrestricted in the present invention；They can be with various as a result, Mode is further modified, without departing from purport of the invention；As a result, about the various of punch device 11 and base board inspection apparatus 61 Modification is within the scope of the present invention.6th and the 7th embodiment shows four pressing elements 45 in the accompanying drawings；But pressing element Quantity is not restricted to four, and for example can be set to one, three, five or more.

In the case where four or less pressing elements, the printed base plate bending with same specification is tended to easily with wrinkle Occur in specified location.For this purpose, these positions are examined in advance, so as to according to each printing base with the conductive inspection of experience Detector is examined in the top of perforation unit and base board inspection apparatus that pressing element is attached to punch device by the related designated position of plate Unit.In the case where a large amount of pressing elements, pressing element is examined in detector cells on perforation unit and top as a grid, with each other Between appointed interval arrangement, wherein the position of the lower end of pressing element is evenly distributed, relatively wide so as to cooperating contact printed base plate Wide region.

6th and the 7th embodiment is designed to execute punching on printed base plate and examine；But this is not limitation.That is, print Brush substrate can be replaced by flexible thin resin sheet or paper.6th and the 7th embodiment is related to punch device and substrate inspection is set It is standby, but this is not limitation, and can be changed to printing equipment, is printed in the specified portions on the surface of processed material Brush character and image.

In the punch device 11 of sixth embodiment, four compressed springs 41 with each other equiangular distance (that is, 90 °) arrangement, to surround punch 35；Compressed spring 47 and pressing element 45 are further arranged to around compressed spring 41.Replacement Ground can arrange pressing element 45 and compressed spring 47 between compressed spring 41.That is, punch 35 can be by pressing element 45 and compression bullet Spring 47 and 41 surrounds, and pressing element 45 and compressed spring 47 are arranged to closer to punch 35.This allows to printed base plate 17 are in close contact the upper surface of mold 55, and pressing element 45 further presses beating very close to punch 35 to be used for printed base plate 63 The more neighbouring position of the position in the hole in hole.In this configuration, the punch 35 of perforation unit 13 can be with very high precision Hole is formed in printed base plate 17.

In the base board inspection apparatus 61 of the 7th embodiment, pressing element 45 is arranged in upper in top inspection detector cells 65 Portion examine detector 73 near and between.It may be modified such that, replacement is arranged in top and examines between detector 73 Pressing element 45, pressing element 45 simply examine detector 73 to be arranged close to top.In this configuration, it is examined in pressing element 45 to experience conduction In the state that the neighbouring close position in the designated position for the printed base plate 63 tested is pressed, top can be made to examine detector 73 Printed base plate 63 is contacted, to make printed base plate 63 be in close contact the upper surface of installation base portion 64；Thus, it is possible to highly precisely Conductive examine is executed to the electric contact on the surface of printed base plate 63.

In the base board inspection apparatus 61 of the 7th embodiment, mobile unit examines detector cells 65 to execute number on top Control is vertically to advance.It can be revised as, mode be mobile unit to installation base portion 64 execute it is digital control come edge Vertical direction is advanced, and examines detector cells 65 without mobile top, or do not examine detector cells 65 to move together with top It is dynamic.In brief, the 7th embodiment is defined with flowering structure: examining detector cells 65 and installation base portion 64 to be controlled as in top Close to or far from moving each other, so that the printed base plate 63 on the upper surface to installation base portion 64 executes conductive inspection.In the knot In structure, consider to examine the travel distance obtained of detector cells 65 by installation base portion 64 and top, and image is suitably determined The height vertically of pick device 21 and position.

Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or It changes still within the protection scope of the invention.

Claims (28)

1. a kind of flying probe tester, comprising:

Base portion is installed, is horizontally disposed with, for installing the processed material with flexible and thin shape；

Processing unit, the processing unit is controlled as advancing close to or far from the installation base portion, and the processing unit leans on The nearly installation base portion is advanced to execute processing on the processed material；

Image pick-up device, the position of the relatively described installation base portion of specified portions for detecting the processed material；With

Mobile unit, for the specified portions based on the processed material detected position and move the processed material It moves to the designated position on the installation base portion,

Wherein, the processing unit is equipped with multiple pressing elements, and the pressing element is retractedly moved relative to the installation base portion, and And before the position that described image pick device detects the specified portions of the processed material, the pressing element is located described The specified portions for managing material nearby press the processed material, to be in close contact with the installation base portion；

Wherein, it advances in processed material of the processing unit on the installation base portion so as in the processed material Before upper execution processing, the multiple pressing element presses the processed material, to be in close contact with the installation base portion；

It is characterized by:

The processing unit includes:

X-axis component, the X-axis component guidance measuring head is on test platform along X-motion；The X-axis component includes a pair The X-axis linear guidance device being arranged in parallel on horizontal base and an X-axis driving device；

Y-axis component, the Y-axis component guide the measuring head on the test platform along Y-motion, the Y-axis component Both ends be slidably connected respectively with two X-axis linear guidance devices；The measuring head connect and is arranged with the Y-axis component In the side of the Y-axis component；

Equipoising support apparatus is connect with the Y-axis component, and the Equipoising support apparatus applies and the survey Y-axis component The torque opposite effect torque that examination head generates the Y-axis component；

Wherein, the X-axis driving device connect with the Y-axis component and the Y-axis component is driven to guide along the X-axis straight line and fills Sliding is set, the center line setting that the X-axis driving device deviates a pair of X-axis linear guidance device is straight in a pair of X-axis Between line guide device.

2. flying probe tester according to claim 1, which is characterized in that the Y-axis component includes Y-axis straight line priming device And Y-axis driving device, the Equipoising support apparatus include:

Supporting mechanism, the horizontal end of the supporting mechanism are equipped with measuring head, and the supporting mechanism is along the Y-axis straight line priming Device guides the measuring head to move in the horizontal plane；

Balancing device, the balancing device are connect with the supporting mechanism, and the balancing device is to the Y-axis straight line priming device Apply the torque opposite effect torque generated with the measuring head to the Y-axis straight line priming device.

3. flying probe tester according to claim 2, which is characterized in that the balancing device is set respectively with the measuring head It sets in the two sides of the Y-axis straight line priming device.

4. flying probe tester according to claim 3, which is characterized in that the supporting mechanism includes mounting rack, the peace It shelves and is slidably connected with the Y-axis straight line priming device, the side of the mounting rack is arranged in the balancing device, in the peace The other side shelved is horizontally installed with cantilever, and the other end of the cantilever is equipped with the measuring head.

5. flying probe tester according to claim 4, which is characterized in that the balancing device is to draw with the Y-axis straight line Dynamic device balance guide rail disposed in parallel, the balance guide rail are slidably connected with the mounting rack.

6. flying probe tester according to claim 5, which is characterized in that the mounting rack includes the first link block and second Link block, first link block are slidably connected with the Y-axis straight line priming device, and second link block is led with the balance Rail is slidably connected.

7. flying probe tester according to claim 4, which is characterized in that the balancing device includes along the anti-of the cantilever The guide rail and the slidable clump weight on guide rail being arranged to extended line.

8. flying probe tester according to claim 7, which is characterized in that the X-axis straight line priming device and the Y-axis are straight Line priming device is linear mould group.

9. flying probe tester according to claim 2, which is characterized in that the balancing device is described including being separately positioned on The balance guide rail of Y-axis straight line priming device two sides and setting in parallel.

10. flying probe tester according to claim 9, which is characterized in that the supporting mechanism includes mounting rack, the peace It shelves and is slidably connected with the Y-axis straight line priming device, the balance guide rail is slidably connected with the mounting rack.

11. flying probe tester according to claim 9, which is characterized in that the Y-axis straight line priming device is screw rod.

12. flying probe tester according to claim 11, which is characterized in that the balance guide rail is linear guide.

13. flying probe tester according to claim 1, which is characterized in that at least adjacent to the X-axis driving device side X-axis linear guidance device is heavy-load type linear guide.

14. flying probe tester according to claim 13, which is characterized in that at least adjacent to the X-axis driving device side X-axis linear guidance device be roller-type linear guide.

15. flying probe tester according to claim 1, which is characterized in that the X-axis close to the X-axis driving device side Linear guidance device is roller-type linear guide, and the X-axis linear guidance device far from the X-axis driving device side is that ball is straight Line guide rail.

16. flying probe tester according to claim 1, which is characterized in that the X-axis driving device include motor and with The X-axis screw rod of the motor output end connection, the X-axis screw rod are arranged in parallel with the X-axis linear guidance device, the X-axis Screw rod is connect with the Y-axis component.

17. flying probe tester according to claim 16, which is characterized in that the Y-axis component includes: Y-axis pedestal, setting In Y-axis linear guidance device and Y-axis driving device on the Y-axis pedestal, the both ends of the Y-axis pedestal respectively with the X-axis Linear guidance device is slidably connected, and the Y-axis pedestal and the X-axis screw rod are cooperatively connected.

18. flying probe tester according to claim 17, which is characterized in that be additionally provided on the Y-axis pedestal with it is described The feed screw nut or screw rod sliding block that screw rod is cooperatively connected.

19. flying probe tester described in 7 or 18 according to claim 1, which is characterized in that the Y-axis linear guidance device is line Property mould group, the linear mould group includes Y-axis linear guide and the screw rod that is set in the Y-axis linear guide.

20. flying probe tester according to claim 19, which is characterized in that the X-axis component further includes that institute is fixedly mounted State the fulcrum bearing of X-axis screw rod.

21. flying probe tester according to claim 17, which is characterized in that the Y-axis pedestal includes:

First sliding part and the second sliding part are slidably matched with two X-axis linear guidance devices respectively, first sliding Portion is arranged close to the motor；

Support portion is connected between first sliding part and second sliding part, first sliding part along the X-axis The length of the extending direction of linear guidance device is greater than the extending direction along the X-axis linear guidance device of the support portion Width, to increase span of the Y-axis pedestal on the X-axis linear guidance device.

22. flying probe tester according to claim 21, which is characterized in that first sliding part and the support portion shape At T-shaped structure.

23. flying probe tester according to claim 21, which is characterized in that first sliding part and the support portion Angle, which is equipped with, reinforces stabilizers.

24. flying probe tester according to claim 23, which is characterized in that first sliding part, the support portion and The reinforcement stabilizers form triangular structure.

25. flying probe tester according to claim 21, which is characterized in that first sliding part it is straight along the X-axis Extending direction of the edge of the length of the extending direction of line guide device and the support portion perpendicular to the X-axis linear guidance device Length ratio in the range of 1/8~2/3.

26. flying probe tester according to claim 1, which is characterized in that the processing unit be subjected to it is digital control, so as to It advances close to or far from the installation base portion.

27. flying probe tester according to claim 1, which is characterized in that the multiple pressing element is prompted to close to the peace It is mobile to fill base portion, thus presses the processed material, to be in close contact with the installation base portion.

28. flying probe tester according to claim 1, which is characterized in that the processing unit is visited equipped with multiple inspections Device is surveyed, the inspection detector connects with the multiple electric contacts being formed on the processed material as printed base plate are formed in Thus touching executes conductive examine on the processed material.