CN207380196U - Flying probe tester - Google Patents

Abstract

The utility model provides a kind of flying probe tester, including：Base portion is installed；Processing unit, including：X-axis component, X-axis component include a pair of of X-axis linear guidance device and an X-axis driving device；Y-axis component, Y-axis component guiding measuring head are slidably connected with two X-axis linear guidance devices respectively on test platform along Y-motion, the both ends of Y-axis component；Measuring head is connected with Y-axis component and is arranged on the one side of Y-axis component；Equipoising support apparatus, it is connected with Y-axis component, Equipoising support apparatus applies the torque opposite effect torque generated with measuring head to Y-axis component to Y-axis component, X-axis driving device is connected with Y-axis component and Y-axis component is driven to be slided along X-axis linear guidance device, and the center line that X-axis driving device deviates a pair of of X-axis linear guidance device is arranged between a pair of of X-axis linear guidance device.Y-axis driven end is swung excessive when the utility model solves the problems, such as to generate high torque and unilateral driving because measuring head cantilever is longer.

Description

Flying probe tester

Technical field

The utility model is related to circuit board testing technical fields, and in particular to a kind of flying probe tester.

Background technology

Electrical property detection is the processing procedure that PCB has to pass through in the fabrication process, and flying probe tester is by contact side at present Formula detects the mainstream test equipment of PCB electrical properties, mainly has to the test request of flying probe tester currently on the market：Accurate fortune Dynamic control, reliable electric property, quick testing efficiency and various power of test, and good mechanical structure is to realize to survey Try the key of accurate rate.

Flying probe tester mainly includes to install by the motor-driven probe that independently can quickly move in X-axis and Y-axis Or the gauge equipped with dials, mainly contact progress is carried out in the mobile realization of Z-direction and the solder joint of pcb board using probe Electric measurement.Due to the functional requirement of flying probe tester, Y-axis can be generally respectively erected on two parallel X axis, simultaneously Gauge, the fixture of clamping fixture and each control line being connected with control device are usually mounted on the measuring head of flying probe tester Road etc., therefore measuring head itself is usually controlled there are certain weight, and in order to realize dials moving freely in test zone Tool is installed to the one side of Y-axis by cantilever level, cantilever in the horizontal direction there are certain length, therefore due to measuring head oneself Certain torque can be generated to Y-axis again.

And as the size of electronic product single PCS that needs to be tested is increasing, necessarily cause test process Measuring head grip size increases therewith, and the size of original cantilever can not meet the installation space of larger-size fixture, usually logical It crosses increase jib-length to solve the above problems, and the problem of new is brought after jib-length increase, i.e., the component of original Y-axis is because of cantilever The torque for increasing and bearing increases, and torque increase causes Y-axis modular construction to be susceptible to swing in the X-axis direction, so as to cause Y The service life reduction of shaft assembly simultaneously because swinging makes it be lower in the measuring accuracy of X-axis, influences the accuracy of test result.

Horizontal flying probe testing machine of the prior art is in the stage developed to high-speed, high precision, and in the prior art Horizontal flying probe testing machine be mostly single motor side driving bridge formula structure, due to load weight, bridge structure, rigidity With the restriction of the factors such as damping so that the precision improvement of unilateral drive-type flying probe tester is more difficult, horizontal to realize at present The requirements for high precision of formula flying probe tester, the driving of generally use Double-edge type replace unilateral driving, but bilateral drive, and dynamic structure is necessarily led Cost is caused to be substantially increased.Alternatively, flying probe tester drives formula structure in using, driving device is arranged on bridge medium position (i.e. Drive end), thus grid beam both sides, that is, driven end, the span for relatively reducing bridge reduces driven end and drive end precision is inconsistent The problem of.But the structure driven in using can make test section superstructure become complex, and equipment cost rises, and installation difficulty increases Greatly.It is limited simultaneously by girder span, test zone is unfit to do too big, thus the pcb board size that can be tested also will be limited.

Utility model content

The main purpose of the utility model is that providing a kind of flying probe tester, tested with solving installation of the prior art Y-axis driven end is opening when the priming device of head generates high torque and unilateral driving due to measuring head cantilever is longer to guide device The problem of excessive is swung during dynamic and stopping.

To achieve the above object, the utility model provides a kind of flying probe tester, including：Base portion is installed, is horizontally disposed with, For installing the processed material with flexible and thin shape；Processing unit, processing unit are controlled as closer or far from installation Base portion is advanced, and processing unit advances to perform processing on processed material close to installation base portion；Image pick-up device is used In the position of the opposite installation base portion of the specified portions of detection processed material；And mobile unit, for based on processed material The detected position of specified portions and make processed material be moved to installation base portion on designated position, wherein, processing unit dress Multiple pressing elements are had, pressing element is retractedly moved compared with installation base portion, and detects processed material in image pick-up device Specified portions position before, pressing element presses processed material near the specified portions of processed material, with install base Portion is in close contact；Wherein, the processed material in processing unit on installation base portion advances to hold on processed material Before row processing, multiple pressing elements press processed material, to be in close contact with installation base portion；Processing unit includes：X-axis component, X Shaft assembly guides measuring head on test platform along X-motion；X-axis component includes a pair of parallel be arranged on horizontal base X-axis linear guidance device and an X-axis driving device；Y-axis component, Y-axis component guide measuring head on test platform along Y It is axially moved, the both ends of Y-axis component are slidably connected respectively with two X-axis linear guidance devices；Measuring head is connected simultaneously with Y-axis component It is arranged on the one side of Y-axis component；Equipoising support apparatus is connected with Y-axis component, and Equipoising support apparatus applies and surveys to Y-axis component The torque opposite effect torque that examination head generates Y-axis component；Wherein, X-axis driving device is connected with Y-axis component and drives Y-axis Component is slided along X-axis linear guidance device, and the center line that X-axis driving device deviates a pair of of X-axis linear guidance device is arranged on one To between X-axis linear guidance device.

Further, Y-axis component includes Y-axis straight line priming device and Y-axis driving device, and Equipoising support apparatus includes： Supporting mechanism, the horizontal end of supporting mechanism are equipped with measuring head, and supporting mechanism exists along Y-axis straight line priming device guiding measuring head Horizontal in-plane moving；Balancing device, balancing device are connected with supporting mechanism, balancing device to Y-axis straight line priming device apply with The torque opposite effect torque that measuring head generates Y-axis straight line priming device.

Further, balancing device is separately positioned on the both sides of Y-axis straight line priming device with measuring head.

Further, supporting mechanism includes mounting bracket, and mounting bracket is slidably connected with Y-axis straight line priming device, balancing device The one side of mounting bracket is arranged on, is horizontally installed with cantilever in the opposite side of mounting bracket, the other end of cantilever is equipped with measuring head.

Further, balancing device is the balance guide rail being arranged in parallel with Y-axis straight line priming device, balance guide rail and installation Frame is slidably connected.

Further, mounting bracket includes the first link block and the second link block, the first link block and Y-axis straight line priming device It is slidably connected, the second link block is slidably connected with balance guide rail.

Further, balancing device include the guide rail set along the reverse extending line of cantilever and on guide rail it is slidable Clump weight.

Further, X-axis straight line priming device and Y-axis straight line priming device are linear module.

Further, balancing device includes being separately positioned on the flat of Y-axis straight line priming device both sides and setting in parallel Weigh guide rail.

Further, supporting mechanism includes mounting bracket, and mounting bracket is slidably connected with Y-axis straight line priming device, balances guide rail It is slidably connected with mounting bracket

Further, Y-axis straight line priming device is screw.

Further, it is line slideway to balance guide rail.

Further, the X-axis linear guidance device at least adjacent to X-axis driving device one side is heavy-load type line slideway.

Further, the X-axis linear guidance device at least adjacent to X-axis driving device one side is roller-type line slideway.

Further, the X-axis linear guidance device close to X-axis driving device one side is roller-type line slideway, away from X The X-axis linear guidance device of axial brake device one side is ball line slideway.

Further, X-axis driving device includes motor and the X-axis screw being connected with motor output end, X-axis screw and X Axis linear guidance device is arranged in parallel, and X-axis screw is connected with Y-axis component.

Further, Y-axis component includes：Y-axis pedestal, the Y-axis linear guidance device being arranged on Y-axis pedestal and Y axis drive Dynamic device, the both ends of Y-axis pedestal are slidably connected respectively with X-axis linear guidance device, and Y-axis pedestal is connected with X-axis screw.

Further, the feed screw nut being connected with screw or screw sliding block are additionally provided on Y-axis pedestal.

Further, Y-axis linear guidance device is stated as linear module, and linear module includes Y-axis line slideway and is arranged at Y Screw in axis line slideway.

Further, X-axis component further includes the fulcrum bearing that X-axis screw is fixedly mounted.

Further, Y-axis pedestal includes：First sliding part and the second sliding part fill respectively with two X-axis straight line guiding It puts and is slidably matched, the first sliding part is set close to motor；Support portion is connected between the first sliding part and the second sliding part, the The length of the extending direction along X-axis linear guidance device of one sliding part is more than the prolonging along X-axis linear guidance device of support portion The width in direction is stretched, to increase span of the Y-axis pedestal on X-axis linear guidance device.

Further, the first sliding part and support portion form T-shaped structure.

Further, the angle of the first sliding part and support portion, which is equipped with, strengthens stabilizers.

Further, the first sliding part, support portion and reinforcement stabilizers form triangular structure.

Further, the length of the extending direction along X-axis linear guidance device of the first sliding part and support portion along hanging down Directly in X-axis linear guidance device extending direction length ratio in the range of 1/8~2/3.

Further, processing unit is subjected to digital control, to advance closer or far from installation base portion.

Further, multiple pressing elements are prompted to, close to installation base portion movement, processed material thus be pressed, with installing base Portion is in close contact.

Further, processing unit is equipped with multiple inspection detectors, examines detector and is formed in as printed base plate The multiple contacts being formed on processed material, conductive examine thus is performed on processed material.

Technical solutions of the utility model have the following advantages that：

1. flying probe tester provided by the utility model, by deviateing the center line position of a pair of of X-axis linear guidance device The X-axis driving device installed reduces driving device to the distance of driven end, and then reduces X-axis driving device to driven end Torque so that driven section swing reduce.Balance dress is provided with by the one side for not installing measuring head on priming device It puts so that balancing device applies priming device with loading the torque opposite effect torque generated to priming device, with abatement The torque to priming device is loaded, so as to extend the service life of priming device and improve its radial accuracy.

2. flying probe tester provided by the utility model is the balance guide rail being arranged in parallel with linear actuator, and balances Guide rail is slidably connected with mounting bracket, and balance guide rail applies with loading to straight line linear actuator when Equipoising support apparatus works The torque opposite effect torque that actuator generates, with abatement load to the torque of straight line module, so as to extend the service life of module And improve its radial accuracy；Also, the balance guide rail being arranged in parallel with linear actuator is formed together with linear actuator to branch The two-wire support of support mechanism improves the operation stability of supporting mechanism.

3. flying probe tester provided by the utility model, the one side for not installing measuring head on priming device is set along described Guide rail that the reverse extending line of cantilever is set and can on guide rail slidable clump weight, by clump weight and guide rail to institute It states priming device and applies the torque opposite effect torque generated with the load to the priming device.Thus abatement load pair The torque of priming device, so as to extend the service life of priming device and improve its radial accuracy.

4. flying probe tester provided by the utility model has additional balance guide rail in the both sides of leading screw, same by measuring head Guide rail is installed and stretches out the physical length of leading screw so as to reduce torque of the load to leading screw, while again in leading screw to shorten cantilever in side Opposite side is provided with guide rail to provide leading screw torque of the opposite torque so as to which further abatement load generates leading screw, extends The service life of leading screw simultaneously improves its radial accuracy.

5. a kind of flying probe tester with balancing device provided by the utility model, is provided in the one side of Y-axis module Measuring head, while the opposite side of Y-axis module is provided with balance guide rail, by the way that balance guide rail is set to be loaded to cut down to straight line mould The torque that group generates, so as to extend the service life of Y-axis module and improve its radial accuracy.

6. a kind of flying probe tester with balancing device provided by the utility model, is equipped in the both sides of Y-axis leading screw Guide rail is balanced, reduces load to Y by installing guide rail in measuring head homonymy to shorten the length of cantilever stretching Y-axis leading screw The torque that axial filament thick stick generates, while again be provided with guide rail so that opposite torque is provided leading screw so as into one in the opposite side of leading screw Step abatement load extends the service life of leading screw and improves its radial accuracy to the torque of straight line Y-axis leading screw.

7. the utility model provides a kind of flying probe tester, dress is guided by the X-axis straight line that will be close to X-axis driving device It installs and is set to heavy-load type line slideway, improve the distortion resistance of drive end linear guidance device so that linear guidance device When bearing radial load, the deformation of generation reduces, and keeps linear motion of the Y-axis component on linear guidance device, so that The movement of test is more steady.The X-axis linear guidance device away from X-axis driving device is arranged to ball line slideway simultaneously, has There is certain stabilization.

8. the utility model provides a kind of flying probe tester, X-axis driving device is eccentrically set on a pair of of X-axis straight line guides Between device, and passing through support base and be connected on matrix so that structure becomes easy, and installation difficulty reduces, and then reduces cost, Various sizes of PCB test boards can also be placed simultaneously.

9. the utility model provides a kind of flying probe tester, X-axis driving device uses motor as power source, motor output End is connected with X-axis screw, and X-axis screw is arranged in parallel with X-axis linear guidance device, and X-axis screw uses feed screw nut with Y-axis component Or screw sliding block is connected so that linear condition is presented in the accelerator of Y-axis component, and accelerator is more steady, favorably In the motion state of control Y-axis component.

10. the utility model provides a kind of flying probe tester, between the center line of a pair of of X-axis linear guidance device is deviateed X-axis driving device is set, reduces torque of the X-axis driving device to driven end, so that driven section of swing reduces.Simultaneously will X-axis linear guidance device close to X-axis driving device is set to heavy-load type line slideway so that the bearing capacity of straight line guide mechanism It improves, its deformation in load-bearing is reduced, so as to improve the smooth degree of Y-axis component movement.

Description of the drawings

It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution of the prior art Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it describes below In attached drawing be the utility model some embodiments, for those of ordinary skill in the art, do not paying creativeness On the premise of work, other attached drawings are can also be obtained according to these attached drawings.In the accompanying drawings：

Fig. 1 is the front view of the flying probe tester provided in the first embodiment of the utility model；

Fig. 2 is the top view of flying probe tester shown in FIG. 1；

Fig. 3 is the structure diagram of the flying probe tester provided in second of embodiment of the utility model；

Fig. 4 is the structure diagram of the flying probe tester provided in the third embodiment of the utility model；

Fig. 5 is the top view of the flying probe tester provided in the 4th kind of embodiment of the utility model；

Fig. 6 shows the schematic top plan view of the embodiment five of flying probe tester according to the present utility model；

Fig. 7 shows the part-structure schematic diagram of the flying probe tester of Fig. 6；

Fig. 8 shows the structure diagram of the pedestal of the flying probe tester of Fig. 6, connecting portion and guide rail；

Fig. 9 is showing the perspective with the corresponding punch device of processing equipment according to the utility model sixth embodiment Figure；

Figure 10 is showing the cross-sectional view of the front side of punch device, wherein, printed base plate is mounted on die unit；

Figure 11 is showing the cross-sectional view of the front side of punch device, wherein, printed base plate is pressed down on by pressing element；

Figure 12 is showing the cross-sectional view of the front side of punch device, wherein, printed base plate be perforated template pressing；

Figure 13 is showing the cross-sectional view of the front side of punch device, wherein, printed base plate is perforated to be formed wherein Through hole；

Figure 14 is showing the enlarged drawing in the left side of punch device shown in Fig. 10；

Figure 15 is showing the cross-sectional view of the front side of the base board inspection apparatus according to the 7th embodiment of the utility model；

Figure 16 is showing the cross-sectional view of the major part of base board inspection apparatus, and the base board inspection apparatus is pressed with pressing element Press printed base plate；

Figure 17 is showing the cross-sectional view of the major part of base board inspection apparatus, the top inspection of the base board inspection apparatus Detector is tested to contact with printed base plate；

Figure 18 is showing the cross-sectional view of the major part of base board inspection apparatus, the lower inspection of the base board inspection apparatus Detector is contacted with printed base plate；With

Figure 19 is showing the amplification sectional view of the upper left of the base board inspection apparatus shown in Figure 15.

Specific embodiment

The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described Embodiment is the utility model part of the embodiment, instead of all the embodiments.Based on the embodiment in the utility model, sheet Field those of ordinary skill all other embodiments obtained without making creative work, belong to this practicality Novel protected scope.

Embodiment 1

The utility model provides a kind of plane formula flying probe tester, and the wherein flying probe tester includes pedestal 1,1 water of pedestal Flat to set, pedestal 1 as shown in Figure 1 is frame-type structure, and middle part forms test zone 11.Wherein flying probe tester further includes： A pair of of the X-axis component 2 being fixedly installed on pedestal 1, two groups of X-axis components 2 are arranged on the opposite both sides of pedestal 1 in parallel to each other On, X-axis component 2 guides measuring head in test zone 11 along X-motion.Above X-axis component 2, across in two groups of X-axis Component 2 has simultaneously been vertically arranged Y-axis component 4 with X-axis component 2, and the one side of Y-axis component 4 is equipped with rotary test head and (is not scheming In show), for Y-axis component 4 for guiding measuring head in the test zone 11 along Y-motion, Y-axis component 4 passes through Y-axis pedestal 3 Installation is connected on X-axis component 2, and the both ends of Y-axis pedestal 3 are slidably connected respectively with two X-axis components 2.

As shown in Fig. 2, measuring head is installed on by fixture 10 on cantilever 9, wherein fixture 10 can be fixture component or control Tool.Cantilever 9 is horizontally set on the end of Y-axis component 4, and wherein cantilever 9 is slided with the Z axis pedestal 7 being vertically arranged on Y-axis component 4 Dynamic connection, cantilever 9 (can be axially moved) along 7 vertical and straight movement of Z axis pedestal along Z axis, while cantilever 9 is also the rotation base of measuring head Seat, the shaft 12 that measuring head can be set on cantilever 9 rotate.

Every group of X-axis component in the present embodiment includes the linear module of X-axis and is used to drive linear mould mounted on its end The X-axis driving motor of group movement, Y-axis component include the linear module of Y-axis and are used to that linear module be driven to move mounted on Y-axis end Y-axis driving motor 8.The linear module of X-axis and the linear module of Y-axis in the present embodiment are divided into Bao Kuo the guide rail made of channel steel With the leading screw being arranged in U-bar guide rail, X-axis driving motor drives the leading screw in its module to rotate to drive Y-axis component along X Axis moves axially, and Y-axis driving motor 8 drives the leading screw in its module to rotate that measuring head is driven along Y-motion to pass through X-axis module and Y-axis module can realize that measuring head moves in the test zone of workbench 11.

Wherein as shown in Figure 2, it is that larger sized gauge can be installed, it usually needs by increasing the stretching of cantilever 9 Length is realized.The length increase of cantilever 9 causes increase of its end to the radial direction torque of Y-axis component 4, easily causes Y shaft assemblies 4 generations radially wobble, and influence its radial accuracy and service life.Therefore, for improve Y-axis component radial accuracy and use the longevity It orders, the flying probe tester in the present embodiment is additionally provided with Equipoising support apparatus, and Y-axis component 4 is generated with measuring head for providing Torque opposite effect torque.

Wherein Equipoising support apparatus includes supporting mechanism and balancing device, and the supporting mechanism in the present embodiment includes being arranged on On connection Y-axis component 4 and link block connected to it 6, the top of link block 6 are equipped with the Z that horizontal end is equipped with measuring head Axis pedestal, wherein link block 6 are slidably connected with Y-axis component 4, and link block 6 guides measuring head to be transported in the horizontal plane along Y-axis component 4 It is dynamic.

Balancing device in the present embodiment is balance guide rail 5, and balance guide rail 5 is separately positioned on the linear mould of Y-axis with measuring head The both sides of group, and balance guide rail 5 and be arranged in parallel with the linear module of Y-axis.Include being fixedly connected wherein on link block 6 first connects Block and the second link block are connect, wherein the first link block is slidably connected with the linear module of Y-axis, the second link block is slided with balance guide rail 5 Dynamic connection.First link block and the second link block can both be integrated setting, i.e., on one component machine-shaping have respectively with Balance guide rail and two parts of the linear module cooperation of Y-axis, or be separately set, i.e., machine-shaping has the first link block respectively Assembling installation is carried out again with the second link block later stage.Wherein balance guide rail 5 and the setting spaced apart of the linear module of Y-axis, reason Interval by upper balance guide rail 5 and the linear module of Y-axis is more big, and the balanced action played is better, and big to meet bearing strength Use environment, balance guide rail 5 use roller-type guide rail, the bearing capacity and rigidity of roller guide are all bigger than spherical guide, fit For the device that load is larger.It is simultaneously the stressing conditions of the further monitoring linear module of Y-axis, can be set on the linear module of Y-axis Put the force snesor for detecting its stressing conditions.

Embodiment 2

In the second embodiment of the utility model, the basic structure of flying probe tester is identical with embodiment one, with implementation Example one is the difference is that the setting of balancing device.In the embodiment two, balancing device includes the reverse extending along cantilever 9 The clump weight guide rail 13 and the slidable clump weight 14 on clump weight guide rail 13 that line is set.Wherein clump weight guide rail 13 can It is set by connecting component mounted on the end of link block 6, and clump weight guide rail 13 is arranged in link block 6 with cantilever 9 Both sides.During clump weight 14 and clump weight guide rail 13 are slidably connected, by adjusting clump weight 14 and the linear module of Y-axis Distance the linear module of Y-axis can be applied so as to cut down or offset measuring head with adjustment device to the torque of the linear module of Y-axis The torque added improves the radial accuracy and service life of the linear module of Y-axis.Certainly, since measuring head applies the linear module of Y-axis Torque change with the variation of the change in location and gauge size of measuring head, therefore clump weight 14 may also set up and be led with counterweight Rail 13 removably connects, and the clump weight for having various different sizes can be used for coordinating to meet different make from clump weight guide rail Use environment.It, can be in the linear mould of Y-axis for the stressing conditions of the further monitoring linear module of Y-axis similarly preferably in 3 It is also equipped with detecting the force snesor of its stressing conditions in group.

Embodiment 3

In 3rd embodiment of the utility model, the basic structure of flying probe tester is same as the previously described embodiments, and upper Embodiment is stated the difference is that the setting of balancing device and the setting of Y-axis component.In the embodiment three, Y-axis component Using screw 15；And balancing device includes the balance guide rail 5 for being separately positioned on Y-axis screw both sides and setting in parallel, with reality The balance guide rail applied in example 1 is similar, and two balance guide rails 5 are separately positioned on the both sides of straight line screw 15, and with screw interval one Set a distance is set, and theoretically the interval of two balance guide rails 5 and Y-axis screw 15 is more big, and the balanced action played is better, and To meet the big use environment of bearing strength, also using roller-type guide rail, roller guide is held the balance guide rail in the embodiment Loading capability and rigidity are all bigger than spherical guide, suitable for the device that load is larger.It is simultaneously the stress of further monitoring Y-axis screw Situation can set the force snesor for detecting its stressing conditions on Y-axis screw.

As the embodiment of replacement, when Y-axis component is arranged to screw, balancing device is alternatively including along cantilever 9 The clump weight guide rail and the slidable clump weight on guide rail that reverse extending line is set.Wherein clump weight guide rail can pass through company Relay part is set mounted on the end of link block 6, and clump weight guide rail is arranged in the both sides of link block 6 with cantilever 9. During clump weight and clump weight guide rail are slidably connected, it can be adjusted by the distance for adjusting clump weight and Y-axis screw flat Weigh torque of the device to Y-axis screw, so as to cut down or offset the torque that measuring head applies Y-axis screw, improves the footpath of Y-axis screw To precision and service life.Certainly for further monitoring Y-axis screw stressing conditions, also on Y axial filament bars set detection its by The force snesor of power situation.

Flying probe tester provided by the utility model with balancing device, by not installing test on Y-axis component The one side of head is provided with balancing device connected to it, with abatement load to the torque of Y-axis component, so as to extend Y-axis component Service life simultaneously improves its radial accuracy.

Embodiment 4

The utility model provides a kind of flying probe tester, and the wherein flying probe tester includes horizontal base 1, and pedestal level is set It puts, horizontal base 1 as shown in Figure 5 is frame-type structure, and middle part forms test zone.Flying probe wherein in the present embodiment Machine further includes：A pair of of the X-axis component 2 being fixedly installed on horizontal base 1, two groups of X-axis components 2 are arranged on level in parallel to each other On the opposite both sides of pedestal 1, X-axis component 2 guides Y-axis component 3 to be axially moved in test zone along X.On X-axis component 2 Side, has been vertically arranged Y-axis component 3 across in two groups of X-axis components 2 and with X-axis component 2, test is equipped on Y-axis component 3 First 34, Y-axis component 3 is used to that measuring head to be guided to install by Y-axis pedestal 33 along Y-motion, Y-axis component 3 in test zone It is connected on X-axis component 2, the both ends of Y-axis pedestal 33 are slidably connected respectively with two X-axis components 2.

In the flying probe tester of the present embodiment, X-axis component 2 includes a pair of parallel X-axis straight line being arranged on horizontal base 1 21, X-axis driving devices 22 of guide rail and fulcrum bearing 23, as shown in figure 5, the X-axis driving device 22 in the present embodiment includes electricity Machine and the X-axis screw 221 being connected with motor output end, motor are arranged on the one end of X-axis screw 221, X-axis screw 221 and X Axis line slideway 21 is arranged in parallel, and wherein X-axis screw 221 deviates the position of center line of a pair of of X-axis line slideway 21 mounted on one To between X-axis line slideway 21；X-axis screw 221 is connected with Y-axis component 3.Fulcrum bearing 23 is for fixed support X-axis screw 221.X Axis driving motor 222 and X-axis screw 221 are fixed on a testing machine by the support base 23 being arranged on test platform.

Y-axis component 3 in the present embodiment includes Y-axis pedestal 33, the Y-axis linear guidance device being arranged on Y-axis pedestal 33 31 and the Y-axis driving motor 32 positioned at 31 end of Y-axis linear guidance device.Y axis linear guidance devices wherein in the present embodiment 31, which can be used linear module, can also be used leading screw, wherein linear module includes line slideway and the silk being arranged in line slideway Bar.The both ends of Y-axis pedestal 33 are slidably connected respectively with X-axis line slideway 21, and Y-axis pedestal 33 is connected with X-axis screw 221, Y-axis The lower section of pedestal 33 be additionally provided with the feed screw nut being connected with X-axis screw 221 either screw sliding block by feed screw nut or Screw sliding block and the cooperation guiding Y-axis pedestal 33 of X-axis screw 221 are axially moved along X-axis.

In order to enable pendulum motion of the pedestal at 3 both ends of Y-axis component on X-axis line slideway 21 reduces consistent, X as far as possible Axial brake device 22 may be alternatively mounted at the center of Y-axis component 3, but the entirety of test zone can be caused using above-mentioned setting Property is destroyed, and can not place the test board of larger area.However, the unilateral one side X-axis straight line that is arranged on of X-axis driving device 22 is led On rail 21, one end that Y-axis component 3 is not connected with X-axis driving device 22 can be caused to swing excessive, therefore, the position of disalignment The space requirement that both ensure that test zone is put, while is also effectively reduced on Y-axis component 3 away from 22 one side of X-axis driving device Swing.

As shown in figure 5, the X-axis line slideway 21 close to 22 one side of X-axis driving device is arranged to roller line slideway 211, X-axis line slideway 21 away from 22 one side of X-axis driving device is arranged to ball line slideway 212, due to the carrying of roller guide Power and rigidity are all higher than common guide rail, while roller guide has the ability of good anti-lateral deformation, therefore in Y-axis component 3 when starting or stoping, and deformation quantity smaller, therefore motion process occur under the lateral forces that roller guide is generated in Y-axis component 3 More steady, therefore the swing of the Y-axis pedestal 33 away from 22 one side of X-axis driving device can also reduce.

It is equipped with and a pair of of 21 matched sliding block of X-axis line slideway on the Y-axis pedestal 33 at both ends in the present embodiment.It is theoretical On, 33 both ends of Y-axis pedestal and the contact area of X-axis line slideway 21 are bigger, Y-axis component 3 support it is more stable, Y-axis component 3 Movement is more steady.It is simultaneously the stressing conditions of further monitoring X-axis line slideway 21, it can be in the X-axis straight line of one side or both sides The force snesor for detecting its stressing conditions is set on guide rail 21.

As interchangeable embodiment, both sides X-axis line slideway 21 can be set to roller-type line slideway, with into one Step reduces the swing away from 22 end of X-axis driving device.Be simultaneously the stressing conditions of monitoring X-axis line slideway 21, can in one side or The force snesor for detecting its stressing conditions is set on the X-axis line slideway 21 of person both sides.Using the flying probe tester of this scheme, both It ensure that the integrality in test zone space, also ensure the stability of test machine assembly operating, so that the precision of test machine It is ensured.Meanwhile compared to the flying probe tester of bilateral driving, cost and installation difficulty are also reduced.

The utility model provides a kind of flying probe tester, is set between the center line of a pair of of X-axis linear guidance device is deviateed X-axis driving device is put, reduces torque of the X-axis driving device to driven end, so that driven section of swing reduces.Simultaneously will X-axis linear guidance device close to X-axis driving device is set to heavy-load type line slideway so that the bearing capacity of straight line guide mechanism It improves, its deformation in load-bearing is reduced, so as to improve the smooth degree of Y-axis component movement.

Embodiment 5

As shown in fig. 6, the flying probe tester of the present embodiment includes：Pedestal 10, two X-axis linear guidance devices 20, Y-axis Pedestal 30 and X-axis driving device；Two X-axis linear guidance devices 20 are disposed on pedestal 10；Y-axis pedestal 30 is slideably It is connected on two X-axis linear guidance devices 20；X-axis driving device is arranged on pedestal 10 and is guided close to an X-axis straight line Device 20 is set, and X-axis driving device driving Y-axis pedestal 30 is moved along the extending direction of X-axis linear guidance device 20；Y-axis pedestal 30 include：First sliding part 31, the second sliding part 32 and support portion 33, the first sliding part 31 and the second sliding part 32 are respectively with two A X-axis linear guidance device 20 is slidably matched, and the first sliding part 31 is set close to X-axis driving device；Support portion 33 is connected to Between one sliding part 31 and the second sliding part 32, the length of the extending direction along X-axis linear guidance device 20 of the first sliding part 31 Degree is more than the width of the extending direction along X-axis linear guidance device 20 of support portion 33, to increase Y-axis pedestal 30 in X-axis straight line Span in guide device 20.

Using the flying probe tester of the present embodiment, the first sliding part 31 is set close to X-axis driving device, Y-axis pedestal 30 It is driving end close to one end of X-axis driving device, the other end of the separate X-axis driving device of Y-axis pedestal 30 is driven end, also It is to say, one end where the first sliding part 31 is driving end, and one end where the second sliding part 32 is driven end.First sliding part The length of 31 extending direction along X-axis linear guidance device 20 is more than the prolonging along X-axis linear guidance device 20 of support portion 33 The width in direction is stretched, so in the case where not changing overall structure, by driving extension of the end in X-axis linear guidance device 20 Span on direction so that the length-width-ratio of Y-axis pedestal 30 becomes smaller, and increases the intensity of Y-axis pedestal, when X-axis driving device drives Y During one end of the close X-axis driving device of axis pedestal 30, the swing of the driven end of Y-axis pedestal 30 is smaller, so as to reduce driven end Swing, improve positioning accuracy.

In the present embodiment, as shown in Figure 7 and Figure 8, the first sliding part 31 and support portion 33 form T-shaped structure.So So that support portion 33 is connected to the middle part of the first sliding part 31, ensure operation of first sliding part on X-axis linear guidance device It is more stable.Certainly, the first sliding part and support portion can also be L-shaped,

In the present embodiment, the angle of the first sliding part 31 and support portion 33, which is equipped with, strengthens stabilizers 40.Strengthen stablizing Portion 40 can strengthen the intensity of Y-axis pedestal 30, and enhancing structure stability is effectively reduced the swing of driven end.Preferably, first Sliding part 31, support portion 33 and reinforcement stabilizers 40 form triangular structure.The structure of triangle is more stable.Specifically, first When sliding part 31 and support portion 33 form T-shaped structure, it can be set two angles and strengthen stabilizers 40, it can also be one A angle, which is set, strengthens stabilizers 40, this is required for depending on the concrete structure situation of flying probe tester.Preferably, Y-axis Pedestal 30 is integrally formed setting with strengthening stabilizers 40, easy to process, reduces cost.

In the present embodiment, the length of the extending direction along X-axis linear guidance device 20 of the first sliding part 31 and support The edge in portion 33 perpendicular to the extending direction of X-axis linear guidance device 20 length ratio in the range of 1/8~2/3.Namely It says, the ratio between the ratio between longest width and total length of Y-axis pedestal effectively reduce the pendulum of driven end in the range of 1/8~2/3 It is dynamic, in a limited space with increase it is limited in the case of reach optimal performance.

A kind of specification of flying probe tester of the prior art is as follows：Y-axis pedestal is in rectangular configuration, and Y-axis pedestal exists Span in X-direction is 115mm, and the length of Y-axis pedestal in the Y direction is 920mm, the stress width of Y-axis pedestal in the Y direction For 60mm.As shown in figure 8, a kind of specification of the flying probe tester of the present embodiment is as follows：Support portion is in the width X1 of X-direction For 115mm, the span X2 of the first sliding part in the X direction is 370mm, and the width Y1 of the first sliding part in the Y direction is 60mm, the The stress width Y2 of one sliding part and reinforcement stabilizers in the Y direction is 150mm, and the length Y3 of Y-axis pedestal in the Y direction is 920mm.From above-mentioned comparison, compared with prior art, the Y-axis pedestal of the present embodiment expands 3.2 times in the X direction, phase When expanding 3.2 times in the arm of force, the power that can be born also just expands 3.2 times, and the Y-axis pedestal of the present embodiment is in the Y direction 2.5 times of stress width expansion, force analysis Y-axis pedestal self-strength expand 5 times, so that anti-swing ability generally can be with Expand 3~5 times.

In the present embodiment, as shown in fig. 6, X-axis driving device includes motor 51, screw 52 and nut, motor 51 is fixed On pedestal 10, screw 52 be rotatably arranged on pedestal 10 and with the output axis connection of motor 51, nut is fixed on support It is threadedly coupled in portion 33 and with screw 52.Motor is rotated by the screw of leading screw and nut mechanism, drives what is be connected with wire rod thread Nut moves, and then support portion 33 is driven to move.Certainly, the structure of support portion movement is driven to be not limited in leadscrew-nut mechanism One kind may be arranged as hydraulic pressure, air pressure, gear drive or other kinds of drive, and this is no longer going to repeat them.

In the present embodiment, X-axis driving device further includes spaced two support bases 53, the both ends difference of screw 52 On two support bases 53.So it is easily installed leading screw.

In the present embodiment, flying probe tester further includes the second guide rail 61, slide 62 and test suite, the second guide rail 61 It is arranged on support portion 33 and perpendicular to X-axis linear guidance device 20, slide 62 is slidably disposed on the second guide rail 61, is surveyed Examination component is arranged on slide 62, and test suite tests circuit board.Test suite both can be along X-axis linear guidance device Extending direction (i.e. X to) movement, can also be moved along the extending direction (i.e. Y-direction) of the second guide rail,

In the present embodiment, test suite includes test bench 71, motor, fixture 72 and testing needle, and test bench 71 is fixed on On slide, motor is fixed on test bench 71, and fixture 72 is slidably disposed on test bench 71, and testing needle is arranged on fixture 72 On, the glide direction of fixture 72 is perpendicular to the extending direction of X-axis linear guidance device 20 and the extending direction of the second guide rail 61.It surveys Test point can be moved along Z-direction.Preferably, test suite further includes rotary support 73, and fixture 72 is arranged on by rotary support 73 On test bench 71.

Embodiment 6

By the processing equipment with reference to the description of figure 9 to 14 according to the utility model sixth embodiment.Fig. 9 show punching (or Drilling) equipment 11 (compared with " processing equipment " of the utility model) general configuration, wherein, arrow F instruction forward direction.It beats Hole equipment 11 includes perforation unit 13 (compared with " handling implement "), the die unit (die with 13 relative positioning of punch member Unit) 15 (compared with " installation base portions "), mobile unit 19 and image pick-up device 21, wherein, mobile unit 19 keeps installation The printed base plate 17 (compared with " substance to be processed ") with flexible thin plate-like shape on die unit 15 simultaneously allows the print Brush substrate is advanced towards the designated position on die unit 15, which detects fixed compared with die unit 15 The positioning of the specified portions of the printed base plate 17 of position.

Perforation unit 13 is equipped with multiple pressing elements (presser) 45, these pressing elements are retractedly protruded out so as to close or remote It is moved from die unit 15.The specified portions of printed base plate 17 are with reference to the reference marker for being attached to printed base plate 17 The specific part of the wiring pattern of (reference mark) or printed base plate 17, wherein, " ginseng can be often simply referred to as Examine mark ".One or more reference markers are attached to the designated position of printed base plate 7, and by image pick-up device 21 into Picture, to detect position of the printed base plate 17 compared with die unit 15.It is not shown, still punch device 11 is equipped with For the control unit for controlling the operation of various mechanisms and component installed therein and equip to manipulate theirs Operating console.

Mobile unit 19 includes the first holding mechanism 23 and the second holding mechanism 25, keeps machine for supporting first and second The holding mechanism supporting structure 27 of structure 23 and 25 and the supporting structure that holding mechanism supporting structure 27 is allowed freely to advance move Mechanism 28.Supporting structure moving mechanism 28 allows holding mechanism supporting structure together with the first and second holding mechanisms 23 and 25 Along X-axis line direction (that is, the longitudinal direction of die unit 15) and along Y-axis line direction, (it hangs down in a horizontal plane with X-axis line direction Directly) freely advance.Supporting structure moving mechanism 28 also allows holding mechanism supporting structure 27 (dimensionally vertical along z axis direction In X-axis line direction and Y-axis line direction) axially turn round.The specific configuration of supporting structure moving mechanism 28 is known, supporting knot Structure moving mechanism 28 is with including motor, the moving mechanism of guide rail and ball screw (ball screw) and with motor With the swing mechanism of rotating shaft.

First holding mechanism 23 and the second holding mechanism 25 are equipped with maintaining part 23a and 25a, for being kept in its end The given end portion of printed base plate 17.Printed base plate 17 maintained portion 23a first and 25a are kept；Then, supporting structure moving mechanism Thus 28 operations establish printed base plate 17 compared with the specified fixed of die unit 15 to move holding mechanism supporting structure 27 Position.

Holding mechanism supporting structure 27 can advance to extend and reduce in the first holding mechanism 23 and the second holding machine The distance between structure 25, wherein it is possible to suitably adjust the first holding machine compared with the width in printed base plate 17 along X-axis line direction The distance between 23 and second holding mechanism 25 of structure.That is, the first and second of the opposite side corner sections of printed base plate 17 are kept to keep Mechanism 23 and 25 suitably advances to extend the distance between first and second holding mechanisms so that ripple is prevented to be formed in printing In substrate 17.

Image pick-up device 21 is designed to (not show by the additional moving mechanism particularly suitable for image pick-up device 21 Go out) it freely advances along X-axis line direction and along Y-axis line direction, wherein, CCD camera (not shown) is attached to be filled in image pickup Put the end of the arm 21a extended on 21 one side.The details of the moving mechanism of image pick-up device 21 is known, image pickup The moving mechanism of device 21 includes mobile member and motor unit with motor, guide rail and ball screw.

Except aforementioned mechanism, punch device 11 is also equipped with image processing apparatus, for storing the memory of various data And microcomputer.The image that microcomputer processing is picked up by the CCD camera of image pick-up device 21, to calculate printing base The reference marker of plate 17 compared with die unit 15 position.Based on reference marker by calculation position, mobile unit 19 operates Holding mechanism supporting structure 27 along X-axis line direction and Y-axis line direction to advance or line direction is axially turned round about the z axis, thus Establish specified positioning of the printed base plate 17 compared with die unit 15.

In the positioning of printed base plate 17, the maintaining part 23a and 25a of the first and second holding mechanisms 23 and 25 only keep printing Opposing corner areas on the one side of brush substrate 17.Ripple is generated in printed base plate 17 due to traveling in order to prevent (waviness), mobile unit 19 control maintaining part 23a and 25a so as to be relevant to die unit 15 along Y-axis line direction backward or Obliquely move backward printed base plate 17.

Perforation unit 13 can be based on digital control (numerical control) by perforation unit moving mechanism (not Show) it is freely travelled along z axis direction.As shown in Figure 10 to 13, perforation unit 13 includes base frame 29, is fixed to base portion The punching base plate 31 of the lower surface of frame 29, the perforated board 33 for being fixed to the lower surface for punching base plate 31 have cylinder The card punch 35 and punching template (stripper) 37 of shape, wherein, card punch is through perforated board 33 so that end is consolidated thereon The fixed lower surface to punching base plate 31.Card punch 35 be used to punching the printed base plate 17 that is mounted on die unit 15 with Just designation hole is formed.Punching template 37 is for the pressing printed base plate 17 when being punched with card punch 17 to printed base plate 17 Surface.

Card punch 35 is inserted through the through hole 37a through the central part of punching template 37, freely to go along through hole 37a Into.Base plate 31 is punched, perforated board 33 and punching template 37 are formed as rectangular shape, wherein, perforated board 33 and punching template 37 The two has identical rectangular shape, smaller than punching base plate 31；The thickness ratio punching template 37 for punching base plate 31 is small；Punching The thickness of plate 33 is about punching the half of the thickness of base plate 31.

Four with cylindrical shape guide post 39 through 31 4 corners of punching base plate is firmly-fixed to punching Four corners of base plate 31.It is inserted into from the center section of punching 31 downward projection of guide post 39 of base plate through punching mould In the through hole 37b in four corners of plate 37.Control punching template 37 is prevented further with gap S or more ground away from perforated board 33 The mechanism (not shown) of (see Figure 10 and Figure 11) is plugged between punching base plate 31 or perforated board 33 and punching template 37.

Guide bushing (guide bush) 40 is placed at the top of through hole 37b of punching template 37, to allow to punch Template 37 is guided column 39 and guides and moved freely through along the axial direction (that is, the z axis direction in Fig. 9) of guide post 39, In, when punching template 37 is moved along guide post 39, they reduce the frictional resistance occurred in through hole 37.In guide bushing 40 Under 37 through hole 37b of punching template internal diameter it is more bigger than the outer diameter of guide post 39, and the internal diameter and guide post of guide bushing 40 39 roughly same outer diameter.Four compression springs 41 be placed near card punch 35, and this four compression springs with each other it Between phase equi-angularly space (that is, 90 °) axially set around card punch 35.

It is compressed through the compression spring 41 of perforated board 33 and is plugged on lower surface and the punching template of punching base plate 31 Between 37 upper surface.Punching template 37 is orthogonally pressed to be located slightly away from perforated board 33 by compression spring 41.Four steps Through hole 43 (see Figure 14) is formed as surrounding four compression springs 41 and between phase isogonism each other in punching template 37 It is axially set every (that is, 90 °).The top (with 33 relative positioning of perforated board) of step through hole 43 has major diameter, and under it Portion has minor diameter, wherein, step part 43a is formed in the middle position of step through hole 43 along the longitudinal direction.

In fig. 14, the pressing element (presser) 45 with cylindrical shape is inserted into step through hole 43 and is located in Near the card punch 35 of perforation unit 13, wherein, card division (jaw) 45a of pressing element is formed in the center section of pressing element generally Side.For simplicity, office in spaces of the Figure 10 to 14 between pressing element 45 and right side and left side guide post 39 is made using double dot dash line Disconnect to portion.The upper end of the card division 45a of pressing element 45 by compression spring 47 lower end press, and the lower end of card division 45a with The step part 43a contacts of step through hole 43.

In more than structure, compression spring 47 promotes pressing element 45 to be moved towards die unit 15, so that pressing element 45 is from beating Hole unit 13 protrudes, to be moved closer or far from die unit 15.That is, pressing element 45 is fixed to perforation unit 13, so that Before the decline of perforation unit 13 contacts so as to punching template 37 with printing base portion 17, the end of pressing element is contacted with printed base plate 17. Compressing spring 47 has spring constant, so that they are generated relatively in the most compressed state in the range of its compression/extension Smaller compressive load.Alternatively, by using using the air spring of compressed air compression spring 47 can be replaced to press Pressing element 45 or can remove compression spring 47 and suitably set pressing element 45 weight, this allow pressing element 45 due to The weight of themselves and be forced to move down.

The top of step through hole 43 has major diameter, the outer diameter and compression spring 47 than the card division 45a of pressing element 45 Outer diameter is bigger, and the lower part of step through hole 43 has minor diameter, and the outer diameter than the pressing element 45 below the 45a of card division is bigger. The top of compression spring 47 is inserted into perforated board 33 and the through hole for punching base plate 33, these through holes are relevant to step and lead to Hole 43 is coaxially formed.Compression spring 47 is plugged on the upper end of card division 45a of pressing element 45 and the lower end of standing screw 49 Between, which is screwed into the internal thread on the through hole top of punching base plate 31.

As described above, compression spring 47 is inserted into the through hole and punching template of punching base plate 31 and perforated board 33 In 37 step through hole 43.This eliminates the needs for the particular chamber for preparing to store compression spring 47.The present embodiment can With by suitably change punching base plate 31 and perforated board 33 thickness and size and compress spring 47 spring constant come Change, mode be compression spring 47 be inserted into the through hole of perforated board 33 and the step through hole 43 of punching template 37 or In the step through hole for only insering into punching template 37, fixed spring 49 is thus attached to perforated board 33 or punching template 37 In.

Die unit 15 is placed under punching template 37, and including on base portion 51, the upper surface fixed to base portion 51 Mold 55 on mold base plate 53 and upper surface fixed to mold base plate 53.Printed base plate 17 is mounted on the upper of mold 55 On surface, i.e., in installation surface.Mold base plate 53 and mold 55 have rectangular plate shape, wherein, the thickness of mold base plate 53 Degree is bigger than the thickness of mold 55.

Perforation (punch hole) 55a with cylindrical shape for being inserted into 35 lower end of card punch is formed to run through The center of mold 55 in installation surface in printed base plate 17.Pass through the card punch being inserted into the perforation 55a of mold 55 35 pairs of printed base plates 17 being mounted on mold 55 punch.The internal diameter of perforation 55a is more bigger than the outer diameter of card punch 35.Than perforation The through hole 53a of 55a biggers is formed to penetrate through the center of mold base plate 53, the perforation 55a coaxial communications with mold 55.Separately Outside, for being inserted into four corner portions that the through hole 53a of the lower end of guide post 39 is formed in mold base plate 53.

As shown in figure 14, step through hole 57 is formed in four corner portions of mold 55, and with for making guide post 39 Lower end insertion guide bushing 59 engage.Step through hole 57 is positioned as with the through hole 53b of mold base plate 53 coaxially Connection.The internal diameter of guide bushing 59 is more smaller than the internal diameter of through hole 53b, but more bigger than the outer diameter of guide post 39.Card division 59a is formed In the lower end of guide bushing 59.Step through hole 57 has step part 57a, so that compared with its upper part, its underpart Diameter increases.Guide bushing 59 be maintained at step through hole 57 step part 57a and mold base plate 53 upper surface it Between.When four guide posts 39 decline and its lower end is guided the guiding of bushing 59 simultaneously, it can make card punch 35 accurately along Z axis It is moved along the perforation 55a of mold 55 in line direction.

Perforation unit 11 with said structure is used for according to series of steps (1) to (10) in specified location to printing Substrate 17 is punched.

(1) first, adjust between the maintaining part 23a of the first holding mechanism 23 and the maintaining part 25a of the second holding mechanism 25 Distance, to match the distance between opposite end of printed base plate 17；The opposing corner areas maintained portion 23a of printed base plate 17 and 25a is kept；Then, the distance between the first holding mechanism 23 and the second holding mechanism 25 slightly extend, corrugated to prevent Into in printed base plate 17.

(2) operation of supporting structure moving mechanism 28 is mobile first and second holding mechanism 23 and 25 --- their holdings Portion 23a and 25a keep printed base plate 17, thus establish specified positioning of the printed base plate 17 compared with die unit 15, mode It is that the reference marker of printed base plate 17 is made just to be located under the card punch 35 of perforation unit 13.

(3) moving mechanism of perforation unit 13 makes perforation unit 13 decline along z axis direction, so that four pressing elements 45 Lower end directly press the reference marker (or their close position) of printed base plate 17, thus weaken or eliminate printed base plate Bending present on 17 or wrinkle (being indicated by " W " in Figure 10).As shown in figure 11, the reference marker of printed base plate 17 is close Contact the upper surface of the mold 55 of die unit 15.At this point, compression spring 47 force pressing element 45 by printed base plate 17 be pressed into Mold 55 is in close contact.

(4) upper surface of the mold 55 of die unit 15 is in close contact due to the pressing of pressing element 45 in printed base plate 17 Under state, the arm 21a of image pick-up device 21 is advanced by its moving mechanism, so that CCD camera is just located in printing On the reference marker of substrate 17.

(5) image of the reference marker of CCD camera pickup printed base plate 17；Then, image is processed, to calculate print The reference marker of brush substrate 17 compared with die unit 15 position.

(6) based on reference marker by calculation position, mobile unit 19 operates supporting structure moving mechanism 28, so as to along Y Axis direction moves backward the first and second holding mechanisms 23 and 25 backward or obliquely --- their maintaining part 23a and 25a Printed base plate 17 is kept, the designated position on the upper surface of thus mold 55 that printed base plate 17 is located in die unit 15 Place.

In the above case said, when the tool of printed base plate 17, there are one be located at the center of 35 punched hole of device to be perforated During reference marker, the position of printed base plate 17 is adjusted, so that reference marker coaxially matches the axis of card punch 35.Work as printing When substrate 17 has multiple reference markers, reference marker is calculated compared with the position of die unit 15, is then based on reference to mark Note calculates the center in the hole for the printed base plate 17 that device 35 to be perforated is got by calculation position, thus positions printed base plate 17, so that the axis of each matching card punch 35 in center calculated in hole.In this regard, the position of reference marker and shape is wanted It is stored beforehand into the relation between the center in the hole on printed base plate 17 in memory (not shown).In the above situation In, setting accuracy of the printed base plate 17 on die unit 15 can be increased, mode is to keep printing base by mobile The maintaining part 23a and 25a of first and second holding mechanisms 23 and 25 of plate 17 and printed base plate 17 is made to be located in die unit 15 Mold 55 upper surface on specified location after, the CCD camera of image pick-up device 21 pickup printed base plate 17 The image of reference marker, to determine the position of reference marker again, wherein, when printed base plate 17 is not located in mold 55 During specified location on upper surface, the first and second holding mechanisms 23 and 25 are advanced again, so that printed base plate 17 is positioned In specified location.After moving repeatedly the first and second holding mechanisms 23 and more than 25 times, it can further improve printing base Setting accuracy of the plate 17 on die unit 15.

(7) next, in order not to disturb the punch operation of card punch 35, the arm 21a of image pick-up device 21 is single from punching The downside of member 13 is displaced outwardly.

(8) perforation unit 13 is declined by its moving mechanism along z axis direction, thus makes the lower end of punching template 37 The upper surface of printed base plate 17 is contacted, as shown in figure 12.At this point, printed base plate 17 is pressed into die unit by four pressing elements 45 On 15 upper surface, the compressive load of the pressing element is increased by compression spring 47, and printed base plate 17 by punching template 37 by into One step is pressed on the upper surface of die unit 15.

(9) perforation unit 13 is further declined by its moving mechanism along z axis direction, from there through card punch 35 Hole is formed in printed base plate 17.Due to printed base plate 17 caused by punching resolution element (extract element) via Perforation 55a and through hole 53a is fallen.

More than, due to compressing the compression of spring 41, the punching template 37 contacted with printed base plate 17 does not decline further, and Perforated board 33 is directed towards to rise.Further, since compression spring 47 compression, four pressing elements 45 contacted with printed base plate 17 not into One step declines, and its card division 45a is retracted into the through hole of perforated board 33.

(10) next, perforation unit 13 is moved upwards up to initial position by its moving mechanism along z axis direction (see Fig. 9).

It is completed for the punch operation of printed base plate 17 by abovementioned steps (1) to (10).

Punch operation is not required to be limited to above-mentioned steps (1) to (10), can change or change order.Sixth embodiment It is designed to perform step (4) after step (3), wherein, in step (3), perforation unit 13 declines to make pressing element 45 Printed base plate 17 is pressed, printed base plate 17 is in close contact again with the upper surface of the mold 55 of die unit 15, in step (4), The arm 21 of image pick-up device 21 is advanced by moving mechanism, so that CCD camera is located on printed base plate 17.It replaces Ground can perform step (3) after step (4) is performed.

In step (3), (8), (9) and (10), perforation unit 13 is controlled as down or up.Alternatively, mold list Member 15 can be controlled as by its moving mechanism it is down or up, without perforation unit 13 is allowed to decline/rise or with Decline/rising of perforation unit 13 is associated.In brief, the utility model needs perforation unit 13 closer or far from mold The mold 55 of unit 15 moves, and perforation unit 13 is needed to be moved close to die unit 15, so as to being mounted on mold 55 Printed base plate 17 punched.

In above modification, it is necessary to from 23 He of the first and second holding mechanisms before die unit 15 is down or up 25 maintaining part 23a and 25a release printed base plate 17, and without considering step (1).In order to be based on the ginseng calculated in step (5) It examines the position of mark and other holes is beaten in printed base plate 17, it is necessary to repeat step (6), (8), (9) and (10).

As described above, the punch device 11 of the present embodiment is designed so that the directly pressing of pressing element 45 will be filled by image pickup Position near near 17 reference marker of printed base plate of 21 detections is put, so that printed base plate 17 is made to be in close contact die unit 15 Mold 55 upper surface.This allows to reliably to make reference marker that will be detected by image pick-up device 21, printed base plate 17 Specified portions be in close contact mold 5 upper surface.That is, the CCD camera of image pick-up device 21 can accurate pick up printing The image of the reference marker of substrate 17, the upper surface of the printed base plate 17 template 37 that is perforated before punch operation press.By This, can detect positioning of the printed base plate 17 compared with mold 55 exactly before punch operation.

The present embodiment is designed so that pressing element 45 is mounted in the perforation unit 13 punched in printed base plate 17, The printed base plate is suitably close to or moves and be then fitted in precisely on the upper surface of mold 55 away from mold 55. That is, when perforation unit 13 is moved closer or far from mold 55, pressing element 45 is correspondingly close to or away from mounted on the upper of mold 55 Printed base plate 17 on surface moves.This eliminates the needs of other units dedicated for mobile pressing element 45.It is it is possible thereby to logical It crosses and reduces the quantity of component to reduce the overall size of punch device 11.

Perforation unit 13 is advanced by digital control by its moving mechanism；Therefore, travel distance is by highly precisely Control.Pressing force can be subtly adjusted in the case where considering characteristic, bending and the wrinkle of printed base plate 17, passed through as a result, Pressing element 45 suitably presses printed base plate 17.Apply small pressing force so that printed base plate 17 is tight to printed base plate 17 in pressing element 45 In the state of the upper surface for touching touch tool 55, the first and second holding mechanisms 23 and 25 --- its maintaining part 23a and 25a are kept Printed base plate 17 --- traveling is controlled accurately to establish specified positioning of the printed base plate 17 on 55 upper surface of mold.By This, can further improve setting accuracy of the printed base plate 17 compared with the mold 55 of die unit 15.

When die unit 15 be based on it is digital control by its moving mechanism and when only being travelled upwardly along z axis direction or When both die unit 15 and perforation unit 13 are based on digital control traveling, can utilize to press printed base plate 17 Pressing element 45 adjusts setting accuracy.Since perforation unit 13 is equipped with " retractible " pressing element 45, these pressing elements can it is close or Mold 55 away from die unit 15 moves, it is possible to and prevent pressing element 45 from disturbing punch operation, wherein, as pressing element 45 is retracted And it away from mold 55, is punched by perforation unit 13 in printed base plate 17.Thus, it is possible to by punch device 11 in printing base Hole is not formed troublesomely in plate 17.

The punch device of the present embodiment is designed to compression spring 47 and pressing element 45 is promoted to press printed base plate 17, the printing base Thus plate is in close contact the upper surface of mold 55.Simple and cheap structure in this way, can reliably make printed base plate 17 are in close contact the upper surface of mold 55, and pressing element 45 can reliably be made to retract with away from mold 55.The present embodiment is beaten Hole equipment is characterized in that, before the printed base plate 17 that pressing element 45 shifts near on the upper surface of mold 55 in perforation unit 13 Printed base plate 17 is pressed, to be in close contact printed base plate 17.

I.e., it is possible to after printed base plate 17 is pressed by pressing element 45 and is in close contact the upper surface of mold 55, pass through punching Unit 13 forms hole in printed base plate 17.In addition, before the punching template 37 of perforation unit 13 contacts printed base plate 17, Printed base plate 17 is pressed by the pressing element 45 protruded from perforation unit 13.This so that mold 55 can be in close contact in printed base plate 17 Upper surface in the state of, form gap between the punching template 37 of perforation unit 13 and printed base plate 17.That is, image pickup The CCD camera of device 21 is positioned in the gap, to pick up the image of the reference marker of printed base plate 17.

In addition, the punch device 11 of the present embodiment sets pressing element 45 near the card punch 45 of perforation unit 13.This causes Can be in close contact the upper surface of mold 55 in printed base plate 17 and approach simultaneously will be formed on 17 pore location of printed base plate Close position pressed by pressing element 45 in the state of, hole is formed in printed base plate 17 by the card punch 35 of perforation unit 13. This further improves the accuracy for forming hole in printed base plate 17 by punch device 11.

Embodiment 7

Next, the 7th embodiment for the utility model being described with reference to figure 15 to 19, wherein, with Fig. 9 to Figure 14 middle parts The identical component of part is presented with like reference characters；Thus it is necessary to its repeated explanation is omitted or simplified.Figure 15 shows base The construction of board inspection apparatus 61, with respect to the processing equipment of the 7th embodiment of the utility model.Base board inspection apparatus 61 Examine whether electrical conductivity is correctly established in the wiring pattern (not shown) of the printed base plate 63 with flexible plate shape. Specifically, multiple inspection detectors is made to be in close contact multiple electric contacts on printed base plate 63, to examine its electrical conductivity.

Base board inspection apparatus 61 includes installation base portion 64, mobile unit 19, and detector cells 65 and lower part inspection are examined in top Detector cells 66, verification unit 67, upper portion connecting structure 69 and lower part connection unit 71 and image pick-up device 21 are tested, Wherein, for the installation base portion 64 for installing printed base plate 63, which installs 64 upper table of base portion for remaining mounted on Printed base plate 64 on face and for advancing to move printed base plate towards the designated position on 64 upper surface of installation base portion, should Detector cells 65 and lower inspection detector cells 66 is examined to be fixed to and examine detector mobile unit (not shown) simultaneously in top It is driven to be moved simultaneously or each along the vertical direction vertical with the upper surface for installing base portion 64, which wraps Include judging unit 67a and the control unit for being controlled the various units being mounted in base board inspection apparatus 61 and element (illustrating below its detailed content), portion connecting structure 69 is used to verification unit 67 being connected to top inspection detector 65 on this, The lower part connection unit 71 is used to verification unit 67 being connected to lower inspection detector 66, which is used to examine The specified portions of printed base plate 63 are surveyed compared with the position of installation base portion 64.

Detector mobile unit is examined to perform, detector cells 65 and lower inspection detector cells 66 are examined to top Digital control, top examines detector cells and lower inspection detector cells to be thus controlled as moving in the vertical direction.Print The specified portions of brush substrate 63 are attached to the reference mark of the specific part of 63 wiring pattern of printed base plate 63 or printed base plate Note.For convenience, it is referred to as " reference marker " in the following description.Specifically, one or more reference markers are attached to The designated position of printed base plate 63, and be imaged by image pick-up device 21, to detect the printing on installation base portion 64 The position of substrate 63.It is not shown, base board inspection apparatus 61 includes what its various unit and component were controlled The operating console of the various units and component of control unit and permission user's operation base board inspection apparatus 61.Control unit includes The various units of equipment 61 and the various programs of component are examined in CPU, RAM and ROM, ROM storages for operation substrate.

Except foregoing units and device, base board inspection apparatus 61 further includes image processing unit, for storing various data Memory and microcomputer.Microcomputer by the image of the CCD camera pickup of image pick-up device 21 to being carried out at image Reason, to calculate position of the reference marker of printed base plate 63 (one or more) compared with installation base portion 64.Based on reference to mark Remember (one or more) by calculation position, the operation supporting structure of mobile unit 19 moving mechanism 28, so as to along the left side in Figure 15 Right direction or the vertical direction movement holding mechanism supporting structure 27 perpendicular to Figure 15 papers, and make its around vertical direction axially Thus specified positioning of the printed base plate 63 compared with installation base portion 64 is established in revolution.

Due to establishing positioning by mobile printed base plate 63, the corner of the printed base plate 63 keeps machine by first and second The maintaining part 23a and 25a of structure 23 and 25 are kept, so maintaining part 23a and 25a can be orthogonally along across the sides of Figure 15 papers To simultaneously separate installation base portion 64 is moved backward, so that ripple is prevented to be formed in printed base plate 63.Base board inspection apparatus 61 also wraps The measuring unit with circuit is included, for measuring the inspection for examining the top of detector cells 65 that detector 73 is examined to export from top Survey the detection signal of the output of lower inspection detector 74 of signal and lower inspection detector cells 66.

Measuring unit examines the output of detector 73 to examine letter via the top connecting line 69a of top connection unit 69 to top Number, it is also exported via the lower part connecting line 71a of lower part connection unit 71 to lower inspection detector 74 and examines signal, then detected Unit examines detector 73 and lower inspection detector 74 to receive the inspection for the electric contact for being detected as printed base plate 73 from top Survey signal.The RAM of control unit in base board inspection apparatus 61 stores to hold detection signal in which can reload The conductive various data examined of row.Based on the program and data being stored in ROM and RAM, the CPU of control unit is based on measurement list The measurement result of member determines electrical conductivity.The judging unit 67a of verification unit 67 includes CPU and measuring unit.

Can top be examined by detector cells 65, lower inspection detector cells 66 according to the specification of printed base plate 63 It is replaced with installation base portion 64 new.Detector cells 65 is examined to include three parallel arranged rectangular slabs in top, i.e. on Detector 73 is examined on portion base plate 75a, the first upper board 76a and the second upper board 77a and multiple tops.As shown in figure 19, Multiple through holes 81 for running through the first upper board 76a are positioned as opposite with multiple through holes 83 for running through the second upper board 77a.It examines on top Detector 73 is tested to be inserted into through hole 81 and through hole 83.

Since the arrangement of through hole 81 and the arrangement matching of through hole 83 are formed in the row of the electric contact on 63 surface of printed base plate Row, so the arrangement of the electric contact of the arrangement matching printed base plate 63 of detector 73 is examined on top.Including flexible nichrome wire The lower end of top cable 85a be electrically connected to the upper end that detector 73 is examined on top, and to be electrically connected to top connection single for the upper end Member 69, is thus electrically connected to verification unit 67 by the top connecting line 69a of top connection unit 69.

Four through holes 78 are formed in (see Figure 19) in the first upper board 76a, and the first upper board is collectively arranged in surround Examine a part for detector 73 in top in the central part of 76a.The top of four cylinder spring maintaining parts 87 is logical with four Hole 87 engages, these spring maintaining part upper ends are closed, open at its lower end.Keep four cylinder spring maintaining parts 87 of compression spring 47 Lower end link the second upper board 77a upper surface.That is, four spring maintaining parts 87 are across and fixed to the first upper board 76a And second between upper board 77a.The internal diameter through hole 89 smaller than the internal diameter of spring maintaining part 87 is formed in the second upper board 77a, The surface of second upper board is correspondingly axial arranged specified location connection spring is protected with the axis of spring maintaining part 87 Hold the lower end in portion 87.

With stepped cylindrical shape and on it at end, the pressing element 45 with card division 45a is inserted into through hole 89, wherein, The upper end of card division 45a is installed in the lower end pressing of the compression spring 47 in spring maintaining part 87, so that under the 45a of card division The upper end of the opening of end in contact through hole 89.The outer diameter of the lower part of pressing element 45 of the internal diameter of through hole 89 than being less than card division 45a is bigger. That is, compression spring 47 is compressed and is plugged between the upper end for the card division 45a for being closed upper end and pressing element 45 of spring maintaining part 87.

Compression spring 47 promotes pressing element 45 to decline towards installation base portion 64, wherein, pressing element 45 examines detector list from top Member 65 is downwardly projected, to be moved closer or far from installation base portion 64.Before the decline of detector cells 65 is examined on top, pressing element 45 orthogonally protrude below top inspection detector 73, so that pressing element 45 presses printed base plate 63 compresses the compression simultaneously Spring 47.That is, pressing element 45 is attached to top in specified location and examines detector cells 65, these designated positions connect pressing element 45 Touch printed base plate 63, so as to top examine detector cells 65 decline and top examine detector 73 lower end connect really Printed base plate 63 is pressed before touching printed base plate 63.Specifically, pressing element 45 is arranged in top and examines detector 73 nearby and at it Between.

Upper base plate 75a has frame-like shape, has the rectangular through-hole 91 divided therethrough.First upper board 76a is thinner than upper base plate 75a and smaller.Four corners of first upper board 76a are consolidated via four the first upper post 93a Determine to the lower surface of top base plate 75a.Second upper board 77a has the thickness identical with the first upper board 76a, but than the One upper board 76a is small.Second upper board 77a is fixed to the lower surface of the first upper board 76a via four the second upper post 95a Four corners.

The external screw thread at the first upper post 93a upper ends is formed in engage with the internal thread being formed in upper base plate 75a, The internal thread at the first upper post 93a lower ends is formed simultaneously to engage with the first upper board 76a via bolt (not shown).Separately Outside, it is formed in the external screw thread at the second upper post 95a upper ends to engage with the internal thread being formed in the first upper board 76a, simultaneously The internal thread at the second upper post 95a lower ends is formed in engage with the second upper board 77a via bolt (not shown).

As shown in figure 19, top examines detector 73 to include detector 73a and insulation tube 73b, these detectors 73a bags It includes tungsten material and there is thin bar shape, these insulation tubes are used to coat the central part of detector 73a.The upper end of detector 73a Through the through hole of the first upper board 76a, to be protruded towards upper base plate 75a, while the lower end of detector 73a runs through second The through hole of upper board 77a, to be downwardly projected from the second upper board 77a.That is, insulation tube 73b be plugged on the first upper board 76a and Between second upper board 77a.

The prominent length ratio of the detector 73a upper ends projected upwards from the upper surface of the first upper board 76a is from the second top The prominent length of the downward projection of detector 73a lower ends of plate 77a is longer.With upper detector unit 65 vertically Decline, the lower end of detector 73a is with being formed in the contact formed on the surface of printed base plate 63.Top cable 85a's Lower end is linked to the upper end of the detector 73a projected upwards from the first upper board 76a upper surfaces.

Examine quantity, the quantity of top cable 85a and the top connecting line of top connection unit 69 of detector 73 in top The quantity of electric contact of the quantity of 69a all with being formed on 63 surface of printed base plate is identical.For convenience, Figure 15 to Figure 19 is shown These a small amount of components are shown.When top examines the contact of detector 73 to be formed in the electric contact on 73 surface of printed base plate, relatively In top detector 73 is examined to establish electrical conduction, wherein, judge whether to examine detector 73 and printing on top based on resistance Electrical conduction is correctly established between substrate 63.Specifically, top examines detector 73 that will be detected via top connection unit 69 Signal output to verification unit 67 judging unit 67a so that judging unit 67a determines the electrical conduction with printed base plate 63.

The resistance for being in advance based on the high quality of products of printed base plate 63 determines to examine critical value；It is then detected that printed base plate The resistance of 63 examined article, to determine tested measuring resistance to examining the ratio of critical value, thus judge whether compared with The examined article of printed base plate 63 establishes good electrical conduction.For the electrical conduction of the examined article with printed base plate 63 Related conductive inspection, can be with when tested measuring resistance is to when examining the ratio of critical value to be less than predetermined designated ratio value Product preferably is judged, when the ratio is more than designated ratio value, it can be determined that be defective substandard products.For with printed base plate The related insulation test of the insulation characterisitic of 63 examined article, when tested measuring resistance is specified to the ratio of critical value is examined to be more than During ratio value, it can be determined that product preferably, when the ratio is less than designated ratio value, it can be determined that be defective substandard products. More than determination methods are applied similarly to the conductive inspection on lower inspection detector cells 66, and details will be retouched later It states.Similarly, various electrical inspections can be performed, such as insulation test and static capacity are examined.

The a part of similar of detector cells 65 is examined on the basic structure of lower inspection detector cells 66 and top, under this Detector cells is examined not have spring maintaining part 87, pressing element 45 and compression spring 47 and are vertically run in structure in portion .Specifically, the upper base plate 75a included in top inspection detector cells 65, the first upper board 76a, the second top Detector 73 and top cable 85a are examined with being included in lower part in plate 77a, the first upper post 93a, the second upper post 95a, top Examine detector cells 66 in lower base plate 75b, the first lower panel 76b, the second lower panel 77b, the first lower post 93b, Second lower post 95b, lower inspection detector 74 are identical with lower cable 85b.

Lower inspection detector 74 is electrically connected to verification unit 67 via lower cable 85b and lower portion connecting structure 71.Under Portion examine the quantity of the lower part connecting line 71a of the quantity of detector 74, the quantity of lower cable 85b and lower portion connecting structure 71 with The number of electrical contacts being formed on 63 back side of printed base plate that experience is examined is identical.For convenience, these in Figure 15 to 19 Quantity is fewer than actual quantity.

As shown in figure 19, multiple through hole 64a are formed in specified location in installation base portion 64, these designated positions are under The position of the lower inspection detector 74 of detector cells 66 is examined to match in portion.When the upper end of lower inspection detector 74 When being inserted into the through hole 64a of installation base portion 64 to contact the electric contact being formed on 63 back side of printed base plate, lower inspection Electrical conduction is established between detector 74, resistance is hereby based on and judges whether to establish electrical conduction compared with printed base plate 63.At this On point, the number of the quantity for the electric contact being formed on 63 back side of printed base plate and the electric contact being formed on 63 surface of printed base plate It measures identical or different.

Conductive inspection is performed according to step (1) to (10) on printed base plate 63 by using base board inspection apparatus 61.

The distance between maintaining part 23a and 25a of (1) first and second holding mechanism 23 and 25 are set to and printing base The distance between the opposite end of plate 63 is identical, keeps the opposing corner areas of printed base plate 63 with maintaining part 23a and 25a as a result,；So Afterwards, the distance between first and second holding mechanisms 23 and 25 are widened, so that ripple is prevented to be formed on printed base plate 63.

(2) operation of supporting structure moving mechanism 28 is to move 23 He of the first and second holding mechanisms towards installation base portion 64 25 --- its maintaining part 23a and 25a keeps printed base plate 63, thus to establish the specifying on installation base portion 64 of printed base plate 63 Positioning, the reference marker of printed base plate 64 are located in top and the top of detector cells 65 are examined to examine under detector 73.

(3) moving mechanism's operation is makes top that detector cells 63 be examined vertically to decline, so that four pressing elements 45 lower end directly presses the close position near the reference marker of printed base plate 63, thus makes shown in Figure 15 to Figure 19 Printed base plate 63 on it is that may be present bending or wrinkle W stretch.The back side of printed base plate 63 including reference marker as a result, The upper surface of installation base portion 64 is in close contact completely, as shown in figure 16.At this point, compression spring 47 forces the pressing printing base of pressing element 45 Thus plate 63, the printed base plate 63 are in close contact the upper surface of installation base portion 64.

(4) in a state that printed base plate 63 is pressed by pressing element 45 and is in close contact the upper surface of installation base portion 64, with the The abovementioned steps of six embodiments are similar, and moving mechanism's operation is the arm 21a of mobile image pick device 21, wherein, image pickup The CCD camera of device 21 is just located on the reference marker of printed base plate 63.

(5) image of the reference marker of CCD camera pickup printed base plate 63；Then, image is processed, to calculate print The reference marker of brush substrate 63 is compared with the position for installing base portion 64.

(6) position based on the reference marker calculated in step (5), mobile unit 19 operate supporting structure moving mechanism 28, so that edge suitably moves backward first and second holding mechanism 23 and 25 --- its maintaining part across the direction of Figure 15 papers 23a and 25a keeps printed base plate 63, thus establishes specified positioning of the printed base plate 63 on the upper surface of installation base portion 64.

More than, at least two reference markers are attached to printed base plate 63, so that their positions compared with installation base portion 64 It puts and is calculated；Then, the printed base plate compared with the regular position for the printed base plate 63 being regularly mounted on installation base portion 64 63 inclinations angle and position deviation are calculated and for establishing specified positioning of the printed base plate 63 on installation base portion 64.

Setting accuracy of the printed base plate 63 on installation base portion 64 can be increased, mode is once first and second protect It holds mechanism 23 and 25 --- its maintaining part 23a and 25a keeps printed base plate 63 --- to be positioned compared with installation base portion 64, then prints The reference marker of brush substrate 63 is imaged by the CCD camera of image pick-up device 21, to detect its position, wherein, work as printing When substrate 63 is not located at the specified location on installation base portion 64, the first and second holding mechanisms 23 and 25 --- it keeps Portion 23a and 25a keep printed base plate 63 --- it advances again, it is specified fixed on installation base portion 64 to establish printed base plate 63 Position.After moving repeatedly the first and second holding mechanisms 23 and more than 25 times, it can further improve printed base plate 63 and install Setting accuracy on base portion 64.

(7) top examines detector 73 to disturb conductive inspection in order to prevent, the arm 21a of image pick-up device 21 from mounted on Printed base plate 63 on installation base portion 64 is displaced outwardly.

(8) next, moving mechanism's operation upper part examines detector cells 65, vertically further to decline, with So that top examines the lower end in contact of detector 73 to be formed in the electric contact on 63 surface of printed base plate, as shown in figure 17.At this Under kind state, conductive examine is performed on the surface of printed base plate 63.At this point, four pressures that lower end is contacted with printed base plate 63 Tool 45 no longer declines, further to compress the compression spring 47, so that, it is kept with the upper end of pressing element 45 close to spring The upper end in portion 87, compressive load apply to pressing element 45, thus pressing element 45 presses coining further towards the upper surface of installation base portion 64 Brush substrate 63.

(9) next, moving mechanism operates, so that lower inspection detector cells 66 vertically rise, so that The upper end of the lower inspection detector 74 of lower inspection detector cells 66 is inserted into the through hole 64a of installation base portion 64, and Then contact is formed in the electric contact on 63 back side of printed base plate, as shown in figure 18.In this state, in printed base plate 63 Conductive examine is performed on the back side.

Due to lower inspection detector 74 (its quantity is equal to the quantity that detector 73 is examined on top) contact printed base plate 63 Electric contact on the back side, and top examines detector 73 to contact the electric contact on the surface of printed base plate 63, lower inspection detection Device 74 is electrically connected to top via printed base plate 63 and examines detector 73, thus, it is possible to perform conduction for detector 73 and 74 It examines.

(10) finally, top examines detector cells 65 to pass through its moving mechanism to rise to its initial position, and lower part Detector cells 66 is examined to drop to its initial position by its moving mechanism, base board inspection apparatus 61 is by such as Figure 15 as a result, It is shown such to reset.

Thus, it is possible to conductive inspection is completed on printed base plate 63 according to abovementioned steps (1) to (10).

It can be by suitably changing the step the order and content of (1) to (10), and change the present embodiment.The present embodiment quilt It is designed as performing step (4) after step (3), wherein, in step (3), top examines detector 65 to decline to make pressure 45 pressing printed base plate 63 of tool, thus printed base plate 63 is in close contact with installing the upper surface of base portion 64, in step (4), figure As the arm 21a movements of pick device 21, CCD camera is just located on printed base plate 63.Alternatively, can hold Step (3) is performed after row step (4).

The present embodiment is designed to perform step (9) after step (8), wherein, in step (8), top, which is examined, to be visited It surveys device 65 to decline, to make top that detector 73 be examined to contact the electric contact on the surface of printed base plate 63, and thus print Conductive inspection is performed on substrate 63, in step (9), lower inspection detector 66 rises, to make lower inspection detector 74 The electric contact on 63 back side of printed base plate is contacted, and conductive examine thus is performed on printed base plate 63.Alternatively, step (8) (9) order can be changed as follows：

First, lower inspection detector 66 rises, so that lower inspection detector 74 is made to contact on 63 back side of printed base plate Electric contact；Then, top examines detector 65 to decline, to make the table that top examines detector 73 to contact printed base plate 63 Electric contact on face.Alternatively, may be performed simultaneously top examine detector 65 decline and lower inspection detector 66 it is upper It rises, so that top is made to examine detector 73 and lower inspection detector 74 while is contacted on the surface and the back side of printed base plate 63 Electric contact, thus perform the conductive inspection on printed base plate 63.

Printed base plate is being formed in order to be based on the position of the reference marker of the printed base plate 63 of detection in step (5) It performs additional conductive on other electric contacts in 63 to examine, step (6), (8), (9) and (10) can be repeatedly performed, to incite somebody to action Next designated position being examined on the upper surface for moving partially into installation base portion 64 of printed base plate 63, thus performs additional Conductive inspection.

As described above, the base board inspection apparatus 61 of the present embodiment is designed so that the directly pressing close position of pressing element 45, These close positions are close to will be by the reference marker for the printed base plate 63 that image pick-up device 21 is imaged, to make printed base plate 63 It is in close contact installation base portion 64.This allows to reliably make the reference marker of printed base plate 63 (will be by image pick-up device 21 Imaging) it is in close contact the upper surface of installation base portion 64.That is, the CCD camera of image pick-up device 21 can be to printed base plate 63 Reference marker imaging, the surface of the printed base plate is examined the top of detector cells 65 to examine and is visited in conductive examine by top Device 73 is surveyed to press；Pacifying thus, it is possible to detect printed base plate 63 exactly using image pick-up device 21 before conduction is examined Fill the position on base portion 64.

The present embodiment is designed so that, can be moved close to or detector cells are examined on the top away from installation base portion 64 65 are equipped with pressing element 45, wherein, top examines detector cells 65 to move close to installation base portion 64, so as to being mounted on installation base Electric contact on the surface of printed base plate 63 on the upper surface in portion 64 performs conductive examine；Thus, it is possible to by simply will It is closer or far from installation base portion 64, the movement of pressing element 45 to be made to be closer or far from installation that the movement of detector cells 65 is examined on top Printed base plate 63 on the upper surface of installation base portion 64.This is eliminated using other mechanisms dedicated for mobile pressing element 45 It needs；It is possible thereby to reduce the overall size of base board inspection apparatus 61 by reducing the quantity of component.

Due to top, that detector cells 65 is examined to undergo by its mobile unit is digital control, so its travel distance quilt Highly precisely control.It is contemplated that the characteristic of printed base plate 63, bending and wrinkle are applied to printed base plate subtly to adjust The pressing force of 63 pressing element 45.Furthermore it is possible to by suitably moving the first and second holding mechanisms 23 and 25 --- it keeps Portion 23a and 25a keep printed base plate 63 --- and specified positioning of the printed base plate 63 on the upper surface of installation base portion 64 is established, And pressing element 45 applies the pressing force of " fine " to printed base plate 63, to be in close contact the upper surface of installation base portion 64.Therefore, may be used Further to improve setting accuracy of the printed base plate 63 on installation base portion 64.

Since detector cells 65 are examined on top, equipped with pressing element 45, the pressing element is retractedly closer or far from installation base portion 64 movements, it is possible to prevent pressing element 45 --- when top examines detector cells 65 to decline so as to 63 surface of printed base plate On electric contact when performing conductive examine the pressing element retract away from installation base portion 64 --- interference is conductive to be examined；Thus, it is possible to Do not perform conductive examine to the electric contact on the surface of printed base plate 63 reliably troublesomely.Because 61 quilt of base board inspection apparatus Being designed such as compression spring 47 promotes pressing element 45 to press printed base plate 63, to be in close contact the upper surface of installation base portion 64, institute Printed base plate 63 can reliably be made to be in close contact the upper surface of installation base portion 64, and simple and cheap knot can be passed through Structure makes pressing element 45 retract away from installation base portion 64.

According to base board inspection apparatus 61, detector cells 65 is examined to decline and close to the upper surface of installation base portion 64 on top On printed base plate 63 before, pressing element 45 press printed base plate 63 so that top examine detector 73 lower end in contact printing Substrate 63.This allows to press printed base plate 63 to after being in close contact the upper surface of installation unit 64 in pressing element 45, uses Detector 73 is examined to perform conductive examine to the electric contact on the surface of printed base plate 63 in portion；Thus, it is possible in printed base plate 63 On be appropriately performed conductive inspection.

Because before the contact printed base plate 63 of detector 73 is examined on top, examine what detector cells 65 protruded from top Pressing element 45 presses printed base plate 63, it is possible thereby to be examined on top between the lower end of detector 73 and printed base plate 63 between formation Gap, the wherein printed base plate have been placed as the upper surface for being in close contact installation base portion 64 by being pressed by pressing element 45.That is, The CCD camera of image pick-up device 21 can place in the gap, to be imaged to the reference marker of printed base plate 63.

In base board inspection apparatus 61, pressing element 45 is placed on top and the top of detector cells 65 is examined to examine detector Near 73 and between.That is, top examines detector 73 to contact printed base plate 63, and 45 pairs of pressing element is with experienced conductive inspection The close close position of electric contact on the surface of printed base plate 63 is pressed, so that printed base plate 63 is made to be in close contact peace Fill the upper surface of unit 64；Thus, it is possible to conductive inspection is highly precisely performed to the electric contact on the surface of printed base plate 63 It tests.

6th and the 7th embodiment is exemplary and nonrestrictive in the utility model；They can be with as a result, Various modes are further changed, without departing from the purport of the utility model；As a result, on punch device 11 and base board inspection apparatus 61 various modifications are both fallen in the scope of the utility model.6th and the 7th embodiment shows four pressing elements in the accompanying drawings 45；But the quantity of pressing element is not restricted to four, and for example can be configured to one, three, five or more.

In the case of four or less pressing elements, tend to easily for the printed base plate bending with same specification and wrinkle Occur in specified location.For this purpose, these positions are examined in advance, so as to according to each printing base with the conductive inspection of experience Detector is examined on the related designated position of plate, the top of pressing element is attached to punch device perforation unit and base board inspection apparatus Unit.In the case of a large amount of pressing elements, pressing element is examined in detector cells on perforation unit and top as a grid, with each other Between appointed interval arrange, wherein, the position of the lower end of pressing element is evenly distributed, relatively wide so as to cooperating contact printed base plate Wide region.

6th and the 7th embodiment is designed to perform punching on printed base plate and examine；But this is not limitation.That is, print Brush substrate can be replaced by flexible thin resin sheet or paper.6th and the 7th embodiment is related to punch device and substrate inspection is set It is standby, but this is not limitation, and printing equipment can be changed to, it is printed in the specified portions on the surface of processed material Brush character and image.

In the punch device 11 of sixth embodiment, four compression springs 41 with equiangular distance each other (i.e., 90 °) arrangement, to surround card punch 35；Compression spring 47 and pressing element 45 are further arranged to around compression spring 41.It replaces Ground is changed, pressing element 45 and compression spring 47 can be arranged between spring 41 is compressed.That is, card punch 35 can be by pressing element 45 and compression Spring 47 and 41 surrounds, and pressing element 45 and compression spring 47 are arranged to closer to card punch 35.This allows to printing base Plate 17 be in close contact mold 55 upper surface, and pressing element 45 further pressing printed base plate 63 very close to card punch 35 to be used The more neighbouring position of the position in the hole of punching.In this configuration, the card punch 35 of perforation unit 13 can be with very high essence Degree forms hole in printed base plate 17.

In the base board inspection apparatus 61 of the 7th embodiment, pressing element 45 is arranged on upper in top inspection detector cells 65 Portion examine detector 73 near and between.It may be modified such that, replacement is arranged between top inspection detector 73 Pressing element 45, pressing element 45 simply examine detector 73 to set close to top.In this configuration, it is conductive with experience in 45 pairs of pressing element In a state that the neighbouring close position in the designated position of the printed base plate 63 of inspection is pressed, top can be made to examine detector 73 contact printed base plates 63, so that printed base plate 63 is made to be in close contact the upper surface of installation base portion 64；It is thus, it is possible to very accurate Ground performs the electric contact on the surface of printed base plate 63 conductive examine.

In the base board inspection apparatus 61 of the 7th embodiment, mobile unit examines detector cells 65 to perform number on top It controls vertically to advance.It can be revised as, mode is mobile unit installation base portion 64 is performed it is digital control come edge Vertical direction is advanced, and is examined detector cells 65 without mobile top or is not moved with together with top inspection detector cells 65 It is dynamic.In brief, the 7th embodiment is defined with lower structure：Detector cells 65 and installation base portion 64 is examined to be controlled as in top Closer or far from moving each other, so that the printed base plate 63 on the upper surface to installing base portion 64 performs conductive inspection.In the knot In structure, the travel distance obtained by installing base portion 64 and top inspection detector cells 65 is considered, and suitably determine image The height vertically of pick device 21 and position.

Obviously, the above embodiments are merely examples for clarifying the description, and is not intended to limit the embodiments.It is right For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or It changes.There is no necessity and possibility to exhaust all the enbodiments.And the obvious variation thus extended out or Among the protection domain that variation is created still in the utility model.

Claims (28)

1. a kind of flying probe tester, including：

Base portion is installed, is horizontally disposed with, for installing the processed material with flexible and thin shape；

Processing unit, the processing unit is controlled as advancing closer or far from the installation base portion, and the processing unit leans on The nearly installation base portion advances to perform processing on the processed material；

Image pick-up device, for detecting the position of the relatively described installation base portion of the specified portions of the processed material；With

Mobile unit moves the processed material for the detected position of the specified portions based on the processed material It moves to the designated position on the installation base portion,

Wherein, the processing unit is equipped with multiple pressing elements, and the pressing element is retractedly moved compared with the installation base portion, and And before the position of the specified portions of the processed material is detected in described image pick device, the pressing element is located described The specified portions for managing material nearby press the processed material, to be in close contact with the installation base portion；

Wherein, the processed material in the processing unit on the installation base portion is advanced so as in the processed material Before upper execution processing, the multiple pressing element presses the processed material, to be in close contact with the installation base portion；

It is characterized in that：

The processing unit includes：

X-axis component, the X-axis component guide measuring head on test platform along X-motion；The X-axis component includes a pair The X-axis linear guidance device being arranged in parallel on horizontal base and an X-axis driving device；

Y-axis component, the Y-axis component guide the measuring head on the test platform along Y-motion, the Y-axis component Both ends be slidably connected respectively with two X-axis linear guidance devices；The measuring head is connected and sets with the Y-axis component In the one side of the Y-axis component；

Equipoising support apparatus is connected with the Y-axis component, and the Equipoising support apparatus applies and the survey Y-axis component The torque opposite effect torque that examination head generates the Y-axis component；

Wherein, the X-axis driving device is connected with the Y-axis component and the Y-axis component is driven to be guided along the X-axis straight line and fills Put slip, the X-axis driving device deviates the center line of a pair of X-axis linear guidance device, and to be arranged on a pair of X-axis straight Between line guide device.

2. flying probe tester according to claim 1, which is characterized in that the Y-axis component includes Y-axis straight line priming device And Y-axis driving device, the Equipoising support apparatus include：

Supporting mechanism, the horizontal end of the supporting mechanism are equipped with measuring head, and the supporting mechanism is along the Y-axis straight line priming Device guides the measuring head to move in the horizontal plane；

Balancing device, the balancing device are connected with the supporting mechanism, and the balancing device is to the Y-axis straight line priming device Apply the torque opposite effect torque generated with the measuring head to the Y-axis straight line priming device.

3. flying probe tester according to claim 2, which is characterized in that the balancing device is set respectively with the measuring head It puts in the both sides of the Y-axis straight line priming device.

4. flying probe tester according to claim 3, which is characterized in that the supporting mechanism includes mounting bracket, the peace It shelves and is slidably connected with the Y-axis straight line priming device, the balancing device is arranged on the one side of the mounting bracket, in the peace The opposite side shelved is horizontally installed with cantilever, and the other end of the cantilever is equipped with the measuring head.

5. flying probe tester according to claim 4, which is characterized in that the balancing device is to draw with the Y-axis straight line The balance guide rail that dynamic device is arranged in parallel, the balance guide rail are slidably connected with the mounting bracket.

6. flying probe tester according to claim 5, which is characterized in that the mounting bracket includes the first link block and second Link block, first link block are slidably connected with the Y-axis straight line priming device, and second link block is led with the balance Rail is slidably connected.

7. flying probe tester according to claim 4, which is characterized in that the balancing device is included along the anti-of the cantilever The guide rail and the slidable clump weight on guide rail set to extended line.

8. flying probe tester according to claim 7, which is characterized in that the X-axis straight line priming device and the Y-axis are straight Line priming device is linear module.

9. flying probe tester according to claim 2, which is characterized in that the balancing device includes being separately positioned on described Y-axis straight line priming device both sides and the balance guide rail of setting in parallel.

10. flying probe tester according to claim 9, which is characterized in that the supporting mechanism includes mounting bracket, the peace It shelves and is slidably connected with the Y-axis straight line priming device, the balance guide rail is slidably connected with the mounting bracket.

11. flying probe tester according to claim 9, which is characterized in that the Y-axis straight line priming device is screw.

12. flying probe tester according to claim 11, which is characterized in that the balance guide rail is line slideway.

13. flying probe tester according to claim 1, which is characterized in that at least adjacent to the X-axis driving device one side X-axis linear guidance device is heavy-load type line slideway.

14. flying probe tester according to claim 13, which is characterized in that at least adjacent to the X-axis driving device one side X-axis linear guidance device be roller-type line slideway.

15. flying probe tester according to claim 1, which is characterized in that the X-axis close to the X-axis driving device one side Linear guidance device is roller-type line slideway, and the X-axis linear guidance device away from the X-axis driving device one side is straight for ball Line guide rail.

16. flying probe tester according to claim 1, which is characterized in that the X-axis driving device include motor and with The X-axis screw of the motor output end connection, the X-axis screw are arranged in parallel with the X-axis linear guidance device, the X-axis Screw is connected with the Y-axis component.

17. flying probe tester according to claim 16, which is characterized in that the Y-axis component includes：Y-axis pedestal is set In Y-axis linear guidance device and Y-axis driving device on the Y-axis pedestal, the both ends of the Y-axis pedestal respectively with the X-axis Linear guidance device is slidably connected, and the Y-axis pedestal is connected with the X-axis screw.

18. flying probe tester according to claim 17, which is characterized in that be additionally provided on the Y-axis pedestal with it is described The feed screw nut or screw sliding block that screw is connected.

19. the flying probe tester according to claim 17 or 18, which is characterized in that the Y-axis linear guidance device is line Property module, the linear module includes Y-axis line slideway and the screw that is arranged in the Y-axis line slideway.

20. flying probe tester according to claim 19, which is characterized in that the X-axis component, which further includes, is fixedly mounted institute State the fulcrum bearing of X-axis screw.

21. flying probe tester according to claim 17, which is characterized in that the Y-axis pedestal includes：

First sliding part and the second sliding part are slidably matched respectively with two X-axis linear guidance devices, and described first slides Portion is set close to the motor；

Support portion is connected between first sliding part and second sliding part, first sliding part along the X-axis The length of the extending direction of linear guidance device is more than the extending direction along the X-axis linear guidance device of the support portion Width, to increase span of the Y-axis pedestal on the X-axis linear guidance device.

22. flying probe tester according to claim 21, which is characterized in that first sliding part and the support portion shape Into T-shaped structure.

23. flying probe tester according to claim 21, which is characterized in that first sliding part and the support portion Angle, which is equipped with, strengthens stabilizers.

24. flying probe tester according to claim 23, which is characterized in that first sliding part, the support portion and The reinforcement stabilizers form triangular structure.

25. flying probe tester according to claim 21, which is characterized in that first sliding part it is straight along the X-axis The edge of the length of the extending direction of line guide device and the support portion is perpendicular to the extending direction of the X-axis linear guidance device Length ratio in the range of 1/8~2/3.

26. flying probe tester according to claim 1, which is characterized in that the processing unit be subjected to it is digital control, so as to It advances closer or far from the installation base portion.

27. flying probe tester according to claim 1, which is characterized in that the multiple pressing element is prompted to close to the peace Base portion movement is filled, thus presses the processed material, to be in close contact with the installation base portion.

28. flying probe tester according to claim 1, which is characterized in that the processing unit is visited equipped with multiple examine Device is surveyed, the inspection detector connects with being formed in the multiple electric contacts being formed on the processed material as printed base plate It touches, conductive examine thus is performed on the processed material.