CN109510059B - A Q-switched laser with long pulse output - Google Patents
A Q-switched laser with long pulse output Download PDFInfo
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Abstract
一种输出长脉冲的调Q激光器,包括:石英玻璃棒(4)、输出镜(5)以及沿光轴依次设置的反射镜(1)、Q开关(2)和增益介质(3);石英玻璃棒(4)设置有入射窗口(401)和出射窗口(404);石英玻璃棒(4)的一端设置有曲率为R的第一反射面(402);另一端设置为曲率为R的第二反射面(403);入射窗口(401)设置在第二反射面(403)上,出射窗口(404)设置在第一反射面(402)或第二反射面(403)上;输出镜(5)设置在经出射窗口(404)射出的光束的光轴上。本发明提供的调Q激光器设置有石英玻璃棒4,一方面,石英玻璃棒能增加调Q激光器内光路的实际光程,另一方面,光线在进出石英玻璃棒时的q参数不变,能够输出稳定的长脉冲调Q激光。
A Q-switched laser that outputs long pulses, comprising: a quartz glass rod (4), an output mirror (5), a mirror (1), a Q switch (2) and a gain medium (3) arranged in sequence along the optical axis; The glass rod (4) is provided with an incident window (401) and an exit window (404); one end of the quartz glass rod (4) is provided with a first reflective surface (402) whose curvature is R; Two reflection surfaces (403); the incident window (401) is arranged on the second reflection surface (403), and the exit window (404) is arranged on the first reflection surface (402) or the second reflection surface (403); the output mirror ( 5) It is arranged on the optical axis of the light beam emitted through the exit window (404). The Q-switched laser provided by the present invention is provided with a quartz glass rod 4. On the one hand, the quartz glass rod can increase the actual optical path of the optical path in the Q-switched laser. Output stable long pulse Q-switched laser.
Description
技术领域technical field
本发明涉及调Q激光技术领域,尤其是涉及一种输出长脉冲调Q激光器。The invention relates to the technical field of Q-switched lasers, in particular to a long-pulse Q-switched laser output.
背景技术Background technique
调Q激光器的脉冲宽度一般在10ns~500ns之间,而脉冲宽度在 0.5~10μs的长脉冲调Q激光器的脉冲峰值功率虽不高,但平均功率远远大于普通脉冲激光器,因此在工业、医疗及科研等应用中具有较大的开发潜力及应用前景。调Q激光器输出激光的脉冲宽度与激光器的腔长成正比,因此通常采用增长腔长的方式来获得长脉冲调Q激光输出。目前,为了输出长脉冲的调Q激光,现有技术是通过直接拉腔的技术或者使用由相隔一定距离的一对凹面镜组成的多通长腔的技术来实现。但是,这些方案本身存在如下缺陷:The pulse width of Q-switched lasers is generally between 10 ns and 500 ns, and the pulse peak power of long-pulse Q-switched lasers with a pulse width of 0.5 to 10 μs is not high, but the average power is much greater than that of ordinary pulsed lasers. It has great development potential and application prospects in scientific research and other applications. The pulse width of the Q-switched laser output laser is proportional to the cavity length of the laser, so the method of increasing the cavity length is usually used to obtain long-pulse Q-switched laser output. At present, in order to output long-pulse Q-switched lasers, the prior art is realized by directly pulling the cavity technology or using a multi-pass long cavity technology composed of a pair of concave mirrors separated by a certain distance. However, these solutions themselves have the following defects:
1)采用直接拉腔技术:直接将激光器谐振腔的腔长延长,无需插入其他任何光学元件引入损耗。虽然该技术比较简单,但直接拉腔会导致整个激光器谐振腔的腔长过长、体积变大,不利于小型化、实用化、并且生产成本较高。1) Using direct cavity pulling technology: directly extend the cavity length of the laser resonator without inserting any other optical components to introduce losses. Although this technology is relatively simple, directly pulling the cavity will cause the cavity length of the entire laser resonator to be too long and the volume will become larger, which is not conducive to miniaturization and practicality, and the production cost is high.
2)采用多通长腔技术:多通长腔由相隔一定距离的一对凹面镜组成、每个凹面镜都有一个光学切槽,光束从其中一个凹面镜的切槽射入多通长腔;然后在两个凹面镜上多次反射,往返传输,从另外一个凹面镜的切槽射出。虽然多通长腔技术能够满足增加光路的实际光程以获得长脉冲Q激光输出和减小激光器的体积的目的。但是,该技术需在谐振腔内设置有两个凹面镜,并且对这两个凹面镜的调节精度和保持精度要求很高,如果这两个凹面镜的位置发生变化,可能导致无法输出激光。除此以外,由于这两个凹面镜间气流的影响,进一步降低了激光器的稳定性。2) Multi-pass long cavity technology is adopted: the multi-pass long cavity is composed of a pair of concave mirrors separated by a certain distance, each concave mirror has an optical slot, and the beam is injected into the multi-pass long cavity from the slot of one of the concave mirrors ; Then it reflects multiple times on two concave mirrors, transmits back and forth, and shoots out from the slot of another concave mirror. Although the multi-pass long-cavity technology can meet the purpose of increasing the actual optical path of the optical path to obtain long-pulse Q laser output and reducing the volume of the laser. However, this technology requires two concave mirrors to be installed in the resonant cavity, and the adjustment accuracy and maintenance accuracy of the two concave mirrors are very high. If the positions of the two concave mirrors change, the laser may not be output. In addition, the stability of the laser is further reduced due to the influence of airflow between the two concave mirrors.
发明内容Contents of the invention
本发明的目的是提供一种输出长脉冲的调Q激光器,通过在调Q激光器的光路中设置一个石英玻璃棒,使得光束能够从石英玻璃棒的入射窗口射入在石英玻璃棒两端的反射面上反射多次,符合νθ=μπ的光束从石英玻璃棒出射窗口输出。本发明提供的调Q激光器设置有石英玻璃棒4,一方面能够增加调Q激光器内光路的实际光程,另一方面光线经多次往返传输从出射窗口射出时的q参数与从入射窗口射入前完全相同、即实现了q参数的单位变换,从而能够获得稳定的长脉冲Q激光输出。The purpose of the present invention is to provide a Q-switched laser that outputs long pulses. By setting a quartz glass rod in the optical path of the Q-switched laser, the light beam can be injected into the reflective surfaces at both ends of the quartz glass rod from the incident window of the quartz glass rod. Reflected multiple times, the light beam conforming to νθ=μπ is output from the exit window of the quartz glass rod. The Q-switched laser provided by the present invention is provided with a quartz glass rod 4. On the one hand, the actual optical path of the optical path in the Q-switched laser can be increased; It is exactly the same as before, that is, the unit conversion of the q parameter is realized, so that a stable long-pulse Q laser output can be obtained.
为解决上述问题,本发明的第一方面提供了一种长脉冲调Q激光器,包括:石英玻璃棒、输出镜以及沿光轴依次设置的反射镜、Q开关和增益介质;石英玻璃棒设置有入射窗口和出射窗口;石英玻璃棒的一端设置有曲率为R的第一反射面;另一端设置为曲率为R的第二反射面;入射窗口设置在第二反射面上,出射窗口设置在第一反射面或第二反射面上;输出镜设置在经出射窗口射出的光束的光轴上。In order to solve the above problems, the first aspect of the present invention provides a long-pulse Q-switched laser, comprising: a quartz glass rod, an output mirror, a reflective mirror, a Q switch and a gain medium arranged in sequence along the optical axis; the quartz glass rod is provided with An incident window and an exit window; one end of the quartz glass rod is provided with a first reflective surface whose curvature is R; the other end is provided with a second reflective surface whose curvature is R; the incident window is arranged on the second reflective surface, and the exit window is arranged at A reflective surface or a second reflective surface; the output mirror is arranged on the optical axis of the light beam emitted through the exit window.
进一步地,从入射窗口进入石英玻璃棒内的光束,经过第一反射面反射至第二反射面构成一个反射循环周期;或者,从入射窗口进入石英玻璃棒内的光束,从第二反射面反射至第一反射面并反射回第二反射面构成一个反射循环周期;相邻两个反射循环周期中,两条从第一反射面反射至第二反射面或者两条从第二反射面反射至第一反射面的光线的夹角为θ,且θ=2cos-1(1-d/R),并且满足νθ=μπ;其中,d为石英玻璃棒的长度,ν为往返次数,且ν与μ均为正整数。Further, the light beam entering the quartz glass rod from the incident window is reflected from the first reflective surface to the second reflective surface to form a reflection cycle; or, the light beam entering the quartz glass rod from the incident window is reflected from the second reflective surface to the first reflective surface and reflected back to the second reflective surface to form a reflection cycle; in two adjacent reflection cycles, two reflections from the first reflection surface to the second reflection surface or two reflections from the second reflection surface to the second reflection surface The included angle of the light on the first reflective surface is θ, and θ=2cos -1 (1-d/R), and satisfies νθ=μπ; where, d is the length of the quartz glass rod, ν is the number of round trips, and ν and μ are all positive integers.
进一步地,反射镜镀有高反膜。Further, the mirror is coated with a high reflection film.
进一步地,Q开关为电光调Q开关、声光调Q开关、染料调Q开关或色心晶体调Q开关中的一种。Further, the Q switch is one of an electro-optic Q-switch, an acousto-optic Q-switch, a dye Q-switch or a color center crystal Q-switch.
进一步地,增益介质为Nd:YAG、Yb:YAG、陶瓷、二氧化碳CO2、氦 -氖气、铜蒸气、砷化镓GaAs、硫化镉CdS、磷化铟InP、若丹明6G或若丹明B中的一种。Further, the gain medium is Nd:YAG, Yb:YAG, ceramics, carbon dioxide CO 2 , helium-neon gas, copper vapor, gallium arsenide GaAs, cadmium sulfide CdS, indium phosphide InP, rhodamine 6G or rhodamine One of B.
进一步地,调Q激光器的泵浦方式为端泵或侧泵。Further, the pumping mode of the Q-switched laser is end pumping or side pumping.
进一步地,第一反射面和第二反射面镀有高反膜。Further, the first reflective surface and the second reflective surface are coated with a high reflective film.
进一步地,输出镜镀有对于输出波长一定透射率的膜。Further, the output mirror is coated with a film with a certain transmittance for the output wavelength.
进一步地,反射镜、Q开关、增益介质、石英玻璃棒和输出镜任一两者之间设置有标准具、波片、体布拉格光栅、双折射滤波片、非线性频率变换晶体、偏振片中的任意一种或多种。Further, an etalon, a wave plate, a volume Bragg grating, a birefringent filter, a nonlinear frequency conversion crystal, and a polarizer are arranged between any of the mirror, the Q switch, the gain medium, the quartz glass rod, and the output mirror. any one or more of.
进一步地,石英玻璃棒的两处分别设置有高透膜,设置有高透膜的位置为入射窗口和出射窗口。Further, two places of the quartz glass rod are respectively provided with high-transmission films, and the positions where the high-transmission films are provided are the incident window and the exit window.
进一步地,入射窗口和出射窗口为平面结构。Further, the incident window and the exit window are planar structures.
本发明的上述技术方案具有如下有益的技术效果:The technical solution of the present invention has the following beneficial technical effects:
(1)通过在调Q激光器的光路中设置一个石英玻璃棒,使得光束能够从石英玻璃棒的入射窗口射入在石英玻璃棒两端的反射面上反射多次,符合νθ=μπ的光束从石英玻璃棒出射窗口输出。通过上述石英玻璃棒,一方面,光线经ν次往返传输,能够增加光路的实际光程;另一方面,当θ角满足闭合条件,光线经ν次往返传输从出射窗口射出时的q参数与射入前完全相同,也就是实现了q参数的单位变换,使得石英玻璃棒本身在光路中具有零效应长度,从而能够获得稳定的长脉冲Q激光输出。(1) By setting a quartz glass rod in the optical path of the Q-switched laser, the light beam can be incident from the incident window of the quartz glass rod and reflected on the reflective surfaces at both ends of the quartz glass rod for multiple reflections. The glass rod exits the window output. Through the above-mentioned quartz glass rod, on the one hand, the light travels back and forth for ν times, which can increase the actual optical path length of the optical path; on the other hand, when the θ angle meets the closing condition, the q parameter and It is exactly the same before the injection, that is, the unit conversion of the q parameter is realized, so that the quartz glass rod itself has a zero effect length in the optical path, so that a stable long-pulse Q laser output can be obtained.
(2)由于石英玻璃棒具有低损耗、热膨胀系数极小的特点,本发明通过将石英玻璃棒代替由一对凹面镜组成的多通长腔,相比于多通长腔技术获得长脉冲输出的激光器来讲,降低了对调节两个凹面镜的位置精度和保持精度的要求,并且,可设置实心的石英玻璃棒,无需考虑气流的影响,进一步提高了激光器的稳定性。(2) Since the quartz glass rod has the characteristics of low loss and extremely small thermal expansion coefficient, the present invention obtains a long pulse output compared with the multi-pass long cavity technology by replacing the quartz glass rod with a multi-pass long cavity composed of a pair of concave mirrors For lasers, the requirements for adjusting the position accuracy and maintaining accuracy of the two concave mirrors are reduced, and a solid quartz glass rod can be set without considering the influence of airflow, which further improves the stability of the laser.
附图说明Description of drawings
图1是根据本发明第一实施方式的一种长脉冲调Q激光器结构示意图;Fig. 1 is a schematic structural diagram of a long-pulse Q-switched laser according to a first embodiment of the present invention;
图2是本发明第一实施方式调Q激光器内石英玻璃棒内光束的传输示意图;Fig. 2 is a schematic diagram of the transmission of the light beam in the quartz glass rod in the Q-switched laser according to the first embodiment of the present invention;
图3是根据本发明第二实施方式的一种调Q激光器结构示意图;3 is a schematic structural diagram of a Q-switched laser according to a second embodiment of the present invention;
图4为图3所示调Q激光器内石英玻璃棒的第一反射面或第二反射面上的光斑分布示意图;4 is a schematic diagram of spot distribution on the first reflective surface or the second reflective surface of the quartz glass rod in the Q-switched laser shown in FIG. 3;
图5是根据本发明第三实施方式的一种调Q激光器结构示意图;5 is a schematic structural diagram of a Q-switched laser according to a third embodiment of the present invention;
图6为图5所示调Q激光器内石英玻璃棒的第一反射面或第二反射面上的光斑分布示意图。FIG. 6 is a schematic diagram of spot distribution on the first reflective surface or the second reflective surface of the quartz glass rod in the Q-switched laser shown in FIG. 5 .
附图标记:Reference signs:
1:反射镜;2:Q开关;3:增益介质;4:石英玻璃棒;401:入射窗口;402:第一反射面;403:第二反射面;404:出射窗口;5:输出镜; 6:泵浦源。1: mirror; 2: Q switch; 3: gain medium; 4: quartz glass rod; 401: incident window; 402: first reflective surface; 403: second reflective surface; 404: exit window; 5: output mirror; 6: Pump source.
具体实施方式Detailed ways
为使本发明的目的、技术方案和优点更加清楚明了,下面结合具体实施方式并参照附图,对本发明进一步详细说明。应该理解,这些描述只是示例性的,而并非要限制本发明的范围。此外,在以下说明中,省略了对公知结构和技术的描述,以避免不必要地混淆本发明的概念。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in combination with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are exemplary only, and are not intended to limit the scope of the present invention. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concept of the present invention.
图1是根据本发明第一实施方式的一种长脉冲调Q激光器结构示意图。Fig. 1 is a schematic structural diagram of a long-pulse Q-switched laser according to the first embodiment of the present invention.
如图1所示,该激光器包括:石英玻璃棒4、输出镜5以及沿光轴依次设置的反射镜1、Q开关2和增益介质3。As shown in FIG. 1 , the laser includes: a quartz glass rod 4 , an output mirror 5 , and a reflection mirror 1 , a Q switch 2 and a gain medium 3 arranged in sequence along the optical axis.
其中,石英玻璃棒4设置有入射窗口401和出射窗口404;石英玻璃棒4的一端设置有曲率为R的第一反射面402;另一端设置为曲率为R的第二反射面403;入射窗口401设置在第二反射面403上,出射窗口404 设置在第一反射面402或第二反射面403上;输出镜5设置在经出射窗口 404射出的光束的光轴上。Wherein, the quartz glass rod 4 is provided with an incident window 401 and an exit window 404; one end of the quartz glass rod 4 is provided with a first reflective surface 402 with a curvature of R; the other end is provided with a second reflective surface 403 with a curvature of R; the incident window 401 is set on the second reflective surface 403 , and the exit window 404 is set on the first reflective surface 402 or the second reflective surface 403 ; the output mirror 5 is set on the optical axis of the light beam emitted through the exit window 404 .
具体地,图2是图1所示调Q激光器内石英玻璃棒内光束的传输示意图。Specifically, FIG. 2 is a schematic diagram of beam transmission in a quartz glass rod in the Q-switched laser shown in FIG. 1 .
如图1和图2所示,调Q激光器内光的振荡路径包括:增益介质3受激辐射的光沿光轴方向经过入射窗口401射入石英玻璃棒4,经过第一反射面402反射至第二反射面403,在第一反射面402和第二反射面403之间不断的反射,从出射窗口404射出,出射至输出镜5表面,经输出镜5 表面反射,原路从出射窗口404射入石英玻璃棒4内,经过第一反射面402 和第二反射面403多次往返传输从入射窗口401射出,经过增益介质3、Q 开关2并经过反射镜1反射至增益介质3,经过增益介质3后,再进入石英玻璃棒4内,如此不断往返振荡。当谐振腔内的光子数达到输出阈值时,也就是谐振腔内的光子数所含有的能量高于光束在谐振腔内的损耗时,光从输出镜5输出,从输出镜5输出的光即为长脉冲调Q激光器的输出激光,该输出激光为长脉冲调Q激光。As shown in Figures 1 and 2, the oscillation path of light in the Q-switched laser includes: the light emitted by the stimulated radiation of the gain medium 3 enters the quartz glass rod 4 through the incident window 401 along the optical axis, and is reflected by the first reflective surface 402 to The second reflective surface 403, constantly reflecting between the first reflective surface 402 and the second reflective surface 403, emits from the exit window 404, exits to the surface of the output mirror 5, and is reflected by the surface of the output mirror 5, and the original path is from the exit window 404 It is injected into the quartz glass rod 4, passes through the first reflective surface 402 and the second reflective surface 403 multiple round-trip transmissions, is emitted from the incident window 401, passes through the gain medium 3, the Q switch 2 and is reflected to the gain medium 3 by the reflector 1, and passes through the gain medium 3. After the gain medium 3, it enters the quartz glass rod 4, so that it oscillates back and forth continuously. When the number of photons in the resonator reaches the output threshold, that is, when the energy contained in the number of photons in the resonator is higher than the loss of the light beam in the resonator, the light is output from the output mirror 5, and the light output from the output mirror 5 is is the output laser of the long-pulse Q-switched laser, and the output laser is a long-pulse Q-switched laser.
需要说明的是,由于第一反射面402设置有预设的曲率R,因此,在长度方向上,经过第一反射面402的光束会以ɑ角度反射至第二反射面403。由于第二反射面403也设置有与第一反射面相同的曲率R。因此,第二反射面403将射到其表面的光束以ɑ角度反射至第一反射面,该光束在两个反射面不断的反射,最后经出射窗口404输出。因此,光线每经过一次反射面反射就有一个ɑ大小的旋转角,同一个反射面上相邻两次反射光线的夹角为θ,且θ=2ɑ。以下将详细说明一下该旋转角度θ。It should be noted that since the first reflective surface 402 is provided with a preset curvature R, in the longitudinal direction, the light beam passing through the first reflective surface 402 will be reflected to the second reflective surface 403 at an angle α. Since the second reflective surface 403 is also provided with the same curvature R as that of the first reflective surface. Therefore, the second reflective surface 403 reflects the light beam incident on its surface to the first reflective surface at an angle of α, the light beam is continuously reflected on the two reflective surfaces, and finally output through the exit window 404 . Therefore, every time the light is reflected by the reflective surface, there is a rotation angle of ɑ, and the angle between two adjacent reflected light rays on the same reflective surface is θ, and θ=2ɑ. The rotation angle θ will be described in detail below.
在图1和图2所示的实施方式中,从入射窗口401进入石英玻璃棒4 内的光束,初始时,从入射窗口401进入石英玻璃棒4内的光束,经过第一反射面402反射至第二反射面403构成一个反射循环周期;或者,当光束第二次反射至第一反射面之后,光束从第一反射面402反射至第二反射面403并反射回第一反射面402构成一个反射循环周期;或者,从入射窗口401进入石英玻璃棒4内的光束,从第二反射面403反射至第一反射面 402并反射回第二反射面403构成一个反射循环周期。In the embodiment shown in Fig. 1 and Fig. 2, the light beam entering the quartz glass rod 4 from the incident window 401, initially, the light beam entering the quartz glass rod 4 from the incident window 401 is reflected by the first reflecting surface 402 to The second reflective surface 403 forms a reflection cycle; or, after the light beam is reflected to the first reflective surface for the second time, the light beam is reflected from the first reflective surface 402 to the second reflective surface 403 and reflected back to the first reflective surface 402 to form a cycle. A reflection cycle; or, a light beam entering the quartz glass rod 4 from the incident window 401 is reflected from the second reflection surface 403 to the first reflection surface 402 and reflected back to the second reflection surface 403 to form a reflection cycle.
相邻两个反射循环周期中,两条从第一反射面402反射至第二反射面403的光线的夹角以及两条从第二反射面反射至第一反射面403的夹角相同,均为旋转角度θ,θ小于或等于180°(当ν=μ=1时,θ=180°),且θ=2cos-1(1-d/R),其中,d为石英玻璃棒4的长度,R为第一反射面和第二反射面的曲率半径。当光束满足νθ=μπ时,会形成闭合的光路,其中,ν为往返次数,也就是循环周期的次数,且ν与μ均为正整数。In two adjacent reflection cycles, the included angles of the two rays reflected from the first reflective surface 402 to the second reflective surface 403 and the included angles of the two rays reflected from the second reflective surface to the first reflective surface 403 are the same, both Be rotation angle θ, θ is less than or equal to 180 ° (when ν=μ=1, θ=180 °), and θ=2cos -1 (1-d/R), wherein, d is the length of quartz glass rod 4 , R is the radius of curvature of the first reflective surface and the second reflective surface. When the light beam satisfies νθ=μπ, a closed optical path will be formed, where ν is the number of round trips, that is, the number of cycles, and both ν and μ are positive integers.
根据上述公式νθ=μπ,由ABCD矩阵传输理论可以计算得到形成闭合光路的光束在石英玻璃棒中经过ν次往返传播后的矩阵T为:According to the above formula νθ=μπ, from the ABCD matrix transmission theory, the matrix T of the light beam forming a closed optical path in the quartz glass rod after ν round-trip propagation can be calculated as:
通过上述矩阵可以得知,该矩阵为单位矩阵,也就是说,经过ν次往返后,石英玻璃棒对光束提供了q参数的单位变换,也就是光线经ν次往返传输从出射窗口(404)射出时的q参数与从入射窗口(401)射入前完全相同,可知该石英玻璃棒4在光路中具有零效应长度,也就是在激光器内加入了石英玻璃棒4,除了增加光路的实际光程,并没有改变光束的光斑大小和发散角等性质。It can be known from the above matrix that the matrix is an identity matrix, that is to say, after ν round trips, the quartz glass rod provides the unit transformation of the q parameter to the light beam, that is, the light is transmitted from the exit window (404) through ν round trips. The q parameter when ejecting is exactly the same as before injecting from the incident window (401), it can be seen that the quartz glass rod 4 has a zero effect length in the optical path, that is, the quartz glass rod 4 is added in the laser, except for increasing the actual light of the optical path. The process does not change the properties of the beam spot size and divergence angle.
因此,本发明提供的调Q激光器采用石英玻璃棒代替由一对凹面镜组成的多通长腔,相比于多通长腔技术获得长脉冲输出的激光器来讲,降低了对调节两个凹面镜的位置精度和保持精度的要求,并且,可设置实心的石英玻璃棒,无需考虑气流的影响,进一步地提高了激光器的稳定性。Therefore, the Q-switched laser provided by the present invention adopts a quartz glass rod instead of a multi-pass long cavity composed of a pair of concave mirrors, which reduces the need for adjusting two concave mirrors compared to the multi-pass long cavity technology to obtain a long pulse output laser. The position accuracy of the mirror and the requirements for maintaining accuracy, and a solid quartz glass rod can be set without considering the influence of the airflow, which further improves the stability of the laser.
在一个优选的实施例中,反射镜1镀有高反膜,该高反膜是指对于振荡激光波长反射率高的膜。In a preferred embodiment, the mirror 1 is coated with a high-reflection film, which refers to a film with high reflectivity for the wavelength of the oscillating laser.
在一个实施例中,Q开关2为电光调Q开关、声光调Q开关、染料调 Q开关或色心晶体调Q开关中的一种。In one embodiment, the Q switch 2 is one of electro-optic Q-switches, acousto-optic Q-switches, dye Q-switches or color center crystal Q-switches.
在一个实施例中,增益介质3为Nd:YAG、Yb:YAG、陶瓷、二氧化碳CO2、氦-氖气、铜蒸气、砷化镓GaAs、硫化镉CdS、磷化铟InP、若丹明6G或若丹明B中的一种。In one embodiment, the gain medium 3 is Nd:YAG, Yb:YAG, ceramic, carbon dioxide CO 2 , helium-neon gas, copper vapor, gallium arsenide GaAs, cadmium sulfide CdS, indium phosphide InP, rhodamine 6G Or one of Rhodamine B.
需要说明的是,当增益介质为气态时,是将该气态的增益介质容纳在储气罐内,可以通过电泵浦,当增益介质为液态时(例如若丹明6G或若丹明B等染料增益介质),将液态的增益介质放入染料盒中。It should be noted that when the gain medium is in a gaseous state, the gaseous gain medium is accommodated in a gas storage tank, which can be pumped electrically; when the gain medium is in a liquid state (such as Rhodamine 6G or Rhodamine B, etc. dye gain medium), put the liquid gain medium into the dye box.
在一个实施例中,该调Q激光器的泵浦方式为端泵或侧泵。In one embodiment, the pumping mode of the Q-switched laser is end-pumped or side-pumped.
在一个实施例中,第一反射面402和第二反射面403镀有高反膜,该高反膜是指对于振荡激光波长反射率高的膜。例如,振荡激光波长为 1064nm,那么高反膜就是将波长为1064nm的激光反射,一般反射率能够达到99.9%以上。In one embodiment, the first reflective surface 402 and the second reflective surface 403 are coated with a high reflective film, and the high reflective film refers to a film with high reflectivity for the wavelength of the oscillating laser. For example, if the wavelength of the oscillating laser is 1064nm, then the high-reflection film reflects the laser with a wavelength of 1064nm, and the general reflectivity can reach more than 99.9%.
在一个实施例中,输出镜5镀有对于输出波长一定透射率的膜。In one embodiment, the output mirror 5 is coated with a film with a certain transmittance for the output wavelength.
需要说明的是,一定透射率的膜是指对于该波长的激光能透过或者反射多少能量。例如,一定透射率的膜为对于波长为1064nm的透过率为40%,也就是指1064nm光的经过该镀有一定透射率的膜,有40%的能量能透过, 60%被反射。例如,能量为100W,波长为1064nm的激光经透过率为40%的膜,则将波长为1064nm的激光能量会透过40W,能量会反射60W;例如,镀有99.9%反射膜,就是波长为1064nm的光99.9%的能量都被反射,只有 0.1%透过。It should be noted that a film with a certain transmittance refers to how much energy can be transmitted or reflected for laser light of this wavelength. For example, a film with a certain transmittance has a transmittance of 40% for a wavelength of 1064nm, which means that when 1064nm light passes through the film coated with a certain transmittance, 40% of the energy can pass through and 60% is reflected. For example, if the laser energy is 100W and the wavelength is 1064nm through a film with a transmittance of 40%, the laser energy with a wavelength of 1064nm will pass through 40W and the energy will reflect 60W; for example, if it is coated with a 99.9% reflective film, the wavelength is 99.9% of the energy of 1064nm light is reflected, and only 0.1% is transmitted.
在一个实施例中,反射镜1、Q开关2、增益介质3、石英玻璃棒4和输出镜5任一两者之间可设置有标准具、波片、体布拉格光栅、双折射滤波片、非线性频率变换晶体、偏振片中的任意一种或多种。In one embodiment, an etalon, wave plate, volume Bragg grating, birefringence filter, Any one or more of nonlinear frequency conversion crystals and polarizers.
具体地,由于光学的特性,可以在上述反射镜1、Q开关2、增益介质3、石英玻璃棒4和输出镜5任一两者之间设置有光学元件。例如,在反射镜1、Q开关2之间沿光路插入一个标准具,该标准具可用于压窄线宽,也可用于选波长。Specifically, due to the characteristics of optics, an optical element may be disposed between any of the reflector 1 , the Q switch 2 , the gain medium 3 , the quartz glass rod 4 and the output mirror 5 . For example, an etalon is inserted along the optical path between the reflector 1 and the Q switch 2, and the etalon can be used to narrow the line width and select the wavelength.
在一个实施例中,石英玻璃棒4的两处分别设置有高透膜,设置有高透膜的位置为入射窗口401和出射窗口404。其中,高透膜为对于振荡光束透射率高的膜。例如,振荡激光波长为1064nm,那么高透膜就是将波长为1064nm的激光透射,一般透射率能够达到99.9%以上。In one embodiment, two places of the quartz glass rod 4 are respectively provided with a high-transmission film, and the positions where the high-transmission film is provided are the incident window 401 and the exit window 404 . Among them, the high-transmittance film is a film with high transmittance to an oscillating light beam. For example, if the wavelength of the oscillating laser is 1064nm, then the high-transparency film can transmit the laser with a wavelength of 1064nm, and the general transmittance can reach more than 99.9%.
本申请的上述技术方案具有如下有益效果:The above-mentioned technical scheme of the present application has the following beneficial effects:
(1)通过在调Q激光器的光路中设置一个石英玻璃棒,使得光束能够从石英玻璃棒的入射窗口射入在石英玻璃棒两端的反射面上反射多次,符合νθ=μπ的光束从石英玻璃棒出射窗口输出。通过上述石英玻璃棒,一方面,光线经ν次往返传输,能够增加光路的实际光程;另一方面,当θ角满足闭合条件,光线经ν次往返传输从出射窗口射出时的q参数与射入前完全相同,也就是实现了q参数的单位变换,使得石英玻璃棒本身在光路中具有零效应长度,从而能够获得稳定的长脉冲Q激光输出。(1) By setting a quartz glass rod in the optical path of the Q-switched laser, the light beam can be incident from the incident window of the quartz glass rod and reflected on the reflective surfaces at both ends of the quartz glass rod for multiple reflections. The glass rod exits the window output. Through the above-mentioned quartz glass rod, on the one hand, the light travels back and forth for ν times, which can increase the actual optical path length of the optical path; on the other hand, when the θ angle meets the closing condition, the q parameter and It is exactly the same before the injection, that is, the unit conversion of the q parameter is realized, so that the quartz glass rod itself has a zero effect length in the optical path, so that a stable long-pulse Q laser output can be obtained.
(2)由于石英玻璃棒具有低损耗、热膨胀系数极小的特点,本发明通过将石英玻璃棒代替由一对凹面镜组成的多通长腔,相比于多通长腔技术获得长脉冲输出的激光器来讲,降低了对调节两个凹面镜的位置精度和保持精度的要求,并且,可设置实心的石英玻璃棒,无需考虑气流的影响,进一步地提高了激光器的稳定性。(2) Since the quartz glass rod has the characteristics of low loss and extremely small thermal expansion coefficient, the present invention obtains a long pulse output compared with the multi-pass long cavity technology by replacing the quartz glass rod with a multi-pass long cavity composed of a pair of concave mirrors For lasers, the requirements for adjusting the position accuracy and maintaining accuracy of the two concave mirrors are reduced, and a solid quartz glass rod can be set without considering the influence of airflow, which further improves the stability of the laser.
图3是根据本发明第二实施方式的一种长脉冲调Q激光器结构示意图;图4为图3所示调Q激光器内石英玻璃棒的第一反射面或第二反射面上的光斑分布示意图。Fig. 3 is a schematic structural diagram of a long-pulse Q-switched laser according to the second embodiment of the present invention; Fig. 4 is a schematic diagram of spot distribution on the first reflective surface or the second reflective surface of the quartz glass rod in the Q-switched laser shown in Fig. 3 .
如图3所示,本发明第二实施方式采用的泵浦源6为侧泵。其中,反射镜1为平面镜,且镀有对于波长为1064nm的高反膜。As shown in FIG. 3 , the pumping source 6 used in the second embodiment of the present invention is a side pump. Wherein, the reflective mirror 1 is a flat mirror, and is coated with a high reflective film for a wavelength of 1064nm.
Q开关2为声光Q开关。Q switch 2 is an acousto-optic Q switch.
增益介质为Nd:YAG。石英玻璃棒4的入射窗口401和出射窗口404 镀有对于波长为1064nm的高透膜、第一反射面402和第二反射面窗口403 镀有对于波长为1064nm的高反膜。The gain medium is Nd:YAG. The incident window 401 and the exit window 404 of the quartz glass rod 4 are coated with a high-transmission film for a wavelength of 1064 nm, and the first reflective surface 402 and the second reflective surface window 403 are coated with a high-reflection film for a wavelength of 1064 nm.
泵浦方式为侧泵,泵浦源6可以是光泵浦。The pumping method is side pumping, and the pumping source 6 may be optical pumping.
输出镜5为镀有对于波长为1064nm一定透过率的平面镜。The output mirror 5 is a flat mirror coated with a certain transmittance for a wavelength of 1064nm.
在上述激光器内光的振荡路径为:增益介质3受激辐射的光沿光轴方向经过入射窗口401射入石英玻璃棒4,经过第一反射面402反射至第二反射面403,在第一反射面402和第二反射面403之间不断的反射,从出射窗口404射出,出射至输出镜5表面,经输出镜5表面反射,原路从出射窗口404射入石英玻璃棒4内,经过第一反射面402和第二反射面403 多次往返传输从入射窗口401射出,经过增益介质3、Q开关2并经过反射镜1反射至增益介质3,经过增益介质3后,再进入石英玻璃棒4内这样不断往返振荡。当腔内光子数达到输出阈值时,长脉冲调Q激光从镀有一定透过率的输出镜5输出。The oscillating path of light in the above-mentioned laser is: the light of the stimulated radiation of the gain medium 3 enters the quartz glass rod 4 through the incident window 401 along the optical axis direction, and is reflected to the second reflective surface 403 through the first reflective surface 402. The continuous reflection between the reflective surface 402 and the second reflective surface 403 emits from the exit window 404, exits to the surface of the output mirror 5, is reflected by the surface of the output mirror 5, and injects into the quartz glass rod 4 from the exit window 404 in the original path, and passes through The first reflective surface 402 and the second reflective surface 403 transmit multiple times back and forth from the incident window 401, pass through the gain medium 3, the Q switch 2 and reflect to the gain medium 3 through the mirror 1, and then enter the quartz glass after passing through the gain medium 3 Constantly vibrate back and forth like this in the rod 4. When the number of photons in the cavity reaches the output threshold, the long-pulse Q-switched laser is output from the output mirror 5 coated with a certain transmittance.
需要说明的是,本申请第二实施方式提供的长脉冲调Q激光器,从增益介质3受激辐射的光,以一定角度入射至石英玻璃棒4,当满足νθ=μπ时,光束会从出射窗口404输出。It should be noted that, in the long-pulse Q-switched laser provided in the second embodiment of the present application, the light stimulated to radiate from the gain medium 3 is incident on the quartz glass rod 4 at a certain angle, and when νθ=μπ is satisfied, the beam will emerge from Window 404 output.
光束每经过一次第一反射面或第二反射面的反射就有一个α。如果,改变入射光束相对光轴的角度,反射的光斑在第一反射面或第二反射面的分布轨迹组成一个椭圆或圆。There is an α every time the light beam is reflected by the first reflective surface or the second reflective surface. If the angle of the incident light beam relative to the optical axis is changed, the distribution locus of the reflected light spots on the first reflective surface or the second reflective surface forms an ellipse or a circle.
如图4所示,光束往返次数为ν=4,μ=2,θ=90°时,石英玻璃棒第一反射面或第二反射面上的光斑分布图。实线的光斑为第一反射面402上的光斑,虚线的光斑为从第一反射面402上看的第二反射面403上的光斑。As shown in Figure 4, when the number of round trips of the beam is ν=4, μ=2, θ=90°, the light spot distribution diagram on the first reflective surface or the second reflective surface of the quartz glass rod. The light spots in solid lines are the light spots on the first reflective surface 402 , and the light spots in dashed lines are the light spots on the second reflective surface 403 viewed from the first reflective surface 402 .
光束由P0射入石英玻璃棒4,P0→P1′→P1→P2′→P2→P3′→P3→P4′,由P4′射出;经输出镜5反射后,再由P4′射入,P4′→P3→P3′→P2→P2′→P1→P1′→P0,由P0射出至增益介质3,经过增益介质后,经过反射镜1反射后,再次经过增益介质3射入石英玻璃棒4,如此不断地往返振荡,当腔内光子数达到输出阈值时,长脉冲调Q激光从镀有一定透过率的输出镜5输出。The light beam enters the quartz glass rod 4 from P 0 , P 0 → P 1 ′ → P 1 → P 2 ′ → P 2 → P 3 ′ → P 3 → P 4 ′, and exits from P 4 ′; it is reflected by the output mirror 5 After that, it is injected from P 4 ′, P 4 ′→P 3 →P 3 ′→P 2 →P 2 ′→P 1 →P 1 ′→P 0 , and is emitted from P 0 to the gain medium 3, passing through the gain medium Finally, after being reflected by the mirror 1, it is injected into the quartz glass rod 4 through the gain medium 3 again, and continuously oscillates in this way. When the number of photons in the cavity reaches the output threshold, the long-pulse Q-switched laser is emitted from the Output mirror 5 output.
本申请的上述技术方案具有如下有益效果:The above-mentioned technical scheme of the present application has the following beneficial effects:
(1)通过在调Q激光器的光路中设置一个石英玻璃棒,使得光束能够从石英玻璃棒的入射窗口射入在石英玻璃棒两端的反射面上反射多次,符合νθ=μπ的光束从石英玻璃棒出射窗口输出。通过上述石英玻璃棒,一方面,光线经ν次往返传输,能够增加光路的实际光程;另一方面,当θ角满足闭合条件νθ=μπ时,光线经ν次往返传输从出射窗口射出时的q参数与射入前完全相同,也就是实现了q参数的单位变换,使得石英玻璃棒本身在光路中具有零效应长度,从而能够获得稳定的长脉冲Q激光输出。(1) By setting a quartz glass rod in the optical path of the Q-switched laser, the light beam can be incident from the incident window of the quartz glass rod and reflected on the reflective surfaces at both ends of the quartz glass rod for multiple reflections. The glass rod exits the window output. Through the above-mentioned quartz glass rod, on the one hand, the light can increase the actual optical path of the optical path through ν times of round-trip transmission; The q parameter of the laser is exactly the same as that before the injection, that is, the unit conversion of the q parameter is realized, so that the quartz glass rod itself has a zero effect length in the optical path, so that a stable long-pulse Q laser output can be obtained.
(2)由于石英玻璃棒具有低损耗、热膨胀系数极小的特点,本发明通过将石英玻璃棒代替由一对凹面镜组成的多通长腔,相比于多通长腔技术获得长脉冲输出的激光器来讲,降低了对调节两个凹面镜的位置精度和保持精度的要求,并且,可设置实心的石英玻璃棒,无需考虑气流的影响,进一步地提高了激光器的稳定性。(2) Since the quartz glass rod has the characteristics of low loss and extremely small thermal expansion coefficient, the present invention obtains a long pulse output compared with the multi-pass long cavity technology by replacing the quartz glass rod with a multi-pass long cavity composed of a pair of concave mirrors For lasers, the requirements for adjusting the position accuracy and maintaining accuracy of the two concave mirrors are reduced, and a solid quartz glass rod can be set without considering the influence of airflow, which further improves the stability of the laser.
图5是根据本发明第三实施方式的一种长脉冲调Q激光器结构示意图;图6为图5所示调Q激光器内石英玻璃棒的反射面上的光斑分布示意图。5 is a schematic structural diagram of a long-pulse Q-switched laser according to a third embodiment of the present invention; FIG. 6 is a schematic diagram of spot distribution on the reflective surface of the quartz glass rod in the Q-switched laser shown in FIG. 5 .
如图5所示,激光器包括:石英玻璃棒4、输出镜5以及沿光轴依次设置的反射镜1、Q开关2和增益介质3。As shown in FIG. 5 , the laser includes: a quartz glass rod 4 , an output mirror 5 , and a mirror 1 , a Q switch 2 and a gain medium 3 arranged in sequence along the optical axis.
其中,第一反射面402设置有供光束射入的入射窗口401和供光束出射的出射窗口404;或者,第二反射面403还设置有供光束射入的入射窗口401和供光束出射的出射窗口404;或者,第一反射面402设置有供光束射入的入射窗口401,第二反射面403设置有供光束出射的出射窗口 404;或者,第一反射面402设置有供光束出射的出射窗口404,第二反射面403设置有供光束射入的入射窗口401。Wherein, the first reflective surface 402 is provided with an incident window 401 for the beam to enter and an exit window 404 for the beam to exit; or, the second reflective surface 403 is also provided with an incident window 401 for the beam to enter and an exit window 404 for the beam to exit. Window 404; or, the first reflective surface 402 is provided with the incident window 401 for the light beam to enter, and the second reflective surface 403 is provided with the exit window 404 for the light beam to exit; perhaps, the first reflective surface 402 is provided with the exit window 401 for the light beam to exit Window 404, the second reflective surface 403 is provided with an incident window 401 for incident light beams.
输出镜5设置在经出射窗口404射出的光束的光轴上。The output mirror 5 is arranged on the optical axis of the light beam emitted through the exit window 404 .
其中,反射镜1平面镜,镀有对于820nm反射率高的膜。Wherein, the reflective mirror 1 is a plane mirror coated with a film with high reflectivity at 820nm.
Q开关2为电光Q开关。The Q switch 2 is an electro-optical Q switch.
增益介质3中的增益介质为Ti:sapphire钛宝石晶体。The gain medium in gain medium 3 is Ti:sapphire titanium sapphire crystal.
石英玻璃棒4的入射窗口401和出射窗口404镀有对于波长为820nm 的高透膜,第一反射面402和第二反射面403镀有对于波长为820nm的高反膜。The incident window 401 and the exit window 404 of the quartz glass rod 4 are coated with a high-transmission film for a wavelength of 820nm, and the first reflective surface 402 and the second reflective surface 403 are coated with a high-reflection film for a wavelength of 820nm.
输出镜5为平面镜,镀有对于波长为820nm的一定透过率的膜。The output mirror 5 is a plane mirror coated with a film with a certain transmittance for a wavelength of 820nm.
泵浦源6为闪光灯泵浦。The pumping source 6 is pumped by a flash lamp.
本发明第三实施方式提供的调Q激光器内光束的振荡过程为:增益介质3受激辐射的光沿光轴方向经过入射窗口401射入石英玻璃棒4,经过第一反射面402反射至第二反射面403,在第一反射面402和第二反射面 403之间不断的反射,从出射窗口404射出,出射至输出镜5表面,经输出镜5表面反射,原路从出射窗口404射入石英玻璃棒4内,经过第一反射面402和第二反射面403多次往返传输从入射窗口401射出,经过增益介质3、Q开关2并经过反射镜1反射至增益介质3,经过增益介质3后,再进入石英玻璃棒4内这样不断往返振荡。当腔内光子数达到输出阈值时,长脉冲调Q激光从镀有一定透过率的输出镜5输出。The oscillation process of the light beam in the Q-switched laser provided by the third embodiment of the present invention is as follows: the light of the stimulated radiation of the gain medium 3 enters the quartz glass rod 4 through the incident window 401 along the optical axis, and is reflected by the first reflecting surface 402 to the second Two reflective surfaces 403, continuously reflect between the first reflective surface 402 and the second reflective surface 403, emit from the exit window 404, exit to the surface of the output mirror 5, reflect on the surface of the output mirror 5, and shoot from the exit window 404 in the same way Into the quartz glass rod 4, through the first reflective surface 402 and the second reflective surface 403 multiple times of back and forth transmission from the incident window 401, through the gain medium 3, Q switch 2 and reflect to the gain medium 3 through the mirror 1, after the gain After the medium 3, it enters the quartz glass rod 4 and oscillates continuously like this. When the number of photons in the cavity reaches the output threshold, the long-pulse Q-switched laser is output from the output mirror 5 coated with a certain transmittance.
需要说明的是,由于第一反射面402设置有预设的曲率R,因此,在长度方向上,经过第一反射面402的光束会以ɑ角度反射至第二反射面 403。由于第二反射面403也设置有与第一反射面相同的曲率R。因此,第二反射面403将射到其表面的光束以ɑ角度反射至第一反射面,该光束在两个反射面不断的反射,最后经出射窗口404输出。光线每经过一次反射面反射就有一个ɑ大小的旋转角,单个反射面上相邻两次反射光线的夹角为θ,且θ=2ɑ,以下将详细说明一下该旋转角度θ。It should be noted that, since the first reflective surface 402 is provided with a preset curvature R, in the longitudinal direction, the light beam passing through the first reflective surface 402 will be reflected to the second reflective surface 403 at an angle α. Since the second reflective surface 403 is also provided with the same curvature R as that of the first reflective surface. Therefore, the second reflective surface 403 reflects the light beam incident on its surface to the first reflective surface at an angle of α, the light beam is continuously reflected on the two reflective surfaces, and finally output through the exit window 404 . Every time the light is reflected by a reflective surface, there is a rotation angle of ɑ. The angle between two adjacent reflections on a single reflective surface is θ, and θ=2ɑ. The rotation angle θ will be described in detail below.
从入射窗口401进入石英玻璃棒4内的光束,经过第一反射面402反射至第二反射面403构成一个反射循环周期;或者,从入射窗口401进入石英玻璃棒4内的光束,从第二反射面403反射至第一反射面402并反射回第二反射面403构成一个反射循环周期。The light beam entering the quartz glass rod 4 from the incident window 401 is reflected to the second reflecting surface 403 through the first reflective surface 402 to form a reflection cycle; or, the light beam entering the quartz glass rod 4 from the incident window 401, from the second Reflection from the reflective surface 403 to the first reflective surface 402 and back to the second reflective surface 403 constitutes a reflection cycle.
相邻两个反射循环周期中,两条从第一反射面402反射至第二反射面 403的光线的夹角以及两条从第二反射面反射至第一反射面403的夹角相同,均为旋转角度θ,且θ=2cos-1(1-d/R),其中,d为石英玻璃棒4的长度, R为第一反射面和第二反射面的曲率半径。当光束满足νθ=μπ时,会形成闭合的光路,其中,ν为往返次数,且ν与μ均为正整数。In two adjacent reflection cycles, the included angles of the two rays reflected from the first reflective surface 402 to the second reflective surface 403 and the included angles of the two rays reflected from the second reflective surface to the first reflective surface 403 are the same, both is the rotation angle θ, and θ=2cos −1 (1−d/R), wherein, d is the length of the quartz glass rod 4, and R is the radius of curvature of the first reflective surface and the second reflective surface. When the light beam satisfies νθ=μπ, a closed optical path will be formed, where ν is the number of round trips, and ν and μ are both positive integers.
根据上述公式νθ=μπ,由ABCD矩阵传输理论可以计算得到形成闭合光路的光束在石英玻璃棒中经过ν次往返传播后的矩阵为:According to the above formula νθ=μπ, from the ABCD matrix transmission theory, it can be calculated that the matrix of the light beam forming a closed optical path after ν round-trip propagation in the quartz glass rod is:
通过上述矩阵可以得知,该矩阵为单位矩阵,也就是说,经过ν次往返后,石英玻璃棒对光束提供了q参数的单位变换,也就是光线经多次往返传输从出射窗口射出时的q参数与从入射窗口射入前完全相同,使得该石英玻璃棒在调Q激光器的谐振腔的光路中具有零效应长度。From the above matrix, it can be known that the matrix is a unit matrix, that is to say, after ν round trips, the quartz glass rod provides the unit transformation of the q parameter to the light beam, that is, when the light is emitted from the exit window after multiple round trips. The q parameter is exactly the same as before the incident from the incident window, so that the quartz glass rod has zero effective length in the optical path of the resonant cavity of the Q-switched laser.
因此,本发明提供的调Q激光器采用石英玻璃棒代替由一对凹面镜组成的多通长腔,相比于多通长腔技术获得长脉冲输出的激光器来讲,降低了对调节两个凹面镜的位置精度和保持精度的要求。并且,可设置实心的石英玻璃棒,无需考虑气流的影响,进一步地提高了激光器的稳定性。Therefore, the Q-switched laser provided by the present invention adopts a quartz glass rod instead of a multi-pass long cavity composed of a pair of concave mirrors, which reduces the need for adjusting two concave mirrors compared to the multi-pass long cavity technology to obtain a long pulse output laser. Mirror position accuracy and requirements for maintaining accuracy. Moreover, a solid quartz glass rod can be set without considering the influence of airflow, which further improves the stability of the laser.
图6为图5所示调Q激光器内石英玻璃棒的反射面上的光斑分布示意图。FIG. 6 is a schematic diagram of spot distribution on the reflective surface of the quartz glass rod in the Q-switched laser shown in FIG. 5 .
图6(a)所示的例子中,令ν=9、μ=2、θ=40°时,石英玻璃棒第一反射面或第二反射面上的光斑分布的点模式,实心的点为第一反射面402上形成的光斑,空心的点为第二反射面上形成的光斑,与图4所示的激光器内光束的参数ν=4,μ=2,θ=90°相比,μ相同时,改变往返的次数ν可改变反射窗口上的光斑数,即改变光路的实际光程,同时与旋转角θ成反比。In the example shown in Fig. 6 (a), when making ν=9, μ=2, θ=40 °, the point pattern of the light spot distribution on the first reflective surface or the second reflective surface of the quartz glass rod, the solid point is The light spot formed on the first reflective surface 402, the hollow point is the light spot formed on the second reflective surface, compared with the parameter ν=4, μ=2, θ=90° of the beam in the laser shown in Figure 4, μ At the same time, changing the number of round trips ν can change the number of spots on the reflection window, that is, change the actual optical path of the optical path, and it is inversely proportional to the rotation angle θ.
图6(b)所示的例子中,令ν=9、μ=4、θ=80°时,石英玻璃棒两端曲面上的光斑分布的点模式,与图6(a)ν=9、μ=2、θ=40°相比,往返的次数ν相同时,改变μ可改变反射窗口上相邻两个循环周期形成的光斑夹角θ,并与之正反比。In the example shown in Fig. 6 (b), when making ν=9, μ=4, θ=80°, the point pattern of the light spot distribution on the curved surface at both ends of the quartz glass rod is the same as that in Fig. 6 (a) ν=9, Compared with μ=2 and θ=40°, when the number of round-trips ν is the same, changing μ can change the angle θ of the light spot formed by two adjacent cycles on the reflection window, and it is proportional to it.
可选的,通过下述方法确定石英玻璃棒的尺寸和曲率:Optionally, determine the size and curvature of the quartz glass rod by:
首先,根据需要,确定石英玻璃棒的光束折返次数v和μ(无实际意义,仅仅是作为π的整数倍)根据闭合光路公式νθ=μπ计算得到旋转角度θ,根据θ=2cos-1(1-d/R)计算得到石英玻璃棒的曲率R和长度d的关系,可以先确定石英玻璃棒的长度,从而得到石英玻璃棒的曲率。First of all, according to the needs, determine the number of times v and μ of the beam retracement of the quartz glass rod (no practical significance, just as an integer multiple of π) and calculate the rotation angle θ according to the closed optical path formula νθ=μπ, according to θ=2cos -1 (1 -d/R) Calculate the relationship between the curvature R of the quartz glass rod and the length d, the length of the quartz glass rod can be determined first, so as to obtain the curvature of the quartz glass rod.
综上所述,可以通过调整光在第一反射面和第二反射面之间的往返的次数ν来改变光路的实际光程,从而获得稳定的调Q长脉冲激光输出。To sum up, the actual optical path of the optical path can be changed by adjusting the number of round trips ν of the light between the first reflective surface and the second reflective surface, so as to obtain a stable Q-switched long-pulse laser output.
本申请的上述技术方案具有如下有益效果:The above-mentioned technical scheme of the present application has the following beneficial effects:
(1)通过在调Q激光器的光路中设置一个石英玻璃棒,使得光束能够从石英玻璃棒的入射窗口射入在石英玻璃棒两端的反射面上反射多次,符合νθ=μπ的光束从石英玻璃棒出射窗口输出。通过上述石英玻璃棒,一方面,光线经ν次往返传输,能够增加光路的实际光程;另一方面,当θ角满足闭合条件,光线经ν次往返传输从出射窗口射出时的q参数与射入前完全相同,也就是实现了q参数的单位变换,使得石英玻璃棒本身在光路中具有零效应长度,从而能够获得稳定的长脉冲Q激光输出。(1) By setting a quartz glass rod in the optical path of the Q-switched laser, the light beam can be incident from the incident window of the quartz glass rod and reflected on the reflective surfaces at both ends of the quartz glass rod for multiple reflections. The glass rod exits the window output. Through the above-mentioned quartz glass rod, on the one hand, the light travels back and forth for ν times, which can increase the actual optical path length of the optical path; on the other hand, when the θ angle meets the closing condition, the q parameter and It is exactly the same before the injection, that is, the unit conversion of the q parameter is realized, so that the quartz glass rod itself has a zero effect length in the optical path, so that a stable long-pulse Q laser output can be obtained.
(2)由于石英玻璃棒具有低损耗、热膨胀系数极小的特点,本发明通过将石英玻璃棒代替由一对凹面镜组成的多通长腔,相比于多通长腔技术获得长脉冲输出的激光器来讲,降低了对调节两个凹面镜的位置精度和保持精度的要求,并且,可设置实心的石英玻璃棒,无需考虑气流的影响,进一步地提高了激光器的稳定性。(2) Since the quartz glass rod has the characteristics of low loss and extremely small thermal expansion coefficient, the present invention obtains a long pulse output compared with the multi-pass long cavity technology by replacing the quartz glass rod with a multi-pass long cavity composed of a pair of concave mirrors For lasers, the requirements for adjusting the position accuracy and maintaining accuracy of the two concave mirrors are reduced, and a solid quartz glass rod can be set without considering the influence of airflow, which further improves the stability of the laser.
应当理解的是,本发明的上述具体实施方式仅仅用于示例性说明或解释本发明的原理,而不构成对本发明的限制。因此,在不偏离本发明的精神和范围的情况下所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。此外,本发明所附权利要求旨在涵盖落入所附权利要求范围和边界、或者这种范围和边界的等同形式内的全部变化和修改例。It should be understood that the above specific embodiments of the present invention are only used to illustrate or explain the principles of the present invention, and not to limit the present invention. Therefore, any modification, equivalent replacement, improvement, etc. made without departing from the spirit and scope of the present invention shall fall within the protection scope of the present invention. Furthermore, it is intended that the appended claims of the present invention embrace all changes and modifications that come within the scope and metesques of the appended claims, or equivalents of such scope and metes and bounds.
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