CN109506599A - A kind of non-contact plane degree measuring device and measuring method - Google Patents
A kind of non-contact plane degree measuring device and measuring method Download PDFInfo
- Publication number
- CN109506599A CN109506599A CN201811574389.5A CN201811574389A CN109506599A CN 109506599 A CN109506599 A CN 109506599A CN 201811574389 A CN201811574389 A CN 201811574389A CN 109506599 A CN109506599 A CN 109506599A
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- China
- Prior art keywords
- optical fiber
- contact plane
- objective table
- plane degree
- measuring device
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of non-contact plane degree measuring device and measuring method, including pedestal and the objective table being set on the base, objective table carries out transverse shifting by horizontal sliding structure, it further include dispersion camera lens and the optical fiber head being successively set on above objective table, optical fiber head connects light source by optical fiber, optical fiber head connects spectral receiver and spectral manipulation equipment by optical fiber, this non-contact plane degree measuring device and measuring method, workpiece to be detected is placed on objective table, then open light source and optical fiber head, spectral manipulation equipment is to obtain detection data using the light wave of reflection, multiple test point height values are obtained by moving stage, spectral manipulation equipment, which compares data, can be obtained flatness, it measures simple and quick, measurement accuracy is high, the invention is used for eyeglass detection field.
Description
Technical field
The present invention relates to eyeglass detection fields, more particularly to a kind of non-contact plane degree measuring device and measurement side
Method.
Background technique
The method of existing measurement flatness mainly has: a, touch sensor measurement method.The method needs touch by
Measuring surface, and certain pressure is needed, the product that opposite precision is high or material is soft be easy to cause damage.B, contactless interferometer
Measurement method.The method precision is high, the product of degree of precision is only applicable to, for the not high product of flatness because of interference fringe
It can not intensively differentiate, cause is difficult to measure；Because of the limitation of Lens, large-sized product is also difficult to realize.C, non-to connect
Touch image-type measurement method.The method carries out focusing measurement according to the image to measured surface, the reason of because of the optical system depth of field,
This measurement method measurement accuracy is not high.
Currently, there has been no the measurement of planeness that one kind can rapidly measure the product of full range of sizes in a non-contact manner
Device.
Summary of the invention
Non-contact plane degree measurement dress highly-safe, that measurement accuracy is high is measured the purpose of the present invention is to provide a kind of
It sets and measurement method.
The technical solution used in the present invention is:
A kind of non-contact plane degree measuring device, passes through including pedestal and the objective table being set on the base, objective table
Horizontal sliding structure carries out transverse shifting, further includes dispersion camera lens and the optical fiber head being successively set on above objective table, optical fiber head
Light source is connected by optical fiber, optical fiber head connects spectral receiver and spectral manipulation equipment by optical fiber.
It is further used as the improvement of technical solution of the present invention, what pedestal was slidably connected equipped with vertical sliding rail, with sliding rail
Sliding block and driving structure for driving sliding block, sliding block are equipped with lens mount, and dispersion camera lens is located on lens mount.
It is further used as the improvement of technical solution of the present invention, and sliding block includes the master slider being slidably connected with sliding rail, further includes
The secondary sliding block being horizontally installed on master slider is equipped with connecting plate between master slider and secondary sliding block.
It is further used as the improvement of technical solution of the present invention, and driving structure is ball screw arrangement.
It is further used as the improvement of technical solution of the present invention, and spectral manipulation equipment is computer.
It is further used as the improvement of technical solution of the present invention, and optical fiber is Y shape optical fiber.
It is further used as the improvement of technical solution of the present invention, and optical fiber is silica fibre.
The present invention also provides a kind of non-contact plane degree measurement methods, comprising the following steps:
1) objective table that pedestal 1 is set and can be slided on pedestal 1, setting optical fiber head and dispersion camera lens, by work to be detected
Part is lain on objective table；
2) keep optical fiber head and dispersion camera lens in same axis, and this axis then will perpendicular to the upper surface of objective table
Light beam is irradiated on the test point of workpiece surface to be detected through dispersion camera lens；
3) light wave for being reflected by workpiece to be detected and being returned is collected, and obtained light wave transmissions will be collected to spectrum using optical fiber
Light wave transmissions to spectral manipulation equipment, spectral manipulation equipment are calculated optical wavelength and obtain test point by receiver, spectral receiver
Height value；
4) transverse shifting objective table, and repeat step 2)~3), spectral manipulation equipment obtains the height value of multiple test points,
And the height value of multiple test points is compared to obtain the flatness of workpiece to be detected.
It is further used as the improvement of technical solution of the present invention, in step 2), by adjusting optical fiber head or the height of dispersion camera lens
Degree, so that the upper surface of workpiece to be detected is located in the areas imaging of optical fiber head.
Beneficial effects of the present invention: this non-contact plane degree measuring device and measuring method places workpiece to be detected
In objective table, light source and optical fiber head are then opened, spectral manipulation equipment is to obtain detection data using the light wave of reflection, is passed through
Moving stage obtains multiple test point height values, and spectral manipulation equipment, which compares data, can be obtained flatness, measurement operation letter
Single quick, measurement accuracy is high.
Detailed description of the invention
The present invention will be further explained below with reference to the attached drawings:
Fig. 1 is the equipment of the embodiment of the present invention schematic diagram；
Fig. 2 is the side view of the embodiment of the present invention；
Fig. 3 is the main view of the embodiment of the present invention；
Fig. 4 is the light wave schematic diagram of the embodiment of the present invention；
Specific embodiment
Referring to Fig.1~Fig. 4, the present invention are a kind of non-contact plane degree measuring device, including pedestal 1 and setting in pedestal
Objective table 2 on 1, objective table 2 carry out transverse shifting by horizontal sliding structure, further include being successively set on 2 top of objective table
Dispersion camera lens 3 and optical fiber head 4, optical fiber head 4 by optical fiber 6 connect light source 5, optical fiber head 4 by optical fiber 6 connect spectral receiver
7 and spectral manipulation equipment 8.
Specifically, workpiece 9 to be detected is lain on objective table 2, then light source 5 launches the light of wide spectrum, by optical fiber 6
It is delivered to optical fiber head 4 and projects, the upper surface of workpiece 9 to be detected is irradiated to by dispersion camera lens 3.By adjusting dispersion camera lens 3
At a distance from workpiece 9 to be detected, so that the upper surface of workpiece to be detected 9 is located in the areas imaging of optical fiber head 4.Because of dispersion camera lens
3 color difference is bigger, therefore the areas imaging of optical fiber head 4 is also bigger, adjusts also more convenient.
Different imaging points in the areas imaging of optical fiber head 4 correspond to different optical wavelength.Namely sample surfaces are reflected back
The light gone corresponds only to the light of a certain wavelength, and the light of this wavelength just makes the imaging of optical fiber head 4 on the surface of the samples.Such as Fig. 4 institute
Show, the light of different wave length in being aimed downwardly by optical fiber head 4, the light of third wavelength from top to bottom make just optical fiber head 4 at
As on the surface of the samples.The light returned by 9 surface reflection of workpiece to be detected converges on optical fiber head 4 again after dispersion camera lens 3, this
A little light reversely pass on spectral receiver 7 and light source 5 through optical fiber 6.
Spectral receiver 7 changes according to reflected optical wavelength, can calculate the upper and lower position variation of sample surfaces
Situation (i.e. relative altitude value).Objective table 2 is moved on the fabulous pedestal 1 of flatness with workpiece 9 to be detected, can be surveyed
The relative altitude value for measuring sample different parts, by computer software record and data processing is to get putting down to workpiece 9 to be detected
Face angle value.
Objective table 2 includes being rotatablely connected with the orthogonal pillar 21 of pedestal 1, pillar 21 and pedestal 1, the top of pillar 21
Equipped with top plate 22, the downside of top plate 22 is equipped with sliding slot, and the top of pillar 21 is equipped with pulley, and pulley is embedded in after sliding slot, so that
Top plate 22 can be in 21 top slide of pillar.Pass through the rotation of pillar 21 and the sliding at top, thus it is possible to vary the inspection of workpiece 9 to be detected
Measuring point.
As a preferred embodiment of the present invention, the cunning that pedestal 1 is equipped with vertical sliding rail 10, is slidably connected with sliding rail 10
Block 11 and driving structure for driving sliding block 11, sliding block 11 are equipped with lens mount 13, and dispersion camera lens 3 is located at lens mount 13
On.Pass through sliding slider 11, thus it is possible to vary the distance between dispersion camera lens 3 and workpiece 9 to be detected, so that optical fiber head 4 be made to be imaged
On the surface of the samples.
As a preferred embodiment of the present invention, sliding block 11 includes the master slider 111 being slidably connected with sliding rail 10, further includes
The secondary sliding block 112 being horizontally installed on master slider 111 is equipped with connecting plate 113 between master slider 111 and secondary sliding block 112.
As a preferred embodiment of the present invention, driving structure is ball screw arrangement, further includes being located at ball screw knot
The rotational handle 12 of structure upper end, rotational handle 12 are connect with lead screw, pass through adjustable 11 height of sliding block of rotational handle 12.
As a preferred embodiment of the present invention, spectral manipulation equipment 8 is computer.
As a preferred embodiment of the present invention, optical fiber 6 is Y shape optical fiber.
As a preferred embodiment of the present invention, optical fiber 6 is silica fibre.
The present invention also provides a kind of non-contact plane degree measurement methods, comprising the following steps:
1) objective table 2 that pedestal 1 is arranged and can slide on pedestal 1, setting optical fiber head 4 and dispersion camera lens 3, will be to be detected
Workpiece 9 is lain on objective table 2；
2) keep optical fiber head 4 and dispersion camera lens 3 in same axis, and this axis is perpendicular to the upper surface of objective table 2, then
Light beam is irradiated on the test point of 9 upper surface of workpiece to be detected through dispersion camera lens 3；
3) light wave for being reflected by workpiece 9 to be detected and being returned is collected, and obtained light wave transmissions will be collected to light using optical fiber 6
Receiver 7 is composed, light wave transmissions to spectral manipulation equipment 8, spectral manipulation equipment 8 are calculated optical wavelength and obtained by spectral receiver 7
The height value of test point；
4) transverse shifting objective table 2, and repeat step 2)~3), spectral manipulation equipment 8 obtains the height of multiple test points
Value, and the height value of multiple test points is compared to obtain the flatness of workpiece 9 to be detected.
As a preferred embodiment of the present invention, in step 2), by adjusting the height of optical fiber head 4 or dispersion camera lens 3, make
The upper surface for obtaining workpiece 9 to be detected is located in the areas imaging of optical fiber head 4.
Certainly, the invention is not limited to above embodiment, and those skilled in the art are without prejudice to originally
Equivalent deformation or replacement can be also made under the premise of spirit, these equivalent deformations or replacement are all contained in the application right
It is required that in limited range.
Claims (9)
1. a kind of non-contact plane degree measuring device, it is characterised in that: including the loading of pedestal and setting on the base
Platform, the objective table carry out transverse shifting by horizontal sliding structure, further include the color being successively set on above the objective table
Dissipate camera lens and optical fiber head, the optical fiber head connects light source by optical fiber, the optical fiber head by optical fiber connection spectral receiver with
Spectral manipulation equipment.
2. non-contact plane degree measuring device according to claim 1, it is characterised in that: the pedestal is equipped with vertical
Sliding rail, the sliding block that is slidably connected with the sliding rail and the driving structure for driving sliding block, the sliding block be equipped with camera lens
Seat, the dispersion camera lens are located on the lens mount.
3. non-contact plane degree measuring device according to claim 2, it is characterised in that: the sliding block includes and sliding rail
The master slider being slidably connected further includes the secondary sliding block being horizontally installed on the master slider, between the master slider and secondary sliding block
Equipped with connecting plate.
4. non-contact plane degree measuring device according to claim 2, it is characterised in that: the driving structure is ball
Screw structure.
5. non-contact plane degree measuring device according to claim 1, it is characterised in that: the spectral manipulation equipment is
Computer.
6. non-contact plane degree measuring device according to claim 1, it is characterised in that: the optical fiber is Y shape optical fiber.
7. non-contact plane degree measuring device according to claim 1, it is characterised in that: the optical fiber is quartzy light
It is fine.
8. a kind of non-contact plane degree measurement method, which comprises the following steps:
1) objective table that pedestal 1 is set and can be slided on the pedestal 1, setting optical fiber head and dispersion camera lens, by work to be detected
Part is lain on objective table；
2) keep optical fiber head and dispersion camera lens in same axis, and this axis is perpendicular to the upper surface of objective table, then by light beam
It is irradiated to through dispersion camera lens on the test point of workpiece surface to be detected；
3) light wave for being reflected by workpiece to be detected and being returned is collected, and obtained light wave transmissions will be collected to spectrum acquisition using optical fiber
Light wave transmissions to spectral manipulation equipment, spectral manipulation equipment are calculated the height that optical wavelength obtains test point by device, spectral receiver
Angle value；
4) transverse shifting objective table, and repeat step 2)~3), spectral manipulation equipment obtains the height value of multiple test points, and will
The height value of multiple test points is compared to obtain the flatness of workpiece to be detected.
9. non-contact plane degree measurement method according to claim 8, it is characterised in that: in step 2), by adjusting
The height of dispersion camera lens, so that the upper surface of workpiece to be detected is located in the areas imaging of optical fiber head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811574389.5A CN109506599A (en) | 2018-12-21 | 2018-12-21 | A kind of non-contact plane degree measuring device and measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811574389.5A CN109506599A (en) | 2018-12-21 | 2018-12-21 | A kind of non-contact plane degree measuring device and measuring method |
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| Publication Number | Publication Date |
|---|---|
| CN109506599A true CN109506599A (en) | 2019-03-22 |
Family
ID=65754591
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811574389.5A Pending CN109506599A (en) | 2018-12-21 | 2018-12-21 | A kind of non-contact plane degree measuring device and measuring method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113305170A (en) * | 2021-07-28 | 2021-08-27 | 佛山市腾华自动化机械有限公司 | Traction machine |
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