CN109491096B - Optical device, laser module and laser beam processing method - Google Patents
Optical device, laser module and laser beam processing method Download PDFInfo
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- CN109491096B CN109491096B CN201811581634.5A CN201811581634A CN109491096B CN 109491096 B CN109491096 B CN 109491096B CN 201811581634 A CN201811581634 A CN 201811581634A CN 109491096 B CN109491096 B CN 109491096B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
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- Optics & Photonics (AREA)
- Electromagnetism (AREA)
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- Semiconductor Lasers (AREA)
Abstract
The embodiment of the invention discloses an optical device, a laser module and a laser beam processing method, wherein the optical device comprises: the first optical element and the second optical element are arranged at an angle with each other in the laser light path direction, and the included angle ɵ between the first optical element and the second optical element satisfies the following condition: and pi/2 is less than ɵ and less than pi, the first optical element at least comprises a first fast axis collimating mirror, and the second optical element at least comprises a second fast axis collimating mirror. Based on the scheme disclosed by the invention, smile can be corrected effectively and accurately at least; the fast axis divergence angle of the laser beam is obviously reduced, so that the beam quality of the fast axis and the slow axis is more balanced.
Description
Technical Field
The present invention relates to the field of optical devices, and in particular, to an optical device, a laser module, and a laser beam processing method.
Background
Laser emitted by a semiconductor laser has poor beam collimation due to the existence of a divergence angle, namely, so-called near-field nonlinearity (smile effect), which increases the technical difficulty of coupling the laser beam into an optical fiber and seriously affects the technical effect of VBG external cavity wave locking.
At present, two methods for reducing smile effect and improving beam collimation are mainly used:
the first is to optimize the package design and process, such as adopting a heat sink matched with the thermal expansion coefficient of the laser chip, or changing the bonding process and parameters to reduce smile of the semiconductor laser array;
and secondly, the smile of the semiconductor laser array is corrected by using an external optical system, for example, the smile effect of the semiconductor laser array is corrected by bending an optical fiber and rotating a plano-convex cylindrical mirror, so that the optical system is complex, the adjustment difficulty is high, and the quality of the fast and slow axis light beams of the semiconductor laser is difficult to balance.
Disclosure of Invention
In view of the above, an objective of the embodiments of the present invention is to provide an optical device, a laser module and a laser beam processing method, which can at least achieve effective and accurate smile correction, significantly reduce the fast axis divergence angle of the laser beam, make the beam quality of the fast and slow axes more balanced, and further effectively improve the collimation of the beam, so that the beam can be more easily coupled into an optical fiber with a small core diameter.
Furthermore, the improvement of the beam collimation makes the spectral line width of the VBG external cavity lock wave narrower, the stability of the lock wave is stronger, and the adjustment is easy, and the operability is higher.
The technical scheme of the invention is realized as follows:
the present invention provides an optical device comprising: the first optical element and the second optical element are arranged at an angle with each other in the laser light path direction, and the included angle theta between the first optical element and the second optical element satisfies the following condition: and the first optical element at least comprises a first fast axis collimating mirror, and the second optical element at least comprises a second fast axis collimating mirror.
In the above scheme, an adjustment margin is left between the first optical element and the second optical element, and the adjustment margin is: less than or equal to 0.03 mm.
In the above aspect, the first optical element further includes: the optical system comprises a first light beam rotator and a first optical cushion block; the first fast axis collimating mirror and the first beam rotator are mutually aligned and bonded and are fixed on the first optical cushion block, and the first optical element is a first BTS; the second optical element further includes: a second beam rotator and a second optical cushion block; the second fast axis collimating mirror and the second beam rotator are mutually aligned and bonded, and are fixed on a second optical cushion block, and the second optical element is a second BTS; wherein, the shape, size, structure and optical parameters of the first BTS and the second BTS are the same.
In the above scheme, the lengths of the first fast axis collimating lens, the first light beam rotator and the first optical cushion block are matched with each other, and the lengths of the second fast axis collimating lens, the second light beam rotator and the second optical cushion block are matched with each other.
The first fast axis collimator lens includes: the buffer device comprises a first inclined plane with an inclination angle of 45 degrees and a first buffer part positioned at the lower end part of the first inclined plane; the second fast axis collimator lens includes: the second inclined plane is the same as the first inclined plane in the inclined direction and the inclined angle, and the second buffer part is positioned at the upper end part of the second inclined plane, and the second inclined plane is arranged in parallel relative to the first inclined plane.
In the above aspect, the first beam rotator includes: two third inclined planes which are opposite in parallel, a cylindrical lens array is arranged between the two third inclined planes, and the inclination angles and the inclination directions of the two third inclined planes are the same as those of the first inclined plane or the second inclined plane; the second beam rotator includes: the two fourth inclined planes are opposite in parallel, a cylindrical lens array is arranged between the two fourth inclined planes, and the inclination angles and the inclination directions of the two fourth inclined planes are the same as those of the third inclined plane.
In the above scheme, a first buffer portion is arranged at the lower end of the third inclined surface close to the fourth inclined surface, and a second buffer portion is arranged at the upper end of the fourth inclined surface close to the third inclined surface.
In the above solution, the first buffer portion and the second buffer portion are used for preventing the first optical element and the second optical element from being mechanically damaged in the process of processing the light beam, and the shapes of the first buffer portion and the second buffer portion include: rounded corners, or square corners.
The embodiment of the invention also provides a laser module, which comprises the optical device and a bar type laser light source with a plurality of light-emitting points; the laser light source is used for emitting laser beams; the first optical element and the second optical element of the optical device are arranged in the light emitting direction of the laser light source and used for processing the laser beams emitted by the laser light source.
The embodiment of the invention also provides a laser beam processing method, which utilizes the optical device, the first optical element and the second optical element which are arranged at an angle with each other of the optical device, and simultaneously processes the laser beams emitted by the bar type laser light source with a plurality of light-emitting points.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an optical device according to the present invention;
FIG. 2 is a schematic diagram of the overall structure of the optical device of the present invention;
FIG. 3 is a first schematic structural diagram of a first fast axis collimator and a second fast axis collimator according to the present invention;
FIG. 4 is a schematic diagram of a first fast axis collimator according to the present invention;
FIG. 5 is a second schematic structural diagram of a first fast axis collimator and a second fast axis collimator according to the present invention;
FIG. 6 is a first schematic diagram of the first and second beam rotators of the present invention;
FIG. 7 is a second schematic diagram of the first and second beam rotators of the present invention;
FIG. 8 is a schematic diagram of a first beam rotator according to the present invention;
FIG. 9 is a schematic view of the structure of the first optical spacer or the second optical spacer of the present invention;
fig. 10 is a schematic structural diagram of a laser module according to the present invention.
Description of reference numerals:
the optical axis collimator includes a first BTS1, a second BTS2, a first fast axis collimator 11, a first inclined plane 111, a first buffer 112, a first beam rotator 12, a third inclined plane 121, a first optical spacer 13, a second fast axis collimator 21, a second beam rotator 22, a fourth inclined plane 221, a second optical spacer 23, a second inclined plane 211, a second buffer 212, a laser source 3, a beam emitted from each light emitting point 31, a lenticular array a, and a groove b.
Detailed Description
The embodiment of the invention provides an optical device, a laser module and a laser beam processing method, wherein for a bar type laser light source with a plurality of light-emitting points, the bar type laser light source is realized on the basis of two optical elements (a first optical element and a second optical element) and enables the bar type laser light source to meet a certain structure and parameter relation, and compared with the traditional method adopting a complicated optical device or system, the technical scheme provided by the invention can be used for correcting smile of a laser beam to a greater extent and remarkably improving the collimation of the laser beam.
In the embodiment of the present invention, the two optical elements (the first optical element and the second optical element) may be two fast-axis collimating mirrors, but it is also conceivable that the optical element may be a BTS, a step mirror, a prism set, or other homogenizing device including a fast-axis collimating mirror.
The following embodiments of the present invention are mainly illustrated by taking optical elements as BTSs (a first BTS and a second BTS) as examples, and specifically, an included angle θ between the first BTS and the second BTS in the embodiments of the present invention satisfies: pi/2 < theta < pi, within which the smile correction can be achieved to a large extent, and an adjustment margin is required between the first optical element and the second optical element (the first BTS and the second BTS), which adjustment margin enables uniform correction of the smile at each light-emitting point, and is preferably less than or equal to 0.03mm in the embodiment of the present invention.
The terms "first", "second", "third" and "fourth" in the following embodiments of the present invention are used only for distinguishing different elements, and are not intended to limit the present invention, and "upper" and "lower" are used only for distinguishing relative positions, and do not constitute an absolute limitation on specific positions.
The technical solution of the present invention is further described in detail with reference to the accompanying drawings and specific embodiments.
Fig. 1 is a schematic view of the overall structure of the optical device of the present invention, and fig. 2 is a schematic view of the overall structure of the optical device of the present invention. Specifically, with reference to fig. 1 and 2, the optical device includes a first optical element and a second optical element disposed at an angle to each other in the laser optical path direction, and an included angle θ between the first optical element and the second optical element satisfies: and the first optical element at least comprises a first fast axis collimating mirror 11, and the second optical element at least comprises a second fast axis collimating mirror 21.
Further, the first optical element further includes: a first beam rotator 12, a first optical pad 13; the first fast axis collimator lens 11 and the first beam rotator 12 are aligned and bonded to each other and fixed to the first optical block 13, that is, in this case, the first optical element may be at least a first BTS 1;
similarly, the second optical element further includes: a second beam rotator 22, a second optical pad 23; the second fast axis collimator lens 21 and the second beam rotator 22 are aligned and bonded to each other and fixed to the second optical block 23, i.e. in this case, the second optical element may be at least the second BTS 2.
Note that the first BTS1 has the same shape, size, structure, and optical parameters as the second BTS 2.
In the above scheme, in order to ensure that the first fast axis collimating mirror 11 and the first beam rotator 12 are aligned and bonded with each other and fixed to the first optical spacer 13, the lengths of the first fast axis collimating mirror 11, the first beam rotator 12 and the first optical spacer 13 are matched with each other; similarly, the lengths of the second fast axis collimator lens 21, the second beam rotator 22 and the second optical spacer 23 also need to be matched with each other; the matching does not require that the dimensions of the various elements be exactly equal, and may be substantially or substantially identical to one another, provided that the solution of the invention is achieved.
Further, as shown in fig. 4, fig. 4 is a schematic structural diagram of the first fast axis collimator lens according to the present invention. The first fast axis collimator lens 11 includes: a first inclined plane 111 with an inclination angle of 45 degrees and a first buffer part 112 positioned at the lower end part of the first inclined plane;
similarly, as shown in fig. 3, fig. 3 is a first schematic structural diagram of the first fast axis collimator lens and the second fast axis collimator lens according to the present invention. The second fast axis collimator lens 21 includes: a second inclined surface 211 having the same inclination direction and inclination angle as the first inclined surface 111, and a second buffer portion 212 at the upper end of the second inclined surface 211, the second inclined surface 211 being disposed in parallel with the first inclined surface 111, as shown in fig. 5.
It should be noted that the adjustment margin between the first BTS1 and the second BTS2 according to the embodiment of the present invention is specifically the distance between the two parallel inclined planes of the first inclined plane 111 and the second inclined plane 211.
The structure of the other parts of the first fast axis collimator lens 11 and the second fast axis collimator lens 12 are understood by referring to the prior art, and redundant description is omitted here.
Further, fig. 6 is a first schematic structural diagram of the first beam rotator and the second beam rotator of the present invention. As shown in fig. 6, the first beam rotator 12 includes: two third inclined planes 121 which are opposite in parallel, a cylindrical lens array a is arranged between the two third inclined planes 121, and the inclination angle and the inclination direction of the two third inclined planes 121 are the same as those of the first inclined plane 111 or the second inclined plane 211.
Similarly, the second beam rotator 22 includes: two parallel and opposite fourth inclined planes 221, and a cylindrical lens array a is disposed between the two fourth inclined planes 221, as shown in fig. 7 and 8, the inclination angles and the inclination directions of the two fourth inclined planes 221 are the same as those of the third inclined plane 121.
A first buffer portion 112 is disposed at a lower end of the third inclined surface 121 close to the fourth inclined surface 221, and a second buffer portion 212 is disposed at an upper end of the fourth inclined surface 221 close to the third inclined surface 121.
In the embodiment of the present invention, the first buffer 112 and the second buffer 212 are used to prevent mechanical damage to the first BTS1 and the second BTS2 during the optical beam processing.
Optionally, the shapes of the first buffer portion 112 and the second buffer portion 212 may include, but are not limited to: rounded corners, or square corners.
The adjustment margin between the first BTS1 and the second BTS2 may be understood as the distance between the parallel inclined planes of the third inclined plane and the fourth inclined plane which are close to each other, which is equal to the distance between the parallel inclined planes of the first inclined plane 111 and the second inclined plane 211.
Fig. 9 is a schematic structural diagram of the first optical spacer or the second optical spacer of the present invention, in which the first optical spacer 13 (or the second optical spacer 23) is used to support and fix the first fast axis collimator lens 11 and the first beam rotator 12 (or the second fast axis collimator lens 21 and the second beam rotator 22). In addition, in consideration of the adjustment margin, the distance between the first optical block 13 and the second optical block 23 should be larger to ensure that the adjustment margin can be freely achieved, for example, the distance between the first optical block 13 and the second optical block 23 is larger than the maximum value of the adjustment margin. The middle of the first optical cushion block 13 (or the second optical cushion block 23) is provided with a groove b for preventing the glue overflowing during the dispensing and mounting of the product from damaging the product.
When the first optical element only includes the first fast axis collimator 11 and the second optical element only includes the second fast axis collimator 21, the structure and the relationship between the first fast axis collimator 11 and the second fast axis collimator 21 refer to the scheme that the first optical element is the first BTS and the second optical element is the second BTS, which is basically the same as that described above and is not repeated here.
Fig. 10 is a schematic structural diagram of a laser module according to the present invention, the laser module includes the above optical devices, and a bar-type laser light source 3 having a plurality of light emitting points; the laser light source 3 is used for emitting laser beams; the first optical element and the second optical element of the optical device are disposed in the light emitting direction of the laser light source 3, and are used for processing the laser beam emitted by the laser light source, where the processing may specifically be to correct smile of the laser beam, or may be to perform other shaping, such as homogenization/collimation, on the laser beam, that is, the function of the optical device of the present invention is not limited to correcting smile.
When the first optical element is the first BTS1 and the second optical element is the second BTS2, each cell of the cylindrical lens array a included in the first beam rotator 12 and the second beam rotator 22 in the optical device corresponds to the light beam 31 emitted from each light-emitting point.
The embodiment of the invention also provides a laser beam processing method, which uses the above optical device, the first optical element and the second optical element which are arranged at an angle with each other of the optical device, and simultaneously processes the laser beam emitted by the bar-type laser light source with a plurality of luminous points, wherein the processing can specifically realize smile correction of the laser beam, and can also realize other shaping, such as homogenization/collimation and the like, of the laser beam.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Various modifications and alterations to this invention will become apparent to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An optical device, comprising: the first optical element and the second optical element are arranged at an angle with each other in the laser light path direction, and the included angle theta between the first optical element and the second optical element satisfies the following condition: the phi/2 is more than theta and less than phi, the first optical element at least comprises a first fast axis collimating mirror, and the second optical element at least comprises a second fast axis collimating mirror; the first optical element further includes: a first beam rotator, the first beam rotator comprising: two third inclined planes which are opposite in parallel, wherein a cylindrical lens array is arranged between the two third inclined planes; the second optical element further includes: a second beam rotator, the second beam rotator comprising: and two parallel opposite fourth inclined planes, wherein a cylindrical lens array is arranged between the two fourth inclined planes.
2. The optical device according to claim 1, wherein an adjustment margin is left between the first optical element and the second optical element, the adjustment margin being: less than or equal to 0.03 mm.
3. The optical device according to claim 1,
the first optical element further includes: a first optical spacer; the first fast axis collimating mirror and the first beam rotator are mutually aligned and bonded, and are fixed on a first optical cushion block, and the first optical element is a first BTS;
the second optical element further includes: a second optical spacer; the second fast axis collimating mirror and the second beam rotator are mutually aligned and bonded, and are fixed on a second optical cushion block, and the second optical element is a second BTS;
wherein, the shape, size, structure and optical parameters of the first BTS and the second BTS are the same.
4. The optical device as claimed in claim 3, wherein the first fast axis collimating lens, the first beam rotator and the first optical spacer are matched in length, and the second fast axis collimating lens, the second beam rotator and the second optical spacer are matched in length.
5. The optical device of claim 1, wherein the first fast axis collimating mirror comprises: the buffer device comprises a first inclined plane with an inclination angle of 45 degrees and a first buffer part positioned at the lower end part of the first inclined plane;
the second fast axis collimator lens includes: the second inclined plane is the same as the first inclined plane in the inclined direction and the inclined angle, and the second buffer part is located at the upper end part of the second inclined plane, and the second inclined plane and the first inclined plane are arranged in parallel relatively.
6. The optical device according to claim 5, wherein the two third slopes have the same inclination angle and inclination direction as the first slope or the second slope;
the inclination angle and the inclination direction of the two fourth inclined planes are the same as those of the third inclined plane.
7. The optical device as claimed in claim 6, wherein a first buffer portion is provided near a lower end portion of the third slope of the fourth slope, and a second buffer portion is provided near an upper end portion of the fourth slope of the third slope.
8. The optical device of claim 7, wherein the first and second buffers are configured to prevent mechanical damage to the first and second optical elements during beam processing, and the first and second buffers have shapes that include: rounded corners, or square corners.
9. A laser module comprising the optical device of any one of claims 1 to 8, and a bar-type laser light source having a plurality of light emitting points; wherein the content of the first and second substances,
the laser light source is used for emitting laser beams;
the first optical element and the second optical element of the optical device are arranged in the light emitting direction of the laser light source and used for processing the laser beams emitted by the laser light source.
10. A laser beam processing method, characterized in that the optical device of any one of claims 1 to 8 is used, and the first optical element and the second optical element of the optical device, which are arranged at an angle with each other, simultaneously process the laser beams emitted by the bar-type laser light source with a plurality of luminous points.
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| CN201811581634.5A CN109491096B (en) | 2018-12-24 | 2018-12-24 | Optical device, laser module and laser beam processing method |
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| CN101442180A (en) * | 2008-12-31 | 2009-05-27 | 北京工业大学 | Apparatus for shaping high-power semiconductor laser array |
| CN202720390U (en) * | 2012-02-29 | 2013-02-06 | 南通傲迈光电科技有限公司 | Beam shaping structure of array semiconductor laser |
| CN103199439A (en) * | 2013-03-26 | 2013-07-10 | 温州泛波激光有限公司 | Semiconductor laser device |
| CN104049325A (en) * | 2014-02-08 | 2014-09-17 | 武汉柏汉激光技术有限公司 | Semiconductor laser array output beam uniformizing and optical fiber coupling system |
| US9008137B1 (en) * | 2014-04-01 | 2015-04-14 | Science Research Laboratory, Inc. | Method and apparatus for compact and efficient introduction of high radiant power into an optical fiber |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2358169A1 (en) * | 2001-10-01 | 2003-04-01 | Creo Products Inc. | Method and apparatus for illuminating a spatial light modulator |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101442180A (en) * | 2008-12-31 | 2009-05-27 | 北京工业大学 | Apparatus for shaping high-power semiconductor laser array |
| CN202720390U (en) * | 2012-02-29 | 2013-02-06 | 南通傲迈光电科技有限公司 | Beam shaping structure of array semiconductor laser |
| CN103199439A (en) * | 2013-03-26 | 2013-07-10 | 温州泛波激光有限公司 | Semiconductor laser device |
| CN104049325A (en) * | 2014-02-08 | 2014-09-17 | 武汉柏汉激光技术有限公司 | Semiconductor laser array output beam uniformizing and optical fiber coupling system |
| US9008137B1 (en) * | 2014-04-01 | 2015-04-14 | Science Research Laboratory, Inc. | Method and apparatus for compact and efficient introduction of high radiant power into an optical fiber |
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