CN109490213A - Miniature UV absorption atmospheric ozone sensor - Google Patents
Miniature UV absorption atmospheric ozone sensor Download PDFInfo
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- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 313
- 238000010521 absorption reaction Methods 0.000 title claims abstract description 19
- 238000005259 measurement Methods 0.000 claims abstract description 65
- 238000009795 derivation Methods 0.000 claims description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
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- 239000005437 stratosphere Substances 0.000 description 3
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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Abstract
The present invention relates to a kind of miniature UV absorption atmospheric ozone sensors comprising ozone flow channel, zero flow of air channel, ultraviolet point light source and the Mersure Controler for controlling ozone content measuring state；The ultraviolet light that ultraviolet point light source generates can import in ozone flow channel and zero flow of air channel, when air containing ozone flows in ozone flow channel, the ultraviolet light for importing ozone flow channel can be absorbed, and ozone channel ultraviolet light intensity signal can be transmitted to Mersure Controler；After zero gas flows in zero flow of air channel, zero gas channel ultraviolet light intensity signal can be transmitted to Mersure Controler, Mersure Controler can determine that ozone content according to the difference of ozone channel ultraviolet light intensity signal and zero gas channel ultraviolet light intensity signal.The present invention realizes the measurement to ozone content to the attenuation by absorption of ultraviolet light by measurement atmospheric ozone, and measurement accuracy is high, strong antijamming capability, wide adaptation range.
Description
Technical Field
The invention relates to a sensor, in particular to a miniature ultraviolet absorption atmospheric ozone sensor, which is an ozone sensor for monitoring the ozone content in the atmosphere and belongs to the technical field of atmospheric environment monitoring.
Background
Ozone is an important gas in the earth's atmosphere and is also the core material of atmospheric chemistry. Atmospheric ozone and its related changes have important effects on global climate and atmospheric environment, and are one of leading-edge researches of atmospheric science. Ozone is distributed mainly in the stratospheric atmosphere in the range of 10-50km altitude, with maxima located between 20-30km altitude. The stratospheric ozone can absorb solar short-wave ultraviolet rays harmful to human bodies, and is a protective umbrella for the earth. The absorption of solar ultraviolet radiation by ozone is the main heat source of the stratosphere, and the concentration and vertical distribution of ozone directly affect the temperature structure of the stratosphere, thereby affecting the atmospheric circulation and the earth climate. Tropospheric ozone is one of the important atmospheric pollutants, atmospheric ozone pollution becomes a common and difficult-to-treat atmospheric pollution in China, and high-concentration ozone can cause harm to public health, agricultural production and ecological environment.
In view of the important role of atmospheric ozone in the earth gas system, an ozone detection sensor needs to be developed for atmospheric ozone monitoring, so as to accurately grasp the long-term change trend and the short-term change characteristics of atmospheric ozone in the stratosphere and convection layer areas. Ozone is complex and changeable, and the distribution change characteristics of the ozone in the vertical direction are all important for atmospheric physical, chemical and dynamic process research. The current global distribution and long-term variation of total ozone has possessed a more reliable ground and satellite observation instrument, in contrast, there is also a deficiency in vertical profile detection of ozone on a global scale, which is associated with the scarcity of small ozone detection sensors that can be adapted for high altitude observation. Therefore, the development of a miniature ozone detection sensor is urgently needed, and the development of the miniature ozone detection sensor has important significance on relevant researches such as climate change, atmospheric environment and ecological balance.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a miniature ultraviolet absorption atmospheric ozone sensor which is simple and compact in structure, high in measurement precision, strong in anti-interference capability, wide in application range, safe and reliable, and can measure the ozone content by measuring the absorption attenuation of atmospheric ozone to ultraviolet rays.
According to the technical scheme provided by the invention, the miniature ultraviolet absorption atmospheric ozone sensor comprises an ozone flow channel for providing air flow containing ozone, a zero-air flow channel for providing zero-air flow, an ultraviolet point light source for providing ultraviolet light and a measurement controller for controlling the measurement state of the ozone content;
ultraviolet rays generated by the ultraviolet point light source can be guided into the ozone flow channel and the zero-air flow channel, and when air containing ozone flows in the ozone flow channel, the ultraviolet rays guided into the ozone flow channel can be absorbed, and an ozone channel ultraviolet light intensity signal can be transmitted to the measurement controller; when the zero gas flows in the zero gas flow channel, the zero gas channel ultraviolet light intensity signal can be transmitted to the measurement controller, and the measurement controller can determine the ozone content according to the difference value of the ozone channel ultraviolet light intensity signal and the zero gas channel ultraviolet light intensity signal.
The ozone flowing channel comprises an ozone gas pipeline arranged in the ozone flowing direction, one end of the ozone gas pipeline is provided with an ozone channel ultraviolet ray leading-in convex lens, the ultraviolet light emitted by the ultraviolet point light source can be led into the ozone gas pipeline by leading the ultraviolet light into the convex lens through the ozone channel, so that the air containing ozone can absorb ultraviolet rays when flowing in the ozone gas pipeline, an ozone channel ultraviolet ray leading-out convex lens for leading out ultraviolet rays in the ozone gas pipeline is arranged at the other end of the ozone gas pipeline, an ozone channel ultraviolet light intensity receiver is arranged on a light path of the ultraviolet light led out by the ozone channel ultraviolet light led out convex lens and is electrically connected with the measurement controller, the ozone channel ultraviolet light intensity receiver can transmit an ozone channel ultraviolet light intensity signal to the measurement controller.
The zero-gas flow channel comprises a zero-gas pipeline arranged in the zero-gas flow direction, one end of the zero-gas pipeline is provided with a zero-gas channel ultraviolet ray introduction convex lens, and the ultraviolet ray emitted by the ultraviolet point light source can be introduced into the zero-gas pipeline through the zero-gas channel ultraviolet ray introduction convex lens; a zero gas channel ultraviolet ray leading-out convex lens for leading out ultraviolet rays in the zero gas pipeline is arranged at the other end of the zero gas pipeline, and a zero gas channel ultraviolet light intensity receiver is arranged on a light path of the ultraviolet rays led out by the zero gas channel ultraviolet ray leading-out convex lens; the zero-gas-channel ultraviolet light intensity receiver is electrically connected with the measurement controller and can transmit a zero-gas-channel ultraviolet light intensity signal to the measurement controller.
The distance between the ozone channel ultraviolet ray introduction convex lens and the ozone channel ultraviolet ray derivation convex lens is L, and the distance between the zero gas channel ultraviolet ray introduction convex lens and the zero gas channel ultraviolet ray derivation convex lens is L; the incident angle of the ultraviolet light entering the ozone gas pipeline is theta, and the incident angle of the ultraviolet light entering the zero gas pipeline is theta;
the measurement controller (23) determines the relationship of the ozone content as:
wherein,ozone concentration (ppm); p is an ozone channel ultraviolet light intensity signal; p0Is a zero gas channel ultraviolet light intensity signal; sigma is ozone molecular absorption coefficient (308 cm at 0 deg.C and 1 atmosphere pressure)-1)。
The ultraviolet point light source is a laser diode ultraviolet point light source with emission wavelength of 254 nm; the ultraviolet point light source is arranged at the focus corresponding to the ozone channel ultraviolet light leading-in convex lens and the zero-gas channel ultraviolet light leading-in convex lens.
The ozone flow channel further comprises an ozone channel air pump used for providing air flow power containing ozone, the ozone channel air pump is electrically connected with the measurement controller, and the ozone channel ultraviolet ray introduction convex lens, the ozone channel ultraviolet ray derivation convex lens and the ozone channel air pump are sequentially arranged in the flow direction of the air containing ozone.
An ozone channel temperature sensor, an ozone channel gas flow sensor and an ozone channel gas pressure sensor are further arranged between the ozone channel ultraviolet ray derivation convex lens and the ozone channel gas pump, and the ozone channel temperature sensor, the ozone channel gas flow sensor and the ozone channel gas pressure sensor are all electrically connected with the measurement controller.
The zero-air flow channel further comprises a zero-air channel air pump used for providing zero-air flow power and an ozone filter used for filtering ozone, the zero-air gas pipeline is located between the ozone filter and the zero-air channel air pump, and the ozone filter, the zero-air channel ultraviolet light guide-in convex lens, the zero-air channel ultraviolet light guide-out convex lens and the zero-air channel air pump are sequentially arranged in the zero-air flow direction.
And a zero-air-channel temperature sensor, a zero-air-channel air flow sensor and a zero-air-channel air pressure sensor are also arranged between the zero-air-channel ultraviolet light deriving convex lens and the zero-air-channel air pump, and the zero-air-channel temperature sensor, the zero-air-channel air flow sensor and the zero-air-channel air pressure sensor are all electrically connected with the measurement controller.
The corresponding inner walls of the ozone gas pipeline and the zero gas pipeline are respectively plated with an aluminum film.
The invention has the advantages that: ultraviolet rays generated by the ultraviolet point light source can be guided into the ozone flow channel and the zero-air flow channel, and when air containing ozone flows in the ozone flow channel, the ultraviolet rays guided into the ozone flow channel can be absorbed, and an ozone channel ultraviolet light intensity signal can be transmitted to the measurement controller; when the zero gas flows in the zero gas flow channel, the zero gas channel ultraviolet light intensity signal can be transmitted to the measurement controller, the measurement controller can determine the ozone content according to the difference value between the ozone channel ultraviolet light intensity signal and the zero gas channel ultraviolet light intensity signal, the measurement of the ozone content is realized by measuring the absorption attenuation of the atmospheric ozone to ultraviolet rays, the measurement precision is high, the anti-interference capability is strong, the measurement device can be used for detecting the indoor and outdoor near-ground atmospheric ozone content, and the atmospheric ozone vertical profile observation can also be carried by an air sounding balloon or a mooring airship to lift to the air so as to carry out atmospheric ozone vertical profile observation, and the measurement device is safe and reliable.
Drawings
Fig. 1 is a schematic diagram of the present invention.
FIG. 2 is a schematic view of ultraviolet light propagating in an ozone gas line according to the present invention.
Fig. 3 is a block diagram of the present invention.
Description of reference numerals: 1-air inlet manifold, 2-ozone circulating pipeline, 3-ozone channel ultraviolet ray leading-in convex lens, 4-ozone gas pipeline, 5-ozone channel ultraviolet ray leading-out convex lens, 6-ozone channel ultraviolet light intensity receiver, 7-ozone channel temperature sensor, 8-ozone channel gas flow sensor, 9-ozone channel air pressure sensor, 10-ozone channel air pump, 11-air outlet manifold, 12-ultraviolet point light source, 13-ozone filter, 14-zero air flow pipeline, 15-zero air channel ultraviolet ray leading-in convex lens, 16-zero air pipeline, 17-zero air channel ultraviolet ray leading-out convex lens, 18-zero air channel ultraviolet light intensity receiver, 19-zero air channel temperature sensor, 20-zero air channel gas flow sensor, 3-ozone channel ultraviolet ray leading-in convex lens, 4-ozone gas pipeline, 5-ozone channel ultraviolet ray leading-out convex lens, 6-zero air channel ultraviolet, 21-zero air channel air pressure sensor, 22-zero air channel air pump and 23-measurement controller.
Detailed Description
The invention is further illustrated by the following specific figures and examples.
As shown in fig. 1 and 3: in order to realize the measurement of the ozone content by measuring the absorption attenuation of the atmospheric ozone to the ultraviolet rays and improve the measurement precision and the anti-interference capability, the invention comprises an ozone flow channel for providing the air flow containing the ozone, a zero-air flow channel for providing the zero-air flow, an ultraviolet point light source 12 for providing ultraviolet rays and a measurement controller 23 for controlling the measurement state of the ozone content.
Ultraviolet rays generated by the ultraviolet point light source 12 can be guided into the ozone flow channel and the zero-air flow channel, and when air containing ozone flows in the ozone flow channel, the ultraviolet rays guided into the ozone flow channel can be absorbed, and an ozone channel ultraviolet light intensity signal can be transmitted to the measurement controller 23; when the zero gas flows in the zero gas flow channel, the zero gas channel ultraviolet light intensity signal can be transmitted to the measurement controller 23, and the measurement controller 23 can determine the ozone content according to the difference value of the ozone channel ultraviolet light intensity signal and the zero gas channel ultraviolet light intensity signal.
Specifically, air containing ozone can flow in the ozone flow passage, zero gas containing no ozone can flow in the zero-gas flow passage, air containing ozone flows unidirectionally in the ozone flow passage, and zero gas also flows unidirectionally in the zero-gas flow passage. The measurement controller 23 may be a general microprocessor chip, and the specific form of the measurement controller 23 may be selected as needed, which is not described herein again. The ultraviolet point light source 12 can be connected with the measurement controller 23, and after the ultraviolet point light source 12 is electrically connected with the measurement controller 23, the working state of the ultraviolet point light source 12 can be controlled by the measurement controller 23.
The ultraviolet light of the work emission of ultraviolet point light source 12 can get into ozone flow channel and zero air flow channel simultaneously in, when the air that contains ozone flows in ozone flow channel, can absorb the ultraviolet light that gets into in the ozone flow channel to measurement controller 23 can obtain ozone circulation passageway ultraviolet light intensity signal. The ultraviolet light entering the zero-air flow channel cannot be absorbed by the zero air, so that a zero-air channel ultraviolet light intensity signal can be obtained through the zero-air flow channel, the measurement controller 23 can determine the measurement of the ozone content according to the difference value (namely the contribution of the ozone to the ultraviolet light absorption) between the ozone channel ultraviolet light intensity signal and the zero-air channel ultraviolet light intensity signal, namely the measurement of the ozone content is realized by measuring the absorption attenuation of the atmospheric ozone to the ultraviolet light, and the measurement precision and the anti-interference capability are improved. When the device is used specifically, the device can be used for detecting the content of ozone in the atmosphere near the ground indoors and outdoors, and can also be carried by an air sounding balloon or a mooring airship to lift to the air for observing the vertical profile of the ozone in the atmosphere.
Further, the ozone flow passage comprises an ozone gas pipe 4 arranged in the flow direction of ozone, one end of the ozone gas pipeline 4 is provided with an ozone channel ultraviolet ray leading-in convex lens 3, the ultraviolet ray emitted by the ultraviolet point light source 12 can be led into the ozone gas pipeline 4 through the ozone channel ultraviolet ray leading-in convex lens 3, so that the air containing ozone can absorb ultraviolet rays when flowing in the ozone gas pipeline 4, an ozone channel ultraviolet ray leading-out convex lens 5 for leading out ultraviolet rays in the ozone gas pipeline 4 is arranged at the other end of the ozone gas pipeline 4, an ozone channel ultraviolet light intensity receiver 6 is arranged on a light path of the ultraviolet light led out by the ozone channel ultraviolet light led out convex lens 5, the ozone channel ultraviolet light intensity receiver 6 is electrically connected with a measurement controller 23, the ozone channel ultraviolet light intensity signal can be transmitted to the measurement controller 23 through the ozone channel ultraviolet light intensity receiver 6.
The zero-gas flow channel comprises a zero-gas pipeline 16 arranged in the zero-gas flow direction, one end of the zero-gas pipeline 16 is provided with a zero-gas channel ultraviolet ray introduction convex lens 15, and the ultraviolet ray emitted by the ultraviolet point light source 12 can be introduced into the zero-gas pipeline 16 through the zero-gas channel ultraviolet ray introduction convex lens 15; a zero-gas-channel ultraviolet ray leading-out convex lens 17 for leading out ultraviolet rays in the zero-gas pipeline 16 is arranged at the other end of the zero-gas pipeline 16, and a zero-gas-channel ultraviolet ray strong receiver 18 is arranged on a light path of the ultraviolet rays led out by the zero-gas-channel ultraviolet ray leading-out convex lens 17; the zero-air-channel ultraviolet light intensity receiver 18 is electrically connected with the measurement controller 23, and the ozone-channel ultraviolet light intensity signal can be transmitted to the measurement controller 23 through the zero-air-channel ultraviolet light intensity receiver 18.
The distance between the ozone channel ultraviolet ray introduction convex lens 3 and the ozone channel ultraviolet ray derivation convex lens 5 is L, and the distance between the zero gas channel ultraviolet ray introduction convex lens 15 and the zero gas channel ultraviolet ray derivation convex lens 17 is L; the incident angle of the ultraviolet light entering the ozone gas pipeline 4 is theta, and the incident angle of the ultraviolet light entering the zero gas pipeline 16 is theta;
the measurement controller 23 determines the relationship of the ozone content as:
wherein,ozone concentration (ppm); p is an ozone channel ultraviolet light intensity signal; p0Is a zero gas channel ultraviolet light intensity signal; sigma is ozone molecular absorption coefficient (308 cm at 0 deg.C and 1 atmosphere pressure)-1)。
In the embodiment of the invention, the ultraviolet point light source 12 is a laser diode ultraviolet point light source with emission wavelength of 254 nm; the ultraviolet point light source 12 is arranged at the focus corresponding to the ozone channel ultraviolet light leading-in convex lens 3 and the zero-air channel ultraviolet light leading-in convex lens 15. In specific implementation, the ozone has the strongest absorption to the ultraviolet ray in the 254nm wave band, namely the ultraviolet point light source 12 is a 254nm laser diode ultraviolet point light source.
The ultraviolet light guide-in convex lens 3 of the ozone channel can change the light beam emitted by the ultraviolet point light source 12 into a parallel light beam and guide the parallel light beam into the ozone gas pipeline 4, after the ultraviolet light beam moves forward in the ozone gas pipeline 4, the ultraviolet light guide-out convex lens 5 of the ozone channel can guide out the light absorbed by ozone, so that the ultraviolet light intensity signal of the ozone channel can be received by the ultraviolet light intensity receiver 6 of the ozone channel and transmitted into the measurement controller 23. The specific processes of guiding in and out the ultraviolet light rays of the ozone channel into the convex lens 3 and guiding out the ultraviolet light rays of the ozone channel from the convex lens 5 for converging the ultraviolet light rays are well known to those skilled in the art, and are not described herein again.
In specific implementation, in order to meet the requirement of air flow containing ozone, the whole ozone flow channel also comprises an ozone flow pipeline 2, and an ozone gas pipeline 4 is communicated with the ozone flow pipeline 2, namely, the air containing ozone can flow in the ozone flow pipeline 2 and the ozone gas pipeline 4. By controlling the installation angle of the ozone channel ultraviolet ray leading-in convex lens 3 and the ozone channel ultraviolet ray leading-out convex lens 5 on the cavity wall of the ozone gas pipeline 4, the incidence angle of ultraviolet parallel light beams can be controlled, the reflection times of the parallel light beams are further controlled, and finally the stroke of the parallel light beams in the ozone gas pipeline 4 is controlled. Assuming that the incident angle is theta, the distance between the ozone channel ultraviolet ray introduction convex lens 3 and the ozone channel ultraviolet ray derivation convex lens 5 is L, the beam path isTo ensure effective ozone content detection, a certain ultraviolet light stroke needs to be provided. The invention adopts the oblique incidence of ultraviolet light, and the ultraviolet light is reflected for a plurality of times in the inner cavity of the ozone gas pipeline 4, so that enough ultraviolet light stroke can be provided under the condition of shorter length of the gas pipeline. Thereby facilitating miniaturization as shown in fig. 2.
The inner walls of the ozone gas pipeline 4 and the zero gas pipeline 16 are coated with aluminum films correspondingly, and the absorption attenuation of the corresponding inner cavities of the ozone gas pipeline 4 and the zero gas pipeline 16 to ultraviolet light beams is reduced through the high-reflection aluminum films, so that the measurement accuracy of the ozone content is improved. In the embodiment of the invention, the ozone gas pipeline 4 and the zero gas pipeline 16 are both rectangular-parallelepiped-shaped pipelines, the ozone gas pipeline 4 and the zero gas pipeline 16 have the same characteristic parameters, the inner cavities of the ozone gas pipeline 4 and the zero gas pipeline 16 are square with the side length less than 2cm, and the lengths of the ozone gas pipeline 4 and the zero gas pipeline 16 are less than 10 cm.
In specific implementation, the descriptions of the ozone flow channel can be referred to for the situation of the zero-gas pipeline 16, the zero-gas channel ultraviolet light introducing convex lens 15, and the zero-gas channel ultraviolet light deriving convex lens 17 in the zero-gas flow channel, the difference between the zero-gas flow channel and the ozone flow channel is only that the flowing gas is different, the working principle of the zero-gas flow channel and the like are consistent with the ozone flow channel, the description of the ozone flow channel can be referred to for the specific principle of the zero-gas flow channel, and details are not repeated here.
In the embodiment of the invention, after receiving the ozone channel ultraviolet light intensity signal and the zero-gas channel ultraviolet light intensity signal, the measurement controller 23 can obtain the relation of the ozone content according to the Lambert beer law, namelyWhen the ultraviolet point light source 12 emits ultraviolet light of 254nm, σ is the molecular absorption coefficient of ozone at 254nm (308 cm at 0 ℃ and 1 atmosphere pressure)-1)。
Further, the ozone flow channel further comprises an ozone channel air pump 10 for providing air flow power containing ozone, the ozone channel air pump 10 is electrically connected with the measurement controller 23, and the ozone channel ultraviolet light introduction convex lens 3, the ozone channel ultraviolet light derivation convex lens 5 and the ozone channel air pump 10 are sequentially arranged in the flow direction of the air containing ozone.
In the embodiment of the invention, an ozone channel temperature sensor 7, an ozone channel gas flow sensor 8 and an ozone channel air pressure sensor 9 are further arranged between the ozone channel ultraviolet light guide convex lens 5 and the ozone channel air pump 10, and the ozone channel temperature sensor 7, the ozone channel gas flow sensor 8 and the ozone channel air pressure sensor 9 are all electrically connected with the measurement controller 23.
The ozone channel ultraviolet light intensity receiver 6 is located at a focus of the ozone channel ultraviolet light deriving convex lens 5, the ozone channel ultraviolet light intensity receiver 6 can be a photodiode, and a process of detecting ultraviolet light intensity through the ozone channel ultraviolet light intensity receiver 6 is well known by those skilled in the art and is not described herein again. The ozone channel air pressure sensor 9 can adopt a miniature air pressure sensor, and the air pressure in the ozone circulation pipeline 2 can be monitored through the ozone channel air pressure sensor 9. The ozone channel temperature sensor 7 adopts a miniature bead-shaped temperature sensor, and the temperature of the gas in the ozone circulation pipeline 2 can be monitored through the ozone channel temperature sensor 7. The flow rate of the gas in the ozone flowing pipe 2 can be monitored by the ozone passage gas flow rate sensor 8.
Further, the zero-air flow channel further includes a zero-air channel air pump 22 for providing zero-air flow power and an ozone filter 13 for filtering ozone, the zero-air gas pipeline 16 is located between the ozone filter 13 and the zero-air channel air pump 22, and the ozone filter 13, the zero-air channel ultraviolet light introducing convex lens 15, the zero-air channel ultraviolet light guiding convex lens 17 and the zero-air channel air pump 22 are sequentially arranged in the direction of zero-air flow.
In the embodiment of the present invention, a zero-air-channel temperature sensor 19, a zero-air-channel gas flow sensor 20, and a zero-air-channel gas pressure sensor 21 are further disposed between the zero-air-channel ultraviolet light guide convex lens 17 and the zero-air-channel air pump 22, and the zero-air-channel temperature sensor 19, the zero-air-channel gas flow sensor 20, and the zero-air-channel gas pressure sensor 21 are all electrically connected to the measurement controller 23.
Similar to the ozone flow path, the zero gas path temperature sensor 19 monitors the temperature of the gas in the zero gas flow path; the zero gas channel gas flow sensor 20 monitors and detects the flow of gas in the zero gas channel; the zero gas channel pressure sensor 21 monitors the pressure of the gas in the zero gas channel. Theoretically, the above-mentioned respective monitoring values in the ozone flow path and the zero flow path should be respectively identical or equal, and can provide a comparison reference with each other. Further, the ozone concentration can be converted from the volume concentration (ppm) to the mass concentration (mg/m) by the above-mentioned temperature and air pressure measurement-3)。
The ozone passage air pump 10 pumps air containing ozone to forcibly flow through the ozone flow passage, and the zero-air passage air pump 22 pumps zero-air containing no ozone to forcibly flow through the ozone flow passage. The two work simultaneously, and through laboratory debugging, test, possess unanimous or equivalent air exhaust efficiency.
In specific implementation, in order to satisfy the flow of the zero gas, the whole zero gas flow channel further includes a zero gas flow channel 14, the zero gas pipeline 16 is communicated with the zero gas flow channel 14, and the zero gas channel temperature sensor 19, the zero gas channel gas flow sensor 20, the zero gas channel gas pressure sensor 21 and the zero gas channel air pump 22 are all disposed on the zero gas flow channel 14. Zero air circulation pipeline 14, ozone circulation pipeline 2 all are connected and communicate with air intake manifold 1, can filter ozone through ozone filter 13 to obtain the zero gas that gets into zero air flow channel. The zero-air channel air pump 22 can provide the zero-air flowing power, and the zero-air channel air pump 22 and the ozone filter 13 are respectively positioned at two end parts of the zero-air flowing pipeline 14. The zero air passage air pump 22 and the air outlet of the ozone passage air pump 10 are connected and communicated with the air outlet manifold 11. For specific functions and matching relations of the zero-air-passage temperature sensor 19, the zero-air-passage gas flow sensor 20, the zero-air-passage air pressure sensor 21, and the zero-air-passage air pump 22, reference may be made to the relevant descriptions of the ozone-passage temperature sensor 7, the ozone-passage gas flow sensor 8, the ozone-passage air pressure sensor 9, and the ozone-passage air pump 10, which are not further described herein.
Claims (9)
1. A miniature ultraviolet absorption atmosphere ozone sensor is characterized in that: comprises an ozone flow channel for providing air flow containing ozone, a zero-air flow channel for providing zero-air flow, an ultraviolet point light source (12) for providing ultraviolet light and a measurement controller (23) for controlling the measuring state of the ozone content;
ultraviolet rays generated by the ultraviolet point light source (12) can be guided into the ozone flow channel and the zero-air flow channel, and when air containing ozone flows in the ozone flow channel, the ultraviolet rays guided into the ozone flow channel can be absorbed, and an ozone channel ultraviolet light intensity signal can be transmitted to the measurement controller (23); when the zero gas flows in the zero gas flow channel, the zero gas channel ultraviolet light intensity signal can be transmitted to the measurement controller (23), and the measurement controller (23) can determine the ozone content according to the difference value of the ozone channel ultraviolet light intensity signal and the zero gas channel ultraviolet light intensity signal.
2. The miniature ultraviolet absorbing atmospheric ozone sensor of claim 1, wherein: the ozone flow channel comprises an ozone gas pipeline (4) arranged in the ozone flow direction, one end of the ozone gas pipeline (4) is provided with an ozone channel ultraviolet ray introduction convex lens (3), ultraviolet rays emitted by an ultraviolet point light source (12) can be introduced into the ozone gas pipeline (4) through the ozone channel ultraviolet ray introduction convex lens (3) so that air containing ozone can absorb the ultraviolet rays when flowing in the ozone gas pipeline (4), the other end of the ozone gas pipeline (4) is provided with an ozone channel ultraviolet ray derivation convex lens (5) used for deriving the ultraviolet rays in the ozone gas pipeline (4), an ozone channel ultraviolet light intensity receiver (6) is arranged on a light path of the ultraviolet rays derived by the ozone channel ultraviolet ray derivation convex lens (5), and the ozone channel ultraviolet light intensity receiver (6) is electrically connected with a measurement controller (23), the ozone channel ultraviolet light intensity receiver (6) can transmit an ozone channel ultraviolet light intensity signal to the measurement controller (23).
3. The miniature ultraviolet absorbing atmospheric ozone sensor of claim 2, wherein: the zero-gas flow channel comprises a zero-gas pipeline (16) arranged in the zero-gas flow direction, one end of the zero-gas pipeline (16) is provided with a zero-gas channel ultraviolet ray leading-in convex lens (15), and the ultraviolet ray emitted by the ultraviolet point light source (12) can be led into the zero-gas pipeline (16) through the zero-gas channel ultraviolet ray leading-in convex lens (15); a zero gas channel ultraviolet ray leading-out convex lens (17) for leading out ultraviolet rays in the zero gas pipeline (16) is arranged at the other end of the zero gas pipeline (16), and a zero gas channel ultraviolet ray intensity receiver (18) is arranged on a light path of the ultraviolet rays led out by the zero gas channel ultraviolet ray leading-out convex lens (17); the zero-gas-channel ultraviolet light intensity receiver (18) is electrically connected with the measurement controller (23), and a zero-gas-channel ultraviolet light intensity signal can be transmitted to the measurement controller (23) through the zero-gas-channel ultraviolet light intensity receiver (18);
the distance between the ozone channel ultraviolet ray introduction convex lens (3) and the ozone channel ultraviolet ray derivation convex lens (5) is L, and the distance between the zero-gas channel ultraviolet ray introduction convex lens (15) and the zero-gas channel ultraviolet ray derivation convex lens (17) is L; the incident angle of the ultraviolet light entering the ozone gas pipeline (4) is theta, and the incident angle of the ultraviolet light entering the zero gas pipeline (16) is theta;
the measurement controller (23) determines the relationship of the ozone content as:
wherein,ozone concentration (ppm); p is an ozone channel ultraviolet light intensity signal; p0Is a zero gas channel ultraviolet light intensity signal; sigma is ozone molecular absorption coefficient (308 cm at 0 deg.C and 1 atmosphere pressure)-1)。
4. The miniature ultraviolet absorbing atmospheric ozone sensor of claim 3, wherein: the ultraviolet point light source (12) is a laser diode ultraviolet point light source with emission wavelength of 254 nm; the ultraviolet point light source (12) is arranged at the focus corresponding to the ozone channel ultraviolet light leading-in convex lens (3) and the zero-air channel ultraviolet light leading-in convex lens (15).
5. The miniature ultraviolet absorbing atmospheric ozone sensor of claim 2, wherein: the ozone flow channel further comprises an ozone channel air pump (10) used for providing air flow power containing ozone, the ozone channel air pump (10) is electrically connected with the measurement controller (23), and the ozone channel ultraviolet light guiding convex lens (3), the ozone channel ultraviolet light guiding convex lens (5) and the ozone channel air pump (10) are sequentially arranged in the flow direction of the air containing ozone.
6. The miniature ultraviolet absorbing atmospheric ozone sensor of claim 5, wherein: an ozone channel temperature sensor (7), an ozone channel gas flow sensor (8) and an ozone channel gas pressure sensor (9) are further arranged between the ozone channel ultraviolet ray derivation convex lens (5) and the ozone channel air pump (10), and the ozone channel temperature sensor (7), the ozone channel gas flow sensor (8) and the ozone channel gas pressure sensor (9) are all electrically connected with the measurement controller (23).
7. The miniature ultraviolet absorbing atmospheric ozone sensor of claim 1, wherein: the zero-air flow channel further comprises a zero-air channel air pump (22) used for providing zero-air flow power and an ozone filter (13) used for filtering ozone, a zero-air gas pipeline (16) is located between the ozone filter (13) and the zero-air channel air pump (22), and the ozone filter (13), a zero-air channel ultraviolet light guide-in convex lens (15), a zero-air channel ultraviolet light guide-out convex lens (17) and the zero-air channel air pump (22) are sequentially arranged in the zero-air flow direction.
8. The miniature ultraviolet absorbing atmospheric ozone sensor of claim 7, wherein: and a zero-air-channel temperature sensor (19), a zero-air-channel air flow sensor (20) and a zero-air-channel air pressure sensor (21) are also arranged between the zero-air-channel ultraviolet light guiding convex lens (17) and the zero-air-channel air pump (22), and the zero-air-channel temperature sensor (19), the zero-air-channel air flow sensor (20) and the zero-air-channel air pressure sensor (21) are electrically connected with a measurement controller (23).
9. The miniature ultraviolet absorbing atmospheric ozone sensor of claim 3, wherein: the corresponding inner walls of the ozone gas pipeline (4) and the zero gas pipeline (16) are respectively coated with an aluminum film.
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