CN109489565A - A kind of displacement measurement sensor and method - Google Patents
A kind of displacement measurement sensor and method Download PDFInfo
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- CN109489565A CN109489565A CN201910025156.8A CN201910025156A CN109489565A CN 109489565 A CN109489565 A CN 109489565A CN 201910025156 A CN201910025156 A CN 201910025156A CN 109489565 A CN109489565 A CN 109489565A
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- 238000005259 measurement Methods 0.000 title claims abstract description 27
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title abstract description 7
- 230000008878 coupling Effects 0.000 claims abstract description 24
- 238000010168 coupling process Methods 0.000 claims abstract description 24
- 238000005859 coupling reaction Methods 0.000 claims abstract description 24
- 230000003287 optical effect Effects 0.000 claims abstract description 14
- 238000007493 shaping process Methods 0.000 claims abstract description 10
- 238000000691 measurement method Methods 0.000 claims abstract description 7
- 238000004026 adhesive bonding Methods 0.000 claims abstract description 5
- 230000000694 effects Effects 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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- Measurement Of Optical Distance (AREA)
Abstract
The invention discloses a kind of displacement measurement sensor and methods.The sensor includes light source, No.1 cylindrical mirror, No.1 convex lens, balsaming lens, No. two cylindrical mirrors, No. two convex lenses and four-quadrant photoelectric coupling detector, and the balsaming lens is formed by the first right-angle prism, the second right-angle prism and one piece of cylindrical mirror gluing.Method are as follows: the light that light source issues carries out optical path shaping by No.1 cylindrical mirror and No.1 convex lens and obtains directional light；Gained directional light is incident to No. two cylindrical mirrors after balsaming lens, and is emitted in target face by No. two cylindrical mirrors and forms hot spot；The reflected light of formed hot spot is glued reflection from lens to No. two convex lenses along backtracking to balsaming lens；No. two lens are focused received light beam, electric signal are exported on four-quadrant photoelectric coupling detector in the form of energy power, to obtain and the one-to-one distance of electric signal.Displacement measurement sensor of the present invention uses contactless measurement method, and measurement is convenient and precision is high.
Description
Technical field
The present invention relates to photoelectric sensor technology field, especially a kind of displacement measurement sensor and method.
Background technique
Existing range sensor is divided into contact and contactless two kinds, and the most commonly used is condenser types in contact, rather than
The most commonly used is ultrasonic types for contact.Aforesaid way has the following problems: the first, the direct active force of contact range sensor exists
On measured object, measured object is easily caused to damage；The second, existing contactless range sensor has higher want to measured object surface
It asks, volume is larger, and low measurement accuracy.
Chinese patent CN103109463B discloses a kind of capacitive distance sensor, including a conduction, extended flat
Smooth sensor surface, the sensor surface contain several holes；Although the sensor is flexible, current-carrying part is still
Metal, the harm that cannot be avoided contact with completely.Chinese patent CN107896506A discloses another range sensor, including
Projection light source, the first light directing arrangement, diffraction optical element and image capture device, this is a kind of contactless Distance-sensing
Device, but due to algorithm and external influence, measurement accuracy is low and cannot achieve miniaturization.
Summary of the invention
The displacement measurement sensor and method that the purpose of the present invention is to provide a kind of structures is simple, measurement accuracy is high.
The technical solution for realizing the aim of the invention is as follows: a kind of displacement measurement sensor, including light source, No.1 cylinder
Mirror, No.1 convex lens, balsaming lens, No. two cylindrical mirrors, No. two convex lenses and four-quadrant photoelectric coupling detector；
The light that the light source issues carries out optical path shaping by No.1 cylindrical mirror and No.1 convex lens and obtains directional light, should
Directional light is incident to No. two cylindrical mirrors after balsaming lens, and is emitted in target face by No. two cylindrical mirrors and forms hot spot,
The reflected light of the hot spot is glued reflection from lens to No. two convex lenses, by No. two lens along backtracking to balsaming lens
Focussing force, electric signal is exported on four-quadrant photoelectric coupling detector in the form of energy power, to obtain and telecommunications
Number one-to-one distance.
Further, the balsaming lens is formed by the first right-angle prism, the second right-angle prism and one piece of cylindrical mirror gluing,
Wherein the first right-angle prism, the second right-angle prism most long face be bonded together into an Amici prism, the Amici prism
Light-emitting surface is mutually be bonded with the plane of the cylindrical mirror；The directional light of No.1 convex lens outgoing, sequentially passes through the first right-angle prism, the
After two right-angle prisms, cylindrical mirror, it is incident to No. two cylindrical mirrors.
Further, the No.1 convex lens is set to one times of focal position of No.1 cylindrical mirror.
Further, the four-quadrant photoelectric coupling detector is set to the focal point of No. two convex lenses, and detector
It is in 45 ° of angles with the cross that imaging is formed.
Further, the No.1 convex lens, No. two convex lenses surface be coated with 645nm-655nm narrow bandwidth filter
Film.
A kind of displacement measurement method, comprising the following steps:
Step 1, the light that light source issues carries out optical path shaping by No.1 cylindrical mirror and No.1 convex lens and obtains directional light；
Step 2, step 1 gained directional light is incident to No. two cylindrical mirrors after balsaming lens, and passes through No. two cylindrical mirrors
It is emitted in target face and forms hot spot；
Step 3, the reflected light of the formed hot spot of step 2 is along backtracking to balsaming lens, and is glued reflection from lens and arrives
No. two convex lenses；
Step 4, No. two lens are focused received light beam, with energy power on four-quadrant photoelectric coupling detector
Form export electric signal, to obtain and the one-to-one distance of electric signal.
Further, electric signal is exported in the form of energy power on four-quadrant photoelectric coupling detector described in step 4,
To obtain with the one-to-one distance of electric signal, it is specific as follows:
Four quadrants of detector are divided into A, B, C, D, are obtained only according to the ratio k of tetra- quadrant self-energys of A, B, C, D
One corresponding distance, the value formula of k are as follows:
Wherein, VA、VB、VC、VDIt is the voltage value that tetra- quadrants of A, B, C, D are generated by photoelectric effect respectively.
Compared with prior art, the present invention its remarkable advantage is: (1) using contactless measurement method, not will cause
The damage of measured object, and measured object surface is not required specifically；(2) when hot spot passes through the cylindrical mirror that one group of intersection is placed
When, picture and image distance in one cycle is correspondingly, it ensure that the displacement measurement accuracy in range is very high；
(3) compact-sized, occupy little space, be applicable to the measured object of different shape and material, precision is up to 0.07 μm.
Detailed description of the invention
Fig. 1 is the schematic diagram of optical system of displacement measurement sensor of the present invention.
Fig. 2 is the cylindrical mirror schematic illustration of displacement measurement sensor of the present invention.
Fig. 3 is the four-quadrant photoelectric coupling detector hot spot variation schematic diagram of displacement measurement sensor of the present invention.
Specific embodiment
In conjunction with Fig. 1~2, displacement measurement sensor of the present invention, including light source 1, No.1 cylindrical mirror 2, No.1 convex lens 3, glue
Close the convex lens 6 of cylindrical mirror 5, two of lens 4, two and four-quadrant photoelectric coupling detector 7；
The light that the light source 1 issues carries out optical path shaping by No.1 cylindrical mirror 2 and No.1 convex lens 3 and obtains directional light,
The directional light is incident to No. two cylindrical mirrors 5 after balsaming lens 4, and is emitted in target face and is formed by No. two cylindrical mirrors 5
Hot spot, the reflected light of the hot spot are glued lens 4 and are reflected into No. two convex lenses 6 along backtracking to balsaming lens 4, pass through
The focussing force of No. two lens 6 exports electric signal on four-quadrant photoelectric coupling detector 7 in the form of energy power, thus
It obtains and the one-to-one distance of electric signal.
Further, the balsaming lens 4 it is glued by the first right-angle prism, the second right-angle prism and one piece of cylindrical mirror and
At wherein the most long face of the first right-angle prism, the second right-angle prism is bonded together into an Amici prism, the Amici prism
Light-emitting surface it is mutually be bonded with the plane of the cylindrical mirror；The directional light that No.1 convex lens 3 is emitted, sequentially passes through the first right-angled edge
After mirror, the second right-angle prism, cylindrical mirror, it is incident to No. two cylindrical mirrors 5.
The effect of balsaming lens 4 is to reduce space, reduces installation difficulty；It is used for the characteristic of Amici prism simultaneously, circuit
Light can also receive well.
Further, the No.1 convex lens 3 is set to one times of focal position of No.1 cylindrical mirror 2.
Further, the four-quadrant photoelectric coupling detector 7 is set to the focal point of No. two convex lenses 6, and detects
The cross that device and imaging are formed is in 45 ° of angles.
Further, the surface of 3, No. two convex lenses 6 of No.1 convex lens is coated with the narrow bandwidth filter of 645nm-655nm
Light film.
Displacement measurement method of the present invention, comprising the following steps:
Step 1, the light that light source 1 issues, by No.1 cylindrical mirror 2 and No.1 convex lens 3 carry out optical path shaping obtain it is parallel
Light；
Step 2, step 1 gained directional light is incident to No. two cylindrical mirrors 5 after balsaming lens 4, and passes through No. two cylinders
Mirror 5, which is emitted in target face, forms hot spot；
Step 3, the reflected light of the formed hot spot of step 2 is along backtracking to balsaming lens 4, and is glued the reflection of lens 4
To No. two convex lenses 6；
Step 4, No. two lens 6 are focused received light beam, strong with energy on four-quadrant photoelectric coupling detector 7
Weak form exports electric signal, to obtain and the one-to-one distance of electric signal.
Further, telecommunications is exported in the form of energy power on four-quadrant photoelectric coupling detector 7 described in step 4
Number, thus obtain with the one-to-one distance of electric signal, it is specific as follows:
Four quadrants of detector are divided into A, B, C, D, are obtained only according to the ratio k of tetra- quadrant self-energys of A, B, C, D
One corresponding distance, the value formula of k are as follows:
Wherein, VA、VB、VC、VDIt is the voltage value that tetra- quadrants of A, B, C, D are generated by photoelectric effect respectively.
The principle of the present invention is: cylindrical mirror can reduce spherical aberration and color difference, the reason is that it can change the size of imaging.
It can be converted into hot spot one linear light spot.When the cylindrical mirror that hot spot is placed by one group of intersection, at one
Picture and image distance in period are correspondingly, it ensure that the precision of measuring principle.
Below in conjunction with attached drawing, the embodiment that the present invention will be described in detail.
Embodiment
Displacement measurement sensor of the present invention, including light source 1, No.1 cylindrical mirror 2, No.1 convex lens 3, balsaming lens 4, two
5, No. two convex lenses 6 of cylindrical mirror and four-quadrant photoelectric coupling detector 7；The light that the light source 1 issues, by No.1 cylindrical mirror 2
Optical path shaping, which is carried out, with No.1 convex lens 3 obtains directional light, which is incident to No. two cylindrical mirrors 5 after balsaming lens 4,
And be emitted in target face by No. two cylindrical mirrors 5 and form hot spot, the reflected light of the hot spot along backtracking to balsaming lens 4,
And be glued lens 4 and be reflected into No. two convex lenses 6, by the focussing force of No. two lens 6, in four-quadrant photoelectric coupling detector
Electric signal is exported in the form of energy power on 7, to obtain and the one-to-one distance of electric signal.
The balsaming lens 4 is formed by the first right-angle prism, the second right-angle prism and one piece of cylindrical mirror gluing, wherein first
Right-angle prism, the second right-angle prism most long face be bonded together into an Amici prism, the light-emitting surface of the Amici prism with
The plane of the cylindrical mirror is mutually bonded；The directional light that No.1 convex lens 3 is emitted, sequentially passes through the first right-angle prism, the second right angle
After prism, cylindrical mirror, it is incident to No. two cylindrical mirrors 5.
The No.1 convex lens 3 is set to one times of focal position of No.1 cylindrical mirror 2.
The four-quadrant photoelectric coupling detector 7 is set to the focal point of No. two convex lenses 6, and detector and imaging shape
At cross be in 45 ° of angles.
Further, it in order to improve the precision of measurement, needs to plate on No.1 convex lens 3 and No. two convex lenses 6
The filter coating of the narrow bandwidth of 645nm-655nm.
In conjunction with Fig. 1, the light that light source 1 issues not is directional light, so needing by No.1 cylindrical mirror 2 and No.1 convex lens
3 progress optical path shapings become directional light.Balsaming lens 4 is to put light as made of two pieces of right-angle prisms and one piece of cylindrical mirror gluing
Source 1, which continues to arrive forward No. two cylindrical mirrors 5 after balsaming lens 4 and projects shells, to be beaten in target face.Light in target face
Spot part can reflect back, and by being reflected to No. two convex lenses 6 when balsaming lens 4, make by the focusing of No. two convex lenses 6
With exporting electric signal on four-quadrant photoelectric coupling detector 7 in the form of energy power, can be corresponded by algorithm
Distance.
In conjunction with Fig. 2, point light source 8 is that symmetrically, when passing through positive cylindrical mirror 9, the picture 10 of formation is in the side y in the x and y direction
To no significant change, the direction x is shunk.When reaching the limit of, point hot spot will become linear light spot.
In conjunction with Fig. 3, the cylindrical mirror placed by one group of intersection is visited when image distance increases in range ability in four-quadrant
Survey changing as shown in Figure 3 as hot spot on device.Four quadrants of detector are divided into A, B, C, D, it can be found that every in range
A state be all it is unique, unique corresponding distance is obtained according to the ratio k of tetra- quadrant self-energys of A, B, C, D.
Displacement measurement method of the present invention, comprising the following steps:
Step 1, the light that light source 1 issues, by No.1 cylindrical mirror 2 and No.1 convex lens 3 carry out optical path shaping obtain it is parallel
Light；
Step 2, step 1 gained directional light is incident to No. two cylindrical mirrors 5 after balsaming lens 4, and passes through No. two cylinders
Mirror 5, which is emitted in target face, forms hot spot；
Step 3, the reflected light of the formed hot spot of step 2 is along backtracking to balsaming lens 4, and is glued the reflection of lens 4
To No. two convex lenses 6；
Step 4, No. two lens 6 are focused received light beam, strong with energy on four-quadrant photoelectric coupling detector 7
Weak form exports electric signal, thus obtain with the one-to-one distance of electric signal, it is specific as follows:
Four quadrants of detector are divided into A, B, C, D, are obtained only according to the ratio k of tetra- quadrant self-energys of A, B, C, D
One corresponding distance, the value formula of k are as follows:
Wherein, VA、VB、VC、VDIt is the voltage value that tetra- quadrants of A, B, C, D are generated by photoelectric effect respectively, due to astigmatism
Optical characteristics, so when the picture plane of optical system front focus (i.e. hot spot arc lose direction longest when) with rear focus (
Hot spot is in meridian direction longest) between when, k be with as plane displacement it is linear.
As one embodiment, a kind of displacement measurement sensor, laser of the light source 1 using 650nm, four-quadrant photoelectric coupling
7 sampling precision of detector 32, target surface size be 10mm, measure 50 ± 20mm of distance, 0.07 μm of precision.
In conclusion displacement measurement sensor of the present invention is compact-sized, occupy little space, can be used for a variety of narrow situations；
It is applicable to the measured object of all shapes and material, solves the problems, such as that for example mirror-reflection is too strong；There is no direct active force to exist
On measured object, measurement accuracy is high；It is also used as surface roughness detection, face molded dimension detects, Thickness sensitivity, length detection,
Measure distance, measurement position etc..
Claims (7)
1. a kind of displacement measurement sensor, which is characterized in that including light source (1), No.1 cylindrical mirror (2), No.1 convex lens (3),
Balsaming lens (4), No. two cylindrical mirrors (5), No. two convex lenses (6) and four-quadrant photoelectric coupling detector (7)；
The light that the light source (1) issues obtains parallel by No.1 cylindrical mirror (2) and No.1 convex lens (3) progress optical path shaping
Light, which is incident to No. two cylindrical mirrors (5) after balsaming lens (4), and is emitted to target by No. two cylindrical mirrors (5)
Hot spot is formed on face, the reflected light of the hot spot is glued lens (4) and is reflected into No. two along backtracking to balsaming lens (4)
Convex lens (6), by the focussing force of No. two lens (6), with the shape of energy power on four-quadrant photoelectric coupling detector (7)
Formula exports electric signal, to obtain and the one-to-one distance of electric signal.
2. displacement measurement sensor according to claim 1, which is characterized in that the balsaming lens (4) is by the first right angle
Prism, the second right-angle prism and one piece of cylindrical mirror gluing form, wherein the most long face of the first right-angle prism, the second right-angle prism is viscous
It is connected together to form an Amici prism, the light-emitting surface of the Amici prism is mutually be bonded with the plane of the cylindrical mirror；No.1 convex lens
The directional light of mirror (3) outgoing, after sequentially passing through the first right-angle prism, the second right-angle prism, cylindrical mirror, is incident to No. two cylindrical mirrors
(5)。
3. displacement measurement sensor according to claim 1 or 2, which is characterized in that the No.1 convex lens (3) is set to
One times of focal position of No.1 cylindrical mirror (2).
4. displacement measurement sensor according to claim 1 or 2, which is characterized in that the four-quadrant photoelectric coupling detection
Device (7) is set to the focal point of No. two convex lenses (6), and the cross that detector and imaging are formed is in 45 ° of angles.
5. displacement measurement sensor according to claim 1 or 2, which is characterized in that the No.1 convex lens (3), No. two
The surface of convex lens (6) is coated with the narrow bandwidth filter coating of 645nm-655nm.
6. a kind of displacement measurement method, which comprises the following steps:
Step 1, the light that light source (1) issues carries out optical path shaping by No.1 cylindrical mirror (2) and No.1 convex lens (3) and is put down
Row light；
Step 2, step 1 gained directional light is incident to No. two cylindrical mirrors (5) after balsaming lens (4), and passes through No. two cylinders
Mirror (5), which is emitted in target face, forms hot spot；
Step 3, the reflected light of the formed hot spot of step 2 is along backtracking to balsaming lens (4), and is glued lens (4) reflection
To No. two convex lenses (6)；
Step 4, No. two lens (6) are focused received light beam, strong with energy on four-quadrant photoelectric coupling detector (7)
Weak form exports electric signal, to obtain and the one-to-one distance of electric signal.
7. displacement measurement method according to claim 6, which is characterized in that visited described in step 4 in four-quadrant photoelectric coupling
Survey with the form of energy power output electric signal on device (7), thus obtain with the one-to-one distance of electric signal, it is specific as follows:
Four quadrants of detector are divided into A, B, C, D, it is unique right to obtain according to the ratio k of tetra- quadrant self-energys of A, B, C, D
The value formula of the distance answered, k is as follows:
Wherein, VA、VB、VC、VDIt is the voltage value that tetra- quadrants of A, B, C, D are generated by photoelectric effect respectively.
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| CN201910025156.8A CN109489565A (en) | 2019-01-11 | 2019-01-11 | A kind of displacement measurement sensor and method |
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| CN201910025156.8A CN109489565A (en) | 2019-01-11 | 2019-01-11 | A kind of displacement measurement sensor and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113124821A (en) * | 2021-06-17 | 2021-07-16 | 中国空气动力研究与发展中心低速空气动力研究所 | Structure measurement method based on curved mirror and plane mirror |
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|---|---|---|---|---|
| CN102566048A (en) * | 2012-01-17 | 2012-07-11 | 浙江大学 | Astigmatism-based sample axial drift compensating method and device |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
| CN209230530U (en) * | 2019-01-11 | 2019-08-09 | 南京华群光电技术有限公司 | A kind of displacement measurement sensor |
-
2019
- 2019-01-11 CN CN201910025156.8A patent/CN109489565A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102566048A (en) * | 2012-01-17 | 2012-07-11 | 浙江大学 | Astigmatism-based sample axial drift compensating method and device |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
| CN209230530U (en) * | 2019-01-11 | 2019-08-09 | 南京华群光电技术有限公司 | A kind of displacement measurement sensor |
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| Title |
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| 王臻等: "光电探测技术", 湖北长江出版集团等, pages: 125 - 126 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113124821A (en) * | 2021-06-17 | 2021-07-16 | 中国空气动力研究与发展中心低速空气动力研究所 | Structure measurement method based on curved mirror and plane mirror |
| CN113124821B (en) * | 2021-06-17 | 2021-09-10 | 中国空气动力研究与发展中心低速空气动力研究所 | Structure measurement method based on curved mirror and plane mirror |
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