CN108318889A - One kind being based on MEMS micromirror laser range sensor - Google Patents
One kind being based on MEMS micromirror laser range sensor Download PDFInfo
- Publication number
- CN108318889A CN108318889A CN201810369278.4A CN201810369278A CN108318889A CN 108318889 A CN108318889 A CN 108318889A CN 201810369278 A CN201810369278 A CN 201810369278A CN 108318889 A CN108318889 A CN 108318889A
- Authority
- CN
- China
- Prior art keywords
- mems micromirror
- laser
- module
- lens
- mems
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
The present invention relates to one kind being based on MEMS micromirror laser range sensor, including：Laser emission element, spot shaping element, MEMS micromirror module, emitter junction component receive camera lens, receiving module, connection member, control unit；Wherein, laser emission element emits laser, by shaping lens shaping, MEMS micromirror is adjusted by emitter junction component, launch spot is set to be irradiated to MEMS micromirror center, it improves degree of regulation and adjusts efficiency, connection member, emitting module and reception camera lens coordinate position assurance assembly precision by shape, are emitted by control unit, scanned and are received and realize laser ranging function.
Description
Technical field
The invention belongs to laser ranging technique fields, it particularly relates to be passed to a kind of based on MEMS micromirror laser ranging
Sensor.
Background technology
Laser scanning and ranging radar can be used in detecting the position of target, profile and speed, the application of range laser radar
Field is gradually being expanded, accurate measurement, navigator fix, safe avoidance, and starts to be applied to unmanned technology.Laser scanning thunder
Up to being to emit to form scanning cross-section by rotation sweep by the laser beam of transmitting, to test out the characteristic information of determinand.
Scanning laser radar has two-dimension scanning laser radar and 3-D scanning laser radar at present.Wherein it is based on MEMS micromirror
Laser range sensor fallen over each other to research and develop, which may be implemented small size, light weight, reduce power consumption and cost
On the basis of improve laser range sensor resolution ratio, by using control voltage and phase realize vibration mirror scanning, complete laser
The scanning of distance measuring sensor emits.MEMS micromirror is small, and light source reflective surface area is also small, and edge vibration arm can be reflective, will focus
Emit light source to adjust to MEMS micromirror center, avoids stray light from scanning ranging, it is therefore desirable to be carried out to MEMS micromirror module
Accurately adjusts and fastened.
Invention content
In order to solve the above technical problems, the present invention provides one kind being based on MEMS micromirror laser range sensor.
One kind being based on MEMS micromirror laser range sensor, which is characterized in that including：Laser emission element, spot shaping
Element, MEMS micromirror module, emitter junction component receive camera lens, receiving module, connection member, control unit；Wherein, laser
Transmitter unit transmitting laser is adjusted MEMS micromirror by emitter junction component, makes launch spot by shaping lens shaping
It is irradiated to MEMS micromirror center, improve degree of regulation and adjusts efficiency, connection member, emitting module and reception camera lens pass through shape
Shape coordinates position assurance assembly precision, is emitted by control unit, scanned and is received and realizes laser ranging function.
Preferably, the laser emission element is laser semiconductor laser, and spot shaping element is one group of lens and spreads out
Penetrate the assembly of optical element, lens are non-spherical lenses, diffraction optical element be Fresnel Lenses be used for laser light source into
Line focusing.
Preferably, the laser emission element is laser semiconductor laser, and spot shaping element is one group of lens and micro-
The assembly of lens array, lens are non-spherical lenses, and microlens array is that cylindrical lens or spherical lens are used for laser light
Source is focused and homogenizes.
Preferably, the MEMS micromirror module is that MEMS micromirror welding assembly on circuit boards or MEMS are micro-
The square combination body of mirror and mechanical structured member encapsulation.
Preferably, when MEMS micromirror module is the assembly of MEMS micromirror welding on circuit boards, emitter junction component is
30-60 ° of tapered ramp, there are the slit by light path and MEMS micromirror, slit and MEMS micromirror outline border shape precisions to match for wedge shape
It closes, by the freedom degree direction before and after front and back adjusting MEMS micromirror module, so that hot spot is irradiated to minute surface middle position and will not shine
Reflective mirror is mapped to external position, then the pressing plate one end for pushing down MEMS micromirror module is fastened on emitter junction component, the other end
MEMS micromirror module is pushed down by the screw that is screwed on of the threaded hole on pressing plate, the pressing plate is and emitter junction component bevel angle
Identical structural member, one end is there are the hole being fastened on emitter junction component, and there are the spiral shells for compressing MEMS micromirror module for one end
Pit.
Preferably, when MEMS micromirror module is the square combination body of MEMS micromirror and mechanical structured member encapsulation, emitter junction
The groove body that component is and MEMS micromirror module coordinates, bottom surface is plane, MEMS micromirror module is put into groove body, bottom surface and MEMS are micro-
Mirror bottom surface contacts, and the front and back freedom degree direction for adjusting MEMS micromirror module makes hot spot be irradiated to minute surface middle position and will not
Reflective mirror is irradiated to external position, has the slit across screw in emitter junction component groove body lateral edge, by screw by MEMS
Micromirror assemblies are fastenedly connected, and when MEMS micromirror module does not have reserved screwed hole, pass through emitting structural component groove body side
Screw hole mounting screw holds out against fixation to the realization of MEMS micromirror module.
Preferably, the form fit structure to match with emitting module and reception lens assembly realizes on connection member
By emitting module, receive camera lens tight fit guarantee range accuracy.
Description of the drawings
Fig. 1 is the laser range sensor concrete structure schematic diagram based on MEMS micromirror.
Fig. 2 is the laser range sensor transmitter unit diagrammatic cross-section based on MEMS micromirror in embodiment 1.
Figure (a) and (b) in Fig. 3 are the signal of two kinds of packing forms of MEMS micromirror in embodiment 1 and embodiment 2 respectively
Figure.
Fig. 4 is emitter junction component and pressure plate structure part schematic diagram in embodiment 1.
Fig. 5 is the structural schematic diagram of the emitter junction component in embodiment 2.
Fig. 6 is the structural schematic diagram of connection member.
Reference sign：
Laser emission element 1, emitter junction component 3, connection member 4, receives camera lens 5, receives mould MEMS micromirror module 2
Group 6, spot shaping element 7, pressing plate 8.
Specific implementation mode
With reference to specific embodiment to it is of the present invention it is a kind of based on MEMS micromirror laser range sensor do into
One step illustrates, but protection scope of the present invention is not limited to this.
Embodiment 1
As shown in fig. 1, a kind of based on MEMS micromirror laser range sensor, including：Laser emission element 1, hot spot is whole
Shape element 7, MEMS micromirror module 2, emitter junction component 3 receive camera lens 5, receiving module 6, connection member 4, control unit；Its
In, laser emission element 1 emits laser and MEMS micromirror is adjusted by emitter junction component 3 by shaping lens shaping,
So that launch spot is irradiated to MEMS micromirror center, improve degree of regulation and adjust efficiency, connection member 4, emitting module and connects
It receives camera lens 5 and coordinates position assurance assembly precision by shape, emitted by control unit, scanned and received and realize Laser Measuring
Away from function.
Laser emission element 1 is laser semiconductor laser.Spot shaping element 7 is one group of lens and diffraction optical element
Assembly or assembly for one group of lens and microlens array.Lens are non-spherical lenses, and diffraction optical element is phenanthrene
Nie Er lens are for being focused laser light source.Microlens array be cylindrical lens or spherical lens be used for laser light source into
It line focusing and homogenizes.
As shown in Fig. 2, Fig. 3 (a) and Fig. 4, MEMS micromirror module 2 is the combination of MEMS micromirror welding on circuit boards
Body.Emitter junction component 3 is 30-60 ° of tapered ramp, and for wedge shape there are the slit by light path and MEMS micromirror, slit and MEMS are micro-
Mirror outline border shape precision-fit makes hot spot be irradiated to minute surface by the freedom degree direction before and after front and back adjusting MEMS micromirror module 2
Middle position and reflective mirror is not irradiated to external position, 8 one end of pressing plate for pushing down MEMS micromirror module 2 is then fastened to transmitting
On structural member 3, the other end is pushed down MEMS micromirror module 2 by the screw that is screwed on of the threaded hole on pressing plate 8, and the pressing plate 8 is
Structural member identical with emitter junction component bevel angle, one end there are the hole being fastened on emitter junction component, one end there are for
Compress the threaded hole of MEMS micromirror module.
As shown in Figure 6, there is the form fit to match with emitting module and reception 5 component of camera lens on connection member 4
Structure is realized emitting module, receives the tight fit guarantee range accuracy of camera lens 5.
Embodiment 2
As shown in fig. 1, a kind of based on MEMS micromirror laser range sensor, including：Laser emission element 1, hot spot is whole
Shape element 7, MEMS micromirror module 2, emitter junction component 3 receive camera lens 5, receiving module 6, connection member 4, control unit；Its
In, laser emission element 1 emits laser and MEMS micromirror is adjusted by emitter junction component 3 by shaping lens shaping,
So that launch spot is irradiated to MEMS micromirror center, improve degree of regulation and adjust efficiency, connection member 4, emitting module and connects
It receives camera lens 5 and coordinates position assurance assembly precision by shape, emitted by control unit, scanned and received and realize Laser Measuring
Away from function.
Laser emission element 1 is laser semiconductor laser.Spot shaping element 7 is one group of lens and diffraction optical element
Assembly or assembly for one group of lens and microlens array.Lens are non-spherical lenses, and diffraction optical element is phenanthrene
Nie Er lens are for being focused laser light source.Microlens array be cylindrical lens or spherical lens be used for laser light source into
It line focusing and homogenizes.
As shown in Fig. 3 (b) and Fig. 5, MEMS micromirror module 2 is the square combination of MEMS micromirror and mechanical structured member encapsulation
Body.The groove body that emitter junction component 3 is and MEMS micromirror module 2 coordinates, bottom surface is plane, and MEMS micromirror module 2 is put into groove body,
Bottom surface and the contact of MEMS micromirror bottom surface, the front and back freedom degree direction for adjusting MEMS micromirror module 2 make hot spot be irradiated in minute surface
It entreats position and is not irradiated to reflective mirror with external position, have the slit across screw in 3 groove body lateral edge of emitter junction component, pass through
MEMS micromirror component is fastenedly connected by screw, when MEMS micromirror module 2 does not have reserved screwed hole, passes through emitting structural group
Part groove body side screw hole mounting screw holds out against fixation to the realization of MEMS micromirror module 2.
As shown in Figure 6, there is the form fit to match with emitting module and reception 5 component of camera lens on connection member 4
Structure is realized emitting module, receives the tight fit guarantee range accuracy of camera lens 5.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, however the present invention is not limited thereto.For those skilled in the art, in the essence for not departing from the present invention
In the case of refreshing and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (7)
1. one kind being based on MEMS micromirror laser range sensor, which is characterized in that including：Laser emission element, spot shaping member
Part, MEMS micromirror module, emitter junction component receive camera lens, receiving module, connection member, control unit；Wherein, laser is sent out
Unit transmitting laser is penetrated MEMS micromirror is adjusted by emitter junction component, launch spot is made to shine by shaping lens shaping
It is mapped to MEMS micromirror center, improve degree of regulation and adjusts efficiency, connection member, emitting module and reception camera lens pass through shape
Coordinate position assurance assembly precision, is emitted by control unit, scanned and received and realize laser ranging function.
2. according to claim 1 be based on MEMS micromirror laser range sensor, which is characterized in that the Laser emission list
Member is laser semiconductor laser, and spot shaping element is the assembly of one group of lens and diffraction optical element, and lens are aspheric
Face lens, diffraction optical element are Fresnel Lenses for being focused to laser light source.
3. according to claim 1 be based on MEMS micromirror laser range sensor, which is characterized in that the Laser emission list
Member is laser semiconductor laser, and spot shaping element is the assembly of one group of lens and microlens array, and lens are aspherical
Lens, microlens array are cylindrical lens or spherical lens for laser light source to be focused and homogenized.
4. according in claims 1 to 3 any one based on MEMS micromirror laser range sensor, which is characterized in that
The MEMS micromirror module is MEMS micromirror welding assembly on circuit boards or MEMS micromirror and mechanical structured member envelope
The square combination body of dress.
5. according to claim 4 be based on MEMS micromirror laser range sensor, which is characterized in that when MEMS micromirror module
When being the assembly of MEMS micromirror welding on circuit boards, emitter junction component is 30-60 ° of tapered ramp, and there are pass through light for wedge shape
The slit on road and MEMS micromirror, slit and MEMS micromirror outline border shape precision-fit, before front and back adjusting MEMS micromirror module
Freedom degree direction afterwards makes hot spot be irradiated to minute surface middle position and will not be irradiated to reflective mirror with external position, then will push down
Pressing plate one end of MEMS micromirror module is fastened on emitter junction component, and the other end is screwed on screw by the threaded hole on pressing plate will
MEMS micromirror module is pushed down, and the pressing plate is structural member identical with emitter junction component bevel angle, and there are be fastened on for one end
Hole on emitter junction component, there are the threaded holes for compressing MEMS micromirror module for one end.
6. according to claim 4 be based on MEMS micromirror laser range sensor, which is characterized in that when MEMS micromirror module
When being the square combination body that MEMS micromirror and mechanical structured member encapsulate, emitter junction component is the slot with the cooperation of MEMS micromirror module
Body, bottom surface are plane, MEMS micromirror module are put into groove body, bottom surface and the contact of MEMS micromirror bottom surface, front and back adjusting MEMS are micro-
The freedom degree direction of mirror module makes hot spot be irradiated to minute surface middle position, has across spiral shell in emitter junction component groove body lateral edge
MEMS micromirror component is fastenedly connected by the slit of nail by screw, when MEMS micromirror module does not have reserved screwed hole, is led to
It crosses emitting structural component groove body side screw hole mounting screw and fixation is held out against to the realization of MEMS micromirror module.
7. according to claim 5 or 6 be based on MEMS micromirror laser range sensor, which is characterized in that connection member
On have and emitting module and receive the form fit structure that matches of lens assembly and realize emitting module, receive camera lens and closely match
It closes and ensures range accuracy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810369278.4A CN108318889A (en) | 2018-04-23 | 2018-04-23 | One kind being based on MEMS micromirror laser range sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810369278.4A CN108318889A (en) | 2018-04-23 | 2018-04-23 | One kind being based on MEMS micromirror laser range sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108318889A true CN108318889A (en) | 2018-07-24 |
Family
ID=62894589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810369278.4A Pending CN108318889A (en) | 2018-04-23 | 2018-04-23 | One kind being based on MEMS micromirror laser range sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108318889A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110161512A (en) * | 2019-05-08 | 2019-08-23 | 深圳市速腾聚创科技有限公司 | Multi-line laser radar |
| CN110398748A (en) * | 2019-07-19 | 2019-11-01 | Oppo广东移动通信有限公司 | Distance-measuring device and equipment, method |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070176084A1 (en) * | 2006-01-27 | 2007-08-02 | E-Pin Optical Industry Co., Ltd. | In-line laser scanning unit with multiple light beams |
| CN201716455U (en) * | 2010-05-28 | 2011-01-19 | 北京工业大学 | Optical regulator of excimer laser micromachining system |
| JP2011095458A (en) * | 2009-10-29 | 2011-05-12 | Kyocera Mita Corp | Optical scanner and image forming apparatus equipped with the same |
| CN102112903A (en) * | 2008-06-10 | 2011-06-29 | 康宁股份有限公司 | Folded adjustable optical path in a frequency doubled semiconductor laser |
| WO2012015596A1 (en) * | 2010-07-30 | 2012-02-02 | Corning Incorporated | Optical package and method for aligning optical packages |
| CN102591010A (en) * | 2012-03-27 | 2012-07-18 | 电子科技大学 | One-dimensional optical scanner |
| CN102955250A (en) * | 2012-10-26 | 2013-03-06 | 无锡微奥科技有限公司 | Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror |
| CN103563362A (en) * | 2011-05-31 | 2014-02-05 | 雷模特斯有限公司 | An optical device |
| CN107643516A (en) * | 2017-09-27 | 2018-01-30 | 北京因泰立科技有限公司 | A kind of 3-D scanning laser radar based on MEMS micromirror |
-
2018
- 2018-04-23 CN CN201810369278.4A patent/CN108318889A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070176084A1 (en) * | 2006-01-27 | 2007-08-02 | E-Pin Optical Industry Co., Ltd. | In-line laser scanning unit with multiple light beams |
| CN102112903A (en) * | 2008-06-10 | 2011-06-29 | 康宁股份有限公司 | Folded adjustable optical path in a frequency doubled semiconductor laser |
| JP2011095458A (en) * | 2009-10-29 | 2011-05-12 | Kyocera Mita Corp | Optical scanner and image forming apparatus equipped with the same |
| CN201716455U (en) * | 2010-05-28 | 2011-01-19 | 北京工业大学 | Optical regulator of excimer laser micromachining system |
| WO2012015596A1 (en) * | 2010-07-30 | 2012-02-02 | Corning Incorporated | Optical package and method for aligning optical packages |
| CN103563362A (en) * | 2011-05-31 | 2014-02-05 | 雷模特斯有限公司 | An optical device |
| CN102591010A (en) * | 2012-03-27 | 2012-07-18 | 电子科技大学 | One-dimensional optical scanner |
| CN102955250A (en) * | 2012-10-26 | 2013-03-06 | 无锡微奥科技有限公司 | Optical scanning device based on MEMS (Micro-electromechanical Systems) micromirror |
| CN107643516A (en) * | 2017-09-27 | 2018-01-30 | 北京因泰立科技有限公司 | A kind of 3-D scanning laser radar based on MEMS micromirror |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110161512A (en) * | 2019-05-08 | 2019-08-23 | 深圳市速腾聚创科技有限公司 | Multi-line laser radar |
| CN110398748A (en) * | 2019-07-19 | 2019-11-01 | Oppo广东移动通信有限公司 | Distance-measuring device and equipment, method |
| CN110398748B (en) * | 2019-07-19 | 2022-05-31 | Oppo广东移动通信有限公司 | Distance measuring device, equipment and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI644116B (en) | Optical device | |
| US11592530B2 (en) | Detector designs for improved resolution in lidar systems | |
| CN108490420A (en) | A kind of micro mirror scanning optics | |
| CN112585488B (en) | Receiving optical system, laser receiving module, laser radar and light modulation method | |
| CN112596230B (en) | Light path system for photoelectric tracking active chromatographic illumination | |
| CN110873867A (en) | Laser radar system based on MEMS scanning mirror | |
| TW202041883A (en) | Mounting configurations for optoelectronic components in lidar systems | |
| CN108318889A (en) | One kind being based on MEMS micromirror laser range sensor | |
| US20200150418A1 (en) | Distance measurement device and mobile body | |
| US20180188370A1 (en) | Compact distance measuring device using laser | |
| CN105675633A (en) | Calibration device of X-ray framing camera | |
| CN110658527A (en) | Laser radar, autonomous mobile robot and intelligent vehicle | |
| US11509822B2 (en) | Imaging device and imaging method | |
| CN111965659B (en) | Distance measurement system, method and computer readable storage medium | |
| JP2022522858A (en) | Optical system of lidar transmitter and receiver | |
| CN208044069U (en) | One kind being based on MEMS micromirror laser range sensor | |
| CN114779267B (en) | Laser ranging system and laser ranging device | |
| CN208588825U (en) | Laser radar, autonomous mobile robot and intelligent vehicle | |
| CN217879628U (en) | Emitter, solid-state laser radar and detection system | |
| US20220179050A1 (en) | Integrated transmitter and receiver module for lidar system | |
| CN209803333U (en) | Three-dimensional laser radar device and system | |
| US20210199774A1 (en) | Method and system of adjusting prism lens in lidar system | |
| CN109489565A (en) | A kind of displacement measurement sensor and method | |
| EP3358391A1 (en) | Optical system for assisting image positioning | |
| CN217404605U (en) | Mirror adjusting device and mirror adjusting assembly |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |