CN109487236A - Fluid penetrable component - Google Patents
Fluid penetrable component Download PDFInfo
- Publication number
- CN109487236A CN109487236A CN201710811497.9A CN201710811497A CN109487236A CN 109487236 A CN109487236 A CN 109487236A CN 201710811497 A CN201710811497 A CN 201710811497A CN 109487236 A CN109487236 A CN 109487236A
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- China
- Prior art keywords
- fluid penetrable
- oxide film
- anode oxide
- fluid
- component
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Fuel Cell (AREA)
Abstract
A kind of fluid penetrable component includes: supporting mass, and its underpart is provided with the support plate with fluid penetrable through-hole；With the fluid penetrable anode oxide film being arranged on support plate.
Description
Technical field
The fluid penetrable component that the present invention relates to a kind of for allowing fluid to pass through and spreading fluid uniformly.
Background technique
A kind of fluid penetrable component be configured to allow for fluid (gas or liquid) pass through and for the diffusion of fluid, point
From, purification, filtering, analysis, reaction the purpose of.
In general, being formed with a large amount of fluid penetrable holes in fluid penetrable component.In order to make fluid pass through fluid
Permeable members are simultaneously evenly distributed, it is preferred that the inner width in hole is small and the quantity in hole is big.But from manufacture angle and
Hole is formed to have small inner width and there are many difficulties by speech.
An example as above-described fluid penetrable component, it is known that a kind of diffuser (spray head) makes gas
It is evenly distributed on the glass plate being arranged in vacuum chamber, for manufacturing liquid crystal display (LCD) or semiconductor wafer.Liquid crystal
Display (LCD) is a kind of not light-emitting component, utilizes the liquid crystal sprayed between array substrate and colored filter substrate
Property and obtain image effect.On the transparency glass plate made of the materials such as such as glass Multiple depositions, patterning and
Film is etched to manufacture each of array substrate and colored filter substrate.By by reaction material and source material in gas
Be directed under body state in vacuum chamber in the case where realizing deposition process, introduced gas pass through diffuser (spray head) and
It is deposited on the glass plate for being installed on and heating the substrate on (susceptor), to form film.
A kind of diffuser (spray head) as above-mentioned fluid penetrable component is disclosed in Korean Patent No.0653442.
As shown in Figure 1, the reaction gas being introduced by leader 18 passes through (penetrating) diffuser 15 and is sprayed
To being installed on the glass plate or chip heated the substrate on S.
But traditional diffuser has problems in that, the hole formed in diffuser can not be uniform by reaction gas
Ground is ejected on glass plate.In order to alleviate the problem, it is contemplated that using the method for the inner width for reducing hole and the quantity for increasing hole.
But this method is limited for manufacture angle.
[existing technical literature]
[patent document]
(patent document 1): Korean Patent No.0653442
Summary of the invention
In view of the above problem, it is an object of the present invention to provide a kind of fluid penetrable components comprising Yi Zhongneng
Enough realize the fluid penetrable anode oxide film of fluid uniformly spread.
According to an aspect of the present invention, a kind of fluid penetrable component is provided, comprising: supporting mass is set in its underpart
It is equipped with the support plate with fluid penetrable through-hole；With the fluid penetrable anode oxide film being arranged on support plate.
In the fluid penetrable component, fluid penetrable anode oxide film can have the pore of multiple regular arrangements,
The pore by make it is metal anodised and formed and be configured to vertically penetrate fluid penetrable anode oxide film.
In the fluid penetrable component, fluid penetrable anode oxide film may include porous layer and barrier layer, this is more
Aperture layer is formed and making metal anodised and pore with regular arrangement, the barrier layer be formed in below porous layer so that
The lower end closed of pore could be formed with permeability hole in fluid penetrable anode oxide film, which has bigger than pore
Inner width and vertically penetrate fluid penetrable anode oxide film.
In fluid penetrable component, fluid penetrable anode oxide film may include by making metal base anodization simultaneously
And it then removes the metal base and is formed.
In the fluid penetrable component, support plate can have reticular structure.
In the fluid penetrable component, support plate may be logically divided into multiple regions, and fluid penetrable anode oxide film can
To install in each area.
In the fluid penetrable component, supporting mass can be made of metal.
In the fluid penetrable component, through-hole can have corresponding with the outer shape of fluid penetrable anode oxide film
Shape, and fluid penetrable anode oxide film can be supported in the edge portions of limited hole.
The present invention can achieve following effects:
Fluid can be made equably to spread.It, can be inside supporting mass easily in the case where not needing separate part
Fluid penetrable anode oxide film is set.Due to the reticular structure of support plate, can while allowing fluid to pass through branch
Hold fluid penetrable anode oxide film.Since supporting mass is made of metal, thus the supporting mass may be used as electrode.Across fluid
The fluid of permeable anode oxidation film can successfully flow and the obstruction of unsupported plate.
Detailed description of the invention
Fig. 1 be include traditional fluid penetrable component (diffuser) vacuum chamber cross-sectional view.
Fig. 2 is to show the fluid penetrable component of first preferred embodiment according to the present invention to be mounted on the indoor shape of vacuum
The cross-sectional view of state.
Fig. 3 is to show the partial cut-away perspective view on the top of vacuum chamber shown in Fig. 2.
Fig. 4 is the cross-sectional view of fluid penetrable component shown in Fig. 2.
Fig. 5 is to show the perspective view of supporting mass.
Fig. 6 is to show the perspective view of the fluid penetrable component including fluid penetrable anode oxide film.
Fig. 7 A to Fig. 7 C is to show the enlarged partial sectional view of the modification of fluid penetrable anode oxide film.
Fig. 8 A to Fig. 8 C is to show the plan view of the modification of support plate.
Fig. 9 is to show the plane for the state that fluid penetrable anode oxide film is arranged on the support plate with large area
Figure and front view.
Figure 10 is to show the fluid penetrable component of the second preferred embodiment according to the present invention to be installed in vacuum chamber
State cross-sectional view.
Figure 11 is the cross-sectional view of the fluid penetrable component of third preferred embodiment according to the present invention.
Specific embodiment
Detailed description of the present invention preferred embodiment below with reference to accompanying drawings.In conjunction with attached drawing, from preferred reality given below
Applying will its obvious advantage, feature and its implementation in the description of example.But the invention is not limited to described herein
Embodiment, but can realize in a number of different manners.Embodiment disclosed herein is provided to ensure open sufficiently complete
It is whole and ensure theory of the invention by be fully conveyed in related fields with general knowledge personnel.The present invention is only by right
It is required that being defined.In the description, identical appended drawing reference indicates identical component.
Terms used herein are provided for the description of embodiment, but are not intended to limit the present invention.In this specification
In, singular includes plural form, unless expressly stated.Term " includes " or "comprising" in this article refer to here
Mentioned component, step, operation or element is not precluded presence or is attached with one or more of the other component, step, operation
Or element.In addition, the appended drawing reference that sequence provides to specifications is not necessarily limited to the sequence.
Below with reference to describing to be disclosed herein as the cross-sectional view and/or plan view that show best illustration figure of the invention
Embodiment.In the accompanying drawings, film and the thickness in region are exaggerated to effectively description technique content.Therefore, the form of exemplary diagram
It can be changed according to manufacturing technology and/or tolerance.For this purpose, the embodiment of the present invention is not limited to specific shape shown in figure
Formula, but may include being changed according to the form that manufacturing process generates.Correspondingly, region shown in figure has general spy
Sign.The shape in region shown in figure only indicates the particular form of element area, and does not limit the scope of the invention.
In the description of different embodiments, for convenience's sake, even if in different embodiments, for realizing identical function
Component will also give identical title and identical appended drawing reference.In addition, for configuration described in other embodiments and grasping
Make, description will omit.
As shown in Fig. 2 to Fig. 9, the fluid penetrable component 100 of first preferred embodiment includes: supporting mass according to the present invention
110, its underpart is provided with the support plate 115 with fluid penetrable through-hole 117；With the fluid being arranged on support plate 115
Permeable anode oxidation film 300.
Fig. 2 to through-hole 117 shown in Fig. 9, fluid penetrable anode oxide film 300, pore 310 and permeability hole 350 ruler
Very little and thickness is exaggerated, with effectively description technique content.
In the present embodiment, fluid penetrable component 100 is mounted in the diffuser in vacuum chamber 500, such as Fig. 2 and Fig. 3
It is shown.
Mounting bracket 400 is installed in the inside upper part of vacuum chamber 500.The lower part of mounting bracket 400 curves inwardly, and shape
As horizontally extending.The flange 125 of fluid penetrable component 100 is arranged on the lower part of mounting bracket 400 and is supported by.
Fluid penetrable component 100 is used for the reaction gas infiltration (passing through) for making to introduce by gas guide portion point 510, and
And make reaction gas towards chip 520 or the glass plate injection being placed on the upper surface for heating the substrate 530.It is mounted on vacuum chamber
Diffuser in 500 is known in the technology for including the above-described prior art.Therefore, thereof will be omitted it to retouch in detail
It states.
In the present embodiment, fluid penetrable component 100 is shown as the system with cylindrical shape, for semiconductor wafer
It makes.In order to manufacture liquid crystal display, it is preferable that fluid penetrable component 100 has rectangular shape.Fluid penetrable component
100 shape can change according to installation environment and condition.
As shown in Figures 2 to 6, fluid penetrable component 100 includes: supporting mass 110, is equipped with support plate 115 in its underpart,
And upper part is opened；With the fluid penetrable anode oxide film 300 being arranged on support plate 115.
As shown in figure 5, supporting mass 110 is formed as the cylindrical shape of top unlatching.As shown in Figures 2 to 6, supporting mass 110
Including with fluid penetrable through-hole 117 support plate 115, be connected to what the periphery of support plate 115 and being formed as upwardly extended
Side wall 120 and the flange 125 extended horizontally outward from the upper end of side wall 120.
Support plate 115 is formed as reticular structure, and including multiple through-holes 117 extended vertically.Preferably, through-hole 117
Inner width be greater than fluid penetrable anode oxide film 300 pore 310.Through-hole 117 is connected to pore 310.Therefore, it is wearing
The reaction gas uniformly spread when crossing pore 310 can be sprayed by through-hole 117 towards chip 520.
Fluid penetrable anode oxide film 300 is disposed on the upper surface of the support plate 115 with above-mentioned through-hole 117 simultaneously
It is supported by it.
Due to reticular structure, support plate 115 can allow fluid while supporting fluid penetrable anode oxide film 300
It passes through.More specifically, support plate 115 is used to that reaction gas to be allowed more easily uniformly to diffuse through pore 310, and use
In bearing fluid penetrable anode oxide film 300, thus will not due to reaction gas pressure and downwards dash forward expansion come.
Support plate 115 with reticular structure can be formed in many different forms.For example, as shown in Figure 8 A, support plate
115a can be formed to have rectangular through-hole 117a.As shown in Figure 8 B, support plate 115b can be formed to have parallel arrangement
Long rectangular through-hole 117b.As shown in Figure 8 C, support plate 115c can be formed to have the through-hole 117c of similar parallelogram.
The side wall 120 for being connected to the outer periphery of support plate 115 is formed as hollow cylindrical shape, and opens at an upper portion thereof
Mouthful.
Fluid penetrable anode oxide film 300 can be inserted by the top of the opening of side wall 120, and can be arranged in
On the upper surface of support plate 115 and it is supported by it.Fluid penetrable anode oxide film 300 is inserted in supporting mass 110, and by
Side wall 120 surrounds.Therefore, fluid penetrable anode oxide film 300 can be easily mounted in supporting mass 110, without
Individual component is for installing fluid penetrable anode oxide film 300.
It is formed in the top of side wall 120 with right angle outwards song and horizontal-extending flange 125.Such as Fig. 2 and Fig. 3 institute
Show, flange 125 is arranged on the upper surface of the curved lower of mounting bracket 400 and is supported by it.Therefore, easily by supporting mass
110 (i.e. fluid penetrable components 100) are mounted on the lower section of the gas guide portion in vacuum chamber 500 point 510.Supporting mass 110 by
Metal material is made, and may be used as electrode.
It is described below in insertion supporting mass 110 and is arranged in the stream on the upper surface of support plate 115 and being supported by it
Body permeable anode oxidation film 300.
In the present embodiment, fluid penetrable anode oxide film 300 is shown as with disc-like shape, with support plate 115
Shape be consistent.
Fluid penetrable anode oxide film 300 is formed to have the transverse width smaller than support plate 115, so that fluid can seep
Saturating anode oxide film 300 be inserted by the top of the opening of side wall 120 and be placed on the upper surface of support plate 115 and by
It is supported.
A variety of modifications of fluid penetrable anode oxide film 300 are described now with reference to Fig. 7 A to 7C.
By making metal base anodization and then removing the metal base forms fluid penetrable anode oxide film
300.The metal base can be aluminium (Al), titanium (Ti), tungsten (W), zinc (Zn) etc., wherein particularly preferred aluminium (Al).Made using aluminium
There is chemical formula Al for the fluid penetrable anode oxide film 300 that substrate is formed2O3.Fluid penetrable anode oxide film 300 has
Insulating property (properties).
Fluid penetrable anode oxide film 300 shown in Fig. 2 to Fig. 4 and Fig. 7 A has the pore 310 of multiple regular arrangements,
The pore 310 is formed and making metal anodised, and is configured to vertically penetrate fluid penetrable anode oxide film 300.
In other words, fluid penetrable anode oxide film 300 is only formed by the porous layer 320 with pore 310.
Fluid penetrable is formed by making metal anodised and subsequent not only removal metal but also removal barrier layer 380
Anode oxide film 300.Therefore, pore 310 vertically penetrates fluid penetrable anode oxide film 300.Since pore 310 is fluid
Permeable, therefore, reaction gas equably can be spread and be sprayed by pore 310.
The inner width of pore 310 can be within the scope of several nm (nanometer) to 300nm.
The metal of substrate as fluid penetrable anode oxide film 300 may include aluminium.In other words, it is preferable that gold
Category can be aluminum or aluminum alloy.Preferably, fluid penetrable anode oxide film 300 can be by making aluminium that is anodized and being formed
Oxidation film.
As shown in Figure 7 B, fluid penetrable anode oxide film 300 includes porous layer 320 and barrier layer 380, porous layer 320
Is formed and making metal anodised and pore 310 with regular arrangement, barrier layer 380 is formed in below porous layer 320
So that the lower end closed of pore 310.Permeability hole 350 can be formed in fluid penetrable anode oxide film 300, had than thin
The big inner width in hole 310, and vertically penetrate fluid penetrable anode oxide film 300.
In the fluid penetrable anode oxide film 300 shown in Fig. 7 B, multiple pores 310 are formed as vertically extending.Carefully
The upper end in hole 310 is formed as penetrating the upper surface of fluid penetrable anode oxide film 300, the i.e. upper surface of porous layer 320.Pore
It is closed by barrier layer 380 310 lower end.
The permeability hole 350 for vertically penetrating fluid penetrable anode oxide film 300 is formed as penetrating porous layer 320 and stop
Both layers 380.Permeability hole 350 is formed as multiple.
Pore 310 is located between two adjacent permeability holes 350.Preferably, the spacing between two adjacent pores 310
Spacing between less than two adjacent permeability holes 350.The inner width of permeability hole 350 is greater than the inner width of pore 310.Infiltration
Hole 350 is formed as parallel with pore 310, to vertically extend.
Permeability hole 350 is formed by etching.Permeability hole 350 can have one from fluid penetrable anode oxide film 300
The constant inner width in the other end of a end face to fluid penetrable anode oxide film 300.The inner width of permeability hole 350 can
In the range of 300nm (nanometer) to number mm (millimeter).
Referring to Fig. 7 C, fluid penetrable anode oxide film 300 by by make it is metal anodised and 380 groups of barrier layer being formed
At.It could be formed with the permeability hole 350 for vertically penetrating fluid penetrable anode oxide film 300 in barrier layer 380.
In order to manufacture the liquid crystal display with large area, the support plate 115 of fluid penetrable component 100 is formed to have
Large area corresponding with liquid crystal display area.As shown in figure 9, multiple fluid penetrable anodes can be installed on support plate 115
Oxidation film 300.
In other words, as shown in figure 9, support plate 115 is divided into multiple regions when support plate 115 has large area.Stream
Body permeable anode oxidation film 300 can be placed on each region of fluid penetrable anode oxide film 300 and be supported by it.
In fig. 10 it is shown that the second embodiment of the present invention.In a second embodiment, fluid penetrable component 100a can
To be attached to the lower part of traditional diffuser 450, which allows fluid through apertures 455 and spreads fluid.It is real with first
Apply example difference, in a second embodiment, the not set flange in the top of the side wall 120a of fluid penetrable component 100a.Side wall
The upper end of 120a can be fixed to the lower part of diffuser 450 by welding etc..
In fig. 11 it is shown that the third embodiment of the present invention.In the third embodiment, it is formed in support plate 115a
Through-hole 118a has shape corresponding with the outer shape of fluid penetrable anode oxide film 300.Fluid penetrable anodic oxidation
Film 300 is supported in the edge portions of limited hole 118a.In other words, be formed with multiple through-holes 117 first implement
Example is different, is simply formed with the through-hole 118a extended vertically in the third embodiment, to correspond to fluid penetrable anode
The outer shape of oxidation film 300.Therefore, it can successfully be flowed across the reaction gas of fluid penetrable anode oxide film 300,
Without making reacting gas stream be supported the obstruction of plate 115a.
As shown in figure 11, the upper surface of support plate 115a extends internally from the side wall 120a level of supporting mass 110a, and
Then extend downwardly in stepwise manner.Therefore, inwardly and downwardly inclined inclined-plane 119a is formed, and is formed from inclined-plane 119a's
The step surface 116a that lower end level extends internally.Fluid penetrable anode oxide film 300 is placed on step surface 116a and by it
Bearing.The peripheral part of the lower surface of fluid penetrable anode oxide film 300 is supported by step surface 116a.Since there are inclined-planes
Fluid penetrable anode oxide film 300 can be easily located on step surface 116a by 119a.
The hook 121a projected upwards is formed on the upper surface of the support plate 115a of adjacent sidewall 120a.Pressure member
122a is mounted to be spaced apart with the upper surface of support plate 115a.Hook 121a is installed to pressure member 122a, thus by pressure structure
Part 122a is fixed to support plate 115a.Therefore, pressure member 122a applies pressure to the upper surface of fluid penetrable anode oxide film 300
Peripheral part.As a result, fluid penetrable anode oxide film 300 is fixed between step surface 116a and pressure member 122a.This
The prominent expansion downwards of fluid penetrable anode oxide film 300 is prevented.
Although the preferred embodiment of the present invention is hereinbefore described, the present invention is not limited to previous embodiment.No
It says and explains, without departing substantially from spirit and scope defined by the claims in the present invention, those skilled in the art will
A variety of changes and modification can be made.
Claims (9)
1. a kind of fluid penetrable component, comprising:
Supporting mass is provided with the support plate with fluid penetrable through-hole in its underpart；With
The fluid penetrable anode oxide film being arranged on support plate.
2. fluid penetrable component as described in claim 1, wherein fluid penetrable anode oxide film has multiple regular cloth
The pore set, these pores are formed and making metal anodised, and are configured to vertically penetrate fluid penetrable anodic oxygen
Change film.
3. fluid penetrable component as described in claim 1, wherein fluid penetrable anode oxide film includes porous layer and resistance
Barrier, porous layer by make it is metal anodised and with regular arrangement pore and formed, barrier layer is formed in porous layer
Lower section so that pore lower end closed；And
It is formed with permeability hole in fluid penetrable anode oxide film, permeability hole has the inner width bigger than pore and vertical
Ground penetrates fluid penetrable anode oxide film.
4. fluid penetrable component as described in claim 1, wherein fluid penetrable anode oxide film includes by making metal
Anodization and the barrier layer formed, and
The permeability hole for vertically penetrating fluid penetrable anode oxide film is formed in barrier layer.
5. fluid penetrable component as described in claim 1, wherein fluid penetrable anode oxide film is by making metal base
It anodization and then removes the metal base and is formed.
6. fluid penetrable component as described in claim 1, wherein support plate has reticular structure.
7. fluid penetrable component as described in claim 1, wherein support plate is divided into multiple regions, and fluid penetrable
Anode oxide film is installed in each area.
8. fluid penetrable component as described in claim 1, wherein supporting mass is made of metal.
9. fluid penetrable component as described in claim 1, wherein through-hole has outer with fluid penetrable anode oxide film
The corresponding shape of portion's shape, and
Fluid penetrable anode oxide film is supported in the edge portions of limited hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710811497.9A CN109487236A (en) | 2017-09-11 | 2017-09-11 | Fluid penetrable component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710811497.9A CN109487236A (en) | 2017-09-11 | 2017-09-11 | Fluid penetrable component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109487236A true CN109487236A (en) | 2019-03-19 |
Family
ID=65687464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710811497.9A Pending CN109487236A (en) | 2017-09-11 | 2017-09-11 | Fluid penetrable component |
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| Country | Link |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060032586A1 (en) * | 2003-05-09 | 2006-02-16 | Applied Materials, Inc. | Reducing electrostatic charge by roughening the susceptor |
| CN106853341A (en) * | 2015-12-09 | 2017-06-16 | 普因特工程有限公司 | The anode oxide film of fluid penetrable and the fluid penetrable body with anode oxide film |
-
2017
- 2017-09-11 CN CN201710811497.9A patent/CN109487236A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060032586A1 (en) * | 2003-05-09 | 2006-02-16 | Applied Materials, Inc. | Reducing electrostatic charge by roughening the susceptor |
| CN106853341A (en) * | 2015-12-09 | 2017-06-16 | 普因特工程有限公司 | The anode oxide film of fluid penetrable and the fluid penetrable body with anode oxide film |
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