CN109483047B - Laser beam terminal pointing detection and correction method and laser processing device - Google Patents
Laser beam terminal pointing detection and correction method and laser processing device Download PDFInfo
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- CN109483047B CN109483047B CN201811360893.5A CN201811360893A CN109483047B CN 109483047 B CN109483047 B CN 109483047B CN 201811360893 A CN201811360893 A CN 201811360893A CN 109483047 B CN109483047 B CN 109483047B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/042—Automatically aligning the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention relates to a laser beam terminal pointing detection and correction method and a laser processing device, which are used for solving the problem that in the laser processing process, due to long-time work of laser equipment, pointing deviation of laser beams is generated at a processing terminal due to reasons such as pointing deviation of laser beams emitted by a laser, temperature drift and time drift of a vibrating mirror, and the like, so that the position precision of a processed graph is influenced. According to the optical path conjugation principle, the spatial position of the detection and correction device pointed by the laser beam terminal is arranged and calibrated, so that the offset of the light spot position in the visual field of the detection and correction device is equal to the offset of the actual laser processing light spot position, and the light spot offset condition of the laser processing surface can be represented by the light spot position of the detection device; the laser surface machining method can be widely applied to the aspects of laser fine surface manufacturing, hole making and fine cutting in the fields of aerospace, automobiles, 3C, photoelectrons, molds and the like in China.
Description
Technical Field
The invention belongs to the technical field of laser processing, and particularly relates to a laser beam terminal pointing detection and correction method and a laser processing device.
Background
Laser machining is an emerging special machining approach and is a necessary alternative to traditional manufacturing approaches. The material is cut, welded, surface treated, punched, micro machined and other steps based on the interaction between laser beam and matter. The conventional laser processing device mainly comprises a laser light source for generating laser beams and a galvanometer system for guiding the laser beams to a workpiece to be processed, wherein the galvanometer system comprises a control system and two groups of quick reflectors. In the processing process, the pointing instability of the laser beam can cause the position precision of laser processing to be reduced, at present, because the existing domestic equipment belongs to some laser processing equipment with lower technical content such as marking, cutting and the like, the pointing precision requirement of the laser is not high, however, if the laser processing is applied to high-precision processing and manufacturing, the pointing instability of the laser beam has great influence on the processing precision, the pointing stability of the laser determines the processing precision of the fine laser manufacturing equipment, and therefore the pointing stability of the laser beam is one of the core problems which need to be solved by various types of laser high-precision manufacturing equipment.
The main reasons causing unstable laser beam pointing include laser beam jitter and temperature drift and time drift of the galvanometer system after long-time operation. At present, for a few high-precision laser processing equipment, the main method for solving the problem is to perform off-line measurement from the front end of a laser beam, namely, to perform off-line measurement by using tools such as a beam quality analyzer before the start of processing, and to correct the measurement according to the result after the measurement is completed. And after the correction is finished from the front end of the laser, the influence of the external environment and subsequent optical devices on the laser beam in the processing process cannot be guaranteed.
Disclosure of Invention
The invention provides a laser beam terminal pointing detection and correction method and a laser processing device, aiming at solving the problems that offline front-end measurement cannot monitor feedback correction on line and cannot ensure the influence of an external environment and subsequent optical devices on a laser beam in a processing process.
The technical scheme of the invention is to provide a laser beam terminal pointing detection and correction method, which comprises the following steps:
the method comprises the following steps: splitting light;
adopting a light splitting element to split laser beams emitted from the galvanometer system into laser processing beams and laser detection beams;
step two: collecting laser detection beams and calibrating to obtain target light spots;
2.1, introducing a vision system for collecting laser detection beams and determining the positions of the light splitting element and the vision system according to an optical path conjugation principle;
2.2, when the light beam pointing is stable, the vision system collects the laser detection light beam to obtain the target light spot position;
step three: collecting real-time light spots;
the method comprises the steps that a vision system collects laser detection beams in a machining process on line to obtain the position of a real-time light spot;
step four: obtaining the offset of a laser processing beam;
comparing the position of the real-time light spot with the position of the target light spot obtained in the third step; if the positions of the real-time light spot and the target light spot are not consistent, calculating the position deviation of the real-time light spot and the target light spot through an image processing algorithm to obtain the offset of the laser processing light beam; if the positions of the real-time light spot and the target light spot are not deviated, continuing to process;
step five: feedback control;
and the visual system feeds the offset obtained in the step four back to the mirror vibration system, and the mirror vibration system adjusts the light path by adjusting the internal reflector according to the received offset, so that the pointing correction of the laser beam is realized.
Further, the method also comprises the step six: and identifying and checking the corrected laser beams, acquiring the laser detection beams in the processing process after correction by a vision system to obtain the corrected spot positions, and repeating the fourth step and the fifth step.
Furthermore, the positions of the light splitting element and the vision system are adjusted in the second step, so that the pointing offset of the laser terminal is equal to the offset of the laser beam terminal pointing to the light spot in the target surface of the vision system.
And further, in the step five, the galvanometer system respectively adjusts the offset of two electric reflectors which are spatially distributed in the galvanometer according to the received offset so as to realize light path adjustment. The offset can be expressed as (delta X, delta Y), the vibrating mirror system is internally composed of two electric reflectors which are distributed in space, one reflector can realize scanning in the X direction, the other reflector can realize scanning in the Y direction, and the vibrating mirror system adjusts the offset of the first reflector and the second reflector according to the received offset (delta X, delta Y) to realize light path adjustment.
Further, the vision system is a CCD camera or a CMOS camera.
Further, the light splitting element is a light splitter.
The invention also provides a laser processing device, which comprises a laser light source and a galvanometer system, and is characterized in that: the laser machining device further comprises a spectroscope and a vision system, wherein the spectroscope is located in the light emitting optical path of the galvanometer system, the vision system and the workpiece to be machined are respectively located at the terminals of the two light emitting optical paths of the spectroscope, and the optical paths of the two light emitting optical paths are equal.
Further, in order to optimize space, a reflective mirror is included between the beam splitter and the vision system.
Further, the vision system is a high-resolution high-frame-rate CCD camera or a COMS camera.
Furthermore, the galvanometer system comprises two electric reflectors which are distributed in space, wherein one reflector can realize scanning in the X direction, and the other reflector can realize scanning in the Y direction.
The invention has the beneficial effects that:
1. the invention realizes correction from a light beam terminal, comprehensively considers various factors such as the laser, the external environment of a light path, particularly the temperature drift time drift of a vibrating mirror and the like, and can more accurately represent the direction of processing laser, namely improve the position precision during laser processing.
2. The invention can be adjusted on line in real time, and ensures that the whole processing process is processed with constant precision.
3. The beam pointing correction precision of the invention is less than or equal to 3um, and the invention can be widely applied to the laser fine surface manufacturing, hole making and fine cutting in the fields of aerospace, automobiles, 3C, photoelectrons, molds and the like in China.
Drawings
FIG. 1 is a block diagram of a method for detecting and calibrating a target object according to the present invention;
FIG. 2 is a schematic diagram of the positional relationship between the beam splitter and the vision system in the embodiment;
the reference numbers in the figures are: 1-vision system, 2-reflector, 3-spectroscope, 4-annular indicating light source.
Detailed Description
The invention is further described with reference to the following figures and specific embodiments.
The invention relates to a laser beam terminal pointing detection and correction method, which is used for solving the problem that in the laser processing process, due to the long-time work of laser equipment, pointing deviation of laser beams at a processing terminal is caused by the reasons of pointing deviation of laser beams, temperature drift and time drift of a vibrating mirror and the like, so that the position precision of a processed graph is influenced. The spatial position of the detection and correction device pointed by the laser beam terminal is arranged and calibrated according to the optical path conjugation principle, so that the offset of the spot position in the visual field of the detection and correction device is equal to the offset of the actual laser processing spot position, and the spot offset condition of the laser processing surface can be represented by the spot position of the detection device.
As can be seen from fig. 1, the detection and correction process of the present embodiment is as follows:
and S1, dividing the laser beam emitted from the galvanometer system into a laser processing beam and a laser detection beam by using a light splitting element.
S2, determining the spatial position of the vision system according to the optical path conjugation principle, specifically as shown in fig. 2, making L1+ L2 equal to L, that is, the pointing offset distance of the laser terminal is equal to the offset distance of the light spot in the CCD target surface during the detection and correction of the terminal pointing of the laser beam, so that the centroid coordinate of the light spot projected onto the target surface by the transmitted detection laser beam is used for real-time detection to obtain the pointing offset of the processing beam.
And S3, when the light beam pointing is stable, the vision system collects the laser detection light beam to obtain the target spot position.
And S4, the vision system collects laser detection beams transmitted by the spectroscope and reflected by the reflector in the processing process on line to obtain the position of the real-time light spot.
S5, comparing the position of the real-time light spot with the position deviation of the target light spot; if no deviation exists, the laser equipment normally processes;
and S6, if the position of the real-time light spot has deviation from the position of the target light spot, the visual system calculates and obtains the deviation quantity (delta X and delta Y) through an image processing algorithm.
S7, the obtained offset (delta X, delta Y) is fed back to the mirror vibrating system by the vision system, the mirror vibrating system is internally composed of two electric reflectors which are distributed spatially, one reflector can realize scanning in the X direction, the other reflector can realize scanning in the Y direction, and the mirror vibrating system adjusts the offset of the first reflector and the second reflector according to the received offset (delta X, delta Y) to realize light path adjustment.
And S8, after the correction is finished, the vision system collects the corrected laser beam again, the corrected light spot is identified and checked, if the corrected light spot is checked to be qualified, the light spot is directly processed, and if the corrected light spot is not checked to be qualified, the steps S6 to S7 are repeated.
The laser processing device capable of realizing the detection and correction process mainly adds a detection and correction device on the existing laser processing device, and mainly comprises a laser light source, a galvanometer system, an annular indication light source 4, a spectroscope 3 and a visual system 1, wherein the visual system is a high-resolution high-frame-frequency CCD camera or a COMS camera in the embodiment, the spectroscope 3 is positioned in a light-emitting light path of the galvanometer system, the visual system 1 and a workpiece to be processed are respectively positioned at the terminals of two light-emitting light paths of the spectroscope 3, the light paths of the two light-emitting light paths are equal, in order to optimize space in the embodiment, a reflector 2 is also arranged between the spectroscope 3 and the visual system 1, the visual system 1 is positioned in a transmission light path of the spectroscope 3, and the workpiece to be processed is.
The mass center coordinate of a light spot projected on a target surface by a working laser beam transmitted by a 1030nm spectroscope is detected in real time, 2.2umCCD is selected as a visual system, the optical length from the visual system to the 1030nm spectroscope meets the relation of 100mm (L1) +210mm (L2) ═ 310mm (L), the pointing deviation of the laser beam is obtained, the pointing deviation in a period of time (determined according to a system calibration timing test) is sent to a vibrating mirror system for beam pointing correction, and the beam pointing correction precision is less than or equal to 3um through optical simulation.
Claims (5)
1. A laser beam terminal pointing detection and correction method is characterized by comprising the following steps:
the method comprises the following steps: splitting light;
adopting a light splitting element to split laser beams emitted from the galvanometer system into laser processing beams and laser detection beams;
step two: collecting laser detection beams and calibrating to obtain target light spots;
2.1, introducing a vision system for collecting laser detection beams and determining the positions of the light splitting element and the vision system according to an optical path conjugation principle; adjusting the positions of the light splitting element and the visual system to enable the pointing offset of the laser terminal to be equal to the offset of a light spot in the target surface of the visual system pointed by the laser beam terminal;
2.2, when the light beam pointing is stable, the vision system collects the laser detection light beam to obtain the target light spot position;
step three: collecting real-time light spots;
the method comprises the steps that a vision system collects laser detection beams in a machining process on line to obtain the position of a real-time light spot;
step four: obtaining the offset of a laser processing beam;
comparing the position of the real-time light spot with the position of the target light spot obtained in the third step; if the positions of the real-time light spot and the target light spot are not consistent, calculating the position deviation of the real-time light spot and the target light spot through an image processing algorithm to obtain the offset of the laser processing light beam; if the positions of the real-time light spot and the target light spot are not deviated, continuing to process;
step five: feedback control;
and the visual system feeds the offset obtained in the step four back to the mirror vibration system, and the mirror vibration system adjusts the light path by adjusting the internal reflector according to the received offset, so that the pointing correction of the laser beam is realized.
2. The laser beam terminal pointing detection and correction method of claim 1, characterized in that: further comprises the following steps: identifying and checking the corrected laser beam;
and (4) collecting the laser detection light beams in the processing process after correction by the vision system to obtain the corrected light spot position, and repeating the fourth step and the fifth step.
3. The laser beam terminal pointing detection and correction method of claim 2, characterized in that: and fifthly, the reflector is an electric reflector, and the vibrating mirror system respectively adjusts the offset of the two electric reflectors which are distributed in space according to the received offset to realize light path adjustment.
4. The laser beam terminal pointing detection and correction method of claim 3, characterized in that: the vision system is a high-resolution high-frame-rate CCD camera or a CMOS camera.
5. The laser beam terminal pointing detection and correction method of claim 4, wherein: the light splitting element is a light splitter.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109940270A (en) * | 2019-04-08 | 2019-06-28 | 西安交通大学 | A kind of sevenfive axis ultrafast laser machining system |
| CN110244554A (en) * | 2019-05-08 | 2019-09-17 | 山东航天电子技术研究所 | A kind of group based on image improves the light beam direction optimization method of day ox horn algorithm |
| CN110940490B (en) * | 2019-12-13 | 2021-05-04 | 湖南省鹰眼在线电子科技有限公司 | Laser spot scanning precision detection method and device of laser processing equipment |
| CN111055030A (en) * | 2019-12-20 | 2020-04-24 | 武汉华工激光工程有限责任公司 | Device and method for monitoring and feeding back light beam pointing stability |
| CN112846485B (en) * | 2020-12-31 | 2022-11-04 | 武汉华工激光工程有限责任公司 | Laser processing monitoring method and device and laser processing equipment |
| CN113009496B (en) * | 2021-03-05 | 2024-05-28 | 南京大学 | Laser ranging galvanometer imaging system and method |
| CN113210853B (en) * | 2021-04-13 | 2023-02-28 | 广东原点智能技术有限公司 | Optical path correction system and correction method thereof |
| CN113253245B (en) * | 2021-05-11 | 2024-04-19 | 苏州深水渔半导体有限公司 | Calibration system of laser radar based on MEMS galvanometer and method for eliminating image shaking |
| CN115431103A (en) * | 2021-06-02 | 2022-12-06 | 上海名古屋精密工具股份有限公司 | Method and device for compensating ultra-fast laser light path rotation error and machine tool |
| CN116275475A (en) * | 2021-12-20 | 2023-06-23 | 上海名古屋精密工具股份有限公司 | Method and device for correcting path deviation when laser direction changes and machine tool |
| CN114509881B (en) * | 2022-02-15 | 2024-05-31 | 深圳市杰普特光电股份有限公司 | Laser galvanometer anti-shake method, device, system, electronic equipment and storage medium |
| CN116727795A (en) * | 2023-08-15 | 2023-09-12 | 武汉松盛光电科技有限公司 | Temperature control method and device for laser desoldering device and storage medium |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| FR2616555A1 (en) * | 1987-06-15 | 1988-12-16 | Bm Ind | Device for automatically positioning a laser beam |
| US20030222143A1 (en) * | 2002-06-04 | 2003-12-04 | Mitchell Phillip V. | Precision laser scan head |
| DE10335501B4 (en) * | 2002-07-31 | 2005-01-27 | Kuka Schweissanlagen Gmbh | Method and device for welding or cutting with laser beam |
| JP5385356B2 (en) * | 2011-10-21 | 2014-01-08 | 株式会社片岡製作所 | Laser processing machine |
| CN104752267B (en) * | 2013-12-31 | 2018-04-27 | 上海微电子装备（集团）股份有限公司 | A kind of laser anneal device and method |
| DE102015109984A1 (en) * | 2015-06-22 | 2016-12-22 | Scanlab Ag | Scanner head with integrated beam position sensor and adjustment device for offline adjustment |
| CN105149772B (en) * | 2015-10-12 | 2017-12-22 | 维嘉数控科技（苏州）有限公司 | Laser control system and stabilized lasers light path energy and the method pointed to |
| CN107121189B (en) * | 2017-03-24 | 2019-04-09 | 中国科学院光电研究院 | A kind of light beam pointing control system and its construction method based on FPGA |
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