CN109476509A - Ultrapure Water Purifiers - Google Patents
Ultrapure Water Purifiers Download PDFInfo
- Publication number
- CN109476509A CN109476509A CN201780046687.4A CN201780046687A CN109476509A CN 109476509 A CN109476509 A CN 109476509A CN 201780046687 A CN201780046687 A CN 201780046687A CN 109476509 A CN109476509 A CN 109476509A
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- water
- heat exchanger
- heat
- ultrapure water
- flow path
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/02—Treatment of water, waste water, or sewage by heating
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H4/00—Fluid heaters characterised by the use of heat pumps
- F24H4/02—Water heaters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B1/00—Compression machines, plants or systems with non-reversible cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B30/00—Heat pumps
- F25B30/02—Heat pumps of the compression type
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
Abstract
A kind of Ultrapure Water Purifiers are provided, being able to use reduces in the heat source cost that the ultrapure water to point of use to be sent to carries out the heat exchanger that warm ultrapure water is made in heating, and is able to use the cost reduction in cooling 1 st pure water.Second pure water from subsystem (4) is heated by heat exchanger (6), heat exchanger (10) and heat exchanger (12), then is sent to point of use.The heat source of heat exchanger (6) is the warm ultrapure water to flow back from point of use.The reflux ultrapure water after cooling, is imported into secondary slot (2) in heat exchanger (6) and heat exchanger (43).Recycle stream is connected with the first medium water heated by heat pump (20) in heat exchanger (10).Circulation has the second medium water in the evaporator 21 of heat pump (20).It is provided with the heat exchanger (26) for making the warm water discharge from point of use (40) circulate in the circulation stream of the second medium water, is being equipped with heat exchanger (43) than heat exchanger (26) upstream side.
Description
Technical field
The present invention relates to Ultrapure Water Purifiers, in particular to by heat exchanger to from second pure water manufacturing device
Ultrapure water is heated and is supplied to as warm ultrapure water the Ultrapure Water Purifiers of point of use.
Background technique
As cleaned semiconductor with water come using ultrapure water, be as illustrated in fig. 2 by by preprocessing system 50, primary
Water Purifiers 60, second pure water manufacturing device (more being referred to as subsystem) 70 Ultrapure Water Purifiers constituted are to raw water
(industrial water, people's livelihood water, well water etc.) is handled and manufactures (patent document 1).The function of each system is for example following in Fig. 2
It is described.
(precipitating), filtering (film filtering) device etc. on by agglutination, Pressurized flotation (the existing example is agglutination filter device)
In formed preprocessing system 50, the removal of the suspended material or colloidal substance in raw water is carried out.In addition, also can in this process
Remove macromolecule type organic, hydrophobic organic compound etc..
Slot 61, heat exchanger 65, reverse osmosis membrane processing device (RO device) 62, the ion of the water handled before having are handed over
The 1 st pure water system of changing device (mixing bed or 45 tower etc.) 63, slot 63A, ion interchange unit 63B and degasser 64
It makes in device 60, carries out the removal of the ion or organic principle in raw water.In addition, the temperature of water is higher, then stickiness is lower, RO film
Permeability can improve.Therefore, as shown in Fig. 2, the leading portion in reverse osmosis membrane processing device 62 is provided with heat exchanger 65, by water
It heats and makes the temperature to the supply water of reverse osmosis membrane processing device 62 more than determined temperature.In 1 side of heat exchanger 65,
It is fed with the steam as heat source fluid.In reverse osmosis membrane processing device 62, removes salt and remove ionic, colloidality
TOC.In ion interchange unit 63,63B, removal salt, inorganic carbon (IC) and by ion exchange resin to be adsorbed or from
The TOC ingredient of son exchange is removed.The removal of inorganic carbon (IC), dissolved oxygen are carried out in degasser 64.
The 1 st pure water manufactured by 1 st pure water manufacturing device 60 is sent to second pure water manufacture dress via piping 69
Set 70.The second pure water manufacturing device 70 has: secondary slot (also having referred to as pure water slot) 71, pump 72, heat exchanger 73, low pressure are purple
Outside line oxidation unit (UV device) 74, ion interchange unit 75 and ultrafiltration membrane (UF film) separator 76.Heat exchanger 73 is used for
The temperature of second pure water controls.In general, the supplying temperature of second pure water (room temperature ultrapure water) is 23~25 DEG C, in order to control
In this temperature range, using there is cooler in heat exchanger 73.Cooling source as cooler uses cold water.The heat exchanger
Before 73 need to be placed on ion interchange unit 75.Because TOC ingredient can be made when the pure water and contacts ionic exchange resin of high temperature
Dissolution, leads to water quality deterioration.It is sent to ion again therefore, it is necessary to which water temperature is cooled to after 23~25 DEG C by heat exchanger 73
Switch 75.When being passed through the case where cold water of the heat exchanger for cooling 73 is from the receiving supply of electronic component manufacturing works, need
There is dedicated plumbing fixture.And in order to reduce ultrapure water manufacturing cost, it is desirable to reduce the usage amount of the cold water.
The ultraviolet light for the 185nm that low pressure UV oxidation unit 74 is issued by low pressure UV lamps has resolved into TOC
Machine acid, even CO2.The organic matter and CO generated by decomposition2It is removed in the ion interchange unit 75 of back segment.Super
In filter membrane separator 76, particulate is removed, and the outflow particle from ion exchange resin is also removed.
The processing water of ion interchange unit 75, is divided into: being sent to use from ultrafiltration membrane separating device 76 via piping 81
The ultrapure water (room temperature ultrapure water) of point 90 and after being heated by heat exchanger 85,86 via ultrafiltration membrane separating device 87 and
Piping 88 is sent to the ultrapure water (warm ultrapure water) of point of use 90.
The route of the latter will pass through leading portion side heat exchanger 85 and back segment from the ultrapure water of second pure water manufacturing device 70
Side heat exchanger 86 is heated to 65~75 DEG C or so, and supplies to point of use 90.Pass through the warm recirculation water from the point of use 90
The heat source side of leading portion side heat exchanger 85 is circulated to by piping 91.Pass through the recirculation water drop of the heat source side of leading portion side heat exchanger 85
Temperature returns to secondary slot 71 to 30~40 DEG C or so, and via piping 92.Rear section side heat exchanger 86 is using steam as heat source.
Patent document 1: Japanese Unexamined Patent Publication 2013-202581.
Summary of the invention
The purpose of the present invention is to provide a kind of Ultrapure Water Purifiers, it is able to use in point of use to be sent to
The heat source cost that ultrapure water carries out the heat exchanger that warm ultrapure water is made in heating reduces, and is able to use in cooling 1 st pure water
Cost reduce.
The Ultrapure Water Purifiers of one embodiment of the present invention, the Ultrapure Water Purifiers are by heated ultrapure water
Supply has: 1 st pure water manufacturing device to point of use；Second pure water manufacturing device, to from 1 st pure water manufacture dress
The 1 st pure water set is handled to manufacture ultrapure water；First heat exchanger, for from the second pure water manufacturing device
Ultrapure water is heated, and using the recirculation water from point of use as heat source；Recirculation water foldback system, have to by this first
The recirculation water after heat exchanger carries out cooling second heat exchanger, and returns what is be cooled in the second heat exchanger
The 1 st pure water is added in flowing water；And heating mechanism, to heated ultrapure water in the first heat exchanger further into
Row heating；It is characterized in that, the heating mechanism has: third heat exchanger, it is heated in the first heat exchanger
Ultrapure water be passed into being heated in fluid flowing path of the third heat exchanger；First circulation flow path, makes as heat transfer
First medium water circulation in the heat source fluid flow path of the third heat exchanger；And heat pump, in the first circulation stream
The the first medium water flowed in road is heated；Wherein: the heat pump has condensed device, evaporator, pump and exapnsion valve；This is solidifying
Contracting device is arranged on the first circulation flow path to heat first medium；The evaporator, which is arranged, has the second medium in circulation
On the second circulation flow path of water；On the second circulation flow path, be provided with for using warm water discharge heat to the second medium water into
4th heat exchanger of row heating, and be provided on the second circulation flow path than the 4th heat exchanger upstream side described
Second heat exchanger.
In one embodiment of the present invention, which is provided with the 5th heat exchanger, the 5th heat exchange
Device is used to heat the heated ultrapure water in the third heat exchanger, and using steam as heat source.
In one embodiment of the present invention, the 6th heat exchanger is equipped on the first circulation flow path, the 6th heat is handed over
Parallel operation is used to heat the first medium water from the condensed device toward third heat exchanger, and using steam as heat source.
[The effect of invention]
In Ultrapure Water Purifiers of the invention, in first heat exchanger, held using point of use recirculation water
Heat heats ultrapure water.And using using the first heated medium water of the condensed device that is heated pump as heat source fluid
Third heat exchanger, to the ultrapure water further progress heat.Recycle stream is connected with the second medium in the evaporator of heat pump
Water.Second medium water is equipped with: the 4th heat exchanger using warm water discharge as heat source and to pass through the reflux after first heat exchanger
Second heat exchanger of the water as heat source.As a result, it is possible to make that the ultrapure water to point of use to be sent to be heated up to determined temperature system
It is reduced at the heat source cost of warm ultrapure water.And make to hand over by the recirculation water after first heat exchanger in the second heat due to taking
Parallel operation is added after further cooling down to mode as 1 st pure water, therefore can be without the need for the cold of cooling 1 st pure water
Water, or cold water can be made to reduce.
It should be noted that the water temperature of point of use recirculation water, usually 70~80 DEG C for example, about 75 DEG C.
In the present invention, so-called warm water discharge refers to the draining being previously used in cleaning in point of use.Make that will arrive at
It also is included in warm water discharge with the condensed water of UF membrane separation device set before point.The temperature of warm water discharge, usually 60
~75 DEG C for example, about 65 DEG C.
Detailed description of the invention
Fig. 1 is the system diagram of the Ultrapure Water Purifiers about embodiment.
Fig. 2 is the system diagram about existing exemplary Ultrapure Water Purifiers.
Specific embodiment
Ultrapure Water Purifiers of the invention have 1 st pure water manufacturing device and second pure water manufacturing device and heating
The heating mechanism of ultrapure water.
Under normal conditions, pretreating device is equipped in the leading portion of the 1 st pure water manufacturing device.It is right in pretreating device
Raw water implements the pre-treatment using progress such as filtering, coagulation sedimentation, microfiltration films, mainly removal suspended material.In general, passing through
The pre-treatment makes the particulate quantity in water become 103A/mL or less.
1 st pure water manufacturing device, has: reverse osmosis (RO) membrane separation device, degasser, regenerative ion exchange dress
Oxidation unit etc. of (mixing bed or 45 tower etc.), electric deionizer, ultraviolet light (UV) irradiation oxidation unit etc. is set,
Remove more than half electrolyte, particulate, the raw bacterium etc. in pre-treatment water.For example, 1 st pure water manufacturing device is by heat exchanger, 2
More than platform RO membrane separation device, mixing bed ion interchange unit and degasser are constituted.
Second pure water manufacturing device is by secondary slot, water supply pump, heat exchanger for cooling, low pressure UV oxidation unit or sterilization
The ultraviolet lamp, non-renewable type of device one kind mix bed ion interchange unit or electric deionizer, hyperfiltration
(UF) film filters such as membrane separation device or microfiltration (MF) membrane separation device are constituted, but are also additionally provided with film degassing dress sometimes
It sets, the desalters such as RO membrane separation device, electric deionizer.In second pure water manufacturing device, low pressure UV oxygen is used
Makeup is set and section setting mixes bed ion interchange unit behind, thus decomposes the TOC in water, and benefit using ultra-violet oxidation
Oxygenolysis product is removed with ion exchange.In the present specification, hereinafter, by second pure water manufacturing device more than pair slot
Part by rear section side is referred to as subsystem.
In addition, in the back segment setting Water Purifiers and to from the pure water system three times three times of second pure water manufacturing device
Make device ultrapure water heated as mode can also be used.Water Purifiers has and second pure water manufacture three times for this
The identical construction of device, manufactures the ultrapure water of higher purity.
Hereinafter, embodiments of the present invention will be described for needle referring to attached drawing.Fig. 1 is indicated about the super of embodiment
The system diagram of Water Purifiers.Though each water temperature is only one and shows it should be noted that listing water temperature in the following description
Example, there is no make any restriction to the present invention.
About 25 DEG C of 1 st pure water is imported into subsystem 4 via piping 1, secondary slot 2, piping 3, to manufacture ultrapure water.Institute
About 25 DEG C of ultrapure water of manufacture sequentially flows through piping 5, heat exchanger 6, piping 7, heat exchanger 10, piping 11, steam type heat
Exchanger 12, UF membrane separation device 13 and piping 14, are heated to about 75 DEG C by the heat exchanger 6,10,12, ultrapure as temperature
Water is sent to point of use 40 by piping 14.UF membrane separation device 13 is arranged before it will arrive at point of use 40.
Piping 5A is branched out from piping 5, room temperature ultrapure water is sent to point of use via UF membrane separation device 5B and piping 5C.
Via reflux temperature ultrapure water of the importing from point of use 40 in the heat source fluid flow path of 41 heat exchangers 6 of piping
(recirculation water).By the warm ultrapure water of reflux after the heat exchanger 6 in heat exchanger 43 with the second medium water of heat pump 20
Heat exchange is carried out after cooling down, is sent to secondary slot 2 via piping 44.
In the heat source fluid flow path of heat exchanger 10 recycle stream be connected be heated pump 20 condensed device 23 it is heated
First medium water (water as heat transfer).
The composition that heat pump 20 uses is: future, the thermal mediums such as freon substitute of flash-pot 21 passed through 22 compression of pump
And condensed device 23 is imported, and the thermal medium from condensed device 23 is imported into evaporator 21 via exapnsion valve 24.
About 75 DEG C of the first medium water for carrying out automatic heat-exchanger 10 is imported via piping 15 in condensed device 23, in condensed device
It is heated to about 80 DEG C of the first medium water in 23 and is sent to heat exchanger 10 via piping 16.In addition, from condensed device 23
A part of first medium water is sent back to piping 15 via bypass pipe arrangement 17.By heat exchanger 10, piping 15, condensed device 23 and
Piping 16 constitutes first circulation flow path.Flow control valve is equipped in bypass pipe arrangement 17 (diagram is omitted).
In order to make the second medium water circulation in the heat source fluid flow path of evaporator 21, it is equipped with and is handed over by piping 25, heat
Parallel operation 43, heat exchanger 26 and piping 27 are formed by second circulation flow path.Match in addition, being equipped with bypass between piping 25,27
Pipe 28.Flow control valve is equipped in bypass pipe arrangement 28 (diagram is omitted).
About 65 DEG C of warm water discharge of point of use 40 is imported with via piping 29 in the heat source fluid flow path of heat exchanger 26.
With the second medium hydrothermal exchange and be cooled to about 30~40 DEG C of warm water discharge and flowed out from piping 30, be recovered as recycle-water.
The heat source fluid stream that about 25 DEG C of the second medium water is imported into evaporator 21 is heated in heat exchanger 43,26
Lu Zhong carries out heat exchange with the thermal medium of heat pump 20 after being cooled to about 20 DEG C, is sent to heat exchanger via piping 25
43.The second medium water of a part is piped 27 from the flow direction of piping 25 via bypass pipe arrangement 28.Flow is equipped in bypass pipe arrangement 28
Regulating valve (diagram is omitted).
In second circulation flow path, in the upstream side of heat exchanger 26 i.e. the second medium water out side of evaporator 21
It is provided with the heat exchanger 43.Pass through the temperature (for example, about 32 of the recirculation water (reflux ultrapure water) after the heat exchanger 6
DEG C) also higher than cooling down and flowing to the temperature (for example, about 20 DEG C) of the second medium water of piping 25 in evaporator 21.Therefore, it comes from
The recirculation water of heat exchanger 6 be cooled in heat exchanger 43 temperature almost the same with room temperature ultrapure water (about 23~25 DEG C) it
Afterwards, secondary slot 2 is flowed into.
As a result, being no longer needed for carrying out cooling heat exchanger to from secondary slot 2 supply to the 1 st pure water of subsystem 4
(heat exchanger 73 of described Fig. 2).And even it also can be reduced the usage amount of cold water in the case where the heat exchanger is arranged.
As the method for operation of heat pump 20, for example, the input power and circulating water flow of adjustment heat pump compressor, come
The first medium water and the outlet temperature of the second medium water is set to respectively become certain temperature.Heat pump can also be made to become multiple systems
Column carry out unit number control according to heat load.In addition, can also be operated as follows, i.e., as shown in figure high temperature side and (or) it is low
The piping bypassed to heat exchanger and flow control valve are set in the circulatory system of warm side, to control heat pump inlet temperature.
In Fig. 1, though only supplying the warm water discharge of point of use 40 to heat exchanger 26, setting can also will arrived at
The condensed water of UF membrane separation device 13 before point of use is utilized as warm water discharge.
In above embodiment, steam type heat exchanger 15 is set as to heated ultrapure water in heat exchanger 10
It is heated, but also may be disposed on first circulation flow path so as to the first matchmaker flowed from condensed device 23 toward heat exchanger 10
Jie's water heats.Although the steam type heat exchanger of steam type heat exchanger 15 or first circulation flow path, can also omit.But
It is that, in the case where the warm ultrapure water usage amount of factory sharply increases, the heat source of estimation heat pump 20 can be insufficient, Wen Chaochun water temperature
Degree is unable to reach determined temperature.In order to prevent above situation, it is preferably provided with steam type heat exchanger, to carry out as needed
Steam heating.
Above embodiment is an example of the invention, and the present invention can also be the mode other than diagram.
Though having used specific embodiment the present invention is described in detail, those skilled in the art will be apparent that not surpassing
It can be carried out various changes in de- the spirit and scope of the invention.
The application is based on September 14th, 2016 applied Japanese patent application 2016-179641, and entire contents are led to
Reference is crossed to quote so far.
Claims (3)
1. a kind of Ultrapure Water Purifiers, which supplies heated ultrapure water to point of use, tool
It is standby:
1 st pure water manufacturing device；
Second pure water manufacturing device is handled the 1 st pure water from the 1 st pure water manufacturing device to manufacture ultrapure water；
First heat exchanger, for being heated to the ultrapure water from the second pure water manufacturing device, and to come from point of use
Recirculation water as heat source；
Recirculation water foldback system has the second heat exchange to cooling is carried out by the recirculation water after the first heat exchanger
Device, and the 1 st pure water is added in the recirculation water being cooled in the second heat exchanger；With
Heating mechanism heats heated ultrapure water further progress in the first heat exchanger；
It is characterized in that,
The heating mechanism has:
Third heat exchanger, heated ultrapure water is passed into the quilt of the third heat exchanger in the first heat exchanger
It heats in fluid flowing path；
First circulation flow path follows the first medium water as heat transfer in the heat source fluid flow path of the third heat exchanger
Circulation is logical；With
Heat pump heats the first medium water flowed in the first circulation flow path；
Wherein:
The heat pump has condensed device, evaporator, pump and exapnsion valve；
The condensed device is arranged on the first circulation flow path to heat the first medium water；
Circulation, which is arranged in, in the evaporator has on the second circulation flow path of the second medium water；
On the second circulation flow path, it is provided with the 4th heat heated for the heat using warm water discharge to the second medium water and hands over
Parallel operation；
The second heat exchanger is provided on the second circulation flow path than the 4th heat exchanger upstream side.
2. Ultrapure Water Purifiers as described in claim 1, which is characterized in that the Ultrapure Water Purifiers are provided with the 5th heat
Exchanger, the 5th heat exchanger are used to heat the heated ultrapure water in the third heat exchanger,
And using steam as heat source.
3. Ultrapure Water Purifiers as claimed in claim 1 or 2, which is characterized in that be equipped on the first circulation flow path
6th heat exchanger, the 6th heat exchanger is for adding the first medium water from the condensed device toward third heat exchanger
Heat, and using steam as heat source.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-179641 | 2016-09-14 | ||
| JP2016179641A JP6149993B1 (en) | 2016-09-14 | 2016-09-14 | Ultrapure water production equipment |
| PCT/JP2017/010617 WO2018051552A1 (en) | 2016-09-14 | 2017-03-16 | Ultrapure water manufacturing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109476509A true CN109476509A (en) | 2019-03-15 |
| CN109476509B CN109476509B (en) | 2020-06-26 |
Family
ID=59081964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780046687.4A Active CN109476509B (en) | 2016-09-14 | 2017-03-16 | Ultrapure water production apparatus |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6149993B1 (en) |
| KR (1) | KR102107925B1 (en) |
| CN (1) | CN109476509B (en) |
| TW (1) | TWI687374B (en) |
| WO (1) | WO2018051552A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6948012B2 (en) * | 2018-03-06 | 2021-10-13 | 栗田工業株式会社 | Ultrapure water heating method |
| CN112384479B (en) * | 2018-07-06 | 2022-03-18 | 栗田工业株式会社 | Reverse osmosis treatment method and system |
| JP7378699B2 (en) | 2019-01-09 | 2023-11-14 | 株式会社Ihi | Heat exchange system and its operating method |
| JP7379827B2 (en) * | 2019-02-14 | 2023-11-15 | 三浦工業株式会社 | Hot water production and waste hot water reuse methods |
| JP7379828B2 (en) * | 2019-02-14 | 2023-11-15 | 三浦工業株式会社 | Hot water production and waste hot water reuse methods |
| JP7497650B2 (en) | 2020-08-26 | 2024-06-11 | 栗田工業株式会社 | Boiler water treatment device and treatment method |
| JP7359198B2 (en) * | 2021-12-03 | 2023-10-11 | 栗田工業株式会社 | Warm ultrapure water production equipment |
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- 2016-09-14 JP JP2016179641A patent/JP6149993B1/en active Active
-
2017
- 2017-03-16 KR KR1020187034318A patent/KR102107925B1/en active IP Right Grant
- 2017-03-16 WO PCT/JP2017/010617 patent/WO2018051552A1/en active Application Filing
- 2017-03-16 CN CN201780046687.4A patent/CN109476509B/en active Active
- 2017-04-10 TW TW106111922A patent/TWI687374B/en active
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| JP2002016036A (en) * | 2000-06-27 | 2002-01-18 | Shin Etsu Handotai Co Ltd | Method of wastewater reclamation and exhaust heat recovery |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2018043191A (en) | 2018-03-22 |
| CN109476509B (en) | 2020-06-26 |
| TW201811682A (en) | 2018-04-01 |
| JP6149993B1 (en) | 2017-06-21 |
| KR102107925B1 (en) | 2020-05-07 |
| KR20190046717A (en) | 2019-05-07 |
| TWI687374B (en) | 2020-03-11 |
| WO2018051552A1 (en) | 2018-03-22 |
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