CN109470455A - A kind of dielectric gratings detection device - Google Patents
A kind of dielectric gratings detection device Download PDFInfo
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- CN109470455A CN109470455A CN201811607155.6A CN201811607155A CN109470455A CN 109470455 A CN109470455 A CN 109470455A CN 201811607155 A CN201811607155 A CN 201811607155A CN 109470455 A CN109470455 A CN 109470455A
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- dielectric gratings
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention discloses a kind of dielectric gratings detection device, described device includes folded array light source, convertible lens, dielectric gratings, optics rotation adjustment frame, spatial filter and output coupling mirror.Folded array light source is located at convertible lens front focal plane, and dielectric gratings are placed on optics rotation adjustment frame and are located at convertible lens back focal plane.Spatial filter, which filters, to be removedkOther light beams outside grade diffracted beam, output coupling mirror willkGrade diffracted beam coupling output.On the one hand dielectric gratings detection device of the invention can detect the trapezoidal embossment base angle of dielectric gratings；On the other hand, it can detect the optimized incidence that dielectric gratings obtain high-diffraction efficiency for specific wavelength light beam.The advantage of the invention is that the trapezoidal embossment base angle of dielectric gratings and optimized incidence are simply measured by the rotation angle of optics rotation adjustment frame, operating process is simple, and optical element is low in cost, and system structure is simply easily built, and has good adaptability and stability.
Description
Technical field
The present invention relates to the detection devices to optical element, more particularly to the optical grating detecting instrument that grating is detected.
Background technique
Grating is a kind of common optical element, frequently as the frequency-selecting element of laser.Conventional metals grating damage threshold
It is low, it is not suitable for superpower laser.Dielectric gratings have high-diffraction efficiency, high damage threshold and can large scale production etc. it is excellent
Gesture not only may replace metal grating for laser frequency-selecting, be alternatively arranged as the arteries and veins of the high-power laser systems such as inertial confinement fusion
Compressed grating is rushed, strategic national defence is related to, the outlet of pulse compression grating and production detection technique are strictly controlled in various countries
System.
For finished product dielectric gratings, its each structural parameters of exact knowledge are to prediction grating diffration performance, frequency-selecting
Energy, pulse chirped performance etc. are particularly important.Currently, can be used atomic force microscope etc. to the embossment pattern of dielectric gratings
Feature is simply measured.It is constantly present mismachining tolerance in the technical process such as the ion beam etching of production dielectric gratings, is caused
Making the rectangular relief designed originally often is actually trapezoidal embossment.However, the existing more measuring medium film light of grating determination techniques
Groove depth, embossment tooth bottom width and the bottom duty ratio of grid embossment structure.For trapezoidal embossment structure, groove depth, embossment bottom of the tooth are removed
The structural parameters such as portion's width and bottom duty ratio will affect other than diffraction efficiency of grating, shadow of the trapezoidal embossment base angle to diffraction efficiency
Sound also can't be ignored.Therefore, it is necessary to a kind of technologies to detect trapezoidal embossment base angle, and clearly trapezoidal embossment base angle and beam incident angle
Influence to diffraction efficiency.
Summary of the invention
The present invention provides a kind of dielectric gratings detection devices comprising folded array light source, convertible lens, deielectric-coating light
Grid, spatial filter and output coupling mirror.The light beam wavelength that the position of folded each subelement of array light source and each subelement issue by with
Lower formula determines
Wherein,fFor the focal length of convertible lens,α 0For the beam incident angle of center subelement,dFor the dielectric gratings period,kTo spread out
Level is penetrated,p m It ismA subelement is at a distance from the subelement of center, Δλ m It ismA subelement and center subelement issue light beam
Wavelength difference.
Folded array light source and dielectric gratings are located at the front focal plane and back focal plane of convertible lens.Convertible lens is that convergence is saturating
Mirror；The central sub-beam and convertible lens optical axis coincidence that folded array light source issues；Convertible lens has what folded array light source issued not
The folded battle array light beam of co-wavelength is converted to different angles and is incident to dielectric gratings；Dielectric gratings will have different wave length and not
Folded battle array light beam with incidence angle is with identicalkGrade diffraction direction outgoing；Folded battle array light beam can overcome single beam diffraction luminous energy too weak,
The shake of diffraction luminous energy is unobvious, can not effectively judge the disadvantage of luminous energy catastrophe point.
Dielectric gratings are rotatably disposed on optics rotation adjustment frame, control dielectric gratings by optics rotation adjustment frame
Rotation angle and direction of rotation, the incidence angle of folded battle array light beam relative medium film grating is controlled with this.
Spatial filter is placed in dielectric gratings diffraction direction, only allows each beamletkGrade diffracted beam passes through, and filters
Except other diffracted beams, overlapped generation light beam crosstalk between each subelement diffracted beam is avoided.
Output coupling mirror is placed in dielectric gratings diffraction direction and is located at after spatial filter, willkGrade diffracted beam
Couples optical energy output.
In the middle when the incidence of center beam orthogonal dielectric gratings, record optics rotates adjustment frame scaleφ 0, it is equidirectional at a slow speed
It continuously adjusts optics rotation adjustment frame and observes coupling light energy output simultaneously, until to coupling light energy output mutation, record optics rotation
Turn adjustment frame scaleφ 1, the trapezoidal embossment base angle of dielectric gratings be calculated as pi/2-(φ 1-φ 0)。
Continue continuous equidirectional adjusting optics and rotate adjustment frame, luminous energy is first incremented by and successively decreases afterwards, records light when luminous energy peak value
Learn rotation adjustment frame scaleφ 2, then dielectric gratings are calculated as the optimized incidence of folded battle array light beamφ 2-φ 0。
The present invention is include at least the following beneficial effects: first, the present invention is by configuring each subunit position of folded array light source
And wavelength, make folded battle array light beamkGrade diffracted beam exports in the same direction, overcomes weak single beam diffraction luminous energy, beam jitter and mutation unknown
Aobvious disadvantage；Second, adjusting the incidence angle of folded battle array light beam relative medium film grating using optics rotation adjustment frame, quickly and easily
Read rotation angle, the trapezoidal embossment base angle of simple computation and optimized incidence.Optical system is simple, and folded array light source is compared to it
The spectrometer that his optical grating detecting instrument uses is cheap, and controllability is strong, and implementation result is good.
Detailed description of the invention
Fig. 1 is that the optical element of one embodiment of dielectric gratings detection device of the invention puts schematic diagram；
Fig. 2 is the beam Propagation schematic diagram of one embodiment of dielectric gratings detection device of the invention；
Fig. 3 is that the dielectric gratings of one embodiment of dielectric gratings detection device of the invention rotate preceding and postrotational light
Beam incidence schematic diagram；
Fig. 4 is the luminous energy of the coupling output beam and folded battle array light beam of one embodiment of dielectric gratings detection device of the invention
Ratio rotates the schematic diagram of angle change with optics rotation adjustment frame.
Specific embodiment
With reference to the accompanying drawing, the present invention is further elaborated.
As shown in Figure 1, the dielectric gratings detection device of the present embodiment includes: folded array light source 1, convertible lens 2, deielectric-coating
Grating 3(is containing periodic relief 4 and dielectric coating series), optics rotation adjustment frame 5, spatial filter 6 and output coupling mirror 7.
Folded array light source 1 and dielectric gratings 3 are located at the front focal plane and back focal plane of convertible lens 2, and dielectric gratings 3 are rotatably set
In on optics rotation adjustment frame 5, spatial filter 6 and output coupling mirror 7 are located in the diffraction direction of light beam.Each optical element is pressed
Irradiation beam transmission path sequence is put, and folded array light source 1, convertible lens 2, dielectric gratings 3, spatial filter 6 and defeated are followed successively by
Coupling mirror 7 out.
As shown in Fig. 2, the beam Propagation schematic diagram of the dielectric gratings detection device for the present embodiment.In folded array light source
The light beam and convertible lens optical axis coincidence that center unit 8 issues, central sub-beam incidence angle areα 0, themWhat a subelement 9 issued
Light beam is transmitted to the incidence angle of dielectric gratings by convertible lens 2α m Forα 0+γ=α 0+arctan(p m /f), whereinp m It ism
The interval of a subelement 9 and center subelement 8,fFor convertible lens focal length.Each beamlet wavelengthλ m , positionp m And incidence angleα m Phase
Mutually matching, so that the angle of diffraction having the same of+1 grade of diffracted beam of each beamlet 10β.The relatively middle center of folded each subelement of array light source
The wavelength difference and positional relationship of unit are determined by following formula
Spatial filter 6 is placed in diffraction direction, only+1 grade of diffracted beam 10 is allowed to pass through, and filters out other diffraction lights and spuious
Light；Output coupling mirror 7 is vertical with+1 grade of 10 transmission direction of diffracted beam, and the couples optical energy of+1 grade of diffracted beam 10 is exported.
As shown in figure 3, adjusting optics rotates adjustment frame 5, dielectric gratings are rotated around axis 11.3 be deielectric-coating light before rotation
The initial position of grid, 12 be the position of dielectric gratings after rotation.It adjusts optics and rotates adjustment frame 5, incident beam relative medium
The angle of film grating changes, if beam incident angle meetsα m <π/2-θ 2When (θ 2For the right base angle of trapezoidal embossment), light beam 16 by
Periodic phase to the left ridge 13 of embossment structure 4, trapezoidal top 14 and right ridge 15 is modulated.Continue equidirectional to adjust optics at a slow speed
Adjustment frame 5 is rotated, if beam incident angle meetsα m >π/2-θ 2When, beamlet is only by the left ridge 13 and trapezoidal top of trapezoidal embossment
14 periodic phase modulation, is no longer influenced by the phase-modulation of trapezoidal right ridge 15.I.e.α m =π/2-θ 2For the luminous energy of diffracted beam 10
Catastrophe point.
During adjusting optics rotation adjustment frame 5, made a record by following mode: central sub-beam and deielectric-coating light
When grid are vertical, it is initial angle that optics, which rotates the scale on adjustment frame 5, is denoted asφ 0.Optics rotation adjustment frame 5 is continuously adjusted, together
When the observation coupling output of output coupling mirror 7 luminous energy, luminous energy increases continuously as shown in Figure 4.Continue equidirectional adjusting optics at a slow speed
Adjustment frame 5 is rotated, the no longer stable increase of luminous energy but shake suddenly, the scale of optics rotation adjustment frame 5, is denoted as when record ditherφ 1, then the right base angle of trapezoidal embossmentθ 2For pi/2-(φ 1-φ 0).Continue equidirectional adjusting optics at a slow speed and rotate adjustment frame 5, luminous energy is first
Reduce after increase, the scale of optics rotation adjustment frame 5, is denoted as when recording luminous energy peak pointφ 2, then dielectric gratings 3 are for folded
The optimized incidence of battle array light beam is calculated asφ 2-φ 0。
As shown in figure 4, the coupling output light of one embodiment for the dielectric gratings detection device of the invention calculated
Beam and input light beam luminous energy than with optics rotation adjustment frame 5 rotate angle changing rule (θ 1For the left base angle of trapezoidal embossment,θ 2
For the right base angle of trapezoidal embossment).No matter the section of embossment structure 4 be isosceles trapezoid (θ 1=θ 2) be also non-isosceles trapezoid (θ 1≠θ 2),
In incidence angleα m =π/2-θ 2When, all there is an inflection point 17 in luminous energy.Continue the equidirectional optics that adjusts at a slow speed and rotates adjustment frame 5, light
It can first increase and reduce afterwards, i.e., dielectric gratings 3 make to couple light energy output acquisition peak value 18 there are an optimized incidence.
As shown in figure 4, being recorded when beam orthogonal incidenceφ 0=0° 、φ 1=15° 、φ 2It=52 °, then corresponds toθ 2=π/2-
(φ 1-φ 0)=75 °, optimized incidence areφ 2-φ 0=52°；
Whenφ 1It is at=25 ° and 35 °, then correspondingθ 2=π/2-(φ 1-φ 0)=65 ° and 55 °.
The embodiment of the present invention controls embossment structure 4 using optics rotation adjustment frame 5 and rotates, but is not limited to a kind of this rotation
Mode.
+ 1 grade of diffracted beam of the embodiment of the present invention utilization is observation light beam, but is not limited to this diffraction time.
What the embodiment of the present invention illustrated is that light beam is incident on the left of dielectric gratings normal, and measurement dielectric gratings are trapezoidal
The right base angle of embossment structureθ 2.For the left base angle of the trapezoidal embossment structure of measuring medium film gratingθ 1Still can symmetrically it be applicable in.
The present invention program implements simply, and independent of large-scale, complicated, expensive detection device.
Folded array light source of the present invention is not limited to certain specific laser light source, can be semiconductor laser and folds battle array, light
Fine laser array etc..
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (7)
1. a kind of dielectric gratings detection device, including folded array light source, convertible lens, dielectric gratings, optics rotation adjustment frame,
Spatial filter and output coupling mirror, the spatial filter is containing a pair of of lens and the filtering aperture being matched therewith, feature
It is,
The folded array light source and dielectric gratings are located at the front focal plane and back focal plane of convertible lens, and dielectric gratings are rotatably
It is placed on optics rotation adjustment frame；
Spatial filter and output coupling mirror are placed in optical grating diffraction direction.
2. convertible lens as described in claim 1, which is characterized in that the convertible lens is plus lens.
3. optics as described in claim 1 rotates adjustment frame, which is characterized in that dielectric gratings are fixed on optics rotation adjustment
On frame, the angle of dielectric gratings rotation is determined by optics rotation adjustment frame.
4. spatial filter as described in claim 1 and output coupling mirror, which is characterized in that spatial filter, which filters, to be removedkGrade
Other light beams outside diffracted beam, output coupling mirror willkGrade diffracted beam coupling output.
5. dielectric gratings detection device as described in claim 1, which is characterized in that the folded battle array light beam that folded array light source issues is each
Beamlet wavelength, the position of each subelement, convertible lens focal length, spatial filter position and mutual of output coupling mirror position
Match, in dielectric gratings rotation, each beamletkGrade diffracted beam is coupled by output coupling mirror and is exported.
6. dielectric gratings detection device as described in claim 1, which is characterized in that the operation of dielectric gratings detection device
Mode can be described as:
When folded battle array beam orthogonal dielectric gratings incidence, record optics rotates adjustment frame scaleφ 0；
It is equidirectional to continuously adjust optics rotation adjustment frame at a slow speed and observe coupling light energy output simultaneously, until prominent to coupling light energy output
Become, record optics rotates adjustment frame scaleφ 1；
The trapezoidal embossment base angle of dielectric gratings be calculated as pi/2-(φ 1-φ 0)；
Continue continuous equidirectional adjusting optics and rotate adjustment frame, luminous energy is first incremented by and successively decreases afterwards, records optics rotation when luminous energy peak value
Turn adjustment frame scaleφ 2, the optimized incidence that dielectric gratings are directed to folded battle array light beam wavelength is calculated asφ 2-φ 0。
7. dielectric gratings detection device as described in claim 1, which is characterized in that rotating shutter mode is taken to change folded battle array
Beam incident angle changes the phase-modulation of the left ridge of trapezoidal embossment, top and right ridge incident beam with this, and then changes coupling output
Luminous energy；It rotates optics and rotates adjustment frame, record coupling light energy output catastrophe point scale and peak point scale, calculation medium film grating
Trapezoidal embossment base angle and optimized incidence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811607155.6A CN109470455B (en) | 2018-12-27 | 2018-12-27 | Dielectric film grating detection device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811607155.6A CN109470455B (en) | 2018-12-27 | 2018-12-27 | Dielectric film grating detection device |
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| CN109470455A true CN109470455A (en) | 2019-03-15 |
| CN109470455B CN109470455B (en) | 2021-02-09 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113655625A (en) * | 2021-09-03 | 2021-11-16 | 西华大学 | Light beam device with atmospheric turbulence resistance |
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2018
- 2018-12-27 CN CN201811607155.6A patent/CN109470455B/en not_active Expired - Fee Related
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113655625A (en) * | 2021-09-03 | 2021-11-16 | 西华大学 | Light beam device with atmospheric turbulence resistance |
| CN113655625B (en) * | 2021-09-03 | 2023-09-05 | 西华大学 | Device for light beam with anti-atmospheric turbulence capability |
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