CN109458934A - A kind of optical micrometric displacement measuring system - Google Patents
A kind of optical micrometric displacement measuring system Download PDFInfo
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- CN109458934A CN109458934A CN201810725273.0A CN201810725273A CN109458934A CN 109458934 A CN109458934 A CN 109458934A CN 201810725273 A CN201810725273 A CN 201810725273A CN 109458934 A CN109458934 A CN 109458934A
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- photodiode array
- photodiode
- output voltage
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- laser
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 29
- 230000003287 optical effect Effects 0.000 title claims abstract description 9
- 238000005286 illumination Methods 0.000 claims abstract description 6
- 238000012545 processing Methods 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
- 230000005622 photoelectricity Effects 0.000 claims 1
- 230000005484 gravity Effects 0.000 abstract description 3
- 238000010009 beating Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 3
- 238000010606 normalization Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The invention discloses a kind of optical micrometric displacement measuring system, testee is connected by connecting rod with laser tube, and laser tube and testee have identical displacement；If the light that laser tube issues forms luminous point through lens system and only beats on photodiode array on some photoelectric diode, the position of laser tube is corresponding with light spot position in photodiode array, i.e., corresponding with the serial number of light-emitting diode.When beating when the hot spot of photodiode array may cover multiple diodes, according to Distribution of laser intensity on photodiode array, it is contemplated that an equivalent photodiode, serial number can be non-integer, and corresponding output voltage is V∑, whole light-emitting diodes are equal to the contribution of adder output and export V1…Vi…VnThe summation of contribution.The serial number of equivalent photodiode indicates the position of centre of gravity of photodiode array whole light-emitting diode, and position of centre of gravity is related with Distribution of laser intensity on photodiode array, unrelated with intensity of illumination, propagation attenuation.
Description
Technical field
The invention belongs to measuring instrument fields, are related to a kind of optical micrometric displacement measuring system.
Background technique
The reservoir stability of large reservoir, mountain highway, railway slope have the geological disasters such as crag, landslide, ground cleave.These calamities
Before evil occurs, micro-displacement will first occur for related ground.The heavy constructions such as bridge, dam, skyscraper can occur micro- in use
Displacement, Light deformation.These minor changes directly affect the safety of building.Microdisplacement measurement is the main monitoring hand of danger warning
Section.
Patent ZL20031011925.9 " a kind of microdisplacement measurement technology " is applied very well, but when measurement distance increases
When, quickly, such as apart from increasing 10 times, the reflected signal of corner reflector will weaken receiving signal attenuation under equal conditions
10000 times.At this moment corner reflector and antenna size or transmission power all need very big, this limits its application.Patent
ZL201310067245.1 " remote microdisplacement measurement technology " overcomes the above problem, replaces angle with coherent active reflector
Reflector can measure the micro-displacement of the outer object of kilometers up to ten thousand.
But above two microdisplacement measurement technology is all based on microwave phase comparing ranging, it is desirable that micro-displacement direction and observed direction base
This is consistent, otherwise reduces to the sensing sensitivity of micro-displacement.Which has limited certain applications, such as: to river-spanning bridge, to measure vapour
Micro displacement meter can not be placed on river surface by the vertical micro-displacement that vehicle is generated in bridge floor, and can be only placed on bridge pier.At this moment micro-
Direction of displacement is inconsistent with observed direction, near normal, cannot be with microwave than phase precise distance measurement.For another example: measuring barrage dam
Micro-displacement, dam downstream are rivers, we can only measure at dam both ends, and at this moment micro-displacement direction and observed direction are inconsistent,
Near normal, cannot be with microwave than phase precise distance measurement.
Summary of the invention
To overcome above-mentioned the deficiencies in the prior art, the present invention provides a kind of optical micrometric displacement measuring system.
As shown in Figure 1, testee 1 is connected by connecting rod with laser tube 2,2 just have identical displacement with 1, if they
Displacement range be d；2 light issued form luminous point through lens system 3 and play some photodiode in photodiode array 4
On, 2 position is corresponding with light spot position in photodiode array, i.e., corresponding with the serial number of light-emitting diode.Output circuit 5
The voltage for representing position data is provided according to serial number.This simple design will solve two problems in practice: although a, tested
Object microbit pan position and light-emitting diode serial number correspond, but laser propagation decaying influenced by atmospheric visibility it is very big,
Same testee position is under corresponding light-emitting diode serial number, and the laser intensity that weather difference reaches 4 is different, output circuit
Output voltage is different, cannot indicate position.B, the hot spot beaten in photodiode array may cover multiple diodes, i.e., multiple
Diode light.Output circuit should export the voltage for indicating testee displacement.Simply at a glance, a settable thresholding electricity
Pressure selects the maximum light-emitting diode serial number of output voltage to represent testee displacement.But reach swashing for photodiode array
Luminous intensity, so that photodiode output voltage, changes with atmospheric visibility and changed.The selection of this threshold voltage difficulty, must be with
Atmospheric visibility changes and changes.In addition in the case where low signal-to-noise ratio, it is difficult to distinguish maximum and secondary big two pole of light of output
Pipe.For this purpose, proposing data processing circuit shown in Fig. 2.
If photodiode array has n photodiode (to photodiode array S4111- popular in the market
16Q, S4111-35Q, S4111-46Q, n are respectively 16,35,46), output voltage is after photodiode receives laser irradiation
V1…Vi…Vn, they are output in parallel to data processing circuit.6 be n low-noise preamplifier.7 be that operational amplifier is constituted
Adder, U1For its output voltage, RfFor feedback resistance, G1…GnFor the electric conductivity value of n input resistance.8 be operational amplifier
The auxiliary adder of composition, U2For its output voltage, U=U1/U2RfFor feedback resistance, the electric conductivity value of n input resistance is all G.
9 be divider, output voltage are as follows:
WhereinTherefore
Illustrate G now1…Gi…GnCalculating it is as follows:
If n photodiode of photodiode array presses serial number i=1,2 ..., it is strong that n is successively individually closed on saturation
Spend laser irradiation, the identical voltage V of photodiode Sequential outputi=V, i=1,2 ..., n.It is required that adder output is with light light
The serial number i of electric diode increases and ladders is waited to increase.Adder output is V when i-th of photodiode lighti.It can be written: Vn
=VRfGn, Vi=VRfGi=Vn(i/n)=VRfGn(i/n), therefore
Gi=Gn(i/n) or Ri=Rn(n/i) (2)
Illustrate that output voltage U is unrelated with attenuation now, intensity of illumination and attenuation only influence signal-to-noise ratio.If V1…
Vi…VnIt is the output voltage of photodiode under primal environment, if Changes in weather reduces attenuation, intensity of illumination increases,
It is k (V that the output voltage of photodiode, which increases,1…Vi…Vn), then
It can be seen that: output voltage U is unrelated with intensity of illumination and attenuation.
When illustrating that the hot spot for irradiating photodiode array may cover multiple diodes now, output circuit output is indicated
Testee displacement.In order to make it easy to understand, at this moment exporting U if hot spot is beaten in neighboring diode seam crossing are as follows: AndThis is that hot spot impinges upon the output of i and i+1 photodiodeWithMedian.If hot spot averagely impinges upon on neighboring diode again, Vi=Vi+1, thenThis is exactly that hot spot averagely impinges upon the output of i and i+1 photodiodeWithAverage value.
After the output U of divider indicates photodiode array light under normal circumstances, n photodiode output voltage
It is distributed V1…Vi…VnNormalization weighted sum.Normalization factor is the denominator of U.Weight coefficient isWeight coefficient
After selected, U only with Distribution of laser intensity on photodiode array, i.e. V1…Vi…VnRelated amount is passed with weather visibility
It is unrelated to broadcast decaying.Distribution of laser intensity on photodiode array includes covering multiple diodes compared with large spot, even more than
Hot spot situation.The expression formula of U is rewritten as follows:
WhereinG∑=UG notices that G is constant.
After photodiode array light, it is contemplated that an equivalent photodiode, output voltage are V∑, serial number (can
To be non-integer) corresponding weight coefficient is G∑, it is equal to whole light-emitting diodes to the contribution of adder output and exports V1…Vi…
VnThe summation of contribution.Here it is the physical significances of U.It indicates the position of centre of gravity of photodiode array whole light-emitting diode.
Detailed description of the invention
Fig. 1 is optical micrometric displacement measuring principle figure.In Fig. 1,1 is testee；2 be laser tube；1 and 2 have identical position
It moves, displacement range d；3 be lens system, and 4 be photodiode array, and 5 be data processing and micro-displacement output circuit.
Fig. 2 is optical micrometric displacement measuring system output circuit schematic diagram.In Fig. 2,6 be photodiode array circuit, and 7 are
Low-noise preamplifier, 8 be the adder being made of operational amplifier, and 9 be the auxiliary adder being made of operational amplifier,
10 be divider.
Fig. 3 is to calculate R with Mathcadi(i=1,2 ..., 16) and Vi(i=1,2 ..., 16).
Implement measurement method
Such as: to n=16, if Rf=50k, R16=5k, V16=5 volts, then Ri=R16(16/i), is calculated with Mathcad
The weighted resistor R of adderi(i=1,2 ..., 16) and photodiode are by serial number successively individually by V when lighti(i=1,2 ...,
16).Pay attention to adjacent two ViDifference 0.3125.It is as follows:
Claims (2)
1. a kind of optical micrometric displacement measuring system, testee (1) is connected by connecting rod with laser tube (2), and the two has identical
Displacement, laser tube (2) issue light through lens system (3) formed hot spot beat on photodiode array (4), data processing
With the output voltage of micro-displacement output circuit (5) only it is related with Distribution of laser intensity on photodiode array, with intensity of illumination,
Propagation attenuation is unrelated, and Distribution of laser intensity includes that multiple diodes and multiple are covered compared with large spot on photodiode array (4)
Hot spot situation.
2. a kind of optical micrometric displacement measuring system according to claim 1, it is characterised in that: the data processing circuit
In, if photodiode array has n photodiode, output voltage is V after receiving laser irradiation1…Vi…Vn；It is low through n
It is sent to the adder being made of operational amplifier, U parallel after noise preamps amplification1For its output voltage, RfFor feedback electricity
Resistance, G1∧GnElectric conductivity value for n input resistance and the auxiliary adder that is made of operational amplifier, U2For its output voltage, U
=U1/U2RfFor feedback resistance, the electric conductivity value of n input resistance is all G；Divider output voltage is whereinThereforeOutput voltage U only with two pole of photoelectricity
Distribution of laser intensity is related on pipe array, unrelated with intensity of illumination, propagation attenuation；Laser intensity point on photodiode array
Cloth, including multiple diodes are covered compared with large spot, even more than hot spot situation；An equivalent photodiode can be envisaged, it is defeated
Voltage is V out∑, the corresponding weight coefficient of serial number (can be non-integer) is G∑, it is equal to all the contribution of adder output
Light-emitting diode exports V1…Vi…VnThe summation of contribution, it indicates the first moment of photodiode array whole light-emitting diode
Position.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810725273.0A CN109458934B (en) | 2018-07-04 | 2018-07-04 | Optical micro-displacement measurement system |
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|---|---|---|---|
| CN201810725273.0A CN109458934B (en) | 2018-07-04 | 2018-07-04 | Optical micro-displacement measurement system |
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| CN109458934B CN109458934B (en) | 2023-11-07 |
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Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0560557A (en) * | 1991-09-05 | 1993-03-09 | Sumitomo Electric Ind Ltd | Optical method and device for measuring micro displacement |
| JPH05141935A (en) * | 1991-09-27 | 1993-06-08 | Ricoh Co Ltd | Measuring method and measuring device for small displacement quantity |
| JP2003232610A (en) * | 2002-02-06 | 2003-08-22 | Meiyuu Giken Kk | Method of measuring micro displacement |
| JP2005207849A (en) * | 2004-01-22 | 2005-08-04 | Seikoh Giken Co Ltd | Micro-displacement measuring device |
| JP2006226853A (en) * | 2005-02-18 | 2006-08-31 | Keyence Corp | Distance setting type photoelectric sensor |
| US20070127038A1 (en) * | 2005-12-02 | 2007-06-07 | Hon Hai Precision Industry Co., Ltd. | Optical measuring device |
| US7247827B1 (en) * | 2006-05-31 | 2007-07-24 | Academia Sinica | System for measurement of the height, angle and their variations of the surface of an object |
| WO2008123104A1 (en) * | 2007-03-27 | 2008-10-16 | Nec Corporation | Micro-displacement measuring device, micro-displacement measuring method, and micro-displacement measuring program |
| CN102155927A (en) * | 2011-03-22 | 2011-08-17 | 浙江大学 | Two-dimensional micro angle measuring device based on laser auto-collimation |
| CN102620756A (en) * | 2012-03-27 | 2012-08-01 | 天津大学 | Phase sensitive demodulator (PSD) signal single-channel processing method based on modulated laser, and processing circuit |
| CN103411545A (en) * | 2013-08-13 | 2013-11-27 | 天津大学 | Multi-axis system error modeling and measuring device and method based on optical free-form surface |
| CN204831202U (en) * | 2015-07-23 | 2015-12-02 | 魏开 | Detecting system is moved to optic fibre microbit |
| CN209101998U (en) * | 2018-07-04 | 2019-07-12 | 重庆大学 | A kind of optical micrometric displacement measuring system |
-
2018
- 2018-07-04 CN CN201810725273.0A patent/CN109458934B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0560557A (en) * | 1991-09-05 | 1993-03-09 | Sumitomo Electric Ind Ltd | Optical method and device for measuring micro displacement |
| JPH05141935A (en) * | 1991-09-27 | 1993-06-08 | Ricoh Co Ltd | Measuring method and measuring device for small displacement quantity |
| JP2003232610A (en) * | 2002-02-06 | 2003-08-22 | Meiyuu Giken Kk | Method of measuring micro displacement |
| JP2005207849A (en) * | 2004-01-22 | 2005-08-04 | Seikoh Giken Co Ltd | Micro-displacement measuring device |
| JP2006226853A (en) * | 2005-02-18 | 2006-08-31 | Keyence Corp | Distance setting type photoelectric sensor |
| US20070127038A1 (en) * | 2005-12-02 | 2007-06-07 | Hon Hai Precision Industry Co., Ltd. | Optical measuring device |
| US7247827B1 (en) * | 2006-05-31 | 2007-07-24 | Academia Sinica | System for measurement of the height, angle and their variations of the surface of an object |
| WO2008123104A1 (en) * | 2007-03-27 | 2008-10-16 | Nec Corporation | Micro-displacement measuring device, micro-displacement measuring method, and micro-displacement measuring program |
| CN102155927A (en) * | 2011-03-22 | 2011-08-17 | 浙江大学 | Two-dimensional micro angle measuring device based on laser auto-collimation |
| CN102620756A (en) * | 2012-03-27 | 2012-08-01 | 天津大学 | Phase sensitive demodulator (PSD) signal single-channel processing method based on modulated laser, and processing circuit |
| CN103411545A (en) * | 2013-08-13 | 2013-11-27 | 天津大学 | Multi-axis system error modeling and measuring device and method based on optical free-form surface |
| CN204831202U (en) * | 2015-07-23 | 2015-12-02 | 魏开 | Detecting system is moved to optic fibre microbit |
| CN209101998U (en) * | 2018-07-04 | 2019-07-12 | 重庆大学 | A kind of optical micrometric displacement measuring system |
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| CN109458934B (en) | 2023-11-07 |
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