CN109440064A - A kind of Thermal Conductivity Varying With Temperature cutter coat and preparation method thereof - Google Patents
A kind of Thermal Conductivity Varying With Temperature cutter coat and preparation method thereof Download PDFInfo
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- CN109440064A CN109440064A CN201811354371.4A CN201811354371A CN109440064A CN 109440064 A CN109440064 A CN 109440064A CN 201811354371 A CN201811354371 A CN 201811354371A CN 109440064 A CN109440064 A CN 109440064A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drilling Tools (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
A kind of Thermal Conductivity Varying With Temperature cutter coat and preparation method thereof, it is related to cutter material field, the Thermal Conductivity Varying With Temperature cutter coat includes the bottom adhesive layer for being sequentially deposited to tool matrix surface, intermediate Wear-resistant heat insulation layer and surface radiating layer, the intermediate Wear-resistant heat insulation layer is formed using lower thermal conductivity coating with high heat conductance coating alternating deposit, the surface radiating layer is high heat conductance surface radiating layer, the present invention, which is formed, has high heat conductance surface radiating layer, the multilayer multi-element coating of nano-multilayered structures intermediate thermal insulating layer and high-bond bottom adhesive layer, it being capable of rapid cooling and effectively insulating, solve the problems, such as tool matrix failure phenomenon and point of a knife accumulated heat caused by excessive cutting heat.
Description
Technical field
The present invention relates to cutter material fields, and in particular to a kind of Thermal Conductivity Varying With Temperature cutter coat and Thermal Conductivity Varying With Temperature cutter
The preparation method of coating.
Background technique
There are a some difficult to machine materials, such as precipitation-hardening stainless steel, titanium alloy, hardened steel etc., because its intensity and hardness are high,
The reasons such as poor thermal conductivity, plasticity is high, and chemical element is active, so that tool wear is too fast, processing efficiency is reduced, increased costs.
PVD/CVD coated cutting tool has the characteristics such as high surface hardness, high-wearing feature, stable chemical performance, coefficient of friction be small, with non-coating
Cutter is compared, and in machining, cutter life can be improved 3-5 times or more, becomes the preferred knife of current difficult-to-machine material processing
Tool.Although most of coating has good thermal stability, cutter heat resistance can be effectively improved, partial coating has high fever
Conductance characteristic (as shown in Figure 1) makes the excessive too fast tool matrix that reaches of cutting heat cause tool matrix softening failure, and then influences
Processing quality and processing efficiency.But lower thermal conductivity coated cutting tool has also obstructed cutting heat while playing good heat-blocking action
Export along parallel tool surface direction easily causes the accumulation aggravation of point of a knife position cutting heat, and then leads to coated cutting tool
Stronger bonding abrasion and diffusive wear such as have the high aluminium component PVD nitride coatings of high thermal stability and lower thermal conductivity:
CrAlN, AlTiCrN, AlTiSiN, AlCrSiN etc..Therefore, a kind of method is needed, to solve caused by excessive cutting heat
The problem of tool matrix failure phenomenon and point of a knife accumulated heat.
Summary of the invention
A kind of Thermal Conductivity Varying With Temperature cutter painting is provided it is an object of the present invention to avoiding shortcoming in the prior art
Layer, solves the problems, such as the phenomenon that excessive cutting heat causes tool matrix to fail and point of a knife accumulated heat.
The second object of the present invention is to avoid shortcoming in the prior art and provide a kind of Thermal Conductivity Varying With Temperature cutter painting
Preparation method, solve the problems, such as the phenomenon that excessive cutting heat causes tool matrix to fail and point of a knife accumulated heat, and prepared by the coating
Simple process and low cost, adaptability is good, there is very big application potentiality.
The purpose of the present invention is achieved through the following technical solutions: being provided a kind of Thermal Conductivity Varying With Temperature cutter coat, including is successively sunk
Accumulating the bottom adhesive layer in tool matrix surface, intermediate Wear-resistant heat insulation layer and surface radiating layer, the intermediate Wear-resistant heat insulation layer is
The intermediate Wear-resistant heat insulation layer made of lower thermal conductivity coating and high heat conductance coating alternating deposit, the surface radiating layer are height
Thermal conductivity surface radiating layer.
Wherein, the lower thermal conductivity coating be Cr-Al-X-N coating or Ti-Si-Me-N coating, wherein X be Ti, Si,
B, at least one of V, Y, at least one of Me Al, Cr, Nb, V, Y.
Wherein, the surface radiating layer with a thickness of 0.1-2um.
Wherein, the intermediate Wear-resistant heat insulation layer with a thickness of 0.1-2um.
Wherein, the bottom adhesive layer with a thickness of 0.1-2um.
In addition, also providing a kind of preparation method of above-mentioned Thermal Conductivity Varying With Temperature cutter coat, comprise the following specific steps that:
S1: tool matrix cleaning: by tool matrix polishing treatment, being then successively cleaned by ultrasonic 10~20min with acetone, alcohol,
It is packed into vacuum chamber with after being dried with nitrogen again；
S2: aura cleaning and Cr ion bombardment: being passed through gas is Ar, and furnace chamber vacuum degree is 0.01-1Pa, and matrix adds the back bias voltage to be
300-1000V, carries out a length of 5-35min when aura cleaning, then adjusts substrate negative voltage to 50-300V, opens Cr target, adjustment
Target current is 100-350A, and a length of 1-10min is when with Cr high-energy ionic bombardment matrix with activated matrix surface；
S3: preparation bottom adhesive layer: target is Ti or Cr, and being passed through gas is N2, and adjustment plating film pressure is 1-5Pa, tool matrix
Negative bias voltage is 50-400V, target current 100-400A;
S4: prepare intermediate Wear-resistant heat insulation layer: sharing two groups of targets, one group is Ti or TiAl, another group for CrAlX or
TiSiMe, being passed through gas is N2, and adjustment plating film pressure is 1-5Pa, and adjustment tool matrix negative bias voltage is 30-200V, arc source electricity
Stream is 200-400A；Two groups of target alternating deposits form high/low thermal conductivity alternately deposited layers；
S5: prepare surface radiating layer: target is Ti or TiAl, and being passed through gas is N2 and C2H2, and adjustment plating film pressure is 1-
5Pa, adjustment tool matrix negative bias voltage are 30-200V, and arc ource electric current is 200-400A；
S6: closing arc power, is down to room temperature to vacuum room temperature, opens vacuum chamber and takes out matrix, is formed in matrix surface
Coating, as Thermal Conductivity Varying With Temperature cutter coat.
Wherein, in step S4, the X in the CrAlX is at least one of Ti, Si, B, V, Y, in the TiSiMe
Me be at least one of Al, Cr, Nb, V, Y.
Wherein, in step S4, the time cycle of alternating deposit is 10 ~ 200nm.
Wherein, the bottom adhesive layer, with atomic percentage, Cr or Ti and 35%-65% including 35%-65%
N, wherein N be CrN or TiN in N content.
Wherein, the bottom adhesive layer, with atomic percentage, including 45% Cr or Ti and 55% N.
Beneficial effects of the present invention: a kind of Thermal Conductivity Varying With Temperature cutter coat of the invention, including it is sequentially deposited to tool matrix
The bottom adhesive layer on surface, intermediate Wear-resistant heat insulation layer and surface radiating layer, the intermediate Wear-resistant heat insulation layer are using lower thermal conductivity
Intermediate Wear-resistant heat insulation layer, the surface radiating layer made of coating and high heat conductance coating alternating deposit dissipate for high heat conductance surface
Thermosphere, being formed has high heat conductance surface radiating layer, nano-multilayered structures intermediate thermal insulating layer and high-bond bottom adhesive layer
Multilayer multi-element coating, can rapid cooling and effectively insulating, it is existing to solve the failure of tool matrix caused by excessive cutting heat
As and the problem of point of a knife accumulated heat.
A kind of preparation method of Thermal Conductivity Varying With Temperature cutter coat of the invention, passes through the cleaning of tool matrix, bottom adhesive layer
Preparation, the deposition of intermediate thermal insulating layer and the preparation of surface radiating layer, solve tool matrix caused by excessive cutting heat mistake
The problem of imitating phenomenon and point of a knife accumulated heat, and the preparation technology of coating is simple, low in cost, adaptability is good, has very big application to push away
Wide potentiality.
Detailed description of the invention
Invention is described further using attached drawing, but the embodiments in the accompanying drawings do not constitute any limitation to the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to the following drawings
Its attached drawing.
Fig. 1 is common coating thermal conductivity range table in background technique；
Fig. 2 is cutter coat structural schematic diagram of the invention；
In figure, 1- surface radiating layer, 2- intermediate thermal insulating layer, 3- bottom adhesive layer, 4- tool matrix.
Specific embodiment
Specific implementation of the invention is described further below in conjunction with drawings and examples, but the invention is not limited to
This.
Embodiment one:
S1: tool matrix cleaning: by tool matrix polishing treatment, being then successively cleaned by ultrasonic 10min with acetone, alcohol, then
It is packed into vacuum chamber with after being dried with nitrogen；
S2: when carrying out aura cleaning and cr ion bombardment, being passed through gas is Ar gas, and furnace chamber vacuum degree is 1Pa, and matrix adds back bias voltage
300V carries out aura and cleans 5min, then adjustment substrate negative voltage to 300V, opens cr target, and adjustment target current is 350A, with
Cr high-energy ionic bombards matrix 1min with activated matrix surface；
S3: preparation bottom adhesive layer, target Ti, being passed through gas is N2, and adjustment plating film pressure is 2Pa, tool matrix negative bias electricity
Pressure is 50V, target current 100A;
S4: intermediate Wear-resistant heat insulation layer deposition, target are CrAlB and Ti, and being passed through gas is N2, and adjustment plating film pressure is 3Pa, adjustment
Tool matrix negative bias voltage is 60V, arc ource electric current 200A；And by CrAlB and Ti target alternating deposit, the time cycle of alternating deposit
For 10nm.
S5: preparing surface radiating layer: target Ti, and being passed through gas is N2, and adjustment plating film pressure is 1Pa, and tool matrix is negative
Bias-voltage is 50V, target current 300A;
S6: closing arc power, is down to room temperature to vacuum room temperature, opens vacuum chamber and takes out matrix, is formed in matrix surface
Coating, as Thermal Conductivity Varying With Temperature cutter coat.
The heat dissipating layer of the Thermal Conductivity Varying With Temperature cutter coat of the present embodiment with a thickness of 1 um, intermediate Wear-resistant heat insulation layer with a thickness of
0.8 um, bottom adhesive layer with a thickness of 1.2 um, structure such as Fig. 2 of heat dissipating layer, intermediate Wear-resistant heat insulation layer and bottom adhesive layer
Shown, wherein bottom adhesive layer is with atomic percentage, the N including 45% Cr and 55%, and being formed, there is high heat conductance surface to dissipate
The multilayer multi-element coating of thermosphere, nano-multilayered structures intermediate thermal insulating layer and high-bond bottom adhesive layer, being capable of rapid cooling
And effectively insulating, solve the problems, such as tool matrix failure phenomenon and point of a knife accumulated heat caused by excessive cutting heat.
Embodiment two:
S1: tool matrix cleaning: by tool matrix polishing treatment, being then successively cleaned by ultrasonic 15min with acetone, alcohol, then
It is packed into vacuum chamber with after being dried with nitrogen；
S2: when carrying out aura cleaning and cr ion bombardment, being passed through gas is Ar gas, and furnace chamber vacuum degree is 1Pa, and matrix adds back bias voltage
400V carries out aura and cleans 10min: and then adjustment substrate negative voltage opens cr target to 250V, adjustment target current is 300A,
With cr high-energy ionic bombardment matrix 3min with activated matrix surface；
S3: preparation bottom adhesive layer, target Cr, being passed through gas is N2, and adjustment plating film pressure is 2Pa, tool matrix negative bias electricity
Pressure is 50V, target current 100A;
S4: intermediate Wear-resistant heat insulation layer: target is CrAlY and Ti, and being passed through gas is N2, and adjustment plating film pressure is 3Pa, adjusts cutter
Matrix negative bias voltage is 50V, arc ource electric current 200A, and by CrAlY and Ti target alternating deposit, the time cycle of alternating deposit is
50nm。
S5: surface radiating layer: target Ti, being passed through gas is N2, and adjustment plating film pressure is 2Pa, tool matrix negative bias electricity
Pressure is 100V, target current 300A;
S6: closing arc power, is down to room temperature to vacuum room temperature, opens vacuum chamber and takes out matrix, is formed in matrix surface
Coating, as Thermal Conductivity Varying With Temperature cutter coat.
The heat dissipating layer of the Thermal Conductivity Varying With Temperature cutter coat of the present embodiment with a thickness of 1.2um, intermediate Wear-resistant heat insulation layer with a thickness of
0.6 um, bottom adhesive layer with a thickness of 1.4 um, wherein bottom adhesive layer is with atomic percentage, including 35% Ti and 65%
N, being formed has high heat conductance surface radiating layer, nano-multilayered structures intermediate thermal insulating layer and high-bond bottom adhesive layer
Multilayer multi-element coating, can rapid cooling and effectively insulating, solve tool matrix failure phenomenon caused by excessive cutting heat
And the problem of point of a knife accumulated heat.
Embodiment three:
S1: tool matrix cleaning: by tool matrix polishing treatment, being then successively cleaned by ultrasonic 20min with acetone, alcohol, then
It is packed into vacuum chamber with after being dried with nitrogen；
S2: when carrying out aura cleaning and cr ion bombardment, being passed through gas is Ar gas, and furnace chamber vacuum degree is 1Pa, and matrix adds back bias voltage
500V carries out aura and cleans 15min, then adjustment substrate negative voltage to 200V, opens cr target, and adjustment target current is 200A,
With cr high-energy ionic bombardment matrix 5min with activated matrix surface；
S3: preparation bottom adhesive layer, target Cr, being passed through gas is N2, and adjustment plating film pressure is 2Pa, tool matrix negative bias electricity
Pressure is 100V, target current 100A;
S4: intermediate Wear-resistant heat insulation layer: target is CrAlY and Ti, and being passed through gas is N2, and adjustment plating film pressure is 3Pa, adjusts cutter
Matrix negative bias voltage is 50V, arc ource electric current 200A, and by CrAlY and Ti target alternating deposit, the time cycle of alternating deposit is
100nm。
S5: surface radiating layer: target Ti, being passed through gas is N2, and adjustment plating film pressure is 2Pa, tool matrix negative bias electricity
Pressure is 100V, target current 300A;
S6: closing arc power, is down to room temperature to vacuum room temperature, opens vacuum chamber and takes out matrix, is formed in matrix surface
Coating, as Thermal Conductivity Varying With Temperature cutter coat.
The heat dissipating layer of the Thermal Conductivity Varying With Temperature cutter coat of the present embodiment with a thickness of 0.7um, intermediate Wear-resistant heat insulation layer with a thickness of
1.2 um, bottom adhesive layer with a thickness of 0.8 um, wherein bottom adhesive layer is with atomic percentage, including 65% Ti and 35%
N, being formed has high heat conductance surface radiating layer, nano-multilayered structures intermediate thermal insulating layer and high-bond bottom adhesive layer
Multilayer multi-element coating, can rapid cooling and effectively insulating, solve tool matrix failure phenomenon caused by excessive cutting heat
And the problem of point of a knife accumulated heat.
Example IV:
S1: tool matrix cleaning: by tool matrix polishing treatment, being then successively cleaned by ultrasonic 15min with acetone, alcohol, then
It is packed into vacuum chamber with after being dried with nitrogen；
S2: when carrying out aura cleaning and cr ion bombardment, being passed through gas is Ar gas, and furnace chamber vacuum degree is 1Pa, and matrix adds back bias voltage
600V carries out aura and cleans 15min, then adjustment substrate negative voltage to 200V, opens cr target, and adjustment target current is 200A,
With cr high-energy ionic bombardment matrix 5min with activated matrix surface；
S3: preparation bottom adhesive layer, target Ti, being passed through gas is N2, and adjustment plating film pressure is 1Pa, tool matrix negative bias electricity
Pressure is 150V, target current 100A;
S4: intermediate Wear-resistant heat insulation layer: target is TiAlSi and Ti, and being passed through gas is N2, and adjustment plating film pressure is 2Pa, adjusts knife
Tool matrix negative bias voltage is 50V, arc ource electric current 200A, and by CrAlY and Ti target alternating deposit, the time cycle of alternating deposit is
200nm。
S5: surface radiating layer: target Ti, being passed through gas is N2, and adjustment plating film pressure is 3Pa, tool matrix negative bias electricity
Pressure is 100V, target current 300A;
S6: closing arc power, is down to room temperature to vacuum room temperature, opens vacuum chamber and takes out matrix, is formed in matrix surface
Coating, as Thermal Conductivity Varying With Temperature cutter coat.
The heat dissipating layer of the Thermal Conductivity Varying With Temperature cutter coat of the present embodiment with a thickness of 1um, intermediate Wear-resistant heat insulation layer with a thickness of 0.9
Um, bottom adhesive layer with a thickness of 1.1 um, wherein bottom adhesive layer is with atomic percentage, the N including 35% Cr and 65%,
Form the multilayer with high heat conductance surface radiating layer, nano-multilayered structures intermediate thermal insulating layer and high-bond bottom adhesive layer
Multi-element coating, can rapid cooling and effectively insulating, solve tool matrix failure phenomenon and knife caused by excessive cutting heat
The problem of sharp accumulated heat.
Embodiment five:
S1: tool matrix cleaning: by tool matrix polishing treatment, being then successively cleaned by ultrasonic 15min with acetone, alcohol, then
It is packed into vacuum chamber with after being dried with nitrogen；
S2: when carrying out aura cleaning and cr ion bombardment, being passed through gas is Ar gas, and furnace chamber vacuum degree is 1Pa, and matrix adds back bias voltage
300V carries out aura and cleans 5min, then adjustment substrate negative voltage to 300V, opens cr target, and adjustment target current is 350A, with
Cr high-energy ionic bombards matrix 1min with activated matrix surface；
S3: preparation bottom adhesive layer, target Ti, being passed through gas is N2, and adjustment plating film pressure is 2Pa, tool matrix negative bias electricity
Pressure is 50V, target current 100A;
S4: intermediate Wear-resistant heat insulation layer deposition, target are CrAlB and Ti, and being passed through gas is N2, and adjustment plating film pressure is 3Pa, adjustment
Tool matrix negative bias voltage is 60V, arc ource electric current 200A；And by CrAlB and Ti target alternating deposit, the time cycle of alternating deposit
For 10nm.
S5: preparing surface radiating layer: target Ti, and being passed through gas is N2, and adjustment plating film pressure is 1Pa, and tool matrix is negative
Bias-voltage is 50V, target current 300A;
S6: closing arc power, is down to room temperature to vacuum room temperature, opens vacuum chamber and takes out matrix, is formed in matrix surface
Coating, as Thermal Conductivity Varying With Temperature cutter coat.
The heat dissipating layer of the Thermal Conductivity Varying With Temperature cutter coat of the present embodiment with a thickness of 1 um, intermediate Wear-resistant heat insulation layer with a thickness of
0.8 um, bottom adhesive layer with a thickness of 1.2 um, structure such as Fig. 2 of heat dissipating layer, intermediate Wear-resistant heat insulation layer and bottom adhesive layer
Shown, wherein bottom adhesive layer is with atomic percentage, the N including 45% Ti and 55%, and being formed, there is high heat conductance surface to dissipate
The multilayer multi-element coating of thermosphere, nano-multilayered structures intermediate thermal insulating layer and high-bond bottom adhesive layer, being capable of rapid cooling
And effectively insulating, solve the problems, such as tool matrix failure phenomenon and point of a knife accumulated heat caused by excessive cutting heat.
Finally it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than the present invention is protected
The limitation of range is protected, although explaining in detail referring to preferred embodiment to the present invention, those skilled in the art are answered
Work as understanding, it can be with modification or equivalent replacement of the technical solution of the present invention are made, without departing from the reality of technical solution of the present invention
Matter and range.
Claims (10)
1. a kind of Thermal Conductivity Varying With Temperature cutter coat, it is characterised in that: including be sequentially deposited to tool matrix surface bottom adhesive layer,
Intermediate Wear-resistant heat insulation layer and surface radiating layer, the intermediate Wear-resistant heat insulation layer are using lower thermal conductivity coating and high heat conductance coating
Intermediate Wear-resistant heat insulation layer made of alternating deposit, the surface radiating layer are high heat conductance surface radiating layer.
2. a kind of Thermal Conductivity Varying With Temperature cutter coat according to claim 1, it is characterised in that: the lower thermal conductivity coating is
Cr-Al-X-N coating or Ti-Si-Me-N coating, wherein X is at least one of Ti, Si, B, V, Y, Me Al, Cr, Nb,
V, at least one of Y.
3. a kind of Thermal Conductivity Varying With Temperature cutter coat according to claim 1, it is characterised in that: the thickness of the surface radiating layer
For 0.1-2um.
4. a kind of Thermal Conductivity Varying With Temperature cutter coat according to claim 1, it is characterised in that: the intermediate Wear-resistant heat insulation layer
With a thickness of 0.1-2um.
5. a kind of Thermal Conductivity Varying With Temperature cutter coat according to claim 1, it is characterised in that: the thickness of the bottom adhesive layer
For 0.1-2um.
6. a kind of preparation method of the described in any item Thermal Conductivity Varying With Temperature cutter coats of claim 1-5, which is characterized in that including
Following specific steps:
S1: tool matrix cleaning: by tool matrix polishing treatment, being then successively cleaned by ultrasonic 10~20min with acetone, alcohol,
It is packed into vacuum chamber with after being dried with nitrogen again；
S2: aura cleaning and Cr ion bombardment: being passed through gas is Ar, and furnace chamber vacuum degree is 0.01-1Pa, and matrix adds the back bias voltage to be
300-1000V, carries out a length of 5-35min when aura cleaning, then adjusts substrate negative voltage to 50-300V, opens Cr target, adjustment
Target current is 100-350A, and a length of 1-10min is when with Cr high-energy ionic bombardment matrix with activated matrix surface；
S3: preparation bottom adhesive layer: target is Ti or Cr, and being passed through gas is N2, and adjustment plating film pressure is 1-5Pa, tool matrix
Negative bias voltage is 50-400V, target current 100-400A;
S4: prepare intermediate Wear-resistant heat insulation layer: sharing two groups of targets, one group is Ti or TiAl, another group for CrAlX or
TiSiMe, being passed through gas is N2, and adjustment plating film pressure is 1-5Pa, and adjustment tool matrix negative bias voltage is 30V-200V, arc source electricity
Stream is 200-400A；Two groups of target alternating deposits form high/low thermal conductivity alternately deposited layers；
S5: prepare surface radiating layer: target is Ti or TiAl, and being passed through gas is N2 and C2H2, and adjustment plating film pressure is 1-
5Pa, adjustment tool matrix negative bias voltage are 30-200V, and arc ource electric current is 200-400A；
S6: closing arc power, is down to room temperature to vacuum room temperature, opens vacuum chamber and takes out matrix, is formed in matrix surface
Coating, as Thermal Conductivity Varying With Temperature cutter coat.
7. preparation method according to claim 6, it is characterised in that: in step S4, X in the CrAlX be Ti, Si,
B, at least one of V, Y, the Me in the TiSiMe are at least one of Al, Cr, Nb, V, Y.
8. preparation method according to claim 6, it is characterised in that: in step S4, time cycle of alternating deposit is 10 ~
200nm。
9. preparation method according to claim 6, it is characterised in that: the bottom adhesive layer, with atomic percentage, packet
The Cr or Ti of 35%-65% and the N of 35%-65% are included, wherein N is the N content in CrN or TiN.
10. preparation method according to claim 9, it is characterised in that: the bottom adhesive layer, with atomic percentage,
Including 45% Cr or Ti, and 55% N.
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Application publication date: 20190308 |