CN109424528B - Gas delivery device - Google Patents

Abstract

The invention provides a gas conveying device which is formed by sequentially stacking a shell, a gas injection hole sheet, a cavity frame, an actuator, an insulating frame and a conductive frame. The shell is provided with a conduit extending outwards, the conduit is provided with a guide-out channel and a guide-out hole, and the guide-out channel is in a tapered shape which is gradually reduced from big to small. A resonance chamber is formed among the actuator, the cavity frame and the suspension sheet, the actuator drives the air injection hole sheet to vibrate, so that the suspension sheet of the air injection hole sheet generates reciprocating vibration displacement, air enters the airflow chamber through at least one gap of the air injection hole sheet and is exhausted through a guide pipe of the shell, and the transmission and flow of the air are realized.

Description

Gas delivery device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a gas delivery device, and more particularly, to a miniature, silent, and high-speed gas delivery device.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, and therefore, how to break through the technical bottleneck thereof by means of innovative structures is an important content of development.

With the development of technology, the applications of gas delivery devices are becoming more diversified, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even recently, the image of a wearable device is seen, which means that the conventional gas delivery devices have been gradually miniaturized and the flow rate thereof is becoming larger.

In the prior art, the gas conveying device is mainly formed by stacking conventional mechanism components, and each mechanism component is minimized or thinned, so as to achieve the purpose of miniaturization and thinning of the whole device. However, after the conventional mechanism is miniaturized, the dimensional accuracy is difficult to control, and the assembly accuracy is also difficult to control, thereby causing problems of inconsistent product yield, unstable flow rate of fluid delivery, and the like. Furthermore, in the known gas transmission device, the output gas cannot be effectively collected, or the size of the components is too small, so that the propelling force of the gas is insufficient, and the gas transmission flow is insufficient.

Therefore, how to develop a micro fluid transmission device that can improve the above-mentioned shortcomings of the known technology, achieve the purpose of small volume, miniaturization and silence of the conventional instruments or equipment using the fluid transmission device, overcome the problems of difficult control of the miniature size precision and insufficient flow rate, and be flexibly applied to various devices is a problem that needs to be solved at present.

[ summary of the invention ]

The main objective of the present invention is to provide a gas delivery device, which overcomes the problems of the conventional gas delivery device that the volume is small, the miniaturization is small, the noise is low, and the dimensional accuracy is controlled by the special flow channel and the jet plate design of the gas delivery device.

The main objective of the present invention is to provide a gas delivery device, which utilizes the design of a square resonance chamber and a conduit with a special diameter to make a piezoelectric component and the square resonance chamber achieve helmholtz resonance, and make the output gas be rapidly ejected in an ideal fluid state close to the bernoulli's law, so as to solve the problem of insufficient gas transmission flow in the prior art.

To achieve the above objects, one broad aspect of the present invention provides a gas delivery device for transmitting a flow of gas, comprising: the shell comprises at least one fixed groove, a containing groove and an exhaust hole, the containing groove is provided with a bottom surface, the shell extends a guide pipe outwards at the position of the exhaust hole, the guide pipe is provided with a guide-out channel and a guide-out hole, the guide-out channel is communicated to the containing groove through the exhaust hole and is communicated to the outside of the shell through the guide-out hole, and the guide-out channel is in a taper shape gradually reduced from big to small; the air injection hole piece comprises at least one bracket, a suspension piece and a hollow hole, the suspension piece can be bent and vibrated, the at least one bracket is sleeved in the at least one fixed groove so as to position the air injection hole piece to be contained in the containing groove, an air flow chamber is formed between the air injection hole piece and the bottom surface of the containing groove, the air flow chamber is communicated with the air exhaust hole, and at least one gap is formed between the at least one bracket, the suspension piece and the shell; the cavity frame is superposed on the suspension plate in a bearing manner; the actuator is superposed on the cavity frame and applies voltage to generate reciprocating bending vibration; an insulating frame bearing the actuator; the conductive frame is arranged on the insulating frame in a bearing and stacking mode; the actuator, the cavity frame and the suspension sheet form a resonance chamber, the actuator drives the air injection hole sheet to resonate, so that the suspension sheet of the air injection hole sheet generates reciprocating vibration displacement to cause gas to enter the airflow chamber through at least one gap and then be discharged through the exhaust hole, and the transmission and flow of the gas are realized.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of an appearance of a gas delivery device according to a preferred embodiment of the invention.

FIG. 2A is an exploded front view of the gas delivery device of FIG. 1.

FIG. 2B is an exploded rear view of the gas delivery device of FIG. 1.

Fig. 3 is an external structural view of the housing shown in fig. 2A.

Fig. 4 is a schematic top view of the air hole plate shown in fig. 2A.

FIG. 5A is a schematic sectional view A-A of the gas delivery device shown in FIG. 1.

Fig. 5B and 5C are schematic cross-sectional operation diagrams of the gas delivery device shown in fig. 5A.

[ notation ] to show

1: gas delivery device

11: shell body

111: containing groove

111 a: bottom surface

112: air vent

113: fixing groove

114: first opening

115: second opening

116: catheter tube

117: lead-out channel

118: lead-out hole

12: air injection hole sheet

120: support frame

121: suspension plate

122: fixing part

123: connecting part

124: hollow hole

125: voids

13: cavity frame

130: resonance chamber

14: actuator

141: piezoelectric carrier plate

1411: first conductive pin

142: tuning the resonator plate

143: piezoelectric patch

17: insulating frame

18: conductive frame

181: second conductive pin

182: electrode for electrochemical cell

19: airflow chamber

[ detailed description ] embodiments

Some exemplary embodiments that embody features and advantages of the invention will be described in detail in the description that follows. It is to be understood that the invention is capable of modification in various respects, all without departing from the scope of the invention, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 1, fig. 2A and fig. 2B, fig. 1 is a schematic exterior structure diagram of a gas delivery device according to a preferred embodiment of the present invention, fig. 2A is a schematic front exploded view of the gas delivery device shown in fig. 1, and fig. 2B is a schematic back exploded view of the gas delivery device shown in fig. 1. As shown in fig. 1, 2A and 2B, the gas delivery device 1 of the present embodiment is a miniaturized gas delivery structure, and delivers a large amount of gas at a high speed. The gas delivery device 1 of the present embodiment is formed by stacking the housing 11, the gas injection hole 12, the chamber frame 13, the actuator 14, the insulating frame 17, and the conductive frame 18 in sequence.

Referring to fig. 2A, fig. 2B and fig. 3, fig. 3 is an external structural schematic view of the housing shown in fig. 2A. As shown in the figure, the housing 11 of the present embodiment includes a receiving groove 111, an air vent 112, at least one fixing groove 113, a first opening 114, a second opening 115, and a guide tube 116 (as shown in fig. 2B), wherein the receiving groove 111 includes a bottom surface 111a, and the receiving groove 111 is a recessed square groove structure inside the housing 11, that is, the bottom surface 111a of the receiving groove 111 is a square bottom surface, but not limited thereto. In other embodiments of the present invention, the shape of the accommodating groove 113 may be one of a circle, an ellipse, a triangle and a polygon, but not limited thereto. The accommodating groove 111 of the present embodiment is used for accommodating the stacked air injection hole piece 12, the cavity frame 13, the actuator 14, the insulating frame 17 and the conductive frame 18 therein. The air outlet 112 of the present embodiment is disposed through the center of the bottom 111a for air to flow through, and as shown in fig. 5A, the air outlet 112 is connected to the conduit 116. The at least one fixing groove 113 of the present embodiment is for fixing the air injection hole piece 12 therein, the number of the fixing grooves 113 of the present embodiment is 4, and the number of the fixing grooves 113 is respectively and correspondingly disposed on the four corners of the housing 11 adjacent to the accommodating groove 111, and is an L-shaped groove structure. As shown in fig. 2B and fig. 3, the conduit 116 of the present embodiment is a long cylindrical hollow tubular structure, the conduit 116 further includes a guiding channel 117 and a guiding hole 118, the guiding channel 117 of the conduit 116 is communicated to the receiving groove 111 through the exhaust hole 112, the guiding channel 117 of the conduit 116 is communicated to the outside of the housing 11 through the guiding hole 118, wherein the aperture of the exhaust hole 112 is larger than the aperture of the guiding hole 118 (as shown in fig. 5A), i.e. the inner diameter of the guiding channel 117 is tapered from large to small, and tapers downward like a cone, wherein the diameter of the exhaust hole is between 0.85 mm and 1.25 mm, and the diameter of the guiding hole 118 is between 0.8 mm and 1.2 mm; when the gas enters the guide pipe 116 through the exhaust hole 112 and is exhausted through the outlet channel 117, a significant converging effect is generated on the gas, and the converged gas is rapidly and largely ejected through the outlet channel 117 of the guide pipe 116. In other embodiments of the present invention, the housing 11 may not have a conduit, i.e., the gas may be directly exhausted from the housing 11 through the exhaust hole 112, but not limited thereto.

Referring to fig. 2A, fig. 2B and fig. 4, fig. 4 is a schematic top view of the air injection hole plate shown in fig. 2A. As shown, the air hole plate 12 of the present embodiment includes at least one bracket 120, a suspension plate 121, and a hollow hole 124. The suspension plate 121 of the present embodiment is a plate-shaped structure capable of bending and vibrating, and the shape of the suspension plate can correspond to the receiving groove 111, but not limited thereto, and the shape of the suspension plate 121 can be one of a square shape, a circular shape, an oval shape, a triangular shape, and a polygonal shape. The hollow hole 124 is disposed through the center of the suspension plate 121 for gas to flow through. The number of the brackets 120 of the present embodiment is 4, but not limited thereto, and the number and the type thereof are mainly disposed opposite to the fixing groove 113, and may be arbitrarily changed according to actual situations. For example, each of the brackets 120 of the present embodiment includes a fixing portion 122 and a connecting portion 123, the fixing portion 122 and the fixing groove 113 (shown in fig. 3) are respectively L-shaped to match each other, that is, the fixing portion 122 is L-shaped, and the fixing groove 113 is an L-shaped groove, so that the fixing portion 122 is received in the fixing groove 133, the positioning effect can be generated by the two matching shapes, and the connection strength can be increased, so that the bracket 120 can be fixed, the air injection hole piece 12 can be accommodated in the accommodating groove 111 of the shell 11, the fixing portion 122 is engaged with the fixing groove 113, so that the air hole plate 12 can be quickly and precisely positioned in the accommodating groove 111 of the housing 11, thereby not only having a light and thin structure, meanwhile, the assembly is more convenient, and the problem that the traditional gas conveying device is directly attached to the air injection hole piece 12 and positioned without a frame, so that the dimensional accuracy cannot be accurately controlled can be solved.

The connecting portion 123 of the present embodiment is connected between the floating plate 121 and the fixing portion 122, and the connecting portion 123 has elasticity for the floating plate 121 to perform reciprocating bending vibration. In the present embodiment, a plurality of gaps 125 (as shown in fig. 5A) are defined between the plurality of brackets 120, the floating plate 121 and the accommodating groove 111 of the housing 11, so that the gas can flow into the accommodating groove 111 and the floating plate 121 through the plurality of gaps 125, so as to be delivered by the gas delivery device 1.

Referring to fig. 2A, fig. 2B and fig. 5A, fig. 5A is a schematic cross-sectional view of the gas delivery device shown in fig. 1. As shown, in the present embodiment, the air hole plate 12, the cavity frame 13 and the actuator 14 form a resonant cavity 130, wherein the cavity frame 13 may be a square frame structure, so that the resonant cavity 130 becomes a square resonant cavity corresponding to the cavity frame, and the volume of the resonant cavity 130 is between 6.3 cubic millimeters and 186 cubic millimeters. In addition, the actuator 14 of the present embodiment includes a piezoelectric carrier 141, a tuning resonator 142 and a piezoelectric plate 143, wherein the piezoelectric carrier 141 may be a metal plate, and the periphery thereof may extend to form a first conductive pin 1411 for electrical connection; the tuning resonator 142 is attached to and stacked on the piezoelectric carrier plate 141, the tuning resonator 142 can also be a metal plate, the piezoelectric plate 143 is stacked on the tuning resonator 142, when the piezoelectric plate 143 is subjected to voltage application and deforms due to piezoelectric effect, the tuning resonator 142 is positioned between the piezoelectric plate 143 and the piezoelectric carrier plate 141 and serves as a buffer between the two, so as to tune the vibration frequency of the piezoelectric carrier plate 141, and the thickness of the tuning resonator 142 is larger than that of the piezoelectric carrier plate 141, so that the vibration frequency of the actuator 14 can be tuned by using different tuning resonator thicknesses, so that the vibration frequency of the actuator 14 can achieve resonance matching with the vibration frequency of the air injection hole piece 12, and the vibration frequency of the actuator 14 is controlled to be 10K to 30K hertz (Hz); in addition, in the embodiment, the thickness of the piezoelectric carrier 141 is between 0.04 mm and 0.06 mm, the thickness of the tuning plate 142 is between 0.1 mm and 0.3 mm, and the thickness of the piezoelectric sheet 143 is between 0.05 mm and 0.15 mm.

Referring to fig. 2A, fig. 2B and fig. 5A, when the air hole piece 12 is accommodated in the accommodation groove 111, an air flow chamber 19 is formed between the air hole piece 12 and the accommodation groove 111, and the air flow chamber 19 is communicated with the air vent 112, wherein the height of the air flow chamber 19 is between 0.2 mm and 0.8 mm.

Referring to fig. 1, fig. 2A and fig. 2B, the actuator 14 is provided with an insulating frame 17 and a conductive frame 18, the conductive frame 18 has a second conductive pin 181 and an electrode 182, the electrode 182 is electrically connected to the piezoelectric plate 143 of the actuator 14, wherein the second conductive pin 181 of the conductive frame 18 and the first conductive pin 1411 of the piezoelectric carrier 141 are respectively disposed in the second opening 115 and the first opening 114 of the housing 11 in a protruding manner for externally connecting power, a loop is formed by the piezoelectric carrier 141, the tuning resonator plate 142, the piezoelectric plate 143 and the conductive frame 18, and the insulating frame 17 is disposed between the conductive frame 18 and the piezoelectric carrier 141 for preventing the conductive frame 18 and the piezoelectric carrier 141 from being electrically connected directly to each other to cause a short circuit.

Referring to fig. 5A, fig. 5B and fig. 5C are schematic cross-sectional operation diagrams of the gas delivery device shown in fig. 5A. Fig. 5A shows an initial state of the gas delivery device 1 in which the housing 11, the gas injection hole plate 12, the cavity frame 13, the actuator 14, the insulating frame 17 and the conductive frame 18 are stacked correspondingly in order to form the gas delivery device 1 of the present embodiment, wherein a square resonance chamber 130 is formed among the actuator 14, the cavity frame 13 and the floating plate 12. In the present embodiment, the gas vibration frequency of the square resonance chamber 130 and the piezoelectric vibration frequency of the floating plate 121 are controlled to be approximately the same, so that the square resonance chamber 130 and the floating plate 121 generate a Helmholtz resonance effect (Helmholtz resonance), thereby improving the gas transmission efficiency. As shown in fig. 5B, when the piezoelectric plate 16 vibrates upwards, the floating plate 121 of the resonator plate 12 vibrates upwards, and the gas flows in from the plurality of gaps 125, enters the gas flow chamber 19, and enters the square resonance chamber 130 through the hollow holes 124, so that the gas pressure in the square resonance chamber 130 increases, and a pressure gradient is generated; as shown in fig. 5C, when the piezoelectric plate 16 vibrates downwards, the floating plate 121 of the resonator plate 12 vibrates downwards, and the gas flows out from the square resonance chamber 130 through the hollow hole 124 rapidly along the same direction, presses the air in the gas flow chamber 19, and enters the guide tube 116 with a wide top and a narrow bottom through the exhaust hole 112 to gather the gas, and the gathered gas is ejected from the outlet hole 117 of the guide tube 116 rapidly and in a large amount in an ideal fluid state close to the bernoulli's law, and the internal pressure of the square resonance chamber 130 after being exhausted is lower than the equilibrium pressure by the principle of inertia, so that the gas enters the square resonance chamber 130 again. Therefore, the square resonance chamber 130 and the piezoelectric plate 16 are controlled to vibrate reciprocally up and down, and the vibration frequencies of the square resonance chamber 130 and the piezoelectric plate 16 are controlled to be approximately the same, so as to generate the helmholtz resonance effect, thereby realizing high-speed and large-volume gas transmission.

In summary, the gas conveying device provided by the present invention drives the square resonance chamber to generate pressure change by applying voltage to the piezoelectric sheet to drive the piezoelectric sheet to vibrate up and down, so as to achieve the effect of gas transmission. In addition, the L-shaped fixing part is correspondingly clamped with the L-shaped fixing groove, so that the air injection hole piece can be easily and accurately positioned in the accommodating groove of the shell, the problems that the traditional air conveying device cannot be miniaturized and controlled in size precision at the same time are solved, and the connecting capacity of the support is improved by increasing the contact area between the support and the shell. Furthermore, the resonance frequencies of the square resonance chamber and the piezoelectric plate are approximately the same to generate the Helmholtz resonance effect, so that the transmission rate and the transmission quantity of the gas are further improved. Furthermore, the invention arranges a special aperture conduit with wide top and narrow bottom at the bottom of the shell to lead the gas to be further converged and to be rapidly sprayed out in an ideal fluid state close to the Bernoulli's law, thereby achieving the purpose of high-speed gas transmission.

The present invention may be modified in various ways by those skilled in the art without departing from the scope of the appended claims.

Claims (17)

1. A gas delivery device for delivering a flow of gas, comprising:

a shell, including at least a fixed slot, a containing groove and a vent hole, where the containing groove has a bottom surface, the shell extends a conduit outwards from the vent hole, the conduit has a leading-out channel and a leading-out hole, the leading-out channel is communicated with the containing groove through the vent hole and is communicated with the outside of the shell through the leading-out hole, and the leading-out channel is in a taper shape gradually reduced from large to small along the exhaust direction;

the air injection hole piece comprises at least one bracket, a suspension piece and a hollow hole, the suspension piece can be bent and vibrated, the at least one bracket is sleeved in the at least one fixing groove to position the air injection hole piece to be accommodated in the accommodating groove, an air flow chamber is formed between the air injection hole piece and the bottom surface of the accommodating groove, the air flow chamber is communicated with the air exhaust hole, and at least one gap is formed between the at least one bracket, the suspension piece and the shell;

a cavity frame bearing and superposed on the suspension plate;

an actuator bearing and superposed on the cavity frame, applying voltage to generate reciprocating bending vibration;

an insulating frame bearing and overlapping the actuator; and

a conductive frame, which is arranged on the insulating frame in a bearing and stacking manner;

the actuator, the cavity frame and the suspension sheet form a resonance chamber, the actuator drives the air injection hole sheet to resonate, so that the suspension sheet of the air injection hole sheet generates reciprocating vibration displacement, the air enters the airflow chamber through the at least one gap and is exhausted through the exhaust hole, and the transmission and flow of the air are realized.

2. The gas delivery device according to claim 1, wherein the container is one of circular, elliptical, and polygonal.

3. The gas delivery device according to claim 1, wherein the suspension plate is one of circular, elliptical, and polygonal.

4. The gas delivery device of claim 1, wherein the actuator comprises:

a piezoelectric carrier plate bearing and superposed on the cavity frame;

the adjusting resonance plate is loaded and stacked on the piezoelectric carrier plate; and

and the piezoelectric piece is stacked on the adjusting resonance plate and applies voltage to drive the piezoelectric carrier plate and the adjusting resonance plate to generate reciprocating bending vibration.

5. The gas delivery device according to claim 4, wherein the tuned resonator plate has a thickness greater than a thickness of the piezoelectric carrier plate.

6. The gas delivery device according to claim 4, wherein the piezoelectric carrier has a thickness of 0.04 mm to 0.06 mm.

7. The gas delivery device according to claim 4, wherein the tuned resonator plate has a thickness of 0.1 mm to 0.3 mm.

8. The gas delivery device according to claim 4, wherein the piezoelectric patch has a thickness of 0.05 mm to 0.15 mm.

9. The gas delivery device according to claim 4, wherein the piezoelectric carrier comprises a first conductive pin.

10. The gas delivery device according to claim 9, wherein the housing includes a first opening, the first opening being configured to receive the first conductive pin of the piezoelectric carrier and protruding out of the housing.

11. The gas delivery device according to claim 4, wherein the conductive frame comprises a second conductive pin and an electrode electrically connected to the piezoelectric patch.

12. The gas delivery device of claim 11, wherein the housing includes a second opening, the second opening being configured to receive the second conductive pin of the conductive frame and protrude from the housing.

13. The gas delivery device according to claim 4, wherein the piezoelectric patch vibrates at a frequency of 10K to 30 kHz.

14. The gas delivery device according to claim 1, wherein the diameter of the vent hole is between 0.85 mm and 1.25 mm, and the diameter of the exit hole is between 0.8 mm and 1.2 mm.

15. The gas delivery device according to claim 1, wherein the height of the gas flow chamber is between 0.2 mm and 0.8 mm.

16. The gas delivery device according to claim 1, wherein the volume of the resonance chamber is between 6.3 cubic millimeters and 186 cubic millimeters.

17. The gas delivery device according to any one of claims 2 or 3, wherein the polygon comprises any one of a square and a triangle.

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