CN109424520A - Air transporting arrangement - Google Patents

Air transporting arrangement Download PDF

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Publication number
CN109424520A
CN109424520A CN201710771568.7A CN201710771568A CN109424520A CN 109424520 A CN109424520 A CN 109424520A CN 201710771568 A CN201710771568 A CN 201710771568A CN 109424520 A CN109424520 A CN 109424520A
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CN
China
Prior art keywords
transporting arrangement
air transporting
piece
air
millimeter
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Granted
Application number
CN201710771568.7A
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Chinese (zh)
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CN109424520B (en
Inventor
莫皓然
曾俊隆
黄哲威
温健棠
陈世昌
韩永隆
黄启峰
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Microjet Technology Co Ltd
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Microjet Technology Co Ltd
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Priority to CN201710771568.7A priority Critical patent/CN109424520B/en
Publication of CN109424520A publication Critical patent/CN109424520A/en
Application granted granted Critical
Publication of CN109424520B publication Critical patent/CN109424520B/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The present invention provides a kind of air transporting arrangement, and by shell, fumarole piece, chamber frame, actuator, Insulating frame and conductive frame, sequentially storehouse is constituted.Resonator chamber is formed between actuator, chamber frame and suspension piece, being driven by actuator drives fumarole piece to generate vibration, the suspension piece of fumarole piece is set to generate reciprocally vibration displacement, the at least gap for passing the gas through fumarole piece enters air-flow chamber, it is discharged again by the gas vent of shell, realizes the transport flow of gas.

Description

Air transporting arrangement
Technical field
The present invention is about a kind of air transporting arrangement, espespecially a kind of miniature, mute and high-speed transfer gas gas conveying Device.
Background technique
The either industry such as medicine, computer technology, printing, energy in each field at present, product towards sophistication and Microminiaturization direction is developed, the fluid conveying knot that wherein products such as micropump, sprayer, ink gun, industrial printing devices are included Structure is its key technology, therefore, how by innovation structure its technical bottleneck is broken through, for the important content of development.
With making rapid progress for science and technology, air transporting arrangement using upper also more and more diversification, industrial application, life such as Cure application, health care, electronic radiation etc., or even its all visible trace of recently popular wearable device, it is seen that traditional Air transporting arrangement had the tendency that gradually towards device microminiaturization, flow maximize.
In the prior art, air transporting arrangement is mainly constituted with traditional mechanism part storehouse, and with each machine Structure component minimization or the mode of thickness thinning, to achieve the purpose that single unit system micromation, slimming.However, traditional mechanism After microminiaturization, dimension control is not easy part, and assembly precision is equally difficult to control, and it is different in turn result in product yield, The problems such as instability of flow for even thering is fluid to transmit.Furthermore in known charge delivery mechanism, often because the gas of output without Method is effectively collected, or keeps the power of gas propulsive insufficient because size of components is excessively small, and then lead to gas transport Stream Measure insufficient problem.
Therefore, above-mentioned known techniques missing can be improved by how developing one kind, can make the instrument of conventionally employed fluid conveying device Device or equipment reach small in size, micromation and mute, and overcome the problems, such as miniature sizes precision be not easy to control, underfed, and The minisize fluid transmitting device of various devices can flexibly be applied to, actually problem in the urgent need to address at present.
Summary of the invention
The main purpose of the present invention is to provide a kind of air transporting arrangement, by air transporting arrangement special flow passage and The design of spray orifice plate, with overcome traditional gas conveying device can not have both simultaneously it is small in size, micromation and it is mute, size is smart The problem of degree is controlled.
The main purpose of the present invention is to provide a kind of air transporting arrangements, are led by rectangular resonator chamber and special caliber The design of pipe so that piezoelectric element and rectangular resonator chamber reach helmholtz resonance, and makes output gas to approach Bernoulli The perfect fluid state of law quickly sprays, to solve the problems, such as gas transport underfed in known techniques.
In order to achieve the above object, a broader implementation pattern of the invention is to provide a kind of air transporting arrangement, gas is transmitted Flowing, it includes: shell, comprising at least a fixing groove, accommodation groove and gas vent, accommodation groove has bottom surface;Fumarole piece includes An at least bracket, suspension piece and hollow bore, the flexible vibration of suspension piece, at least a bracket are placed in an at least fixing groove, It is located in accommodation groove with positioning fumarole piece, and forms air-flow chamber between the bottom surface of accommodation groove, air-flow chamber and exhaust Hole communicates, and an at least gap is formed between an at least bracket and suspension piece and shell;Chamber frame carries overlapped in suspension piece On;Actuator, carrying is overlapped in chamber frame, applies voltage and generates reciprocally bending vibration;Insulating frame, carrying change It is placed on actuator;And conductive frame, carrying, which stacks, to be placed on Insulating frame;Wherein, actuator, chamber frame and suspension piece Between form resonator chamber, by actuator drive drive fumarole piece generate resonance, generate the suspension piece of fumarole piece past Compound ground vibration displacement to cause gas to enter air-flow chamber by an at least gap, then is discharged by gas vent, realizes gas Transport flow.
Detailed description of the invention
Fig. 1 is the surface structure schematic diagram of the air transporting arrangement of present pre-ferred embodiments.
Fig. 2A is that the component of air transporting arrangement shown in FIG. 1 decomposes positive structure schematic.
Fig. 2 B is that the component of air transporting arrangement shown in FIG. 1 decomposes structure schematic diagram.
Fig. 3 is the surface structure schematic diagram of shell shown in Fig. 2A.
Fig. 4 is the overlooking structure diagram of fumarole piece shown in Fig. 2A.
Fig. 5 A is the A-A the schematic diagram of the section structure of air transporting arrangement shown in FIG. 1.
Fig. 5 B and Fig. 5 C are the section illustrative view of air transporting arrangement shown in Fig. 5 A.
[symbol description]
1: air transporting arrangement
11: shell
111: accommodation groove
111a: bottom surface
112: gas vent
113: fixing groove
114: the first openings
115: the second openings
116: conduit
117: export channel
118: leadout hole
12: fumarole piece
120: bracket
121: suspension piece
122: fixed part
123: interconnecting piece
124: hollow bore
125: gap
13: chamber frame
130: resonator chamber
14: actuator
141: piezoelectricity support plate
1411: the first conductive connecting pins
142: adjustment sounding board
143: piezoelectric patches
17: Insulating frame
18: conductive frame
181: the second conductive connecting pins
182: electrode
19: air-flow chamber
Specific embodiment
The some exemplary embodiments for embodying feature of present invention and advantage will describe in detail in the explanation of back segment.It should be understood that It is that the present invention there can be various variations in different aspects, neither departs from the scope of the present invention, and explanation therein And attached drawing inherently is illustrated as being used, and nand architecture is in the limitation present invention.
Fig. 1, Fig. 2A and Fig. 2 B are please referred to, Fig. 1 is that the surface structure of the air transporting arrangement of present pre-ferred embodiments shows It is intended to, Fig. 2A is that the component of air transporting arrangement shown in FIG. 1 decomposes positive structure schematic and Fig. 2 B is shown in FIG. 1 The component of air transporting arrangement decomposes structure schematic diagram.Shown in A and Fig. 2 B as shown in Figure 1, Figure 2, the gas of the present embodiment is conveyed Device 1 is the gas transport structure of a micromation, makes gas high speed and transmits in large quantities.The air transporting arrangement 1 of the present embodiment It is sequentially corresponded to by components such as shell 11, fumarole piece 12, chamber frame 13, actuator 14, Insulating frame 17 and conductive frames 18 Storehouse setting.
It is the surface structure schematic diagram of shell shown in Fig. 2A please refer to Fig. 2A, Fig. 2 B and Fig. 3, Fig. 3.As schemed Show, the shell 11 of the present embodiment includes accommodation groove 111 and gas vent 112, an at least fixing groove 113, first opening 114, second Opening 115 and conduit 116 (as shown in Figure 2 B), wherein accommodation groove 111 includes bottom surface 111a, and accommodation groove 111 is inside shell 11 The square groove structure of recess implies that the bottom surface 111a of accommodation groove 111 is rectangular bottom surface, and but not limited to this.Of the invention In other embodiments, the shape of accommodation groove 113 also can be one of round, ellipse, triangle and polygonal, not with this It is limited.The accommodation groove 111 of the present embodiment to accommodate the storehouse setting fumarole piece 12, chamber frame 13, actuator 14, absolutely Edge frame 17 and conductive frame 18 are in wherein.The gas vent 112 of the present embodiment is disposed through at the center of bottom surface 111a, for Gas circulation, and as shown in Figure 5A, gas vent 112 is connected with conduit 116.An at least fixing groove 113 of the present embodiment is for solid Determine fumarole piece 12 to be fixed on wherein, 113 quantity of fixing groove of the present embodiment is 4, respectively corresponds that be set to shell 11 neighbouring It in four corners of the accommodation groove 111, and is the groove structure of a L-type, but not limited to this, quantity, groove shapes aspect Shi Bianhua can be appointed according to actual demand.As shown in Fig. 2 B and Fig. 3, the conduit 116 of the present embodiment is a long column shape hollow tubular knot Structure, conduit 116 is also comprising export channel 117 and leadout hole 118, and the export channel 117 of conduit 116 is by gas vent 112 It is connected and passes to accommodation groove 111, the export channel 117 of conduit 116 is connected to the outside of shell 11 by leadout hole 118, wherein arranging The aperture of stomata 112 be greater than leadout hole 118 aperture (as shown in Figure 5A), imply that export 117 internal diameter of channel in by it is highly tapered extremely Small conical shape, tapered downwards such as taper, wherein the diameter of the gas vent is led between 0.85 millimeter to 1.25 millimeters Portal 118 diameter between 0.8 millimeter to 1.2 millimeters;When gas is led to by gas vent 112 into conduit 116, and by exporting When road 117 is discharged, gas is made to generate apparent convergence effect, and keeps the gas after convergence fast by the export channel 117 of conduit 116 Speed and spray in large quantities.In other embodiments of the invention, shell 11 can also not have conduit, i.e. gas can be by gas vent 112 are expelled directly out except shell 11, and but not limited to this.
It is the overlooking structure diagram of fumarole piece shown in Fig. 2A please refer to Fig. 2A, Fig. 2 B and Fig. 4, Fig. 4.Such as figure Shown, the fumarole piece 12 of the present embodiment includes at least a bracket 120, suspension piece 121 and hollow bore 124.The present embodiment Suspension piece 121 is the laminated structure of flexible vibration, and its shape can be corresponding with accommodation groove 111, and but not limited to this, is suspended The shape of piece 121 can be one of rectangular, round, oval, triangle and polygonal.Hollow bore 124 is disposed through At the center of suspension piece 121, circulated with supplied gas.The quantity of the bracket 120 of the present embodiment is 4, and but not limited to this, number Amount and kenel are mainly arranged with fixing groove 113 relatively, and can appoint Shi Bianhua according to practical situation.For example, this implementation Each bracket 120 of example includes fixed part 122 and interconnecting piece 123, the shape of fixed part 122 and the fixing groove 113 (as shown in Figure 3) Shape is respectively L shape to be mutually matched, i.e., 122 shape of fixed part is L shape, and fixing groove 113 is L-shaped groove, makes fixed part whereby 122 are located in the fixing groove 133, can produce outside the effect of positioning by two mutual matched shapes, can also increase its connection Intensity fixes so that bracket 120 is arranged, so that fumarole piece 12 is placed in the accommodation groove 111 of shell 11, passes through fixed part 122 engagings corresponding with fixing groove 113, enable fumarole piece 12 quickly and to be accurately located in the accommodation groove 111 of shell 11 In, so not only structure is frivolous simple, while being more convenient for assembling, and also traditional gas conveying device can be overcome directly to attach fumarole The problem of 12 Rimless of piece positions and can not accurately control dimensional accuracy.
The interconnecting piece 123 of the present embodiment is connected between suspension piece 121 and fixed part 122, and interconnecting piece 123 has bullet Property, reciprocally bending vibration is carried out for suspension piece 121.In the present embodiment, several brackets 120, suspension piece 121 and shell 11 Accommodation groove 111 between define several gaps 125 (as shown in Figure 5A), make gas can by several gaps 125 flow into accommodation groove 111 Between suspension piece 121, so that air transporting arrangement 1 carries out the transmission of gas.
Show please refer to the A-A cross-section structure that Fig. 2A, Fig. 2 B and Fig. 5 A, Fig. 5 A are air transporting arrangement shown in FIG. 1 It is intended to.As shown, in the present embodiment, fumarole piece 12, chamber frame 13 and actuator 14 form a resonator chamber 130, wherein chamber frame 13 can be a square frame structure, and resonator chamber 130 is made to become rectangular resonance in response in chamber frame Chamber, the volume of the resonator chamber 130 is between 6.3 cubic millimeters to 186 cubic millimeters.In addition, the actuating of the present embodiment Device 14 includes a piezoelectricity support plate 141, adjustment resonance plate 142 and piezoelectric patches 143, wherein the piezoelectricity support plate 141 can be a metal Plate, and its periphery may extend away and form one first conductive connecting pin 1411, be for electrically connecting to;The adjustment attaching of resonance plate 142 is stacked in On the piezoelectricity support plate 141, adjustment resonance plate 142 can be equally a metal plate, and the stacking of piezoelectric patches 143 is set to adjustment and causes resonance On piece 142, when piezoelectric patches 143 is by applying voltage and generating deformation because of piezoelectric effect, adjustment resonance plate 142 is located at piezoelectric patches 143 Between piezoelectricity support plate 141, as cushion between the two, to adjust the vibration frequency of piezoelectricity support plate 141, and resonance is adjusted The thickness of piece 142 is greater than the thickness of piezoelectricity support plate 141, can adjust actuator 14 using the thickness of different adjustment resonance plates Vibration frequency enables the vibration frequency of actuator 14 to reach resonance with the vibration frequency of fumarole piece 12 and matches, and actuator 14 Vibration frequency control at 10K to 30K hertz (Hz);In addition, in the present embodiment, the thickness of piezoelectricity support plate 141 is between 0.04 Millimeter is between 0.06 millimeter, adjusting the thickness of sounding board 142 between 0.1 millimeter to 0.3 millimeter, the thickness of piezoelectric patches 143 Between 0.05 millimeter to 0.15 millimeter.
Please continue to refer to Fig. 2A, Fig. 2 B and Fig. 5 A, when fumarole piece 12 is located in accommodation groove 111, fumarole piece 12 and appearance It sets and forms an air-flow chamber 19 between slot 111, air-flow chamber 19 is communicated with gas vent 112, wherein the height of air-flow chamber 19 is situated between Between 0.2 millimeter to 0.8 millimeter.
Please continue to refer to Fig. 1, Fig. 2A and Fig. 2 B, actuator 14 is equipped with Insulating frame 17 and conductive frame 18, conductive pane Frame 18 has one second conductive connecting pin 181 and electrode 182, and electrode 182 is electrically connected the piezoelectric patches 143 of actuator 14, wherein conductive First conductive connecting pin 1411 of the second conductive connecting pin 181 and piezoelectricity support plate 141 of frame 18 is provided projectingly on shell 11 respectively Second opening 115 and the first opening 114 pass through piezoelectricity support plate 141, adjustment sounding board 142, piezoelectric patches to external electric power 143, conductive frame 18 is formed into a loop, in addition, Insulating frame 17 is set between conductive frame 18 and piezoelectricity support plate 141, to It avoids directly being electrically connected between conductive frame 18 and piezoelectricity support plate 141, causes short circuit.
Make please refer to the section that Fig. 5 A, Fig. 5 B and Fig. 5 C, Fig. 5 B and Fig. 5 C are air transporting arrangement shown in Fig. 5 A Dynamic schematic diagram.Shown in Fig. 5 A, the original state not activated for air transporting arrangement 1, and shell 11, fumarole piece 12, cavity Frame 13, actuator 14, Insulating frame 17 and conductive frame 18 are sequentially corresponding stack settings, to constitute the gas of the present embodiment Conveying device 1 is wherein to form rectangular resonator chamber 130 between actuator 14, chamber frame 13 and suspension piece 12.In this implementation In example, by controlling the Gas Vibration frequency of rectangular resonator chamber 130 and 121 piezoelectric vibration frequency approach of suspension piece in identical, Rectangular resonator chamber 130 is set to generate helmholtz resonance effect (Helmholtz resonance) with suspension piece 121, so that gas Body efficiency of transmission improves.As shown in Figure 5 B, when piezoelectric patches 16 vibrates upwards, vibrate the suspension piece 121 of sounding board 12 upwards, Gas is flowed by several gaps 125 at this time, enters rectangular resonator chamber 130 into air-flow chamber 19, and via hollow bore 124 Among, increase air pressure in rectangular resonator chamber 130, and generate barometric gradient;Then as shown in Figure 5 C, when piezoelectric patches 16 is downward When vibration, vibrate the suspension piece 121 of sounding board 12 downwards, gas is taken advantage of a situation by rectangular resonator chamber 130 through hollow bore at this time 124 quickly outflows, squeeze the air in air-flow chamber 19, and make conduit of the gas through gas vent 112 into design wide at the top and narrow at the bottom To converge gas among 116, and make the gas after convergence to approach perfect fluid state the leading by conduit 116 of Bernoulli law Portal 117 quickly and spray in large quantities, and by principle of inertia, 130 air pressure inside of rectangular resonator chamber after making exhaust is than flat Air pressure of weighing is low, whereby so that gas is again introduced into rectangular resonator chamber 130.Therefore, reciprocally upper and lower by piezoelectric patches 16 Vibration, and the rectangular resonator chamber 130 of control and the vibration frequency of piezoelectric patches 16 level off to it is identical, to generate helmholtz resonance Effect, to realize gas high speed and a large amount of transmission.
In conclusion air transporting arrangement provided by the present invention drives it to shake up and down by applying voltages to piezoelectric patches It is dynamic, the effect of driving rectangular resonator chamber, so that rectangular resonator chamber is generated pressure change, reach gas transport.In addition, of the invention By the engaging corresponding with L-type fixing groove of L shape fixed part, fumarole piece is enable to be located in the accommodating of shell easily and accurately In slot, to overcome the problems, such as that traditional gas conveying device can not have both micromation simultaneously and dimensional accuracy is controlled, and pass through increasing Add the contact area between bracket and shell, the concatenation ability of lifting bracket.Furthermore the present invention more by rectangular resonator chamber with Piezoelectric patches resonant frequency level off to it is identical, to generate helmholtz resonance effect, thus further lift gas transmission rate And transmission quantity.What is more, the present invention keeps gas further by the way that a special hole diametered duct wide at the top and narrow at the bottom is arranged in housing bottom Confluence, and quickly sprayed with approaching the perfect fluid state of Bernoulli law, to achieve the purpose that high-speed gas transmits.
The present invention can be appointed as person familiar with the technology apply craftsman think and be it is all as modify, but wanted without departure from such as appended right Seek protection scope defined by book.

Claims (20)

1. a kind of air transporting arrangement, transmission gas flowing, it includes:
One shell, includes an at least fixing groove, an accommodation groove and a gas vent, which has a bottom surface;
One fumarole piece includes an at least bracket, a suspension piece and a hollow bore, and the flexible vibration of suspension piece, this is at least One bracket is placed in an at least fixing groove, is located in the accommodation groove with positioning the fumarole piece, and with the accommodation groove An air-flow chamber is formed between the bottom surface, which communicates with the gas vent, and an at least bracket and the suspension piece with An at least gap is formed between the shell;
One chamber frame carries overlapped in the suspension on piece;
One actuator, carrying is overlapped in the chamber frame, applies voltage and generates reciprocally bending vibration;
One Insulating frame carries overlapped on the actuator;And
One conductive frame, carrying, which stacks, to be placed on the Insulating frame;
Wherein, a resonator chamber is formed between the actuator, the chamber frame and the suspension piece, is driven and is driven by the actuator The fumarole piece generates resonance, and the suspension piece of the fumarole piece is made to generate reciprocally vibration displacement, to cause the gas logical An at least gap is crossed into the air-flow chamber, then is discharged by the gas vent, realizes the transport flow of the gas.
2. air transporting arrangement as described in claim 1, wherein an at least bracket includes a fixed part and an interconnecting piece, In the fixed part shape it is corresponding with the shape of an at least fixing groove, which is connected to the suspension piece and the fixed part Between, which, which has, flexibly supports the suspension piece, carries out reciprocally bending vibration for the suspension piece.
3. air transporting arrangement as claimed in claim 2, wherein the shape of the fixed part is L shape and the fixing groove is a L The groove of shape.
4. air transporting arrangement as described in claim 1, wherein the accommodation groove is rectangular, round, oval, triangle and more It is one of angular.
5. air transporting arrangement as described in claim 1, wherein the suspension piece is rectangular, round, oval, triangle and more It is one of angular.
6. air transporting arrangement as described in claim 1, wherein the actuator includes:
One piezoelectricity support plate carries overlapped in the chamber frame;
One adjustment sounding board, carries overlapped on the piezoelectricity support plate;And
One piezoelectric patches, carrying is overlapped in the adjustment sounding board, applies voltage and the piezoelectricity support plate and adjustment sounding board is driven to generate Reciprocally bending vibration.
7. air transporting arrangement as claimed in claim 6, wherein the thickness of the adjustment sounding board is greater than the thickness of the piezoelectricity support plate Degree.
8. air transporting arrangement as claimed in claim 6, wherein the piezoelectricity support plate includes one first conductive connecting pin.
9. air transporting arrangement as claimed in claim 8, wherein the shell includes one first opening, which supplies the pressure The first conductive connecting pin fixation of electric support plate wherein protrudes from outside the shell.
10. air transporting arrangement as claimed in claim 6, wherein the conductive frame includes one second conductive connecting pin and an electricity Pole, the electrode are electrically connected the piezoelectric patches.
11. air transporting arrangement as claimed in claim 10, wherein the shell includes one second opening, second opening is for being somebody's turn to do The second conductive connecting pin fixation of conductive frame wherein protrudes from outside the shell.
12. air transporting arrangement as claimed in claim 6, wherein the piezoelectric patches vibration frequency is between 10K to 30K hertz.
13. air transporting arrangement as described in claim 1, wherein the shell extends outwardly a conduit in the exhaust hole site, The conduit has an export channel and a leadout hole, which is connected to the accommodation groove by the gas vent, and by being somebody's turn to do Leadout hole is connected to the hull outside.
14. air transporting arrangement as claimed in claim 13, wherein the export channel is in by highly tapered to small conical shape.
15. air transporting arrangement as claimed in claim 13, wherein the diameter of the gas vent is between 0.85 millimeter to 1.25 millis Between rice, the diameter of the leadout hole is between 0.8 millimeter to 1.2 millimeters.
16. air transporting arrangement as claimed in claim 6, wherein the thickness of the piezoelectricity support plate is between 0.04 millimeter to 0.06 milli Between rice.
17. air transporting arrangement as claimed in claim 6, wherein the thickness of the adjustment sounding board is between 0.1 millimeter to 0.3 milli Between rice.
18. air transporting arrangement as claimed in claim 6, wherein the thickness of the piezoelectric patches is between 0.05 millimeter to 0.15 millimeter Between.
19. air transporting arrangement as described in claim 1, wherein the height of the air-flow chamber is between 0.2 millimeter to 0.8 millimeter Between.
20. air transporting arrangement as described in claim 1, wherein the volume of the resonator chamber is between 6.3 cubic millimeters to 186 Between cubic millimeter.
CN201710771568.7A 2017-08-31 2017-08-31 Gas delivery device Active CN109424520B (en)

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Application Number Priority Date Filing Date Title
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CN201710771568.7A CN109424520B (en) 2017-08-31 2017-08-31 Gas delivery device

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CN109424520B CN109424520B (en) 2021-03-02

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110649451A (en) * 2019-09-29 2020-01-03 中国科学院长春光学精密机械与物理研究所 Spark gap switch

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Publication number Priority date Publication date Assignee Title
WO2009025167A1 (en) * 2007-08-17 2009-02-26 Alps Electric Co., Ltd. Piezoelectric pump
CN102046978A (en) * 2008-06-03 2011-05-04 株式会社村田制作所 Piezoelectric micro-blower
CN106030108A (en) * 2014-02-21 2016-10-12 株式会社村田制作所 Fluid control device and pump
JP2016211442A (en) * 2015-05-11 2016-12-15 株式会社村田製作所 Blower

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009025167A1 (en) * 2007-08-17 2009-02-26 Alps Electric Co., Ltd. Piezoelectric pump
CN102046978A (en) * 2008-06-03 2011-05-04 株式会社村田制作所 Piezoelectric micro-blower
CN106030108A (en) * 2014-02-21 2016-10-12 株式会社村田制作所 Fluid control device and pump
JP2016211442A (en) * 2015-05-11 2016-12-15 株式会社村田製作所 Blower

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110649451A (en) * 2019-09-29 2020-01-03 中国科学院长春光学精密机械与物理研究所 Spark gap switch

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