CN109407872A - A kind of flexibility touch sensing and preparation method thereof, display panel, display device - Google Patents
A kind of flexibility touch sensing and preparation method thereof, display panel, display device Download PDFInfo
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- CN109407872A CN109407872A CN201710707340.1A CN201710707340A CN109407872A CN 109407872 A CN109407872 A CN 109407872A CN 201710707340 A CN201710707340 A CN 201710707340A CN 109407872 A CN109407872 A CN 109407872A
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- touch
- touch control
- control electrode
- layer
- flexible substrate
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Abstract
The invention discloses a kind of flexible touch sensings and preparation method thereof, display panel, display device.The flexibility touch sensing includes flexible substrate, the metal touch element layer in flexible substrate and the dielectric layer in metal touch element layer；Wherein, flexible substrate is rough surface close to a side surface of metal touch element layer.Technical solution provided in an embodiment of the present invention, by making flexible substrate that there is rough surface, so that the adhesive force between flexible substrate and metal touch element layer increases, without using the silicon nitride layer or silicon dioxide layer being arranged in the prior art to increase adhesive force between flexible substrate and metal touch element layer, reach the bending resistance for improving flexible touch sensing, simplifies the beneficial effect of flexibility touch sensing preparation process.
Description
Technical field
The present embodiments relate to flexible touch sensing technology of preparing more particularly to a kind of flexible touch sensing and its
Preparation method, display panel, display device.
Background technique
For the demand for adapting to flexible display apparatus, flexible touch sensing comes into being.
The problem of unresolved conventional oxidation indium tin transparent touch electrode is easily cracked when being bent or fracture, use with
The touch control electrode that metal grill form is laid.The flexible substrate material of flexible touch sensing is usually polyimides or gathers to benzene
Touch control electrode is directly formed in flexible substrate by naphthalate since the adhesion of metal and flexible substrate is poor
It will lead to metal touch control electrode and flexible substrate in bending process to remove, so that the dysfunction of flexible touch sensing.For solution
The certainly above problem first prepares one layer of silicon nitride or titanium dioxide on flexible substrates before forming metal touch control electrode in the prior art
Silicon, although this mode can improve the adhesion between metal touch control electrode and flexible substrate, silicon nitride and silica
Bending resistance is poor, and then influences the bending resistance of flexible touch sensing.
Summary of the invention
The present invention provides a kind of flexible touch sensing and preparation method thereof, display panel, display device, flexible to simplify
Touch sensing preparation process improves the bending resistance of flexible touch sensing.
In a first aspect, the embodiment of the invention provides a kind of flexible touch sensing, flexible touch sensing includes:
Flexible substrate, the metal touch element layer in the flexible substrate and be located at the metal touch element layer
On dielectric layer；
Wherein, the flexible substrate is rough surface close to a side surface of the metal touch element layer.
Second aspect, the embodiment of the invention provides a kind of display panel, the display panel includes above-mentioned first aspect
The flexible touch sensing.
The third aspect, the embodiment of the invention provides a kind of display device, the display device includes above-mentioned second aspect
The display panel.
Fourth aspect, the embodiment of the invention provides a kind of preparation methods of flexible touch sensing, are used to prepare above-mentioned
Flexible touch sensing described in first aspect, the preparation method include:
One rigid substrates are provided；
Flexible substrate is formed on the rigid substrates；
Using plasma etching technics handles surface of the flexible substrate far from the rigid substrates side, to obtain
One rough surface；
Metal touch element layer is formed on the rough surface；
The touch element layer forms dielectric layer far from the side of the flexible substrate；
Separate the rigid substrates and the flexible substrate.
Flexibility touch sensing provided in an embodiment of the present invention includes flexible substrate, the metal touch-control in flexible substrate
Element layer and the dielectric layer in metal touch element layer, wherein flexible substrate is close to the side of metal touch element layer
Surface is rough surface, by making flexible substrate have rough surface, so that between flexible substrate and metal touch element layer
Adhesive force increases, and is arranged without using increasing adhesive force between flexible substrate and metal touch element layer in the prior art
Silicon nitride layer or silicon dioxide layer have reached the bending resistance for improving flexible touch sensing, simplify flexibility touch sensing system
The beneficial effect of standby technique.
Detailed description of the invention
In order to more clearly illustrate the technical scheme of the exemplary embodiment of the present invention, below to required in description embodiment
The attached drawing to be used does a simple introduction.Obviously, the attached drawing introduced is present invention a part of the embodiment to be described
Attached drawing, rather than whole attached drawings without creative efforts, may be used also for those of ordinary skill in the art
To obtain other attached drawings according to these attached drawings.
Fig. 1 is a kind of the schematic diagram of the section structure of flexible touch sensing provided in an embodiment of the present invention；
Fig. 2 is a kind of overlooking structure diagram of flexible touch sensing provided in an embodiment of the present invention；
Fig. 3 is the schematic diagram of the section structure of the dotted line AB along Fig. 2；
Fig. 4 is the overlooking structure diagram of another flexible touch sensing provided in an embodiment of the present invention；
Fig. 5 is the schematic diagram of the section structure of the dotted line CD along Fig. 4；
Fig. 6 is the overlooking structure diagram of another flexible touch sensing provided in an embodiment of the present invention；
Fig. 7 is the schematic diagram of the section structure of the dotted line EF along Fig. 6；
Fig. 8 is the overlooking structure diagram of another flexible touch sensing provided in an embodiment of the present invention；
Fig. 9 is the schematic diagram of the section structure of the dotted line GH along Fig. 8；
Figure 10 is a kind of structural schematic diagram of display panel provided in an embodiment of the present invention；
Figure 11 is a kind of structural schematic diagram of display device provided in an embodiment of the present invention；
Figure 12 is a kind of flow diagram of the preparation method of flexible touch sensing provided in an embodiment of the present invention；
Figure 13 a- Figure 13 f is the preparation process figure of flexible touch sensing provided in an embodiment of the present invention.
Specific embodiment
It is of the invention to reach the technical means and efficacy that predetermined goal of the invention is taken further to illustrate, below in conjunction with
Attached drawing and preferred embodiment, specific embodiment, knot to a kind of display panel proposed according to the present invention and preparation method thereof
Structure, feature and its effect, detailed description is as follows.
The embodiment of the invention provides a kind of flexible touch sensing, flexible touch sensing includes:
Flexible substrate, the metal touch element layer in the flexible substrate and be located at the metal touch element layer
On dielectric layer；
Wherein, the flexible substrate is rough surface close to a side surface of the metal touch element layer.
Flexibility touch sensing provided in an embodiment of the present invention includes flexible substrate, the metal touch-control in flexible substrate
Element layer and the dielectric layer in metal touch element layer, wherein flexible substrate is close to the side of metal touch element layer
Surface is rough surface, by making flexible substrate have rough surface, so that between flexible substrate and metal touch element layer
Adhesive force increases, and is arranged without using increasing adhesive force between flexible substrate and metal touch element layer in the prior art
Silicon nitride layer or silicon dioxide layer have reached the bending resistance for improving flexible touch sensing, simplify flexibility touch sensing system
The beneficial effect of standby technique.
It is the core concept of the application above, following will be combined with the drawings in the embodiments of the present invention, to the embodiment of the present invention
In technical solution be clearly and completely described, it is clear that described embodiments are only a part of the embodiments of the present invention,
Instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative labor
Under the premise of dynamic, every other embodiment obtained be shall fall within the protection scope of the present invention.
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention, but the present invention can be with
Implemented using other than the one described here other embodiments, those skilled in the art can be without prejudice in the present invention
Similar popularization is done in the case where culvert, therefore the present invention is not limited by the specific embodiments disclosed below.
Secondly, combination schematic diagram of the present invention is described in detail, when describing the embodiments of the present invention, for purposes of illustration only, table
The schematic diagram of showing device device architecture not makees partial enlargement according to general proportion, and the schematic diagram is example,
This should not limit the scope of protection of the invention.In addition, the three-dimensional space of length, width and height should be included in actual fabrication
Size.
Fig. 1 is a kind of the schematic diagram of the section structure of flexible touch sensing provided in an embodiment of the present invention.As shown in Figure 1,
Flexible touch sensing includes flexible substrate 110, the metal touch element layer 120 in the flexible substrate 110 and position
Dielectric layer 130 in the metal touch element layer 120, wherein the flexible substrate 110 is close to the metal touch control component
One side surface of layer 120 is rough surface.
Illustratively, can with using plasma etching technics to flexible substrate 110 close to metal touch element layer 120
Surface is handled, to form rough surface.It should be noted that compared with the existing technology in smooth surface flexible substrate
110, the adhesive force between flexible substrate 110 and metal touch element layer 120 in the present embodiment with rough surface increases, shape
At flexible touch sensing bending resistance enhancing.
Formed it should be noted that being located at outermost dielectric layer 130 using organic insulating material, can play avoid it is soft
Property the effect corroded by water oxygen of touch sensing internal structure, on the other hand can also be used as planarization layer, flexible be touched to entire
Control sensor plays the role of planarization.
Flexibility touch sensing provided in this embodiment includes flexible substrate 110, the metal touching in flexible substrate 110
Control element layer 120 and the dielectric layer 130 in metal touch element layer 120, wherein flexible substrate 110 is touched close to metal
The side surface for controlling element layer 120 is rough surface, by making flexible substrate 110 have rough surface, so that flexible substrate 110
Adhesive force between metal touch element layer 120 increases, and increases flexible substrate 110 and metal without using in the prior art
Adhesive force between touch element layer 120 and the silicon nitride layer or silicon dioxide layer being arranged have reached the flexible touch sensing of raising
Bending resistance, simplify the beneficial effect of flexibility touch sensing preparation process.
Fig. 2 is a kind of overlooking structure diagram of flexible touch sensing provided in an embodiment of the present invention.Fig. 3 is along Fig. 2
The schematic diagram of the section structure of middle dotted line AB.If Fig. 3 shows, flexible touch sensing includes flexible substrate 110, is located at the flexible liner
Metal touch element layer 120 on bottom 110 and the dielectric layer 130 in the metal touch element layer 120, wherein institute
It is rough surface that flexible substrate 110, which is stated, close to a side surface of the metal touch element layer 120.Specifically, the metal touching
Control element layer 120 includes the first touch control electrode layer 121 on the rough surface, is located at first touch control electrode layer
First insulating layer 122 and the second touch control electrode layer 123 on first insulating layer 122 on 121.Referring to fig. 2 and scheme
3, first touch control electrode layer 121 includes multiple the first touch control electrodes of strip 121/1 arranged in parallel, the second touch-control electricity
Pole layer 123 includes multiple strip second touch control electrodes 123/1 arranged in parallel, the extension side of first touch control electrode 121/1
To vertical with the extending direction of the second touch control electrode 123/1.
Illustratively, first touch control electrode 121/1 can be touch-driven electrode, the second touch control electrode 123/
1 can be touch detection electrodes or first touch control electrode 121/1 can be touch detection electrodes, second touch-control
Electrode 123/1 can be touch-driven electrode.
Fig. 4 is the overlooking structure diagram of another flexible touch sensing provided in an embodiment of the present invention.Fig. 5 is along figure
The schematic diagram of the section structure of dotted line CD in 4.As shown in figure 5, flexible touch sensing includes flexible substrate 110, positioned at described soft
Metal touch element layer 120 on property substrate 110 and the dielectric layer 130 in the metal touch element layer 120,
In, the flexible substrate 110 is rough surface close to a side surface of the metal touch element layer 120.Specifically, the gold
Belonging to touch element layer 120 includes the third touch control electrode layer 124 on the rough surface, is located at the third touch control electrode
Second insulating layer 125 on layer 124 and the conductive interconnections layer 126 in the second insulating layer 125.Referring to fig. 4 and scheme
5, the third touch control electrode layer 124 includes multiple strip third touch control electrodes 124/1 arranged in parallel and multiple 4th touchings
Electrode group 101 is controlled, each 4th touch control electrode group 101 includes multiple 4th touch control electrodes 124/2, multiple described in every group
The orientation of 4th touch control electrode 124/2 is vertical with the extending direction of the third touch control electrode 124/1, and each described 4th
Each 4th touch control electrode 124/2 is arranged with multiple intervals of third touch control electrode 124/1 in touch control electrode group 101, described to lead
Electric interconnection layer 126 includes that multiple conductions collapse bridge 126/1, and each conduction bridge 126/1 that collapses passes through in the second insulating layer 125
Two via holes 102 being correspondingly arranged are electrically connected two the 4th touch control electrodes adjacent in the same 4th touch control electrode group 101
124/2。
Illustratively, the third touch control electrode 124/1 is touch-driven electrode, and the 4th touch control electrode 124/2 is
Touch detection electrodes, alternatively, the third touch control electrode 124/1 is touch detection electrodes, the 4th touch control electrode 124/2 is
Touch-driven electrode.
Fig. 6 is the overlooking structure diagram of another flexible touch sensing provided in an embodiment of the present invention.Fig. 7 is along figure
The schematic diagram of the section structure of dotted line EF in 6.As shown in fig. 7, flexible touch sensing includes flexible substrate 110, positioned at described soft
Metal touch element layer 120 on property substrate 110 and the dielectric layer 130 in the metal touch element layer 120,
In, the flexible substrate 110 is rough surface close to a side surface of the metal touch element layer 120.Specifically, referring to figure
6 and Fig. 7, the metal touch element layer 120 include the 4th touch control electrode layer 127 on the rough surface and are located at
Third insulating layer 128 on 4th touch control electrode layer 127, the 4th touch control electrode layer 127 include multiple arranged in parallel
The 5th touch control electrode 127/1 of strip and multiple 6th touch control electrode groups 103, the 5th touch control electrode 127/1 with it is described
The setting of 6th touch control electrode group 103 interval, each 6th touch control electrode group 103 include multiple 6th touch control electrodes 127/2,
The orientation and the extending direction phase of the 5th touch control electrode 127/1 of multiple 6th touch control electrodes 127/2 described in every group
Together.
Illustratively, the 5th touch control electrode 127/1 is touch-driven electrode, and the 6th touch control electrode 127/2 is
Touch detection electrodes, alternatively, the 5th touch control electrode 127/1 is touch detection electrodes, the 6th touch control electrode 127/2 is
Touch-driven electrode.
Fig. 8 is the overlooking structure diagram of another flexible touch sensing provided in an embodiment of the present invention.Fig. 9 is along figure
The schematic diagram of the section structure of dotted line GH in 8.As shown in figure 9, flexible touch sensing includes flexible substrate 110, positioned at described soft
Metal touch element layer 120 on property substrate 110 and the dielectric layer 130 in the metal touch element layer 120,
In, the flexible substrate 110 is rough surface close to a side surface of the metal touch element layer 120.Specifically, referring to figure
8 and Fig. 9, the metal touch element layer 120 include the 5th touch control electrode layer 129 on the rough surface and are located at
The 4th insulating layer 1210 on 5th touch control electrode layer 129, the 5th touch control electrode layer 129 include multiple in matrix row
The blocky self-capacitance touch control electrode 129/1 of column.
Optionally, the adhesive force between the rough surface and the metal touch element layer 120 can be greater than or equal to
4B.Plasma etch process parameter for being used to form rough surface can be adjusted based on this, it should be noted that coarse
Dynamics is inadequate, and roughness is excessively high and work when will lead to form rough surface so that adhesive force increases for the too low meeting of the roughness on surface
Skill causes that yellow, transparency are lower or mechanical strength is lower equivalent damage to flexible substrate 110.
Illustratively, the material of the flexible substrate 110 can be polyimides or polyethylene terephthalate.It needs
It is noted that flexible substrate 110 can also be formed using other materials, herein in the other embodiments of the present embodiment
It is not especially limited.
Figure 10 is a kind of structural schematic diagram of display panel provided in an embodiment of the present invention.Such as Figure 10, display panel 20
Flexible touch sensing 10 described in invention any embodiment.
Illustratively, referring to Figure 10, the display panel 20 includes the flexible substrates 210 stacked gradually, driver circuit layer
220, light emitting device layer 230 and encapsulated layer 240, the flexible substrates 210 are multiplexed with the soft of the flexible touch sensing 10
Property substrate 110, the metal touch-control member gas-bearing formation 120 are set to one of the flexible substrates 210 far from the driver circuit layer 220
Side.It should be noted that the multiplexing of flexible substrate 110 can reach the beneficial effect for reducing 10 integral thickness of display panel.This
Outside, since the data line of driver circuit layer 220 and scan line etc. may generate signal between flexible touch sensing 10
Interference, to avoid above situation, the present embodiment preferably by the metal touch element layer 120 of flexible touch sensing 10 with
And dielectric layer 130 is set to side of the flexible substrate 110 far from driver circuit layer 220.It is understood that in the present embodiment
In other embodiments, flexible touch sensing 10 can also be used as the different film layers that an independent individual is set to display panel 20
Between, the specific position that is arranged can be designed according to actual needs by operating personnel.
Figure 11 is a kind of structural schematic diagram of display device provided in an embodiment of the present invention.As shown in figure 11, display device
30 include display panel 20 described in any embodiment of that present invention.
Figure 12 is a kind of flow diagram of the preparation method of flexible touch sensing provided in an embodiment of the present invention.The system
Preparation Method is used to prepare flexible touch sensing described in any embodiment of that present invention.As shown in figure 12, flexible touch sensing
Preparation method can specifically include it is as follows:
Step 1 provides a rigid substrates.
Referring to Figure 13 a, rigid substrates 100 are provided.Illustratively, rigid substrates 100 can be glass substrate.It is understood that
, in the other embodiments of the present embodiment, rigid substrates 100 can also be other can play a supporting role and with it is soft
The substrate of the property reactionless generation of substrate.
Step 2 forms flexible substrate on the rigid substrates.
Referring to Figure 13 b, flexible substrate 110 is formed on rigid substrates 100.In the present embodiment, the material of flexible substrate 110
Expect be a variety of, be not specifically limited herein.It illustratively, can be on rigid substrates 100 before slot coated polyimides
Body is heating and curing under anaerobic, prepares the clear polyimides of 10 μ m-thicks.
Step 3, using plasma etching technics handle surface of the flexible substrate far from the rigid substrates side,
To obtain a rough surface.
Referring to Figure 13 c, using plasma etching technics handles flexible substrate 110 far from 100 1 side surface of rigid substrates.
Referring to Figure 13 d, flexible substrate that treated 110 includes a rough surface.Illustratively, side can be formed with to transparent polyamides
The rigid substrates of imines are passed through the oxygen of 20sccm under 4x10-3Pa air pressure, in operating air pressure is 0.1Pa, power is 30W's
Under the conditions of, it handles 20 minutes.
Illustratively, the gas that the plasma etch process uses can be argon gas or oxygen.
Step 4 forms metal touch element layer on the rough surface.
Referring to Figure 13 e, metal touch element layer 120 is formed on the rough surface of flexible substrate 110.Illustratively, exist
D.c. sputtering titanium/aluminium/titanium film is used on the rough surface of clear polyimides after plasma treatment, with a thickness of 20nm/
500nm/20nm；Using yellow light process, Ti/Al/Ti film is patterned, while preparing touch detection electrodes and touch-control drive
Moving electrode, line width are 5 μm.Wherein, the structure of touch detection electrodes and touch-driven electrode can be in above-mentioned a variety of situations
Any, details are not described herein again.
Step 5, the touch element layer form dielectric layer far from the side of the flexible substrate.
Referring to Figure 13 f, dielectric layer 130 is formed far from the side of flexible substrate 110 in metal touch element layer 120.Example
Property, dielectric layer 130 can be formed by organic insulating material.
Step 6 separates the rigid substrates and the flexible substrate.
Rigid substrates 100 and flexible substrate 110 are separated, to obtain flexible touch sensing as shown in Figure 1.
Specifically, separating the rigid substrates 100 and flexible substrate 110 may include: using the release technique of laser point
From the rigid substrates 100 and flexible substrate 110.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts, be combined with each other and substitutes without departing from protection scope of the present invention.Therefore, although by above embodiments to this
Invention is described in further detail, but the present invention is not limited to the above embodiments only, is not departing from present inventive concept
In the case of, it can also include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (16)
1. a kind of flexibility touch sensing characterized by comprising
Flexible substrate, the metal touch element layer in the flexible substrate and in the metal touch element layer
Dielectric layer；
Wherein, the flexible substrate is rough surface close to a side surface of the metal touch element layer.
2. flexibility touch sensing according to claim 1, which is characterized in that the metal touch element layer includes being located at
The first touch control electrode layer on the rough surface is located at the first insulating layer on first touch control electrode layer and is located at described
Second touch control electrode layer on first insulating layer；
First touch control electrode layer includes multiple the first touch control electrodes of strip arranged in parallel, the second touch control electrode layer packet
Include multiple strip second touch control electrodes arranged in parallel, the extending direction of first touch control electrode and the second touch control electrode
Extending direction it is vertical.
3. flexibility touch sensing according to claim 2, which is characterized in that first touch control electrode is touch-control driving
Electrode, the second touch control electrode are touch detection electrodes；Alternatively,
First touch control electrode is touch detection electrodes, and the second touch control electrode is touch-driven electrode.
4. flexibility touch sensing according to claim 1, which is characterized in that the metal touch element layer includes being located at
Third touch control electrode layer on the rough surface, second insulating layer on the third touch control electrode layer and is located at institute
State the conductive interconnections layer in second insulating layer；
The third touch control electrode layer includes multiple strip third touch control electrodes arranged in parallel and multiple 4th touch control electrodes
Group, each 4th touch control electrode group includes multiple 4th touch control electrodes, the row of multiple 4th touch control electrodes described in every group
Column direction is vertical with the extending direction of the third touch control electrode, each 4th touch control electrode in each 4th touch control electrode group
It is arranged with multiple third touch control electrode intervals；
The conductive interconnections layer includes that multiple conductions collapse bridge, and each conduction bridge that collapses is set by correspondence in the second insulating layer
Two via holes set are electrically connected two the 4th touch control electrodes adjacent in the same 4th touch control electrode group.
5. flexibility touch sensing according to claim 4, which is characterized in that the third touch control electrode is touch-control driving
Electrode, the 4th touch control electrode are touch detection electrodes；Alternatively,
The third touch control electrode is touch detection electrodes, and the 4th touch control electrode is touch-driven electrode.
6. flexibility touch sensing according to claim 1, which is characterized in that the metal touch element layer includes being located at
The 4th touch control electrode layer on the rough surface and the third insulating layer on the 4th touch control electrode layer；
4th touch control electrode layer includes multiple the 5th touch control electrode of strip and multiple 6th touch control electrodes arranged in parallel
Group, the 5th touch control electrode and the 6th touch control electrode group interval are arranged, and each 6th touch control electrode group includes more
A 6th touch control electrode, the extension side of the orientation of multiple 6th touch control electrodes and the 5th touch control electrode described in every group
To identical.
7. flexibility touch sensing according to claim 6, which is characterized in that the 5th touch control electrode is touch-control driving
Electrode, the 6th touch control electrode are touch detection electrodes；Alternatively,
5th touch control electrode is touch detection electrodes, and the 6th touch control electrode is touch-driven electrode.
8. flexibility touch sensing according to claim 1, which is characterized in that the metal touch element layer includes being located at
The 5th touch control electrode layer on the rough surface and the 4th insulating layer on the 5th touch control electrode layer；
5th touch control electrode layer includes multiple blocky self-capacitance touch control electrodes arranged in arrays.
9. flexibility touch sensing according to claim 1, which is characterized in that the rough surface and the metal touch-control
Adhesive force between element layer is greater than or equal to 4B.
10. flexibility touch sensing according to claim 1, which is characterized in that the material of the flexible substrate is polyamides
Imines or polyethylene terephthalate.
11. a kind of display panel, which is characterized in that including the described in any item flexible touch sensings of claim 1-10.
12. display panel according to claim 11, which is characterized in that the display panel includes the flexibility stacked gradually
Substrate, driver circuit layer, light emitting device layer and encapsulated layer, the flexible substrates are multiplexed with the soft of the flexible touch sensing
Property substrate, the metal touch-control member gas-bearing formation are set to side of the flexible substrates far from the driver circuit layer.
13. a kind of display device, which is characterized in that including display panel described in claim 11 or 12.
14. a kind of preparation method of flexibility touch sensing is used to prepare the described in any item flexible touch-controls of claim 1-10
Sensor characterized by comprising
One rigid substrates are provided；
Flexible substrate is formed on the rigid substrates；
Using plasma etching technics handles surface of the flexible substrate far from the rigid substrates side, thick to obtain one
Rough surface；
Metal touch element layer is formed on the rough surface；
The touch element layer forms dielectric layer far from the side of the flexible substrate；
Separate the rigid substrates and the flexible substrate.
15. preparation method according to claim 14, which is characterized in that the gas that the plasma etch process uses
For argon gas or oxygen.
16. preparation method according to claim 14, which is characterized in that separate the rigid substrates and flexible substrate packet
It includes:
The rigid substrates and flexible substrate are separated using the release technique of laser.
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| CN110518118A (en) * | 2019-08-08 | 2019-11-29 | 武汉华星光电半导体显示技术有限公司 | Display panel and preparation method thereof |
| CN111488077A (en) * | 2020-04-08 | 2020-08-04 | Tcl华星光电技术有限公司 | Touch panel and display device |
| CN111665656A (en) * | 2020-06-28 | 2020-09-15 | 武汉华星光电技术有限公司 | Display device and method for manufacturing the same |
| CN113220153A (en) * | 2021-01-20 | 2021-08-06 | 西安交通大学 | Non-contact flexible transparent sensor and preparation method thereof |
| WO2022083315A1 (en) * | 2020-10-20 | 2022-04-28 | 京东方科技集团股份有限公司 | Touch-control display panel and preparation method therefor, and display apparatus |
| WO2022246948A1 (en) * | 2021-05-28 | 2022-12-01 | 深南电路股份有限公司 | Flexible optical waveguide plate and manufacturing method therefor |
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