CN109406133A - Particle falls off the method for quantity during a kind of detection valve working - Google Patents
Particle falls off the method for quantity during a kind of detection valve working Download PDFInfo
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- CN109406133A CN109406133A CN201811511770.7A CN201811511770A CN109406133A CN 109406133 A CN109406133 A CN 109406133A CN 201811511770 A CN201811511770 A CN 201811511770A CN 109406133 A CN109406133 A CN 109406133A
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- 239000002245 particle Substances 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000001514 detection method Methods 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims description 20
- 238000009434 installation Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 6
- 241000233855 Orchidaceae Species 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 8
- 238000003825 pressing Methods 0.000 description 16
- 230000000694 effects Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000003351 stiffener Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000017260 vegetative to reproductive phase transition of meristem Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N2015/1024—Counting particles by non-optical means
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- Analytical Chemistry (AREA)
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- General Health & Medical Sciences (AREA)
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- Details Of Valves (AREA)
Abstract
It falls off the method for quantity the invention discloses particle during a kind of detection valve working, cavity is vacuumized first, then valve opening and closing are allowed, after allowing valve opening and the number of closing to reach the actual work times of valve to be measured, the particle to fall off during valve working is fallen in the cavity, is then counted by corpuscular counter to the particle to fall off.Its Computing Principle is that the particle to fall off is blown into corpuscular counter with gas to count, and then the gas of same flow is blown into corpuscular counter and is counted, the two compares the quantity that can obtain the particle that falls off.The present invention is able to detect the quantity that particle during valve working falls off, so that the producer of vacuum valve and purchaser can accurately recognize the particle amount of the falling off data of vacuum valve, solve the problems, such as to cause the quality of semiconductor or photovoltaic module to be affected since the vacuum valve particle amount of falling off is undesirable.
Description
Technical field
It falls off number the present invention relates to particle during a kind of detection method of valve more particularly to a kind of detection valve working
The method of amount.
Background technique
In the manufacturing process of semiconductor and photovoltaic module, need to use vacuum valve.Due to semiconductor and photovoltaic group
It is very high to the requirement of vacuum valve during the manufacture of part, in addition to some conventional requirement (such as size, sealing, shock resistances
Deng) outside, also there is certain requirement to the particle amount of falling off of vacuum valve during the work time, if the particle amount of falling off is more, just
Influence whether the quality of entire semiconductor and photovoltaic module.Therefore, it is necessary to carry out the particle amount of falling off to vacuum valve to examine
It surveys, and does not carry out the prior art of the particle amount of falling off detection to vacuum valve at present.It is existing since there is no coherent detection
Technology can not know the particle amount of the falling off data of the vacuum valve of oneself production, no normal direction purchase for vacuum valve manufacturer
Buyer guarantees the quality of the vacuum valve of oneself production；And for the purchaser of vacuum valve, in purchase, in this case it is not apparent that true
Detection data of the empty valve in terms of the particle amount of falling off, it is not known which is better and which is worse, has no way of selecting.It is not met if purchaser buys
It is required that vacuum valve, be applied to semiconductor and photovoltaic module production in, the quality of semiconductor and photovoltaic module may be influenced.Cause
This, a kind of method for developing detection vacuum valve particle amount of falling off is particularly important, so that both sides can accurately recognize
The particle amount of the falling off data of vacuum valve, solve due to the vacuum valve particle amount of falling off is undesirable and cause semiconductor or
The problem of quality of person's photovoltaic module is affected.
Summary of the invention
It falls off the method for quantity it is an object of the invention to provide particle during a kind of detection valve working, passes through the party
Method is able to detect the quantity that particle during valve working falls off, so that the producer of valve and purchaser can accurately be recognized
The particle amount of the falling off data of valve solve and cause semiconductor or photovoltaic group since the valve particle amount of falling off is undesirable
The problem of quality of part is affected.
In order to solve the above technical problems, the technical scheme adopted by the invention is that:
Particle falls off the method for quantity during a kind of detection valve working, characterized by the following steps:
Step 1, valve to be measured is put into a cavity, is then turned on valve to be measured, cavity is vacuumized；
Step 2, valve to be measured is driven to carry out opening and closing movement in the cavity, in time of valve opening to be measured and closing motion
After number reaches predetermined number of times, it can stop, after stopping, valve to be measured is in the open state；
Step 3, a gas access equipment and a corpuscular counter reset, gas access equipment are connected on cavity
It is connected by pipeline with corpuscular counter；
Step 4, it first passes through gas access equipment gas is passed into the corpuscular counter reset and count, record particle
The digital a that counter is shown after then resetting corpuscular counter, is passed through same flow into cavity by gas access equipment
Gas, gas, which enters after cavity to enter back into corpuscular counter, to be counted, and is recorded the digital b that corpuscular counter is shown, is counted
Particle is calculated to fall off quantity c=b-a；Or first pass through gas access equipment and be passed through gas into cavity, gas enters after cavity again
It enters in corpuscular counter and counts, record the digital a1 that corpuscular counter is shown, after then resetting corpuscular counter, lead to
It crosses gas access equipment the gas of same flow is passed into the corpuscular counter reset and count, record particle counting
The digital b1 that device is shown calculates particle and falls off quantity c1=a1-b1.
It to the vacuum degree that cavity vacuumizes is determined according to the vacuum degree of valve actual working environment to be measured in step 1
's.
In step 1, during vacuumizing, the requirement of vacuum degree is reached by the way of vacuumizing twice, for the first time
It is vacuumized with vacuum dry pump, is combined with vacuum dry pump and vacuum molecular pump vacuumize for the second time, vacuumized be extracted into vacuum for the first time
Vacuum molecular pump can be started after within the scope of the operating pressure of molecular pump.
In step 1, the cavity includes bottom plate, strap flange, ambulatory splint flange, locating piece and movable clamping dress
Set, strap flange and ambulatory splint flange are mounted on bottom plate, strap flange and ambulatory splint flange abut against to
The tow sides of side valve door, locating piece and movable clamping device are mounted on bottom plate, and locating piece and movable clamping device abut against
Be provided with inner groovy and venthole on the two sides of valve to be measured, strap flange and ambulatory splint flange, venthole with
Inner groovy is connected, and the through slot of valve to be measured and the inner groovy on strap flange and ambulatory splint flange form cavity.
The joint of the strap flange and valve to be measured, the joint of the ambulatory splint flange and valve to be measured
It is all made of sealing ring sealing.
The bottom plate mills out L shape boss, and the strap flange is abutted against on L shape boss, provided just for valve to be measured
The reference for installation of reverse side, the locating piece abut against on L shape boss, provide side reference for installation for valve to be measured.
Cushion block is also equipped on the bottom plate, cushion block is located at below valve to be measured.By the effect of cushion block, adjustable valve
The mounting height up and down of door, while cooperating with valve bottom, a position-limiting action is played to valve.
Adapter flange, adapter flange and strap method are mounted on the strap flange, ambulatory splint flange
Orchid is connected with the venthole of ambulatory splint flange.By the effect of adapter flange and gas access equipment, vacuum evacuation device and
Corpuscular counter is connected.
The side of the strap flange and valve to be measured, ambulatory splint flange and valve to be measured is solid by clamp bolt
Tightly.
The strap flange and ambulatory splint flange are L shaped plate, and strap flange is bolted on bottom plate
On, ambulatory splint flange is mounted on bottom plate by bolt, and the bolt hole on bottom plate is strip-shaped hole, by adjusting bolt in bar shaped
Position in hole adjusts the position of ambulatory splint flange, to abut against on valve to be measured.In order to provide strap flange
With the intensity of ambulatory splint flange, the strap flange and ambulatory splint flange pass through setting stiffener plate and spot welding gap
Mode realize.
The locating piece is L shaped plate, is fixed on bottom plate by positioning pin and bolt.
The movable clamping device includes that L shaped plate, movable plate and mobile bolt, L shaped plate are fixed by positioning pin and bolt
On bottom plate, movable plate is connected on mobile bolt, and mobile bolt passes through L shaped plate, is spirally connected with L shaped plate.
In step 1, cavity be can also be such as flowering structure:
It includes substrate, valve head positioning plate, valve tail positioning plate, movable pressing device, inlet flange pipe, outlet flanged pipe, air inlet
Adapter flange, outlet adapter flange and valve to be measured, inlet flange pipe and outlet flanged pipe are separately mounted to valve both ends to be measured,
It valve and inlet flange pipe to be measured and is tightly connected between outlet flanged pipe, valve head positioning plate and valve tail positioning plate are mounted on
On substrate, valve to be measured is stuck in valve head positioning plate and valve tail positioning plate, by the effect of valve head positioning plate and valve tail positioning plate,
It can prevent valve to be measured or so and sway forwards and backwards, the activity pressing device is installed on substrate, and valve to be measured is stuck in activity
In pressing device, it can prevent valve to be measured from teetertottering by movable pressing device, the inlet flange pipe and outlet flange
Pipe is adapter flange pipe, and adapter flange pipe is cone, and the particle that falls off when it is possible to prevente effectively from blowing is trapped in vacuum cavity
Surface, the test result made is more acurrate, and the big end of the inlet flange pipe is connected on valve to be measured, and small end and air inlet turn
Acting flange be connected, the big end of the outlet flanged pipe is connected on valve to be measured, and small end is connected with outlet adapter flange, it is described into
Gas flanged pipe, outlet flanged pipe, air inlet adapter flange, outlet adapter flange and valve to be measured are hollow, the vacuum evacuation device with
Outlet adapter flange is connected, or is connected with air inlet adapter flange.
The valve head positioning plate includes L shape limit plate, and L shape limit plate is provided with protrusion, and valve setting to be measured is fluted, to
After side valve door is assemblied in valve head positioning plate, protrusion is extend into groove, and L shape limit plate is installed on substrate.
The valve tail positioning plate includes one flat plate and one piece of trough plate, and trough plate vertically connects on plate, and plate is being pacified
On substrate, the two sides of trough plate are equipped with fastening bolt, and valve to be measured is mounted in trough plate, are carried out by fastening bolt
Fastening positioning, prevents front and back from teetertottering.
The activity pressing device includes limit plate, Limit screw and stop nut, and Limit screw one end is mounted on substrate
On, limit plate is socketed on Limit screw, and stop nut is socketed on Limit screw, and limit plate is located at below stop nut, to
Side valve door is located at below limit plate.
Vacuum evacuation device includes vacuum molecular pump and vacuum dry pump, and vacuum molecular pump and vacuum dry pump are existed by piping connection
On outlet adapter flange or air inlet adapter flange.
In step 2, the predetermined number of times is according to valve to be measured in actual working environment, and need to open and close is secondary
It counts to determine.
In step 2, valve to be measured is driven to carry out opening and closing movement in the cavity by driving device, driving device is adopted
With cylinder, oil cylinder or other mechanical structures, as long as valve opening to be measured can be driven and closed.The device uses existing knot
Structure, while it being also not inventive concept of the invention, therefore details are not described herein.
In step 3, gas access equipment includes air compressor machine, drier, filter, pressure reducing valve and gas flowmeter, pneumatics
Machine is connected with drier, and drier is connected with filter, and filter is connected with pressure reducing valve, and pressure reducing valve is connected with gas flowmeter,
Gas flowmeter is connected with cavity.
In step 3, valve is installed on the pipeline that gas flowmeter is connected with cavity, in gas access equipment and particle meter
Valve is installed on the connected branch pipe of number device, valve is installed on the pipeline that corpuscular counter is connected with cavity, in vacuum evacuation device
Valve is installed on the pipeline being connected with cavity, by control each valve open and close realize vacuum evacuation device vacuumize, gas
Body enter in cavity particle is blown into corpuscular counter, gas enters directly into relevant action in corpuscular counter.
In step 3, high pressure diffuser is also equipped in the inlet ductwork of corpuscular counter.
Compared with prior art, the invention has the following advantages:
1, the present invention first vacuumizes cavity, simulates the working environment of valve to be measured, then allows valve opening and closing, allows valve
After the number that door opens and closes reaches the actual work times of valve to be measured, the particle to fall off during valve working is fallen
In cavity, then the particle to fall off is counted by corpuscular counter.Its Computing Principle is the particle that will be fallen off with gas
It is blown into corpuscular counter and is counted, then the gas of same flow is blown into corpuscular counter and is counted, the two ratio
Compared with the quantity that can obtain the particle that falls off.Its testing principle is simple, easily operated, can accurately measure valve to be measured in reality
The amount of falling off of particle in the course of work on border.The method provided through the invention can measure valve grain in practical work process
The amount of falling off of son, can allow the working system of valve and purchaser to know the particle amount of falling off in the actual working process of valve
Data can either allow producer to understand the quality of its valve, and purchaser can be allowed to understand the quality of valve, and purchaser is avoided to purchase
Undesirable valve is bought, and the product quality manufactured is caused to be affected.It can also be sold simultaneously for production square cotter
Valve provides marketing data, is conducive to producer and sells related valve.
It 2, is the vacuum according to valve actual working environment to be measured to the vacuum degree that cavity vacuumizes in step 1 of the present invention
It spends to determine.During vacuumizing, the requirement of vacuum degree is reached by the way of vacuumizing twice, uses vacuum for the first time
Dry pump vacuumizes, and is combined with vacuum dry pump and vacuum molecular pump vacuumize for the second time, vacuumized be extracted into vacuum molecular pump for the first time
Operating pressure within the scope of can start vacuum molecular pump.Predetermined number of times is needed according to valve to be measured in actual working environment
The number to be opened and closed determines.Control in this way can guarantee the valve to be measured that this detection method is simulated completely
Actual condition, the data of generation are more accurate, will not have relatively large deviation with the particle amount of falling off data when practical valve working.It adopts
It is requirement in order to guarantee vacuum degree with vacuumizing twice.
3, in step 3 of the present invention, gas access equipment includes air compressor machine, based compressed-gas dryers, compressed gas precision mistake
Filter, pressure reducing valve and gas flowmeter, air compressor machine are connected with based compressed-gas dryers, based compressed-gas dryers and compressed gas essence
Close filter is connected, and compressed gas accurate filter is connected with pressure reducing valve, and pressure reducing valve is connected with gas flowmeter, gas flowmeter
It is connected with cavity.The specific structure of gas compressing apparatus is to guarantee that gas is passed into the flow in cavity and corpuscular counter
Unanimously, and to gas filtration treatment has been carried out, has avoided other particulate matters from influencing the accuracy counted, purpose is also for guarantor
Demonstrate,prove the accuracy of detection data.
4, cavity of the present invention includes bottom plate, strap flange, ambulatory splint flange, locating piece and movable clamping device,
Strap flange and ambulatory splint flange are mounted on bottom plate, and strap flange and ambulatory splint flange are abutted against to side valve
The tow sides of door, locating piece and movable clamping device be mounted on bottom plate, and locating piece and movable clamping device abut against to be measured
Inner groovy and venthole, venthole and indent are provided on the two sides of valve, strap flange and ambulatory splint flange
Slot is connected, and the through slot of valve to be measured and the inner groovy on strap flange and ambulatory splint flange form cavity.Cavity is logical
The design for crossing this structure can fully ensure that cavity is closed, be capable of forming vacuum, and only cavity forms vacuum, takes out
Vacuum requirement is lower, easily controllable, and can accurate simulation go out the vacuum environment of valve working, the cavity of formation is also convenient for receiving
Collect particle.
5, the side of strap flange of the present invention and valve to be measured, ambulatory splint flange and valve to be measured passes through clamp spiral shell
Bolt fastens.Clamp bolt can be further ensured that strap flange and valve to be measured, ambulatory splint flange and valve to be measured connect
Connect it is even closer, will not gas leakage, guarantee closed environment.
6, strap flange and ambulatory splint flange of the present invention are L plate, and strap flange is fixed on by positioning pin
On bottom plate, ambulatory splint flange is bolted on bottom plate, and the bolt hole on bottom plate is strip-shaped hole.Through this structure
Design enables to strap flange and ambulatory splint flange to be firmly fastened on valve to be measured, avoids the occurrence of showing for gas leakage
As.
7, movable clamping device of the present invention includes that L shaped plate, movable plate and mobile bolt, L shaped plate are fixed on by positioning pin
On bottom plate, movable plate is connected on mobile bolt, and mobile bolt passes through L shaped plate, is spirally connected with L shaped plate.By adjusting mobile bolt
Movable plate can be adjusted and make it possible to clamping valve to be measured tightly.
8, cavity of the present invention includes substrate, valve head positioning plate, valve tail positioning plate, movable pressing device, inlet flange pipe, goes out
Gas flanged pipe, air inlet adapter flange, outlet adapter flange and valve to be measured, inlet flange pipe and outlet flanged pipe are separately mounted to
Valve both ends to be measured are tightly connected, valve head positioning plate and valve tail between valve and inlet flange pipe and outlet flanged pipe to be measured
Positioning plate is installed on substrate, and valve to be measured is stuck in valve head positioning plate, and valve to be measured is stuck in valve tail positioning plate, passes through valve head
The effect of positioning plate and valve tail positioning plate can prevent the whole left and right of valve to be measured and valve to be measured composition and sway forwards and backwards,
The activity pressing device is installed on substrate, and valve to be measured is stuck in movable pressing device, can by movable pressing device
The entirety for preventing valve to be measured and valve to be measured from forming teetertotters, and the inlet flange pipe and outlet flanged pipe are variable diameter method
The big end of orchid, the inlet flange pipe is connected on valve to be measured, and small end is connected with air inlet adapter flange, the outlet flanged pipe
Big end be connected on valve to be measured, small end is connected with outlet adapter flange, the inlet flange pipe, outlet flanged pipe, air inlet
Adapter flange, outlet adapter flange and valve to be measured are hollow, and the vacuum evacuation device is connected with outlet adapter flange, Huo Zheyu
Air inlet adapter flange is connected.Cavity can fully ensure that cavity is closed by the design of this structure, be capable of forming vacuum, energy
Enough accurate simulations go out the vacuum environment of valve working, and the cavity of formation is also convenient for collecting particle.Due to inlet flange pipe and outlet
Flanged pipe is adapter flange, and the particle that is conducive to fall off is blown into corpuscular counter, and technology is more accurate, passes through valve head positioning plate
Cavity is positioned with valve tail positioning plate, prevents valve to be measured in open and close action process, shakes and causes gas leakage, is lost
Vacuum environment is gone, limit up and down is carried out to cavity by movable pressing device, causes to leak also for preventing cavity from teetertottering
Gas.
9, valve head positioning plate of the present invention includes L shape limit plate, and L shape limit plate is provided with protrusion, and valve to be measured is provided with recessed
Slot, after valve to be measured is assemblied in valve head positioning plate, protrusion is extend into groove, and L shape limit plate is installed on substrate.By convex
The cooperation with groove is played, cavity can not only be positioned, also has the function of left and right and front and back limit.
10, valve tail positioning plate of the present invention includes one flat plate and one piece of trough plate, and trough plate vertically connects on plate, plate
It is being installed on substrate, the two sides of trough plate are equipped with fastening bolt, and valve to be measured is mounted in trough plate, pass through fastening bolt
Fastening positioning is carried out, prevents front and back from teetertottering.Side valve door can be treated by control fastening bolt to be fastened, and avoided to be measured
Valve shakes during opening and closing, causes gas leakage, can treat side valve door and carry out under the mountain of front and back and left and right directions
Limit, comprehensive limit.
11, the movable pressing device of the present invention includes limit plate, Limit screw and stop nut, and Limit screw one end is mounted on
On substrate, limit plate is socketed on Limit screw, and stop nut is socketed on Limit screw, and limit plate is located under stop nut
Side, valve to be measured are located at below limit plate.Side valve door is treated by limit plate and carries out upper and lower position limit, and is avoided to side valve
Door shakes and causes gas leakage.
Detailed description of the invention
Fig. 1 is overall structure of the present invention；
Fig. 2 is the outline structural diagram of 3 cavity of embodiment and valve to be measured cooperation；
Fig. 3 is the configuration schematic diagram of Fig. 2；
Fig. 4 is the vertical profile structural schematic diagram of Fig. 2；
Fig. 5 is movable clamping apparatus structure schematic diagram；
Fig. 6 is valve mechanism schematic diagram to be measured；
Fig. 7 is ambulatory splint flange arrangement schematic diagram；
Fig. 8 is the structural schematic diagram of 4 cavity of embodiment；
Fig. 9 is the top view of Fig. 8；
Figure 10 is enlarged drawing at the A of Fig. 9.
Appended drawing reference
1, valve to be measured, 2, cavity, 21, cushion block, 22, bottom plate, 23, strap flange, 24, ambulatory splint flange, 25, positioning
Block, 26, movable clamping device, 27, inner groovy, 28, venthole, 29, through slot, 210, cavity, 211, adapter flange, 212, clamp
Bolt, 213, stiffener plate, 214, L shaped plate, 215, movable plate, 216, mobile bolt, 201, air inlet clamping plate flange, 202, outlet
Clamping plate flange, 203, air inlet adapter flange, 204, outlet adapter flange, 205, substrate, 206, left locating piece, 207, right positioning
Block, 208, upper and lower limiting device, 3, vacuum evacuation device, 31, vacuum molecular pump, 32, vacuum dry pump, 4, gas access equipment, 41,
Air compressor machine, 42, drier, 43, filter, 44, pressure reducing valve, 45, gas flowmeter, 5, corpuscular counter, 6, valve I, 61, valve
Door II, 62, valve III, 63, valve IV, 7, high pressure diffuser, 8, valve actuator to be measured.
Specific embodiment
The present invention will be further described with reference to the examples below, and described embodiment is only present invention a part
Embodiment is not whole embodiment.Based on the embodiments of the present invention, those skilled in the art are not making
Other embodiments used obtained, belong to protection scope of the present invention under the premise of creative work.
Embodiment 1
During detection valve working provided in this embodiment particle fall off quantity method be specially (for the ease of illustrate, knot
Fig. 1 is closed to be illustrated):
Step 1: connecting gas access equipment 4, vacuum evacuation device 3 and corpuscular counter 5, valve 1 to be measured on cavity 2 and be inserted into
In cavity 2, valve 1 to be measured connects valve actuator 8 to be measured, and valve actuator 8 to be measured drives valve 1 to be measured to open and close
It closes；Valve I 6 is installed on the connecting line of gas access equipment 4 and cavity, in gas access equipment 4 and 5 phase of corpuscular counter
Valve II 61 is installed on pipeline even, valve III 62 is installed on the pipeline that corpuscular counter 5 is connected with cavity 2, is being vacuumized
Valve IV 63 is installed on the pipeline that device 3 is connected with cavity；It is first shut off valve I 6, valve II 61, valve III 62, opens valve
IV 63, it controls valve actuator 8 to be measured and opens valve 1 to be measured, starting vacuum dry pump 32 vacuumizes cavity 2, reaches to pressure
After in the working range of vacuum molecular pump 31, vacuum dry pump 32 is closed, starts 31 vacuum of vacuum molecule pumping, is wanted until reaching
(determined according to the vacuum degree of the actual working environment of valve to be measured) until the vacuum degree asked, is then shut off valve IV 63.
Step 2: step 1 complete rear chamber 2 just reach valve 1(such as vacuum gate valve to be measured) needed for testing conditions, to
The beginning of side valve door 1 carries out switch movement in cavity 2.Valve 1 to be measured by driving device can realize valve 1 to be measured unlatching and
Closing motion.It can stop after vacuum gate valve moves to predetermined number of times, when stopping, valve is in the open state.
Step 3: the high efficiency particulate air filter carried using corpuscular counter 5 resets equipment to being zeroed out processing operation.It resets
After the completion of operation, valve II 61 is opened, is connected to gas flowmeter 45 with high pressure diffuser 7.Then gas is passed sequentially through into sky
Press 41, drier 42, filter 43, pressure reducing valve 44, gas flowmeter 45, valve II 61, high pressure diffuser 7 and particle counting
Device 5.Data measured by corpuscular counter 5 are grain diameter and corresponding number in gas after gas flowmeter 45,
Record the digital a of the display of corpuscular counter 5.
Step 4: after the completion of step 3, processing being zeroed out using same method to corpuscular counter 5 again, is then shut off
Valve II 61, opens valve I 6 and then valve III 62 again once leads to gas so that cavity 2 is connected to high pressure diffuser 7
Cross air compressor machine 41, drier 42, filter 43, pressure reducing valve 4, gas flowmeter 5, valve I 6, cavity 2, valve III 62, high companding
Dissipate device 7 and corpuscular counter 5.So that it is consistent with the gas flow being passed through in step 3 to be passed through gas flow, 5 institute of corpuscular counter
The data that corpuscular counter measures in data measured b and step 3, which are compared, can be obtained valve 1 to be measured in cavity and actually falls
Grain diameter and corresponding quantity c=a-b.
Embodiment 2
The present embodiment is substantially the same manner as Example 1, the difference is that first passing through gas access equipment is passed through gas, gas into cavity
It enters back into corpuscular counter 5 and counts after into cavity, the digital a1 that corpuscular counter is shown is recorded, then by particle meter
After number device 5 is reset, the gas of same flow is passed by gas access equipment by the corpuscular counter 5 reset and is fallen into a trap
Number, records the digital b1 that corpuscular counter is shown, calculates particle and falls off quantity c1=a1-b1.
Embodiment 3
The present embodiment is substantially the same manner as Example 1, unlike: the present embodiment further limits the structure of cavity,
The specific structure of cavity 2 are as follows: the cavity 2 includes bottom plate 22, strap flange 23, ambulatory splint flange 24, locating piece 25
With movable clamping device 26, strap flange 23, ambulatory splint flange 24, locating piece 25 and movable clamping device 26 are fixed on
On bottom plate 22, strap flange 23 and ambulatory splint flange 24 abut against in valve 1(Fig. 2 to be measured and illustrate that valve to be measured
Shell, for simplicity there is no draw internal structure chart) tow sides (face A, B in figure) realization treat side valve door 1
The fixation of front and back sides, locating piece 25 and movable clamping device 26 abut against the two sides of valve 1 to be measured, and side valve door 1 is treated in realization
Two sides are fixed, and inner groovy 27 and venthole 28, venthole 28 are provided on strap flange 23 and ambulatory splint flange 24
It is connected with inner groovy 27, the through slot 29 and the inner groovy on strap flange 23 and ambulatory splint flange 24 of valve 1 to be measured
27 form cavity 210.
Be mounted on adapter flange 211 on the strap flange 23, ambulatory splint flange 24, adapter flange 211 with
Strap flange 23 is connected with the venthole 28 of ambulatory splint flange 24.Adapter flange 211 is separately connected gas and is passed through dress
4, vacuum evacuation device 3 is set to be connected with corpuscular counter 5.
The side of the strap flange 23 and valve 1 to be measured, ambulatory splint flange 24 and valve 1 to be measured passes through clamp
Bolt 212 fastens.
The strap flange 23 and ambulatory splint flange 24 are L shaped plate, and strap flange 23 is fixed on bottom plate 22
On, ambulatory splint flange 24 is bolted on bottom plate 22, and bolt hole herein is strip-shaped hole.The strip-shaped hole of setting is main
Be in order to allow bolt can in strip-shaped hole it is movable, to adjust the position of ambulatory splint flange, guarantee ambulatory splint flange 24
With strap flange 23 by the shell clamping of valve 1 to be measured.
Stiffener plate 213 is provided on the strap flange 23 and ambulatory splint flange 24.
The locating piece 25 is L shaped plate, is bolted on bottom plate 22.
The movable clamping device 26 includes that L shaped plate 214, movable plate 215 and mobile bolt 216, L shaped plate 214 pass through solid
It is scheduled on bottom plate 22, movable plate 215 is connected on mobile bolt 216, and mobile bolt 216 passes through L shaped plate 214, with L shaped plate 214
It is spirally connected.
The joint of the strap flange 23 and valve 1 to be measured, the ambulatory splint flange 24 and valve 1 to be measured
Joint is all made of sealing ring sealing.
L shape boss is arranged in the bottom plate 22, and the strap flange is abutted against on L shape boss, provided for valve to be measured
The reference for installation of front and back sides, the locating piece abut against on L shape boss, provide side reference for installation for valve to be measured.
Cushion block 21 is also equipped on the bottom plate 22, cushion block 21 is located at 1 lower section of valve to be measured.
Embodiment 4
The present embodiment is substantially the same manner as Example 1, unlike, the present embodiment further limits the structure of cavity,
The specific structure of cavity 2 are as follows: it include substrate 205, valve head positioning plate 206, valve tail positioning plate 207, movable pressing device 208,
Inlet flange pipe 201, outlet flanged pipe 202, air inlet adapter flange 203, outlet adapter flange 204 and valve to be measured 1, air inlet method
Blue pipe 201 and outlet flanged pipe 202 are separately mounted to 1 both ends of valve to be measured, and valve 1 to be measured is with inlet flange pipe 201 and out
It is tightly connected between gas flanged pipe 202, valve head positioning plate 206 and valve tail positioning plate 207 are mounted on substrate 205, valve 1 to be measured
It is stuck in valve head positioning plate 206 and valve tail positioning plate 207, passes through the effect of valve head positioning plate 206 and valve tail positioning plate 207, energy
It enough prevents valve 1 to be measured and sways forwards and backwards, the activity pressing device 208 is mounted on substrate 205, and valve 1 to be measured is stuck in work
In dynamic pressing device 208, it can prevent valve 1 to be measured from teetertottering by movable pressing device 208, the inlet flange pipe
201 and outlet flanged pipe 202 be adapter flange pipe, the big end of the inlet flange pipe 201 is connected on valve 1 to be measured, small end
It is connected with air inlet adapter flange 203, the big end of the outlet flanged pipe 202 is connected on valve 1 to be measured, and small end and outlet are transferred
Flange 204 is connected, the inlet flange pipe 201, outlet flanged pipe 202, air inlet adapter flange 203,204 and of outlet adapter flange
Valve 1 to be measured is hollow, and vacuum evacuation device 3 is connected with outlet adapter flange.
The valve head positioning plate 206 includes L shape limit plate 2061, and L shape limit plate is provided with protrusion, and valve 1 to be measured is arranged
Fluted, after valve 1 to be measured is assemblied in valve head positioning plate 206, protrusion is extend into groove, and L shape limit plate is mounted on substrate
On.
The valve tail positioning plate 207 includes that one flat plate and one piece of trough plate, trough plate vertically connect on plate, and plate exists
Be installed on substrate, the two sides of trough plate are equipped with fastening bolt, and valve to be measured is mounted in trough plate, by fastening bolt into
Row fastening positioning, prevents front and back from teetertottering.
The activity pressing device 208 includes limit plate, Limit screw and stop nut, and Limit screw one end is mounted on base
On plate, limit plate is socketed on Limit screw, and stop nut is socketed on Limit screw, and limit plate is located at below stop nut,
Valve to be measured is located at below limit plate.
Claims (10)
1. particle falls off the method for quantity during a kind of detection valve working, characterized by the following steps:
Step 1, valve to be measured is put into a cavity, is then turned on valve to be measured, cavity is vacuumized；
Step 2, valve to be measured is driven to carry out opening and closing movement in the cavity, in time of valve opening to be measured and closing motion
After number reaches predetermined number of times, it can stop, after stopping, valve to be measured is in the open state；
Step 3, gas access equipment and corpuscular counter are connected on cavity, gas access equipment passes through pipeline and particle counting
Device is connected；
Step 4, it first passes through gas access equipment gas is passed into the corpuscular counter reset and count, record particle
The digital a that counter is shown after then resetting corpuscular counter, is passed through same flow into cavity by gas access equipment
Gas, gas, which enters after cavity to enter back into corpuscular counter, to be counted, and is recorded the digital b that corpuscular counter is shown, is counted
Particle is calculated to fall off quantity c=b-a；Or first pass through gas access equipment and be passed through gas into cavity, gas enters after cavity again
It enters in corpuscular counter and counts, record the digital a1 that corpuscular counter is shown, after then resetting corpuscular counter, lead to
It crosses gas access equipment the gas of same flow is passed into the corpuscular counter reset and count, record particle counting
The digital b1 that device is shown calculates particle and falls off quantity c1=a1-b1.
2. particle falls off the method for quantity during a kind of detection valve working according to claim 1, it is characterised in that:
It to the vacuum degree that cavity vacuumizes is determined according to the vacuum degree of valve actual working environment to be measured in step 1.
3. particle falls off the method for quantity during a kind of detection valve working according to claim 1, it is characterised in that:
In step 2, the predetermined number of times is according to valve to be measured in actual working environment, and the number that needs to open and close determines
's.
4. particle falls off the method for quantity during a kind of detection valve working according to claim 1, it is characterised in that:
In step 3, gas access equipment includes air compressor machine, drier, filter, pressure reducing valve and gas flowmeter, air compressor machine and drying
Device is connected, and drier is connected with filter, and filter is connected with pressure reducing valve, and pressure reducing valve is connected with gas flowmeter, gas flow
Meter is connected with cavity.
5. particle falls off the method for quantity during a kind of detection valve working according to claim 1, it is characterised in that:
In step 3, valve is installed on the pipeline that gas flowmeter is connected with cavity, is connected in gas access equipment with corpuscular counter
Branch pipe on valve is installed, valve is installed on the pipeline that corpuscular counter is connected with cavity, in vacuum evacuation device and cavity phase
Valve is installed on pipeline even, by controlling opening and close and realizing that vacuum evacuation device vacuumizes, gas enters for each valve
Particle is blown into corpuscular counter in cavity, gas enters directly into relevant action in corpuscular counter.
6. particle falls off the method for quantity during a kind of detection valve working according to claim 1, it is characterised in that:
The cavity includes bottom plate, strap flange, ambulatory splint flange, locating piece and movable clamping device, strap flange
It is mounted on bottom plate with ambulatory splint flange, strap flange and ambulatory splint flange abut against positive and negative the two of valve to be measured
Face, locating piece and movable clamping device are mounted on bottom plate, and locating piece and movable clamping device abut against the two sides of valve to be measured
It is provided with inner groovy and venthole on face, strap flange and ambulatory splint flange, venthole is connected with inner groovy, to
The through slot of side valve door and the inner groovy on strap flange and ambulatory splint flange form cavity.
7. particle falls off the method for quantity during a kind of detection valve working according to claim 6, it is characterised in that:
The joint of the joint of the strap flange and valve to be measured, the ambulatory splint flange and valve to be measured is all made of close
Seal sealing.
8. particle falls off the method for quantity during a kind of detection valve working according to claim 6, it is characterised in that:
The bottom plate is provided with L shape boss, and the strap flange abuts against on L shape boss, provides front and back sides for valve to be measured
Reference for installation, the locating piece abut against on L shape boss, provide side reference for installation for valve to be measured.
9. particle falls off the method for quantity during a kind of detection valve working according to claim 1, it is characterised in that:
The cavity includes substrate, valve head positioning plate, valve tail positioning plate, inlet flange pipe, outlet flanged pipe and valve to be measured, air inlet method
Orchid pipe and outlet flanged pipe are separately mounted to valve both ends to be measured, be tightly connected between valve and inlet flange pipe to be measured, to be measured
It is tightly connected between valve and outlet flanged pipe, valve head positioning plate and valve tail positioning plate are installed on substrate, and valve to be measured is stuck in
In valve head positioning plate and valve tail positioning plate.
10. particle falls off the method for quantity during a kind of detection valve working according to claim 9, feature exists
It is adapter flange pipe in: the inlet flange pipe and outlet flanged pipe, the big end of the inlet flange pipe is connected to valve to be measured
On, the big end of the outlet flanged pipe is connected on valve to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811511770.7A CN109406133B (en) | 2018-12-11 | 2018-12-11 | Method for detecting falling quantity of particles in valve working process |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811511770.7A CN109406133B (en) | 2018-12-11 | 2018-12-11 | Method for detecting falling quantity of particles in valve working process |
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| CN109406133A true CN109406133A (en) | 2019-03-01 |
| CN109406133B CN109406133B (en) | 2020-07-17 |
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| CN201811511770.7A Active CN109406133B (en) | 2018-12-11 | 2018-12-11 | Method for detecting falling quantity of particles in valve working process |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112951676A (en) * | 2021-03-05 | 2021-06-11 | 国网山东省电力公司滨州供电公司 | Emergency opening and closing manipulator capable of remotely operating circuit breaker |
| CN114184372A (en) * | 2021-12-07 | 2022-03-15 | 江苏佳晟动力系统有限公司 | Device for vacuum test of semiconductor vacuum valve |
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|---|---|
| CN109406133B (en) | 2020-07-17 |
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