CN109406134A - Particle falls off the system of quantity during a kind of detection valve working - Google Patents
Particle falls off the system of quantity during a kind of detection valve working Download PDFInfo
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- CN109406134A CN109406134A CN201811513354.0A CN201811513354A CN109406134A CN 109406134 A CN109406134 A CN 109406134A CN 201811513354 A CN201811513354 A CN 201811513354A CN 109406134 A CN109406134 A CN 109406134A
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- 239000002245 particle Substances 0.000 title claims abstract description 55
- 238000001514 detection method Methods 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 claims description 20
- 238000005086 pumping Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 241000196324 Embryophyta Species 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 6
- 210000004262 dental pulp cavity Anatomy 0.000 claims description 4
- 241000233855 Orchidaceae Species 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 8
- 238000003825 pressing Methods 0.000 description 16
- 230000000694 effects Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000003351 stiffener Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000017260 vegetative to reproductive phase transition of meristem Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N2015/1024—Counting particles by non-optical means
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- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
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- General Health & Medical Sciences (AREA)
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- Details Of Valves (AREA)
Abstract
It falls off the system of quantity the invention discloses particle during a kind of detection valve working, including vacuum plant, valve to be measured, valve actuator to be measured, gas access equipment and corpuscular counter, vacuum plant includes cavity and vacuum evacuation device, valve actuator to be measured is connected with valve to be measured, valve to be measured is placed in the cavity, and vacuum plant is connected with gas access equipment and corpuscular counter.The present invention is able to detect the quantity that particle during valve working falls off, so that the producer of valve and purchaser can accurately recognize the particle amount of the falling off data of valve, solve the problems, such as to cause the quality of semiconductor or photovoltaic module to be affected since the valve particle amount of falling off is undesirable.
Description
Technical field
It falls off number the present invention relates to particle during a kind of detection system of valve more particularly to a kind of detection valve working
The system of amount.
Background technique
In the manufacturing process of semiconductor and photovoltaic module, need to use vacuum valve.Due to semiconductor and photovoltaic group
It is very high to the requirement of vacuum valve during the manufacture of part, in addition to some conventional requirement (such as size, sealing, shock resistances
Deng) outside, also there is certain requirement to the particle amount of falling off of vacuum valve during the work time, if the particle amount of falling off is more, just
Influence whether the quality of entire semiconductor and photovoltaic module.Therefore, it is necessary to carry out the particle amount of falling off to vacuum valve to examine
It surveys, and does not carry out the prior art of the particle amount of falling off detection to vacuum valve at present.It is existing since there is no coherent detection
Technology can not know the particle amount of the falling off data of the vacuum valve of oneself production, no normal direction purchase for vacuum valve manufacturer
Buyer guarantees the quality of the vacuum valve of oneself production；And for the purchaser of vacuum valve, in purchase, in this case it is not apparent that true
Detection data of the empty valve in terms of the particle amount of falling off, it is not known which is better and which is worse, has no way of selecting.It is not met if purchaser buys
It is required that vacuum valve, be applied to semiconductor and photovoltaic module production in, the quality of semiconductor and photovoltaic module may be influenced.Cause
This, the system for developing a kind of detection vacuum valve particle amount of falling off is particularly important, so that both sides can accurately recognize
The particle amount of the falling off data of vacuum valve, solve due to the vacuum valve particle amount of falling off is undesirable and cause semiconductor or
The problem of quality of person's photovoltaic module is affected.
Summary of the invention
It falls off the system of quantity it is an object of the invention to provide particle during a kind of detection valve working, is by this
System is able to detect the quantity that particle during valve working falls off, so that the producer of valve and purchaser can accurately be recognized
The particle amount of the falling off data of valve solve and cause semiconductor or photovoltaic group since the valve particle amount of falling off is undesirable
The problem of quality of part is affected.
In order to solve the above technical problems, the technical scheme adopted by the invention is that:
Particle falls off the system of quantity during a kind of detection valve working, it is characterised in that: including vacuum plant, to side valve
Door, valve actuator to be measured, gas access equipment and corpuscular counter, the vacuum plant include cavity and vacuum means
It sets, cavity has been at least connected with three root canal roads, and one is gas inlet pipe road, and one is export pipeline, last root is to vacuumize
Pipeline, vacuum-pumping pipeline connect vacuum evacuation device, and gas inlet pipe road connects gas access equipment, and export pipeline connects particle meter
Number device, gas access equipment are connected by bye-pass with corpuscular counter, and valve actuator to be measured is connected with valve to be measured, to
Side valve door drive drives valve opening to be measured and closing, and valve to be measured is placed in the cavity, and the gas inlet pipe road goes out
Valve is mounted on mouth pipeline, vacuum-pumping pipeline and bye-pass.
High pressure diffuser is also equipped on the export pipeline.
The valve actuator to be measured drives valve to be measured to carry out opening and closing movement in the cavity, and driving device is adopted
It is existing structure, also not as long as valve opening to be measured can be driven and closed with cylinder, oil cylinder or other mechanical structures
It is inventive concept of the invention, therefore, details are not described herein.
The gas access equipment includes air compressor machine, drier, filter, pressure reducing valve and gas flowmeter, air compressor machine with
Drier is connected, and drier is connected with filter, and filter is connected with pressure reducing valve, and pressure reducing valve is connected with gas flowmeter, gas
Flowmeter is connected with cavity.
The cavity includes bottom plate, strap flange, ambulatory splint flange, locating piece and movable clamping device, is fixed
Clamping plate flange and ambulatory splint flange are mounted on bottom plate, and strap flange and ambulatory splint flange abut against valve to be measured
Tow sides, locating piece and movable clamping device are mounted on bottom plate, and locating piece and movable clamping device abut against valve to be measured
Two sides, be provided with inner groovy and venthole, venthole and inner groovy phase on strap flange and ambulatory splint flange
Connection, the through slot of valve to be measured and the inner groovy on strap flange and ambulatory splint flange form cavity.
The joint of the strap flange and valve to be measured, the joint of the ambulatory splint flange and valve to be measured
It is all made of sealing ring sealing.
The bottom plate mills out L shape boss, and the strap flange is abutted against on L shape boss, provided just for valve to be measured
The reference for installation of reverse side, the locating piece abut against on L shape boss, provide side reference for installation for valve to be measured.
Cushion block is also equipped on the bottom plate, cushion block is located at below valve to be measured.By the effect of cushion block, adjustable valve
The mounting height up and down of door, while cooperating with valve bottom, a position-limiting action is played to valve.
Adapter flange, adapter flange and strap method are mounted on the strap flange, ambulatory splint flange
Orchid is connected with the venthole of ambulatory splint flange.By the effect of adapter flange and gas access equipment, vacuum evacuation device and
Corpuscular counter is connected.
The side of the strap flange and valve to be measured, ambulatory splint flange and valve to be measured is solid by clamp bolt
Tightly.
The strap flange and ambulatory splint flange are L shaped plate, and strap flange is bolted on bottom plate
On, ambulatory splint flange is mounted on bottom plate by bolt, and the bolt hole on bottom plate is strip-shaped hole, by adjusting bolt in bar shaped
Position in hole adjusts the position of ambulatory splint flange, to abut against on valve to be measured.In order to provide strap flange
With the intensity of ambulatory splint flange, the strap flange and ambulatory splint flange pass through setting stiffener plate and spot welding gap
Mode realize.
The locating piece is L shaped plate, is fixed on bottom plate by positioning pin and bolt.
The movable clamping device includes that L shaped plate, movable plate and mobile bolt, L shaped plate are fixed by positioning pin and bolt
On bottom plate, movable plate is connected on mobile bolt, and mobile bolt passes through L shaped plate, is spirally connected with L shaped plate.
Cavity can also be such as flowering structure:
It includes substrate, valve head positioning plate, valve tail positioning plate, movable pressing device, inlet flange pipe, outlet flanged pipe, air inlet
Adapter flange, outlet adapter flange and valve to be measured, inlet flange pipe and outlet flanged pipe are separately mounted to valve both ends to be measured,
It valve and inlet flange pipe to be measured and is tightly connected between outlet flanged pipe, valve head positioning plate and valve tail positioning plate are mounted on
On substrate, valve to be measured is stuck in valve head positioning plate and valve tail positioning plate, by the effect of valve head positioning plate and valve tail positioning plate,
It can prevent valve to be measured or so and sway forwards and backwards, the activity pressing device is installed on substrate, and valve to be measured is stuck in activity
In pressing device, it can prevent valve to be measured from teetertottering by movable pressing device, the inlet flange pipe and outlet flange
Pipe is adapter flange pipe, and adapter flange pipe is cone, and the particle that falls off when it is possible to prevente effectively from blowing is trapped in vacuum cavity
Surface, the test result made is more acurrate, and the big end of the inlet flange pipe is connected on valve to be measured, and small end and air inlet turn
Acting flange be connected, the big end of the outlet flanged pipe is connected on valve to be measured, and small end is connected with outlet adapter flange, it is described into
Gas flanged pipe, outlet flanged pipe, air inlet adapter flange, outlet adapter flange and valve to be measured are hollow, the vacuum evacuation device with
Outlet adapter flange is connected, or is connected with air inlet adapter flange.
The valve head positioning plate includes L shape limit plate, and L shape limit plate is provided with protrusion, and valve setting to be measured is fluted, to
After side valve door is assemblied in valve head positioning plate, protrusion is extend into groove, and L shape limit plate is installed on substrate.
The valve tail positioning plate includes one flat plate and one piece of trough plate, and trough plate vertically connects on plate, and plate is being pacified
On substrate, the two sides of trough plate are equipped with fastening bolt, and valve to be measured is mounted in trough plate, are carried out by fastening bolt
Fastening positioning, prevents front and back from teetertottering.
The activity pressing device includes limit plate, Limit screw and stop nut, and Limit screw one end is mounted on substrate
On, limit plate is socketed on Limit screw, and stop nut is socketed on Limit screw, and limit plate is located at below stop nut, to
Side valve door is located at below limit plate.
Vacuum evacuation device includes vacuum molecular pump and vacuum dry pump, and vacuum molecular pump and vacuum dry pump are existed by piping connection
On outlet adapter flange or air inlet adapter flange.
The present invention also provides carrying out detection valve particle using above system to fall off the method for quantity, specifically include as follows
Step:
Step 1, valve to be measured is put into a cavity, is then turned on valve to be measured, cavity is vacuumized；
Step 2, valve to be measured is driven to carry out opening and closing movement in the cavity, in time of valve opening to be measured and closing motion
After number reaches predetermined number of times, it can stop, after stopping, valve to be measured is in the open state；
Step 3, a gas access equipment and a corpuscular counter reset, gas access equipment are connected on cavity
It is connected by pipeline with corpuscular counter；
Step 4, it first passes through gas access equipment gas is passed into the corpuscular counter reset and count, record particle
The digital a that counter is shown after then resetting corpuscular counter, is passed through same flow into cavity by gas access equipment
Gas, gas, which enters after cavity to enter back into corpuscular counter, to be counted, and is recorded the digital b that corpuscular counter is shown, is counted
Particle is calculated to fall off quantity c=b-a；Or first pass through gas access equipment and be passed through gas into cavity, gas enters after cavity again
It enters in corpuscular counter and counts, record the digital a1 that corpuscular counter is shown, after then resetting corpuscular counter, lead to
It crosses gas access equipment the gas of same flow is passed into the corpuscular counter reset and count, record particle counting
The digital b1 that device is shown calculates particle and falls off quantity c1=a1-b1.
It to the vacuum degree that cavity vacuumizes is determined according to the vacuum degree of valve actual working environment to be measured in step 1
's.
In step 1, during vacuumizing, the requirement of vacuum degree is reached by the way of vacuumizing twice, for the first time
It is vacuumized with vacuum dry pump, is combined with vacuum dry pump and vacuum molecular pump vacuumize for the second time, vacuumized be extracted into vacuum for the first time
Vacuum molecular pump can be started after within the scope of the operating pressure of molecular pump.
In step 2, the predetermined number of times is according to valve to be measured in actual working environment, and need to open and close is secondary
It counts to determine.
Compared with prior art, the invention has the following advantages:
1, the present invention includes vacuum plant, valve to be measured, valve actuator to be measured, gas access equipment and corpuscular counter,
The vacuum plant includes cavity and vacuum evacuation device, and cavity has been at least connected with three root canal roads, and one is gas inlet pipe road, and one
Root is export pipeline, last root is vacuum-pumping pipeline, and vacuum-pumping pipeline connects vacuum evacuation device, and gas inlet pipe road connects gas
Body access equipment, export pipeline connect corpuscular counter, and gas access equipment is connected by bye-pass with corpuscular counter, to be measured
Valve actuator is connected with valve to be measured, and valve actuator to be measured drives valve opening and closing, valve to be measured to be measured to put
It sets in the cavity, is mounted on valve on the gas inlet pipe road, export pipeline, vacuum-pumping pipeline and bye-pass.First will
Cavity vacuumizes, and simulates the working environment of valve to be measured, then allows valve opening and closing, allows the number of valve opening and closing
After reaching the actual work times of valve to be measured, the particle to fall off during valve working is fallen in the cavity, then passes through grain
Sub-count device counts the particle to fall off.Its Computing Principle is that the particle to fall off is blown into corpuscular counter with gas
It is counted, then the gas of same flow is blown into corpuscular counter and is counted, the two, which compares, can obtain the grain that falls off
The quantity of son.Its testing principle is simple, easily operated, can accurately measure valve to be measured particle in the actual working process
The amount of falling off.The system provided through the invention can measure the amount of falling off of valve particle in practical work process, Neng Gourang
The working system of valve and purchaser know the particle amount of the falling off data in the actual working process of valve, can either allow production
Side understands the quality of its valve, and purchaser can be allowed to understand the quality of valve, avoids purchaser from buying undesirable
Valve, and the product quality manufactured is caused to be affected.Also valve capable of being sold for production square cotter simultaneously, marketing data is provided,
Related valve is sold conducive to producer.
2, the present invention to the vacuum degree that cavity vacuumizes is determined according to the vacuum degree of valve actual working environment to be measured
's.During vacuumizing, the requirement of vacuum degree is reached by the way of vacuumizing twice, is taken out for the first time with vacuum dry pump true
Sky is combined with vacuum dry pump and vacuum molecular pump vacuumize for the second time, and predetermined number of times is according to valve to be measured in real work ring
In border, the number that needs to open and close is determined.Control in this way can guarantee what this detection method was simulated completely
The data of the actual condition of valve to be measured, generation are more accurate, will not have with the particle amount of falling off data when practical valve working compared with
Large deviation.It is requirement in order to guarantee vacuum degree using vacuumizing twice.
3, gas access equipment of the present invention includes air compressor machine, drier, filter, pressure reducing valve and gas flowmeter, pneumatics
Machine is connected with drier, and drier is connected with filter, and filter is connected with pressure reducing valve, and pressure reducing valve is connected with gas flowmeter,
Gas flowmeter is connected with cavity.The specific structure of gas compressing apparatus is to guarantee that gas is passed into cavity and particle counting
Flow in device always, and has carried out filtration treatment to gas, other particulate matters is avoided to influence the accuracy counted, purpose
Also for the accuracy for guaranteeing detection data.
4, the present invention is mounted on valve on gas inlet pipe road, export pipeline, vacuum-pumping pipeline and bye-pass, passes through
The control of valve can guarantee switching on and off for cavity and gas access equipment and corpuscular counter, guarantee the vacuum of cavity
Degree.By the connection of these structures, same gas is enabled to enter in cavity and corpuscular counter, guarantees particle counting
The accuracy that device counts.
5, cavity of the present invention includes bottom plate, strap flange, ambulatory splint flange, locating piece and movable clamping device,
Strap flange and ambulatory splint flange are mounted on bottom plate, and strap flange and ambulatory splint flange are abutted against to side valve
The tow sides of door, locating piece and movable clamping device be mounted on bottom plate, and locating piece and movable clamping device abut against to be measured
Inner groovy and venthole, venthole and indent are provided on the two sides of valve, strap flange and ambulatory splint flange
Slot is connected, and the through slot of valve to be measured and the inner groovy on strap flange and ambulatory splint flange form cavity.Cavity is logical
The design for crossing this structure can fully ensure that cavity is closed, be capable of forming vacuum, and only cavity forms vacuum, takes out
Vacuum requirement is lower, easily controllable, and can accurate simulation go out the vacuum environment of valve working, the cavity of formation is also convenient for receiving
Collect particle.
6, the side of positioning splint of the present invention and valve to be measured, ambulatory splint and valve to be measured passes through clamp bolt tightening.
Clamp bolt can be further ensured that positioning splint and valve to be measured, ambulatory splint connect with valve to be measured it is even closer, will not
Gas leakage guarantees closed environment.
7, strap flange and ambulatory splint flange of the present invention are L plate, and strap flange is fixed on by positioning pin
On bottom plate, ambulatory splint flange is bolted on bottom plate, and the bolt hole on bottom plate is strip-shaped hole.Through this structure
Design enables to strap flange and ambulatory splint flange to be firmly fastened on valve to be measured, avoids the occurrence of showing for gas leakage
As.
8, movable clamping device of the present invention includes that L shaped plate, movable plate and mobile bolt, L shaped plate are fixed on by positioning pin
On bottom plate, movable plate is connected on mobile bolt, and mobile bolt passes through L shaped plate, is spirally connected with L shaped plate.By adjusting mobile bolt
Movable plate can be adjusted and make it possible to clamping valve to be measured tightly.
9, cavity of the present invention includes substrate, valve head positioning plate, valve tail positioning plate, movable pressing device, inlet flange pipe, goes out
Gas flanged pipe, air inlet adapter flange, outlet adapter flange and valve to be measured, inlet flange pipe and outlet flanged pipe are separately mounted to
Valve both ends to be measured are tightly connected, valve head positioning plate and valve tail between valve and inlet flange pipe and outlet flanged pipe to be measured
Positioning plate is installed on substrate, and valve to be measured is stuck in valve head positioning plate, and valve to be measured is stuck in valve tail positioning plate, passes through valve head
The effect of positioning plate and valve tail positioning plate can prevent valve to be measured or so and sway forwards and backwards, the activity pressing device installation
On substrate, valve to be measured is stuck in movable pressing device, can prevent valve to be measured from teetertottering by movable pressing device,
The inlet flange pipe and outlet flanged pipe are adapter flange pipe, and the big end of the inlet flange pipe is connected on valve to be measured,
Small end is connected with air inlet adapter flange, and the big end of the outlet flanged pipe is connected on valve to be measured, small end and outlet switching method
Orchid is connected, and the inlet flange pipe, outlet flanged pipe, air inlet adapter flange, outlet adapter flange and valve to be measured are hollow, described
Vacuum evacuation device is connected with outlet adapter flange, or is connected with air inlet adapter flange.Cavity is set by this structure
Meter can fully ensure that cavity is closed, is capable of forming vacuum, can accurate simulation go out the vacuum environment of valve working, the chamber of formation
Body is also convenient for collecting particle.Since inlet flange pipe and outlet flanged pipe are adapter flange pipe, the particle that is conducive to fall off is blown into
In corpuscular counter, it is more accurate to count, and is positioned, is prevented to side valve to cavity by valve head positioning plate and valve tail positioning plate
Door shakes in open and close action process and causes gas leakage, lose vacuum environment, is carried out by movable pressing device to cavity
Limit up and down, causes gas leakage also for preventing cavity from teetertottering.
10, valve head positioning plate of the present invention includes L shape limit plate, and L shape limit plate is provided with protrusion, and valve to be measured is provided with recessed
Slot, after valve to be measured is assemblied in valve head positioning plate, protrusion is extend into groove, and L shape limit plate is installed on substrate.By convex
The cooperation with groove is played, cavity can not only be positioned, also has the function of left and right and front and back limit.
11, valve tail positioning plate of the present invention includes one flat plate and one piece of trough plate, and trough plate vertically connects on plate, plate
It is being installed on substrate, the two sides of trough plate are equipped with fastening bolt, and valve to be measured is mounted in trough plate, pass through fastening bolt
Fastening positioning is carried out, prevents front and back from teetertottering.Side valve door can be treated by control fastening bolt to be fastened, and avoided to be measured
Valve shakes during opening and closing, causes gas leakage, can treat side valve door and carry out under the mountain of front and back and left and right directions
Limit, comprehensive limit.
12, the movable pressing device of the present invention includes limit plate, Limit screw and stop nut, and Limit screw one end is mounted on
On substrate, limit plate is socketed on Limit screw, and stop nut is socketed on Limit screw, and limit plate is located under stop nut
Side, valve to be measured are located at below limit plate.Side valve door is treated by limit plate and carries out upper and lower position limit, and is avoided to side valve
Door shakes and causes gas leakage.
Detailed description of the invention
Fig. 1 is overall structure of the present invention；
Fig. 2 is the outline structural diagram of 3 cavity of embodiment and valve to be measured cooperation；
Fig. 3 is the configuration schematic diagram of Fig. 2；
Fig. 4 is the vertical profile structural schematic diagram of Fig. 2；
Fig. 5 is movable clamping apparatus structure schematic diagram；
Fig. 6 is valve mechanism schematic diagram to be measured；
Fig. 7 is ambulatory splint flange arrangement schematic diagram；
Fig. 8 is the structural schematic diagram of 4 cavity of embodiment；
Fig. 9 is the top view of Fig. 8；
Figure 10 is enlarged drawing at the A of Fig. 9.
Appended drawing reference
1, valve to be measured, 2, cavity, 21, cushion block, 22, bottom plate, 23, strap flange, 24, ambulatory splint flange, 25, positioning
Block, 26, movable clamping device, 27, inner groovy, 28, venthole, 29, through slot, 210, cavity, 211, adapter flange, 212, clamp
Bolt, 213, stiffener plate, 214, L shaped plate, 215, movable plate, 216, mobile bolt, 201, air inlet clamping plate flange, 202, outlet
Clamping plate flange, 203, air inlet adapter flange, 204, outlet adapter flange, 205, substrate, 206, left locating piece, 207, right positioning
Block, 208, upper and lower limiting device, 3, vacuum evacuation device, 31, vacuum molecular pump, 32, vacuum dry pump, 4, gas access equipment,
41, air compressor machine, 42, drier, 43, filter, 44, pressure reducing valve, 45, gas flowmeter, 5, corpuscular counter, 6, valve I,
61, valve II, 62, valve III, 63, valve IV, 7, high pressure diffuser, 8, valve actuator to be measured.
Specific embodiment
The present invention will be further described with reference to the examples below, and described embodiment is only present invention a part
Embodiment is not whole embodiment.Based on the embodiments of the present invention, those skilled in the art are not making
Other embodiments used obtained, belong to protection scope of the present invention under the premise of creative work.
Embodiment 1
Particle during a kind of detection valve working is present embodiments provided to fall off the system of quantity comprising vacuum plant, to
Side valve door 1, valve actuator to be measured 8, gas access equipment 4 and corpuscular counter 5, the vacuum plant include 2 He of cavity
Vacuum evacuation device 3, cavity 2 are connected with three root canal roads, wherein one is gas inlet pipe road, wherein one is export pipeline, most
Latter is vacuum-pumping pipeline, and vacuum-pumping pipeline connects vacuum evacuation device 3, and gas inlet pipe road connects gas access equipment 4, out
Mouth piping connection corpuscular counter 5, gas access equipment 4 is connected by bye-pass with corpuscular counter 5, valve driving dress to be measured
It sets 8 to be connected with valve 1 to be measured, valve actuator 8 to be measured drives valve 1 to be measured to open and close, and valve 1 to be measured is placed on chamber
In body 2, valve, respectively valve I are mounted on the gas inlet pipe road, export pipeline, vacuum-pumping pipeline and bye-pass
6, valve III 62, valve IV 63 and valve II 61.
The valve actuator to be measured 8 drives valve to be measured to carry out opening and closing movement, driving device in the cavity
Using cylinder, oil cylinder or other mechanical structures, as long as valve opening to be measured can be driven and closed.
The gas access equipment includes air compressor machine 41, drier 42, filter 43, pressure reducing valve 44 and gas flowmeter
45, air compressor machine 41 is connected with drier 42, and drier 42 is connected with filter 43, and filter 43 is connected with pressure reducing valve 44, decompression
Valve 44 is connected with gas flowmeter 45, and gas flowmeter 45 is connected with cavity 2.
The vacuum evacuation device 3 includes vacuum molecular pump 31 and vacuum dry pump 32, vacuum molecular pump 31 and vacuum dry pump 32
It is connected to vacuum-pumping tube road.
The cavity 2 includes bottom plate 22, strap flange 23, ambulatory splint flange 24, locating piece 25 and movable clamping
Device 26, strap flange 23, ambulatory splint flange 24, locating piece 25 and movable clamping device 26 are fixed on bottom plate 22,
Strap flange 23 and ambulatory splint flange 24 abut against the shell that valve to be measured is illustrated that in valve 1(Fig. 2 to be measured, are
It is easy that there is no draw internal structure chart) tow sides (face A, B in figure) realize consolidating for the front and back sides for treating side valve door 1
Calmly, locating piece 25 and movable clamping device 26 abut against the two sides of valve 1 to be measured, realize that the two sides for treating side valve door 1 are fixed, Gu
Inner groovy 27 and venthole 28, venthole 28 and 27 phase of inner groovy are provided on clamp plate flange 23 and ambulatory splint flange 24
Connection, the through slot 29 of valve 1 to be measured and the inner groovy 27 on strap flange 23 and ambulatory splint flange 24 form cavity
210。
Be mounted on adapter flange 211 on the strap flange 23, ambulatory splint flange 24, adapter flange 211 with
Strap flange 23 is connected with the venthole 28 of ambulatory splint flange 24.Adapter flange 211 is separately connected gas and is passed through dress
4, vacuum evacuation device 3 is set to be connected with corpuscular counter 5.
The side of the strap flange 23 and valve 1 to be measured, ambulatory splint flange 24 and valve 1 to be measured passes through clamp
Bolt 212 fastens.
The strap flange 23 and ambulatory splint flange 24 are L shaped plate, and strap flange 23 is fixed on bottom plate 22
On, ambulatory splint flange 24 is bolted on bottom plate 22, and bolt hole herein is strip-shaped hole.The strip-shaped hole of setting is main
Be in order to allow bolt can in strip-shaped hole it is movable, to adjust the position of ambulatory splint flange, guarantee ambulatory splint flange 24
With strap flange 23 by the shell clamping of valve 1 to be measured.
Stiffener plate 213 is provided on the strap flange 23 and ambulatory splint flange 24.
The locating piece 25 is L shaped plate, is bolted on bottom plate 22.
The movable clamping device 26 includes that L shaped plate 214, movable plate 215 and mobile bolt 216, L shaped plate 214 pass through solid
It is scheduled on bottom plate 22, movable plate 215 is connected on mobile bolt 216, and mobile bolt 216 passes through L shaped plate 214, with L shaped plate 214
It is spirally connected.
The joint of the strap flange 23 and valve 1 to be measured, the ambulatory splint flange 24 and valve 1 to be measured
Joint is all made of sealing ring sealing.
L shape boss is arranged in the bottom plate 22, and the strap flange is abutted against on L shape boss, provided for valve to be measured
The reference for installation of front and back sides, the locating piece abut against on L shape boss, provide side reference for installation for valve to be measured.
Cushion block 21 is also equipped on the bottom plate 22, cushion block 21 is located at 1 lower section of valve to be measured.
Embodiment 2
During detection valve working provided in this embodiment particle fall off quantity method be specially (for the ease of illustrate, knot
Fig. 1 is closed to be illustrated):
Step 1: connecting gas access equipment 4, vacuum evacuation device 3 and corpuscular counter 5, valve 1 to be measured on cavity 2 and be inserted into
In cavity 2,1 connecting valve driving device 8 of valve to be measured, valve actuator 8 drives valve 1 to be measured to open and close；In gas
Valve I 6 is installed, in the pipe that gas access equipment 4 is connected with corpuscular counter 5 on the connecting line of body access equipment 4 and cavity
Road installation valve II 61, the installation valve III 62 on the pipeline that corpuscular counter 5 is connected with cavity 2, in vacuum evacuation device 3 and
Valve IV 63 is installed on the connected pipeline of cavity；It is first shut off valve I 6, valve II 61, valve III 62, opens valve IV 63, control
Valve actuator 8 processed opens valve 1 to be measured, and starting vacuum dry pump 32 vacuumizes cavity 2, reaches vacuum molecular pump to pressure
After in 31 working range, vacuum dry pump 32 is closed, starts 31 vacuum of vacuum molecule pumping, the vacuum degree until reaching requirement is
Only (determined according to the vacuum degree of the actual working environment of valve to be measured), is then shut off valve IV 63.
Step 2: step 1 complete rear chamber 2 just reach valve 1(such as vacuum gate valve to be measured) needed for testing conditions, to
The beginning of side valve door 1 carries out switch movement in cavity 2.Valve 1 to be measured by driving device can realize valve 1 to be measured unlatching and
Closing motion.It can stop after vacuum gate valve moves to predetermined number of times, when stopping, valve is in the open state.
Step 3: the high efficiency particulate air filter carried using corpuscular counter 5 resets equipment to being zeroed out processing operation.It resets
After the completion of operation, valve II 61 is opened, is connected to gas flowmeter 45 with high pressure diffuser 7.Then gas is passed sequentially through into sky
Press 41, drier 42, filter 43, pressure reducing valve 44, gas flowmeter 45, valve II 61, high pressure diffuser 7 and particle counting
Device 5.Data measured by corpuscular counter 5 are grain diameter and corresponding number in gas after gas flowmeter 45,
Record the digital a of the display of corpuscular counter 5.
Step 4: after the completion of step 3, processing being zeroed out using same method to corpuscular counter 5 again, is then shut off
Valve II 61, opens valve I 6 and then valve III 62 again once leads to gas so that cavity 2 is connected to high pressure diffuser 7
Cross air compressor machine 41, drier 42, filter 43, pressure reducing valve 4, gas flowmeter 5, valve I 6, cavity 2, valve III 62, high companding
Dissipate device 7 and corpuscular counter 5.So that it is consistent with the gas flow being passed through in step 3 to be passed through gas flow, 5 institute of corpuscular counter
The data that corpuscular counter measures in data measured b and step 3, which are compared, can be obtained valve 1 to be measured in cavity and actually falls
Grain diameter and corresponding quantity c=a-b.
Embodiment 3
The present embodiment is substantially the same manner as Example 2, the difference is that first passing through gas access equipment 4 is passed through gas, gas into cavity 2
Body, which enters after cavity 2 to enter back into corpuscular counter 5, to be counted, and the digital a1 that corpuscular counter is shown is recorded, then by grain
After sub-count device is reset, the gas of same flow is passed by the corpuscular counter reset by gas access equipment and is fallen into a trap
Number, records the digital b1 that corpuscular counter is shown, calculates particle and falls off quantity c1=a1-b1.
Embodiment 4
The present embodiment is substantially the same manner as Example 1, unlike, the present embodiment further limits the structure of cavity,
The specific structure of cavity 2 are as follows: it include substrate 205, valve head positioning plate 206, valve tail positioning plate 207, movable pressing device 208,
Inlet flange pipe 201, outlet flanged pipe 202, air inlet adapter flange 203, outlet adapter flange 204 and valve to be measured 1, air inlet method
Blue pipe 201 and outlet flanged pipe 202 are separately mounted to 1 both ends of valve to be measured, and valve 1 to be measured is with inlet flange pipe 201 and out
It is tightly connected between gas flanged pipe 202, valve head positioning plate 206 and valve tail positioning plate 207 are mounted on substrate 205, valve 1 to be measured
It is stuck in valve head positioning plate 206 and valve tail positioning plate 207, passes through the effect of valve head positioning plate 206 and valve tail positioning plate 207, energy
It enough prevents valve 1 to be measured and sways forwards and backwards, the activity pressing device 208 is mounted on substrate 205, and valve 1 to be measured is stuck in work
In dynamic pressing device 208, it can prevent valve 1 to be measured from teetertottering by movable pressing device 208, the inlet flange pipe
201 and outlet flanged pipe 202 be adapter flange pipe, the big end of the inlet flange pipe 201 is connected on valve 1 to be measured, small end
It is connected with air inlet adapter flange 203, the big end of the outlet flanged pipe 202 is connected on valve 1 to be measured, and small end and outlet are transferred
Flange 204 is connected, the inlet flange pipe 201, outlet flanged pipe 202, air inlet adapter flange 203,204 and of outlet adapter flange
Valve 1 to be measured is hollow, and vacuum evacuation device 3 is connected with outlet adapter flange.
The valve head positioning plate 206 includes L shape limit plate 2061, and L shape limit plate is provided with protrusion, and valve 1 to be measured is arranged
Fluted, after valve 1 to be measured is assemblied in valve head positioning plate 206, protrusion is extend into groove, and L shape limit plate is mounted on substrate
On.
The valve tail positioning plate 207 includes that one flat plate and one piece of trough plate, trough plate vertically connect on plate, and plate exists
Be installed on substrate, the two sides of trough plate are equipped with fastening bolt, and valve to be measured is mounted in trough plate, by fastening bolt into
Row fastening positioning, prevents front and back from teetertottering.
The activity pressing device 208 includes limit plate, Limit screw and stop nut, and Limit screw one end is mounted on base
On plate, limit plate is socketed on Limit screw, and stop nut is socketed on Limit screw, and limit plate is located at below stop nut,
Valve to be measured is located at below limit plate.
Claims (10)
1. particle falls off the system of quantity during a kind of detection valve working, it is characterised in that: including vacuum plant, to side valve
Door, valve actuator to be measured, gas access equipment and corpuscular counter, the vacuum plant include cavity and vacuum means
It sets, cavity has been at least connected with three root canal roads, and one is gas inlet pipe road, and one is export pipeline, last root is to vacuumize
Pipeline, vacuum-pumping pipeline connect vacuum evacuation device, and gas inlet pipe road connects gas access equipment, and export pipeline connects particle meter
Number device, gas access equipment are connected by bye-pass with corpuscular counter, and valve actuator to be measured is connected with valve to be measured, to
Side valve door drive drives valve opening to be measured and closing, and valve to be measured is placed in the cavity, and the gas inlet pipe road goes out
Valve is mounted on mouth pipeline, vacuum-pumping pipeline and bye-pass.
2. particle falls off the system of quantity during a kind of detection valve working according to claim 1, it is characterised in that:
High pressure diffuser is also equipped on the export pipeline.
3. particle falls off the system of quantity during a kind of detection valve working according to claim 1, it is characterised in that:
The gas access equipment includes air compressor machine, drier, filter, pressure reducing valve and gas flowmeter, air compressor machine and drier phase
Even, drier is connected with filter, and filter is connected with pressure reducing valve, and pressure reducing valve is connected with gas flowmeter, gas flowmeter and
Cavity is connected.
4. particle falls off the system of quantity during a kind of detection valve working according to claim 1, it is characterised in that:
The cavity includes bottom plate, strap flange, ambulatory splint flange, locating piece and movable clamping device, strap flange
It is mounted on bottom plate with ambulatory splint flange, strap flange and ambulatory splint flange abut against positive and negative the two of valve to be measured
Face, locating piece and movable clamping device are mounted on bottom plate, and locating piece and movable clamping device abut against the two sides of valve to be measured
It is provided with inner groovy and venthole on face, strap flange and ambulatory splint flange, venthole is connected with inner groovy, to
The through slot of side valve door and the inner groovy on strap flange and ambulatory splint flange form cavity.
5. particle falls off the system of quantity during a kind of detection valve working according to claim 4, it is characterised in that:
The joint of the joint of the strap flange and valve to be measured, the ambulatory splint flange and valve to be measured is all made of close
Seal sealing.
6. particle falls off the system of quantity during a kind of detection valve working according to claim 4, it is characterised in that:
The bottom plate mills out L shape boss, and the strap flange abuts against on L shape boss, provides the peace of front and back sides for valve to be measured
Benchmark is filled, the locating piece abuts against on L shape boss, provides side reference for installation for valve to be measured.
7. particle falls off the system of quantity during a kind of detection valve working according to claim 4, it is characterised in that:
The side of the strap flange and valve to be measured, ambulatory splint flange and valve to be measured passes through clamp bolt tightening.
8. particle falls off the system of quantity during a kind of detection valve working according to claim 4, it is characterised in that:
The movable clamping device includes that L shaped plate, movable plate and mobile bolt, L shaped plate are fixed on bottom plate by positioning pin and bolt,
Movable plate is connected on mobile bolt, and mobile bolt passes through L shaped plate, is spirally connected with L shaped plate.
9. particle falls off the system of quantity during a kind of detection valve working according to claim 1, it is characterised in that:
The cavity includes substrate, valve head positioning plate, valve tail positioning plate, inlet flange pipe, outlet flanged pipe and valve to be measured, air inlet method
Orchid pipe and outlet flanged pipe are separately mounted to valve both ends to be measured, be tightly connected between valve and inlet flange pipe to be measured, to be measured
It is tightly connected between valve and outlet flanged pipe, valve head positioning plate and valve tail positioning plate are installed on substrate, and valve to be measured is stuck in
In valve head positioning plate and valve tail positioning plate.
10. particle falls off the system of quantity during a kind of detection valve working according to claim 1, feature exists
It is adapter flange pipe in: the inlet flange pipe and outlet flanged pipe, the big end of the inlet flange pipe is connected to valve to be measured
On, the big end of the outlet flanged pipe is connected on valve to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811513354.0A CN109406134B (en) | 2018-12-11 | 2018-12-11 | System for detecting particle falling quantity in valve working process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811513354.0A CN109406134B (en) | 2018-12-11 | 2018-12-11 | System for detecting particle falling quantity in valve working process |
Publications (2)
| Publication Number | Publication Date |
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| CN109406134A true CN109406134A (en) | 2019-03-01 |
| CN109406134B CN109406134B (en) | 2023-09-26 |
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ID=65458576
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811513354.0A Active CN109406134B (en) | 2018-12-11 | 2018-12-11 | System for detecting particle falling quantity in valve working process |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114184372A (en) * | 2021-12-07 | 2022-03-15 | 江苏佳晟动力系统有限公司 | Device for vacuum test of semiconductor vacuum valve |
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| CN107796570A (en) * | 2017-10-27 | 2018-03-13 | 沈阳建筑大学 | A kind of product part special-shaped surfaces air tightness detection system and application |
| CN207937126U (en) * | 2017-10-27 | 2018-10-02 | 辽沈工业集团有限公司 | A kind of product special-shaped surfaces air-leakage test portable equipment |
| CN209166818U (en) * | 2018-12-11 | 2019-07-26 | 九川真空科技成都有限公司 | Particle falls off the system of quantity during a kind of detection valve working |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH06129977A (en) * | 1992-10-14 | 1994-05-13 | Tokyo Electron Ltd | Dust particle measuring method from equipment and welded part of super-pure gas piping |
| CN101246095A (en) * | 2008-01-07 | 2008-08-20 | 电子科技大学 | Device and method for measuring air permeability of isolation material |
| CN103323185A (en) * | 2013-05-31 | 2013-09-25 | 中国科学院等离子体物理研究所 | Leakage detecting and testing platform of flange, disc and barrel type vacuum sealing elements and detecting method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114184372A (en) * | 2021-12-07 | 2022-03-15 | 江苏佳晟动力系统有限公司 | Device for vacuum test of semiconductor vacuum valve |
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| CN109406134B (en) | 2023-09-26 |
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