CN109406133B - Method for detecting falling quantity of particles in valve working process - Google Patents
Method for detecting falling quantity of particles in valve working process Download PDFInfo
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- CN109406133B CN109406133B CN201811511770.7A CN201811511770A CN109406133B CN 109406133 B CN109406133 B CN 109406133B CN 201811511770 A CN201811511770 A CN 201811511770A CN 109406133 B CN109406133 B CN 109406133B
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- 239000002245 particle Substances 0.000 title claims abstract description 115
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000007789 sealing Methods 0.000 claims description 6
- 238000007664 blowing Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 abstract description 8
- 238000003825 pressing Methods 0.000 description 12
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000011435 rock Substances 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N2015/1024—Counting particles by non-optical means
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Abstract
The invention discloses a method for detecting the falling number of particles in the working process of a valve. The calculation principle is that the fallen particles are blown into a particle counter by gas for counting, then the gas with the same flow rate is blown into the particle counter for counting, and the number of the fallen particles can be obtained by comparing the two. The invention can detect the particle shedding amount in the working process of the valve, so that a producer and a purchaser of the vacuum valve can accurately know the particle shedding amount data of the vacuum valve, and the problem that the quality of a semiconductor or a photovoltaic module is influenced because the particle shedding amount of the vacuum valve does not meet the requirement is solved.
Description
Technical Field
The invention relates to a detection method of a valve, in particular to a method for detecting the falling quantity of particles in the working process of the valve.
Background
Vacuum valves are required in the manufacture of semiconductors and photovoltaic modules. Because the requirements on the vacuum valve in the manufacturing process of the semiconductor and the photovoltaic module are very high, besides some conventional requirements (such as size, sealing, impact resistance and the like), certain requirements are also provided for the particle shedding amount of the vacuum valve in the working process, and if the particle shedding amount is large, the quality of the whole semiconductor and the photovoltaic module is affected. Therefore, the particle falling amount of the vacuum valve needs to be detected, and the prior art for detecting the particle falling amount of the vacuum valve does not exist at present. Because the prior art of relevant detection does not exist, the particle falling amount data of the vacuum valve produced by the vacuum valve manufacturer cannot be known, and the quality of the vacuum valve produced by the manufacturer cannot be guaranteed to the purchaser; for the purchasing buyer of the vacuum valve, the data of the vacuum valve on the particle shedding amount is not known, and the buyer does not know whether the vacuum valve is good or bad or not. If the buyer purchases an unsatisfactory vacuum valve, the quality of the semiconductor and the photovoltaic module can be affected when the vacuum valve is applied to the production of the semiconductor and the photovoltaic module. Therefore, it is very important to develop a method for detecting the particle shedding amount of the vacuum valve, so that both sides can accurately know the particle shedding amount data of the vacuum valve, and the problem that the quality of a semiconductor or a photovoltaic module is affected because the particle shedding amount of the vacuum valve does not meet the requirements is solved.
Disclosure of Invention
The invention aims to provide a method for detecting the falling amount of particles in the working process of a valve, which can detect the falling amount of the particles in the working process of the valve so that a producer and a purchaser of the valve can accurately know the falling amount data of the particles of the valve and solve the problem that the quality of a semiconductor or a photovoltaic module is influenced because the falling amount of the particles of the valve does not meet the requirement.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
a method for detecting the falling amount of particles in the working process of a valve is characterized in that: the method comprises the following steps:
step 3, connecting a gas inlet device and a particle counter which is cleared, wherein the gas inlet device is connected with the particle counter through a pipeline;
step 4, firstly introducing gas into the particle counter which is cleared to be counted through a gas introduction device, recording the number a displayed by the particle counter, then, after the particle counter is cleared to be cleared, introducing the gas with the same flow into the cavity through the gas introduction device, after the gas enters the cavity, entering the particle counter to be counted, recording the number b displayed by the particle counter, and calculating the falling number c = b-a of particles; or firstly introducing gas into the cavity through the gas introducing device, introducing the gas into the particle counter after the gas enters the cavity for counting, recording the number a1 displayed by the particle counter, then clearing the particle counter, introducing the gas with the same flow into the cleared particle counter through the gas introducing device for counting, recording the number b1 displayed by the particle counter, and calculating the falling number c1= a1-b1 of particles.
In the step 1, the vacuum degree of the cavity is determined according to the vacuum degree of the actual working environment of the valve to be tested.
In the step 1, in the process of vacuumizing, the requirement of vacuum degree is met by adopting a twice vacuumizing mode, the vacuum is vacuumized by using a vacuum dry pump for the first time, the vacuum dry pump and a vacuum molecular pump are jointly vacuumized for the second time, and the vacuum molecular pump can be started after the first vacuumizing is performed to reach the working pressure range of the vacuum molecular pump.
In step 1, the cavity comprises a bottom plate, a fixed clamp plate flange, a movable clamp plate flange, a positioning block and a movable clamping device, the fixed clamp plate flange and the movable clamp plate flange are arranged on the bottom plate and are abutted against the front side and the back side of the valve to be tested, the positioning block and the movable clamping device are arranged on the bottom plate, the positioning block and the movable clamping device are abutted against the two side faces of the valve to be tested, inner grooves and air holes are formed in the fixed clamp plate flange and the movable clamp plate flange respectively, the air holes are communicated with the inner grooves, and the through grooves of the valve to be tested and the inner grooves in the fixed clamp plate flange and the movable clamp plate flange.
The joint of the fixed splint flange and the valve to be tested and the joint of the movable splint flange and the valve to be tested are sealed by sealing rings.
The bottom plate is milled with L-shaped bosses, the fixed clamp plate flange abuts against the L-shaped bosses to provide mounting references of the front side and the back side for the valve to be tested, and the positioning block abuts against the L-shaped bosses to provide side mounting references for the valve to be tested.
And the bottom plate is also provided with a cushion block which is positioned below the valve to be tested. Through the effect of cushion, can adjust the upper and lower mounting height of valve, cooperate with the valve bottom simultaneously, play a limiting displacement to the valve.
Adapter flanges are arranged on the fixed clamping plate flange and the movable clamping plate flange, and are communicated with the vent holes of the fixed clamping plate flange and the movable clamping plate flange. Is connected with a gas inlet device, a vacuum pumping device and a particle counter through the function of the adapter flange.
The fixed clamping plate flange is fastened with the valve to be tested, and the movable clamping plate flange is fastened with the side face of the valve to be tested through the caliper bolt.
The fixed clamping plate flange and the movable clamping plate flange are L-shaped plates, the fixed clamping plate flange is fixed on the bottom plate through bolts, the movable clamping plate flange is installed on the bottom plate through bolts, bolt holes in the bottom plate are strip-shaped holes, the position of the movable clamping plate flange is adjusted through the position of an adjusting bolt in each strip-shaped hole, and therefore the movable clamping plate flange is close to a valve to be tested.
The positioning block is an L-shaped plate and is fixed on the bottom plate through a positioning pin and a bolt.
The movable clamping device comprises an L-shaped plate, a moving plate and a moving bolt, wherein the L-shaped plate is fixed on the bottom plate through a positioning pin and a bolt, the moving plate is connected to the moving bolt, and the moving bolt penetrates through the L-shaped plate and is in threaded connection with the L-shaped plate.
In step 1, the cavity may also be of the following structure:
the device comprises a base plate, a valve head positioning plate, a valve tail positioning plate, a movable pressing device, an air inlet flange pipe, an air outlet flange pipe, an air inlet adapter flange, an air outlet adapter flange and a valve to be measured, wherein the air inlet flange pipe and the air outlet flange pipe are respectively arranged at two ends of the valve to be measured, the valve to be measured is hermetically connected with the air inlet flange pipe and the air outlet flange pipe, the valve head positioning plate and the valve tail positioning plate are arranged on the base plate, the valve to be measured is clamped in the valve head positioning plate and the valve tail positioning plate, the left and right shaking and the front and back shaking of the valve to be measured can be prevented under the action of the valve head positioning plate and the valve tail positioning plate, the movable pressing device is arranged on the base plate, the valve to be measured is clamped in the movable pressing device, the valve to be measured can be prevented from shaking up and down through the movable pressing, the obtained test result is more accurate, the big end of the air inlet flange pipe is connected to the valve to be tested, the small end of the air inlet flange pipe is connected to the air inlet adapter flange, the big end of the air outlet flange pipe is connected to the valve to be tested, the small end of the air outlet flange pipe is connected to the air outlet adapter flange, the air inlet flange pipe, the air outlet flange pipe, the air inlet adapter flange, the air outlet adapter flange and the valve to be tested are hollow, and the vacuumizing device is communicated with the air outlet adapter flange or communicated with the air inlet adapter flange.
The valve head positioning plate comprises an L-shaped limiting plate, the L-shaped limiting plate is provided with a protrusion, the valve to be tested is provided with a groove, the protrusion extends into the groove after the valve to be tested is assembled in the valve head positioning plate, and the L-shaped limiting plate is installed on the substrate.
The valve tail positioning plate comprises a flat plate and a groove-shaped plate, the groove-shaped plate is perpendicularly connected with the flat plate, the flat plate is installed on the base plate, fastening bolts are installed on two sides of the groove-shaped plate, a valve to be tested is installed in the groove-shaped plate, fastening positioning is carried out through the fastening bolts, and the valve to be tested is prevented from shaking up and down in the front and back direction.
The movable pressing device comprises a limiting plate, a limiting screw and a limiting nut, one end of the limiting screw is installed on the base plate, the limiting plate is sleeved on the limiting screw, the limiting nut is sleeved on the limiting screw, the limiting plate is located below the limiting nut, and the valve to be tested is located below the limiting plate.
The vacuumizing device comprises a vacuum molecular pump and a vacuum dry pump, and the vacuum molecular pump and the vacuum dry pump are connected to the air outlet adapter flange or the air inlet adapter flange through pipelines.
In step 2, the specified times are determined according to the times of opening and closing of the valve to be tested in the actual working environment.
In the step 2, the valve to be tested is driven to open and close in the cavity through the driving device, the driving device adopts a cylinder, an oil cylinder or other mechanical structures, and the driving device only needs to drive the valve to be tested to open and close. The device can adopt the existing structure, and is not the inventive concept of the invention, so the description is omitted.
In the step 3, the gas introducing device comprises an air compressor, a dryer, a filter, a pressure reducing valve and a gas flowmeter, the air compressor is connected with the dryer, the dryer is connected with the filter, the filter is connected with the pressure reducing valve, the pressure reducing valve is connected with the gas flowmeter, and the gas flowmeter is connected with the cavity.
And 3, installing a valve on a pipeline connecting the gas flowmeter and the cavity, installing a valve on a branch pipe connecting the gas inlet device and the particle counter, installing a valve on a pipeline connecting the particle counter and the cavity, installing a valve on a pipeline connecting the vacuumizing device and the cavity, and realizing related actions of vacuumizing the vacuumizing device, blowing particles into the particle counter when gas enters the cavity and directly entering the particle counter by controlling the opening and closing of each valve.
In step 3, a high-pressure diffuser is also arranged on an inlet pipeline of the particle counter.
Compared with the prior art, the invention has the following beneficial effects:
1. the method comprises the steps of vacuumizing a cavity, simulating the working environment of the valve to be tested, opening and closing the valve, enabling the opening and closing times of the valve to reach the actual working times of the valve to be tested, enabling particles falling off in the working process of the valve to fall into the cavity, and counting the falling particles through a particle counter. The calculation principle is that the fallen particles are blown into a particle counter by gas for counting, then the gas with the same flow rate is blown into the particle counter for counting, and the number of the fallen particles can be obtained by comparing the two. The detection principle is simple, the operation is easy, and the falling amount of particles of the valve to be detected in the actual working process can be accurately measured. The method provided by the invention can measure the particle shedding amount of the valve in the actual working process, and can enable the production method of the valve and a buyer to know the particle shedding amount data of the valve in the actual working process, thereby enabling the producer to know the quality of the valve and the buyer to know the quality of the valve, and avoiding the buyer purchasing the valve which does not meet the requirements and influencing the quality of the manufactured product. Meanwhile, marketing data can be provided for the producer to sell the valve, and the producer is facilitated to sell the relevant valve.
2. In step 1 of the invention, the vacuum degree of the cavity is determined according to the vacuum degree of the actual working environment of the valve to be tested. In the process of vacuumizing, the requirement of vacuum degree is met by adopting a twice vacuumizing mode, the vacuum is vacuumized by using a vacuum dry pump for the first time, the vacuum dry pump and the vacuum molecular pump are jointly vacuumized for the second time, and the vacuum molecular pump can be started when the first time of vacuumizing is within the working pressure range of the vacuum molecular pump. The designated times are determined according to the times of opening and closing of the valve to be tested in the actual working environment. The control can ensure that the detection method can completely simulate the actual working condition of the valve to be detected, the generated data is more accurate, and the data can not have larger deviation with the data of the particle falling amount during the actual valve working. The two times of vacuum pumping are adopted to ensure the requirement of vacuum degree.
3. In step 3 of the invention, the gas introducing device comprises an air compressor, a compressed gas dryer, a compressed gas precision filter, a pressure reducing valve and a gas flowmeter, wherein the air compressor is connected with the compressed gas dryer, the compressed gas dryer is connected with the compressed gas precision filter, the compressed gas precision filter is connected with the pressure reducing valve, the pressure reducing valve is connected with the gas flowmeter, and the gas flowmeter is connected with the cavity. The specific structure of the gas compression device is to ensure that the flow of gas introduced into the cavity and the particle counter is consistent, and to filter the gas, so that the counting accuracy is prevented from being influenced by other particles, and the purpose of the gas compression device is to ensure the accuracy of detection data.
4. The cavity comprises a bottom plate, a fixed splint flange, a movable splint flange, a positioning block and a movable clamping device, wherein the fixed splint flange and the movable splint flange are arranged on the bottom plate and are tightly abutted against the front surface and the back surface of a valve to be tested, the positioning block and the movable clamping device are arranged on the bottom plate, the positioning block and the movable clamping device are tightly abutted against the two side surfaces of the valve to be tested, inner grooves and vent holes are respectively arranged on the fixed splint flange and the movable splint flange, the vent holes are communicated with the inner grooves, and a through groove of the valve to be tested and the inner grooves on the fixed splint flange and the movable splint flange form a cavity. The cavity can be fully guaranteed to be airtight through the design of this kind of structure, can form the vacuum, only have the cavity to form the vacuum moreover can, the evacuation requirement is lower, easily control, can accurately simulate out the vacuum environment of valve work moreover, the cavity of formation also is convenient for collect the particle.
5. The fixed splint flange and the valve to be tested are fastened together, and the movable splint flange and the side surface of the valve to be tested are fastened together through the caliper bolt. The calliper bolt can further guarantee solid fixed splint flange and the valve that awaits measuring, and the activity splint flange is connected inseparabler with the valve that awaits measuring, can not leak gas, guarantees airtight environment.
6. The fixed splint flange and the movable splint flange are L plates, the fixed splint flange is fixed on the bottom plate through the positioning pin, the movable splint flange is fixed on the bottom plate through the bolt, the bolt hole on the bottom plate is a strip-shaped hole, the fixed splint flange and the movable splint flange can be firmly fastened on the valve to be tested through the structural design, and the phenomenon of air leakage is avoided.
7. The movable clamping device comprises an L-shaped plate, a moving plate and a moving bolt, wherein the L-shaped plate is fixed on a bottom plate through a positioning pin, the moving plate is connected onto the moving bolt, the moving bolt penetrates through the L-shaped plate and is in threaded connection with the L-shaped plate, and the moving plate can be adjusted through adjusting the moving bolt so that a valve to be tested can be tightly clamped.
8. The cavity of the invention comprises a base plate, a valve head positioning plate, a valve tail positioning plate, a movable pressing device, an air inlet flange pipe, an air outlet flange pipe, an air inlet adapter flange, an air outlet adapter flange and a valve to be measured, wherein the air inlet flange pipe and the air outlet flange pipe are respectively arranged at two ends of the valve to be measured, the valve to be measured is hermetically connected with the air inlet flange pipe and the air outlet flange pipe, the valve head positioning plate and the valve tail positioning plate are arranged on the base plate, the valve to be measured is clamped in the valve head positioning plate, the valve to be measured is clamped in the valve tail positioning plate, the whole body formed by the valve to be measured and the valve to be measured can be prevented from shaking left and right and back and forth under the action of the valve head positioning plate and the valve tail positioning plate, the movable pressing device is arranged on the base plate, the valve to be measured is clamped in, the large end of the air inlet flange pipe is connected to a valve to be tested, the small end of the air inlet flange pipe is connected to the air inlet adapter flange, the large end of the air outlet flange pipe is connected to the valve to be tested, the small end of the air outlet flange pipe is connected to the air outlet adapter flange, the air inlet flange pipe, the air outlet flange pipe, the air inlet adapter flange, the air outlet adapter flange and the valve to be tested are hollow, and the vacuumizing device is communicated with the air outlet adapter flange or communicated with the air inlet adapter flange. The cavity can be fully guaranteed to be airtight through the design of this kind of structure, can form the vacuum, can accurately simulate out the vacuum environment of valve work, and the cavity that forms is also convenient for collect the particle. Because the flange pipe of admitting air and the flange pipe of giving vent to anger are the reducing flange, are favorable to the coming off particle to blow in the particle counter, and the technique is more accurate, fixes a position the cavity through valve head locating plate and valve tail locating plate, prevents that the valve that awaits measuring from opening and closing the action in-process, rocking and causing gas leakage, loses vacuum environment, and it is spacing from top to bottom to carry out through activity closing device to the cavity, also rocks about preventing the cavity and causes gas leakage.
9. The valve head positioning plate comprises an L-shaped limiting plate, wherein a L-shaped limiting plate is provided with a protrusion, a valve to be tested is provided with a groove, the protrusion extends into the groove after the valve to be tested is assembled in the valve head positioning plate, and a L-shaped limiting plate is arranged on a base plate.
10. The valve tail positioning plate comprises a flat plate and a groove-shaped plate, wherein the groove-shaped plate is vertically connected with the flat plate, the flat plate is arranged on a base plate, fastening bolts are arranged on two sides of the groove-shaped plate, a valve to be measured is arranged in the groove-shaped plate and is fastened and positioned through the fastening bolts, and the valve to be measured is prevented from shaking up and down front and back. Can fasten the valve that awaits measuring through control fastening bolt, avoid the valve that awaits measuring to rock at the in-process of opening and closing, cause gas leakage, can carry out around the valve that awaits measuring spacing, all-round spacing of mountain down and left and right directions.
11. The movable pressing device comprises a limiting plate, a limiting screw and a limiting nut, wherein one end of the limiting screw is installed on a base plate, the limiting plate is sleeved on the limiting screw, the limiting nut is sleeved on the limiting screw, the limiting plate is located below the limiting nut, and a valve to be tested is located below the limiting plate. The limiting plate is used for limiting the position of the valve to be tested up and down, and air leakage caused by shaking of the valve to be tested is avoided.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of the shape structure of the cavity and the valve to be tested in example 3;
FIG. 3 is a schematic diagram of the exploded structure of FIG. 2;
FIG. 4 is a schematic longitudinal sectional view of FIG. 2;
FIG. 5 is a schematic view of the movable clamping device;
FIG. 6 is a schematic diagram of a valve under test;
FIG. 7 is a schematic structural view of a movable clamp plate flange;
FIG. 8 is a schematic structural view of a chamber in example 4;
FIG. 9 is a top view of FIG. 8;
fig. 10 is an enlarged view of fig. 9 at a.
Reference numerals
1. The valve to be tested comprises a valve to be tested, 2, a cavity, 21, a cushion block, 22, a bottom plate, 23, a fixed clamping plate flange, 24, a movable clamping plate flange, 25, a positioning block, 26, a movable clamping device, 27, an inner groove, 28, a vent hole, 29, a through groove, 210, a cavity, 211, an adapter flange, 212, a caliper bolt, 213, a reinforcing rib plate, 214, L-shaped plates, 215, a moving plate, 216, a moving bolt, 201, an air inlet clamping plate flange, 202, an air outlet clamping plate flange, 203, an air inlet adapter flange, 204, an air outlet adapter flange, 205, a base plate, 206, a left positioning block, 207, a right positioning block, 208, an upper and lower limiting device, 3, a vacuumizing device, 31, a vacuum molecular pump, 32, a vacuum dry pump, 4, an air inlet device, 41, an air compressor, 42, a dryer, 43, a filter, 44, a pressure reducing valve, 45, a gas flowmeter, 5, a particle counter, 6, a valve I, 61, a valve II, 62, a valve III.
Detailed Description
The present invention will be further described with reference to the following examples, which are intended to illustrate only some, but not all, of the embodiments of the present invention. Based on the embodiments of the present invention, other embodiments used by those skilled in the art without any creative effort belong to the protection scope of the present invention.
Example 1
The method for detecting the number of particles falling off in the working process of the valve provided in this embodiment is specifically (for convenience of explanation, the method is described with reference to fig. 1):
step 1: the cavity 2 is connected with a gas introducing device 4, a vacuumizing device 3 and a particle counter 5, the valve 1 to be tested is inserted into the cavity 2, the valve 1 to be tested is connected with a valve driving device 8 to be tested, and the valve driving device 8 to be tested drives the valve 1 to be tested to be opened and closed; a valve I6 is arranged on a connecting pipeline of the gas introducing device 4 and the cavity, a valve II 61 is arranged on a pipeline connecting the gas introducing device 4 and the particle counter 5, a valve III 62 is arranged on a pipeline connecting the particle counter 5 and the cavity 2, and a valve IV 63 is arranged on a pipeline connecting the vacuumizing device 3 and the cavity; firstly, closing a valve I6, a valve II 61 and a valve III 62, opening a valve IV 63, controlling a valve driving device 8 to be tested to open a valve 1 to be tested, starting a vacuum dry pump 32 to vacuumize a cavity 2, after the pressure reaches the working range of a vacuum molecular pump 31, closing the vacuum dry pump 32, starting the vacuum molecular pump 31 to vacuumize until the required vacuum degree is reached (determined according to the vacuum degree of the actual working environment of the valve to be tested), and then closing the valve IV 63.
Step 2: after the step 1 is finished, the cavity 2 reaches the detection condition required by the valve 1 to be detected (such as a vacuum gate valve), and the valve 1 to be detected starts to perform opening and closing motion in the cavity 2. The valve 1 to be tested can realize the opening and closing actions of the valve 1 to be tested through a driving device. The vacuum gate valve can stop after moving for a specified number of times, and the valve is in an open state when the vacuum gate valve stops.
And step 3: the particle counter 5 is used for carrying out zero clearing processing operation by using the high-efficiency filter zero clearing equipment. After the zero clearing operation is completed, the valve ii 61 is opened to communicate the gas flow meter 45 with the high pressure diffuser 7. The gas is then passed through an air compressor 41, a dryer 42, a filter 43, a pressure reducing valve 44, a gas flow meter 45, a valve ii 61, a high-pressure diffuser 7, and a particle counter 5 in this order. The data measured by the particle counter 5, which is the particle size and corresponding number of particles in the gas after passing through the gas flow meter 45, is recorded as the number a indicated by the particle counter 5.
And 4, step 4: after the step 3 is completed, the particle counter 5 is cleared again by the same method, then the valve ii 61 is closed, the valve i 6 and the valve iii 62 are opened, so that the cavity 2 is communicated with the high-pressure diffuser 7, and then the gas passes through the air compressor 41, the dryer 42, the filter 43, the pressure reducing valve 4, the gas flowmeter 5, the valve i 6, the cavity 2, the valve iii 62, the high-pressure diffuser 7 and the particle counter 5 again. And (3) enabling the flow of the introduced gas to be consistent with the flow of the introduced gas in the step (3), and comparing the data b measured by the particle counter 5 with the data measured by the particle counter in the step (3) to obtain the actual particle diameter of the falling particles of the valve 1 to be detected in the cavity and the corresponding number c = b-a.
Example 2
The present embodiment is substantially the same as embodiment 1, except that gas is introduced into the cavity through the gas introduction device, the gas enters the cavity and then enters the particle counter 5 for counting, the number a1 displayed by the particle counter is recorded, then the particle counter 5 is cleared, the gas with the same flow rate is introduced into the particle counter 5 which has been cleared through the gas introduction device for counting, the number b1 displayed by the particle counter is recorded, and the number c1= a1-b1 of particle shedding is calculated.
Example 3
This example is substantially the same as example 1, except that: the structure of the cavity is further limited in this embodiment, and the specific structure of the cavity 2 is as follows: the cavity 2 comprises a bottom plate 22, a fixed clamping plate flange 23 and a movable clamping plate flange 24, the positioning block 25 and the movable clamping device 26, the fixed clamping plate flange 23, the movable clamping plate flange 24, the positioning block 25 and the movable clamping device 26 are fixed on the bottom plate 22, the fixed clamping plate flange 23 and the movable clamping plate flange 24 are abutted against the front side and the back side (A, B side in the figure) of the valve 1 to be tested (the shell of the valve to be tested is illustrated in figure 2, an internal structure diagram is not drawn for simplicity), the front side and the back side of the valve 1 to be tested are fixed, the positioning block 25 and the movable clamping device 26 are abutted against the two sides of the valve 1 to be tested, the two sides of the valve 1 to be tested are fixed, the fixed clamping plate flange 23 and the movable clamping plate flange 24 are both provided with inner grooves 27 and vent holes 28, the vent holes 28 are communicated with the inner grooves 27, and the through groove 29 of the valve 1 to be tested and the inner.
The fixed clamp plate flange 23 is fastened with the valve 1 to be tested, and the movable clamp plate flange 24 is fastened with the side surface of the valve 1 to be tested through the caliper bolt 212.
The fixed clamping plate flange 23 and the movable clamping plate flange 24 are L-shaped plates, the fixed clamping plate flange 23 is fixed on the bottom plate 22, the movable clamping plate flange 24 is fixed on the bottom plate 22 through bolts, bolt holes at the positions are strip-shaped holes, and the strip-shaped holes are mainly used for enabling the bolts to move in the strip-shaped holes so as to adjust the position of the movable clamping plate flange and ensure that the movable clamping plate flange 24 and the fixed clamping plate flange 23 clamp the shell of the valve 1 to be tested.
Reinforcing rib plates 213 are arranged on the fixed splint flange 23 and the movable splint flange 24.
The positioning block 25 is an L-shaped plate and is fixed on the bottom plate 22 through a bolt.
The movable clamping device 26 comprises an L-shaped plate 214, a moving plate 215 and a moving bolt 216, wherein the L-shaped plate 214 is fixed on the bottom plate 22, the moving plate 215 is connected on the moving bolt 216, and the moving bolt 216 passes through the L-shaped plate 214 and is in threaded connection with the L-shaped plate 214.
The joint of the fixed clamp plate flange 23 and the valve 1 to be tested and the joint of the movable clamp plate flange 24 and the valve 1 to be tested are sealed by sealing rings.
The bottom plate 22 is provided with L-shaped bosses, the fixed clamping plate flange abuts against the L-shaped bosses to provide mounting references of the front side and the back side for the valve to be tested, and the positioning blocks abut against the L-shaped bosses to provide side mounting references for the valve to be tested.
The bottom plate 22 is also provided with a cushion block 21, and the cushion block 21 is positioned below the valve 1 to be tested.
Example 4
The present embodiment is substantially the same as embodiment 1, except that the present embodiment further defines the structure of the cavity, and the specific structure of the cavity 2 is as follows: the device comprises a base plate 205, a valve head positioning plate 206, a valve tail positioning plate 207, a movable pressing device 208, an air inlet flange pipe 201, an air outlet flange pipe 202, an air inlet adapter flange 203, an air outlet adapter flange 204 and a valve 1 to be detected, wherein the air inlet flange pipe 201 and the air outlet flange pipe 202 are respectively arranged at two ends of the valve 1 to be detected, the valve 1 to be detected is hermetically connected with the air inlet flange pipe 201 and the air outlet flange pipe 202, the valve head positioning plate 206 and the valve tail positioning plate 207 are arranged on the base plate 205, the valve 1 to be detected is clamped in the valve head positioning plate 206 and the valve tail positioning plate 207, the valve 1 to be detected can be prevented from shaking back and forth under the action of the valve head positioning plate 206 and the valve tail positioning plate 207, the movable pressing device 208 is arranged on the base plate 205, the valve 1 to be detected is clamped in the movable pressing device 208, the valve 1 to be detected, the big end of air inlet flange pipe 201 is connected on the valve 1 that awaits measuring, and the tip links to each other with inlet adapter flange 203, the big end of the flange pipe 202 of giving vent to anger is connected on the valve 1 that awaits measuring, and the tip links to each other with outlet adapter flange 204, air inlet flange pipe 201, outlet flange pipe 202, inlet adapter flange 203, outlet adapter flange 204 and the valve 1 cavity that awaits measuring, evacuating device 3 links to each other with outlet adapter flange.
The valve head positioning plate 206 comprises L-shaped limiting plates 2061, L-shaped limiting plates are provided with protrusions, the valve to be tested 1 is provided with a groove, the protrusions extend into the groove after the valve to be tested 1 is assembled in the valve head positioning plate 206, and the L-shaped limiting plates are installed on the substrate.
Valve tail locating plate 207 includes a flat board and a trough plate, and on the trough plate vertical connection flat board, the flat board was installing on the base plate, and fastening bolt is installed to the both sides of trough plate, and the valve that awaits measuring is installed in the trough plate, carries out fastening position through fastening bolt, rocks from top to bottom around preventing.
The movable pressing device 208 comprises a limiting plate, a limiting screw and a limiting nut, one end of the limiting screw is installed on the base plate, the limiting plate is sleeved on the limiting screw, the limiting nut is sleeved on the limiting screw, the limiting plate is located below the limiting nut, and the valve to be tested is located below the limiting plate.
Claims (10)
1. A method for detecting the falling amount of particles in the working process of a valve is characterized in that: the method comprises the following steps:
step 1, placing a valve to be tested into a cavity, then opening the valve to be tested, and vacuumizing the cavity;
step 2, driving the valve to be tested to open and close in the cavity, stopping when the opening and closing times of the valve to be tested reach the specified times, and keeping the valve to be tested in an open state after stopping;
step 3, connecting a gas inlet device and a particle counter on the cavity, wherein the gas inlet device is connected with the particle counter through a pipeline;
step 4, firstly introducing gas into the particle counter which is cleared to be counted through a gas introduction device, recording the number a displayed by the particle counter, then, after the particle counter is cleared to be cleared, introducing the gas with the same flow into the cavity through the gas introduction device, after the gas enters the cavity, entering the particle counter to be counted, recording the number b displayed by the particle counter, and calculating the falling number c = b-a of particles; or firstly introducing gas into the cavity through the gas introducing device, introducing the gas into the particle counter after the gas enters the cavity for counting, recording the number a1 displayed by the particle counter, then clearing the particle counter, introducing the gas with the same flow into the cleared particle counter through the gas introducing device for counting, recording the number b1 displayed by the particle counter, and calculating the falling number c1= a1-b1 of particles.
2. The method of claim 1, wherein the step of detecting the amount of particles falling off during the operation of the valve comprises: in the step 1, the vacuum degree of the cavity is determined according to the vacuum degree of the actual working environment of the valve to be tested.
3. The method of claim 1, wherein the step of detecting the amount of particles falling off during the operation of the valve comprises: in step 2, the specified times are determined according to the times of opening and closing of the valve to be tested in the actual working environment.
4. The method of claim 1, wherein the step of detecting the amount of particles falling off during the operation of the valve comprises: in the step 3, the gas introducing device comprises an air compressor, a dryer, a filter, a pressure reducing valve and a gas flowmeter, the air compressor is connected with the dryer, the dryer is connected with the filter, the filter is connected with the pressure reducing valve, the pressure reducing valve is connected with the gas flowmeter, and the gas flowmeter is connected with the cavity.
5. The method of claim 1, wherein the step of detecting the amount of particles falling off during the operation of the valve comprises: and 3, installing a valve on a pipeline connecting the gas flowmeter and the cavity, installing a valve on a branch pipe connecting the gas inlet device and the particle counter, installing a valve on a pipeline connecting the particle counter and the cavity, installing a valve on a pipeline connecting the vacuumizing device and the cavity, and realizing related actions of vacuumizing the vacuumizing device, blowing particles into the particle counter when gas enters the cavity and directly entering the particle counter by controlling the opening and closing of each valve.
6. The method of claim 1, wherein the step of detecting the amount of particles falling off during the operation of the valve comprises: the cavity comprises a bottom plate, a fixed clamp plate flange, a movable clamp plate flange, a positioning block and a movable clamping device, the fixed clamp plate flange and the movable clamp plate flange are installed on the bottom plate, the fixed clamp plate flange and the movable clamp plate flange are close to the front side and the back side of the valve to be tested, the positioning block and the movable clamping device are installed on the bottom plate, the positioning block and the movable clamping device are close to the two side faces of the valve to be tested, inner grooves and air vents are formed in the fixed clamp plate flange and the movable clamp plate flange respectively, the air vents are communicated with the inner grooves, and the through grooves of the valve to be tested and the inner grooves in.
7. The method of claim 6, wherein the step of detecting the amount of particles falling off during the operation of the valve comprises: the joint of the fixed splint flange and the valve to be tested and the joint of the movable splint flange and the valve to be tested are sealed by sealing rings.
8. The method as claimed in claim 6, wherein the bottom plate has L-shaped bosses, the clamp plate flange abuts against L-shaped bosses to provide front and back mounting references for the valve to be tested, and the positioning block abuts against L-shaped bosses to provide side mounting references for the valve to be tested.
9. The method of claim 1, wherein the step of detecting the amount of particles falling off during the operation of the valve comprises: the cavity comprises a base plate, a valve head positioning plate, a valve tail positioning plate, an air inlet flange pipe, an air outlet flange pipe and a valve to be tested, the air inlet flange pipe and the air outlet flange pipe are respectively installed at two ends of the valve to be tested, the valve to be tested is connected with the air inlet flange pipe in a sealing mode, the valve to be tested is connected with the air outlet flange pipe in a sealing mode, the valve head positioning plate and the valve tail positioning plate are installed on the base plate, and the valve to be tested is clamped in the valve head positioning plate and.
10. The method of claim 9, wherein the step of detecting the amount of particles falling off during operation of the valve comprises: the air inlet flange pipe and the air outlet flange pipe are reducing flange pipes, the large end of the air inlet flange pipe is connected to the valve to be tested, and the large end of the air outlet flange pipe is connected to the valve to be tested.
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| CN112951676A (en) * | 2021-03-05 | 2021-06-11 | 国网山东省电力公司滨州供电公司 | Emergency opening and closing manipulator capable of remotely operating circuit breaker |
| CN114184372A (en) * | 2021-12-07 | 2022-03-15 | 江苏佳晟动力系统有限公司 | Device for vacuum test of semiconductor vacuum valve |
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| JPS62203041A (en) * | 1986-03-03 | 1987-09-07 | Nec Kyushu Ltd | Apparatus for preparing standard specimen |
| US5011281A (en) * | 1989-05-15 | 1991-04-30 | Research Equipment Corporation | Humidification and cloud chamber block for particle concentration detection |
| CN2687660Y (en) * | 2003-08-15 | 2005-03-23 | 天津大学精密仪器厂 | Particle counting device with automatic discharging function |
| CN203231899U (en) * | 2013-04-25 | 2013-10-09 | 康斐尔过滤设备(昆山)有限公司 | Filter field test bench applied to general ventilation |
| CN104749085B (en) * | 2013-12-31 | 2019-09-03 | 深圳迈瑞生物医疗电子股份有限公司 | Particle analyzer liquid fluid system and particle analyzer |
| CN104132863B (en) * | 2014-08-15 | 2017-10-31 | 武汉市天虹仪表有限责任公司 | A kind of particulate matter continuous monitoring device and method |
| CN204116065U (en) * | 2014-09-25 | 2015-01-21 | 中国石油天然气股份有限公司 | Filter core performance detection device |
| CN204479315U (en) * | 2015-03-30 | 2015-07-15 | 苏州苏信环境科技有限公司 | A kind of filter cleaner filtrate classification efficiency test board |
| CN107144509A (en) * | 2017-05-17 | 2017-09-08 | 深圳朝伟达科技有限公司 | A kind of filter core performance measurement method of natural gas filtering separation equipment |
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Effective date of registration: 20210803 Address after: 637200 Duofu Industrial Park, Xichong County, Nanchong City, Sichuan Province Patentee after: SICHUAN JIUTIAN VACUUM TECHNOLOGY Co.,Ltd. Patentee after: University of Electronic Science and Technology of China Address before: 610210 China (Sichuan) pilot Free Trade Zone, Chengdu, Sichuan No. 1, Shuangxing Avenue, Gongxing street, Southwest Airport Economic Development Zone, Shuangliu District, Chengdu Patentee before: JIUCHUAN VACUUM TECHNOLOGY CHENGDU Co.,Ltd. Patentee before: University of Electronic Science and Technology of China |
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Address after: 637200 Duofu Industrial Park, Xichong County, Nanchong City, Sichuan Province Patentee after: SICHUAN JIUTIAN VACUUM TECHNOLOGY CO.,LTD. Country or region after: China Patentee after: University of Electronic Science and Technology of China Address before: 637200 Duofu Industrial Park, Xichong County, Nanchong City, Sichuan Province Patentee before: SICHUAN JIUTIAN VACUUM TECHNOLOGY Co.,Ltd. Country or region before: China Patentee before: University of Electronic Science and Technology of China |