CN109402591B

CN109402591B - Rotatable and liftable substrate table

Info

Publication number: CN109402591B
Application number: CN201710707141.0A
Authority: CN
Inventors: 佘鹏程; 龚俊; 彭立波
Original assignee: CETC 48 Research Institute
Current assignee: CETC 48 Research Institute
Priority date: 2017-08-17
Filing date: 2017-08-17
Publication date: 2020-12-11
Anticipated expiration: 2037-08-17
Also published as: CN109402591A

Abstract

The invention discloses a rotatable and liftable substrate table which comprises a substrate disc, an ejector rod, a sealing assembly, a lifting driving mechanism and a rotating driving mechanism, wherein the substrate disc and the ejector rod are coaxially arranged, the sealing assembly is positioned on the periphery of the ejector rod, the upper end of the sealing assembly is connected with the substrate disc, the lower end of the sealing assembly is connected with the lower end of the ejector rod, the rotating driving mechanism is connected with the sealing assembly, a driving part for transmitting rotating power is arranged between the upper end of the ejector rod and the substrate disc, the driving part is in clearance fit with the substrate disc, the lifting driving mechanism is arranged below the ejector rod, and a telescopic section for matching with the ejector rod to lift is arranged on the sealing assembly. The invention has the advantages of high reliability, good sealing performance, capability of driving the substrate to rotate and lift, and the like.

Description

Rotatable and liftable substrate table

Technical Field

The invention relates to a process chamber of a magnetron sputtering system, in particular to a rotatable and liftable substrate table, which is particularly suitable for automatically loading and unloading substrates in the process chamber of a full-automatic magnetron sputtering system.

Background

With the increasing maturity of automation degree of domestic semiconductor process equipment, fully automatic process equipment is the first choice of most user units. In order to ensure the uniformity of temperature, atmosphere and the like on the substrate, the substrate table positioned in the process chamber of the magnetron sputtering system needs to rotate in the process. Meanwhile, in order to realize full-automatic loading and unloading of the substrate, the substrate table is matched with the conveying manipulator to realize the transfer of the substrate, namely the substrate table can take and place the substrate from the manipulator while having rotary motion. In addition, the process chamber typically has a vacuum level therein, as required by the process, and thus requires good sealing of the substrate table during movement.

Disclosure of Invention

The invention aims to overcome the defects of the prior art and provide a substrate table which has high reliability and good sealing performance and can drive a substrate to rotate and lift.

In order to solve the technical problems, the invention adopts the following technical scheme:

the utility model provides a rotatable substrate platform that can lift up, includes substrate dish, ejector pin, seal assembly, lift actuating mechanism and rotary driving mechanism, the substrate dish with the ejector pin is coaxial to be arranged, seal assembly is located the ejector pin periphery, and the upper end with the substrate dish is connected, the lower extreme with the ejector pin lower extreme is connected, rotary driving mechanism with seal assembly links to each other, the ejector pin upper end with be equipped with the driving medium that is used for transmitting rotary power between the substrate dish, the driving medium with substrate dish clearance fit, lift actuating mechanism locates the ejector pin below, the last flexible section that is used for cooperating the ejector pin lift that is equipped with of seal assembly.

As a further improvement of the above technical solution: the sealing assembly comprises a magnetic fluid sealing shaft and a corrugated pipe, the upper end of the magnetic fluid sealing shaft is connected with the substrate disc, the lower end of the magnetic fluid sealing shaft is connected with the upper end of the corrugated pipe, the lower end of the corrugated pipe is connected with the lower end of the ejector rod, the rotary driving mechanism is connected with the magnetic fluid sealing shaft, and the corrugated pipe forms the telescopic section.

As a further improvement of the above technical solution: connecting flanges are welded at the upper end and the lower end of the corrugated pipe respectively, a base is arranged at the lower end of the ejector rod, and sealing elements are arranged between the connecting flange above and the magnetic fluid sealing shaft and between the connecting flange below and the base.

As a further improvement of the above technical solution: an anti-torsion component for preventing the upper end and the lower end of the corrugated pipe from torsion is arranged between the upper connecting flange and the lower connecting flange.

As a further improvement of the above technical solution: the anti-torsion assembly comprises a pair of guide plates and at least two guide rods, the guide plates are fixedly connected with the two connecting flanges in a one-to-one correspondence mode, the lower ends of the guide rods are fixed on the guide plates below, and the upper ends of the guide rods are in a step shape and movably penetrate through the guide plates above.

As a further improvement of the above technical solution: the rotary driving mechanism comprises a driving motor, a driving belt wheel, a driven belt wheel and a transmission belt, an output shaft of the driving motor is connected with the driving belt wheel, the driven belt wheel is installed on the magnetic fluid sealing shaft, and the transmission belt is wound on the driving belt wheel and the driven belt wheel.

As a further improvement of the above technical solution: the lifting driving mechanism comprises a driving cylinder, and a piston rod of the driving cylinder extends to the inside of the lower end of the ejector rod and is matched with the lower end of the ejector rod through a bearing.

As a further improvement of the above technical solution: the driving medium is the tube-shape piece and sets firmly in the ejector pin upper end, the driving medium periphery evenly is equipped with a plurality of first archs that are used for transmitting rotary power, be equipped with on the substrate dish with first protruding complex recess, first bellied upper end is equipped with the extension arm, be equipped with the second arch of upwards on the extension arm.

Compared with the prior art, the invention has the advantages that: according to the substrate table capable of rotating and jacking disclosed by the invention, the sealing assembly is arranged on the periphery of the ejector rod, the upper end of the sealing assembly is connected with the substrate disc, and the lower end of the sealing assembly is connected with the lower end of the ejector rod, so that the equipment has good sealing performance, and the substrate disc positioned in the process chamber can be effectively isolated from the external environment; the rotary driving mechanism is connected with the sealing assembly, the upper end of the sealing assembly is connected with the substrate disc, a transmission part is arranged between the upper end of the ejector rod and the substrate disc to transmit rotary power, so that the rotary driving mechanism can drive the sealing assembly, the substrate disc and the ejector rod to synchronously rotate, and the rotary motion of the substrate is realized; the lifting driving mechanism is arranged below the ejector rod, the sealing assembly is provided with a telescopic section used for being matched with the ejector rod to lift, so that the sealing assembly has telescopic capacity, and the transmission part at the upper end of the ejector rod is in clearance fit with the substrate disc to enable the transmission part to move upwards relative to the substrate disc, so that the substrate on the substrate disc can be jacked.

Drawings

FIG. 1 is a perspective view of a rotatable and liftable substrate table of the present invention.

FIG. 2 is a schematic cross-sectional view of a rotatable and liftable substrate table of the present invention.

Fig. 3 is a schematic perspective view of the transmission member of the present invention.

The reference numerals in the figures denote: 1. a substrate tray; 11. a groove; 2. a top rod; 3. a seal assembly; 31. a telescopic section; 32. a magnetic fluid seal shaft; 33. a bellows; 34. a connecting flange; 35. a seal member; 4. a base; 5. a lifting drive mechanism; 51. a driving cylinder; 52. a piston rod; 6. a rotation driving mechanism; 61. a drive motor; 62. a driving pulley; 63. a driven pulley; 64. a transmission belt; 7. a transmission member; 71. a first protrusion; 72. an extension arm; 73. a second protrusion; 8. a torsion resistant assembly; 81. a guide plate; 82. a guide bar; 9. and a bearing.

Detailed Description

The invention is described in further detail below with reference to the figures and specific examples of the specification.

Fig. 1 to 3 show an embodiment of the present invention, the substrate table capable of rotating and jacking of the embodiment includes a substrate disc 1, a lift pin 2, a sealing assembly 3, a lifting driving mechanism 5, and a rotation driving mechanism 6, the substrate disc 1 and the lift pin 2 are coaxially arranged, the sealing assembly 3 is located at the periphery of the lift pin 2, the upper end of the sealing assembly 3 is connected with the substrate disc 1, the lower end of the sealing assembly is connected with the lower end of the lift pin 2, the rotation driving mechanism 6 is connected with the sealing assembly 3, a transmission member 7 for transmitting rotation power is arranged between the upper end of the lift pin 2 and the substrate disc 1, the transmission member 7 is in clearance fit with the substrate disc 1, the lifting driving mechanism 5 is arranged below the lift pin 2, and the sealing assembly 3 is provided with a telescopic section 31 for matching with the lift.

According to the rotatable and liftable substrate table, the sealing component 3 is arranged on the periphery of the ejector rod 2, the upper end of the sealing component 3 is connected with the substrate disc 1, and the lower end of the sealing component 3 is connected with the lower end of the ejector rod 2, so that the equipment has good sealing performance, and the substrate disc 1 in a process chamber (not shown in the figure) can be effectively isolated from the external environment; the rotary driving mechanism 6 is connected with the sealing component 3, the upper end of the sealing component 3 is connected with the substrate disc 1, the lower end of the sealing component 3 is connected with the lower end of the ejector rod 2 (specifically, a base 4 at the lower end of the ejector rod 2), a transmission part 7 is arranged between the upper end of the ejector rod 2 and the substrate disc 1 to transmit rotary power, so that the rotary driving mechanism 6 can drive the sealing component 3, the substrate disc 1 and the ejector rod 2 to synchronously rotate, namely, the rotary motion of the substrate is realized; 2 below of ejector pin sets up lift actuating mechanism 5, and the last flexible section 31 that sets up that is used for cooperating 2 lifts of ejector pin that sets up of seal assembly 3 makes seal assembly 3 possess flexible ability, and the driving medium 7 of 2 upper ends of ejector pin makes driving medium 7 can upwards move relatively substrate dish 1 with 1 clearance fit of substrate dish to can realize jacking the substrate on the substrate dish 1, get the substrate with supplying the manipulator.

As a further preferable technical solution, in this embodiment, the sealing assembly 3 includes a magnetic fluid sealing shaft 32 and a bellows 33, an upper end of the magnetic fluid sealing shaft 32 is connected to the substrate tray 1, a lower end of the magnetic fluid sealing shaft is connected to an upper end of the bellows 33, a lower end of the bellows 33 is connected to a lower end of the lift pin 2, the rotation driving mechanism 6 is connected to the magnetic fluid sealing shaft 32, and the bellows 33 forms the expansion section 31. The sealing assembly 3 mainly comprises a magnetic fluid sealing shaft 32 and a corrugated pipe 33, the magnetic fluid sealing shaft 32 has good sealing performance on one hand, and is conveniently connected with the rotary driving mechanism 6 on the other hand to realize the transmission of rotary power; the corrugated pipe 33 has good sealing performance and good expansion performance, is durable and reliable, and is easily in reliable mechanical connection with the magnetic fluid sealing shaft 32.

Furthermore, in this embodiment, the upper and lower ends of the bellows 33 are welded with the connecting flanges 34, the lower end of the rod 2 is provided with the base 4, and the sealing members 35 are respectively disposed between the upper connecting flange 34 and the magnetic fluid sealing shaft 32 and between the lower connecting flange 34 and the base 4. The structure can ensure the sealing performance of the upper end and the lower end of the corrugated pipe 33, has higher mechanical strength, and is beneficial to ensuring the synchronous rotation of the corrugated pipe 33 and other parts. Specifically, the sealing member 35 may be a sealing strip, a sealant, an O-ring, or the like.

Further, in this embodiment, an anti-twisting assembly 8 for preventing the upper and lower ends of the bellows 33 from twisting is further disposed between the upper and lower connecting flanges 34. Because the upper end and the lower end of the corrugated pipe 33 are respectively connected with the magnetic fluid sealing shaft 32 and the lower end of the ejector rod 2, the corrugated pipe 33 is driven by the two to rotate passively, the upper end and the lower end have twisting tendency in the rotating process, the anti-twisting component 8 is arranged to prevent the upper end and the lower end of the corrugated pipe 33 from twisting, the corrugated pipe 33 can be prevented from being damaged, the reliability is improved, the service life is prolonged, and the like

Furthermore, in the present embodiment, the anti-twisting assembly 8 includes a pair of guide plates 81 and at least two guide rods 82, the pair of guide plates 81 are fixedly connected to the two connecting flanges 34 in a one-to-one correspondence, the lower end of each guide rod 82 is fixed to the lower guide plate 81, the upper end of each guide rod 82 is stepped and movably penetrates through the upper guide plate 81, that is, the diameter of the upper end of each guide rod 82 is smaller than the inner diameter of the hole of the guide plate 81. The pair of guide plates 81 of the anti-twisting assembly 8 are fixedly connected to the connecting flanges 34 at the upper and lower ends of the corrugated tube 33, respectively, and the twisting tendency of the pair of guide plates 81 is effectively suppressed by the two guide rods 82, so that the upper and lower ends of the corrugated tube 33 can be prevented from being twisted. Meanwhile, the anti-torsion assembly 8 has a guiding function when the corrugated pipe 33 extends and retracts, so that the extending and retracting movement of the corrugated pipe 33 is more stable and smooth; in addition, the stepped structure at the upper end of the guide rod 82 also has a certain limiting function, so that the maximum contraction stroke of the corrugated pipe 33 is limited. Specifically, welding, fastening, and the like may be employed between the guide plate 81 and the connecting flange 34; the lower end of the guide rod 82 is preferably fixed to the lower guide plate 81 by interference fit.

In a more preferable embodiment, the rotation driving mechanism 6 includes a driving motor 61, a driving pulley 62, a driven pulley 63, and a transmission belt 64, an output shaft of the driving motor 61 is connected to the driving pulley 62, the driven pulley 63 is mounted on the magnetic fluid seal shaft 32, and the transmission belt 64 is wound around the driving pulley 62 and the driven pulley 63. The driving motor 61 is started to drive the driving belt wheel 62 to rotate, the driving belt wheel 62 drives the driven belt wheel 63 to rotate through the driving belt 64, and then the magnetic fluid sealing shaft 32, the corrugated pipe 33, the substrate disc 1 and the ejector rod 2 are integrally rotated.

As a further preferable technical solution, in the present embodiment, the lifting drive mechanism 5 includes a drive cylinder 51, and a piston rod 52 of the drive cylinder 51 extends to the inside of the lower end of the top rod 2 (specifically, the inside of the base 4) and is engaged with the bearing 9. This construction allows the drive cylinder 51 to remain stationary during the synchronous rotation of the carrier rod 2 and the lower base 4. When the substrate is required to be lifted, the piston rod 52 extends upwards to accurately lift the top rod 2 upwards. In other embodiments, the driving cylinder 51 may be fixed on the frame, and the piston rod 52 is disposed below the top bar 2 and does not enter the base 4, but is not favorable for ensuring the accuracy of the jacking.

As a further preferable technical solution, in this embodiment, the transmission member 7 is a cylindrical member and is fixedly disposed at the upper end of the top rod 2, a plurality of first protrusions 71 for transmitting the rotational power are uniformly disposed on the periphery of the transmission member 7, a groove 11 matched with the first protrusions 71 is disposed on the substrate tray 1, an extension arm 72 is disposed at the upper end of the first protrusions 71, and an upward second protrusion 73 is disposed on the extension arm 72. Specifically, the number of the first protrusions 71 is preferably three, the included angle between every two extension arms 72 is 120 degrees, and the substrate is stably jacked up by the three second protrusions 73, so that the substrate can be conveniently picked and placed by a manipulator.

Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.

Claims

1. The utility model provides a rotatable substrate platform that can lift up which characterized in that: including substrate dish (1), ejector pin (2), seal assembly (3), lift actuating mechanism (5) and rotary driving mechanism (6), substrate dish (1) with ejector pin (2) coaxial arrangement, seal assembly (3) are located ejector pin (2) periphery, and the upper end with substrate dish (1) is connected, the lower extreme with ejector pin (2) lower extreme is connected, rotary driving mechanism (6) with seal assembly (3) link to each other, ejector pin (2) upper end with be equipped with between substrate dish (1) driving medium (7) that are used for transmitting rotary power, driving medium (7) with substrate dish (1) clearance fit, lift actuating mechanism (5) are located ejector pin (2) below, be equipped with flexible section (31) that are used for cooperating ejector pin (2) to go up and down on seal assembly (3).

2. The rotatable and liftable substrate table of claim 1, wherein: the sealing assembly (3) comprises a magnetic fluid sealing shaft (32) and a corrugated pipe (33), the upper end of the magnetic fluid sealing shaft (32) is connected with the substrate disc (1), the lower end of the magnetic fluid sealing shaft is connected with the upper end of the corrugated pipe (33), the lower end of the corrugated pipe (33) is connected with the lower end of the ejector rod (2), the rotary driving mechanism (6) is connected with the magnetic fluid sealing shaft (32), and the corrugated pipe (33) forms the telescopic section (31).

3. The rotatable and liftable substrate table of claim 2, wherein: connecting flanges (34) are welded at the upper end and the lower end of the corrugated pipe (33), a base (4) is arranged at the lower end of the ejector rod (2), and sealing elements (35) are arranged between the connecting flanges (34) above and the connecting flanges (34) below and between the magnetic fluid sealing shafts (32) and the base (4).

4. The rotatable and liftable substrate table of claim 3, wherein: an anti-torsion component (8) for preventing the upper end and the lower end of the corrugated pipe (33) from torsion is also arranged between the upper connecting flange and the lower connecting flange (34).

5. The rotatable and liftable substrate table of claim 4, wherein: the anti-torsion assembly (8) comprises a pair of guide plates (81) and at least two guide rods (82), the pair of guide plates (81) is fixedly connected with the two connecting flanges (34) in a one-to-one correspondence mode, the lower ends of the guide rods (82) are fixed on the guide plates (81) below, and the upper ends of the guide rods (82) are in a step shape and movably penetrate through the guide plates (81) above.

6. The rotatable and jacking substrate table of any one of claims 2 to 5, wherein: the rotary driving mechanism (6) comprises a driving motor (61), a driving pulley (62), a driven pulley (63) and a transmission belt (64), an output shaft of the driving motor (61) is connected with the driving pulley (62), the driven pulley (63) is installed on the magnetic fluid sealing shaft (32), and the transmission belt (64) is wound on the driving pulley (62) and the driven pulley (63).

7. The rotatable and jacking substrate table of any one of claims 1 to 5, wherein: the lifting driving mechanism (5) comprises a driving air cylinder (51), and a piston rod (52) of the driving air cylinder (51) extends to the inner part of the lower end of the ejector rod (2) and is matched with the ejector rod through a bearing (9).

8. The rotatable and jacking substrate table of any one of claims 1 to 5, wherein: the driving medium (7) is the tube-shape spare and sets firmly in ejector pin (2) upper end, driving medium (7) periphery evenly is equipped with a plurality of first archs (71) that are used for transmitting rotary power, be equipped with on substrate dish (1) with first protruding (71) complex recess (11), the upper end of first protruding (71) is equipped with extension arm (72), be equipped with the second arch (73) that faces upward on extension arm (72).