CN109373763B - Furnace door structure for diffusion furnace - Google Patents
Furnace door structure for diffusion furnace Download PDFInfo
- Publication number
- CN109373763B CN109373763B CN201811426083.5A CN201811426083A CN109373763B CN 109373763 B CN109373763 B CN 109373763B CN 201811426083 A CN201811426083 A CN 201811426083A CN 109373763 B CN109373763 B CN 109373763B
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- Prior art keywords
- door
- furnace door
- furnace
- cylinder
- limiting
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Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 22
- 230000007246 mechanism Effects 0.000 claims abstract description 27
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 26
- 239000010453 quartz Substances 0.000 claims abstract description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000007789 sealing Methods 0.000 claims abstract description 18
- 230000000712 assembly Effects 0.000 claims abstract description 4
- 238000000429 assembly Methods 0.000 claims abstract description 4
- 238000003825 pressing Methods 0.000 claims description 6
- 210000004907 gland Anatomy 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000012545 processing Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000009434 installation Methods 0.000 description 8
- 230000006872 improvement Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention relates to the technical field of semiconductor processing equipment, in particular to a furnace door structure for a diffusion furnace, which comprises a furnace door body and a furnace door driving mechanism, wherein the furnace door body comprises a furnace door supporting plate, a furnace door supporting shaft, a limiting rotating shaft, a centripetal joint bearing, an aluminum door, a connecting plate and a quartz door, and the furnace door driving mechanism comprises a bottom plate, 2 sliding rod assemblies, a supporting plate, a rodless cylinder, a sliding rail assembly, a furnace door connecting rod, a first cylinder, a second cylinder, a first cylinder connecting block, a second cylinder connecting block, a first limiting block, 2 first limiting switches, a second limiting block and 2 second limiting switches; the door body of the furnace door has simple structure and good sealing performance; the occupied space of the furnace door driving mechanism is reduced, and the stroke control is accurate; when the diffusion furnace adopts the furnace door structure, the sealing performance of the furnace door body can meet the technological requirements, and the furnace door body is taken as an independent whole without being integrated with the boat conveying mechanism, so that the diffusion furnace is convenient to install and maintain, and the production efficiency is greatly improved.
Description
Technical Field
The invention relates to the technical field of semiconductor processing equipment, in particular to a furnace door structure for a diffusion furnace.
Background
The existing diffusion furnace in the market is generally integrated with a boat conveying mechanism, the boat conveying mechanism is complex in structure, the boat conveying mechanism needs to be disassembled when a quartz tube is installed or disassembled, and the quartz tube can only be installed or disassembled in a forward and forward mode, so that the production efficiency is low.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a furnace door structure of a diffusion furnace.
In order to achieve the technical purpose, the technical scheme of the invention is as follows:
a furnace door structure for a diffusion furnace, a furnace door body and a furnace door driving mechanism;
the furnace door body comprises a furnace door supporting plate, a furnace door supporting shaft, a limiting rotating shaft, a centripetal joint bearing, an aluminum door, a connecting plate and a quartz door, wherein the center of the furnace door supporting plate is connected with the furnace door supporting shaft, the periphery of the furnace door supporting plate is fixed with one side of the aluminum door through bolts, the centripetal joint bearing is arranged at the center of one side of the aluminum door, the other side of the aluminum door is connected with one side of the connecting plate through spring bolts, one end of the limiting rotating shaft is arranged in the centripetal joint bearing, the other end of the limiting rotating shaft penetrates through a bearing gland and is connected with the center of the furnace door supporting shaft, one side of the aluminum door facing the quartz door is provided with 1 annular groove, the cross section area of the annular groove is gradually reduced from the aluminum door to the quartz door, the annular groove is annularly distributed on the aluminum door and is positioned at the outer side of the circumference of the quartz door, and an O-shaped sealing ring is arranged in the annular groove;
the furnace door driving mechanism comprises a bottom plate, 2 slide bar assemblies, a supporting plate, a rodless cylinder, a slide rail assembly, a furnace door connecting rod, a first cylinder, a second cylinder, a first cylinder connecting block, a second cylinder connecting block, a first limiting block, 2 first limiting switches, a second limiting block and 2 second limiting switches, wherein each slide bar assembly comprises matched slide bars and slide blocks, two ends of each slide bar are respectively fixed on the bottom plate through slide bar supporting seats, the top surfaces of the 2 slide blocks are connected with the bottom surfaces of the supporting plates, two ends of the rodless cylinder are fixed on the top surfaces of the supporting plates through the cylinder supporting seats, the slide rail assembly comprises matched slide rails and slide grooves, the slide grooves are fixed on the top surfaces of the supporting plates, the slide rails are embedded in the slide grooves and are connected with the furnace door connecting rod, the top surface of one end of each furnace door connecting rod is connected with the bottom surface of a movable part of the rodless cylinder, the other end is connected with the center of the furnace door supporting shaft, the first air cylinder and the second air cylinder are arranged side by side and are connected with the cylinder body of the furnace door supporting shaft, the extending directions of the piston rods of the first air cylinder and the second air cylinder are opposite, the piston rods of the first air cylinder and the second air cylinder are parallel to the sliding rod, the piston rods of the first air cylinder are connected with the side edge of the bottom plate through the first air cylinder connecting block, the piston rods of the second air cylinder are connected with the side edge of the supporting plate through the second air cylinder connecting block, the moving direction of the rodless air cylinder is vertical to the moving direction of the first air cylinder, the first limiting block is fixed on one side surface of the furnace door connecting rod and is positioned at one end connected with the rodless air cylinder, the 2 first limiting switches are arranged on the same side of the top surface of the supporting plate, the first limiting block is matched with the 2 first limiting switches and used for limiting the stroke of the rodless air cylinder, the second limiting block is fixed on the bottom surface of the supporting plate, the second limit switches are arranged on the same side of the top surface of the bottom plate, and the second limit blocks are matched with the second limit switches and used for limiting the strokes of the first air cylinder and the second air cylinder.
As an improvement, the periphery of the furnace door supporting shaft is sleeved with a supporting shaft pressing block, and the furnace door connecting rod is connected with the supporting shaft through the supporting shaft pressing block.
Preferably, the longitudinal section of the annular groove is trapezoidal.
As an improvement, the O-ring is a high temperature resistant ring.
Preferably, the furnace door supporting plate is triangular.
As an improvement, the furnace door driving mechanism also comprises a third limiting block and a mechanical limiting block, wherein the third limiting block is fixed on the other side surface of the furnace door connecting rod and is positioned at one end connected with the rodless cylinder, the mechanical limiting block is arranged on the top surface of the supporting plate and is positioned at one side far away from the furnace door connecting rod, the mechanical limiting block is matched with the third limiting block and is used for limiting the stroke of the rodless cylinder,
as an improvement, a fourth limiting block is further arranged on any sliding rod of the furnace door driving mechanism, the fourth limiting block is located at one end, close to a piston rod of the second cylinder, of the sliding rod, and the fourth limiting block is matched with a sliding block on the sliding rod and used for limiting the stroke of the second cylinder.
As an improvement, the rodless cylinder is provided with a speed regulating valve.
From the above description, it can be seen that the present invention has the following advantages:
1. the furnace door body has simple structure, can realize the furnace mouth sealing of the diffusion furnace, and has good sealing performance;
2. the furnace door driving mechanism occupies a small space, is convenient to apply in a limited installation space, and has accurate stroke control;
3. when the diffusion furnace adopts the furnace door structure, the sealing performance of the furnace door body can meet the process requirement, so that the quartz boat can be independently placed in the furnace body, and the furnace door body is taken as an independent whole without integrating with a boat conveying mechanism, thereby being convenient for installation and maintenance and greatly improving the production efficiency.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic diagram of the structure of the present invention;
FIG. 3 is a schematic view of the structure of the door body of the door of the present invention;
fig. 4 is a schematic structural view of the oven door driving mechanism of the present invention.
Detailed Description
One embodiment of the present invention will be described in detail with reference to fig. 1 to 4, but does not limit the claims of the present invention in any way.
As shown in fig. 1 to 4, a door structure for a diffusion furnace, a door body 1 and a door driving mechanism 2;
the furnace door body 1 comprises a furnace door supporting plate 101, a furnace door supporting shaft 102, a limiting rotating shaft 103, a radial joint bearing 104, an aluminum door 105, a connecting plate 106 and a quartz door 107, wherein the furnace door supporting shaft 102 is connected to the center of the furnace door supporting plate 101, the periphery of the furnace door supporting plate is fixed with one side of the aluminum door 105 through bolts, the radial joint bearing 104 is arranged at the center of one side of the aluminum door 105, the other side of the aluminum door is connected with one side of the connecting plate 106 through a spring bolt 110, the other side of the connecting plate 106 is connected with the quartz door 107, one end of the limiting rotating shaft 103 is arranged in the radial joint bearing 104, the other end of the limiting rotating shaft passes through a bearing gland 111 and then is connected with the center of the furnace door supporting shaft 102, 1 annular groove 108 is formed in one side of the aluminum door 105 facing the quartz door 107, the cross section of the annular groove 108 gradually reduces from the aluminum door to the quartz door (for example, the longitudinal section of the annular groove is trapezoid, the parallel sides of the trapezoid are perpendicular to the axial center line of the furnace door body, preferably isosceles trapezoid), the annular groove 108 is distributed on the aluminum door 105 and is positioned on the outer side of the periphery of the quartz door 107, and O-shaped sealing ring 109 is arranged in the annular groove 108; wherein: the O-shaped ring 109 is made of a high-temperature resistant material and is a high-temperature resistant sealing ring;
the furnace door driving mechanism 2 comprises a bottom plate 201, 2 slide bar assemblies 202, a supporting plate 203, a rodless cylinder 204, a slide rail assembly 205, a furnace door connecting rod 206, a first cylinder 207, a second cylinder 208, a first cylinder connecting block 209, a second cylinder connecting block 210, a first limiting block 211, 2 first limiting switches 212, a second limiting block 213 and 2 second limiting switches 214, wherein each slide bar assembly 202 comprises a slide bar 2021 and a slide block 2022,2 which are matched, the slide bars 2021 and the slide blocks 2022,2 are arranged in parallel, two ends of each slide bar 2021 are respectively fixed on the bottom plate 201 through a slide bar supporting seat 2023, the top surfaces of the 2 slide blocks 2022 are connected with the bottom surface of the supporting plate 203, two ends of the rodless cylinder 204 are fixed on the top surface of the supporting plate 203 through a cylinder supporting seat 2041, the slide rail assembly 205 comprises a slide rail 2051 and a slide groove 2052 which are matched, the slide groove 2052 is fixed on the top surface of the supporting plate 203, the slide rail 2051 is embedded in the slide groove 2052, the top surface is connected with the bottom surface of the furnace door connecting rod 206, the top surface of one end of the furnace door connecting rod 206 is connected with the bottom surface of the movable part of the rodless cylinder 204, the other end is connected with the center of the furnace door supporting shaft 102, the first cylinder 207 and the second cylinder 208 are arranged side by side and are connected with each other in a cylinder body, the extending directions of piston rods are opposite, the piston rods of the first cylinder 207 and the second cylinder 208 are parallel to the slide rod 2021, the piston rod of the first cylinder 207 is connected with the side of the bottom plate 201 through the first cylinder connecting block 209, the piston rod of the second cylinder 208 is connected with the side of the supporting plate 203 through the second cylinder connecting block 210, the moving direction of the rodless cylinder 204 is perpendicular to the moving direction of the first cylinder 207, the first limiting block 211 is fixed on one side surface of the furnace door connecting rod 206 and is positioned at one end connected with the rodless cylinder 204, the 2 first limiting switches 212 are arranged on the same side of the top surface of the supporting plate, the first limiting block 211 is matched with the two first limiting switches 212, the second limiting block 213 is fixed on the bottom surface of the supporting plate 203, the 2 second limiting switches 213 are arranged on the same side of the top surface of the bottom plate 201, and the second limiting block 213 is matched with the 2 second limiting switches 214; wherein: the rodless cylinder is provided with a speed regulating valve for controlling the air inlet flow rate of the rodless cylinder.
The working principle of the invention is as follows:
the furnace door connecting rod 206 is connected with the furnace door body 1, when the rodless cylinder 203 works, the furnace door body 1 is driven to move along the direction of the furnace door connecting rod 206, and when the first cylinder 207 and the second cylinder 208 work, the furnace door body 1 is driven to move along the direction of the sliding rod 2021.
In the working process, the following steps are adopted:
the first limiting block 211 is fixed on one side surface of the oven door connecting rod 206 and is located at one end connected with the rodless cylinder 204, the 2 first limiting switches 212 are respectively arranged on the same side of the top surface of the supporting plate 203 and are opposite in installation direction, and the second limiting block 211 is matched with the 2 first limiting switches 212 to limit the stroke of the rodless cylinder.
The second limiting block 213 is fixed on the bottom surface of the supporting plate 203, and the 2 second limiting switches 214 are arranged on the same side of the top surface of the bottom plate 201 and are opposite in installation direction, and the strokes of the first cylinder and the second cylinder are limited by matching the second limiting block 213 with the 2 second limiting switches 214.
In the invention, the following components are added: when the furnace door body is matched with the furnace mouth of the diffusion furnace, the furnace door body is in a double-layer structure (an aluminum door and a quartz door), the quartz door stretches into the furnace mouth, the aluminum door covers the furnace mouth, and the quartz door and the quartz pipe mouth are in flexible contact to form a first layer of seal; the O-shaped sealing ring arranged on the aluminum door is arranged in the groove with the isosceles trapezoid cross section, so that when the aluminum door is covered on the furnace mouth, the sealing effect is good, the overall sealing performance of the door body is good, and the heat of the furnace body is effectively prevented from being diffused; the furnace door driving mechanism adopts a double-cylinder design, and the first cylinder and the second cylinder are connected in series, so that the strokes of the two cylinders are overlapped, and compared with a large-stroke cylinder, the furnace door driving mechanism not only reduces the occupied space volume, but also performs sectional control on the strokes, and the stroke control is more accurate, so that the furnace door driving mechanism is convenient to apply in a limited installation space, and improves the furnace door stroke control precision; when the diffusion furnace adopts the furnace door structure, the sealing performance of the furnace door body can meet the process requirement, so that the quartz boat can be independently placed in the furnace body, and the furnace door body is taken as an independent whole without integrating with a boat conveying mechanism, thereby being convenient for installation and maintenance and greatly improving the production efficiency.
In order to further enhance the performance of the present invention, the following modifications were made to the above-described embodiments:
1. in order to ensure the connection strength and the connection stability of the furnace door supporting structure, the periphery of the furnace door supporting shaft is sleeved with a supporting shaft pressing block 112, the furnace door connecting rod is connected with the supporting shaft through the supporting shaft pressing block, and the furnace door supporting plate is preferably triangular;
2. in order to further ensure the stroke stability of the rodless cylinder and the second cylinder, the following improvement is made on the basis of the technical scheme: (1) The oven door driving mechanism further comprises a third limiting block 215 and a mechanical limiting block 216, wherein the third limiting block 215 is fixed on the other side face of the oven door connecting rod 206 and is positioned at one end connected with the rodless cylinder 204, the mechanical limiting block 216 is arranged on the top face of the supporting plate 203 and is positioned at one side far away from the oven door connecting rod 206, the mechanical limiting block 216 is matched with the third limiting block 215, any one slide rod 2021 used for limiting the stroke (2) of the rodless cylinder 204 is further provided with a fourth limiting block 217, the fourth limiting block 217 is positioned at one end, close to a piston rod of the second cylinder 208, of the slide rod 2021, and the fourth limiting block 217 is matched with the slide block 2022 on the slide rod 2021 and is used for limiting the stroke of the second cylinder 208.
In summary, the invention has the following advantages:
1. the furnace door body has simple structure, can realize the furnace mouth sealing of the diffusion furnace, and has good sealing performance;
2. the furnace door driving mechanism occupies a small space, is convenient to apply in a limited installation space, and has accurate stroke control;
3. when the diffusion furnace adopts the furnace door structure, the sealing performance of the furnace door body can meet the process requirement, so that the quartz boat can be independently placed in the furnace body, and the furnace door body is taken as an independent whole without integrating with a boat conveying mechanism, thereby being convenient for installation and maintenance and greatly improving the production efficiency.
It is to be understood that the foregoing detailed description of the invention is merely illustrative of the invention and is not limited to the embodiments of the invention. It will be understood by those of ordinary skill in the art that the present invention may be modified or substituted for elements thereof to achieve the same technical effects; as long as the use requirement is met, the invention is within the protection scope of the invention.
Claims (6)
1. A furnace door structure for a diffusion furnace, characterized in that: a door body and a door driving mechanism;
the furnace door body comprises a furnace door supporting plate, a furnace door supporting shaft, a limiting rotating shaft, a centripetal joint bearing, an aluminum door, a connecting plate and a quartz door, wherein the center of the furnace door supporting plate is connected with the furnace door supporting shaft, the periphery of the furnace door supporting plate is fixed with one side of the aluminum door through bolts, the centripetal joint bearing is arranged at the center of one side of the aluminum door, the other side of the aluminum door is connected with one side of the connecting plate through spring bolts, one end of the limiting rotating shaft is arranged in the centripetal joint bearing, the other end of the limiting rotating shaft penetrates through a bearing gland and is connected with the center of the furnace door supporting shaft, one side of the aluminum door facing the quartz door is provided with 1 annular groove, the cross section area of the annular groove is gradually reduced from the aluminum door to the quartz door, the annular groove is annularly distributed on the aluminum door and is positioned at the outer side of the circumference of the quartz door, and an O-shaped sealing ring is arranged in the annular groove;
the furnace door driving mechanism comprises a bottom plate, 2 slide bar assemblies, a supporting plate, a rodless cylinder, a slide rail assembly, a furnace door connecting rod, a first cylinder, a second cylinder, a first cylinder connecting block, a second cylinder connecting block, a first limiting block, 2 first limiting switches, a second limiting block and 2 second limiting switches, wherein each slide bar assembly comprises matched slide bars and slide blocks, two ends of each slide bar are respectively fixed on the bottom plate through slide bar supporting seats, the top surfaces of the 2 slide blocks are connected with the bottom surfaces of the supporting plates, two ends of the rodless cylinder are fixed on the top surfaces of the supporting plates through the cylinder supporting seats, the slide rail assembly comprises matched slide rails and slide grooves, the slide grooves are fixed on the top surfaces of the supporting plates, the slide rails are embedded in the slide grooves and are connected with the furnace door connecting rod, the top surface of one end of each furnace door connecting rod is connected with the bottom surface of a movable part of the rodless cylinder, the other end is connected with the center of the furnace door supporting shaft, the first air cylinder and the second air cylinder are arranged side by side and are connected with the cylinder body of the furnace door supporting shaft, the extending directions of the piston rods of the first air cylinder and the second air cylinder are opposite, the piston rods of the first air cylinder and the second air cylinder are parallel to the sliding rod, the piston rods of the first air cylinder are connected with the side edge of the bottom plate through the first air cylinder connecting block, the piston rods of the second air cylinder are connected with the side edge of the supporting plate through the second air cylinder connecting block, the moving direction of the rodless air cylinder is vertical to the moving direction of the first air cylinder, the first limiting block is fixed on one side surface of the furnace door connecting rod and is positioned at one end connected with the rodless air cylinder, the 2 first limiting switches are arranged on the same side of the top surface of the supporting plate, the first limiting block is matched with the 2 first limiting switches and used for limiting the stroke of the rodless air cylinder, the second limiting block is fixed on the bottom surface of the supporting plate, the 2 second limit switches are arranged on the same side of the top surface of the bottom plate, and the second limit blocks are matched with the 2 second limit switches and are used for limiting the strokes of the first air cylinder and the second air cylinder; the furnace door driving mechanism further comprises a third limiting block and a mechanical limiting block, wherein the third limiting block is fixed on the other side face of the furnace door connecting rod and is positioned at one end connected with the rodless cylinder, the mechanical limiting block is arranged on the top face of the supporting plate and is positioned at one side far away from the furnace door connecting rod, and the mechanical limiting block is matched with the third limiting block and is used for limiting the stroke of the rodless cylinder; and a fourth limiting block is further arranged on any sliding rod of the furnace door driving mechanism, the fourth limiting block is positioned at one end of the sliding rod close to the piston rod of the second cylinder, and the fourth limiting block is matched with a sliding block on the sliding rod and used for limiting the stroke of the second cylinder.
2. The door structure for a diffusion furnace according to claim 1, wherein: the periphery of the furnace door supporting shaft is sleeved with a supporting shaft pressing block, and the furnace door connecting rod is connected with the supporting shaft through the supporting shaft pressing block.
3. The door structure for a diffusion furnace according to claim 1, wherein: the longitudinal section of the annular groove is trapezoid.
4. The door structure for a diffusion furnace according to claim 1, wherein: the O-shaped sealing ring is a high-temperature-resistant sealing ring.
5. The door structure for a diffusion furnace according to claim 1, wherein: the furnace door supporting plate is triangular.
6. The door structure for a diffusion furnace according to claim 1, wherein: and the rodless cylinder is provided with a speed regulating valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811426083.5A CN109373763B (en) | 2018-11-27 | 2018-11-27 | Furnace door structure for diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811426083.5A CN109373763B (en) | 2018-11-27 | 2018-11-27 | Furnace door structure for diffusion furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109373763A CN109373763A (en) | 2019-02-22 |
| CN109373763B true CN109373763B (en) | 2023-12-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811426083.5A Active CN109373763B (en) | 2018-11-27 | 2018-11-27 | Furnace door structure for diffusion furnace |
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| CN (1) | CN109373763B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109877674A (en) * | 2019-03-20 | 2019-06-14 | 东莞云展智能装备有限公司 | Sander |
| CN111521020B (en) * | 2020-05-13 | 2023-03-21 | 北京北方华创微电子装备有限公司 | Low-pressure diffusion furnace |
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| CN201909539U (en) * | 2010-12-24 | 2011-07-27 | 株洲众欣科技发展有限责任公司 | Furnace door structure of diffusion furnace |
| CN102586885A (en) * | 2012-03-20 | 2012-07-18 | 常州亿晶光电科技有限公司 | Flexible sealing start and stop device for diffusion furnace |
| CN202582204U (en) * | 2012-04-20 | 2012-12-05 | 中国电子科技集团公司第四十八研究所 | Furnace door sealing device for diffusion furnace |
| CN205980796U (en) * | 2016-08-30 | 2017-02-22 | 浙江德西瑞光电科技有限公司 | Furnace door structure of diffusion furnace |
| CN207850076U (en) * | 2018-02-06 | 2018-09-11 | 无锡正隆星源电子科技有限公司 | A kind of diffusion furnace fire door |
| CN209263660U (en) * | 2018-11-27 | 2019-08-16 | 无锡正隆星源电子科技有限公司 | A kind of door structure for diffusion furnace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205980793U (en) * | 2016-08-12 | 2017-02-22 | 深圳市捷佳伟创新能源装备股份有限公司 | Low pressure diffusion furnace furnace gate sealing device |
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2018
- 2018-11-27 CN CN201811426083.5A patent/CN109373763B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201909539U (en) * | 2010-12-24 | 2011-07-27 | 株洲众欣科技发展有限责任公司 | Furnace door structure of diffusion furnace |
| CN102586885A (en) * | 2012-03-20 | 2012-07-18 | 常州亿晶光电科技有限公司 | Flexible sealing start and stop device for diffusion furnace |
| CN202582204U (en) * | 2012-04-20 | 2012-12-05 | 中国电子科技集团公司第四十八研究所 | Furnace door sealing device for diffusion furnace |
| CN205980796U (en) * | 2016-08-30 | 2017-02-22 | 浙江德西瑞光电科技有限公司 | Furnace door structure of diffusion furnace |
| CN207850076U (en) * | 2018-02-06 | 2018-09-11 | 无锡正隆星源电子科技有限公司 | A kind of diffusion furnace fire door |
| CN209263660U (en) * | 2018-11-27 | 2019-08-16 | 无锡正隆星源电子科技有限公司 | A kind of door structure for diffusion furnace |
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| Publication number | Publication date |
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| CN109373763A (en) | 2019-02-22 |
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