CN109373763A - A kind of door structure for diffusion furnace - Google Patents
A kind of door structure for diffusion furnace Download PDFInfo
- Publication number
- CN109373763A CN109373763A CN201811426083.5A CN201811426083A CN109373763A CN 109373763 A CN109373763 A CN 109373763A CN 201811426083 A CN201811426083 A CN 201811426083A CN 109373763 A CN109373763 A CN 109373763A
- Authority
- CN
- China
- Prior art keywords
- door
- cylinder
- fire door
- limited block
- support plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 23
- 239000004411 aluminium Substances 0.000 claims abstract description 23
- 238000007789 sealing Methods 0.000 claims abstract description 10
- 210000004907 gland Anatomy 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 3
- 238000012545 processing Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000009434 installation Methods 0.000 description 6
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000003708 ampul Substances 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Abstract
The present invention relates to semiconductor processing equipment technical fields, more particularly to a kind of door structure for diffusion furnace, including fire door door body and fire door driving mechanism, fire door door body includes fire door support plate, fire door support shaft, limit rotary shaft, plain radial bearing, aluminium door, connecting plate and quartzy door, fire door driving mechanism includes bottom plate, 2 slide bar components, support plate, rodless cylinder, slide track component, fire door connecting rod, first cylinder, second cylinder, first cylinder link block, second cylinder link block, first limited block, 2 the first limit switches, second limited block and 2 the second limit switches；This case fire door door body structure is simple, good seal performance；Fire door driving mechanism occupied space reduces, and stroke control is accurate；When diffusion furnace uses the door structure, the sealing performance of fire door door body can reach technique requirement, and oven door body, without becoming one with Song Zhou mechanism, is easily installed and safeguards, substantially increase production efficiency as an independent entirety.
Description
Technical field
The present invention relates to semiconductor processing equipment technical field more particularly to a kind of door structures for diffusion furnace.
Background technique
Existing diffusion furnace in the market, fire door are generally integrated with Song Zhou mechanism, send boat mechanism structure complicated, peace
When dress or disassembly quartz ampoule, need to remove Song Zhou mechanism, and the installation and removal mode of quartz ampoule can only use before advancing
Mode, cause production efficiency low.
Summary of the invention
For the problems of the prior art, the present invention provides a kind of door structure of diffusion furnace.
To realize the above technical purpose, the technical scheme is that
A kind of door structure for diffusion furnace, fire door door body and fire door driving mechanism；
The fire door door body includes fire door support plate, fire door support shaft, limit rotary shaft, plain radial bearing, aluminium door, connection
Plate and quartzy door, the center of the fire door support plate connect fire door support shaft, and surrounding is fixed by the one side of bolt and aluminium door, institute
The center for stating aluminium door one side is equipped with plain radial bearing, and another side is connected by the one side of spring bolt and connecting plate, described
The another side of connecting plate is connect with quartzy door, and one end of the limit rotary shaft is installed in plain radial bearing, and the other end passes through
It is connect after bearing gland with the center of fire door support shaft, offers 1 annular groove in the one side of the quartzy door of aluminium door direction,
The sectional area of the annular groove is gradually reduced from aluminium door to quartzy door direction, the annular groove annular spread on aluminium door simultaneously
Positioned at the outside of quartzy door circumference, O-ring seal is installed in annular groove；
The fire door driving mechanism includes bottom plate, 2 slide bar components, support plate, rodless cylinder, slide track component, fire door company
Extension bar, the first cylinder, the second cylinder, the first cylinder link block, the second cylinder link block, the first limited block, 2 the first limits are opened
Pass, the second limited block and 2 the second limit switches, each slide bar component include the slide bar and sliding block to match, and 2 slide bars are parallel
Be arranged and the both ends of each slide bar pass through slide bar support base respectively and are fixed on bottom plate, the top surface of 2 sliding blocks with support plate
Bottom surface connection, the both ends of the rodless cylinder are fixed on the top surface of support plate by cylinder supports seat, the slide track component packet
The sliding rail and sliding slot to match is included, the sliding slot is fixed in support plate top surface, in the sliding rail insertion sliding slot and top surface and furnace
Door connecting rod connection, the top surface of fire door connecting rod one end are connect with the bottom surface of rodless cylinder movable part, the other end and fire door
The center connection of support shaft, first cylinder and the second cylinder are arranged side by side and the two cylinder body connects, and piston rod stretches out direction
On the contrary, the piston rod of first cylinder and the second cylinder is parallel with slide bar, and the piston rod of the first cylinder passes through the first gas
Cylinder link block is connect with bottom plate side, and the piston rod of the second cylinder is connected by the side of the second cylinder link block and support plate,
The rodless cylinder moving direction is vertical with the first cylinder moving direction, and first limited block is fixed on the one of fire door connecting rod
On a side and it is located at the one end connecting with rodless cylinder, 2 first limit switches are set to the same of support plate top surface
Side, first limited block are matched with 2 the first limit switches, for limiting the stroke of rodless cylinder, second limit
Block is fixed on support plate bottom surface, and 2 second limit switches are set to plate top surface the same side, second limited block and 2
Second limit switch matches, for limiting the stroke of the first cylinder and the second cylinder.
As an improvement, fire door support shaft periphery is socketed with support shaft briquetting, the fire door connecting rod passes through support shaft
Briquetting and support axis connection.
Preferably, the longitudinal profile of the annular groove is trapezoidal.
As an improvement, the O-ring seal is high-temperature resistant seal ring.
Preferably, the fire door support plate is triangle.
As an improvement, the fire door driving mechanism further includes third limited block and mechanical position limitation block, the third limited block
It is fixed on another side of fire door connecting rod and is located at the one end connecting with rodless cylinder, the mechanical position limitation block is set to branch
Fagging top surface and the side for being located remotely from fire door connecting rod, the mechanical position limitation block is matched with third limited block, for limiting
The stroke of rodless cylinder,
As an improvement, the 4th limited block is additionally provided on any one slide bar of the fire door driving mechanism, the 4th limit
Position block is located at sliding block cooperation of the slide bar on one end of the second cylinder piston rod, the 4th limited block and the slide bar, is used for
Limit the stroke of the second cylinder.
As an improvement, the rodless cylinder is equipped with speed governing valve.
From the above, it can be seen that the present invention has following advantages:
1. fire door door body structure is simple, the fire door sealing of diffusion furnace, good seal performance can be realized；
2. fire door driving mechanism occupied space reduces, convenient for applying in limited installation space, and stroke control is accurate；
3. when diffusion furnace uses door structure of the present invention, since the sealing performance of fire door door body can reach work
Skill requirement, quartz boat is placed individually into furnace body, oven door body as an independent entirety without with send boat machine
Structure becomes one, and is easily installed and safeguards, substantially increases production efficiency.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is structural schematic diagram of the invention；
Fig. 3 is the structural schematic diagram of fire door door body of the present invention；
Fig. 4 is the structural schematic diagram of fire door driving mechanism of the present invention.
Specific embodiment
In conjunction with Fig. 1 to Fig. 4, the specific embodiment that the present invention will be described in detail, but claim of the invention is not done
Any restriction.
As shown in Figures 1 to 4, a kind of door structure for diffusion furnace, fire door door body 1 and fire door driving mechanism 2；
Fire door door body 1 include fire door support plate 101, fire door support shaft 102, limit rotary shaft 103, plain radial bearing 104,
Aluminium door 105, connecting plate 106 and quartzy door 107, the center of fire door support plate 101 are connected with fire door support shaft 102, and surrounding passes through
The one side of bolt and aluminium door 105 is fixed, and the center of 105 one side of aluminium door is equipped with plain radial bearing 104, and another side passes through spring
Bolt 110 is connect with the one side of connecting plate 106, and the another side of connecting plate 106 is connect with quartzy door 107, and the one of limit rotary shaft 103
End is installed in plain radial bearing 104, and the other end is connect after passing through bearing gland 111 with the center of fire door support shaft 102, aluminium
1 annular groove 108 is offered in the one side of the quartzy door 107 of 105 direction of door, the sectional area of annular groove 108 is from aluminium door to stone
The direction Ying Men be gradually reduced (such as: the longitudinal profile of annular groove be it is trapezoidal, in the axial direction of trapezoidal parallel edges and fire door door body
Heart line is vertical, preferably isosceles trapezoid), 108 annular spread of annular groove is on aluminium door 105 and positioned at 107 circumference of quartzy door
Outside is equipped with O-ring seal 109 in annular groove 108；Wherein: O-ring 109 is made of heat-resisting material, is high temperature resistant
Sealing ring；
Fire door driving mechanism 2 includes bottom plate 201,2 slide bar components 202, support plate 203, rodless cylinders 204, slide rail group
Part 205, fire door connecting rod 206, the first cylinder 207, the second cylinder 208, the first cylinder link block 209, the second cylinder link block
210,213,2 211,2 the first limit switches 212 of the first limited block, the second limited block the second limit switches 214, each cunning
Bar assembly 202 includes that 2022,2 slide bars 2021 of slide bar 2021 and sliding block for matching are arranged in parallel and each slide bar 2021
Both ends pass through slide bar support base 2023 respectively and are fixed on bottom plate 201, bottom of the top surface of 2 sliding blocks 2022 with support plate 203
The both ends of face connection, rodless cylinder 204 are fixed on the top surface of support plate 203 by cylinder supports seat 2041, slide track component 205
Including the sliding rail 2051 and sliding slot 2052 to match, sliding slot 2052 is fixed on 203 top surface mountain of support plate, and sliding rail 2051 is embedded in sliding slot
In 2052 and top surface is connect with the bottom surface of fire door connecting rod 206, and the top surface of 206 one end of fire door connecting rod and rodless cylinder 204 are living
The bottom surface connection in dynamic portion, the other end are connect with the center of fire door support shaft 102, and the first cylinder 207 and the second cylinder 208 are side by side
Setting and the two cylinder body connect, piston rod stretch out it is contrary, the piston rod of the first cylinder 207 and the second cylinder 208 with cunning
Bar 2021 is parallel, and the piston rod of the first cylinder 207 is connect by the first cylinder link block 209 with 201 side of bottom plate, the second gas
The piston rod of cylinder 208 is connect by the second cylinder link block 210 with the side of support plate 203,204 moving direction of rodless cylinder
Vertical with 207 moving direction of the first cylinder, the first limited block 211 is fixed on a side of fire door connecting rod 206 and is located at
The one end connecting with rodless cylinder 204,2 the first limit switches 212 are set to the same side of support plate top surface, the first limited block
211 match with two the first limit switches 212, and the second limited block 213 is fixed on 203 bottom surface of support plate, and 2 second limits are opened
It closes 213 and is set to 201 top surface the same side of bottom plate, second the second limit switch of limited block 213 and 2 214 matches；Wherein: without bar
Cylinder is equipped with speed governing valve, for controlling rodless cylinder induction air flow ratio.
The operation principle of the present invention is that:
Fire door connecting rod 206 is connect with fire door door body 1, when rodless cylinder 203 works, drives fire door door body 1 along fire door
206 direction of connecting rod is mobile, when the first cylinder 207 and the work of the second cylinder 208, drives fire door door body 1 along slide bar
2021 directions are mobile.
In the above-mentioned course of work:
First limited block 211 is fixed on a side of fire door connecting rod 206 and is located to be connect with rodless cylinder 204
One end, 2 the first limit switches 212 are respectively arranged on the same side of 203 top surface of support plate and installation direction on the contrary, by second
The first limit switch of limited block 211 and 2 212 matches, and limits the stroke of rodless cylinder.
Second limited block 213 is fixed on 203 bottom surface of support plate, and it is same that 2 the second limit switches 214 are set to 201 top surface of bottom plate
Side and installation direction on the contrary, matched by second the second limit switch of limited block 213 and 2 214, limit the first cylinder with
The stroke of second cylinder.
In the present invention: when fire door door body and diffusion furnace fire door cooperate, fire door door body structure is double-layer structure (aluminium door and stone
English door), quartzy door protrudes into fire door, and aluminium door is covered on fire door, and it is close to form first layer for quartzy door and quartzy nozzle flexible contact
Envelope；The O-ring seal being arranged on aluminium door is set in the groove that section is isosceles trapezoid, when aluminium door is covered on fire door, energy
Good sealing function is enough played, so that door body overall sealing performance is good, furnace body heat indiffusion is effectively ensured；Fire door driving machine
Structure uses double cylinder engines, the first cylinder and the series connection of the second cylinder, so that the stroke superposition of two cylinders, one big with using
Stroke cylinder is compared, and occupied space volume is reduced, but also carries out Discrete control to stroke, and stroke control is more smart
Standard so that the present invention is convenient for applying in limited installation space, and improves fire door stroke control precision；When diffusion furnace is adopted
When with door structure of the present invention, since the sealing performance of fire door door body can reach technique requirement, so that quartz boat can
To be placed individually into furnace body, oven door body, without becoming one with Song Zhou mechanism, is convenient for peace as an independent entirety
Dress and maintenance, substantially increase production efficiency.
In order to further increase performance of the invention, following improvement is done to above-described embodiment:
1. in order to guarantee the bonding strength and connective stability of fire door support construction, fire door support shaft periphery is socketed with support
Axis briquetting 112, fire door connecting rod pass through support shaft briquetting and support axis connection, the preferred triangle of fire door support plate；
2. being done on that basis of the above technical scheme in order to further ensure the stroke stability of rodless cylinder, the second cylinder
Following to improve: (1) fire door driving mechanism further includes third limited block 215 and mechanical position limitation block 216, and third limited block 215 is fixed
In on another side of fire door connecting rod 206 and positioned at the one end connecting with rodless cylinder 204, mechanical position limitation block 216 is set to
203 top surface of support plate and the side for being located remotely from fire door connecting rod 206, the mechanical position limitation block 216 and third limited block 215
It matches, is additionally provided with the 4th limited block 217 on any one slide bar 2021 of the stroke (2) of rodless cylinder 204 for limiting, the
Four limited blocks 217 are located at slide bar 2021 close to one end of 208 piston rod of the second cylinder, the 4th limited block 217 and the slide bar 2021
On sliding block 2022 cooperate, for limiting the stroke of the second cylinder 208.
In conclusion the invention has the following advantages that
1. fire door door body structure is simple, the fire door sealing of diffusion furnace, good seal performance can be realized；
2. fire door driving mechanism occupied space reduces, convenient for applying in limited installation space, and stroke control is accurate；
3. when diffusion furnace uses door structure of the present invention, since the sealing performance of fire door door body can reach work
Skill requirement, quartz boat is placed individually into furnace body, oven door body as an independent entirety without with send boat machine
Structure becomes one, and is easily installed and safeguards, substantially increases production efficiency.
It is understood that being merely to illustrate the present invention above with respect to specific descriptions of the invention and being not limited to this
Technical solution described in inventive embodiments.Those skilled in the art should understand that still can be carried out to the present invention
Modification or equivalent replacement, to reach identical technical effect；As long as meet use needs, all protection scope of the present invention it
It is interior.
Claims (8)
1. a kind of door structure for diffusion furnace, it is characterised in that: fire door door body and fire door driving mechanism；
The fire door door body include fire door support plate, fire door support shaft, limit rotary shaft, plain radial bearing, aluminium door, connecting plate and
The center of quartzy door, the fire door support plate connects fire door support shaft, and surrounding is fixed by the one side of bolt and aluminium door, the aluminium
The center of door one side is equipped with plain radial bearing, and another side is connected by the one side of spring bolt and connecting plate, the connection
The another side of plate is connect with quartzy door, and one end of the limit rotary shaft is installed in plain radial bearing, and the other end passes through bearing
It is connect after gland with the center of fire door support shaft, offers 1 annular groove in the one side of the quartzy door of aluminium door direction, it is described
The sectional area of annular groove is gradually reduced from aluminium door to quartzy door direction, and the annular groove annular spread is on aluminium door and being located at
The outside of quartzy door circumference is equipped with O-ring seal in annular groove；
The fire door driving mechanism include bottom plate, 2 slide bar components, support plate, rodless cylinder, slide track component, fire door connecting rod,
First cylinder, the second cylinder, the first cylinder link block, the second cylinder link block, the first limited block, 2 the first limit switches,
Two limited blocks and 2 the second limit switches, each slide bar component include the slide bar and sliding block to match, and 2 slide bars are arranged in parallel
And the both ends of each slide bar pass through slide bar support base respectively and are fixed on bottom plate, the top surface of 2 sliding blocks with the bottom surface of support plate
Connection, the both ends of the rodless cylinder are fixed on the top surface of support plate by cylinder supports seat, and the slide track component includes phase
Matched sliding rail and sliding slot, the sliding slot are fixed in support plate top surface, and in the sliding rail insertion sliding slot and top surface and fire door connect
Extension bar connection, the top surface of fire door connecting rod one end are connect with the bottom surface of rodless cylinder movable part, and the other end and fire door support
The center connection of axis, first cylinder and the second cylinder are arranged side by side and the two cylinder body connects, and piston rod stretching is contrary,
The piston rod of first cylinder and the second cylinder is parallel with slide bar, and the piston rod of the first cylinder is connected by the first cylinder
Block is connect with bottom plate side, and the piston rod of the second cylinder is connected by the side of the second cylinder link block and support plate, the nothing
Bar cylinder moving direction is vertical with the first cylinder moving direction, and first limited block is fixed on a side of fire door connecting rod
Upper and be located at one end connect with rodless cylinder, 2 first limit switches are set on the same side of support plate top surface, and described the
One limited block is matched with 2 the first limit switches, and for limiting the stroke of rodless cylinder, second limited block is fixed on branch
Fagging bottom surface, 2 second limit switches are set to plate top surface the same side, and second limited block is opened with 2 second limits
Pass matches, for limiting the stroke of the first cylinder and the second cylinder.
2. the door structure according to claim 1 for diffusion furnace, it is characterised in that: fire door support shaft periphery set
It is connected to support shaft briquetting, the fire door connecting rod passes through support shaft briquetting and support axis connection.
3. the door structure according to claim 1 for diffusion furnace, it is characterised in that: cut open the longitudinal direction of the annular groove
Face is trapezoidal.
4. the door structure according to claim 1 for diffusion furnace, it is characterised in that: the O-ring seal is resistance to height
Warm sealing ring.
5. the door structure according to claim 1 for diffusion furnace, it is characterised in that: the fire door support plate is triangle
Shape.
6. the door structure according to claim 1 for diffusion furnace, it is characterised in that: the fire door driving mechanism is also wrapped
Include third limited block and mechanical position limitation block, the third limited block be fixed on another side of fire door connecting rod and be located at
One end of rodless cylinder connection, the mechanical position limitation block are set to support plate top surface and are located remotely from the side of fire door connecting rod, institute
It states mechanical position limitation block to match with third limited block, for limiting the stroke of rodless cylinder.
7. the door structure according to claim 1 for diffusion furnace, it is characterised in that: the fire door driving mechanism is appointed
It anticipates and is additionally provided with the 4th limited block on a slide bar, the 4th limited block is located at slide bar close to one end of the second cylinder piston rod,
Sliding block on 4th limited block and the slide bar cooperates, for limiting the stroke of the second cylinder.
8. the door structure according to claim 1 for diffusion furnace, it is characterised in that: the rodless cylinder, which is equipped with, to be adjusted
Fast valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811426083.5A CN109373763B (en) | 2018-11-27 | 2018-11-27 | Furnace door structure for diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811426083.5A CN109373763B (en) | 2018-11-27 | 2018-11-27 | Furnace door structure for diffusion furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109373763A true CN109373763A (en) | 2019-02-22 |
| CN109373763B CN109373763B (en) | 2023-12-05 |
Family
ID=65383976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811426083.5A Active CN109373763B (en) | 2018-11-27 | 2018-11-27 | Furnace door structure for diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109373763B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109877674A (en) * | 2019-03-20 | 2019-06-14 | 东莞云展智能装备有限公司 | Sander |
| CN111521020A (en) * | 2020-05-13 | 2020-08-11 | 北京北方华创微电子装备有限公司 | Low-pressure diffusion furnace |
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| CN201909539U (en) * | 2010-12-24 | 2011-07-27 | 株洲众欣科技发展有限责任公司 | Furnace door structure of diffusion furnace |
| CN102586885A (en) * | 2012-03-20 | 2012-07-18 | 常州亿晶光电科技有限公司 | Flexible sealing start and stop device for diffusion furnace |
| CN202582204U (en) * | 2012-04-20 | 2012-12-05 | 中国电子科技集团公司第四十八研究所 | Furnace door sealing device for diffusion furnace |
| CN205980796U (en) * | 2016-08-30 | 2017-02-22 | 浙江德西瑞光电科技有限公司 | Furnace door structure of diffusion furnace |
| US20180128548A1 (en) * | 2016-08-12 | 2018-05-10 | S.C New Energy Technology Corporation | Furnace door sealing device for low-pressure diffusion furnace |
| CN207850076U (en) * | 2018-02-06 | 2018-09-11 | 无锡正隆星源电子科技有限公司 | A kind of diffusion furnace fire door |
| CN209263660U (en) * | 2018-11-27 | 2019-08-16 | 无锡正隆星源电子科技有限公司 | A kind of door structure for diffusion furnace |
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2018
- 2018-11-27 CN CN201811426083.5A patent/CN109373763B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201909539U (en) * | 2010-12-24 | 2011-07-27 | 株洲众欣科技发展有限责任公司 | Furnace door structure of diffusion furnace |
| CN102586885A (en) * | 2012-03-20 | 2012-07-18 | 常州亿晶光电科技有限公司 | Flexible sealing start and stop device for diffusion furnace |
| CN202582204U (en) * | 2012-04-20 | 2012-12-05 | 中国电子科技集团公司第四十八研究所 | Furnace door sealing device for diffusion furnace |
| US20180128548A1 (en) * | 2016-08-12 | 2018-05-10 | S.C New Energy Technology Corporation | Furnace door sealing device for low-pressure diffusion furnace |
| CN205980796U (en) * | 2016-08-30 | 2017-02-22 | 浙江德西瑞光电科技有限公司 | Furnace door structure of diffusion furnace |
| CN207850076U (en) * | 2018-02-06 | 2018-09-11 | 无锡正隆星源电子科技有限公司 | A kind of diffusion furnace fire door |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109877674A (en) * | 2019-03-20 | 2019-06-14 | 东莞云展智能装备有限公司 | Sander |
| CN111521020A (en) * | 2020-05-13 | 2020-08-11 | 北京北方华创微电子装备有限公司 | Low-pressure diffusion furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109373763B (en) | 2023-12-05 |
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