CN109347361B - Homodromous double-rotor linear ultrasonic motor based on piezoelectric ceramic torsional vibration mode - Google Patents
Homodromous double-rotor linear ultrasonic motor based on piezoelectric ceramic torsional vibration mode Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 94
- 229920001967 Metal rubber Polymers 0.000 claims abstract description 30
- 239000002184 metal Substances 0.000 claims description 37
- 230000005684 electric field Effects 0.000 claims description 23
- 230000010287 polarization Effects 0.000 claims description 12
- 238000005452 bending Methods 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 7
- 230000009977 dual effect Effects 0.000 claims 1
- 229920001971 elastomer Polymers 0.000 description 9
- 239000000806 elastomer Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 5
- 230000007935 neutral effect Effects 0.000 description 4
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0045—Driving devices, e.g. vibrators using longitudinal or radial modes combined with torsion or shear modes
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
Abstract
The invention provides a co-directional dual-rotor linear ultrasonic motor based on a piezoelectric ceramic torsional vibration mode, which consists of a stator and a rotor, wherein the rotor comprises an upper rotor and a lower rotor, the stator is arranged between the upper rotor and the lower rotor, the stator comprises a left end piezoelectric ceramic, a right end piezoelectric ceramic, a metal elastomer, an upper driving foot group and a lower driving foot group, the left end piezoelectric ceramic and the right end piezoelectric ceramic are respectively bonded at two ends of the metal elastomer, the upper driving foot group is arranged on the upper surface of the metal elastomer, the upper driving foot group is arranged between the metal elastomer and the upper rotor, and the lower driving foot group is arranged on the lower surface of the metal elastomer; compared with the current linear ultrasonic motor, the linear ultrasonic motor has the advantages of small volume and compact structure, the upper driving foot group and the lower driving foot group on the upper side and the lower side of the stator output at the same speed and the same direction, and the linear ultrasonic motor is suitable for linear driving of small precise devices.
Description
Technical Field
The invention relates to a homodromous double-rotor linear ultrasonic motor based on a piezoelectric ceramic torsional vibration mode.
Background
The standing wave type linear ultrasonic motor which is popular at present is mainly characterized in that a composite mode of a stator is excited based on a transverse vibration mode and a longitudinal vibration mode of piezoelectric ceramics, and the piezoelectric ceramics are mainly pasted on the top, the bottom and the front of a metal elastic body and are used for exciting two working modes simultaneously to be compounded to form a novel working mode of the stator, so that elliptical motion is formed, and a rotor is driven to move linearly. The stator structure of the compound mode linear ultrasonic motor must consider the excitation of a plurality of mode vibration modes at the same time, so the stator design process is relatively complex.
The single-mode linear ultrasonic motor only needs to consider the excitation of one mode, and the design process of the stator is relatively simple. For most of the single-mode linear ultrasonic motors, piezoelectric ceramics are generally adhered to the upper surface of an elastic body, and a first-order bending vibration mode of a metal elastic body of a stator is excited through a transverse vibration mode of the ceramics, so that a driving foot generates oblique and linear motion to push a rotor to move forwards. In this structure, there is a problem that it is impossible to provide the movers on the upper and lower sides of the metal elastic body of the stator, respectively, and further, it is impossible to achieve the same-direction and same-speed linear motion of the upper and lower movers.
The above problems should be considered and solved in the design process of the single mode standing wave type linear ultrasonic motor.
Disclosure of Invention
The invention aims to provide a homodromous double-rotor linear ultrasonic motor based on a piezoelectric ceramic torsional vibration mode, which solves the problems that rotors cannot be respectively arranged on the upper side and the lower side of a metal elastic body of a stator and the homodromous linear motion of the upper rotor and the lower rotor cannot be realized in the prior art.
The technical solution of the invention is as follows:
a syntropy double-rotor linear ultrasonic motor based on a piezoelectric ceramic torsional vibration mode comprises a stator and a rotor, wherein the rotor comprises an upper rotor and a lower rotor, the stator is arranged between the upper rotor and the lower rotor, the stator comprises a left end piezoelectric ceramic, a right end piezoelectric ceramic, a metal elastomer, an upper driving foot group and a lower driving foot group, the left end piezoelectric ceramic and the right end piezoelectric ceramic are respectively bonded at two ends of the metal elastomer, the upper driving foot group is arranged on the upper surface of the metal elastomer, the upper driving foot group is arranged between the metal elastic body and the upper rotor, the lower driving foot group is arranged on the lower surface of the metal elastic body, the lower driving foot group is arranged between the metal elastic body and the lower rotor, the upper driving foot group comprises an upper left driving foot and an upper right driving foot, the deviation directions of the left upper driving foot, which deviates from the left side standing wave node position of the stator, and the deviation directions of the right upper driving foot, which deviate from the right side standing wave node position of the stator, are the same, and the deviation distances are one eighth of the wavelength of fundamental waves; the lower driving foot group comprises a left lower driving foot and a right lower driving foot, the deviation direction of the left lower driving foot from the left standing wave node position of the stator is the same as the deviation direction of the right lower driving foot from the right standing wave node position of the stator, and the deviation distance is one eighth of the wavelength of fundamental waves; the deviation direction of the left upper driving foot from the position of the left standing wave node of the stator is the same as the deviation direction of the left lower driving foot from the position of the left standing wave node of the stator.
Furthermore, the upper left driving foot and the upper right driving foot are respectively arranged at two ends of the upper surface of the metal elastic body, and the upper right driving foot and the upper left driving foot are in contact with the upper rotor.
Further, the left lower driving foot and the right lower driving foot are respectively arranged at two ends of the lower surface of the metal elastic body, and the right lower driving foot and the left lower driving foot are in contact with the lower rotor.
Further, metal elastomer adopts Z type metal elastomer, and metal elastomer's both ends are equipped with the limit groove respectively, and left end piezoceramics, right-hand member piezoceramics bond the limit groove at metal elastomer both ends respectively, and metal elastomer includes elastomer middle part and bulge, and the both ends at elastomer middle part are equipped with the bulge respectively, and elastomer middle part and bulge present the Z type jointly.
Furthermore, the polarization direction of the piezoelectric ceramics at the left end is a positive Z-axis direction, an alternating electric field with the positive direction being a positive X-axis direction is applied, the polarization direction of the piezoelectric ceramics at the right end is a positive Z-axis direction, and an alternating electric field with the positive direction being a negative X-axis direction is applied; under the action of an electric field, due to the inverse piezoelectric effect, the piezoelectric ceramics polarized in the Z direction generate torsional vibration, a first-order bending vibration mode of the stator is excited through a protruding part at the end part of the metal elastic body of the Z-shaped stator, the upper rotor and the lower rotor are pushed to move at the same speed in the same direction, and the load is driven together.
Furthermore, power supplies with the same phase, frequency and amplitude are applied to the left end piezoelectric ceramic and the right end piezoelectric ceramic.
The invention has the beneficial effects that:
according to the homodromous double-rotor linear ultrasonic motor based on the piezoelectric ceramic torsional vibration mode, the metal elastic body of the stator is Z-shaped, and the piezoelectric ceramic is bonded at the concave part of the end part. Compared with the current popular linear ultrasonic motor, the motor has small volume and compact structure, the upper driving foot group and the lower driving foot group on the upper side and the lower side of the stator output at the same speed and the same direction, and the motor is suitable for linear driving of small precise devices.
According to the equidirectional double-rotor linear ultrasonic motor based on the piezoelectric ceramic torsional vibration mode, the excitation ceramic is located at the end part of the metal elastic body of the stator, the piezoelectric ceramic torsional vibration is converted into the vibration of the metal elastic body of the stator by utilizing the protruding part at the end part of the metal elastic body of the Z-shaped stator, and the motor is compact in structure.
In the invention, because the upper surface and the lower surface of the metal elastic body of the stator are both free of ceramics, the upper driving foot group and the lower driving foot group can be simultaneously and symmetrically arranged on the upper surface and the lower surface, and the upper driving foot group and the lower driving foot group can be used for driving, so that the linear motion of the upper rotor and the lower rotor in the same direction and at the same speed can be realized. If the upper rotor and the lower rotor are structurally connected together, double output can be realized.
Drawings
Fig. 1 is a schematic structural diagram of a homodromous double-mover linear ultrasonic motor based on a piezoelectric ceramic torsional mode according to an embodiment of the present invention.
Wherein: 1-elastomer middle, 2-right end piezoceramic, 3-left end piezoceramic, 4-upper right drive foot, 5-upper left drive foot, 6-lower right drive foot, 7-lower left drive foot, 8-lower rotor, 9-upper rotor, 12-right bulge, 13-left bulge.
FIG. 2 is an explanatory diagram of a left-end piezoelectric ceramic layout in the example.
Wherein: 1L, 2L, 3L, 4L, 5L and 6L-left end piezoelectric ceramics with six degrees of freedom, an XYZ-space Cartesian coordinate system.
FIG. 3 is a schematic diagram illustrating the arrangement of right-end piezoelectric ceramics in the embodiment.
Wherein: 1R, 2R, 3R, 4R, 5R and 6R-right end piezoelectric ceramics with six degrees of freedom, and an XYZ-space Cartesian coordinate system.
Fig. 4 is a mechanism diagram for generating vibration modes in an arch-up stage of the motor in the embodiment.
Wherein: p-polarization direction, E-electric field direction and V-rotor motion direction.
Fig. 5 is a mechanism diagram of generation of vibration modes at a sinking stage of the motor in the embodiment.
Wherein: p-polarization direction, E-electric field direction and V-rotor motion direction.
Fig. 6 is a diagram of the motion mechanism of the upper right drive foot, the lower right drive foot, the upper left drive foot and the lower left drive foot in the embodiment.
Wherein: 1-middle part of elastomer, 2-right end piezoelectric ceramic, 3-left end piezoelectric ceramic, 4-upper right driving foot, 5-upper left driving foot, 6-lower right driving foot, 7-lower left driving foot, 8-lower rotor, 9-upper rotor, 10-stator neutral line when amplitude is maximum, 11-stator neutral line when amplitude is zero, A-stator left side standing wave node position, B-stator right side standing wave node position, 12-right bulge and 13-left bulge.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Examples
A syntropy double-rotor linear ultrasonic motor based on a piezoelectric ceramic torsional vibration mode is shown in figure 1 and comprises a stator and a rotor, wherein the rotor comprises an upper rotor 9 and a lower rotor 8, the stator is arranged between the upper rotor 9 and the lower rotor 8, the stator comprises a left end piezoelectric ceramic 3, a right end piezoelectric ceramic 2, an elastomer middle part 1, an upper driving foot group and a lower driving foot group, the left end piezoelectric ceramic 3 and the right end piezoelectric ceramic 2 are respectively bonded at two ends of a metal elastomer, the upper driving foot group is arranged on the upper surface of the metal elastomer, the upper driving foot group is arranged between the metal elastomer and the upper rotor 9, the lower driving foot group is arranged on the lower surface of the metal elastomer, the lower driving foot group is arranged between the metal elastomer and the lower rotor 8, the upper driving foot group comprises an upper left driving foot 5 and an upper right driving foot 4, the position of the upper left side of the left driving foot 5 deviates from a stator standing wave node and the position of the upper right side of the right driving foot 4 deviates from, and the deviation distances are all one eighth of the wavelength of the fundamental wave; the lower driving foot group comprises a left lower driving foot 7 and a right lower driving foot 6, the deviation direction of the left lower driving foot 7 from the left side standing wave node position of the stator is the same as the deviation direction of the right lower driving foot 6 from the right side standing wave node position of the stator, and the deviation distance is one eighth of the wavelength of fundamental waves; the upper left drive foot 5 is offset from the stator left standing wave node position in the same direction as the lower left drive foot 7 is offset from the stator left standing wave node position.
According to the homodromous double-rotor linear ultrasonic motor based on the piezoelectric ceramic torsional vibration mode, the metal elastic body of the stator is Z-shaped, and the piezoelectric ceramic is bonded at the sunken part of the end part. Compared with the current popular linear ultrasonic motor, the motor has compact structure, the upper driving foot group and the lower driving foot group on the upper side and the lower side of the stator output at the same speed and the same direction, and is suitable for linear driving of small precise devices.
In the embodiment, the upper left driving foot 5 and the upper right driving foot 4 are respectively arranged at two ends of the upper surface of the metal elastic body, and the upper right driving foot 4 and the upper left driving foot 5 are in contact with the upper rotor 9. The left lower driving foot 7 and the right lower driving foot 6 are respectively arranged at two ends of the lower surface of the metal elastic body, and the right lower driving foot 6 and the left lower driving foot 7 are in contact with the lower rotor 8.
Because the upper surface and the lower surface of the metal elastomer of the stator are both free of ceramics, the upper driving foot group and the lower driving foot group can be simultaneously and symmetrically arranged on the upper surface and the lower surface, and the upper rotor 9 and the lower rotor 8 can linearly move in the same direction and at the same speed by utilizing the two groups of upper driving foot groups and lower driving foot groups for driving. If the upper mover 9 and the lower mover 8 are structurally coupled together, double output can be realized.
In the embodiment, metal elastomer 1 adopts Z type metal elastomer 1, and metal elastomer 1's both ends are equipped with the limit groove respectively, and left end piezoceramics 3, right-hand member piezoceramics 2 bond the limit groove at metal elastomer both ends respectively, and metal elastomer includes elastomer middle part 1, right bulge 12 and left bulge 13, and the both ends of elastomer middle part 1 are equipped with left bulge 13 and right bulge 12 respectively, and elastomer middle part 1, right bulge 12 and left bulge 13 present the Z type jointly.
According to the homodromous double-rotor linear ultrasonic motor based on the piezoelectric ceramic torsional vibration mode, the excitation ceramic is located at the end part of the metal elastic body of the stator, the torsional vibration of the piezoelectric ceramic is converted into the vibration of the stator by utilizing the right protruding part 12 and the left protruding part 13 of the Z-shaped stator, and the motor is compact in structure.
According to the homodromous double-rotor linear ultrasonic motor based on the piezoelectric ceramic torsional vibration mode, the polarization direction of the piezoelectric ceramic 3 at the left end is a Z-axis positive direction, an alternating electric field with the positive direction being an X-axis positive direction is applied, the polarization direction of the piezoelectric ceramic 2 at the right end is a Z-axis positive direction, and an alternating electric field with the positive direction being an X-axis negative direction is applied.
During operation, alternating voltages with the same phase, the same frequency and the same amplitude are applied to the left end piezoelectric ceramic 3 and the right end piezoelectric ceramic 2, torsional vibration is generated on the piezoelectric ceramic polarized in the Z direction under the action of an electric field due to the inverse piezoelectric effect, a first-order bending vibration mode of the stator is excited through the right bulge 12 and the left bulge 13 of the Z-shaped stator, then the driving foot is driven to perform oblique linear motion, the upper rotor 9 and the lower rotor 8 are pushed to move at the same direction and the same speed, and the load is driven together.
As shown in fig. 2, the left end piezoelectric ceramic 3 of the metal elastic body is located in a spatial cartesian coordinate system XYZ, the polarization direction of the piezoelectric ceramic is a 3L degree of freedom direction, an alternating electric field in a 1L degree of freedom direction is applied, under the action of the electric field, due to an inverse piezoelectric effect, the left end piezoelectric ceramic 3 of the metal elastic body generates torsional vibration, generates a deformation in a 5L degree of freedom direction, and then excites a first-order bending vibration mode in the stator through the left protrusion 13.
As shown in fig. 3, the right piezoelectric ceramic 2 of the metal elastic body is located in a cartesian space coordinate system XYZ, the polarization direction of the piezoelectric ceramic is a 3R degree of freedom direction, an alternating electric field in a 1R degree of freedom direction is applied, under the action of the electric field, due to the inverse piezoelectric effect, the right piezoelectric ceramic 2 of the metal elastic body generates torsional vibration, generates deformation in a deformation direction of 5R, and excites a first-order bending vibration mode in the stator through the right bulge 12.
The torsional vibration modes of the two pieces of ceramics of the left end piezoelectric ceramics 3 and the right end piezoelectric ceramics 2 jointly excite the stator to perform first-order bending vibration, and then the upper driving foot group and the lower driving foot group are driven to perform oblique linear motion to push the upper rotor 9 and the lower rotor 8 to move.
Referring to fig. 4, in the mechanism of generating the vibration wave pattern at the arching stage of the motor, the polarization direction P of the left-end piezoelectric ceramic 3 of the metal elastic body is the positive direction of the Z axis, and an alternating electric field E with the positive direction being the positive direction of the X axis is applied, that is, the direction of the electric field inside the left-end piezoelectric ceramic 3 is the direction of 1L degree of freedom; the polarization direction P of the right piezoelectric ceramic 2 of the metal elastic body 1 is a positive Z-axis direction, and an alternating electric field E with the positive direction being a negative X-axis direction is applied, namely the direction of the electric field in the right piezoelectric ceramic 2 is a reverse direction of the 1R degree of freedom direction. Under the action of an electric field, due to an inverse piezoelectric effect, the piezoelectric ceramics polarized in the Z direction at two end parts of the metal elastic body generate torsional vibration, and then a first-order bending vibration mode of the stator is excited through the left bulge part 13 and the right bulge part 12, the torsional vibration modes of the two pieces of ceramics of the left end piezoelectric ceramics 3 and the right end piezoelectric ceramics 2 jointly excite the stator to be arched upwards, and the upper rotor 8 and the lower rotor 8 move rightwards, namely in the V direction.
Referring to fig. 5, in the mechanism of generating the vibration wave pattern at the sinking stage of the motor, the polarization direction P of the left-end piezoelectric ceramic 3 of the metal elastic body is the positive Z-axis direction, and an alternating electric field E is applied in the positive X-axis direction, i.e. the direction of the electric field inside the left-end piezoelectric ceramic 3 is the opposite direction of the 1L degree of freedom direction; the polarization direction P of the right piezoelectric ceramic 2 of the metal elastic body is the positive direction of the Z axis, and an alternating electric field E with the positive direction being the positive direction of the X axis is applied, namely the direction of the electric field in the right piezoelectric ceramic 2 is the direction of 1R degree of freedom. Under the action of an electric field, due to the inverse piezoelectric effect, the piezoelectric ceramics polarized in the Z direction at two end parts of the metal elastic body generate torsional vibration, and then a first-order bending vibration mode of the stator is excited through the left convex part 13 and the right convex part 12, the torsional vibration modes of the two pieces of ceramics of the left end piezoelectric ceramics 3 and the right end piezoelectric ceramics 2 jointly excite the stator to be concave, and the upper rotor 8 and the lower rotor 8 move to the right, namely, the V direction.
The motor-driven foot motion mechanism is as follows in combination with the attached figure 6:
A. b are left and right intersections of the stator neutral line 11 when the stator amplitude is zero and the stator neutral line 10 when the stator amplitude is maximum, that is, positions of the standing wave nodes on the left side of the stator and positions of the standing wave nodes on the right side of the stator, respectively.
The left upper driving foot 5, the right upper driving foot 4, the left lower driving foot 7 and the right lower driving foot 6 are deviated from the left and right standing wave node positions A and B of the stator, and the deviation distances are one eighth of the wavelength of fundamental waves. Namely, the left upper driving foot 5 deviates from the left side standing wave node position A of the stator by one eighth of the fundamental wave wavelength, the left lower driving foot 7 deviates from the left side standing wave node position A of the stator by one eighth of the fundamental wave wavelength, and the left upper driving foot 5 and the left lower driving foot 7 are vertically symmetrical; the upper right driving foot 4 is deviated from the left side of the stator left standing wave node position B by one eighth of the fundamental wave wavelength, the lower right driving foot 6 is deviated from the left side of the stator left standing wave node position B by one eighth of the fundamental wave wavelength, and the upper right driving foot 4 and the lower right driving foot 6 are vertically symmetrical. The upper mover 9 is placed above the upper left drive foot 5 and the upper right drive foot 4, and the lower mover 8 is placed below the lower left drive foot 7 and the lower right drive foot 6.
Excitation voltage is applied to the left end piezoelectric ceramics 3 and the right end piezoelectric ceramics 2, if the middle part 1 of the Z-shaped elastic body is firstly arched upwards, the left lower driving foot 7 is pushed to the right lower side and is contacted with the lower rotor 8, the right upper driving foot 4 is pushed to the right upper side and is contacted with the upper rotor 9, the right lower driving foot 6 is pulled to the left upper side and is gradually separated from the lower rotor 8, the left upper driving foot 5 is pulled to the left lower side and is gradually separated from the upper rotor 9, the bottom friction force of the left lower driving foot 7 is greater than that of the bottom of the right lower driving foot 6, the top friction force of the right upper driving foot 4 is greater than that of the left upper driving foot 5, and the lower rotor 8 and the upper rotor 9 respectively move to the right under the action of the left lower driving foot 7 and the right upper driving foot 4.
Then, the two concave ends of the middle part 1 of the Z-shaped elastic body are tilted upwards, the lower right driving foot 6 is subjected to a thrust force towards the lower right and is contacted with the lower rotor 8, the upper left driving foot 5 is subjected to a thrust force towards the upper right and is contacted with the upper rotor 9, the lower left driving foot 7 is subjected to a tension force towards the upper left and is gradually separated from the lower rotor 8, the upper right driving foot 4 is subjected to a tension force towards the lower left and is gradually separated from the upper rotor 9, the bottom friction force of the lower right driving foot 6 is greater than that of the lower left driving foot 7, the top friction force of the upper left driving foot 5 is greater than that of the upper right driving foot 4, and the lower rotor 8 and the upper rotor 9 respectively move rightwards under the action of the lower left driving foot 7 and the upper right driving foot 4.
Claims (4)
1. The utility model provides a syntropy dual rotor linear ultrasonic motor based on piezoceramics torsional vibration mode comprises stator and active cell, its characterized in that: the mover comprises an upper mover and a lower mover, the stator is arranged between the upper mover and the lower mover, the stator comprises left end piezoelectric ceramics, right end piezoelectric ceramics, a metal elastomer, an upper driving foot group and a lower driving foot group, the left end piezoelectric ceramics and the right end piezoelectric ceramics are respectively bonded at two ends of the metal elastomer, the upper driving foot group is arranged on the upper surface of the metal elastomer, the upper driving foot group is arranged between the metal elastomer and the upper mover, the lower driving foot group is arranged on the lower surface of the metal elastomer, the lower driving foot group is arranged between the metal elastomer and the lower mover, the upper driving foot group comprises an upper left driving foot and an upper right driving foot, the deviation direction of the left side standing wave node position of the upper left driving foot and the deviation direction of the right side standing wave node position of the upper right driving foot from the stator are the same, and the deviation distance is one eighth of the wavelength of; the lower driving foot group comprises a left lower driving foot and a right lower driving foot, the deviation direction of the left lower driving foot from the left standing wave node position of the stator is the same as the deviation direction of the right lower driving foot from the right standing wave node position of the stator, and the deviation distance is one eighth of the wavelength of fundamental waves; the deviation direction of the left upper driving foot from the left standing wave node position of the stator is the same as the deviation direction of the left lower driving foot from the left standing wave node position of the stator; the metal elastic body is a Z-shaped metal elastic body, two ends of the metal elastic body are respectively provided with an edge groove, the left end piezoelectric ceramic and the right end piezoelectric ceramic are respectively bonded on the edge grooves at the two ends of the metal elastic body, the metal elastic body comprises an elastic body middle part and a convex part, two ends of the elastic body middle part are respectively provided with a convex part, and the elastic body middle part and the convex parts jointly present a Z shape; the left end piezoelectric ceramic polarization direction is a Z-axis positive direction, an alternating electric field with a positive direction being an X-axis positive direction is applied, the right end piezoelectric ceramic polarization direction is a Z-axis positive direction, and an alternating electric field with a positive direction being an X-axis negative direction is applied; under the action of an electric field, due to the inverse piezoelectric effect, the piezoelectric ceramics polarized in the Z direction generate torsional vibration, a first-order bending vibration mode of the stator is excited through a protruding part at the end part of the metal elastic body of the Z-shaped stator, and then the upper driving foot group and the lower driving foot group are driven to do oblique linear motion, so that the upper rotor and the lower rotor are pushed to move in the same direction and at the same speed, and the load is driven together.
2. The co-directional dual-mover linear ultrasonic motor based on a piezoelectric ceramic torsional vibration mode as claimed in claim 1, wherein: the upper left driving foot and the upper right driving foot are respectively arranged at two ends of the upper surface of the metal elastic body, and the upper right driving foot and the upper left driving foot are in contact with the upper rotor.
3. The co-directional dual-mover linear ultrasonic motor based on a piezoelectric ceramic torsional vibration mode as claimed in claim 1, wherein: the left lower driving foot and the right lower driving foot are respectively arranged at two ends of the lower surface of the metal elastic body, and the right lower driving foot and the left lower driving foot are in contact with the lower rotor.
4. The co-rotating dual-rotor linear ultrasonic motor based on a piezoelectric ceramic torsional vibration mode as claimed in any one of claims 1 to 3, wherein: and power supplies with the same phase, frequency and amplitude are applied to the left end piezoelectric ceramic and the right end piezoelectric ceramic.
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| US5672930A (en) * | 1993-12-21 | 1997-09-30 | Nikon Corporation | Vibration motor |
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| JPWO2014084184A1 (en) * | 2012-11-29 | 2017-01-05 | 株式会社ダイセル | Elastic body for actuator and piezoelectric actuator |
| CN104967355B (en) * | 2015-07-20 | 2017-03-01 | 哈尔滨工业大学 | Simulating crawling polypody linear piezoelectric actuator |
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