CN109600071B - Z-shaped structure single-mode standing wave type linear ultrasonic motor based on piezoelectric ceramic multi-vibration mode - Google Patents
Z-shaped structure single-mode standing wave type linear ultrasonic motor based on piezoelectric ceramic multi-vibration mode Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
Abstract
The invention provides a Z-shaped structure single-mode standing wave type linear ultrasonic motor based on piezoelectric ceramics multi-vibration modes, which comprises a stator and a rotor, wherein the stator comprises upper surface piezoelectric ceramics, left end piezoelectric ceramics, right end piezoelectric ceramics, a left driving foot, a right driving foot and a metal elastic body, the metal elastic body adopts a Z-shaped metal elastic body, the metal elastic body comprises an elastic body middle part and a convex part, the elastic body middle part and the convex part are integrally in a Z-shaped structure, the convex part and two ends of the elastic body middle part respectively form a left side groove and a right side groove, the left end piezoelectric ceramics are bonded in the left side groove, and the right end piezoelectric ceramics are bonded in the right side groove; compared with the traditional method of bonding the piezoelectric ceramics on the upper surface of the elastic body alone, the piezoelectric ceramics are bonded on the end part and the upper surface of the metal elastic body of the motor stator, so that the vibration amplitude of the stator can be increased, the volume is small, the structure is compact, and the motor output is larger.
Description
Technical Field
The invention relates to a Z-shaped structure single-mode standing wave type linear ultrasonic motor based on multiple vibration modes of piezoelectric ceramics.
Background
The standing wave type linear ultrasonic motor which is popular at present is mainly characterized in that a composite mode of a stator is excited based on a transverse vibration mode and a longitudinal vibration mode of piezoelectric ceramics, and the piezoelectric ceramics are mainly pasted on the top, the bottom and the front of a metal elastic body and are used for exciting two working modes simultaneously to be compounded to form a novel working mode of the stator, so that elliptical motion is formed, and a rotor is driven to move linearly. The stator structure of the compound mode linear ultrasonic motor must consider the excitation of a plurality of mode vibration modes at the same time, so the stator design process is relatively complex. The single-mode linear ultrasonic motor only needs to consider the excitation of one mode, and the design process of the stator is relatively simple.
At present, for most of single-mode standing wave type linear ultrasonic motors, piezoelectric ceramics are only adhered to the upper surface of an elastic body, and a transverse vibration mode of the piezoelectric ceramics is utilized to excite a first-order bending vibration mode of a metal elastic body of a stator, so that a driving foot generates oblique linear motion to push a rotor to move forwards. This configuration has a problem of low output.
The above-mentioned problems should be considered and solved in the design process of the standing wave type linear ultrasonic motor.
Disclosure of Invention
The invention aims to provide a Z-shaped structure single-mode standing wave type linear ultrasonic motor based on multiple vibration modes of piezoelectric ceramics.
The technical solution of the invention is as follows:
a Z-shaped structure single-mode standing wave type linear ultrasonic motor based on piezoelectric ceramics multi-vibration modes comprises a stator and a rotor, wherein the stator comprises upper surface piezoelectric ceramics, left end piezoelectric ceramics, right end piezoelectric ceramics, a left driving foot, a right driving foot and a metal elastic body, the metal elastic body is a Z-shaped metal elastic body, the metal elastic body comprises an elastic body middle part and a convex part, two ends of the elastic body middle part are respectively provided with an extended convex part, the convex part at one end is close to the upper surface of the metal elastic body, the convex part at the other end is close to the lower surface of the metal elastic body, the elastic body middle part and the convex part are integrally in a Z-shaped structure, the upper surface piezoelectric ceramics is arranged on the upper surface of the elastic body middle part, two ends of the lower surface of the elastic body middle part are respectively provided with the left driving foot and the right driving foot, and the left driving foot and the right driving foot, the bulge and the two ends of the middle part of the elastic body form a left groove and a right groove respectively, the left piezoelectric ceramic is bonded in the left groove, and the right piezoelectric ceramic is bonded in the right groove.
Furthermore, the left driving foot is deviated from the position of the standing wave node on the left side of the stator, the right driving foot is deviated from the position of the standing wave node on the right side of the stator, the deviation direction and the deviation distance are the same, the deviation distance is one eighth of the wavelength of fundamental waves, and the rotor is placed below the left driving foot and the right driving foot.
Furthermore, the polarization directions of the left end piezoelectric ceramic and the right end piezoelectric ceramic are Z-axis positive directions, the directions of electric fields applied by the two piezoelectric ceramics of the left end piezoelectric ceramic and the right end piezoelectric ceramic are X-axis positive directions and X-axis negative directions respectively, and the working modes of the left end piezoelectric ceramic and the right end piezoelectric ceramic are torsional vibration modes; the polarization direction of the upper surface piezoelectric ceramic is a Z-axis positive direction, the direction of an applied electric field is a Z-axis negative direction, and the working mode of the upper surface piezoelectric ceramic is a telescopic vibration mode; the torsional vibration mode of the left end piezoelectric ceramic and the right end piezoelectric ceramic and the telescopic vibration mode of the upper surface piezoelectric ceramic work together.
Further, torsional vibration of the left end piezoelectric ceramic and the right end piezoelectric ceramic is transmitted to the metal elastic body of the whole stator through the convex part of the Z-shaped metal elastic body, so that bending vibration is generated on the metal elastic body.
Furthermore, three piezoelectric ceramics, namely the upper surface piezoelectric ceramic, the left end piezoelectric ceramic and the right end piezoelectric ceramic, apply alternating voltages with the same time phase, and first-order bending vibrations excited in the metal elastic body of the stator respectively have the same time phase and spatial phase, and the three are mutually superposed.
The invention has the beneficial effects that: the Z-shaped structure single-mode standing wave type linear ultrasonic motor based on the piezoelectric ceramic multi-vibration mode has the following advantages:
according to the invention, the piezoelectric ceramics are adhered to the end part and the upper surface of the metal elastic body of the motor stator, and the torsional vibration mode of the piezoelectric ceramics at the end part and the transverse vibration mode of the piezoelectric ceramics at the upper surface are utilized to excite a first-order bending vibration mode in the metal elastic body of the stator, so that compared with the traditional mode of adhering the piezoelectric ceramics on the upper surface of the elastic body alone, the vibration amplitude of the stator can be increased, and the motor output is larger.
The invention has small volume and compact structure, and two pieces of ceramics with torsional vibration are arranged at the end part, so that the compactness of the motor structure can not be damaged while the output of the motor is increased.
The piezoelectric ceramic is easy to install, the end part of the metal elastic body of the stator with the Z-shaped structure is simple in protruding part, and the torsional vibration of the piezoelectric ceramic at the end part can be effectively converted into first-order bending vibration of the metal elastic body of the stator.
Drawings
Fig. 1 is a schematic structural diagram of a single-mode standing wave type linear ultrasonic motor with a Z-shaped structure based on multiple vibration modes of piezoelectric ceramics according to an embodiment of the present invention.
Wherein: 1-middle of elastomer, 2-upper surface piezoelectric ceramic, 3-right end piezoelectric ceramic, 4-left end piezoelectric ceramic, 5-right driving foot, 6-left driving foot, 7-mover, 10-right bulge, 11-left bulge.
FIG. 2 is an explanatory diagram of a left-end piezoelectric ceramic layout in the example.
Wherein: 1L, 2L, 3L, 4L, 5L and 6L-left end piezoelectric ceramics with six degrees of freedom, an XYZ-space Cartesian coordinate system.
FIG. 3 is a schematic diagram illustrating the arrangement of right-end piezoelectric ceramics in the embodiment.
Wherein: 1R, 2R, 3R, 4R, 5R and 6R-right end piezoelectric ceramics with six degrees of freedom, and an XYZ-space Cartesian coordinate system.
Fig. 4 is an explanatory diagram of an arrangement of the upper surface piezoceramic in the example.
Wherein: 1T, 2T, 3T, 4T, 5T and 6T-upper surface piezoelectric ceramics with six degrees of freedom, an XYZ-space Cartesian coordinate system.
FIG. 5 is a diagram showing the mechanism of generation of vibration modes in the up-arch stage of the motor in the embodiment.
Wherein: p-polarization direction, E-electric field direction and V-rotor motion direction.
Fig. 6 is a mechanism diagram of generation of vibration modes at a sinking stage of the motor in the embodiment.
Wherein: p-polarization direction, E-electric field direction and V-rotor motion direction.
FIG. 7 is a diagram of the motion mechanism of the left and right driving feet in the embodiment.
Wherein: 1-middle part of elastomer, 2-upper surface piezoelectric ceramic, 3-right end piezoelectric ceramic, 4-left end piezoelectric ceramic, 5-right driving foot, 6-left driving foot, 7-rotor, 8-stator neutral line when amplitude is zero, 9-stator neutral line when amplitude is maximum, 10-right bulge, 11-left bulge, A-left side standing wave node position and B-right side standing wave node position of stator.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Examples
Referring to fig. 1, a unimodal standing wave type linear ultrasonic motor with a Z-shaped structure based on multiple vibration modes of piezoelectric ceramics comprises a stator and a rotor 7, wherein the stator comprises an upper surface piezoelectric ceramic 2, a left end piezoelectric ceramic 4, a right end piezoelectric ceramic 3, a left driving foot 6, a right driving foot 5 and a metal elastic body, the metal elastic body is a Z-shaped metal elastic body, the metal elastic body comprises an elastic body middle part 1, a right protrusion part 10 and a left protrusion part 11, two ends of the elastic body middle part 1 are respectively provided with a right protrusion part 10 and a left protrusion part 11, the right protrusion part 10 is tightly attached to the upper surface of the metal elastic body, the left protrusion part 11 is tightly attached to the lower surface of the metal elastic body, the elastic body middle part 1, the right protrusion part 10 and the left protrusion part 11 are integrally in a Z-shaped structure, the upper surface piezoelectric ceramic 2 is arranged on the upper surface of the elastic body middle part 1, and two ends of the lower, Right drive foot 5, and left drive foot 6, right drive foot 5 all locate elastomer middle part 1 and active cell 7 within a definite time, and right bulge 10 forms the right side groove with the right-hand member of elastomer middle part 1, and left bulge 11 forms the left side groove with the left end of elastomer middle part 1. The left end piezoelectric ceramic 4 is bonded in the left groove, and the right end piezoelectric ceramic 3 is bonded in the right groove.
According to the Z-shaped structure single-mode standing wave type linear ultrasonic motor based on the piezoelectric ceramic multi-vibration modes, one piece of three piezoelectric ceramics contained in the stator is pasted on the upper surface of the elastic body, and the other two pieces of piezoelectric ceramics are tightly bonded with the concave parts formed by the protruding parts at the two end parts of the Z-shaped elastic body.
In the embodiment, the polarization directions of the left end piezoelectric ceramic 4 and the right end piezoelectric ceramic 3 are Z-axis positive directions, the directions of electric fields applied by the two piezoelectric ceramics of the left end piezoelectric ceramic 4 and the right end piezoelectric ceramic 3 are X-axis positive directions and X-axis negative directions respectively, and the working modes of the left end piezoelectric ceramic 4 and the right end piezoelectric ceramic 3 are torsional vibration modes; the polarization direction of the upper surface piezoelectric ceramic 2 is a positive Z-axis direction, the direction of an applied electric field is a negative Z-axis direction, and the working mode of the upper surface piezoelectric ceramic 2 is a telescopic vibration mode; the torsional vibration mode of the left end piezoelectric ceramic 4 and the right end piezoelectric ceramic 3 and the stretching vibration mode of the upper surface piezoelectric ceramic 2 work together.
In the Z-shaped structure single-mode standing wave type linear ultrasonic motor based on the piezoelectric ceramic multi-vibration mode, torsional vibration of the piezoelectric ceramic 4 at the left end and the piezoelectric ceramic 3 at the right end is transmitted to the metal elastic body of the whole stator through the right protruding part 10 and the left protruding part 11 of the metal elastic body, so that the metal elastic body generates bending vibration.
When in work, three piezoelectric ceramics of the upper surface piezoelectric ceramics 2, the left end piezoelectric ceramics 4 and the right end piezoelectric ceramics 3 are applied with alternating voltages with the same phase and the same frequency, under the action of an electric field, due to the inverse piezoelectric effect, the piezoelectric ceramics 2 on the upper surface of the metal elastic body polarized in the Z direction generates transverse stretching vibration, a first-order bending vibration mode is excited in a metal elastic body of the stator, the left end piezoelectric ceramics 4 and the right end piezoelectric ceramics 3 polarized in the Z direction at two end parts of the metal elastic body generate torsional vibration, the first-order bending vibration mode of the stator is also excited through the metal right bulge part 10 and the metal left bulge part 11, the stator is excited by two vibration modes of the three pieces of ceramics together to form first-order bending vibration, the first-order bending vibration mode and the first-order bending vibration mode have the same time phase and space phase, the three are mutually overlapped, and then the driving foot is driven to perform oblique linear motion to push the rotor 7 to move.
According to the Z-shaped structure single-mode standing wave type linear ultrasonic motor based on the multiple vibration modes of the piezoelectric ceramics, the piezoelectric ceramics are pasted on the end part and the upper surface of the metal elastic body of the motor stator, the first-order bending vibration mode is excited in the metal elastic body of the stator by utilizing the torsional vibration mode of the end piezoelectric ceramics and the transverse vibration mode of the upper surface piezoelectric ceramics 2, compared with the traditional mode that the piezoelectric ceramics are independently pasted on the upper surface of the elastic body, the vibration amplitude of the stator can be increased, and the motor output is larger.
As shown in fig. 2, the left-end piezoelectric ceramic 4 of the Z-shaped metal elastic body 1 is located in a spatial cartesian coordinate system XYZ, the polarization direction of the left-end piezoelectric ceramic 4 is a 3L degree of freedom direction, an alternating electric field in the direction of 1L degree of freedom is applied, under the action of the electric field, due to the inverse piezoelectric effect, the left-end piezoelectric ceramic 4 of the elastic body generates torsional vibration, generates deformation in the direction of 5L degree of freedom, and then excites a first-order bending vibration mode in the metal elastic body of the stator through the Z-shaped stator left bulge 11.
As shown in fig. 3, the right piezoelectric ceramic 3 of the Z-shaped metal elastic body 1 is located in a spatial cartesian coordinate system XYZ, the polarization direction of the right piezoelectric ceramic 3 is a 3R degree of freedom direction, an alternating electric field with a direction of 1R degree of freedom is applied, under the action of the electric field, due to the inverse piezoelectric effect, the right piezoelectric ceramic 3 of the elastic body generates torsional vibration, generates deformation with a deformation direction of 5R, and excites a first-order bending vibration mode in the metal elastic body of the stator through the Z-shaped stator right protrusion 10.
As shown in fig. 4, the piezoelectric ceramic 2 on the upper surface of the Z-shaped metal elastic body 1 is in a spatial cartesian coordinate system XYZ, the polarization direction of the piezoelectric ceramic 2 on the upper surface is a 3T degree of freedom direction, an alternating electric field parallel to the polarization direction is applied, under the action of the electric field, due to the inverse piezoelectric effect, the piezoelectric ceramic on the upper surface of the elastic body generates transverse vibration, deformation with a deformation direction of 1T is generated, and a first-order bending vibration mode is excited in the metal elastic body of the stator.
The two vibration modes of the three pieces of ceramics jointly excite the stator to perform first-order bending vibration, and then the driving foot is driven to perform oblique linear motion to push the rotor 7 to move.
As shown in fig. 5, the mechanism of generating vibration mode in the arch-up stage of the motor is: (1) the upper surface piezoelectric ceramics 2 applies a Z-axis negative direction electric field E, namely the direction of the electric field in the upper surface piezoelectric ceramics 2 is the opposite direction of the 3T freedom degree direction, the upper surface ceramics stretch in the 1T and 2T directions, the stretching of the upper surface piezoelectric ceramics 2 in the 1T direction drives the upper surface of the metal elastomer of the stator bonded with the upper surface piezoelectric ceramics to stretch, and therefore the metal elastomer of the stator is arched upwards; (2) the left end piezoelectric ceramic 4 applies an X-axis positive direction electric field E, namely the direction of the electric field in the left end piezoelectric ceramic 4 is a 1L degree of freedom direction, the left end piezoelectric ceramic 4 twists in a 5L direction, and the left end piezoelectric ceramic 4 pulls up the right part and presses down the left part of the metal left bulge part 11 of the Z-shaped stator, so that the metal elastic body of the stator is arched upwards; (3) the right piezoelectric ceramic 3 applies an electric field E in the opposite direction of the X axis, namely the direction of the electric field in the right piezoelectric ceramic 3 is the opposite direction of the direction of 1L degree of freedom, the right piezoelectric ceramic 3 twists in the opposite direction of 5L, and the right piezoelectric ceramic 3 pulls down the right part and pushes up the left part of the metal right bulge 10 of the Z-shaped stator, so that the metal elastic body of the stator is arched. Three pieces of piezoelectric ceramics together drive the metal elastic body of the stator to arch upwards.
As shown in fig. 6, the mechanism for generating vibration mode in the sinking stage of the motor is: (1) the upper surface piezoelectric ceramics 2 applies a Z-axis positive direction electric field E, namely the direction of the electric field in the upper surface piezoelectric ceramics 2 is a 3T degree of freedom direction, the upper surface piezoelectric ceramics 2 contracts in the 1T and 2T directions, and the contraction of the upper surface ceramics 2 in the 1T direction drives the upper surface of the metal elastomer unit of the stator bonded with the upper surface piezoelectric ceramics to contract, so that the metal elastomer of the stator is concave; (2) the left end piezoelectric ceramic 4 applies an electric field E in the opposite direction of the X axis, namely the direction of the electric field in the left end piezoelectric ceramic 4 is the opposite direction of the direction of 1L freedom degree, the left end piezoelectric ceramic 4 twists in the opposite direction of 5L, and the left end piezoelectric ceramic 4 pulls up the left part and presses down the right part of the metal left bulge part 11 of the Z-shaped stator, so that the metal elastic body of the stator is recessed; (3) the right end piezoelectric ceramic 3 applies an electric field E in the positive X-axis direction, namely the direction of the electric field in the right end piezoelectric ceramic 3 is a direction of 1L degree of freedom, the right end piezoelectric ceramic 3 twists in the direction of 5L, and the right end piezoelectric ceramic 3 pulls down the left part and presses up the right part of the metal right protrusion part 10 of the Z-shaped stator, so that the metal elastic body of the stator is recessed. Three pieces of piezoelectric ceramics drive the metal elastic body of the stator to be concave together.
The motor-driven foot motion mechanism is as follows in combination with the attached figure 7:
A. b are left and right intersections of the stator neutral line 8 when the stator amplitude is zero and the stator neutral line 9 when the stator amplitude is maximum, that is, positions of the standing wave nodes on the left side of the stator and positions of the standing wave nodes on the right side of the stator, respectively.
The left driving foot 6 and the right driving foot 5 are deviated from a stator left side standing wave node position A and a stator right side standing wave node position B in the same deviation direction, the left driving foot 6 is deviated from the stator left side standing wave node position A by one eighth of the fundamental wave wavelength, the right driving foot 5 is deviated from the stator right side standing wave node position B by one eighth of the fundamental wave wavelength, and the rotor 7 is placed below the left driving foot 6 and the right driving foot 5.
Excitation voltage is applied to the left end piezoelectric ceramics 4, the right end piezoelectric ceramics 3 and the upper surface piezoelectric ceramics 2, if the middle of the middle part 1 of the metal elastic body is arched upwards at first, the left driving foot 6 is pushed to the right lower side and is contacted with the rotor 7, the right driving foot 5 is pulled to the left upper side and is gradually separated from the rotor 7, the friction force at the bottom of the left driving foot 6 is greater than the friction force at the bottom of the right driving foot 5, and the rotor 7 moves one step to the right.
And then, the middle of the middle part 1 of the metal elastic body is concave, the two ends of the middle part 1 of the metal elastic body are tilted upwards, the left driving foot 6 is gradually separated from the rotor 7 under the action of a pulling force towards the upper left, the right driving foot 5 is contacted with the rotor 7 under the action of a pushing force towards the lower right, and the rotor 7 continues to move rightwards by one step.
Claims (3)
1. The utility model provides a Z type structure single mode standing wave type straight line ultrasonic motor based on many vibration modes of piezoceramics, includes stator and active cell, its characterized in that: the stator comprises upper surface piezoelectric ceramics, left end piezoelectric ceramics, right end piezoelectric ceramics, a left driving foot, a right driving foot and a metal elastic body, the metal elastic body adopts a Z-shaped metal elastic body, the metal elastic body comprises an elastic body middle part and a convex part, the two ends of the elastic body middle part are respectively provided with the convex part extending out, wherein the bulge at one end is close to the upper surface of the metal elastic body, the bulge at the other end is close to the lower surface of the metal elastic body, the middle part and the bulge of the elastic body are integrally in a Z-shaped structure, the piezoelectric ceramics on the upper surface are arranged on the upper surface of the middle part of the elastic body, the two ends of the lower surface of the middle part of the elastic body are respectively provided with a left driving foot and a right driving foot, the left driving foot and the right driving foot are arranged between the middle part of the elastic body and the rotor, a left groove and a right groove are respectively formed at the two ends of the middle part of the elastic body and the protruding part, the left piezoelectric ceramic is bonded in the left groove, and the right piezoelectric ceramic is bonded in the right groove;
the polarization directions of the left end piezoelectric ceramic and the right end piezoelectric ceramic are Z-axis positive directions, the directions of electric fields applied by the left end piezoelectric ceramic and the right end piezoelectric ceramic are X-axis positive directions and X-axis negative directions respectively, and the working modes of the left end piezoelectric ceramic and the right end piezoelectric ceramic are torsional vibration modes; torsional vibration of the left end piezoelectric ceramic and the right end piezoelectric ceramic is transmitted to the metal elastic body of the whole stator through the convex part of the Z-shaped metal elastic body, so that the metal elastic body generates bending vibration; the polarization direction of the upper surface piezoelectric ceramic is a Z-axis positive direction, the direction of an applied electric field is a Z-axis negative direction, and the working mode of the upper surface piezoelectric ceramic is a telescopic vibration mode; the torsional vibration mode of the left end piezoelectric ceramic and the right end piezoelectric ceramic and the telescopic vibration mode of the upper surface piezoelectric ceramic work together; the two vibration modes of the three pieces of ceramics jointly excite the stator to perform first-order bending vibration, and then the driving foot is driven to perform oblique linear motion to push the rotor to move.
2. The single-mode standing wave type linear ultrasonic motor of the Z-shaped structure based on the piezoelectric ceramic multi-vibration mode as claimed in claim 1, wherein: the left driving foot is deviated from the position of a standing wave node on the left side of the stator, the right driving foot is deviated from the position of a standing wave node on the right side of the stator, the deviation directions and the deviation distances of the left driving foot and the right driving foot are the same, the deviation distances are one eighth of the wavelength of a fundamental wave, and the rotor is placed below the left driving foot and the right driving foot.
3. The single-mode standing wave type linear ultrasonic motor of the Z-shaped structure based on the piezoelectric ceramic multi-vibration mode as claimed in claim 1, wherein: three piezoelectric ceramics of the upper surface piezoelectric ceramic, the left end piezoelectric ceramic and the right end piezoelectric ceramic apply alternating voltages with the same time phase, and first-order bending vibrations excited in the metal elastic body of the stator respectively have the same time phase and spatial phase, and the three are mutually superposed.
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| JPH09312983A (en) * | 1996-03-21 | 1997-12-02 | Nikon Corp | Vibrating actuator |
| CN2529448Y (en) * | 2001-07-27 | 2003-01-01 | 南京航空航天大学 | Linear-type standing-wave altrosonic electric machine |
| JPWO2014084184A1 (en) * | 2012-11-29 | 2017-01-05 | 株式会社ダイセル | Elastic body for actuator and piezoelectric actuator |
| CN103607136B (en) * | 2013-11-21 | 2016-04-20 | 河北大学 | Bent type piezoelectric ultrasonic motor |
| CN104967355B (en) * | 2015-07-20 | 2017-03-01 | 哈尔滨工业大学 | Simulating crawling polypody linear piezoelectric actuator |
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