CN109326710A - Piezoelectric ceramics electrode member and its production method - Google Patents
Piezoelectric ceramics electrode member and its production method Download PDFInfo
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- CN109326710A CN109326710A CN201811269976.3A CN201811269976A CN109326710A CN 109326710 A CN109326710 A CN 109326710A CN 201811269976 A CN201811269976 A CN 201811269976A CN 109326710 A CN109326710 A CN 109326710A
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- electrode
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- 239000000919 ceramic Substances 0.000 title claims abstract description 132
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000004891 communication Methods 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000011248 coating agent Substances 0.000 claims abstract description 10
- 238000000576 coating method Methods 0.000 claims abstract description 10
- 238000005520 cutting process Methods 0.000 claims abstract description 4
- 238000002360 preparation method Methods 0.000 claims description 3
- 229910052573 porcelain Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 4
- 238000005553 drilling Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 230000005611 electricity Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
Abstract
The present invention provides a kind of piezoelectric ceramics electrode member and its production method, solve the problems, such as that production efficiency is lower and electrode connecting plate is easy to be worn product is caused to open a way in shipment, its key points of the technical solution are that including ceramic bases, the front electrode plate and rear electrode plate being divided on ceramic bases tow sides, electrode connecting plate is connected between one of front electrode plate and rear electrode plate, ceramic bases offer communication port, and electrode connecting plate is set in communication port.Communication port is opened up on a ceramic substrate, utilize communication port accommodate electrod connecting plate, it can prevent electrode connecting plate from protruding from the side wall of ceramic bases, avoid in transport process electrode connecting plate from being worn and product is caused to open a way, to improve the reliability and stability that product uses.Its production method is by preparing large stretch of diameter ceramic wafer, and after drilling and electrode is coating, cutting forms the piezoelectric ceramics electrode member of predetermined size, simplifies production technology, improves production efficiency.
Description
Technical field
The present invention relates to piezoelectric ceramics field more particularly to a kind of piezoelectric ceramics electrode member and its production methods.
Background technique
Piezoelectric ceramics is widely used in sensor field, and existing piezoelectric ceramics electrode member includes ceramic bases and covers
The electrode slice of lid on a ceramic substrate, the ceramic bases back side are equipped with rear electrode plate, and front is equipped at least two blocks of front electrode plates,
For welding external circuits, one of front electrode plate needs connect to form same electrode with rear electrode plate.In existing life
In production. art, front electrode plate and rear electrode plate are attached by the electrode connecting plate being attached on ceramic bases side wall,
But electrode connecting plate, which is easy to be worn, in shipment causes product to open a way, and the reliability of product reduces.
Summary of the invention
The purpose of the present invention is intended to provide a kind of piezoelectric ceramics electrode member and its production method, has and can avoid ceramic base
There is open circuit to improve the effect of product reliability in the electrode plate junction on bottom two sides.
To achieve the goals above, the present invention is the following technical schemes are provided: a kind of piezoelectric ceramics electrode member, including ceramics
Substrate is connected respectively in front electrode plate and rear electrode plate on ceramic bases tow sides, the front electrode plate
At least provided with one piece, it is connected with electrode connecting plate between one of front electrode plate and the rear electrode plate, it is special
Sign is: the ceramic bases offer the communication port through ceramic bases, and the electrode connecting plate is set in communication port.
Through the above scheme, communication port is opened up on a ceramic substrate, using communication port accommodate electrod connecting plate, can be prevented
Electrode connecting plate protrudes from the side wall of ceramic bases, avoids in transport process electrode connecting plate from being worn and product is caused to open
Road, to improve reliability and stability that product uses.
Further setting: the communication port is the container for being opened in ceramic bases side wall.
Through the above scheme, electrode connecting plate is arranged on ceramic bases side wall, can be convenient for the inspection to electrode connecting plate
And test, while connector is opened in ceramic bases side wall and the intensity in the middle part of ceramic bases can be made higher, stability is more preferable.
Further setting: the container is set at the non-angle end of ceramic bases.
Through the above scheme, the area that container is capable of increasing at the non-angle end of ceramic bases is arranged in container, improves
The area of electrode connecting plate, to improve the stability that front electrode plate is connected with rear electrode plate.
Further setting: 1/5th to 1/2 area of the width of the container side length on side where container on a ceramic substrate
Between within the scope of.
Through the above scheme, receiving groove width is greater than in ceramic bases 1/5 of side side length where container, it is possible to increase electrode
The area of connecting plate improves the stability that front electrode plate is connected with rear electrode plate, and accommodates groove width less than ceramic bases
The 1/2 of side side length where upper container can prevent from reducing ceramic bases structural strength and frangible since container is larger.
Further setting: the depth of the container is within 1/5 to 1/2 interval range of receiving groove width.
Through the above scheme, receiving groove depth is greater than the 1/5 of receiving groove width, and container can be prevented too shallow and lead to electricity
Pole connecting plate is protruding to outside container, and is capable of increasing the area of electrode connecting plate, improves front electrode plate and rear electrode
The connective stability of plate, and the electrode connecting plate bonding strength for being located at receiving trench bottom can be prevented no more than 1/2 by accommodating groove depth
It is lower, cause the connective stability of front electrode plate and rear electrode plate to decline.
Further setting: the electrode connecting plate is provided with multiple, one a pair of the container and the electrode connecting plate
It answers.
Through the above scheme, setting multiple electrodes connecting plate can be improved the connection of front electrode plate and rear electrode plate
Point improves the stability of connection.
Further setting: when the front electrode plate quantity is greater than one piece, several front electrode plates are along ceramic base
The length direction at bottom is arranged by predetermined rule, and subdivided gap, the front electrode plate are equipped between the adjacent front electrode plate
It covers to the boundary of ceramic bases.
Through the above scheme, front electrode plate covers the area that ceramic bases are efficiently used to the boundary of ceramic bases, increases
The solderable wiring area of big front electrode plate.
Further setting: the container is arc.
Through the above scheme, arc container is upper more convenient in processing, and electrode connecting plate in container also more
Continuously, make the bonding strength of electrode connecting plate higher.
The present invention also provides one of production methods of above-mentioned piezoelectric ceramics electrode member, comprising the following steps:
Preparation meets the ceramic bases of the small flake diameter of predetermined size；
The communication port is drilled out in the ceramic bases；
It is blocked to the region that electrode is coated is not necessarily in the ceramic bases, then carries out electrode quilt on a ceramic substrate
It covers, makes to form the front electrode plate and the rear electrode plate on ceramic bases two sides, and form institute in the communication port
Electrode connecting plate is stated, the piezoelectric ceramics electrode member for meeting predetermined size is made.
The present invention also provides another production methods of above-mentioned piezoelectric ceramics electrode member, comprising the following steps:
Prepare large stretch of diameter ceramic wafer；
Several communication ports are uniformly drilled out on large stretch of diameter ceramic wafer；
The region being coated without electrode is blocked on large stretch of diameter ceramic wafer, then in large stretch of diameter ceramic wafer
Upper progress electrode is coating, electrode plate is formed on ceramic wafer, and electrode connecting plate is formed in communication port；
The coating large stretch of diameter ceramic wafer finished of electrode is cut, cutting forms several pressures for meeting predetermined size
Electroceramics electrode member.
Through the above scheme, it drills on large stretch of diameter ceramic wafer and the electrode for first carrying out large area is coating, then be cut into small
The piezoelectric ceramics electrode member of piece diameter, is simplified technique, improves production efficiency.
Compared with prior art, the solution of the invention has the following advantages:
1. in piezoelectric ceramics electrode member of the present invention, by opening up communication port on ceramic substrate, and being connected to
The electrode connecting plate of setting connection front electrode plate and rear electrode plate, can be avoided the electrode connecting plate in transport process in mouthful
It is worn and causes to open a way.
2. in the production method of piezoelectric ceramics electrode member of the present invention, by first preparing large stretch of diameter ceramic wafer, then
It drills out communication port and carries out electrode and be coated, be finally cut into several piezoelectric ceramics electrode members, simplify technique, improve life
Produce efficiency.
The additional aspect of the present invention and advantage will be set forth in part in the description, these will become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
Above-mentioned and/or additional aspect and advantage of the invention will become from the following description of the accompanying drawings of embodiments
Obviously and it is readily appreciated that, in which:
Fig. 1 is the structural schematic diagram of embodiment one；
Fig. 2 is the cross-sectional view of embodiment one；
Fig. 3 is the structural schematic diagram of embodiment two；
Fig. 4 is the structural schematic diagram of embodiment three；
Fig. 5 is the structural schematic diagram of example IV；
Fig. 6 is the structural schematic diagram of embodiment five.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and for explaining only the invention, and is not construed as limiting the claims.
Embodiment one:
As depicted in figs. 1 and 2, piezoelectric ceramics electrode member of the present invention, including ceramic bases 1, be connected to
Front electrode plate 2 and rear electrode plate 3 on 1 tow sides of ceramic bases, the front electrode plate 2 is as pad and for welding
Connect external cord.The front electrode plate 2 is equipped with two pieces, one of front electrode plate 2 and the rear electrode plate 3 it
Between be connected with electrode connecting plate 4.The ceramic bases 1 offer the communication port 5 through ceramic bases 1, the electrode connecting plate 4
It is set in communication port 5.Subdivided gap 6, the covering of front electrode plate 2 to pottery are equipped between the adjacent front electrode plate 2
The boundary of porcelain substrate 1.
In piezoelectric ceramics electrode member of the invention, communication port 5 is opened up in ceramic bases 1, accommodates electricity using communication port 5
Pole connecting plate 4 can prevent electrode connecting plate 4 from protruding from the side wall of ceramic bases 1, and the electrode in transport process is avoided to connect
Plate 4, which is worn, causes product to open a way, to improve the reliability and stability that product uses.
The communication port 5 is the container for being opened in 1 side wall of ceramic bases, and in other embodiments, the communication port 5 is also
It can be the through-hole for being opened in ceramic bases 1 and penetrating through 4 tow sides of substrate.Electrode connecting plate 4 is arranged in 1 side wall of ceramic bases
On, it can be convenient for inspection and test to electrode connecting plate 4, while communication port 5 is opened in 1 side wall of ceramic bases can make ceramic base
The intensity at 1 middle part of bottom is higher, and stability is more preferable.
Preferably, the container is set at the non-angle end of ceramic bases 1.The non-of ceramic bases 1 is arranged in container
It is capable of increasing the area of container at the end of angle, improves the area of electrode connecting plate 4, to improve front electrode plate 2 and back side electricity
The stability that pole plate 3 connects.
Preferably, 1/5 to 1/2 section of the width of container side length on side where container in ceramic bases 1
Within the scope of.Accommodate groove width is greater than in ceramic bases 1 side side length where container 1/5, it is possible to increase the face of electrode connecting plate 4
Product improves the stability that front electrode plate 2 and rear electrode plate 3 connect, and accommodates groove width less than container in ceramic bases 1
The 1/2 of place side side length, can prevent due to container is larger and make 1 structural strength of ceramic bases reduce and it is frangible.
More preferably, the depth of the container is within 1/5 to 1/2 interval range of receiving groove width.Accommodate groove depth
Greater than the 1/5 of receiving groove width, container can be prevented too shallow and electrode connecting plate 4 is caused to be protruding to outside container, Er Qieneng
The area for enough increasing electrode connecting plate 4, improves the connective stability of front electrode plate 2 and rear electrode plate 3, and accommodates groove depth
It can prevent 4 bonding strength of electrode connecting plate for being located at receiving trench bottom lower no more than 1/2, lead to front electrode plate 2 and the back side
The connective stability of electrode plate 3 declines.
Preferably, the container is arc.The container of arc is upper more convenient in processing, and electrode connecting plate 4 exists
It is also more continuous in container, keep the bonding strength of electrode connecting plate 4 higher.In other embodiments, container can be rectangular.
Embodiment two:
As shown in figure 3, difference from the first embodiment is that the quantity of the front electrode plate 2 is three pieces, in other realities
It applies in example, the quantity of the front electrode plate 2 can be one piece, and also greater than 3 pieces, several front electrode plates 2 are along ceramic base
For the length direction at bottom 1 by predetermined rule arrangement, the quantity of front electrode plate 2 can be according to the quantity of actually required welding external cord
It is adjusted.
Embodiment three:
As shown in figure 4, the difference of itself and embodiment one, two is, the electrode connecting plate 4 is provided with multiple, the receipts
Tank and the electrode connecting plate 4 correspond.Setting multiple electrodes connecting plate 4 can be improved front electrode plate 2 and back side electricity
The tie point of pole plate 3 improves the stability of connection.Multiple containers are set on the same side wall of ceramic bases 1.
Example IV:
As shown in figure 5, the difference of itself and embodiment three is, multiple containers are set to the difference of ceramic bases 1
On side wall.
Embodiment five:
As shown in fig. 6, difference from the first embodiment is that the subdivided gap 6 is L shape setting, in other implementations
In example, subdivided gap 6 can also be U-shape, and the shape of subdivided gap 6 depends on the arrangement rule of front electrode plate 2.
The present invention also provides one of production methods of above-mentioned piezoelectric ceramics electrode member, comprising the following steps:
Preparation meets predetermined size, the small flake diameter ceramic bases 1；
The communication port 5 is drilled out in the ceramic bases 1；
It is blocked to the region that electrode is coated is not necessarily in the ceramic bases 1, then carries out electrode quilt in ceramic bases 1
It covers, makes to form the front electrode plate 2 and the rear electrode plate 3 on 1 two sides of ceramic bases, and the shape in the communication port 5
At the electrode connecting plate 4, the piezoelectric ceramics electrode member for meeting predetermined size is made, coating electrode can be printing
Or the mode of plating.
The present invention also provides another production methods of above-mentioned piezoelectric ceramics electrode member, comprising the following steps:
Prepare large stretch of diameter ceramic wafer；
Several communication ports 5 are uniformly drilled out on large stretch of diameter ceramic wafer；
The region being coated without electrode is blocked on large stretch of diameter ceramic wafer, then in large stretch of diameter ceramic wafer
Upper progress electrode is coating, and electrode plate is formed on ceramic wafer, and electrode connecting plate 4 is formed in communication port 5；
The coating large stretch of diameter ceramic wafer finished of electrode is cut, cutting forms several pressures for meeting predetermined size
Electroceramics electrode member.
It is coating by preparing large stretch of diameter ceramic wafer, drilling on it and first carrying out broad-area electrode, then it is cut into small pieces
The piezoelectric ceramics electrode member of diameter carries out electrode compared to single small flake diameter ceramic substrate and is coated, more simplifies in production technology, mention
Production efficiency is risen.
The above is only some embodiments of the invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (10)
1. a kind of piezoelectric ceramics electrode member, including ceramic bases, be connected respectively on ceramic bases tow sides just
Face electrode plate and rear electrode plate, the front electrode plate at least provided with one piece, one of front electrode plate with it is described
It is connected with electrode connecting plate between rear electrode plate, it is characterized in that: the ceramic bases offer the connection through ceramic bases
Mouthful, the electrode connecting plate is set in communication port.
2. piezoelectric ceramics electrode member according to claim 1, it is characterized in that: the communication port is to be opened in ceramic bases
The container of side wall.
3. piezoelectric ceramics electrode member according to claim 2, it is characterized in that: the container is set to ceramic bases
At non-angle end.
4. piezoelectric ceramics electrode member according to claim 2, it is characterized in that: the width of the container is in ceramic bases
Where upper container within 1/5 to 1/2 interval range of the side length on side.
5. piezoelectric ceramics electrode member according to claim 3, it is characterized in that: the depth of the container is in receiving groove width
Within 1/5 to 1/2 interval range of degree.
6. piezoelectric ceramics electrode member according to claim 2, it is characterized in that: the electrode connecting plate be provided with it is multiple,
The container and the electrode connecting plate correspond.
7. piezoelectric ceramics electrode member according to claim 2, it is characterized in that: when the front electrode plate quantity is greater than one
When block, several front electrode plates are arranged along the length direction of ceramic bases by predetermined rule, the adjacent front electrode plate
Between be equipped with subdivided gap, the front electrode plate covers to the boundary of ceramic bases.
8. piezoelectric ceramics electrode member according to claim 2, it is characterized in that: the container is arc.
9. the production method of piezoelectric ceramics electrode member as described in any of the claims 1 to 8, it is characterized in that: including following step
It is rapid:
Preparation meets the ceramic bases of the small flake diameter of predetermined size；
The communication port is drilled out in the ceramic bases；
It is blocked to the region that electrode is coated is not necessarily in the ceramic bases, then carries out electrode on a ceramic substrate and be coated, made
The front electrode plate and the rear electrode plate are formed on ceramic bases two sides, and the electrode is formed in the communication port
The piezoelectric ceramics electrode member for meeting predetermined size is made in connecting plate.
10. the production method of piezoelectric ceramics electrode member as described in any of the claims 1 to 8, it is characterized in that: including following step
It is rapid:
Prepare large stretch of diameter ceramic wafer；
Several communication ports are uniformly drilled out on large stretch of diameter ceramic wafer；
The region being coated without electrode is blocked on large stretch of diameter ceramic wafer, then enterprising in large stretch of diameter ceramic wafer
Row electrode is coating, electrode plate is formed on ceramic wafer, and electrode connecting plate is formed in communication port；
The coating large stretch of diameter ceramic wafer finished of electrode is cut, cutting forms several piezoelectricity potteries for meeting predetermined size
Porcelain electrode member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811269976.3A CN109326710A (en) | 2018-10-29 | 2018-10-29 | Piezoelectric ceramics electrode member and its production method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811269976.3A CN109326710A (en) | 2018-10-29 | 2018-10-29 | Piezoelectric ceramics electrode member and its production method |
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| Publication Number | Publication Date |
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| CN109326710A true CN109326710A (en) | 2019-02-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811269976.3A Pending CN109326710A (en) | 2018-10-29 | 2018-10-29 | Piezoelectric ceramics electrode member and its production method |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0847091A (en) * | 1994-07-29 | 1996-02-16 | Kyocera Corp | Manufacture of piezoelectric element |
| WO2007105865A1 (en) * | 2006-03-10 | 2007-09-20 | Joinset Co., Ltd | Ceramic component element and ceramic component and method for the same |
| US20140339955A1 (en) * | 2013-04-17 | 2014-11-20 | Longke Electronics (Huiyang) Co., Ltd. | Base metal combination electrode of electronic ceramic component and manufacturing method thereof |
| CN107785479A (en) * | 2016-08-31 | 2018-03-09 | 成都汇通西电电子有限公司 | Ceramic chips electrically connected method and sensor manufacturing process |
| CN208986024U (en) * | 2018-10-29 | 2019-06-14 | 肇庆奥迪威传感科技有限公司 | Piezoelectric ceramics electrode member |
-
2018
- 2018-10-29 CN CN201811269976.3A patent/CN109326710A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0847091A (en) * | 1994-07-29 | 1996-02-16 | Kyocera Corp | Manufacture of piezoelectric element |
| WO2007105865A1 (en) * | 2006-03-10 | 2007-09-20 | Joinset Co., Ltd | Ceramic component element and ceramic component and method for the same |
| US20140339955A1 (en) * | 2013-04-17 | 2014-11-20 | Longke Electronics (Huiyang) Co., Ltd. | Base metal combination electrode of electronic ceramic component and manufacturing method thereof |
| CN107785479A (en) * | 2016-08-31 | 2018-03-09 | 成都汇通西电电子有限公司 | Ceramic chips electrically connected method and sensor manufacturing process |
| CN208986024U (en) * | 2018-10-29 | 2019-06-14 | 肇庆奥迪威传感科技有限公司 | Piezoelectric ceramics electrode member |
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