CN109313868A - Display device manufacturing method - Google Patents

Display device manufacturing method Download PDF

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Publication number
CN109313868A
CN109313868A CN201780036286.0A CN201780036286A CN109313868A CN 109313868 A CN109313868 A CN 109313868A CN 201780036286 A CN201780036286 A CN 201780036286A CN 109313868 A CN109313868 A CN 109313868A
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CN
China
Prior art keywords
glass substrate
display device
resin film
organic
organic resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201780036286.0A
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Chinese (zh)
Inventor
田村达彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NSC Co Ltd
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NSC Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by NSC Co Ltd filed Critical NSC Co Ltd
Publication of CN109313868A publication Critical patent/CN109313868A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/301Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16Constructional details or arrangements
    • G06F1/1613Constructional details or arrangements for portable computers
    • G06F1/1615Constructional details or arrangements for portable computers with several enclosures having relative motions, each enclosure supporting at least one I/O or computing function
    • G06F1/1616Constructional details or arrangements for portable computers with several enclosures having relative motions, each enclosure supporting at least one I/O or computing function with folding flat displays, e.g. laptop computers or notebooks having a clamshell configuration, with body parts pivoting to an open position around an axis parallel to the plane they define in closed position
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16Constructional details or arrangements
    • G06F1/1613Constructional details or arrangements for portable computers
    • G06F1/1633Constructional details or arrangements of portable computers not specific to the type of enclosures covered by groups G06F1/1615 - G06F1/1626
    • G06F1/1637Details related to the display arrangement, including those related to the mounting of the display in the housing
    • G06F1/1641Details related to the display arrangement, including those related to the mounting of the display in the housing the display being formed by a plurality of foldable display components
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/02Details
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Human Computer Interaction (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The present invention provides a kind of removing without organic resin film and glass substrate and can carry out curved display device with simple method, display device manufacturing method according to the present invention, comprising: in the step of forming organic resin film (14) on the first interarea of glass substrate (12);The layer (16,18,20) for including the steps that display element is formed on organic resin film;And the first main surface side by covering the glass substrate including organic resin film by elching resistant component (22), and the second main surface side is etched, thus the step of being thinned glass substrate.

Description

Display device manufacturing method
Technical field
The present invention relates to a kind of manufacturing methods of the display devices such as organic el display, extremely more particularly, to a kind of slimming The manufacturing method of the curved display device of energy.
Background technique
In the past, various uses was used for using the display device of the flat-panel monitors such as liquid crystal display or organic el display. Particularly, in recent years from the viewpoint of design, flexible display is concerned.It is mostly used when manufacturing flexible display easily Organic el display corresponding to meandering.
Existing organic el display is using glass substrates such as cover glasses come display elements such as sealing organic el elements.Pass through Glass substrate keeps the air-tightness and watertightness of organic EL element, the deterioration of element caused by preventing because of oxygen, moisture.But Due to being further thinned the requirement with meandering as described above, develops shown using organic EL of resin substrate in recent years Device.Resin substrate is flexible high compared with glass substrate, is less likely to be damaged bending, passes through the stacking of inoranic membrane and organic film Structure seals display element, can be realized the gas barrier property with glass substrate equal extent.
However, be formed as sufficiently thin so that flexible resin substrate is very difficult to handle in manufacturing process, knot Fruit is likely to become the reason of yield deteriorates.Therefore, in general, forming the organic resin films such as polyimides in supporting glass, so as to In being handled in manufacturing process.In the state of ensuring the rigidity of entire substrate by supporting glass on organic resin film shape Organic resin film is removed (for example, referring to special from supporting glass at display elements such as functional membranes, and after being sealed processing Sharp document 1).Operation from supporting glass removing organic resin film is that supporting glass and having in advance by being removed by laser aid The peeling layer formed between machine resin film carries out.
Existing technical literature
Patent document
Patent document 1:JP special open 2016-004112
Summary of the invention
(subject to be solved by the invention)
But it is unfavorable in the presence of being generated due to the laser irradiation when removing supporting glass to display element in the above-mentioned methods The risk of influence.In addition, it is necessary to import the manufacturing device of the valuableness such as excimer laser, and production cost is also very high. Particularly, multiple display devices are produced in the state of carrying out chamfering to multiple display devices on large substrate in recent years, but with Substrate become larger, the irradiated area of laser increases, therefore production efficiency reduces, and peeling-off bad situation becomes more.
In addition, the display device being only made of resin film is difficult to the display element that adequately protects, and there are reliability deficiencies The problem of.Particularly, in organic el display, the deterioration of display element is the obstacle to the long-life, it is therefore desirable to prevent from coming From the substrate of the high reliablity of the immersion of external moisture, oxygen.
The object of the present invention is to provide it is a kind of can be with simple without carrying out the removing of organic resin film and glass substrate Method carry out curved display device.
(a technical solution to solve project)
Display device manufacturing method according to the present invention, comprising: form organic resin on the first interarea of glass substrate The step of film;The layer for including the steps that display element is formed on organic resin film;And by being covered by elching resistant component Lid includes the first main surface side of the glass substrate of organic resin film, and is etched to the second main surface side, to make glass base The step of plate is thinned.
It is formed in the process of organic resin film on the glass substrate, for example, by existing used supporting glass Using coating units such as slit type coaters, and organic resin film is coated on the glass substrate.As organic resin film, preferably make Use polyimides.In the process for forming display element, being formed on organic resin film includes thin film transistor (TFT) or organic EL The functional layer of luminescent layer etc..After forming such display element, display element is sealed so as to be not exposed to outside air.? In sealing process, processing is sealed by resin film made of alternately laminated inoranic membrane and organic film.Encapsulation process it Afterwards, with elching resistant film or anticorrosive additive material come overlay tree adipose membrane, and glass substrate is etched.Etching process In, it is etched by contacting the interarea of the glass substrate configured with display device with etching solution, to make glass substrate Plate thickness it is thinning.
In the present invention, it is used due to glass substrate not as making the convenient supporting glass of manufacturing process, and It is a part as the constituent element of display device and uses, therefore does not need to carry out the stripping of glass substrate and organic resin film From.It further,, will not even if not removing resin film from supporting glass due to being thinned glass substrate by etching The increased undesirable condition of thickness of display device is generated, and makes each glass substrate free bend as needed.In addition, due to Protect display element by organic resin film and glass substrate, thus display element be exposed in outside air and deteriorate can Energy property reduces, to improve the reliability of display device.
Furthermore it is preferred that being thinned glass substrate to the degree for enabling display device free bend.It is preferred that by glass base Plate is thinned to 50~150 μm.By by glass substrate etching to the range, even thus include glass substrate display fill It sets, can also make its bending.
In addition, being etched through for glass substrate sprays etching solution to glass substrate to carry out.By this composition, etching solution is non- The case where other regions of display device other than necessity contact glass substrate, tails off.Therefore display element is deteriorated because of moisture Possibility becomes smaller.
Invention effect
In accordance with the invention it is possible to provide it is a kind of can be with simple without carrying out the removing of organic resin film and glass substrate Method carries out curved display device.
Detailed description of the invention
Fig. 1 is the figure for showing the structure of display device according to embodiment of the present invention.
Fig. 2 is the figure for showing the manufacturing process of display device.
Fig. 3 is the figure for showing the Etaching device used in this embodiment.
Specific embodiment
Display device according to embodiment of the present invention is illustrated using Fig. 1.Fig. 1 is organic EL panel 10 Schematic side elevation.Organic EL panel 10 has supporting glass 12, polyimide film 14, transparent electrode layer 16, luminescent layer 18 With sealant 20.
The configuration of supporting glass 12 is watching the opposite side in the side of image with user, and is formed in an interarea poly- Acid imide film 14.In the present embodiment, polyimide film 14 is equivalent to the organic resin film in technical solution of the present invention.At this In embodiment, as organic resin film, polyimides has been used, but has been not particularly limited, as long as being resistant to film forming work The resin film of the treatment temperature of skill, is not particularly limited.
Transparent electrode layer 16 and luminescent layer 18 are sequentially laminated on polyimide film 14.It is excellent as transparent electrode layer 16 Form slection is at known low-temperature polysilicon silicon fiml.Luminescent layer 18 includes the functions such as hole transmission layer, organic EL element and electron transfer layer Layer.In the present embodiment, transparent electrode layer 16 and luminescent layer 18 are equivalent to the display element in technical solution of the present invention.Sealing Layer 20 is configured to cover luminescent layer 18, so that light-emitting component etc. be prevented to be externally exposed the moisture in air or oxygen and deteriorate.It is logical Often, sealant 20 is formed by the way that the resin film of different compositions is laminated.In the present embodiment, although passing through five layers of sealant It carries out diaphragm seal, but the structure of sealant 20 can be changed as appropriate.The organic EL panel 10 is from configured with close The top emission type that the mode of the side visuognosis image of sealing 20 is constituted.
Here, being illustrated using (D) of (A) to Fig. 2 of Fig. 2 to the manufacturing method of organic EL panel 10.Firstly, to The process that polyimide film 14 is formed in supporting glass 12 is illustrated.It is dissolved in dimethyl acetamide or methyl pyrrolidone Solvent in polyimide precursor be coated in supporting glass 12 on (referring to Fig. 2 (A)).Supporting glass 12 is preferably that can make The material used in the known manufacturing methods and with 300~800 μm of plate thickness.Polyimide precursor can pass through slit The coating units such as coating machine or roll coater are coated.In such a situation it is preferred to applied to the thickness for making polyimide film 14 It is 7~30 μm.By the way that polyimide precursor is put into the drying oven for be warming up to predetermined temperature to carry out curing process.Separately Outside, the prime coat for increasing contiguity power can be formed before coating polyimide film 14 in supporting glass 12.
After forming polyimide film 14, transparent electrode layer 16 is formed on polyimide film 14.In present embodiment In, low-temperature polysilicon silicon fiml is formed on polyimide film 14 by known methods such as sputterings.In the top shape of transparent electrode layer 16 At luminescent layer 18 (referring to (B) of Fig. 2).The known methods such as vapor deposition mode or ink-jet mode can be used to be formed in luminescent layer 18 Machine material.In addition, luminescent layer 18 not only includes the luminescent layer being made of organic material, it further include hole transmission layer, electron-transport Layer.In the present embodiment, hole transmission layer, luminescent layer and electron transfer layer are sequentially laminated on transparent electrode layer 16.
Transparent electrode layer 16 and luminescent layer 18 are capped (referring to (C) of Fig. 2) by the way that multiple sealants 20 are laminated.Sealing Layer 20 is that have the resin film of gas barrier property, and constituted in a manner of the air-tightness and watertightness that keep luminescent layer 18.Sealant 20 can more effectively protect luminescent layer 18 by alternately laminated inoranic membrane and organic film.In the present embodiment, although it is logical It crosses five layers of sealant and carries out diaphragm seal, but can suitably change stepped construction.
As the inoranic membrane in sealant, can be used silicon nitride, silica, silicon oxynitride, oxycarbide, carbonitride, Aluminium oxide etc..As organic film, polyester, methacrylic acid, polystyrene, transparent fluororesin, polyimides, poly- ammonia can be used Ester, cyclic olefine copolymer, acrylic resin, epoxy resin etc..In addition, these sealants are visual in order to ensure display device Property, total light transmittance is preferably 90% or more.
In the organic EL panel 10 through diaphragm seal, (reference is handled by the slimming that etching carries out supporting glass 12 (D) of Fig. 2).Etching process is preferably carried out by contacting at least etching solution containing hydrofluoric acid with supporting glass 12.Herein The engraving method of supporting glass 12 is illustrated.
Firstly, covering sealant 20 with protective film 22 before being etched.Protective film 22 is by having etching solution The component of resistance is constituted, and at least has the resistance to hydrofluoric acid.In addition, in the present embodiment, being carried out by membrane element Protection, but resist also can be used etc. etch resistants coating is covered.In addition, when the sealant 20 for being configured at most surface has When having acid resistance, protective film 22 can not used.
In order to etch supporting glass 12, it is preferable to use the one chip Etaching device 30 as shown in (A) of Fig. 3.Etaching device 30 at least have conveying roller 32 and sprayer unit 34.Conveying roller 32 is configured along the length direction of Etaching device 30, and with defeated The mode of organic EL panel 10 is sent to constitute.At this point, supporting glass 12 is loaded in a manner of contacting with conveying roller 32 (referring to Fig. 3 (B)).
Sprayer unit 34 is configured at the lower section of conveying roller 32 and the structure in a manner of spraying etching solution towards supporting glass 12 At.Sprayer unit 34 has multiple nozzles, equably to spray etching solution to supporting glass 12.Etching solution at least contains hydrogen fluorine Acid can also add the inorganic acids such as hydrochloric acid or surfactant as needed.
Additionally, it is preferred that being configured to the sprayer unit spray from the position for being configured at the loading unit and moving section close to Etaching device Cleaning solution is penetrated, supporting glass 12 is cleaned.The cleaning solution of present embodiment uses tap water, and but not limited to this.
Protective film 22 is stripped after being etched.Protective film 22 can be removed by applying the power of physics.? In the case where using anticorrosive additive material, removed although can be immersed in stripper etc., it should be not to display element The mode impacted is handled in a short time.
While supporting glass 12 is conveyed in the horizontal direction by conveying roller 32, the erosion sprayed from sprayer unit 34 is utilized Liquid is carved to carry out slimming processing.In the present embodiment, pass through the injection etching of supporting glass 12 from below to configuring downwards Liquid, etching solution will not be contacted optionally with organic EL panel 10.It directly falls, accommodates when etching solution is contacted with supporting glass 12 In accumulator tank (not shown) etc..
In addition, the injection pressure of etching solution, sprayer unit 34 at a distance from organic EL panel 10 can appropriate adjustment, with erosion The mode that carving liquid will not disperse to the region other than supporting glass 12 is constituted.If etching solution connects with 10 long-time of organic EL panel Touching, then the moisture of etching solution gradually permeates, and luminescent layer 18 is possible to deteriorate because of moisture.Therefore, it is necessary to by increasing sealant 20 number of plies more reliably protects luminescent layer 18, to generate additional cost, the plate thickness for generating organic EL panel 10 increases Unfavorable condition.
In addition, when being thinned supporting glass 12, preferably in such a way that the plate thickness of supporting glass 12 becomes 50~200 μm It is etched.By the way that supporting glass 12 is etched to the range, the organic el display that can have and be only made of resin film The flexibility of equal extent.For example, by 8 inches of the organic el display 10 that supporting glass 12 is etched to 100 μm can be bent to Radius of curvature 300mm or so.It is etched by further progress, additionally it is possible to reduce flexible radius of curvature.
In addition, even if supporting glass 12 is thinning, can also stablize since organic EL panel 10 is conveyed by conveying roller 32 Ground is handled.In turn, if common glass substrate is thinned to 100 μm or less, it is likely that generate flexure etc. in etching Unfavorable condition, but the intensity due to keeping the entirety of organic EL panel 10 by polyimide film 14, sealant 20 etc., A possibility that can reduce the rupture of supporting glass 12 in an etching process.In addition, just in case due to make supporting glass 12 be thinned and In the case where generating unfavorable condition in conveying, as long as making the injection pressure reduction of etching solution or making the narrower intervals of conveying roller ?.In the case where the adjusting of Etaching device is difficult, preferably further configure on the top of protective film 22 with acid proof Supporting substrates.
What such display device was usually manufactured in the state that large substrate has carried out chamfering to multiple display devices Situation is more.In this case, it carries out from large substrate disjunction after etching process into the processing of each substrate.Disjunction processing can make With scoring device or laser aid etc..Since supporting glass 12 is thinning by etching process, even if using in resin base Existing laser aid used in the disjunction of plate also can easily be done disjunction.
In the present embodiment, the existing manufacturing process of change is hardly needed, and can not be shelled from supporting glass 12 From polyimide film 14.Supporting glass 12 is able to maintain a part for being configured to organic EL panel 10 and manufactures flexible display, because This production efficiency improves.Moreover, can more reliably protect luminescent layer 18 by the way that there are supporting glass 12.
The explanation of above embodiment is all to illustrate in all respects, it should not be assumed that is restrictive.Model of the invention Enclosing is not indicated by above embodiment instead of, is indicated by claims.Moreover, the scope of the present invention includes and claim Being had altered in the book equivalent meaning and range.
Symbol description
10- organic EL panel
12- supporting glass
14- polyimide film
16- transparent electrode layer
18- luminescent layer
20- sealant
22- protective film
30- Etaching device
32- conveying roller
34- sprayer unit

Claims (3)

1. a kind of display device manufacturing method manufactures display device, the display device shows image using display element, special Sign is, comprising:
In the step of forming organic resin film on the first interarea of glass substrate;
The layer for including the steps that display element is formed on the organic resin film;And
By covering the first main surface side of the glass substrate including the organic resin film by elching resistant component, and it is right Second main surface side is etched, thus the step of being thinned the glass substrate.
2. display device manufacturing method according to claim 1, which is characterized in that
It is thinned the glass substrate to the thickness of energy free bend.
3. display device manufacturing method according to claim 1 or 2, which is characterized in that
In the step of being thinned the glass substrate, it is etched by spraying etching solution to the glass substrate.
CN201780036286.0A 2016-05-16 2017-05-16 Display device manufacturing method Pending CN109313868A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016-097561 2016-05-16
JP2016097561A JP6531319B2 (en) 2016-05-16 2016-05-16 Display device manufacturing method
PCT/JP2017/018266 WO2017199928A1 (en) 2016-05-16 2017-05-16 Method for manufacturing display device

Publications (1)

Publication Number Publication Date
CN109313868A true CN109313868A (en) 2019-02-05

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Country Status (4)

Country Link
JP (1) JP6531319B2 (en)
KR (1) KR20190010871A (en)
CN (1) CN109313868A (en)
WO (1) WO2017199928A1 (en)

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CN112599570A (en) * 2020-12-08 2021-04-02 深圳市华星光电半导体显示技术有限公司 Display panel and preparation method thereof
CN113054130A (en) * 2021-03-04 2021-06-29 深圳市华星光电半导体显示技术有限公司 Preparation method of display panel
CN113488515A (en) * 2021-06-28 2021-10-08 深圳市华星光电半导体显示技术有限公司 Display panel and preparation method thereof

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CN113488515A (en) * 2021-06-28 2021-10-08 深圳市华星光电半导体显示技术有限公司 Display panel and preparation method thereof

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KR20190010871A (en) 2019-01-31
WO2017199928A1 (en) 2017-11-23
JP6531319B2 (en) 2019-06-19
JP2017207528A (en) 2017-11-24

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