CN109302097B - Piezoelectric actuator - Google Patents
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- CN109302097B CN109302097B CN201811135506.8A CN201811135506A CN109302097B CN 109302097 B CN109302097 B CN 109302097B CN 201811135506 A CN201811135506 A CN 201811135506A CN 109302097 B CN109302097 B CN 109302097B
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- 230000005489 elastic deformation Effects 0.000 claims abstract description 102
- 239000000919 ceramic Substances 0.000 claims abstract description 43
- 238000006073 displacement reaction Methods 0.000 abstract description 35
- 230000003321 amplification Effects 0.000 abstract description 15
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 15
- 230000000694 effects Effects 0.000 abstract description 8
- 238000013016 damping Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 8
- 230000008602 contraction Effects 0.000 description 7
- 230000001154 acute effect Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
Abstract
The present invention relates to a piezoelectric actuator including: the piezoelectric ceramic vibration damping device comprises a first-stage elastic deformation plate, two second-stage elastic deformation plates, two external connection end covers and piezoelectric ceramic, wherein the first-stage elastic deformation plate is provided with a middle gap, and a first inner end surface and a second inner end surface of the middle gap are fixedly connected with a third end surface and a fourth end surface of the piezoelectric ceramic in the telescopic direction respectively; the two second-stage elastic deformation plates are symmetrically arranged on two sides of the first-stage elastic deformation plate and are respectively connected with the first-stage elastic deformation plate in series, and the two second-stage elastic deformation plates are connected in parallel; and the two external connection end covers are positioned on two sides of the piezoelectric ceramic in the telescopic direction, and the external connection end covers are fixedly connected with the second-stage elastic deformation plate. The piezoelectric actuator has compact structure and good displacement amplification effect, and is suitable for occasions with precise linear displacement driving requirements.
Description
Technical Field
The invention relates to the technical field of displacement control, in particular to a piezoelectric actuator, and particularly relates to a piezoelectric actuator with displacement amplification.
Background
The piezoelectric ceramic has an inverse piezoelectric effect, and can convert electric energy into mechanical energy under the action of an electric field, so that the length of the piezoelectric ceramic is changed to generate displacement and driving force. The expansion and contraction amount of the piezoelectric ceramic has a good linear proportional relationship with the input voltage thereof, and the repetition precision is high, so the piezoelectric ceramic can be applied to facilities or equipment which need to precisely adjust the relative position relationship.
However, when the piezoelectric ceramic is used alone, the amount of relative displacement generated is small relative to the initial length of the piezoelectric ceramic in the expansion and contraction direction, and the displacement adjustment efficiency is not high. The displacement output by the piezoelectric ceramic can be amplified in gain by utilizing the elastic deformation of the metal structure.
At present, most piezoelectric ceramic actuators with elastic deformation gain amplification displacement output adopt a single-layer planar gain amplification structure, and the actuators need to increase the structural size for obtaining high-power amplification gain and are not suitable for occasions with limited working space and large displacement. And the larger the amount of elastic deformation experienced from the displacement input to the output, the higher the energy that the actuator itself needs to consume.
Therefore, further improvements are needed in the art.
Disclosure of Invention
The invention aims to provide a piezoelectric actuator with a displacement amplification effect, and aims to solve the problems that the relative output displacement of the piezoelectric actuator is small, the displacement amplification factor is low or the structure is not compact in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme:
a piezoelectric actuator, comprising: the piezoelectric ceramic vibration damping device comprises a first-stage elastic deformation plate, two second-stage elastic deformation plates, two external connection end covers and piezoelectric ceramic, wherein the first-stage elastic deformation plate is provided with a middle gap, and a first inner end surface and a second inner end surface of the middle gap are fixedly connected with a third end surface and a fourth end surface of the piezoelectric ceramic in the telescopic direction respectively; the two second-stage elastic deformation plates are symmetrically arranged on two sides of the first-stage elastic deformation plate and are respectively connected with the first-stage elastic deformation plate in series, and the two second-stage elastic deformation plates are connected in parallel; and the two external connection end covers are positioned on two sides of the piezoelectric ceramic in the telescopic direction, and the external connection end covers are fixedly connected with the second-stage elastic deformation plate.
Preferably, the overall structure of the piezoelectric actuator is symmetrical with respect to three mutually perpendicular planes constructed by an X axis, a Y axis and a Z axis in a space coordinate system, wherein the Y axis direction is consistent with the expansion and contraction direction of the piezoelectric ceramic.
Preferably, the configuration of the first-stage elastically deformable plate and the configuration of the second-stage elastically deformable plate are symmetrical with respect to the three mutually perpendicular planes.
Preferably, the first-stage elastic deformation plate and the second-stage elastic deformation plate are internally provided with flexible joint parts with the cross section size smaller than that of adjacent parts.
Preferably, the first-stage elastically-deformable plate includes an intermediate portion, a first end portion, a second end portion, a third end portion and a fourth end portion; the first end part and the second end part are symmetrically arranged at two ends of the middle part along the Y-axis direction; the third end part and the fourth end part are symmetrically arranged at two ends of the middle part along the X-axis direction; the first end part is provided with a first flexible joint part and a second flexible joint part which are symmetrical relative to the Y-axis direction; the second end part is provided with a third flexible joint part and a fourth flexible joint part which are symmetrical relative to the Y-axis direction; the middle part is provided with a fifth flexible joint part and a sixth flexible joint part which are symmetrical relative to the Y-axis direction; and the third end and the fourth end are respectively provided with a seventh flexible joint part, an eighth flexible joint part, a ninth flexible joint part and a tenth flexible joint part which are symmetrical relative to the X-axis direction.
Preferably, the second-stage elastically deformable plate includes an annular main body and first and second connecting portions formed integrally with the annular main body and arranged symmetrically with respect to the X-axis direction; the annular main body comprises a third connecting part and a fourth connecting part which are symmetrically arranged relative to the Y-axis direction along the X-axis direction; the third connecting part is provided with an eleventh flexible joint part and a twelfth flexible joint part which are symmetrically arranged relative to the X-axis direction, and the fourth connecting part is provided with a thirteenth flexible joint part and a fourteenth flexible joint part which are symmetrically arranged relative to the X-axis direction; the first connecting portion with annular main part junction and the second connecting portion with annular main part junction be provided with for fifteenth gentle festival position and the sixteenth gentle festival position that X axial direction symmetry set up.
Preferably, the contained angle that gentle festival position of eleventh, the gentle festival position of fifteenth and the gentle festival position of thirteenth constitute with the contained angle that gentle festival position of twelfth, the gentle festival position of sixteenth and the gentle festival position of fourteenth constitute is greater than the contained angle that first gentle festival position, the gentle festival position of fifth and the gentle festival position of third constitute with the contained angle that the gentle festival position of second, the gentle festival position of sixth and the gentle festival position of fourth constitute.
Preferably, the contained angle that first gentle festival position, the gentle festival position of fifth and the gentle festival position of third constitute, the contained angle that the gentle festival position of second, the gentle festival position of sixth and the gentle festival position of fourth constitute, the contained angle that the gentle festival position of eleventh, the gentle festival position of fifteenth and the gentle festival position of thirteenth constitute and the contained angle that the gentle festival position of twelfth, the gentle festival position of sixteenth and the gentle festival position of fourteenth constitute all are between 120-170 scopes.
Preferably, the size of the cross section of the first-stage elastic deformation plate taken by the plane formed by the X axis and the Y axis is larger than the size of the cross section of the second-stage elastic deformation plate taken by the plane formed by the X axis and the Y axis.
Preferably, bosses with threaded holes are arranged on the third end and the fourth end of the first-stage elastic deformation plate, and the bosses are respectively connected with the second-stage elastic deformation plates on two sides through screws; and the two external connection end covers are respectively and fixedly connected with the first connection part and the second connection part of the second-stage elastic deformation plate.
The piezoelectric actuator has the following beneficial effects:
the first-stage elastic deformation plate and the second-stage elastic deformation plate are arranged in the same plane space and adjacent upper and lower layer spaces of the rectangular columnar piezoelectric ceramics, and the displacement output by the piezoelectric ceramics is amplified twice through the elastic deformation of the inner and outer layer two-stage elastic deformation plates, so that the actuator is compact in structure, and high-power displacement amplification is obtained.
According to the invention, by fully utilizing a structural topology optimization technology, the overall section size of the designed first-stage elastic deformation plate in the main deformation direction is larger than that of the second-stage elastic deformation plate in the main deformation direction, so that elastic deformation is effectively transmitted from the inside to the outside of the piezoelectric actuator, the energy consumed by the piezoelectric actuator for driving the elastic deformation structure is reduced, and the driving efficiency of the actuator is improved.
The deformation principle of the inner and outer two-stage elastic deformation plates is based on the unequal telescopic relation of two right-angle sides of a right-angled triangle containing a small-angle included angle and the releasing and transferring effects of the flexible joint part on deformation, so that the two-stage elastic deformation plates have higher displacement amplification capacity, and a better displacement amplification effect is obtained after combined use.
Drawings
FIG. 1 is a schematic view of the overall appearance of a piezoelectric actuator according to an embodiment of the present invention;
FIG. 2 is an exploded view of the piezoelectric actuator of FIG. 1;
FIG. 3 is a front view of the overall structure of the piezoelectric actuator of FIG. 1;
FIG. 4 is a front view of a first stage elastically deformable plate in the piezoelectric actuator of FIG. 1;
FIG. 5 is a front view of a second stage elastically deformable plate in the piezoelectric actuator of FIG. 1.
Wherein:
10. piezoelectric actuator 1 and first-stage elastic deformation plate
2. Second-stage elastic deformation plate 3 and external connection end cover
4. Piezoelectric ceramic 5 and upper screw group
6. Lower screw group 7 and middle gap
8. First inner end surface 9, second inner end surface
11. A first end portion 12 and a second end portion
13. Third end 14, fourth end
15. Middle part 16, boss
1-3 parts of first flexible joint part and 1-4 parts of second flexible joint part
1-2 parts of the fifth flexible node part and 1-5 parts of the sixth flexible node part
1-9 parts of the third flexible joint, 1-8 parts of the fourth flexible joint and
1-1, 1-10 of eighth flexible node part and seventh flexible node part
1-6, 1-7 of the tenth flexible node part and the ninth flexible node part
21. First connection part 22, second connection part
23. Third connection part 24 and fourth connection part
2-1, 2-2 of the eleventh flexible node part and the fifteenth flexible node part
2-3, 2-4 of the thirteenth flexible node part and the fourteenth flexible node part
2-5, 2-6 of the sixteenth flexible node part and the twelfth flexible node part
20. Annular body 31, mounting portion
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
Referring to fig. 1 to 5, fig. 1 is a schematic overall appearance diagram of a piezoelectric actuator; FIG. 2 is an exploded view of the piezoelectric actuator of FIG. 1; FIG. 3 is a front view of the overall structure of the piezoelectric actuator of FIG. 1; FIG. 4 is a front view of a first stage elastically deformable plate in the piezoelectric actuator of FIG. 1; FIG. 5 is a front view of a second stage elastically deformable plate in the piezoelectric actuator of FIG. 1.
As shown in fig. 1, the present invention provides a piezoelectric actuator 10 including a first-stage elastically deformable plate 1, two second-stage elastically deformable plates 2, two external connection end caps 3, and a piezoelectric ceramic 4.
The first-stage elastic deformation plate 1 is provided with a middle gap 7, the middle gap 7 is provided with a first inner end surface 8 and a second inner end surface 9, and the first inner end surface 8 and the second inner end surface 9 are fixedly connected with a third end surface and a fourth end surface of the piezoelectric ceramic in the telescopic direction respectively.
The two second-stage elastic deformation plates 2 are symmetrically arranged on two sides of the first-stage elastic deformation plate 1 and are respectively connected with the first-stage elastic deformation plate 1 in series, and the two second-stage elastic deformation plates 2 are connected in parallel; two external connection end covers 3 are positioned on two sides of the piezoelectric ceramic 4 in the stretching direction, and the external connection end covers 3 are fixedly connected with the second-stage elastic deformation plate 2.
The directions of the X axis, the Y axis, and the Z axis in the space coordinate system are shown in fig. 1, wherein the direction of the Y axis is defined to coincide with the expansion and contraction direction of the piezoelectric ceramics 4. Three mutually perpendicular planes can be respectively constructed through an X axis, a Y axis and a Z axis.
Specifically, the overall structure of the piezoelectric actuator 10 is symmetrical with respect to three mutually perpendicular planes constructed by the X-axis, the Y-axis, and the Z-axis in the spatial coordinate system, and preferably, the structure of the first-stage elastic deformation plate 1 and the structure of the second-stage elastic deformation plate 2 are symmetrical with respect to the three mutually perpendicular planes.
The piezoelectric ceramic 4 has a rectangular column shape, the first-stage elastic deformation plate 1 is arranged in the coplanar space of the rectangular column-shaped piezoelectric ceramic 4, the second-stage elastic deformation plate 2 is arranged in the space of the piezoelectric ceramic 4 close to the upper layer and the lower layer, and the displacement output by the piezoelectric ceramic is amplified twice through the elastic deformation of the inner-layer and outer-layer two-stage elastic deformation plates, so that the piezoelectric actuator 10 is compact in structure and obtains high-power displacement amplification.
Referring to fig. 2 to 4, in the present embodiment, the first-stage elastically deformable plate 1 includes a middle portion 15, a first end portion 11, a second end portion 12, a third end portion 13, and a fourth end portion 14. The first end portion 11 and the second end portion 12 are symmetrically arranged at both ends of the intermediate portion 15 in the Y-axis direction (1-Y), and the first step portion 11, the second end portion 12 and the intermediate portion 15 constitute a main body portion of the first elastically deformable plate 1, the main body portion of the first elastically deformable plate 1 having the intermediate space 7. The third end portion 13 and the fourth end portion 14 are symmetrically disposed at both ends of the intermediate portion 15 in the X-axis (1-X) direction.
Specifically, bosses 16 with threaded holes are provided on the third end portion 13 and the fourth end portion 14 of the first-stage elastically deformable plate 1.
Referring to fig. 2, 3 and 5, the second-stage elastic deformation plate 2 includes a ring-shaped main body 20, and a first connection portion 21 and a second connection portion 22 formed integrally with the ring-shaped main body 20 and symmetrically arranged with respect to the X-axis (2-X) direction; the ring body 20 includes third and fourth connection portions 23 and 24 symmetrically disposed with respect to the Y-axis (2-Y) direction in the X-axis direction. The first connecting portion 21, the second connecting portion 22, the third connecting portion 23 and the fourth connecting portion 24 are provided with screw holes, respectively.
The first-stage elastically-deformable plate 1 is connected with the third connecting portion 23 and the fourth connecting portion 24 of the second-stage elastically-deformable plate 2 at both sides by the bosses 16 through the upper screw group 5 and the lower screw group 6, respectively.
The external connection end covers 3 are provided with mounting portions 31 with threaded holes, and the two external connection end covers 3 are connected with the first connecting portion 21 and the second connecting portion 22 of the second-stage elastic deformation plate 2 through the upper screw group 5 and the lower screw group 6 by the mounting portions 31 respectively.
Preferably, the first-stage elastically deformable plate 1 has a larger size in cross section taken by a plane formed by the X-axis (1-X) and the Y (1-Y) axes than the second-stage elastically deformable plate 2. According to the invention, by utilizing a structural topology optimization technology, the overall sectional dimension of the first-stage elastic deformation plate 1 in the deformation (extension) direction of the conductive ceramic 4 is larger than that of the second-stage elastic deformation plate 2 in the deformation (extension) direction of the conductive ceramic 4, so that the deformation of the elastic deformation plates 1 and 2 is effectively transmitted from the inside to the outside of the piezoelectric actuator 10, the energy consumed by the piezoelectric actuator 10 for driving the elastic deformation plates is reduced, and the driving efficiency of the piezoelectric actuator 10 is improved.
As shown in fig. 4 and 5, the first-stage elastically deformable plate 1 and the second-stage elastically deformable plate 2 have a flexible portion with a smaller cross-sectional size than the adjacent portion.
Specifically, the first end portion 11 of the first-stage elastically deformable plate 1 is provided with a first flexible joint portion 1-3 and a second flexible joint portion 1-4 which are symmetrical with respect to the Y-axis (1-Y) direction. As can be seen from fig. 4, the first-stage elastically deformable plate 1 is sectioned with a plane formed by the X (1-X) axis and the Z axis, and the first flexible joint portion 1-3 has a sectional size smaller than that of the adjacent portion of the first flexible joint portion 1-3; the cross-sectional dimension of the second flexible joint portion 1-4 is smaller than the cross-sectional dimension of the adjacent portion of the second flexible joint portion 1-4.
Specifically, the second end portion 12 of the first-stage elastically deformable plate 1 is provided with third flexible joint portions 1 to 9 and fourth flexible joint portions 1 to 8 which are symmetrical with respect to the Y-axis direction. As can be seen from fig. 4, the first-stage elastically deformable plate 1 is sectioned in a plane formed by the X-axis and the Z-axis, and the sectional size of the third flexible joint portion 1-9 is smaller than that of the adjacent portion of the third flexible joint portion 1-9; the cross-sectional dimension of the fourth flexible joint part 1-8 is smaller than the cross-sectional dimension of the adjacent part of the fourth flexible joint part 1-8.
The middle part 15 of the first-stage elastic deformation plate 1 is provided with a fifth flexible joint part 1-2 and a sixth flexible joint part 1-5 which are symmetrical relative to the Y-axis direction; similarly, the first-stage elastically deformable plate 1 is cut by a plane formed by the X axis and the Z axis, and the sectional dimensions of the fifth flexible joint portion 1-2 and the sixth flexible joint portion 1-5 are smaller than the sectional dimensions of the adjacent portions of the fifth flexible joint portion 1-2 and the sixth flexible joint portion 1-5, respectively.
The third end portion 13 of the first-stage elastically deformable plate 1 is provided with seventh flexible joint portions 1-10 and eighth flexible joint portions 1-1 which are symmetrical with respect to the X-axis direction. Similarly, the first-stage elastic deformation plate 1 is cut by a plane formed by an X axis and a Z axis, and the sectional sizes of the seventh flexible joint part 1-10 and the eighth flexible joint part 1-1 are respectively smaller than the sectional sizes of the adjacent parts of the seventh flexible joint part 1-10 and the eighth flexible joint part 1-1.
The fourth end portion 14 of the first-stage elastically deformable plate 1 is provided with ninth flexible joint portions 1 to 7 and tenth flexible joint portions 1 to 6 which are symmetrical with respect to the X-axis direction. Similarly, the first-stage elastically deformable plate 1 is cut by a plane formed by the X axis and the Z axis, and the sectional dimensions of the ninth flexible joint portions 1 to 7 and the tenth flexible joint portions 1 to 6 are smaller than the sectional dimensions of the adjacent portions of the ninth flexible joint portions 1 to 7 and the tenth flexible joint portions 1 to 6, respectively.
Preferably, the third connecting portion 23 of the second-stage elastic deformation plate 2 is provided with an eleventh flexible portion 2-1 and a twelfth flexible portion 2-6 which are symmetrically arranged with respect to the X-axis (2-X) direction, and the fourth connecting portion 24 is provided with a thirteenth flexible portion 2-3 and a fourteenth flexible portion 2-4 which are symmetrically arranged with respect to the X-axis direction; the joints of the first connecting part 21 and the ring body 20 and the joints of the second connecting part 22 and the ring body 20 are provided with fifteenth flexible joint parts 2-2 and sixteenth flexible joint parts 2-5 which are symmetrically arranged relative to the X-axis direction. Similarly, the second-stage elastic deformation plate 2 is cut by a plane formed by an X axis and a Z axis, and the cross-sectional sizes of the eleventh flexible joint part 2-1, the twelfth flexible joint part 2-6, the thirteenth flexible joint part 2-3, the fourteenth flexible joint part 2-4, the fifteenth flexible joint part 2-2 and the sixteenth flexible joint part 2-5 are respectively smaller than the cross-sectional sizes of the corresponding adjacent parts. The arrangement is beneficial to the deformation of the second-stage elastic deformation plate 2 under the influence of the outside.
Preferably, the included angle 2-7 formed by the eleventh flexible joint part 2-1, the fifteenth flexible joint part 2-2 and the thirteenth flexible joint part 2-3, the included angle 2-8 formed by the twelfth flexible joint part 2-6, the sixteenth flexible joint part 2-5 and the fourteenth flexible joint part 2-4 is larger than the included angle 1-11 formed by the first flexible joint part 1-3, the fifth flexible joint part 1-2 and the third flexible joint part 1-9, the included angle 1-4 formed by the second flexible joint part 1-5 and the fourth flexible joint part 1-8, and the included angle 1-12 formed by the sixth flexible joint part 1-5 and the fourth flexible joint part 1-8.
Preferably, an included angle 1-11 formed by the first flexible joint part 1-3, the fifth flexible joint part 1-2 and the third flexible joint part 1-9, an included angle 1-12 formed by the second flexible joint part 1-4, the sixth flexible joint part 1-5 and the fourth flexible joint part 1-8, an included angle 2-7 formed by the eleventh flexible joint part 2-1, the fifteenth flexible joint part 2-2 and the thirteenth flexible joint part 2-3, an included angle 2-6 formed by the twelfth flexible joint part 2-6, and an included angle 2-8 formed by the sixteenth flexible joint part 2-5 and the fourteenth flexible joint part 2-4 are obtuse angles. More preferably, the included angles 1-11, 1-12, 2-7 and 2-8 are all in the range of 120-170.
The deformation principle of the first-stage elastic deformation plate 1 and the second-stage elastic deformation plate 2 is based on the unequal telescopic relation of two right-angle sides of a right-angled triangle with a small-angle included angle and the releasing and transferring effect of a flexible joint part on deformation, so that the first-stage elastic deformation plate 1 and the second-stage elastic deformation plate 2 have high displacement amplification capacity, and the piezoelectric actuator 10 can obtain a better displacement amplification effect after being combined and used.
The operation of the piezoelectric actuator 10 according to the present invention will be further described.
Referring to fig. 1 to 5, in the piezoelectric actuator 10, a first-stage elastic deformation plate 1 and a second-stage elastic deformation plate 2 are disposed in a coplanar space and a space adjacent to an upper layer and a lower layer of a piezoelectric ceramic 4, and displacement output by the piezoelectric ceramic 4 is amplified twice through elastic deformation of the two stages of elastic deformation plates to increase displacement amplification factor.
Specifically, the overall sectional dimension of the first-stage elastic deformation plate 1 in the main deformation direction is larger than the overall sectional dimension of the second-stage elastic deformation plate 2 in the main deformation direction, so that elastic deformation is effectively transmitted from the inside to the outside of the piezoelectric actuator 10, the energy consumed by the piezoelectric actuator 10 for driving the first-stage elastic deformation plate 1 and the second-stage elastic deformation plate 2 is reduced, and the working efficiency of the piezoelectric actuator 10 is improved.
An external electric field is applied to the piezoelectric ceramic 4, the piezoelectric ceramic 4 is stretched in the 1-Y direction under the action of the inverse piezoelectric effect, the stretching of the conductive ceramic 4 in the 1-Y direction drives the flexible joint part on the first-stage elastic deformation plate 1 to be elastically deformed, so that the included angles of 1-11 and 1-12 are increased, and the contraction displacement of the first-stage elastic deformation plate 1 in the 1-X direction is larger than the stretching displacement of the first-stage elastic deformation plate in the 1-Y direction according to the change relation between the large acute angle corresponding side and the small acute angle corresponding side in the right triangle, so that the displacement of the piezoelectric ceramic 4 is amplified for the first time.
The contraction displacement and the stress of the first-stage elastic deformation plate 1 in the 1-X direction are transmitted to the 2-X direction of the second-stage elastic deformation plate 2 through the upper screw group 5 and the lower screw group 6, so that the flexible joint part on the second-stage elastic deformation plate 2 is elastically deformed, the included angles 2-7 and 2-8 are increased, and similarly, according to the change relation between the large acute angle corresponding edge and the small acute angle corresponding edge in the right triangle, the extension displacement of the second-stage elastic deformation plate 2 in the 2-Y direction is larger than the contraction displacement in the 1-X direction, so that the displacement of the piezoelectric ceramic 4 is amplified for the second time.
The two second-stage elastic deformation plates 2 are symmetrically arranged on two sides of the first-stage elastic deformation plate 1, and the purpose is to reduce the displacement component of the piezoelectric actuator 10 on the plane perpendicular to the 1-Y, so that the effective displacement of the plane where the 1-Y and the 1-X are located is improved. The piezoelectric actuator 10 finally transmits the displacement after two times of amplification to an external part or equipment connected with the piezoelectric actuator through the two external connecting end covers 3, so that the precise adjustment of larger displacement is realized.
The above-described embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (6)
1. A piezoelectric actuator, comprising: a first-stage elastic deformation plate, two second-stage elastic deformation plates, two external connecting end covers and piezoelectric ceramics,
the first-stage elastic deformation plate is provided with a middle gap, and a first inner end surface and a second inner end surface of the middle gap are respectively and fixedly connected with a third end surface and a fourth end surface of the piezoelectric ceramic in the telescopic direction;
the two second-stage elastic deformation plates are symmetrically arranged on two sides of the first-stage elastic deformation plate and are respectively connected with the first-stage elastic deformation plate in series, and the two second-stage elastic deformation plates are connected in parallel;
the two external connecting end covers are positioned on two sides of the piezoelectric ceramic in the telescopic direction, and the external connecting end covers are fixedly connected with the second-stage elastic deformation plate;
the integral structure of the piezoelectric actuator is symmetrical relative to three mutually perpendicular planes constructed by an X axis, a Y axis and a Z axis in a space coordinate system, wherein the Y axis direction is consistent with the piezoelectric ceramic stretching direction;
flexible joint parts with the section sizes smaller than those of adjacent parts exist in the first-stage elastic deformation plate and the second-stage elastic deformation plate;
the first-stage elastic deformation plate comprises a middle part, a first end part, a second end part, a third end part and a fourth end part; the first end part and the second end part are symmetrically arranged at two ends of the middle part along the Y-axis direction; the third end part and the fourth end part are symmetrically arranged at two ends of the middle part along the X-axis direction; the first end part is provided with a first flexible joint part and a second flexible joint part which are symmetrical relative to the Y-axis direction; the second end part is provided with a third flexible joint part and a fourth flexible joint part which are symmetrical relative to the Y-axis direction; the middle part is provided with a fifth flexible joint part and a sixth flexible joint part which are symmetrical relative to the Y-axis direction; the third end part and the fourth end part are respectively provided with a seventh flexible joint part, an eighth flexible joint part, a ninth flexible joint part and a tenth flexible joint part which are symmetrical relative to the X-axis direction;
the overall sectional dimension of the first-stage elastic deformation plate in the deformation direction of the piezoelectric ceramics is larger than that of the second-stage elastic deformation plate in the deformation direction of the piezoelectric ceramics; the size of the cross section of the first-stage elastic deformation plate cut by the plane formed by the X axis and the Y axis is larger than that of the cross section of the second-stage elastic deformation plate cut by the plane formed by the X axis and the Y axis.
2. The piezoelectric actuator as claimed in claim 1, wherein: the structure of the first-stage elastically deformable plate and the structure of the second-stage elastically deformable plate are symmetrical with respect to the three mutually perpendicular planes.
3. The piezoelectric actuator as claimed in claim 1, wherein: the second-stage elastic deformation plate comprises an annular main body and a first connecting part and a second connecting part which are integrally formed with the annular main body and are symmetrically arranged relative to the X-axis direction; the annular main body comprises a third connecting part and a fourth connecting part which are symmetrically arranged relative to the Y-axis direction along the X-axis direction; the third connecting part is provided with an eleventh flexible joint part and a twelfth flexible joint part which are symmetrically arranged relative to the X-axis direction, and the fourth connecting part is provided with a thirteenth flexible joint part and a fourteenth flexible joint part which are symmetrically arranged relative to the X-axis direction; the first connecting portion with annular main part junction and the second connecting portion with annular main part junction be provided with for fifteenth gentle festival position and the sixteenth gentle festival position that X axial direction symmetry set up.
4. The piezoelectric actuator as claimed in claim 3, wherein: the gentle position of festival of eleventh, the gentle position of festival of fifteenth and the gentle position of festival of thirteenth constitute with the gentle position of festival of twelfth, the gentle position of festival of sixteenth and the gentle position of festival of fourteenth constitute the contained angle is greater than the gentle position of festival of first gentle position of festival, the gentle position of festival of fifth and the gentle position of festival of third constitute with the gentle position of festival of second, the gentle position of festival of sixth and the gentle position of festival of fourth constitute contained angle.
5. The piezoelectric actuator as claimed in claim 4, wherein: the included angle that first gentle festival position, fifth gentle festival position and the gentle festival position of third constitute, the included angle that the gentle festival position of second, sixth and fourth constitutes, the gentle festival position of eleventh, fifteenth and thirteenth constitutes and the gentle festival position of twelfth, sixteenth and fourteenth constitutes all between 120-170 scope.
6. The piezoelectric actuator as claimed in claim 3, wherein: bosses with threaded holes are arranged on the third end part and the fourth end part of the first-stage elastic deformation plate, and the bosses are respectively connected with the second-stage elastic deformation plates positioned on the two sides through screws; and the two external connection end covers are respectively and fixedly connected with the first connection part and the second connection part of the second-stage elastic deformation plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811135506.8A CN109302097B (en) | 2018-09-28 | 2018-09-28 | Piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811135506.8A CN109302097B (en) | 2018-09-28 | 2018-09-28 | Piezoelectric actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109302097A CN109302097A (en) | 2019-02-01 |
| CN109302097B true CN109302097B (en) | 2020-11-24 |
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| CN201811135506.8A Active CN109302097B (en) | 2018-09-28 | 2018-09-28 | Piezoelectric actuator |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103022339A (en) * | 2012-12-28 | 2013-04-03 | 东南大学 | Orthogonal piezoelectric displacement amplifying mechanism |
| CN104362893A (en) * | 2014-10-14 | 2015-02-18 | 西安交通大学 | Angular displacement piezoelectric actuator with two-stage displacement amplifying structure |
| CN104901582A (en) * | 2015-05-19 | 2015-09-09 | 西安交通大学 | Plane walking actuator based on piezoelectric-parallel four-bar mechanisms and walking method |
| CN105429507A (en) * | 2015-12-12 | 2016-03-23 | 西安交通大学 | Piezoelectric torque actuator based on planar two-level displacement enlargement mechanism and actuating method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE19739594C2 (en) * | 1997-09-10 | 2001-09-06 | Daimler Chrysler Ag | Electrostrictive actuator |
| CN107328649B (en) * | 2017-08-24 | 2023-05-12 | 吉林大学 | Piezoelectric driving three-jaw bionic micro-size clamping mechanism based on flexible hinge |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103022339A (en) * | 2012-12-28 | 2013-04-03 | 东南大学 | Orthogonal piezoelectric displacement amplifying mechanism |
| CN104362893A (en) * | 2014-10-14 | 2015-02-18 | 西安交通大学 | Angular displacement piezoelectric actuator with two-stage displacement amplifying structure |
| CN104901582A (en) * | 2015-05-19 | 2015-09-09 | 西安交通大学 | Plane walking actuator based on piezoelectric-parallel four-bar mechanisms and walking method |
| CN105429507A (en) * | 2015-12-12 | 2016-03-23 | 西安交通大学 | Piezoelectric torque actuator based on planar two-level displacement enlargement mechanism and actuating method thereof |
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