CN109301037A - It is a kind of for manufacturing the laser aid of amorphous silicon membrane - Google Patents
It is a kind of for manufacturing the laser aid of amorphous silicon membrane Download PDFInfo
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- CN109301037A CN109301037A CN201811290488.0A CN201811290488A CN109301037A CN 109301037 A CN109301037 A CN 109301037A CN 201811290488 A CN201811290488 A CN 201811290488A CN 109301037 A CN109301037 A CN 109301037A
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- amorphous silicon
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- 229910021417 amorphous silicon Inorganic materials 0.000 title claims abstract description 29
- 239000012528 membrane Substances 0.000 title claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000009434 installation Methods 0.000 claims description 5
- 230000008901 benefit Effects 0.000 abstract description 3
- 230000005855 radiation Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 206010054949 Metaplasia Diseases 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000015689 metaplastic ossification Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket and laser generator, motor output end connects shaft, shaft is fixedly connected with driving semi-gear, driven gear is fixedly connected with threaded rod, the threaded rod other end extends on the right side of bracket on inner wall, and it is connect by bearing with holder pivots, sleeve upper end articulated connection second connecting rod, the second connecting rod other end the second fixed block of articulated connection, second fixed block is fixedly mounted in the second fixed link, first fixed link and the second fixed link are slidably connected with rack inner wall respectively, the straight-bar other end is fixedly connected with link block, link block is fixedly connected with mounting base by connecting shaft, mounting base upper surface is fixedly connected with mounting plate, laser generator is provided on mounting plate, reserved block is fixedly mounted in laser generator bottom surface, it is provided on reserved block and compatible with type block is carved carves type Card slot.The invention has the advantages that carry out uniformly carrying out radiation comprehensively to film and laser generator facilitates installing and dismounting.
Description
Technical field
The present invention relates to the technical field of amorphous silicon membrane, specifically a kind of laser dress for manufacturing amorphous silicon membrane
It sets.
Background technique
At high cost, low efficiency is the bottleneck of solar battery development, and thin-film solar cells is in drop low cost aspect than brilliant
Body silicon solar cell is with greater advantage: filming can greatly save expensive semiconductor material;The material of hull cell
Material preparation and battery are formed simultaneously, and can save many processes.Amorphous silicon thin-film solar cell is easy to implement extensive continuous
Metaplasia produces, while can make substrate using materials such as stainless steel or glass, thus is easily reduced cost, and can be made and build up knot
Structure improves efficiency, therefore obtains most attention and the rapid development of people.Laser technology is to be related to light, mechanical, electrical, material and inspection
One complex art of the multiple subjects such as survey.At present laser technology using more and more extensive, wherein be using maximum field
Technical field of laser processing.Laser processing technology be using high energy laser beam and matter interaction characteristic to material (including
Metal and nonmetallic) it cut, welded, being marked, is surface-treated, being punched, micro Process and as light source, identify the one of object
Gate technique.
Chinese Patent Application No. 201320466068.X and publication number CN203415609U discloses a kind of non-for manufacturing
The laser aid of polycrystal silicon film, including laser system, reaction chamber, sample heating device, pumped vacuum systems and gas handling system, laser
System is located at the surface of reaction chamber, and pumped vacuum systems is located at the lower right of reaction chamber, and gas handling system is located at reaction chamber
Side, sample heating device are placed in reaction chamber bottom center.The patent carries out phosphorus to amorphous silicon membrane using laser or boron is mixed
Miscellaneous, reaction speed is fast, and impurity activation rate is high, and uniformity is good, can prepare the preferable N-type of photoelectric properties/P-type non-crystalline silicon film.But
It is that there is laser aid to be fixed in processing rack, the problem of processing limitation occurs, it cannot be uniformly comprehensively to amorphous silicon
Film radiated and laser aid in laser generator belong to precision instrument, be usually screwed in rack, therefore
When carrying out detachable maintaining to laser generator, it is easy collision and damage laser generator, now, we have proposed one kind to be used for
Manufacture the laser aid of amorphous silicon membrane.
Summary of the invention
1, it to solve the problems, such as
Radiation comprehensively uniformly cannot be carried out to amorphous silicon membrane for existing laser aid and laser generator is not easy to tear open
The problem of unloading installation, the purpose of the present invention is to provide a kind of for manufacturing the laser aid of amorphous silicon membrane, above-mentioned to solve
The problem of being proposed in background technique.
2, technical solution
To achieve the above object, the invention provides the following technical scheme:
It is a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket and laser generator, on the left of the bracket on outer wall
Motor is fixedly mounted by tripod, the motor output end connects shaft, and the shaft is fixedly connected with driving semi-gear, described
Driving semi-gear engagement connection driven gear, the driven gear are fixedly connected with threaded rod, and the threaded rod other end extends to
It on the right side of bracket on inner wall, and is connect by bearing with holder pivots, the threaded rod screw joint casing, described sleeve pipe is along spiral shell
Rasp bar is symmetrical arranged, described sleeve pipe bottom end articulated connection first connecting rod, and the first connecting rod other end articulated connection first is fixed
Block, first fixed block are fixedly mounted in the first fixed link, described sleeve pipe upper end articulated connection second connecting rod, and described second
The connecting rod other end the second fixed block of articulated connection, second fixed block are fixedly mounted in the second fixed link, and described first connects
Bar, second connecting rod, the first fixed block and the second fixed block are symmetrical arranged along bracket, first fixed link and the second fixed link
It is slidably connected respectively with rack inner wall, second fixed link is located above the first fixed link.
As a further solution of the present invention: there are four being symmetrically arranged in first fixed link and the second fixed link
Mounting blocks, the mounting blocks are slidably connected with the first fixed link and the second fixed link respectively, and first fixed link and second is consolidated
Dual-axle hydraulic cylinder is fixedly mounted in fixed pole respectively, and the dual-axle hydraulic cylinder output end connects hydraulic column one, and the hydraulic column one is fixed
Connect mounting blocks.
As further scheme of the invention: the mounting blocks are fixedly connected with straight-bar, and the straight-bar other end is fixed to be connected
Link block is connect, the link block is fixedly connected with mounting base by connecting shaft, and the mounting base upper surface is fixedly connected with mounting plate, institute
It states and is provided with laser generator on mounting plate.
As further scheme of the invention: the first cavity is provided in the mounting plate, and upper end is provided with opening,
Hydraulic cylinder is fixedly mounted in first cavity, the hydraulic cylinder output end connects hydraulic column, and the hydraulic top end is fixed to be connected
First movement block is connect, the first movement block is provided with card slot, is provided with the second cavity in the first movement block.
As further scheme of the invention: being provided with the second movable block in second cavity, described second is mobile
Block is symmetrically installed sliding block, and the sliding block is slidably connected slide bar, and the slide bar is symmetrically and fixedly mounted in the second cavity, and described second
Movable block is fixedly connected with spring, and the spring is fixedly connected with the second cavity inner wall.
As further scheme of the invention: being provided with third cavity, the third cavity in second movable block
Interior fixed installation electric telescopic rod, the electric telescopic rod other end are fixedly connected with slide plate, and the slide plate and the second movable block are sliding
Dynamic connection.
As further scheme of the invention: being fixedly mounted on the slide plate and carve type block, the type block of carving is through second
Movable block, and be slidably connected with the second movable block.
As further scheme of the invention: reserved block, the reserved block is fixedly mounted in the laser generator bottom surface
It is adapted with card slot, is provided on the reserved block and compatible with type block is carved carves type card slot.
3, beneficial effect
Compared with prior art, the beneficial effects of the present invention are:
(1) present invention is dynamic by opening motor positive and inverse, drives driving semi-gear rotation, drives driven gear by engagement
Clearance-type rotation, driven gear drive threaded rod rotation, and threaded rod drives casing to move left and right, and casing passes through first connecting rod and the
Two connecting rods drive the first fixed link and the second fixed link to move up and down along rack inner wall respectively, meanwhile, dual-axle hydraulic cylinder is opened,
Mounting blocks are driven to move left and right respectively along the first fixed link and the second fixed link, the mounting blocks pass through straight-bar, link block, company
Spindle and mounting base move left and right, and mounting base drives laser generator to move left and right, and move left and right cooperation by laser generator
The intermittent rotation of threaded rod, and then can achieve and amorphous silicon membrane surface is uniformly comprehensively radiated;
(2) present invention control hydraulic cylinder drives hydraulic column elongation, and hydraulic column drives first movement block to be moved upward to the first cavity
Top, then the reserved block on laser generator is inserted into card slot, open electric telescopic rod elongation, drive slide plate edge
Move in third cavity, slide plate drive carves type block and is inserted into carving in type card slot on reserved block, at this point, spring is in compression shape
State so that carve type block with carve type card slot it is stronger abutted, finally, by hydraulic cylinder drive hydraulic column shrink, drive
First movement block is moved to the bottom of the first cavity, can complete the installment work of laser generator, similarly, can also complete
The dismantlement work of laser generator, and then the degree of automation is improved, it is convenient that laser generator is mounted and dismounted, it solves
When laser generator breaks down, it is not easy the problem of carrying out disassembly maintenance.
Detailed description of the invention
Fig. 1 is a kind of for manufacturing the structural schematic diagram of the laser aid of amorphous silicon membrane.
Fig. 2 is front view in a kind of laser aid for manufacturing amorphous silicon membrane.
Fig. 3 is a kind of structural schematic diagram of mounting plate in laser aid for manufacturing amorphous silicon membrane.
Fig. 4 is the knot of laser generator and reserved block connection relationship in a kind of laser aid for manufacturing amorphous silicon membrane
Structure schematic diagram.
In figure: 1, bracket;2, threaded rod;3, casing;4, first connecting rod;5, second connecting rod;6, the first fixed block;7, second
Fixed block;8, the first fixed link;9, the second fixed link;10, mounting blocks;11, straight-bar;12, link block;13, connecting shaft;14, pacify
Fill seat;15, mounting plate;16, laser generator;17, dual-axle hydraulic cylinder;18, driven gear;19, driving semi-gear;20, motor;
21, hydraulic cylinder;22, hydraulic column;23, first movement block;24, the first cavity;25, the second cavity;26, spring;27, slide bar;28,
Sliding block;29, the second movable block;30, third cavity;31, electric telescopic rod;32, slide plate;33, type block is carved;34, type card slot is carved;
35, reserved block.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Please refer to Fig. 1~4, it is a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket in the embodiment of the present invention
1 and laser generator 16, pass through tripod on the 1 left side outer wall of bracket and motor 20,20 output end of motor is fixedly mounted
Shaft is connected, the shaft is fixedly connected with driving semi-gear 19, and the engagement of the driving semi-gear 19 connection driven gear 18 is described
Driven gear 18 is fixedly connected with threaded rod 2, and 2 other end of threaded rod extends on 1 right side inner wall of bracket, and by bearing with
Bracket 1 is rotatablely connected, 2 screw joint casing 3 of threaded rod, and described sleeve pipe 3 is symmetrical arranged along threaded rod 2, described sleeve pipe 3
Bottom end articulated connection first connecting rod 4, the first fixed block 6 of 4 other end of the first connecting rod articulated connection, first fixed block 6
It is fixedly mounted in the first fixed link 8,3 upper end of described sleeve pipe articulated connection second connecting rod 5,5 other end of the second connecting rod hinge
The second fixed block 7 is connect in succession, and second fixed block 7 is fixedly mounted in the second fixed link 9, and the first connecting rod 4, second connects
Bar 5, the first fixed block 6 and the second fixed block 7 are symmetrical arranged along bracket 1, and first fixed link 8 and the second fixed link 9 are divided
It is not slidably connected with 1 inner wall of bracket, second fixed link 9 is located at the top of the first fixed link 8, first fixed link 8 and the
It is symmetrically arranged in two fixed links 9 there are four mounting blocks 10, the mounting blocks 10 are fixed with the first fixed link 8 and second respectively
Bar 9 is slidably connected, and dual-axle hydraulic cylinder 17, the dual-axle hydraulic is fixedly mounted in first fixed link 8 and the second fixed link 9 respectively
17 output end of cylinder connects hydraulic column one, and the hydraulic column one is fixedly connected with mounting blocks 10, and the mounting blocks 10 are fixedly connected with straight-bar
11,11 other end of straight-bar is fixedly connected with link block 12, and the link block 12 is fixedly connected with mounting base 14 by connecting shaft 13,
14 upper surface of mounting base is fixedly connected with mounting plate 15, is provided with laser generator 16 on the mounting plate 15, passes through utilization
The laser generator 16 of setting launches laser beam, and laser beam is radiated film surface, and absorbs laser energy, and temperature is anxious
Play rises to fusing point, and then, crystallisation by cooling forms amorphous silicon membrane, and laser generator 16 is existing public technology, herein no longer
It repeats, by opening 20 positive and negative rotation of motor, drives driving semi-gear 19 to rotate, by between engagement drive driven gear 18
Gap type rotation, driven gear 18 drive threaded rod 2 to rotate, and threaded rod 2 drives casing 3 to move left and right, and casing 3 passes through first connecting rod
4 and second connecting rod 5 drive the first fixed link 8 and the second fixed link 9 to move up and down along 1 inner wall of bracket respectively, meanwhile, open double
Axis hydraulic cylinder 17 drives mounting blocks 10 to move left and right respectively along the first fixed link 8 and the second fixed link 9, the mounting blocks 10
It is moved left and right by straight-bar 11, link block 12, connecting shaft 13 and mounting base 14, mounting base 14 drives laser generator 16 or so to move
It is dynamic, it is moved left and right by laser generator 16 and is combined with the intermittent rotation of threaded rod 2, and then can achieve to amorphous silicon membrane table
Face uniformly comprehensively radiates.
The first cavity 24 is provided in the mounting plate 15, and upper end is provided with opening, fixes in first cavity 24
Hydraulic cylinder 21 is installed, 21 output end of hydraulic cylinder connects hydraulic column 22, and 22 top of hydraulic column is fixedly connected with first movement
Block 23, the first movement block 23 are provided with card slot, and the second cavity 25 is provided in the first movement block 23, and described second is empty
It is provided with the second movable block 29 in chamber 25, second movable block 29 is symmetrically installed sliding block 28, and the sliding block 28 is slidably connected cunning
Bar 27, the slide bar 27 are symmetrically and fixedly mounted in the second cavity 25, and second movable block 29 is fixedly connected with spring 26, described
Spring 26 is fixedly connected with 25 inner wall of the second cavity, and third cavity 30 is provided in second movable block 29, and the third is empty
Be fixedly mounted electric telescopic rod 31 in chamber 30,31 other end of electric telescopic rod is fixedly connected with slide plate 32, the slide plate 32 with
Second movable block 29 is slidably connected, and is fixedly mounted on the slide plate 32 and carves type block 33, and the type block 33 of carving is through the second movable block
29, and be slidably connected with the second movable block 29, reserved block 35, the reserved block 35 is fixedly mounted in 16 bottom surface of laser generator
Be adapted with card slot, be provided on the reserved block 35 it is compatible with type block 33 is carved carve type card slot 34, control 21 band of hydraulic cylinder
Hydrodynamic compression leg 22 extends, and the drive first movement block 23 of hydraulic column 22 is moved upward to the top of the first cavity 24, then by laser
Reserved block 35 on generator 16 is inserted into card slot, is extended opening electric telescopic rod 31, drives slide plate 32 along third sky
It is moved in chamber 30, the drive of slide plate 32 carves type block 33 and is inserted into carving in type card slot 34 on reserved block 35, at this point, spring 26 is in pressure
Contracting state so that carve type block 33 with carve type card slot 34 it is stronger abutted, finally, by hydraulic cylinder 21 drive hydraulic column
22 shrink, and drive first movement block 23 to be moved to the bottom of the first cavity 24, can complete the installment work of laser generator 16,
Similarly, it drives first movement block 23 to be moved upward to the top of the first cavity 24 by hydraulic column 22, then makes electric telescopic rod
31 shrink, and drive is carved type block 33 and removed from carving in type card slot 34 on reserved block 35, can complete tearing open for laser generator 16
Work is unloaded, and then improves the degree of automation, it is convenient that laser generator 16 is mounted and dismounted, solve laser generator 16
When failure, it is not easy the problem of carrying out disassembly maintenance.
The working principle of the invention is: by opening 20 positive and negative rotation of motor, driving driving semi-gear 19 to rotate, by nibbling
Cooperation is with the rotation of 18 clearance-type of driven gear is driven, and driven gear 18 drives threaded rod 2 to rotate, and threaded rod 2 drives casing 3 or so
Mobile, casing 3 drives the first fixed link 8 and the second fixed link 9 along in bracket 1 respectively by first connecting rod 4 and second connecting rod 5
Wall moves up and down, meanwhile, dual-axle hydraulic cylinder 17 is opened, drives mounting blocks 10 respectively along the first fixed link 8 and the second fixed link 9
It moves left and right, the mounting blocks 10 are moved left and right by straight-bar 11, link block 12, connecting shaft 13 and mounting base 14, mounting base 14
It drives laser generator 16 to move left and right, is moved left and right by laser generator 16 and be combined with the intermittent rotation of threaded rod 2, in turn
It can achieve and amorphous silicon membrane surface is uniformly comprehensively radiated, in addition, control hydraulic cylinder 21 drives hydraulic column 22 to extend, it is hydraulic
The drive first movement block 23 of column 22 is moved upward to the top of the first cavity 24, then by the reserved block 35 on laser generator 16
It is inserted into card slot, is extended opening electric telescopic rod 31, slide plate 32 is driven to move in third cavity 30, slide plate 32 drives
Carve type block 33 and be inserted into carving in type card slot 34 on reserved block 35, at this point, spring 26 is in compressive state so that carve type block 33 with
It carves type card slot 34 to be abutted strongerly, finally, driving hydraulic column 22 to shrink by hydraulic cylinder 21, drives first movement block
23 are moved to the bottom of the first cavity 24, can complete the installment work of laser generator 16, similarly, are driven by hydraulic column 22
First movement block 23 is moved upward to the top of the first cavity 24, then make electric telescopic rod 31 shrink, drive carve type block 33 from
Carving in type card slot 34 on reserved block 35 removes, and can complete the dismantlement work of laser generator 16, and then improve automation
Degree, it is convenient that laser generator 16 is mounted and dismounted, when solving the failure of laser generator 16, it is not easy to be torn open
The problem of unloading maintenance.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (8)
1. a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket (1) and laser generator (16), feature exists
In by tripod fixed installation motor (20) on outer wall on the left of the bracket (1), motor (20) the output end connection turns
Axis, the shaft are fixedly connected driving semi-gear (19), driving semi-gear (19) engagement connection driven gear (18), described
Driven gear (18) is fixedly connected threaded rod (2), and threaded rod (2) other end extends on the right side of bracket (1) on inner wall, and logical
It crosses bearing and bracket (1) is rotatablely connected, threaded rod (2) screw joint casing (3), described sleeve pipe (3) is along threaded rod (2)
It is symmetrical arranged, described sleeve pipe (3) bottom end is articulated and connected first connecting rod (4), first connecting rod (4) other end articulated connection first
Fixed block (6), first fixed block (6) are fixedly mounted on the first fixed link (8), the articulated connection of described sleeve pipe (3) upper end
Second connecting rod (5), second connecting rod (5) other end are articulated and connected the second fixed block (7), and second fixed block (7) is fixed
It is mounted on the second fixed link (9), the first connecting rod (4), second connecting rod (5), the first fixed block (6) and the second fixed block
(7) it is symmetrical arranged along bracket (1), first fixed link (8) and the second fixed link (9) are slided with bracket (1) inner wall respectively
Connection, second fixed link (9) are located above the first fixed link (8).
2. according to claim 1 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that described first
It is symmetrically arranged in fixed link (8) and the second fixed link (9) there are four mounting blocks (10), the mounting blocks (10) are respectively with the
One fixed link (8) and the second fixed link (9) are slidably connected, and first fixed link (8) and the second fixed link (9) fix peace respectively
It fills dual-axle hydraulic cylinder (17), dual-axle hydraulic cylinder (17) output end connects hydraulic column one, and the hydraulic column one is fixedly connected with peace
It fills block (10).
3. according to claim 1 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the installation
Block (10) is fixedly connected straight-bar (11), and straight-bar (11) other end is fixedly connected link block (12), and the link block (12) is logical
It crosses connecting shaft (13) to be fixedly connected mounting base (14), mounting base (14) upper surface is fixedly connected with mounting plate (15), the peace
Laser generator (16) are provided in loading board (15).
4. according to claim 3 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the installation
It is provided with the first cavity (24) in plate (15), and upper end is provided with opening, and hydraulic cylinder is fixedly mounted in first cavity (24)
(21), hydraulic cylinder (21) output end connection hydraulic column (22), hydraulic column (22) top is fixedly connected with first movement block
(23), the first movement block (23) is provided with card slot, is provided with the second cavity (25) in the first movement block (23).
5. according to claim 4 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that described second
It is provided with the second movable block (29) in cavity (25), second movable block (29) is symmetrically installed sliding block (28), the sliding block
(28) be slidably connected slide bar (27), and the slide bar (27) is symmetrically and fixedly mounted in the second cavity (25), second movable block
(29) it is fixedly connected spring (26), the spring (26) is fixedly connected with the second cavity (25) inner wall.
6. according to claim 5 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that described second
It is provided with third cavity (30) in movable block (29), electric telescopic rod (31) is fixedly mounted in the third cavity (30), it is described
Electric telescopic rod (31) other end is fixedly connected slide plate (32), and the slide plate (32) is slidably connected with the second movable block (29).
7. according to claim 6 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the slide plate
(32) be fixedly mounted and carve type block (33) on, described carve type block (33) through the second movable block (29), and with the second movable block (29)
It is slidably connected.
8. according to claim 1 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the laser
Reserved block (35) are fixedly mounted in generator (16) bottom surface, and the reserved block (35) is adapted with card slot, on the reserved block (35)
It is provided with and carves that type block (33) is compatible carves type card slot (34).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811290488.0A CN109301037A (en) | 2018-10-31 | 2018-10-31 | It is a kind of for manufacturing the laser aid of amorphous silicon membrane |
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CN201811290488.0A CN109301037A (en) | 2018-10-31 | 2018-10-31 | It is a kind of for manufacturing the laser aid of amorphous silicon membrane |
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CN201811290488.0A Withdrawn CN109301037A (en) | 2018-10-31 | 2018-10-31 | It is a kind of for manufacturing the laser aid of amorphous silicon membrane |
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CN113091702A (en) * | 2021-05-16 | 2021-07-09 | 河南和兴工程建设有限公司 | Road and bridge settlement difference real-time monitoring system and method thereof |
-
2018
- 2018-10-31 CN CN201811290488.0A patent/CN109301037A/en not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110146667A (en) * | 2019-06-25 | 2019-08-20 | 广州市婵昕生物科技有限责任公司 | A kind of portable type instrument for detecting pesticide residue through with function of temperature control |
CN113091702A (en) * | 2021-05-16 | 2021-07-09 | 河南和兴工程建设有限公司 | Road and bridge settlement difference real-time monitoring system and method thereof |
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Effective date of registration: 20190620 Address after: 528401 District A, No. 1 Hongji Road, West District, Zhongshan City, Guangdong Province Applicant after: Zhongshan Quan Xin Intelligent Lighting Co., Ltd. Address before: 528437 Zhang Enterprise Incubator, 70 Zhongshan Port Avenue, Torch Development Zone, Zhongshan City, Guangdong Province, 7 buildings, 4 floors, 407 rooms B Applicant before: Zhongshan wisdom Automation Technology Co., Ltd. |
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