CN109301037A - It is a kind of for manufacturing the laser aid of amorphous silicon membrane - Google Patents

It is a kind of for manufacturing the laser aid of amorphous silicon membrane Download PDF

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Publication number
CN109301037A
CN109301037A CN201811290488.0A CN201811290488A CN109301037A CN 109301037 A CN109301037 A CN 109301037A CN 201811290488 A CN201811290488 A CN 201811290488A CN 109301037 A CN109301037 A CN 109301037A
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CN
China
Prior art keywords
block
fixedly connected
fixed link
fixed
amorphous silicon
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201811290488.0A
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Chinese (zh)
Inventor
何武岗
代恒
刘文仓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhongshan Quan Xin Intelligent Lighting Co., Ltd.
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Zhongshan Wisdom Automation Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Zhongshan Wisdom Automation Technology Co Ltd filed Critical Zhongshan Wisdom Automation Technology Co Ltd
Priority to CN201811290488.0A priority Critical patent/CN109301037A/en
Publication of CN109301037A publication Critical patent/CN109301037A/en
Withdrawn legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/202Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Silicon Compounds (AREA)

Abstract

The invention discloses a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket and laser generator, motor output end connects shaft, shaft is fixedly connected with driving semi-gear, driven gear is fixedly connected with threaded rod, the threaded rod other end extends on the right side of bracket on inner wall, and it is connect by bearing with holder pivots, sleeve upper end articulated connection second connecting rod, the second connecting rod other end the second fixed block of articulated connection, second fixed block is fixedly mounted in the second fixed link, first fixed link and the second fixed link are slidably connected with rack inner wall respectively, the straight-bar other end is fixedly connected with link block, link block is fixedly connected with mounting base by connecting shaft, mounting base upper surface is fixedly connected with mounting plate, laser generator is provided on mounting plate, reserved block is fixedly mounted in laser generator bottom surface, it is provided on reserved block and compatible with type block is carved carves type Card slot.The invention has the advantages that carry out uniformly carrying out radiation comprehensively to film and laser generator facilitates installing and dismounting.

Description

It is a kind of for manufacturing the laser aid of amorphous silicon membrane
Technical field
The present invention relates to the technical field of amorphous silicon membrane, specifically a kind of laser dress for manufacturing amorphous silicon membrane It sets.
Background technique
At high cost, low efficiency is the bottleneck of solar battery development, and thin-film solar cells is in drop low cost aspect than brilliant Body silicon solar cell is with greater advantage: filming can greatly save expensive semiconductor material;The material of hull cell Material preparation and battery are formed simultaneously, and can save many processes.Amorphous silicon thin-film solar cell is easy to implement extensive continuous Metaplasia produces, while can make substrate using materials such as stainless steel or glass, thus is easily reduced cost, and can be made and build up knot Structure improves efficiency, therefore obtains most attention and the rapid development of people.Laser technology is to be related to light, mechanical, electrical, material and inspection One complex art of the multiple subjects such as survey.At present laser technology using more and more extensive, wherein be using maximum field Technical field of laser processing.Laser processing technology be using high energy laser beam and matter interaction characteristic to material (including Metal and nonmetallic) it cut, welded, being marked, is surface-treated, being punched, micro Process and as light source, identify the one of object Gate technique.
Chinese Patent Application No. 201320466068.X and publication number CN203415609U discloses a kind of non-for manufacturing The laser aid of polycrystal silicon film, including laser system, reaction chamber, sample heating device, pumped vacuum systems and gas handling system, laser System is located at the surface of reaction chamber, and pumped vacuum systems is located at the lower right of reaction chamber, and gas handling system is located at reaction chamber Side, sample heating device are placed in reaction chamber bottom center.The patent carries out phosphorus to amorphous silicon membrane using laser or boron is mixed Miscellaneous, reaction speed is fast, and impurity activation rate is high, and uniformity is good, can prepare the preferable N-type of photoelectric properties/P-type non-crystalline silicon film.But It is that there is laser aid to be fixed in processing rack, the problem of processing limitation occurs, it cannot be uniformly comprehensively to amorphous silicon Film radiated and laser aid in laser generator belong to precision instrument, be usually screwed in rack, therefore When carrying out detachable maintaining to laser generator, it is easy collision and damage laser generator, now, we have proposed one kind to be used for Manufacture the laser aid of amorphous silicon membrane.
Summary of the invention
1, it to solve the problems, such as
Radiation comprehensively uniformly cannot be carried out to amorphous silicon membrane for existing laser aid and laser generator is not easy to tear open The problem of unloading installation, the purpose of the present invention is to provide a kind of for manufacturing the laser aid of amorphous silicon membrane, above-mentioned to solve The problem of being proposed in background technique.
2, technical solution
To achieve the above object, the invention provides the following technical scheme:
It is a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket and laser generator, on the left of the bracket on outer wall Motor is fixedly mounted by tripod, the motor output end connects shaft, and the shaft is fixedly connected with driving semi-gear, described Driving semi-gear engagement connection driven gear, the driven gear are fixedly connected with threaded rod, and the threaded rod other end extends to It on the right side of bracket on inner wall, and is connect by bearing with holder pivots, the threaded rod screw joint casing, described sleeve pipe is along spiral shell Rasp bar is symmetrical arranged, described sleeve pipe bottom end articulated connection first connecting rod, and the first connecting rod other end articulated connection first is fixed Block, first fixed block are fixedly mounted in the first fixed link, described sleeve pipe upper end articulated connection second connecting rod, and described second The connecting rod other end the second fixed block of articulated connection, second fixed block are fixedly mounted in the second fixed link, and described first connects Bar, second connecting rod, the first fixed block and the second fixed block are symmetrical arranged along bracket, first fixed link and the second fixed link It is slidably connected respectively with rack inner wall, second fixed link is located above the first fixed link.
As a further solution of the present invention: there are four being symmetrically arranged in first fixed link and the second fixed link Mounting blocks, the mounting blocks are slidably connected with the first fixed link and the second fixed link respectively, and first fixed link and second is consolidated Dual-axle hydraulic cylinder is fixedly mounted in fixed pole respectively, and the dual-axle hydraulic cylinder output end connects hydraulic column one, and the hydraulic column one is fixed Connect mounting blocks.
As further scheme of the invention: the mounting blocks are fixedly connected with straight-bar, and the straight-bar other end is fixed to be connected Link block is connect, the link block is fixedly connected with mounting base by connecting shaft, and the mounting base upper surface is fixedly connected with mounting plate, institute It states and is provided with laser generator on mounting plate.
As further scheme of the invention: the first cavity is provided in the mounting plate, and upper end is provided with opening, Hydraulic cylinder is fixedly mounted in first cavity, the hydraulic cylinder output end connects hydraulic column, and the hydraulic top end is fixed to be connected First movement block is connect, the first movement block is provided with card slot, is provided with the second cavity in the first movement block.
As further scheme of the invention: being provided with the second movable block in second cavity, described second is mobile Block is symmetrically installed sliding block, and the sliding block is slidably connected slide bar, and the slide bar is symmetrically and fixedly mounted in the second cavity, and described second Movable block is fixedly connected with spring, and the spring is fixedly connected with the second cavity inner wall.
As further scheme of the invention: being provided with third cavity, the third cavity in second movable block Interior fixed installation electric telescopic rod, the electric telescopic rod other end are fixedly connected with slide plate, and the slide plate and the second movable block are sliding Dynamic connection.
As further scheme of the invention: being fixedly mounted on the slide plate and carve type block, the type block of carving is through second Movable block, and be slidably connected with the second movable block.
As further scheme of the invention: reserved block, the reserved block is fixedly mounted in the laser generator bottom surface It is adapted with card slot, is provided on the reserved block and compatible with type block is carved carves type card slot.
3, beneficial effect
Compared with prior art, the beneficial effects of the present invention are:
(1) present invention is dynamic by opening motor positive and inverse, drives driving semi-gear rotation, drives driven gear by engagement Clearance-type rotation, driven gear drive threaded rod rotation, and threaded rod drives casing to move left and right, and casing passes through first connecting rod and the Two connecting rods drive the first fixed link and the second fixed link to move up and down along rack inner wall respectively, meanwhile, dual-axle hydraulic cylinder is opened, Mounting blocks are driven to move left and right respectively along the first fixed link and the second fixed link, the mounting blocks pass through straight-bar, link block, company Spindle and mounting base move left and right, and mounting base drives laser generator to move left and right, and move left and right cooperation by laser generator The intermittent rotation of threaded rod, and then can achieve and amorphous silicon membrane surface is uniformly comprehensively radiated;
(2) present invention control hydraulic cylinder drives hydraulic column elongation, and hydraulic column drives first movement block to be moved upward to the first cavity Top, then the reserved block on laser generator is inserted into card slot, open electric telescopic rod elongation, drive slide plate edge Move in third cavity, slide plate drive carves type block and is inserted into carving in type card slot on reserved block, at this point, spring is in compression shape State so that carve type block with carve type card slot it is stronger abutted, finally, by hydraulic cylinder drive hydraulic column shrink, drive First movement block is moved to the bottom of the first cavity, can complete the installment work of laser generator, similarly, can also complete The dismantlement work of laser generator, and then the degree of automation is improved, it is convenient that laser generator is mounted and dismounted, it solves When laser generator breaks down, it is not easy the problem of carrying out disassembly maintenance.
Detailed description of the invention
Fig. 1 is a kind of for manufacturing the structural schematic diagram of the laser aid of amorphous silicon membrane.
Fig. 2 is front view in a kind of laser aid for manufacturing amorphous silicon membrane.
Fig. 3 is a kind of structural schematic diagram of mounting plate in laser aid for manufacturing amorphous silicon membrane.
Fig. 4 is the knot of laser generator and reserved block connection relationship in a kind of laser aid for manufacturing amorphous silicon membrane Structure schematic diagram.
In figure: 1, bracket;2, threaded rod;3, casing;4, first connecting rod;5, second connecting rod;6, the first fixed block;7, second Fixed block;8, the first fixed link;9, the second fixed link;10, mounting blocks;11, straight-bar;12, link block;13, connecting shaft;14, pacify Fill seat;15, mounting plate;16, laser generator;17, dual-axle hydraulic cylinder;18, driven gear;19, driving semi-gear;20, motor; 21, hydraulic cylinder;22, hydraulic column;23, first movement block;24, the first cavity;25, the second cavity;26, spring;27, slide bar;28, Sliding block;29, the second movable block;30, third cavity;31, electric telescopic rod;32, slide plate;33, type block is carved;34, type card slot is carved; 35, reserved block.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
Please refer to Fig. 1~4, it is a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket in the embodiment of the present invention 1 and laser generator 16, pass through tripod on the 1 left side outer wall of bracket and motor 20,20 output end of motor is fixedly mounted Shaft is connected, the shaft is fixedly connected with driving semi-gear 19, and the engagement of the driving semi-gear 19 connection driven gear 18 is described Driven gear 18 is fixedly connected with threaded rod 2, and 2 other end of threaded rod extends on 1 right side inner wall of bracket, and by bearing with Bracket 1 is rotatablely connected, 2 screw joint casing 3 of threaded rod, and described sleeve pipe 3 is symmetrical arranged along threaded rod 2, described sleeve pipe 3 Bottom end articulated connection first connecting rod 4, the first fixed block 6 of 4 other end of the first connecting rod articulated connection, first fixed block 6 It is fixedly mounted in the first fixed link 8,3 upper end of described sleeve pipe articulated connection second connecting rod 5,5 other end of the second connecting rod hinge The second fixed block 7 is connect in succession, and second fixed block 7 is fixedly mounted in the second fixed link 9, and the first connecting rod 4, second connects Bar 5, the first fixed block 6 and the second fixed block 7 are symmetrical arranged along bracket 1, and first fixed link 8 and the second fixed link 9 are divided It is not slidably connected with 1 inner wall of bracket, second fixed link 9 is located at the top of the first fixed link 8, first fixed link 8 and the It is symmetrically arranged in two fixed links 9 there are four mounting blocks 10, the mounting blocks 10 are fixed with the first fixed link 8 and second respectively Bar 9 is slidably connected, and dual-axle hydraulic cylinder 17, the dual-axle hydraulic is fixedly mounted in first fixed link 8 and the second fixed link 9 respectively 17 output end of cylinder connects hydraulic column one, and the hydraulic column one is fixedly connected with mounting blocks 10, and the mounting blocks 10 are fixedly connected with straight-bar 11,11 other end of straight-bar is fixedly connected with link block 12, and the link block 12 is fixedly connected with mounting base 14 by connecting shaft 13, 14 upper surface of mounting base is fixedly connected with mounting plate 15, is provided with laser generator 16 on the mounting plate 15, passes through utilization The laser generator 16 of setting launches laser beam, and laser beam is radiated film surface, and absorbs laser energy, and temperature is anxious Play rises to fusing point, and then, crystallisation by cooling forms amorphous silicon membrane, and laser generator 16 is existing public technology, herein no longer It repeats, by opening 20 positive and negative rotation of motor, drives driving semi-gear 19 to rotate, by between engagement drive driven gear 18 Gap type rotation, driven gear 18 drive threaded rod 2 to rotate, and threaded rod 2 drives casing 3 to move left and right, and casing 3 passes through first connecting rod 4 and second connecting rod 5 drive the first fixed link 8 and the second fixed link 9 to move up and down along 1 inner wall of bracket respectively, meanwhile, open double Axis hydraulic cylinder 17 drives mounting blocks 10 to move left and right respectively along the first fixed link 8 and the second fixed link 9, the mounting blocks 10 It is moved left and right by straight-bar 11, link block 12, connecting shaft 13 and mounting base 14, mounting base 14 drives laser generator 16 or so to move It is dynamic, it is moved left and right by laser generator 16 and is combined with the intermittent rotation of threaded rod 2, and then can achieve to amorphous silicon membrane table Face uniformly comprehensively radiates.
The first cavity 24 is provided in the mounting plate 15, and upper end is provided with opening, fixes in first cavity 24 Hydraulic cylinder 21 is installed, 21 output end of hydraulic cylinder connects hydraulic column 22, and 22 top of hydraulic column is fixedly connected with first movement Block 23, the first movement block 23 are provided with card slot, and the second cavity 25 is provided in the first movement block 23, and described second is empty It is provided with the second movable block 29 in chamber 25, second movable block 29 is symmetrically installed sliding block 28, and the sliding block 28 is slidably connected cunning Bar 27, the slide bar 27 are symmetrically and fixedly mounted in the second cavity 25, and second movable block 29 is fixedly connected with spring 26, described Spring 26 is fixedly connected with 25 inner wall of the second cavity, and third cavity 30 is provided in second movable block 29, and the third is empty Be fixedly mounted electric telescopic rod 31 in chamber 30,31 other end of electric telescopic rod is fixedly connected with slide plate 32, the slide plate 32 with Second movable block 29 is slidably connected, and is fixedly mounted on the slide plate 32 and carves type block 33, and the type block 33 of carving is through the second movable block 29, and be slidably connected with the second movable block 29, reserved block 35, the reserved block 35 is fixedly mounted in 16 bottom surface of laser generator Be adapted with card slot, be provided on the reserved block 35 it is compatible with type block 33 is carved carve type card slot 34, control 21 band of hydraulic cylinder Hydrodynamic compression leg 22 extends, and the drive first movement block 23 of hydraulic column 22 is moved upward to the top of the first cavity 24, then by laser Reserved block 35 on generator 16 is inserted into card slot, is extended opening electric telescopic rod 31, drives slide plate 32 along third sky It is moved in chamber 30, the drive of slide plate 32 carves type block 33 and is inserted into carving in type card slot 34 on reserved block 35, at this point, spring 26 is in pressure Contracting state so that carve type block 33 with carve type card slot 34 it is stronger abutted, finally, by hydraulic cylinder 21 drive hydraulic column 22 shrink, and drive first movement block 23 to be moved to the bottom of the first cavity 24, can complete the installment work of laser generator 16, Similarly, it drives first movement block 23 to be moved upward to the top of the first cavity 24 by hydraulic column 22, then makes electric telescopic rod 31 shrink, and drive is carved type block 33 and removed from carving in type card slot 34 on reserved block 35, can complete tearing open for laser generator 16 Work is unloaded, and then improves the degree of automation, it is convenient that laser generator 16 is mounted and dismounted, solve laser generator 16 When failure, it is not easy the problem of carrying out disassembly maintenance.
The working principle of the invention is: by opening 20 positive and negative rotation of motor, driving driving semi-gear 19 to rotate, by nibbling Cooperation is with the rotation of 18 clearance-type of driven gear is driven, and driven gear 18 drives threaded rod 2 to rotate, and threaded rod 2 drives casing 3 or so Mobile, casing 3 drives the first fixed link 8 and the second fixed link 9 along in bracket 1 respectively by first connecting rod 4 and second connecting rod 5 Wall moves up and down, meanwhile, dual-axle hydraulic cylinder 17 is opened, drives mounting blocks 10 respectively along the first fixed link 8 and the second fixed link 9 It moves left and right, the mounting blocks 10 are moved left and right by straight-bar 11, link block 12, connecting shaft 13 and mounting base 14, mounting base 14 It drives laser generator 16 to move left and right, is moved left and right by laser generator 16 and be combined with the intermittent rotation of threaded rod 2, in turn It can achieve and amorphous silicon membrane surface is uniformly comprehensively radiated, in addition, control hydraulic cylinder 21 drives hydraulic column 22 to extend, it is hydraulic The drive first movement block 23 of column 22 is moved upward to the top of the first cavity 24, then by the reserved block 35 on laser generator 16 It is inserted into card slot, is extended opening electric telescopic rod 31, slide plate 32 is driven to move in third cavity 30, slide plate 32 drives Carve type block 33 and be inserted into carving in type card slot 34 on reserved block 35, at this point, spring 26 is in compressive state so that carve type block 33 with It carves type card slot 34 to be abutted strongerly, finally, driving hydraulic column 22 to shrink by hydraulic cylinder 21, drives first movement block 23 are moved to the bottom of the first cavity 24, can complete the installment work of laser generator 16, similarly, are driven by hydraulic column 22 First movement block 23 is moved upward to the top of the first cavity 24, then make electric telescopic rod 31 shrink, drive carve type block 33 from Carving in type card slot 34 on reserved block 35 removes, and can complete the dismantlement work of laser generator 16, and then improve automation Degree, it is convenient that laser generator 16 is mounted and dismounted, when solving the failure of laser generator 16, it is not easy to be torn open The problem of unloading maintenance.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims (8)

1. a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket (1) and laser generator (16), feature exists In by tripod fixed installation motor (20) on outer wall on the left of the bracket (1), motor (20) the output end connection turns Axis, the shaft are fixedly connected driving semi-gear (19), driving semi-gear (19) engagement connection driven gear (18), described Driven gear (18) is fixedly connected threaded rod (2), and threaded rod (2) other end extends on the right side of bracket (1) on inner wall, and logical It crosses bearing and bracket (1) is rotatablely connected, threaded rod (2) screw joint casing (3), described sleeve pipe (3) is along threaded rod (2) It is symmetrical arranged, described sleeve pipe (3) bottom end is articulated and connected first connecting rod (4), first connecting rod (4) other end articulated connection first Fixed block (6), first fixed block (6) are fixedly mounted on the first fixed link (8), the articulated connection of described sleeve pipe (3) upper end Second connecting rod (5), second connecting rod (5) other end are articulated and connected the second fixed block (7), and second fixed block (7) is fixed It is mounted on the second fixed link (9), the first connecting rod (4), second connecting rod (5), the first fixed block (6) and the second fixed block (7) it is symmetrical arranged along bracket (1), first fixed link (8) and the second fixed link (9) are slided with bracket (1) inner wall respectively Connection, second fixed link (9) are located above the first fixed link (8).
2. according to claim 1 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that described first It is symmetrically arranged in fixed link (8) and the second fixed link (9) there are four mounting blocks (10), the mounting blocks (10) are respectively with the One fixed link (8) and the second fixed link (9) are slidably connected, and first fixed link (8) and the second fixed link (9) fix peace respectively It fills dual-axle hydraulic cylinder (17), dual-axle hydraulic cylinder (17) output end connects hydraulic column one, and the hydraulic column one is fixedly connected with peace It fills block (10).
3. according to claim 1 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the installation Block (10) is fixedly connected straight-bar (11), and straight-bar (11) other end is fixedly connected link block (12), and the link block (12) is logical It crosses connecting shaft (13) to be fixedly connected mounting base (14), mounting base (14) upper surface is fixedly connected with mounting plate (15), the peace Laser generator (16) are provided in loading board (15).
4. according to claim 3 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the installation It is provided with the first cavity (24) in plate (15), and upper end is provided with opening, and hydraulic cylinder is fixedly mounted in first cavity (24) (21), hydraulic cylinder (21) output end connection hydraulic column (22), hydraulic column (22) top is fixedly connected with first movement block (23), the first movement block (23) is provided with card slot, is provided with the second cavity (25) in the first movement block (23).
5. according to claim 4 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that described second It is provided with the second movable block (29) in cavity (25), second movable block (29) is symmetrically installed sliding block (28), the sliding block (28) be slidably connected slide bar (27), and the slide bar (27) is symmetrically and fixedly mounted in the second cavity (25), second movable block (29) it is fixedly connected spring (26), the spring (26) is fixedly connected with the second cavity (25) inner wall.
6. according to claim 5 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that described second It is provided with third cavity (30) in movable block (29), electric telescopic rod (31) is fixedly mounted in the third cavity (30), it is described Electric telescopic rod (31) other end is fixedly connected slide plate (32), and the slide plate (32) is slidably connected with the second movable block (29).
7. according to claim 6 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the slide plate (32) be fixedly mounted and carve type block (33) on, described carve type block (33) through the second movable block (29), and with the second movable block (29) It is slidably connected.
8. according to claim 1 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the laser Reserved block (35) are fixedly mounted in generator (16) bottom surface, and the reserved block (35) is adapted with card slot, on the reserved block (35) It is provided with and carves that type block (33) is compatible carves type card slot (34).
CN201811290488.0A 2018-10-31 2018-10-31 It is a kind of for manufacturing the laser aid of amorphous silicon membrane Withdrawn CN109301037A (en)

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Application Number Priority Date Filing Date Title
CN201811290488.0A CN109301037A (en) 2018-10-31 2018-10-31 It is a kind of for manufacturing the laser aid of amorphous silicon membrane

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Application Number Priority Date Filing Date Title
CN201811290488.0A CN109301037A (en) 2018-10-31 2018-10-31 It is a kind of for manufacturing the laser aid of amorphous silicon membrane

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110146667A (en) * 2019-06-25 2019-08-20 广州市婵昕生物科技有限责任公司 A kind of portable type instrument for detecting pesticide residue through with function of temperature control
CN113091702A (en) * 2021-05-16 2021-07-09 河南和兴工程建设有限公司 Road and bridge settlement difference real-time monitoring system and method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110146667A (en) * 2019-06-25 2019-08-20 广州市婵昕生物科技有限责任公司 A kind of portable type instrument for detecting pesticide residue through with function of temperature control
CN113091702A (en) * 2021-05-16 2021-07-09 河南和兴工程建设有限公司 Road and bridge settlement difference real-time monitoring system and method thereof

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