CN209087894U - It is a kind of for manufacturing the laser aid of amorphous silicon membrane - Google Patents

It is a kind of for manufacturing the laser aid of amorphous silicon membrane Download PDF

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Publication number
CN209087894U
CN209087894U CN201821784529.7U CN201821784529U CN209087894U CN 209087894 U CN209087894 U CN 209087894U CN 201821784529 U CN201821784529 U CN 201821784529U CN 209087894 U CN209087894 U CN 209087894U
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China
Prior art keywords
block
fixedly connected
fixed link
amorphous silicon
fixed
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CN201821784529.7U
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Inventor
何武岗
代恒
刘文仓
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Zhongshan Quan Xin Intelligent Lighting Co Ltd
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Zhongshan Quan Xin Intelligent Lighting Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The utility model discloses a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket and laser generator, motor output end connects shaft, shaft is fixedly connected with driving semi-gear, driven gear is fixedly connected with threaded rod, the threaded rod other end extends on the right side of bracket on inner wall, and it is connect by bearing with holder pivots, sleeve upper end articulated connection second connecting rod, the second connecting rod other end the second fixed block of articulated connection, second fixed block is fixedly mounted in the second fixed link, first fixed link and the second fixed link are slidably connected with rack inner wall respectively, the straight-bar other end is fixedly connected with link block, link block is fixedly connected with mounting base by connecting shaft, mounting base upper surface is fixedly connected with mounting plate, laser generator is provided on mounting plate, reserved block is fixedly mounted in laser generator bottom surface, it is provided on reserved block compatible with type block is carved Carve type card slot.The utility model has the advantages that carry out uniformly carrying out radiation comprehensively to film and laser generator facilitates installing and dismounting.

Description

It is a kind of for manufacturing the laser aid of amorphous silicon membrane
Technical field
It is specifically a kind of for manufacturing the laser of amorphous silicon membrane the utility model relates to the technical field of amorphous silicon membrane Device.
Background technique
At high cost, low efficiency is the bottleneck of solar battery development, and thin-film solar cells is in drop low cost aspect than brilliant Body silicon solar cell is with greater advantage: filming can greatly save expensive semiconductor material;The material of hull cell Material preparation and battery are formed simultaneously, and can save many processes.Amorphous silicon thin-film solar cell is easy to implement extensive continuous Metaplasia produces, while can make substrate using materials such as stainless steel or glass, thus is easily reduced cost, and can be made and build up knot Structure improves efficiency, therefore obtains most attention and the rapid development of people.Laser technology is to be related to light, mechanical, electrical, material and inspection One complex art of the multiple subjects such as survey.At present laser technology using more and more extensive, wherein be using maximum field Technical field of laser processing.Laser processing technology be using high energy laser beam and matter interaction characteristic to material (including Metal and nonmetallic) it cut, welded, being marked, is surface-treated, being punched, micro Process and as light source, identify the one of object Gate technique.
Chinese Patent Application No. 201320466068.X and publication number CN203415609U discloses a kind of non-for manufacturing The laser aid of polycrystal silicon film, including laser system, reaction chamber, sample heating device, pumped vacuum systems and gas handling system, laser System is located at the surface of reaction chamber, and pumped vacuum systems is located at the lower right of reaction chamber, and gas handling system is located at reaction chamber Side, sample heating device are placed in reaction chamber bottom center.The patent carries out phosphorus to amorphous silicon membrane using laser or boron is mixed Miscellaneous, reaction speed is fast, and impurity activation rate is high, and uniformity is good, can prepare the preferable N-type of photoelectric properties/P-type non-crystalline silicon film.But It is that there is laser aid to be fixed in processing rack, the problem of processing limitation occurs, it cannot be uniformly comprehensively to amorphous silicon Film radiated and laser aid in laser generator belong to precision instrument, be usually screwed in rack, therefore When carrying out detachable maintaining to laser generator, it is easy collision and damage laser generator, now, we have proposed one kind to be used for Manufacture the laser aid of amorphous silicon membrane.
Utility model content
1, it to solve the problems, such as
For existing laser aid cannot uniformly comprehensively to amorphous silicon membrane carry out radiation and laser generator be not easy into The problem of row disassembly installation, the purpose of this utility model is to provide a kind of for manufacturing the laser aid of amorphous silicon membrane, with Solve the problems mentioned above in the background art.
2, technical solution
To achieve the above object, the utility model provides the following technical solutions:
It is a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket and laser generator, it is outer on the left of the bracket Motor is fixedly mounted by tripod on wall, the motor output end connects shaft, and the shaft is fixedly connected with driving semi-gear, The driving semi-gear engagement connection driven gear, the driven gear are fixedly connected with threaded rod, and the threaded rod other end prolongs It extends on the right side of bracket on inner wall, and is connect by bearing with holder pivots, the threaded rod screw joint casing, described sleeve pipe edge Threaded rod be symmetrical arranged, described sleeve pipe bottom end is articulated and connected first connecting rod, first connecting rod other end articulated connection first Fixed block, first fixed block are fixedly mounted in the first fixed link, described sleeve pipe upper end articulated connection second connecting rod, described The second connecting rod other end is articulated and connected the second fixed block, and second fixed block is fixedly mounted in the second fixed link, and described the One connecting rod, second connecting rod, the first fixed block and the second fixed block are symmetrical arranged along bracket, and first fixed link and second is consolidated Fixed pole is slidably connected with rack inner wall respectively, and second fixed link is located above the first fixed link.
As a further solution of the present invention: being symmetrically arranged in first fixed link and the second fixed link Four mounting blocks, the mounting blocks are slidably connected with the first fixed link and the second fixed link respectively, first fixed link and Dual-axle hydraulic cylinder is fixedly mounted in two fixed links respectively, and the dual-axle hydraulic cylinder output end connects hydraulic column one, the hydraulic column one It is fixedly connected with mounting blocks.
The mounting blocks are fixedly connected with straight-bar as a further solution of the present invention, and the straight-bar other end is solid Surely link block is connected, the link block is fixedly connected with mounting base by connecting shaft, and the mounting base upper surface is fixedly connected with installation Plate is provided with laser generator on the mounting plate.
It is provided with the first cavity in the mounting plate as a further solution of the present invention, and upper end is provided with Opening, first cavity is interior to be fixedly mounted hydraulic cylinder, and the hydraulic cylinder output end connects hydraulic column, and the hydraulic top end is solid Surely first movement block is connected, the first movement block is provided with card slot, is provided with the second cavity in the first movement block.
It is provided with the second movable block in second cavity as a further solution of the present invention, described second Movable block is symmetrically installed sliding block, and the sliding block is slidably connected slide bar, and the slide bar is symmetrically and fixedly mounted in the second cavity, described Second movable block is fixedly connected with spring, and the spring is fixedly connected with the second cavity inner wall.
Third cavity, the third are provided in second movable block as a further solution of the present invention, Electric telescopic rod is fixedly mounted in cavity, the electric telescopic rod other end is fixedly connected with slide plate, the slide plate and the second movement Block is slidably connected.
It is fixedly mounted on the slide plate as a further solution of the present invention, and carves type block, the type block of carving runs through Second movable block, and be slidably connected with the second movable block.
Reserved block is fixedly mounted in the laser generator bottom surface as a further solution of the present invention, described pre- It stays seat to be adapted with card slot, is provided on the reserved block and compatible with type block is carved carves type card slot.
3, beneficial effect
Compared with prior art, the utility model has the beneficial effects that
(1) the utility model is dynamic by opening motor positive and inverse, drives driving semi-gear rotation, is driven by engagement The rotation of driven gear clearance-type, driven gear drive threaded rod rotation, and threaded rod drives casing to move left and right, and casing passes through first Connecting rod and second connecting rod drive the first fixed link and the second fixed link to move up and down along rack inner wall respectively, meanwhile, it opens double Axis hydraulic cylinder, drive mounting blocks moved left and right respectively along the first fixed link and the second fixed link, the mounting blocks by straight-bar, Link block, connecting shaft and mounting base move left and right, and mounting base drives laser generator to move left and right, and pass through laser generator or so Movement is combined with the intermittent rotation of threaded rod, and then can achieve and uniformly comprehensively radiate to amorphous silicon membrane surface;
(2) the utility model control hydraulic cylinder drives hydraulic column elongation, and hydraulic column drives first movement block to be moved upward to Then reserved block on laser generator is inserted into card slot by the top of the first cavity, opening electric telescopic rod elongation, band Dynamic slide plate moves in third cavity, and slide plate drive carves type block and is inserted into carving in type card slot on reserved block, at this point, at spring In compressive state so that carve type block with carve type card slot it is stronger abutted, finally, pass through hydraulic cylinder drive hydraulic column receive Contracting drives first movement block to be moved to the bottom of the first cavity, can complete the installment work of laser generator, similarly, also The dismantlement work of laser generator can be completed, and then improves the degree of automation, it is convenient that peace installation and dismantling are carried out to laser generator It unloads, when solving laser generator failure, is not easy the problem of carrying out disassembly maintenance.
Detailed description of the invention
Fig. 1 is a kind of for manufacturing the structural schematic diagram of the laser aid of amorphous silicon membrane.
Fig. 2 is front view in a kind of laser aid for manufacturing amorphous silicon membrane.
Fig. 3 is a kind of structural schematic diagram of mounting plate in laser aid for manufacturing amorphous silicon membrane.
Fig. 4 is the knot of laser generator and reserved block connection relationship in a kind of laser aid for manufacturing amorphous silicon membrane Structure schematic diagram.
In figure: 1, bracket;2, threaded rod;3, casing;4, first connecting rod;5, second connecting rod;6, the first fixed block;7, second Fixed block;8, the first fixed link;9, the second fixed link;10, mounting blocks;11, straight-bar;12, link block;13, connecting shaft;14, pacify Fill seat;15, mounting plate;16, laser generator;17, dual-axle hydraulic cylinder;18, driven gear;19, driving semi-gear;20, motor; 21, hydraulic cylinder;22, hydraulic column;23, first movement block;24, the first cavity;25, the second cavity;26, spring;27, slide bar;28, Sliding block;29, the second movable block;30, third cavity;31, electric telescopic rod;32, slide plate;33, type block is carved;34, type card slot is carved; 35, reserved block.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
Please refer to Fig. 1~4, it is a kind of for manufacturing the laser aid of amorphous silicon membrane in the utility model embodiment, including Bracket 1 and laser generator 16, are fixedly mounted motor 20 by tripod on the 1 left side outer wall of bracket, and the motor 20 is defeated Outlet connects shaft, and the shaft is fixedly connected with driving semi-gear 19, and the engagement of driving semi-gear 19 connects driven gear 18, The driven gear 18 is fixedly connected with threaded rod 2, and 2 other end of threaded rod extends on 1 right side inner wall of bracket, and passes through axis It holds and is rotatablely connected with bracket 1,2 screw joint casing 3 of threaded rod, described sleeve pipe 3 is symmetrical arranged along threaded rod 2, described 3 bottom end of casing articulated connection first connecting rod 4, the first fixed block 6 of 4 other end of the first connecting rod articulated connection, described first is solid Determine block 6 to be fixedly mounted in the first fixed link 8,3 upper end of described sleeve pipe articulated connection second connecting rod 5, the second connecting rod 5 is another The second fixed block 7 of end articulated connection, second fixed block 7 is fixedly mounted in the second fixed link 9, the first connecting rod 4, the Two connecting rods 5, the first fixed block 6 and the second fixed block 7 are symmetrical arranged along bracket 1, first fixed link 8 and the second fixed link 9 are slidably connected with 1 inner wall of bracket respectively, and second fixed link 9 is located at 8 top of the first fixed link, 8 He of the first fixed link It is symmetrically arranged in second fixed link 9 there are four mounting blocks 10, the mounting blocks 10 are solid with the first fixed link 8 and second respectively Fixed pole 9 is slidably connected, and dual-axle hydraulic cylinder 17, the twin shaft liquid is fixedly mounted in first fixed link 8 and the second fixed link 9 respectively 17 output end of cylinder pressure connects hydraulic column one, and the hydraulic column one is fixedly connected with mounting blocks 10, and the mounting blocks 10 are fixedly connected directly Bar 11,11 other end of straight-bar are fixedly connected with link block 12, and the link block 12 is fixedly connected with mounting base by connecting shaft 13 14,14 upper surface of mounting base is fixedly connected with mounting plate 15, is provided with laser generator 16 on the mounting plate 15, passes through benefit Launch laser beam with the laser generator 16 of setting, laser beam is radiated film surface, and absorbs laser energy, temperature It steeply rises to fusing point, then, crystallisation by cooling forms amorphous silicon membrane, and laser generator 16 is existing public technology, herein not It repeats again, by opening 20 positive and negative rotation of motor, drives driving semi-gear 19 to rotate, driven gear 18 is driven by engagement Clearance-type rotation, driven gear 18 drive threaded rod 2 to rotate, and threaded rod 2 drives casing 3 to move left and right, and casing 3 connects by first Bar 4 and second connecting rod 5 drive the first fixed link 8 and the second fixed link 9 to move up and down along 1 inner wall of bracket respectively, meanwhile, it opens Dual-axle hydraulic cylinder 17 drives mounting blocks 10 to move left and right respectively along the first fixed link 8 and the second fixed link 9, the mounting blocks 10 are moved left and right by straight-bar 11, link block 12, connecting shaft 13 and mounting base 14, and mounting base 14 drives laser generator 16 or so It is mobile, it is moved left and right by laser generator 16 and is combined with the intermittent rotation of threaded rod 2, and then can achieve to amorphous silicon membrane Surface uniformly comprehensively radiates.
The first cavity 24 is provided in the mounting plate 15, and upper end is provided with opening, fixes in first cavity 24 Hydraulic cylinder 21 is installed, 21 output end of hydraulic cylinder connects hydraulic column 22, and 22 top of hydraulic column is fixedly connected with first movement Block 23, the first movement block 23 are provided with card slot, and the second cavity 25 is provided in the first movement block 23, and described second is empty It is provided with the second movable block 29 in chamber 25, second movable block 29 is symmetrically installed sliding block 28, and the sliding block 28 is slidably connected cunning Bar 27, the slide bar 27 are symmetrically and fixedly mounted in the second cavity 25, and second movable block 29 is fixedly connected with spring 26, described Spring 26 is fixedly connected with 25 inner wall of the second cavity, and third cavity 30 is provided in second movable block 29, and the third is empty Be fixedly mounted electric telescopic rod 31 in chamber 30,31 other end of electric telescopic rod is fixedly connected with slide plate 32, the slide plate 32 with Second movable block 29 is slidably connected, and is fixedly mounted on the slide plate 32 and carves type block 33, and the type block 33 of carving is through the second movable block 29, and be slidably connected with the second movable block 29, reserved block 35, the reserved block 35 is fixedly mounted in 16 bottom surface of laser generator Be adapted with card slot, be provided on the reserved block 35 it is compatible with type block 33 is carved carve type card slot 34, control 21 band of hydraulic cylinder Hydrodynamic compression leg 22 extends, and the drive first movement block 23 of hydraulic column 22 is moved upward to the top of the first cavity 24, then by laser Reserved block 35 on generator 16 is inserted into card slot, is extended opening electric telescopic rod 31, drives slide plate 32 along third sky It is moved in chamber 30, the drive of slide plate 32 carves type block 33 and is inserted into carving in type card slot 34 on reserved block 35, at this point, spring 26 is in pressure Contracting state so that carve type block 33 with carve type card slot 34 it is stronger abutted, finally, by hydraulic cylinder 21 drive hydraulic column 22 shrink, and drive first movement block 23 to be moved to the bottom of the first cavity 24, can complete the installment work of laser generator 16, Similarly, it drives first movement block 23 to be moved upward to the top of the first cavity 24 by hydraulic column 22, then makes electric telescopic rod 31 shrink, and drive is carved type block 33 and removed from carving in type card slot 34 on reserved block 35, can complete tearing open for laser generator 16 Work is unloaded, and then improves the degree of automation, it is convenient that laser generator 16 is mounted and dismounted, solve laser generator 16 When failure, it is not easy the problem of carrying out disassembly maintenance.
The working principle of the utility model is: driving driving semi-gear 19 to rotate by opening 20 positive and negative rotation of motor, lead to It crosses engagement and drives the rotation of 18 clearance-type of driven gear, driven gear 18 drives threaded rod 2 to rotate, and threaded rod 2 drives casing 3 It moves left and right, casing 3 drives the first fixed link 8 and the second fixed link 9 along branch respectively by first connecting rod 4 and second connecting rod 5 1 inner wall of frame moves up and down, meanwhile, dual-axle hydraulic cylinder 17 is opened, drives mounting blocks 10 solid respectively along the first fixed link 8 and second Fixed pole 9 moves left and right, and the mounting blocks 10 are moved left and right by straight-bar 11, link block 12, connecting shaft 13 and mounting base 14, installs Seat 14 drives laser generator 16 to move left and right, and is moved left and right by laser generator 16 and is combined with the intermittent rotation of threaded rod 2, And then can achieve and amorphous silicon membrane surface is uniformly comprehensively radiated, in addition, control hydraulic cylinder 21 drives hydraulic column 22 to extend, Hydraulic column 22 drives first movement block 23 to be moved upward to the top of the first cavity 24, then will reserve on laser generator 16 Seat 35 is inserted into card slot, is extended opening electric telescopic rod 31, is driven slide plate 32 to move in third cavity 30, slide plate 32 Drive carves type block 33 and is inserted into carving in type card slot 34 on reserved block 35, at this point, spring 26 is in compressive state, so that carving type block 33 with carve type card slot 34 it is stronger abutted, finally, by hydraulic cylinder 21 drive hydraulic column 22 shrink, drive first move Motion block 23 is moved to the bottom of the first cavity 24, can complete the installment work of laser generator 16, similarly, passes through hydraulic column 22 It drives first movement block 23 to be moved upward to the top of the first cavity 24, then electric telescopic rod 31 is shunk, type block is carved in drive 33 carving from reserved block 35 remove in type card slot 34, can complete the dismantlement work of laser generator 16, and then improve certainly Dynamicization degree, it is convenient that laser generator 16 is mounted and dismounted, when solving the failure of laser generator 16, be not easy into The problem of row disassembly maintenance.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this is practical new The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing for the equivalent requirements of the claims will be fallen in All changes in justice and range are embraced therein.It should not treat any reference in the claims as limiting Related claim.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims (8)

1. a kind of for manufacturing the laser aid of amorphous silicon membrane, including bracket (1) and laser generator (16), feature exists In by tripod fixed installation motor (20) on outer wall on the left of the bracket (1), motor (20) the output end connection turns Axis, the shaft are fixedly connected driving semi-gear (19), driving semi-gear (19) engagement connection driven gear (18), described Driven gear (18) is fixedly connected threaded rod (2), and threaded rod (2) other end extends on the right side of bracket (1) on inner wall, and logical It crosses bearing and bracket (1) is rotatablely connected, threaded rod (2) screw joint casing (3), described sleeve pipe (3) is along threaded rod (2) It is symmetrical arranged, described sleeve pipe (3) bottom end is articulated and connected first connecting rod (4), first connecting rod (4) other end articulated connection first Fixed block (6), first fixed block (6) are fixedly mounted on the first fixed link (8), the articulated connection of described sleeve pipe (3) upper end Second connecting rod (5), second connecting rod (5) other end are articulated and connected the second fixed block (7), and second fixed block (7) is fixed It is mounted on the second fixed link (9), the first connecting rod (4), second connecting rod (5), the first fixed block (6) and the second fixed block (7) it is symmetrical arranged along bracket (1), first fixed link (8) and the second fixed link (9) are slided with bracket (1) inner wall respectively Connection, second fixed link (9) are located above the first fixed link (8).
2. according to claim 1 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that described first It is symmetrically arranged in fixed link (8) and the second fixed link (9) there are four mounting blocks (10), the mounting blocks (10) are respectively with the One fixed link (8) and the second fixed link (9) are slidably connected, and first fixed link (8) and the second fixed link (9) fix peace respectively It fills dual-axle hydraulic cylinder (17), dual-axle hydraulic cylinder (17) output end connects hydraulic column one, and the hydraulic column one is fixedly connected with peace It fills block (10).
3. according to claim 2 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the installation Block (10) is fixedly connected straight-bar (11), and straight-bar (11) other end is fixedly connected link block (12), and the link block (12) is logical It crosses connecting shaft (13) to be fixedly connected mounting base (14), mounting base (14) upper surface is fixedly connected with mounting plate (15), the peace Laser generator (16) are provided in loading board (15).
4. according to claim 3 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the installation It is provided with the first cavity (24) in plate (15), and upper end is provided with opening, and hydraulic cylinder is fixedly mounted in first cavity (24) (21), hydraulic cylinder (21) output end connection hydraulic column (22), hydraulic column (22) top is fixedly connected with first movement block (23), the first movement block (23) is provided with card slot, is provided with the second cavity (25) in the first movement block (23).
5. according to claim 4 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that described second It is provided with the second movable block (29) in cavity (25), second movable block (29) is symmetrically installed sliding block (28), the sliding block (28) be slidably connected slide bar (27), and the slide bar (27) is symmetrically and fixedly mounted in the second cavity (25), second movable block (29) it is fixedly connected spring (26), the spring (26) is fixedly connected with the second cavity (25) inner wall.
6. according to claim 5 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that described second It is provided with third cavity (30) in movable block (29), electric telescopic rod (31) is fixedly mounted in the third cavity (30), it is described Electric telescopic rod (31) other end is fixedly connected slide plate (32), and the slide plate (32) is slidably connected with the second movable block (29).
7. according to claim 6 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the slide plate (32) be fixedly mounted and carve type block (33) on, described carve type block (33) through the second movable block (29), and with the second movable block (29) It is slidably connected.
8. according to claim 1 a kind of for manufacturing the laser aid of amorphous silicon membrane, which is characterized in that the laser Reserved block (35) are fixedly mounted in generator (16) bottom surface, and the reserved block (35) is adapted with card slot, on the reserved block (35) It is provided with and carves that type block (33) is compatible carves type card slot (34).
CN201821784529.7U 2018-10-31 2018-10-31 It is a kind of for manufacturing the laser aid of amorphous silicon membrane Active CN209087894U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821784529.7U CN209087894U (en) 2018-10-31 2018-10-31 It is a kind of for manufacturing the laser aid of amorphous silicon membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821784529.7U CN209087894U (en) 2018-10-31 2018-10-31 It is a kind of for manufacturing the laser aid of amorphous silicon membrane

Publications (1)

Publication Number Publication Date
CN209087894U true CN209087894U (en) 2019-07-09

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