CN109300940A - Flexible display panels and preparation method thereof, display device - Google Patents
Flexible display panels and preparation method thereof, display device Download PDFInfo
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- CN109300940A CN109300940A CN201811005972.4A CN201811005972A CN109300940A CN 109300940 A CN109300940 A CN 109300940A CN 201811005972 A CN201811005972 A CN 201811005972A CN 109300940 A CN109300940 A CN 109300940A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
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- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The present invention relates to a kind of flexible display panels and preparation method thereof, display device.The flexible display panels, including inorganic material insulating layer；Inorganic material insulating layer is equipped at least two holes, and there are the holes of extending direction intersection at least two holes.Embodiment according to the present invention, it can be when flexible display panels be bent repeatedly, block stress in thin film transmitting lateral and longitudinal in inorganic material insulating layer, reduce stress in thin film, in turn, it can reduce between functional film layer and the phenomenon that fracture/cracking in removing/separation or inorganic material insulating layer occur, improve the bending performance of flexible display panels, prevent flexible screen quality decline.
Description
Technical field
The present invention relates to field of display technology more particularly to a kind of flexible display panels and preparation method thereof, display device.
Background technique
Flexible screen refers to by generating flexible base board using plastics or polymer film the image realization device realized.It is soft
Property screen can be liquid crystal display (Liquid Crystal Display, LCD), organic light emitting diode display (Organic
Light-Emitting Diode, OLED), electronic ink display etc..
In the related technology, in the reliability test of flexible screen, for example, bending number is 60k times, crooked process radius 5R,
Wherein, R is radius parameter, and bending rate is 30rpm (Revolutions Per Minute, revolutions per minute), in more than 30,000 times of bending
The phenomenon that will appear fracture/cracking in removing/separation or inorganic film between the functional film layer of rear indicator, lead to flexible screen
Quality decline.
Summary of the invention
The present invention provides a kind of flexible display panels and preparation method thereof, display device, to solve in the related technology not
Foot.
According to a first aspect of the embodiments of the present invention, a kind of flexible display panels, including inorganic material insulating layer, institute are provided
Inorganic material insulating layer is stated equipped at least two holes, there are the holes of extending direction intersection at least two hole.
In one embodiment, the inorganic material insulating layer includes the firstth area, and the two sides up and down in firstth area are not
The conductive layer contacted with the inorganic material insulating layer is set, and at least two hole is set to firstth area.
It in one embodiment, include that at least one does not run through the inorganic material insulating layer at least two hole
Blind hole, alternatively, including the through-hole that at least one runs through the inorganic material insulating layer at least two hole.
In one embodiment, there are the orthogonal holes of extending direction at least two hole.
In one embodiment, the extending direction intersection in two holes adjacent at least two hole.
In one embodiment, at least two hole is sequentially communicated.
In one embodiment, at least two hole is through-hole, and including first through hole and the second through-hole；Described
One area includes opposite the first boundary and the second boundary；
The first through hole is located at first border side, and second through-hole is located at the second boundary side, by institute
It states the first differentiation and is segmented at least two mutually independent regions.
In one embodiment, there are gaps between two holes adjacent at least two hole.
According to a second aspect of the embodiments of the present invention, a kind of display device is provided, including above-mentioned flexible display panels.
According to a third aspect of the embodiments of the present invention, a kind of preparation method of flexible display panels is provided, comprising:
Form inorganic material insulating layer；
Form at least two holes on the inorganic material insulating layer, there are extending direction intersections at least two hole
Hole.
According to above-described embodiment it is found that by the way that extending direction phase is arranged on the inorganic material insulating layer of flexible display panels
The hole of friendship, so as to can be blocked lateral and longitudinal direction in inorganic material insulating layer when flexible display panels are bent repeatedly
Stress in thin film transmitting, reduces stress in thin film, in turn, it is possible to reduce occur removing/separation between functional film layer or inorganic material is exhausted
In edge layer the phenomenon that fracture/cracking, the bending performance of flexible display panels is improved, prevents flexible screen quality decline.
It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not
It can the limitation present invention.
Detailed description of the invention
The drawings herein are incorporated into the specification and forms part of this specification, and shows and meets implementation of the invention
Example, and be used to explain the principle of the present invention together with specification.
Fig. 1 is a kind of structural schematic diagram of the flexible display panels shown according to embodiments of the present invention；
Fig. 2 is the top view in the firstth area of one kind shown according to embodiments of the present invention；
Fig. 3 is the top view in the firstth area of another kind shown according to embodiments of the present invention；
Fig. 4 is the cross-sectional view in the direction A-A in Fig. 2；
Fig. 5 is a kind of flow chart of the preparation method of the flexible display panels shown according to embodiments of the present invention.
Specific embodiment
Example embodiments are described in detail here, and the example is illustrated in the accompanying drawings.Following description is related to
When attached drawing, unless otherwise indicated, the same numbers in different drawings indicate the same or similar elements.Following exemplary embodiment
Described in embodiment do not represent all embodiments consistented with the present invention.On the contrary, they be only with it is such as appended
The example of device and method being described in detail in claims, some aspects of the invention are consistent.
Fig. 1~4 are a kind of flexible display panels shown according to embodiments of the present invention.Wherein, Fig. 4 is the side AA along Fig. 2
To sectional view.The flexible display panels include a plurality of grid line 11, multiple data lines 12 and a plurality of grid line 11 and a plurality of data
Line 12 intersects the multiple pixel regions 13 limited, and multiple pixel regions 13 are arranged in array.Each pixel region 13 include viewing area 131 with
Non-display area.Thin film transistor (TFT) 14, display device (not shown) and capacitor 21 are provided in each pixel region 13.Wherein, thin
Film transistor 14 is located at non-display area, and display device, capacitor 21 are located in viewing area 131.In thin film transistor (TFT) 14, capacitor
In device 21, between thin film transistor (TFT) 14 and display device, and/or between display device and capacitor 21, usually in two layers of conduction
Inorganic material insulating layer is formed between layer, for two conductive layers to be isolated, so that insulating between two conductive layers.For example, thin
Gate insulating layer 141 between the grid 143 and active layer 144 of film transistor 14 is just above-mentioned inorganic material insulating layer, is used
In making to insulate between grid 143 and active layer 144.
In embodiments of the present invention, the inorganic material insulating layer be equipped at least two holes 311~317, described at least two
There are the holes of extending direction intersection in a hole 311~317.For example, the extending direction in two holes adjacent in hole 311~317 can
Intersection.Wherein, each hole can be for along the hole that assigned direction extends.The cross sectional shape in hole can be rectangle, the long side of the rectangle
Direction is the extending direction in hole.
In embodiments of the present invention, intersected by the way that extending direction is arranged on the inorganic material insulating layer of flexible display panels
Hole can block in inorganic material insulating layer laterally and longitudinal film so that when flexible display panels are bent repeatedly
Ply stress transmitting, reduces stress in thin film, in turn, it is possible to reduce occurs removing/separation or inorganic material insulation between functional film layer
In layer the phenomenon that fracture/cracking, the bending performance of flexible display panels is improved, flexible screen quality decline is prevented.
In one embodiment, inorganic material insulating layer may include the first area 31 and the secondth area, at least two hole 311
~317 can be set to firstth area 31.Wherein, the secondth area is the area for needing the inorganic material insulating layer to play insulation function
Domain, wherein side or two sides in the two sides up and down in the secondth area are provided with the conductive layer contacted with inorganic material insulating layer.The
One area 31 is the region that insulation function is played without the inorganic material insulating layer, the two sides up and down in the first area 31 it is not set with
The conductive layer of inorganic material insulating layer contact.For example, for the gate insulating layer 141 in thin film transistor (TFT) 14, grid
143, the wherein side of gate insulating layer 141, and and gate insulator may be arranged in active layer 144, grid line 11, data line 12 etc.
Layer 141 contacts, and therefore, the corresponding region of the conductive layer contacted with gate insulating layer 141 is the secondth area.And gate insulating layer 141
In two sides not set conductive layer up and down region without playing insulation function, can be the first area 31 therefore.Implement in the present invention
In example, the hole that extending direction intersects is arranged by the firstth area of the inorganic material insulating layer in flexible display panels, wherein first
The not set conductive layer contacted with the inorganic material insulating layer in the two sides up and down in area, is not influencing inorganic material insulating layer
In the case where insulation function, the area coverage of inorganic material insulating layer not only can reduce, moreover, when flexible display panels are anti-
When bending again, stress in thin film transmitting lateral and longitudinal in inorganic material insulating layer can also be blocked, stress in thin film is reduced, into
And, it is possible to reduce occur the phenomenon that fracture/cracking in removing/separation or inorganic material insulating layer between functional film layer, improves soft
The bending performance of property display panel, prevents flexible screen quality decline.
It in one embodiment, may include that at least one does not run through the inorganic material at least two hole 311~317
Expect the blind hole of insulating layer.Wherein, the hole depth of blind hole is less than the thickness of inorganic material insulating layer.It can at least two holes 311~317
Part is blind hole, can also all blind holes.
It in another embodiment, may include at least one at least two hole 311~317 through the inorganic material
Expect the through-hole of insulating layer.Wherein, the hole depth of through-hole is equal to the thickness of inorganic material insulating layer.It can at least two holes 311~317
Part is through-hole, can also all through-holes.
In one embodiment, as shown in Fig. 2, the extension side in two holes adjacent at least two hole 311~317
To can intersect.Wherein, each Kong Kewei rectangular through-hole.That is, being in certain folder between the extending direction in two adjacent holes
Angle, the angle are not 0 degree or 180 degree.For example, the extending direction in hole 311 can intersect with the extending direction in hole 312, hole 312 is prolonged
Stretching direction can intersect with the extending direction in hole 313 ... ..., and the extending direction in hole 316 can intersect with the extending direction in hole 317.
In one embodiment, as shown in Fig. 2, there are extending directions to be mutually perpendicular at least two hole 311~317
Hole.As described above, can be equipped at least two holes 311~317 in the first area 31, the extending direction in two adjacent holes mutually hangs down
Directly.In this way, film layer lateral and longitudinal in inorganic material insulating layer can be blocked when flexible display panels are bent repeatedly
Stress transfer reduces stress in thin film.
In one embodiment, as shown in Fig. 2, firstth area 31 may include opposite the first boundary 32 and the second boundary
33.At least two hole 311~317 is through-hole, and including first through hole and the second through-hole.Wherein, hole 311 is first logical
Hole, hole 317 are the second through-hole.First through hole is located at 32 side of the first boundary, and the second through-hole is located at 33 side of the second boundary.
Moreover, at least two holes 311~317 are sequentially communicated using first through hole as head end, using the second through-hole as tail end, by described first
Area 31 is divided at least two mutually independent regions 318,319 and 310.In this way, when flexible display panels are bent repeatedly
When, it is possible to reduce the accumulation of inorganic material insulating layer, the more preferable stress in thin film that reduces stack, and improve viewing area bending performance.
It in another embodiment, as shown in figure 3, can between two holes adjacent at least two hole 311~317
There are gaps.In this way, can also be blocked lateral and vertical in inorganic material insulating layer when flexible display panels are bent repeatedly
To stress in thin film transmitting, reduce stress in thin film.
In one embodiment, as shown in figure 4, flexible display panels may include thin film transistor (TFT) 14.The film crystal
Pipe 14 includes active layer 144, gate insulating layer 141, grid 143, source electrode 142 and drain 145.Wherein, the gate insulator
For layer 141 between the grid 143 and the active layer 144, the gate insulating layer 141 is inorganic material insulation
Layer, the gate insulating layer 141 may be provided with the hole 311~317 in viewing area, and the hole 311~317 can be through-hole.
In one embodiment, as shown in figure 4, flexible display panels may include capacitor 21.The capacitor 21 is located at
On the gate insulating layer 141.Capacitor 21 includes electrode 212, electrode 213 and interlayer insulating film 211.Interlayer insulating film
211 between electrode 212 and electrode 213.In one embodiment, electrode 212 can be anode, and electrode 213 can be cathode.When
So, in another embodiment, electrode 212 can also be cathode, and electrode 213 can also be anode.The i.e. described capacitor 21 it is positive and negative
Interlayer insulating film 211 is equipped between pole plate.The interlayer insulating film 211 is the inorganic material insulating layer；The layer insulation
Layer is provided with the hole 311~317 in the viewing area, and the hole 311~317 can be through-hole.In one embodiment, institute
The hole for stating interlayer insulating film 211 described in the Kong Keyu of gate insulating layer 141 is corresponding and interconnected.
In one embodiment, as shown in figure 4, flexible display panels may include at least one layer of metal routing layer 22,23.Institute
At least one layer of metal routing layer 22,23 is stated to be located on the gate insulating layer 141.For example, metal routing layer 22,23 can be number
According to the metal routing layer of line 12.The capacitor 21 can be equipped with interlayer between at least one layer of metal routing layer 22,23 and be situated between
Electric layer 24.The interlayer dielectric layer 21 is the inorganic material insulating layer；The interlayer dielectric layer 24 is arranged in the viewing area
There is the hole 311~317, the hole 311~317 can be through-hole.In one embodiment, the hole of the interlayer dielectric layer 24
311~317 is corresponding and interconnected with the hole 311~317 of the interlayer insulating film 211.
In one embodiment, as shown in figure 4, flexible display panels may include flexible base board 25.Flexible base board 25 can be
Organic layer and the alternately arranged sandwich of inorganic layer.For example, flexible base board 25 may include the first organic layer 251, first buffering
The 252, second organic layer 253 of layer and second buffer layer 254.Wherein, the material of the first organic layer 251 and the second organic layer 253
It can be PI (polyimides).First buffer layer 252 and second buffer layer 254 can be inorganic material, specifically can be but not
It is limited to silica, for blocking water, hindering oxygen, and planarization can be played the role of.
In one embodiment, as shown in figure 4, flexible display panels, which may also include, is set to flexible base board 25 and film crystalline substance
Third buffer layer 26 between body pipe 14.Third buffer layer 26 may include the first inorganic layer 261 and the second inorganic layer 262.Its
In, the first inorganic layer 261 can be silica material, and the second inorganic layer 262 can be silicon nitride material.Third buffer layer 26 can be used for
Adverse effect is generated to active layer 144 when preventing the material of flexible base board 25 from being PI (polyimides), to guarantee thin film transistor (TFT)
14 stability.
In one embodiment, as shown in figure 4, third buffer layer 26 is the inorganic material insulating layer；The third is slow
It rushes layer 26 and the viewing area is provided with the hole 311~317, the hole 311~317 can be through-hole.In one embodiment
In, the hole of gate insulating layer 141 described in the Kong Keyu of the third buffer layer 26 is corresponding and interconnected.
In one embodiment, as shown in figure 4, second buffer layer 254 is the inorganic material insulating layer；Second buffer layer
254 are provided with the hole 311~317 in the viewing area.In one embodiment, the Kong Keyu of the second buffer layer 254
The hole of the third buffer layer 26 is corresponding and interconnected.
In one embodiment, organic material can be filled in the hole 311~317.Due to the buckle resistance of organic material
Can be preferable, it is thus possible to improve the bending performance of inorganic material insulating layer.
In one embodiment, as shown in figure 4, flexible display panels may also include be set to it is blunt on interlayer dielectric layer 24
Change layer 27, can protect the contact electrode 28 in contact hole.
In one embodiment, as shown in figure 4, flexible display panels may also include planarization layer (Planarization,
Abbreviation PLN) 29.For example, planarization layer 29 may include the first planarization layer 291, the second planarization layer 292 and third planarization
Layer 293.Wherein, the first planarization layer 291 is between flexible base board 25 and metal routing layer 22, the second planarization layer 292
Between metal routing layer 22 and metal routing layer 23, third planarization layer 293 is located on passivation layer 27.The material of planarization layer 29
Material can be organic material.
In one embodiment, as shown in figure 4, flexible display panels can also include anode 210, the pixel of display device
Definition layer (PDL) 2101 and support column 2102.Wherein, display device can be OLED (Organic Light-Emitting
Diode, Organic Light Emitting Diode) device.It should be noted that Fig. 4 illustrates only the part-structure of flexible display panels, and
It is not all of structure.
In the related technology, since when carrying out dynamic bending to flexible display panels, shielding intracorporal stress cannot effectively be released
It puts, especially inorganic ply stress is larger, is easy to produce stress concentration, and accordingly, there exist be easy to appear stripping between functional film layer when bending
From fracture/cracking in/separation or inorganic film, when bending the big film layer of stress will appear fall off, fold, fracture, bubbling
Problem.In the embodiment of the present invention, the hole that extending direction intersects is arranged by the inorganic material insulating layer in flexible display panels, is made
It obtains when flexible display panels are bent repeatedly, stress in thin film lateral and longitudinal in inorganic material insulating layer can be blocked to pass
Pass, reduce stress in thin film, in turn, it is possible to reduce occur between functional film layer fracture in removing/separation or inorganic material insulating layer/
The phenomenon that cracking, improves the bending performance of flexible display panels, prevents flexible screen quality decline.
The embodiment of the present invention also proposed a kind of display device, including Flexible Displays face described in any of the above-described embodiment
Plate.
The embodiment of the present invention also proposed a kind of preparation method of flexible display panels, as shown in figure 5, including following step
Rapid 501~502:
In step 501, inorganic material insulating layer is formed.
In step 502, at least two holes are formed on the inorganic material insulating layer, are existed at least two hole
The hole of extending direction intersection.
In the embodiment of the present invention, by being arranged what extending direction intersected on the inorganic material insulating layer of flexible display panels
Hole, so as to which film layer lateral and longitudinal in inorganic material insulating layer can be blocked when flexible display panels are bent repeatedly
Stress transfer reduces stress in thin film, in turn, it is possible to reduce occur removing/separation or inorganic material insulating layer between functional film layer
The phenomenon that interior fracture/cracking, improves the bending performance of flexible display panels, prevents flexible screen quality decline.
It should be noted that display device in the present embodiment can be with are as follows: Electronic Paper, mobile phone, tablet computer, television set,
Any products or components having a display function such as laptop, Digital Frame, navigator.
Wherein, formation process used by above-mentioned process is for example can include: the structures such as film-forming process and etching such as deposition, sputtering
Figure technique.
It should be pointed out that in the accompanying drawings, for the size that clearly may be exaggerated layer and region of diagram.And it can be with
Understand, when element or layer be referred in another element or layer "upper", it can be directly in other elements, or may exist
Intermediate layer.Additionally, it is appreciated that it can be directly at other when element or layer be referred in another element or layer "lower"
Under element, or there may be the layer of more than one centre or elements.In addition, it is to be appreciated that when layer or element are referred to as
Two layers or two elements " between " when, it can between two layers or two elements unique layer, or there may also be one
Above middle layer or element.Similar reference marker indicates similar element in the whole text.
In the present invention, term " first ", " second " are used for description purposes only, and are not understood to indicate or imply opposite
Importance.Term " multiple " refers to two or more, unless otherwise restricted clearly.
Those skilled in the art are considering specification and after practicing disclosure disclosed herein, will readily occur to of the invention its
Its embodiment.The present invention is directed to cover any variations, uses, or adaptations of the invention, these modifications, purposes or
Person's adaptive change follows general principle of the invention and including the undocumented common knowledge in the art of the present invention
Or conventional techniques.The description and examples are only to be considered as illustrative, and true scope and spirit of the invention are by following
Claim is pointed out.
It should be understood that the present invention is not limited to the precise structure already described above and shown in the accompanying drawings, and
And various modifications and changes may be made without departing from the scope thereof.The scope of the present invention is limited only by the attached claims.
Claims (10)
1. a kind of flexible display panels, including inorganic material insulating layer, which is characterized in that the inorganic material insulating layer is equipped with extremely
Few two holes, there are the holes of extending direction intersection at least two hole.
2. flexible display panels according to claim 1, which is characterized in that the inorganic material insulating layer includes first
Area, the not set conductive layer contacted with the inorganic material insulating layer in the two sides up and down in firstth area, described at least two
Hole is set to firstth area.
3. flexible display panels according to claim 2, which is characterized in that include at least one at least two hole
The blind hole of the inorganic material insulating layer is not run through, alternatively, including at least one at least two hole through described inorganic
The through-hole of insulated with material layer.
4. flexible display panels according to claim 3, which is characterized in that there are extending directions at least two hole
Orthogonal hole.
5. flexible display panels according to claim 3, which is characterized in that at least two hole two adjacent holes
Extending direction intersection.
6. flexible display panels according to claim 5, which is characterized in that at least two hole is sequentially communicated.
7. flexible display panels according to claim 6, which is characterized in that at least two hole is through-hole, and is wrapped
Include first through hole and the second through-hole；Firstth area includes opposite the first boundary and the second boundary；
The first through hole is located at first border side, and second through-hole is located at the second boundary side, by described
One differentiation is segmented at least two mutually independent regions.
8. flexible display panels according to claim 5, which is characterized in that at least two hole two adjacent holes
Between there are gaps.
9. a kind of display device, which is characterized in that including the described in any item flexible display panels of claim 1 to 8.
10. a kind of preparation method of flexible display panels characterized by comprising
Form inorganic material insulating layer；
At least two holes are formed on the inorganic material insulating layer, are intersected at least two hole there are extending direction
Hole.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811005972.4A CN109300940A (en) | 2018-08-30 | 2018-08-30 | Flexible display panels and preparation method thereof, display device |
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| CN201811005972.4A CN109300940A (en) | 2018-08-30 | 2018-08-30 | Flexible display panels and preparation method thereof, display device |
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