CN109298310A - Link block, gauging fixture and base board checking device - Google Patents
Link block, gauging fixture and base board checking device Download PDFInfo
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- CN109298310A CN109298310A CN201810824230.8A CN201810824230A CN109298310A CN 109298310 A CN109298310 A CN 109298310A CN 201810824230 A CN201810824230 A CN 201810824230A CN 109298310 A CN109298310 A CN 109298310A
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- 239000000523 sample Substances 0.000 claims description 46
- 238000007689 inspection Methods 0.000 claims description 29
- 230000005855 radiation Effects 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 39
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000005611 electricity Effects 0.000 description 7
- 239000004299 sodium benzoate Substances 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulphite Substances [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 6
- 239000004300 potassium benzoate Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000006641 stabilisation Effects 0.000 description 3
- 238000011105 stabilization Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000004306 orthophenyl phenol Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000004301 calcium benzoate Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
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- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
The present invention provides link block, gauging fixture and base board checking device, the first terminal that the link block is used to become connecting object is connected with the Second terminal for becoming connecting object, have: the first face is formed with the first electrode for contacting with the one end of above-mentioned first terminal；Second face, it is opposite with above-mentioned first face, and it is provided with the second electrode for contacting with above-mentioned Second terminal；And conductive part, above-mentioned first electrode is electrically connected with above-mentioned second electrode (E2), above-mentioned second electrode has the more connection branches for being arranged in the mode opposite with above-mentioned Second terminal (standard configuration electrode), and extending radially from the link position relative to above-mentioned conductive part with identical angle interval.
Description
Technical field
The present invention relates to for probe to be connected with check device main body link block, have the inspection of the link block
Fixture and base board checking device.
Background technique
In the past, it is known that check the multiple probes for being configured to multi-needle and printed circuit board and/or semiconductor substrate etc.
Multiple inspection point contacts of object and the check device of the inspection that carries out inspection object.Additionally, it is known that having holding in this way
Multi-needle probe clamp head, and the gauging fixture that the probe is electrically connected with check device main body.
However, in recent years, the spacing of checkpoint becomes very fine, and in addition the quantity of checkpoint is also more, as described above
Check device in, such as use thousands of or so probes.In addition, with regard to check device main body side connection terminal (electrode) and
Speech, from the viewpoint of the easiness of manufacture, connection reliability and durability, it has to be formed as biggish shape to a certain extent
Shape, and configured with the wide interval of the configuration space than checkpoint.Therefore, it is impossible to which these probes and check device main body are straight
It connects in succession.Then, these probes and check device main body are attached using cable.
However, the configuration of checkpoint also changes if inspection object variation, therefore correspondingly need to restructure guarantor
Hold the clamp head of probe.If restructuring clamp head, need to re-start the connection of cable, generates thousands of cable connection behaviour
Make.Therefore, which becomes heavy burden.
It is thus known that having the spacing of the configuration space for the electrode that the configuration space of checkpoint is converted to check device side
The base board checking device of conversion module.For example, being described in Japanese Kokai special open 2005-172603 by by spacing
The upper surface electrode portion and lower surface electrode portion of conversion module are arranged with positive clathrate, make the front end side of probe and matching for checkpoint
It sets and matches, and the base end part of probe is configured with positive clathrate, to make the standardized technology of spacing conversion module.
However, being configured to the electrode by making the upper surface for being set to scanner according to the technology recorded in patent document 1
Portion is contacted with the second electrode (the lower surface electrode portion 37 of patent document 1) for being set to spacing conversion module, to press from both sides checking
Tool is electrically connected with check device.But if forming the oxide film thereon of insulating properties on the surface of second electrode, it is easy to produce the
The poor contact of two electrodes and electrode portion, therefore be contemplated that and the contact high contact pin of electric conductivity is set in second electrode and is welded
It connects.
However, at this time, it may be necessary to manually in the second electricity for being disposed in for example thousands of a positions corresponding with the number of probe
Pole is arranged contact pin and is welded, and there is the extremely cumbersome and manufacturing cost of operation and gets higher such problems.In addition, to prevent from aoxidizing
It is also gold-plated to the surface implementation of second electrode etc., but also not can avoid manufacturing cost in the case and get higher.
Summary of the invention
Technical problem
The purpose of the present invention is to provide be easily reduced poor contact generation and can inexpensively manufacture link block,
Gauging fixture and base board checking device.
The link block of embodiment illustrated of the present invention is used to become the first terminal of connecting object and becomes connection
The Second terminal of object is connected.Have: the first face is provided with the first electrode for contacting with above-mentioned first terminal；Second face,
It is opposite with above-mentioned first face, and it is provided with the second electrode for contacting with above-mentioned Second terminal；And conductive part, by above-mentioned
One electrode is electrically connected with above-mentioned second electrode.Above-mentioned second electrode has from the link position relative to above-mentioned conductive part with essence
The more connection branches that upper identical angle interval extends radially.
According to this constitution, compared with the situation that second electrode is formed as to discoid, can be greatly reduced second electrode with
The contact area of Second terminal, and the contact pressure of the two is sufficiently improved, therefore, even if being formed on the surface of second electrode thin
Oxidation film in the case where, also can break through the oxidation film and connect second electrode with standard configuration electrode conduction.Therefore, nothing
The surface of second electrode need to be implemented for preventing the gold-plated of oxidation, or the high contact pin of contact electric conductivity is set in second electrode
And welded, the contact stabilization of second electrode and Second terminal can be effectively improved in simple structure, be easy cheap
Ground manufactures gauging fixture.
In addition, the gauging fixture of embodiment illustrated of the present invention is used to make to be set to multiple checkpoints of inspection object
It is connected, has: above-mentioned link block with the check device main body for carrying out electric checking to above-mentioned inspection object；Multiple spies
Needle, front end in a manner of above-mentioned multiple inspection point contacts that can be arranged respectively；Support member supports multiple probe；
And bottom plate, multiple standard configuration electrodes for being electrically connected with above-mentioned check device main body are equipped with, above-mentioned multiple standards are matched
It sets electrode to be configured with the standard configuration, above-mentioned probe or the conductive member be connected with the rear end of the probe are above-mentioned the
One terminal, it is above-mentioned Second terminal that above-mentioned standard, which configures electrode,.
According to this constitution, the contact surface of second electrode with the Second terminal being made of standard configuration electrode can be greatly reduced
Product, and the contact pressure of the two is sufficiently improved, therefore the generation for being easily reduced poor contact can be obtained and can be made cheaply
The gauging fixture made.
In addition, the base board checking device of embodiment illustrated of the present invention has above-mentioned gauging fixture and above-mentioned inspection dress
Set main body.
According to this constitution, can reduce the contact area of second electrode Yu Second terminal (standard configuration electrode), and it is abundant
The contact pressure of the two is improved, therefore, the generation for being easily reduced poor contact and the substrate that can be inexpensively manufactured can be obtained
Check device.
The link block, gauging fixture and the base board checking device that constitute in this way are easily reduced the generation of poor contact, and energy
Enough inexpensively manufacture.
Detailed description of the invention
Fig. 1 is the structure for roughly showing the base board checking device for the link block for having an embodiment of the invention
Main view.
Fig. 2 is the perspective view for indicating to be set to an example of the gauging fixture of base board checking device shown in FIG. 1.
Fig. 3 is the III-III line sectional view of gauging fixture shown in Fig. 2.
Fig. 4 be decompose, enlargedly show clamp head shown in Fig. 3, link block and bottom plate structure explanatory diagram.
Fig. 5 is the top view for indicating to be set to the arrangement of standard array electrode of bottom plate.
Fig. 6 is the line VI -- VI direction view for indicating to be set to Fig. 4 of the structure of second electrode of link block.
Fig. 7 is the sectional view for indicating the structure of second electrode and standard array electrode.
Fig. 8 is the VIII-VIII line sectional view of Fig. 7.
Fig. 9 is the figure corresponding with Fig. 8 for indicating the variation of second electrode.
Figure 10 is the X-X line sectional view of Fig. 9.
Figure 11 be the structure for the second electrode of link block for indicating to be set to second embodiment of the present invention and Fig. 6
Corresponding figure.
Symbol description
2: check device main body
3,3D, 3U: gauging fixture
4,4D, 4U: inspection portion
5U, 5D: mobile mechanism of inspection portion
6: apparatus for fixing substrate
7: shell
30: clamp head
31: link block
32: support base
33: base station
34: cable
36: device side connection terminal
100: substrate
300: support member
301: top plate
302: support plate
303: pillar
311: the first faces
312: the second faces
321: bottom plate
321a: surface
321b: the back side
322: connecting rod
332: standard configuration electrode (Second terminal)
333: connecting component
334: recessed portion
335: abutting part
D1: first row
D2: secondary series
D3: third column
E: conductive part
E1: first electrode
E2: second electrode
Ea: link position (center)
G: dust
Pr: probe (first terminal)
S: connection branch
Specific embodiment
Hereinafter, embodiments of the present invention will be described based on the drawings.It should be noted that marking the structure of the same symbol in the various figures
Indicate identical structure, and the description thereof will be omitted.
(first embodiment)
Fig. 1 is the structure for roughly showing the base board checking device for the link block for having an embodiment of the invention
Main view, Fig. 2 is the perspective view for indicating to be set to an example of the gauging fixture of base board checking device shown in FIG. 1, Fig. 3
It is the III-III line sectional view of gauging fixture shown in Fig. 2, Fig. 4 is to decompose, enlargedly show clamp head shown in Fig. 3, connection
The explanatory diagram of module and the structure of bottom plate, Fig. 5 are the top view for indicating to be set to the arrangement of standard array electrode of bottom plate, Fig. 6
The line VI -- VI direction view for indicating to be set to Fig. 4 of the structure of second electrode of link block, Fig. 7 be indicate second electrode and
The sectional view of the structure of standard array electrode, Fig. 8 are the VIII-VIII line sectional views of Fig. 7.
Base board checking device 1 shown in FIG. 1 is for checking the circuit diagram for being formed in the substrate 100 as inspection object
The device of case.
Substrate 100 can be such as semiconductor substrate, printed circuit board, flexible base board, ceramic multilayer circuit board, liquid
The electrode plate of crystal display or plasma display or EL (Electro-Luminescence: electroluminescent) display and half
The various substrates such as package substrate, the film carrier of conductor encapsulation.Make probe contact checkpoint be set properly it is multiple in
Such as pad, electrode, terminal or wiring pattern for being formed in substrate 100 etc..Configuration due to checkpoint is according to being formed in substrate
100 wiring pattern etc. determines, so check if substrate 100 to be changed to the substrate of variety classes (not in specie)
The configuration of point can also change.
Base board checking device 1 shown in FIG. 1 has check device main body 2 and gauging fixture 3U, 3D.Check device main body 2
Mainly have inspection portion 4U, 4D, mobile mechanism of inspection portion 5U, 5D, apparatus for fixing substrate 6 and the shell 7 for storing these each sections.
Apparatus for fixing substrate 6 is constituted in such a way that the substrate 100 of check object is fixed on scheduled position.Mobile mechanism of inspection portion
5U, 5D move inspection portion 4U, 4D suitably in shell 7.
Inspection portion 4U is located at the top for being fixed on the substrate 100 of apparatus for fixing substrate 6.Inspection portion 4D, which is located at, is fixed on substrate
The lower section of the substrate 100 of fixed device 6.Inspection portion 4U, 4D are configured to assembly and disassembly for checking the electricity for being formed in substrate 100
Gauging fixture 3U, 3D of road pattern.Hereinafter, inspection portion 4U, 4D are referred to as inspection portion 4.
As shown in Fig. 2, gauging fixture 3U is constituted in the same manner as gauging fixture 3D other than up and down direction is different, so
The description thereof will be omitted.Hereinafter, gauging fixture 3U, 3D are referred to as gauging fixture 3.As shown in figure 3, gauging fixture 3 has clamp head
30, link block 31, support base 32, base station 33 and multiple cables 34.
Base station 33 is mounted to the generally plate like component of check device main body 2.It is equipped with and check device in base station 33
Multiple device side connection terminals 36 that main body 2 is electrically connected.One end of cable 34 is connected in each device side connection terminal 36.Support
Pedestal 32 is had the bottom plate 321 with generally plate like shape and is linked bottom plate 321 with the state separated with base station 33
Multiple connecting rods 322.Such as there are four connecting rods 322 in the installation of four angles of bottom plate 321.
As shown in figure 4, bottom plate 321 has surface 321a and back side 321b.In bottom plate 321 to penetrate through in the thickness direction thereof
Mode be provided with multiple connecting components 333.Connecting component 333 has the plunger slidingly supported by cylindrical body and by compressing
The force application part of the compositions such as helical spring, the compression helical spring are applied from cylindrical body direction outstanding to making the front end of plunger
Power.
Be equipped with standard configuration electrode 332 in the surface 321a of bottom plate 321, the standard configuration electrode 332 as described later by
The front end for being set to the plunger of connecting component 333 is constituted.The standard configuration electrode 332 is equivalent to Second terminal, to set in advance
It fixed constant space and is arranged with the standard configuration of positive clathrate (rectangular) (referring to Fig. 5).In addition, in connecting component 333
Base end part conducting be connected with the other end (referring to Fig. 4) of cable 34.The arranged spacing of standard configuration electrode 332 is similarly set
It is wide for the arranged spacing than each checkpoint for being set to substrate 100.
Link block 31 passes through in the substrate with the first face 311 and the flat substantially rectangular parallelepiped in the second face 312
Surface and the back side are arranged first electrode E1 and second electrode E2 and are formed.Such as by be laminated multi-disc be formed with along with the first face
Via hole that 311 orthogonal directions extend and connect with via hole and the print of wiring pattern that is extended parallel to the first face 311
The connecting substrates such as brush circuit board, to form link block 31.
In the case, conductive part E first electrode E1 being electrically connected with second electrode E2 by each connecting substrate conducting
Hole and wiring pattern are constituted.As the raw material of connecting substrate, a variety of materials of organic or inorganic can be used, such as can make
With the material of the insulating properties such as resin, ceramics, glass epoxy resin, glass.
It should be noted that link block 31 can also be made for example, by three-dimensional printer (3D printer).As three-dimensional
The mode of printer can adopt in various manners, such as described in Patent Document 1, can be used: utilize Seterolithography device
" Seterolithography mode " flows out the resin for heating and melting bit by bit from the tip of thin nozzle, and stacks the resin on one side
" the thermal melting overlapped way " of monogon forming shape, with powdered resin etc. for raw material, added using high-power laser
" the powder compacting mode " of heat cure, by forming shape using laser and/or the material of cutter cutting sheet and stacking
" piece overlapped way " or other various three-dimensionally shaped methods.
Also, link block 31 with the second face 312 towards the state of 321 side of bottom plate, for example, by seating means such as bolts,
It is installed on bottom plate 321 in a detachable manner.
As shown in figure 4, the first face 311 in link block 31 is formed with by the conductors figure such as electrode pad and/or joint portion
Multiple first electrode E1 that case is constituted.Such as by implementing electroless copper facing in 311 shape of the first face of link block 31
At conductor, implement to have used the so-called of lamination treatment based on photoresist, exposure-processed, development treatment and etching process
Photomechanical production processing, later, by removing conductor layer other than corresponding with first electrode portion part etc., to form first electric
Pole E1.
First electrode E1 is opposite with the rear end Prb of multiple probe Pr supported with supported member 300 as described later
Mode configures.Probe Pr is equivalent to an example of first terminal, and company is connected with first electrode E1 in the rear end Prb of probe Pr
It connects.It should be noted that the conductive component such as spring needle can be set between the rear end Prb and first electrode E1 of probe Pr.
At this point, conductive component is equivalent to an example of first terminal, the end of conductive component and first electrode E1 conductive contact.
In addition, the second face 312 of link block 31 be formed with formed in a manner of same as first electrode E1 by electricity
Multiple second electrode E2 that the conductive patterns such as pole pad and/or joint portion are constituted.Second electrode E2 with be located at link block
The mode that the standard configuration electrode 332 of 31 312 side of the second face (lower face side of Fig. 4) is opposite configures.It should be noted that can lead to
It crosses and for example fills conductive paste in the through hole for being formed in link block 31 and make its solidification, or insertion electric conductivity line etc. comes
Form the conductive part E for being electrically connected first electrode E1 with second electrode E2.
As shown in Figure 6 and Figure 7, multiple second electrode E2 have the outer diameter and 35 μm or so of thickness of such as 1.5mm or so,
And in a manner of corresponding with the configuration of standard configuration electrode 332, in the second face 312 with constant space and with the standard of positive clathrate
Configuration arrangement.In addition, each second electrode E2 have from the link position of conductive part E (hereinafter referred to as center Ea) with
The more connection branch S that substantially the same angle interval extends radially.In legend, each second electrode E2 is respectively provided with
It is in three connection branch S that Y-shaped extends with 120 ° of angle interval.It should be noted that " substantial " word is not required for accurately
Ground is identical, but the concept (similarly hereinafter) of the error including, for example, ± 10% or so.
Also, each second electrode E211 for being arranged on the first row D1 of the positive grid extended along the up and down direction of Fig. 6,
Two electrode E212 and second electrode E213 etc. are respectively facing substantially same direction so that it connects one of branch S S1a, are scheming
The mode of top in example for Fig. 6 is arranged.It is disposed in second electrode E221 on the secondary series D2 adjacent with first row D1, second
Electrode E222 and second electrode E223 etc. are respectively facing the connection branch S1a with first row D1 so that it connects one of branch S S2a
The substantially opposite direction in the direction of institute's direction, i.e., the mode of the lower section in legend for Fig. 6 are arranged.
In addition, the institutes such as second electrode E231 and second electrode E232 for being disposed on the third column D3 adjacent with secondary series D2
One of the connection branch S having S3a is to be respectively facing and be constituted S2a institute of the connection branch direction of the second electrode E2 of secondary series D2
Direction substantially opposite direction, the i.e. mode with the top for being similarly Fig. 6 the connection branch S1a of first row D1 be arranged.
In addition, although the illustration is omitted, but the second electrode that is disposed on adjacent with third column D3 the 4th column is had
One of connection branch S to be respectively facing and be constituted the direction of the connection branch S3a institute direction of the second electrode E2 of third column D3
Substantially opposite direction, the i.e. mode with the lower section for being similarly Fig. 6 the connection branch S2a of secondary series D2 are arranged.
As a result, so that one of connection branch S possessed by second electrode E2 is located at adjacent with second electrode E2 second
Mode between the adjacent pair connection branch S of electrode E2 is separately equipped with each second electrode E2.For example, so that in first row D1
The connection branch S1a that extends upwards of Ea from the central position of the second electrode E212 from upper the second row of number be located in first row
The connection branch S1b that the Ea from the central position of the second electrode E211 of the top line of D1 extends to the obliquely downward of Fig. 6 respectively
It is arranged with the mode connecting between branch S1c.
In addition, so as to being extended downward in the Ea from the central position of the second electrode E221 of the top line of secondary series D2
Connection branch S2a be located at secondary series D2 the second electrode E212 from upper the second row of number Ea from the central position respectively to figure
Mode between the connection branch S2b that 6 oblique upper extends and connection branch S2c arranges.
In addition, so that the oblique upper to the left Ea from the central position of the second electrode E221 in the top line of secondary series D2
Extension connection branch S2c be located at first row D1 top line second electrode E211 Ea from the central position upwards
The mode between connection branch S1c that the connection branch S1a of extension and to the right obliquely downward extend is arranged.Similarly, so that third
Connection one of branch S3b possessed by the second electrode E231 of D3 is arranged to be located at possessed by the second electrode E221 of secondary series D2
A pair of connection branch S2b and the mode connected between branch S2a are arranged.
If link block 31 is installed on bottom plate 321, multiple second electrode E2 and corresponding standard configuration electricity
Pole 332 contacts respectively and is connected.Standard configuration electrode 332 constitutes the tool of the front end of plunger of connecting component 333 by being set to
Have and constituted such as the cupuliform pin of the outer diameter of 0.9mm or so, front end face is as shown in fig. 7, with prominent from the surface 321a of bottom plate 321
State setting out.
Standard configuration electrode 332 has the recessed portion 334 of circular cone shape and is formed in the abutting part 335 of its front end.It abuts
Portion 335 is formed as width dimensions t and is set to such as 50 μm of circular ring-types below.Also, it is configured to by making to abut
Portion 335 contacts respectively with each connection branch S of second electrode E2, so that second electrode E2 and standard configuration electrode 332 are electrically connected
It connects.
Clamp head 30 has multiple probe Pr and supports the support member 300 of multiple probe Pr.Probe Pr is in addition to front end
Other than Pra and rear end Prb, periphery is insulation-coated, and front end Pra and rear end Prb are not exposed by insulation-coated.Branch
Support part part 300 has: the support of the top plate 301 for the plate being oppositely disposed with substrate 100, the plate being oppositely disposed with top plate 301
Plate 302 and it is separated from each other top plate 301 and support plate 302 substantially in parallel and multiple pillars 303 for being supported.For example,
At four angles of top plate 301, there are four pillars 303 for installation.
Multiple through holes are formed in a manner of corresponding with the configuration for the checkpoint for being set to substrate 100 in top plate 301.?
Support plate 302 is formed with multiple through holes in a manner of corresponding with multiple through holes of top plate 301 are formed in.Also, each probe
Pr is supported with the front end Pra of each probe Pr from the surface of top plate 301 state supported member 300 slightly outstanding.
Clamp head 30 is installed on link block 31 for example, by seating means such as bolts in a detachable manner.If
Clamp head 30 is installed on link block 31, then since the configuration of the rear end Prb with probe Pr is accordingly configured with the first electricity
Pole E1, therefore the rear end Prb of multiple probe Pr is contacted with multiple first electrode E1 respectively.
Front end is determined since configuration by the checkpoint with substrate 100 is accordingly formed in the through hole of top plate 301
The position of portion Pra, so front end Pra and the configuration of the checkpoint of substrate 100 accordingly configure.As a result, if by fixture
First 30 abut with substrate 100, then the front end Pra of each probe Pr is abutted with each checkpoint of substrate 100, and each probe Pr because
The pressing force and be bent, front end Pra outstanding is pressed into top plate 301.Also, it is produced according to because of the bending of each probe Pr
Raw elastic restoring force, each front end Pra are flexibly abutted with each checkpoint, the contact stabilization of each checkpoint and each probe Pr
It improves.
According to this structure, each checkpoint of substrate 100 is via front end Pra to check point contacts with multiple respectively
Mode multiple probe Pr, the first electrode E1 for being set to link block 31 made of being arranged, conductive part E and second electrode E2 and
Be set to standard configuration electrode 332, connecting component 333 and the cable 34 of bottom plate 321 and with device side connection terminal 36 and check
The conducting connection of apparatus main body 2.As a result, check device main body 2 can carry out electric checking to substrate 100.
Also, due to being configured to that second electrode E2 is arranged in the mode opposite with standard configuration electrode 332, and second
Electrode E2 is provided with from the center Ea as the link position with conductive part E with substantially the same angle interval in radiation
The more connection branch S that shape extends, so second electrode E2 and standard configuration electrode can be effectively improved in simple structure
332 contact stabilization.
That is, in the first embodiment, since second electrode E2 to be formed to have to the Y-shaped of three connection branch S, institute
With compared with the situation that second electrode is formed as to discoid, such as second from the upper side of Fig. 7 (VIII-VIII line direction)
Shown in Fig. 8 obtained from electrode E2, the face of the contact portion M of second electrode E2 and standard configuration electrode 332 can be greatly reduced
It accumulates, and sufficiently improves the contact pressure of the two, is i.e. the pressing force of per unit area.As a result, even if second electrode E2 table
In the case that face is formed with thin oxidation film, it also can break through the oxidation film and make second electrode E2 and standard configuration electrode 332
Conducting connection.
In addition, due to arranging second electrode E2 in the second face 312 of link block 31 with the standard configuration of positive clathrate, and
And it so as to is connected possessed by the connection branch S and second electrode E2 adjacent with second electrode E2 possessed by second electrode E2
The separated state of branch S is arranged, so the connection branch S of adjacent second electrode E2 can be prevented to be in contact with each other,
And ensure the insulating properties of each second electrode E2, and effectively configure more second electrode E2.
In the first embodiment, multiple second electrode E2 with three connection branch S are arranged in positive clathrate, and
And so that the connection branch S1a for each second electrode E2 being disposed on the first row D1 of positive grid be respectively facing it is substantially the same
The mode in direction (top of Fig. 6) is arranged.As a result, it is possible to make the second electrode E212 from upper the second row of number in first row D1
Ea from the central position extend upwards connection branch S1a be located at first row D1 top line second electrode E211
The connection branch S1b that extends to the obliquely downward of Fig. 6 of Ea from the central position and connection branch S1c between.As a result, it is easy to ensure that
Insulation distance in the up and down direction of Fig. 6 between adjacent second electrode E211 and second electrode E212.As a result, it is possible to ensure
In the insulating properties of each second electrode E2 of first row D1 arrangement, and each second electrode E2 is arranged to high-density.
In addition, so that connection point possessed by each second electrode E2 being disposed on the secondary series D2 adjacent with first row D1
The mode that one of branch S S2a is respectively facing the direction substantially opposite with the connection branch S1a of first row D1 is arranged.As a result, energy
Enough make the connection point that oblique upper extends to the left of Ea from the central position in the second electrode E221 of the top line of secondary series D2
Branch S2c be located at the connection branch S1a of a pair of possessed by the second electrode E211 of the top line of first row D1 with connect point
Between branch S1c.Thereby, it is possible to ensure that adjacent second electrode E211 and second electrode E221's on the left and right directions of Fig. 6 is exhausted
Edge, and keep first row D1 and secondary series D2 close to each other and each second electrode E2 is arranged to high-density.
It should be noted that the radical of connection branch S possessed by second electrode E2 is not limited to three, can also be as be described hereinafter the
Two embodiments show four, or may be five or more.
Fig. 9 is the figure corresponding with Fig. 8 for indicating the second electrode E2 ' of the variation as second electrode E2, and Figure 10 is Fig. 9
X-X line sectional view.In second electrode E2 ' shown in Fig. 9, it is provided with linear from the center Ea of second electrode E2 '
Two connection branch S ' that shape extends.At this point, as shown in Figure 10, if in the second face 312 of link block 31 and standard configuration
Dust G is sandwiched between the side edge of electrode 332, then is existed between being formed between second electrode E2 and standard configuration electrode 332
Gap and a possibility that generate poor contact.
In this regard, in the case where second electrode E2 is provided with three or more connection branch S, though the second face 312 with
Dust G is sandwiched between the side edge of standard configuration electrode 332, also standard configuration electrode 332 can be made to connect branch S with more
In at least one contact, a possibility that can reduce poor contact.
In particular, as shown in the first embodiment, using the structure that three connection branch S are arranged in second electrode E2
In the case of, according to principle same the case where the chair with three legs is uprightly set to ground, by second electrode
When E2 is electrically connected with standard configuration electrode 332, can make standard configuration electrode 332 respectively with each connection branch S contact, Neng Gouyou
Effect is reduced because second electrode E2 and standard configuration electrode 332 are in the generation of poor contact caused by the contact condition of part.
In addition, as described above according to have link block 31, by front end Pra with can respectively with multiple inspection point contacts
Mode be arranged made of probe Pr constitute first terminal, support the support member 300 of probe Pr and be equipped with by marking
The gauging fixture 3 and base board checking device 1 of the bottom plate 321 for the Second terminal that quasi- configuration electrode 332 is constituted, can be greatly reduced the
The contact area of two electrode E2 and standard configuration electrode 332, and the contact pressure for sufficiently improving the two therefore can cheaply
Manufacture is easily reduced the gauging fixture 3 and base board checking device 1 of the generation of poor contact.
In addition, first electrode E1 is arranged in the mode opposite with the rear end Prb of probe Pr, with standard configuration electrode
In the case that second electrode E2 is arranged in 332 opposite modes, when link block 31 to be changed to the link block of different size,
Bottom plate 321 can be changed without and connect new link block 31 and bottom plate 321 conducting.It therefore, there is no need to bottom plate 321 again
The operation for arranging cable 34 can reduce working hour when change inspection object.
That is, configuring probe Pr due to needing the configuration for the checkpoint for cooperating substrate 100 for support member 300
Front end Pra, so if substrate 100 change if need to remake support member 300.At this point, by the base of probe Pr
End be configured to positive clathrate and contact it with the electrode of link block 31 mode in, if the checkpoint of substrate 100
Density is high, then can not only change the configuration of probe front by probe backend arrangement at positive clathrate, can not utilize check device
Main body checks such substrate 100.
However, configuring the first electricity of link block 31 according to the opposite mode of the configuration with the rear end Prb with probe Pr
The gauging fixture 3 of pole E1, in the case where accordingly changing support member 300 with the checkpoint of substrate 100, due to can be with it
Cooperate and make link block 31, so being easy to increase the inspection object that can be used as check object.
Also, the standard configuration electrode 332 of the surface 321a due to being formed in bottom plate 321 is with preset standard configuration
It is configured, and the second electrode E2 of link block 31 accordingly formed with the standard configuration, so if will again
The link block 31 of production is exchanged with pervious link block 31, then can be changed without bottom plate 321 and by link block 31 and bottom
The conducting connection of plate 321.The operation that therefore, there is no need to rearrange cable 34 can reduce probe when change inspection object
With the cable connection working hour of check device main body.
In addition, link block 31 realizes that the clamp head 30 of conducting is different from by substantially rodlike probe Pr, Neng Goujie
First electrode E1 and second electrode E2 are freely routed by conductive part E.Therefore, can make with the rear end Prb phase with probe Pr
Pair the mode first electrode E1 configured and the second electrode E2 that is configured in a manner of corresponding with standard configuration be easily connected.
In addition, link block 31 is free to setting first electrode E1's and second electrode E2 by changing its thickness
Spacing distance, therefore be easy to exchange with the existing link block for being installed on base board checking device.For example, having in the second electricity
Pole is welded in the gauging fixture of existing link block of contact pin, and standard configuration electrode is equipped in a manner of connecting with contact pin
332, the contact pin is arranged in such a way that the second face from link block is outstanding.By being directed to such existing gauging fixture
The link block 31 of the overhang of above-mentioned contact pin is increased, using thickness so as to have and above-mentioned existing link block
Compatibility.
In addition, there is the recessed portion 334 of circular cone shape according to standard configuration electrode 332 as described above and be formed in its front end
Circular cricoid abutting part 335, and by the abutting part 335 be set as can be with the connection branch S contact of second electrode E2
Structure can be more greatly reduced compared with the bearing surface of standard configuration electrode 332 to be formed as to solid round situation
The contact area of each second electrode E2 and standard configuration electrode 332, and further increase the contact pressure of the two.
It should be noted that recessed portion 334 is not limited to circular cone shape, the various shapes such as pyramid mesa-shaped, hemispherical can be changed to.
In addition, abutting part 335 is also not necessarily limited to circular ring-type, the various shapes such as the ring-type of polygon can be changed to.
Furthermore it is possible to replace as shown in Figure 3 and Figure 4 by support base 32 and cable 34 by device side connection terminal 36 with
The above-mentioned first embodiment of second electrode E2 connection, and be configured to device side connection terminal 36 using printed circuit board
It is electrically connected with second electrode E2.
In addition, link block is not necessarily limited to be installed to gauging fixture and come using after first terminal can not be probe
End and the conductive component be connected with the rear end, Second terminal can not be standard configuration electrode.As long as link block makes into
It is connected for the first terminal of connecting object with the Second terminal for becoming connecting object.In addition, first electrode and second electrode
It is not limited to be provided with multiple examples, is also possible to each setting one.
(second embodiment)
Next, the gauging fixture to second embodiment of the present invention is illustrated.Figure 11 is to indicate to be set to this hair
The figure corresponding with Fig. 6 of the structure of the second electrode E2 of the gauging fixture of bright second embodiment.
In the second embodiment shown in Figure 11, it is arranged in the second face 312 of link block 31 with positive clathrate more
A second electrode E2a and second electrode E2b, the multiple second electrode E2a and second electrode E2b have from as with conductive part
The center Ea of the link position of E is in four connection branch Sa of cross extension with substantial 90 ° of angle interval respectively
~Sd.
Also, it has been arranged connection branch Sa~Sd's in a manner of the ranks direction towards positive grid being alternately arranged
Second electrode E2a and connection branch Sa with the angle α extension for the ranks direction relative to positive grid being essentially 45 °~
The second electrode E2b of Sd, to so as to connect branch Sa~Sd possessed by the second electrode E2b adjacent with second electrode E2a
One of be located at second electrode E2a possessed by a pair connect branch Sa~Sd between mode be separately equipped with each second electrode
E2a、E2b。
In this case of composition, it compared with the situation that second electrode is formed as to discoid, can also be greatly reduced
The contact area of each second electrode E2a and each second electrode E2b and standard configuration electrode 332, and sufficiently improve the contact of the two
Pressure.As a result, can also break through the oxygen even if forming thin oxidation film on the surface of second electrode E2a and second electrode E2b
Change film and each second electrode E2a and each second electrode E2b and standard configuration electrode 332 is connected and connects.
In addition, pass through so that connection branch Sa~Sd possessed by the second electrode E2b adjacent with second electrode E2a it
One, i.e., with one of connection branch Sa~Sd of angle α extension that the ranks direction relative to positive grid is essentially 45 ° be located at
A pair possessed by the second electrode E2a being arranged towards the mode in the ranks direction of positive grid connects between branch Sa~Sd
Mode is separately equipped with each second electrode E2a and each second electrode E2b, so as to preventing the company of adjacent second electrode E2a
It meets branch Sa~Sd to contact with connection branch Sa~Sd of second electrode E2b, and ensures each second electrode E2a and each second electrode
The insulating properties of E2b, and the miniaturization of more second electrode E2a and second electrode E2b and realization device are arranged to high-density.
Claims (7)
1. a kind of link block, which is characterized in that for becoming the first terminal of connecting object and becoming the of connecting object
Two-terminal conducting, the link block have:
First face is provided with the first electrode for contacting with the first terminal；
Second face, it is opposite with first face, and it is provided with the second electrode for contacting with the Second terminal；And
The first electrode is electrically connected by conductive part with the second electrode,
The second electrode has from the link position relative to the conductive part with substantially the same angle interval in radiation
The more connection branches that shape extends.
2. link block according to claim 1, which is characterized in that in second face, with positive clathrate and with preparatory
Multiple second electrodes are arranged in the standard configuration of setting,
With possessed by any one of second electrode in multiple second electrodes connection branch and with this any one
The connection separated state of branch possessed by the adjacent second electrode of the second electrode is arranged.
3. link block according to claim 2, which is characterized in that multiple second electrodes are respectively provided with described in three
Branch is connected,
The each second electrode being disposed on the first row of the standard configuration is so that each second electrode is had
The mode that one of described connection branch having is respectively facing substantially same direction is arranged,
The each second electrode being disposed on the secondary series adjacent with the first row is so that each second electrode
One of possessed connection branch is respectively facing substantially opposite with the direction of the institute of the connection branch direction of the first row
The mode in direction be arranged.
4. link block according to claim 2, which is characterized in that multiple second electrodes are respectively provided with described in four
Branch is connected,
The direction for the institute of the connection branch direction that any one of second electrode in multiple second electrodes has and
Between the direction for the institute of the connection branch direction that the second electrode adjacent with any one of second electrode has
Angulation is essentially 45 °.
5. a kind of gauging fixture, which is characterized in that for making the multiple checkpoints for being set to inspection object and to the inspection
Object carries out the check device main body conducting of electric checking, and the gauging fixture has:
Link block described in any one of claim 2~4；
Multiple probes, front end in a manner of the multiple inspection point contact that can be arranged respectively；
Support member supports multiple probe；And
Bottom plate is equipped with multiple standard configuration electrodes for being electrically connected with the check device main body,
The multiple standard configuration electrode is configured with the standard configuration,
The probe or the conductive member be connected with the rear end of the probe are the first terminal,
The standard configuration electrode is the Second terminal.
6. gauging fixture according to claim 5, which is characterized in that the standard configuration electrode has recessed portion and formation
Cricoid abutting part in the front end of the recessed portion,
The abutting part, which is disposed of, to be contacted with the connection branch.
7. a kind of base board checking device, which is characterized in that have: gauging fixture described in claim 5 or 6；And the inspection
Look into apparatus main body.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017143208A JP7024238B2 (en) | 2017-07-25 | 2017-07-25 | Connection module, inspection jig, and board inspection equipment |
| JP2017-143208 | 2017-07-25 |
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| Publication Number | Publication Date |
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| CN109298310A true CN109298310A (en) | 2019-02-01 |
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| CN201810824230.8A Active CN109298310B (en) | 2017-07-25 | 2018-07-25 | Connection module, inspection jig, and substrate inspection device |
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|---|---|
| JP2019023598A (en) | 2019-02-14 |
| CN109298310B (en) | 2023-10-27 |
| JP7024238B2 (en) | 2022-02-24 |
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