CN109285958A - Organic light-emitting display device and preparation method - Google Patents
Organic light-emitting display device and preparation method Download PDFInfo
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- CN109285958A CN109285958A CN201710589558.1A CN201710589558A CN109285958A CN 109285958 A CN109285958 A CN 109285958A CN 201710589558 A CN201710589558 A CN 201710589558A CN 109285958 A CN109285958 A CN 109285958A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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Abstract
The embodiment of the invention provides a kind of organic light-emitting display device and preparation methods, comprising: substrate；The organic luminescent device being formed on the substrate；The thin-film encapsulation layer being formed on the organic luminescent device, the thin-film encapsulation layer include inorganic material layer；The inorganic material layer includes the lamination of at least two layers inoranic membrane, and at least one parameter in the refractive index of inoranic membrane described in adjacent two layers, internal stress, hardness and elasticity modulus is different.The embodiment of the invention provides a kind of organic light-emitting display device and preparation methods, inorganic material layer includes the lamination of multilayer inoranic membrane in thin-film encapsulation layer, and at least one parameter in the consistency of adjacent two layers inoranic membrane, internal stress, hardness or elasticity modulus is different, it can be invaded to avoid water oxygen, organic light-emitting display device bending resistance is promoted, solves the problems, such as to be also easy to produce crackle in bending process.
Description
Technical field
The present embodiments relate to technical field of semiconductors more particularly to a kind of organic light-emitting display device and preparation sides
Method.
Background technique
Electronic device especially organic electronic device in air steam and oxygen it is especially sensitive, it is therefore desirable to organic
Device is packaged the performance and used life to guarantee device.Organic light-emitting display device generally include for stop oxygen and
The sealing structure of steam often uses high density inorganic layer effectively to prevent steam in diaphragm seal structure in the prior art
Display is penetrated into oxygen.Thin-film packing structure in the prior art is the multi-layer laminate structure of inorganic layer, organic layer, so
And though fine and close inorganic layer stops water oxygen ability higher, rigid structure is then shown as when reaching certain thickness, it is aobvious in flexibility
Show that easily stress generates defect or crackle even fragmentation in device bending use process, water oxygen will penetrate into organic hair from fault location
In light display device, so that influencing the performance of the luminous organic material in machine luminous display unit.
Summary of the invention
In view of this, the embodiment of the invention provides a kind of organic light-emitting display device and preparation method, it can be to avoid water
Oxygen invasion, promotes organic light-emitting display device bending resistance, solves the problems, such as to be also easy to produce crackle in bending process.
In a first aspect, the embodiment of the invention provides a kind of organic light-emitting display devices, comprising:
Substrate；
The organic luminescent device being formed on the substrate；
The thin-film encapsulation layer being formed on the organic luminescent device, the thin-film encapsulation layer include inorganic material layer；Institute
State the lamination that inorganic material layer includes at least two layers inoranic membrane, and the refractive index of inoranic membrane described in adjacent two layers, internal stress, hardness
And at least one parameter in elasticity modulus is different.
Second aspect, the embodiment of the invention provides a kind of preparation methods of organic light-emitting display device, comprising:
Substrate is provided；
Organic luminescent device is formed on the substrate；
Thin-film encapsulation layer is formed on the organic luminescent device, the thin-film encapsulation layer includes inorganic material layer；It is described
Inorganic material layer includes the lamination of at least two layers inoranic membrane, and the refractive index of inoranic membrane described in adjacent two layers, internal stress, hardness or
At least one parameter in person's elasticity modulus is different.
A kind of inorganic material the embodiment of the invention provides organic light-emitting display device and preparation method, in thin-film encapsulation layer
The bed of material includes the lamination of multilayer inoranic membrane, and in the refractive index of adjacent two layers inoranic membrane, internal stress, hardness or elasticity modulus
At least one parameter is different.The different film layer of refractive index, consistency is also different, and the high inoranic membrane of consistency can be to avoid water oxygen
Invasion, the low inoranic membrane of consistency can alleviate the stress in inoranic membrane, promoted and solve organic light-emitting display device bending resistance
Can, it avoids the problem that being also easy to produce crackle in bending process, at the same time the internal stress, hardness and elasticity of adjacent two layers inoranic membrane
At least one parameter in modulus does not avoid water oxygen from invading it is also possible to play, and alleviates the stress in inoranic membrane, is promoted and is solved
Organic light-emitting display device bending resistance.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of organic light-emitting display device provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of another organic light-emitting display device provided in an embodiment of the present invention；
Fig. 3 is a kind of structural schematic diagram of inorganic material layer provided in an embodiment of the present invention；
Fig. 4 is the structural schematic diagram of another inorganic material layer provided in an embodiment of the present invention；
Fig. 5 is the structural schematic diagram of another inorganic material layer provided in an embodiment of the present invention；
Fig. 6 is the structural schematic diagram of another inorganic material layer provided in an embodiment of the present invention；
Fig. 7 is a kind of organic light-emitting display device block-water performance test chart provided in an embodiment of the present invention；
Fig. 8 is a kind of organic light-emitting display device bending sketch map provided in an embodiment of the present invention；
Fig. 9 is a kind of top view of organic light-emitting display device provided in an embodiment of the present invention；
A kind of preceding block-water performance survey with after bending of Figure 10 organic light-emitting display device bending provided in an embodiment of the present invention
Attempt；
Figure 11 is a kind of organic light-emitting display device preparation method flow chart provided in an embodiment of the present invention；
Figure 12 a- Figure 12 d is a kind of each step pair of organic light-emitting display device preparation method provided in an embodiment of the present invention
The sectional view answered.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
Fig. 1 is a kind of structural schematic diagram of organic light-emitting display device provided in an embodiment of the present invention, should as shown in Fig. 1
Device includes: substrate 1；Form organic luminescent device 2 on the base 1；The thin-film package being formed on organic luminescent device 2
Layer, thin-film encapsulation layer includes inorganic material layer 30；Lamination of the inorganic material layer 30 including at least two layers inoranic membrane, and adjacent two layers
At least one parameter in the refractive index of inoranic membrane, internal stress, hardness and elasticity modulus is different.Illustratively, it is shown in Fig. 1
The lamination of 4 layers of inoranic membrane, respectively inoranic membrane 301, inoranic membrane 302, inoranic membrane 303 and inoranic membrane 304, and inoranic membrane
301, in inoranic membrane 302, inoranic membrane 303 and inoranic membrane 304 refractive index, internal stress, hardness of adjacent two layers inoranic membrane and
At least one parameter in elasticity modulus is different.
In the present embodiment, the organic luminescent device 2 formed on the base 1 is usually passed by anode, hole injection layer, hole
Defeated layer, organic luminous layer, electron transfer layer, electron injecting layer and cathode are constituted, the hole of anode transmitting and emission of cathode
Electronics is compound in organic luminous layer and emits photon and realizes luminous, hole injection layer, hole transmission layer, organic luminous layer, electronics
Transport layer, electron injecting layer are organic material, these organic materials and metallic cathode be easy to be influenced by steam and oxygen and
Failure.
During organic light-emitting display device is bent, thin-film encapsulation layer will receive a degree of destruction, no
It is evitable to crack, and crackle can further be spread, and seriously affect thin-film encapsulation layer to display panel inside device
The packaging effect of part.Compared to the structure with the single inorganic film in thin-film encapsulation layer in the prior art, the embodiment of the present invention is provided
A kind of organic light-emitting display device, the inorganic material layer in thin-film encapsulation layer which includes include the folded of multilayer inoranic membrane
Layer, and at least one parameter in the refractive index of adjacent two layers inoranic membrane, internal stress, hardness or elasticity modulus is different.Refraction
The different film layer of rate, consistency is also different, and the high inoranic membrane of consistency can invade to avoid water oxygen, the low inoranic membrane of consistency
The stress in inoranic membrane can be alleviated, promoted and solve organic light-emitting display device bending resistance, avoid easily producing in bending process
The problem of raw crackle, the at the same time internal stress, hardness and at least one parameter in elasticity modulus of adjacent two layers inoranic membrane
It does not avoid water oxygen from invading it is also possible to play, alleviates the stress in inoranic membrane, promoted and solve organic light-emitting display device bending resistance
Folding endurance energy.
Optionally, based on the above technical solution, referring to fig. 2, thin-film encapsulation layer 3 further includes organic material layer 31；
Organic material layer 31 and the setting of 30 lamination of inorganic material layer.31 material of organic material layer is softer, can increase organic light emission
The bending resistance of display.
Optionally, the small numberical range of refractive index is to be less than or equal to more than or equal to 1.7 in adjacent two layers inoranic membrane
1.9；The big numberical range of refractive index is to be less than or equal to 2.4 greater than 1.9 in adjacent two layers inoranic membrane.Illustratively, 1 He of table
Table 2 is the ranges of indices of refraction of the inoranic membrane in two kinds of inorganic material layers 30.The range of the refractive index of inoranic membrane in Tables 1 and 2
It is divided into two sections, is greater than or equal to 1.7 respectively, be less than or equal to 1.9 and be greater than 1.9, less than or equal to 2.4.In table 1
The refractive index of the inoranic membrane adjacent with organic luminescent device 2 is smaller.The folding of the inoranic membrane adjacent with organic luminescent device 2 in table 2
It is larger to penetrate rate.Whether what the embodiment of the present invention did not limited the refractive index of the inoranic membrane adjacent with organic luminescent device 2 is refractive index
Biggish inoranic membrane.
The ranges of indices of refraction of inoranic membrane in 1 inorganic material layer of table
| Inorganic material layer 30 | The numberical range of refractive index |
| Inoranic membrane 301 | More than or equal to 1.7, it is less than or equal to 1.9 |
| Inoranic membrane 302 | Greater than 1.9, it is less than or equal to 2.4 |
| Inoranic membrane 303 | More than or equal to 1.7, it is less than or equal to 1.9 |
| Inoranic membrane 304 | Greater than 1.9, it is less than or equal to 2.4 |
The ranges of indices of refraction of inoranic membrane in 2 inorganic material layer of table
| Inorganic material layer 30 | The numberical range of refractive index |
| Inoranic membrane 301 | Greater than 1.9, it is less than or equal to 2.4 |
| Inoranic membrane 302 | More than or equal to 1.7, it is less than or equal to 1.9 |
| Inoranic membrane 303 | Greater than 1.9, it is less than or equal to 2.4 |
| Inoranic membrane 304 | More than or equal to 1.7, it is less than or equal to 1.9 |
Optionally, referring to table 3 and table 4, in adjacent two layers inoranic membrane the lower internal stress numberical range of internal stress be less than
Or it is equal to 100Mpa；The higher internal stress numberical range of internal stress is greater than 100MPa in adjacent two layers inoranic membrane.The present invention is real
It applies example and does not limit whether the internal stress for inoranic membrane adjacent with organic luminescent device 2 is the biggish inoranic membrane of internal stress.Inside answer
The lesser inorganic membrane stress of power is concentrated small, and the internal stress of adjacent two layers inoranic membrane is different, and interior in the big inoranic membrane of internal stress is answered
Power can discharge in the small inoranic membrane of internal stress, therefore it is possible to prevente effectively from organic light-emitting display device generation in bending is split
Line, to improve the bending resistance of organic light emitting display panel.
The internal stress numberical range of inoranic membrane in 3 inorganic material layer of table
| Inorganic material layer 30 | The numberical range of internal stress |
| Inoranic membrane 301 | Less than or equal to 100Mpa |
| Inoranic membrane 302 | Greater than 100MPa |
| Inoranic membrane 303 | Less than or equal to 100Mpa |
| Inoranic membrane 304 | Greater than 100MPa |
The internal stress numberical range of inoranic membrane in 4 inorganic material layer of table
| Inorganic material layer 30 | The numberical range of internal stress |
| Inoranic membrane 301 | Greater than 100MPa |
| Inoranic membrane 302 | Less than or equal to 100Mpa |
| Inoranic membrane 303 | Greater than 100MPa |
| Inoranic membrane 304 | Less than or equal to 100Mpa |
Optionally, every layer of inoranic membrane with a thickness of 1nm is greater than or equal to, be less than or equal to 1000nm.Optionally, inorganic material
The bed of material with a thickness of be greater than or equal to 50nm, be less than or equal to 2000nm.The thickness of material will affect the refractive index of itself, interior answer
The parameters such as power, hardness and elasticity modulus, therefore in the embodiment of the present invention, define the thickness and inorganic material of every layer of inoranic membrane
The overall thickness of the bed of material, oxygen (the protection organic luminescent device) so that thin-film encapsulation layer preferably blocks water, even if there is the case where crackle
Under, crackle can also be prevented to continue to spread, and from being not likely to produce crackle in bending and promote bending resistance.
Optionally, referring to fig. 2, Fig. 3 and Fig. 4, the surface of every layer of inoranic membrane in inoranic membrane 301,302,303 and 304
For any one in plane (referring to fig. 2), waveform (referring to Fig. 3) or zigzag (referring to fig. 4).Nothing shown in Fig. 5
The surface of every layer of inoranic membrane in machine film 301,302,303 and 304 had not only included plane but also had included zigzag.The embodiment of the present invention
In the surface of every layer of inoranic membrane be arranged to different shapes, waveform, zigzag and not only included plane but also include sawtooth this
The shape of sample can accomplish that there are at least one in refractive index, internal stress, hardness and elasticity modulus in same level height
The different inoranic membrane of parameter, in this way, all realizing refractive index, interior in two dimensions of horizontal direction and vertical direction of inoranic membrane
The structure setting of the different inoranic membrane of at least one parameter in stress, hardness and elasticity modulus, so that thin-film encapsulation layer is more preferable
The oxygen that blocks water (protection organic luminescent device), even if crackle can also be prevented to continue to spread, Yi Ji in the case where there is crackle
It is not likely to produce crackle when bending and promotes bending resistance.
Optionally, inoranic membrane is in silicon nitride, silica, aluminium oxide, silicon oxynitride, silicon carbide and O-N-Si aluminium
Any one is a variety of.In the embodiment of the present invention, the inoranic membrane that inorganic material layer includes can be a kind of or a variety of.
Silicon nitride, silica, aluminium oxide, silicon oxynitride, silicon carbide and O-N-Si aluminium these inorganic material, physics, chemical property
It is sufficiently stable, there is high consistency, high dielectric constant and good insulation performance, can be used to form thin-film encapsulation layer
In inorganic material layer because when at least one ginseng in refractive index, internal stress, hardness and elasticity modulus in the lamination of inoranic membrane
When number is different, thin-film encapsulation layer can be made to block water oxygen (protection organic luminescent device), even if in the case where there is crackle, it can also
To prevent crackle from continuing to spread, and crackle is not likely to produce in bending and promotes bending resistance.
The embodiment of the invention provides a kind of organic light-emitting display device, illustratively used shown in Fig. 6 in the device
Inorganic material layer 30, the inorganic material layer 30 with a thickness of 600nm, and the lamination including inoranic membrane 305 and inoranic membrane 306, nothing
Machine film 305 and inoranic membrane 306 are illustratively silicon nitride, and wherein the numberical range of the refractive index of silicon nitride 305 is to be greater than or wait
In 1.7, it is less than or equal to 1.9.The consistency of corresponding silicon nitride 305 is lower, and the numberical range of 306 refractive index of silicon nitride is
Greater than 1.9, it is less than or equal to 2.4.Refractive index can reflect the consistency of material, in the embodiment of the present invention, the number of refractive index
Being worth range is the silicon nitride 306 less than or equal to 1.9 more than or equal to 1.7, the numberical range compared to refractive index be greater than 1.9,
Corresponding silicon nitride 305 less than or equal to 2.4, the consistency of silicon nitride 306 is lower, i.e., inorganic in the embodiment of the present invention
The lamination of the different inoranic membrane of the consistency that material layer 30 includes, and the consistency of two inoranic membrane of arbitrary neighborhood is all different.This
Inventive embodiments carry out block-water performance test to using the organic light-emitting display device of the inorganic material layer 30 shown in Fig. 6, referring to
Fig. 7, over time, within 120 hours, the order of magnitude of moisture-vapor transmission is 10 to organic light-emitting display device- 4g/(m2.day), good water preventing ability is shown.The reason is that, inorganic material layer provided in an embodiment of the present invention includes different causes
The stacking of the inoranic membrane of density.
The embodiment of the present invention carries out bending 10 to the organic light-emitting display device using the inorganic material layer 30 shown in Fig. 6
Ten thousand times, crooked process radius 5mm, and have recorded organic light emission using optical microscopy (Optical Microscope, OM) and show
OM picture of the showing device before and after bending, and the block-water performance after bending is tested.
Wherein Fig. 8 and Fig. 9 has carried out OM test with regard to the bending region of the organic light-emitting display device of bending front and back respectively,
Fig. 8 is the OM figure in the bending region before bending, and Figure 11 is the OM figure in the bending region after bending.Referring to Fig. 8 and Fig. 9, need
Bright, the black region in the upper left corner is that marker is put in the mark line that organic light-emitting display device is drawn by OM in Fig. 8 and Fig. 9
Image after big close to the white area 40 of the black region of density bullet line, and finds no crackle, it is seen that the present invention is real
The organic light-emitting display device bending performance for applying example offer is good.The reason is that, the inorganic material layer 30 in the embodiment of the present invention
The lamination of the different inoranic membrane of the consistency for including, and the consistency of two inoranic membrane of arbitrary neighborhood is all different.Consistency is different
Inoranic membrane lamination in, consistency it is low be stacked in organic light-emitting display device bending during can slow down stress collection
In, and internal stress is discharged, therefore can be during bending, the generation of effective Crack prevention, so that organic light emission is aobvious
The bending resistance of showing device is good.
The embodiment of the present invention uses the organic light-emitting display device of the inorganic material layer 30 shown in Fig. 6 over the ground, by 100,000
After secondary bending, block-water performance test is carried out, test result is referring to Figure 10, it can be seen from the figure that after 100,000 bendings
The film moisture-vapor transmission order of magnitude is 10-3g/(m2.day), good water preventing ability is shown.It can be seen that the embodiment of the present invention
A kind of organic light-emitting display device provided, block-water performance is good, and resistant to bending.
Above-mentioned technical proposal is based on same design, and the embodiment of the invention provides a kind of preparations of organic light-emitting display device
Method flow schematic diagram, as shown in figure 11, the preparation method of organic light-emitting display device the following steps are included:
Step 110 provides substrate.
Referring to Figure 12 a, substrate 1 is provided.The material of substrate 1 selects to be silicon, germanium or arsenic in embodiments of the present invention
Change the semiconductor materials such as gallium.The thickness of substrate 1, related practitioner can voluntarily select according to the actual situation.
Organic luminescent device is formed on the substrate in step 120.
Referring to Figure 12 b, organic luminescent device 2 is formed on the base 1.In the present embodiment, organic luminescent device includes one
A or multiple organic light-emitting units, each organic light-emitting units may include it is multiple can emit red, green, blue or its
The organic light emitting display pixel of his color.
Step 130 forms thin-film encapsulation layer on organic luminescent device, and thin-film encapsulation layer includes inorganic material layer；It is inorganic
Material layer includes the lamination of at least two layers inoranic membrane, and the refractive index of adjacent two layers inoranic membrane, internal stress, hardness or springform
At least one parameter in amount is different.
Referring to Figure 12 c, thin-film encapsulation layer is formed on organic luminescent device 2, the thin-film encapsulation layer in the present embodiment is to having
Machine luminescent device 2 forms protective effect, reduces corrosion function of the extraneous water oxygen to organic luminescent device 2.Thin-film encapsulation layer packet
Include inorganic material layer 30；Lamination of the inorganic material layer 30 including at least two layers inoranic membrane, and the refractive index of adjacent two layers inoranic membrane,
At least one parameter in internal stress, hardness or elasticity modulus is different.The lamination of 4 layers of inoranic membrane is shown in Figure 12 c, respectively
For inoranic membrane 301, inoranic membrane 302, inoranic membrane 303 and inoranic membrane 304, and inoranic membrane 301, inoranic membrane 302, inoranic membrane 303
And in inoranic membrane 304 adjacent two layers inoranic membrane refractive index, internal stress, hardness and at least one parameter in elasticity modulus
It is different.The embodiment of the present invention is not construed as limiting the quantity of inorganic film lamination, and for refractive index, internal stress, hardness or
The overlying relation of the different adjacent two layers inoranic membrane of at least one parameter in elasticity modulus is also not construed as limiting.
Optionally, referring to Figure 12 d, thin-film encapsulation layer 3 further includes organic material layer 31；Organic material layer 31 and inorganic material
The setting of 30 lamination of the bed of material.Organic material layer 31 can be polyethylene terephthalate, poly- naphthalenedicarboxylic acid second two illustratively
Any one or a few in alcohol ester and cyclic olefin polymer, these materials have excellent object in wider temperature range
Mechanical performance is managed, and electrical insulating property is excellent, there is good creep resistance, fatigue durability, rub resistance and dimensionally stable
Property.
Optionally, it is formed on the substrate after organic luminescent device step, passes through chemical vapor deposition and/or atomic layer deposition
Area method forms the inorganic material layer that thin-film encapsulation layer includes on organic luminescent device.It should be noted that inorganic material layer packet
The lamination of at least two layers inoranic membrane is included, therefore when forming inorganic material layer, the method that chemical vapor deposition can be used, or
It is used using atomic layer deposition method or both of which.Optionally, chemical vapor deposition method and/or atomic layer are being utilized
When deposition method, by the design of temperature, deposition power, gas source, reaction gas flow ratio and the reaction pressure that control substrate
In at least one parameter, formed inorganic material layer so that the refractive index of adjacent two layers inoranic membrane, internal stress, hardness or bullet
Property modulus at least one parameter it is different.It should be noted that the temperature of substrate, deposition power, reaction gas flow ratio, with
And reaction pressure, the variation of these parameters is to can be in the refractive index of inoranic membrane, internal stress, hardness or elasticity modulus extremely
A few parameter causes different degrees of influence.It should be noted that gas source design refer to it is anti-in other words for gas source
The design for the pipeline for answering the gas needed to be entered in corresponding consersion unit from the external world.It illustratively, may include pipeline
Trend and the technical details such as thickness.
The embodiment of the invention provides a kind of preparation methods of organic light-emitting display device, are prepared in thin-film encapsulation layer
Inorganic material layer includes the lamination of multilayer inoranic membrane, and the refractive index of adjacent two layers inoranic membrane, internal stress, hardness or springform
At least one parameter in amount is different.The different film layer of refractive index, consistency is also different, and the high inoranic membrane of consistency can be kept away
Exempt from water oxygen invasion, the low inoranic membrane of consistency can alleviate the stress in inoranic membrane, and it is resistance to promote solution organic light-emitting display device
Bending performance avoids the problem that being also easy to produce crackle in bending process, at the same time the internal stress, hardness of adjacent two layers inoranic membrane with
And at least one parameter in elasticity modulus does not avoid water oxygen from invading it is also possible to play, and alleviates the stress in inoranic membrane, mentions
It rises and solves organic light-emitting display device bending resistance.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts, be combined with each other and substitute without departing from protection scope of the present invention.Therefore, although by above embodiments to this
Invention is described in further detail, but the present invention is not limited to the above embodiments only, is not departing from present inventive concept
In the case of, it can also include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (12)
1. a kind of organic light-emitting display device characterized by comprising
Substrate；
The organic luminescent device being formed on the substrate；
The thin-film encapsulation layer being formed on the organic luminescent device, the thin-film encapsulation layer include inorganic material layer；The nothing
Machine material layer includes the lamination of at least two layers inoranic membrane, and the refractive index of inoranic membrane described in adjacent two layers, internal stress, hardness and
At least one parameter in elasticity modulus is different.
2. display device according to claim 1, which is characterized in that
The thin-film encapsulation layer further includes organic material layer；
The organic material layer and inorganic material layer laminate setting.
3. display device according to claim 1, which is characterized in that
The small numberical range of refractive index is to be less than or equal to 1.9 more than or equal to 1.7 in inoranic membrane described in the adjacent two layers；
The big numberical range of refractive index is to be less than or equal to 2.4 greater than 1.9 in inoranic membrane described in the adjacent two layers.
4. display device according to claim 1, which is characterized in that
The lower internal stress numberical range of internal stress is less than or equal to 100Mpa in inoranic membrane described in the adjacent two layers；
The higher internal stress numberical range of internal stress is greater than 100MPa in inoranic membrane described in the adjacent two layers.
5. display device according to claim 1, which is characterized in that every layer of inoranic membrane with a thickness of being greater than or equal to
1nm is less than or equal to 1000nm.
6. display device according to claim 1, which is characterized in that the inorganic material layer with a thickness of being greater than or equal to
50nm is less than or equal to 2000nm.
7. display device according to claim 1, which is characterized in that the surface of every layer of inoranic membrane is plane, wave
Any one in shape or zigzag.
8. display device according to claim 1, which is characterized in that
The inoranic membrane is any one in silicon nitride, silica, aluminium oxide, silicon oxynitride, silicon carbide and O-N-Si aluminium
Kind is a variety of.
9. a kind of preparation method of organic light-emitting display device characterized by comprising
Substrate is provided；
Organic luminescent device is formed on the substrate；
Thin-film encapsulation layer is formed on the organic luminescent device, the thin-film encapsulation layer includes inorganic material layer；It is described inorganic
Material layer includes the lamination of at least two layers inoranic membrane, and the refractive index of inoranic membrane described in adjacent two layers, internal stress, hardness or bullet
Property modulus at least one parameter it is different.
10. preparation method according to claim 9, which is characterized in that
The thin-film encapsulation layer further includes organic material layer；
The organic material layer and inorganic material layer laminate setting.
11. preparation method according to claim 9, which is characterized in that
By chemical vapor deposition and/or atomic layer deposition method, the thin-film encapsulation layer is formed on the organic luminescent device
Including the inorganic material layer.
12. preparation method according to claim 11, which is characterized in that
In the chemical vapor deposition and/or Atomic layer deposition method, by control the temperature of the substrate, deposition power,
Gas source design, reaction gas flow than and reaction pressure at least one parameter, form the inorganic material layer, make
At least one parameter in the refractive index of inoranic membrane described in the adjacent two layers, internal stress, hardness or elasticity modulus not
Together.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110061039A (en) * | 2019-04-26 | 2019-07-26 | 京东方科技集团股份有限公司 | Flexible display panels and display device |
| CN110148684A (en) * | 2019-06-27 | 2019-08-20 | 云谷（固安）科技有限公司 | A kind of display panel and display device |
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| CN110518146A (en) * | 2019-08-30 | 2019-11-29 | 京东方科技集团股份有限公司 | Thin-film packing structure and display panel |
| CN110729330A (en) * | 2019-09-25 | 2020-01-24 | 武汉华星光电半导体显示技术有限公司 | Display panel and method for manufacturing the same |
| CN111785768A (en) * | 2020-08-25 | 2020-10-16 | 京东方科技集团股份有限公司 | Organic light-emitting display panel, preparation method and display device |
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| CN114759150A (en) * | 2022-04-18 | 2022-07-15 | 武汉华星光电半导体显示技术有限公司 | OLED display panel |
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| CN110061039A (en) * | 2019-04-26 | 2019-07-26 | 京东方科技集团股份有限公司 | Flexible display panels and display device |
| CN110277432B (en) * | 2019-06-27 | 2021-11-05 | 京东方科技集团股份有限公司 | Array substrate and display panel |
| CN110148684A (en) * | 2019-06-27 | 2019-08-20 | 云谷（固安）科技有限公司 | A kind of display panel and display device |
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| CN110729330A (en) * | 2019-09-25 | 2020-01-24 | 武汉华星光电半导体显示技术有限公司 | Display panel and method for manufacturing the same |
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| US11316132B2 (en) | 2019-09-25 | 2022-04-26 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Display device with multiple hardening layers and manufacturing method thereof |
| WO2021213510A1 (en) * | 2020-04-23 | 2021-10-28 | 京东方科技集团股份有限公司 | Display panel, display apparatus, and method for manufacturing display panel |
| CN111785768A (en) * | 2020-08-25 | 2020-10-16 | 京东方科技集团股份有限公司 | Organic light-emitting display panel, preparation method and display device |
| CN112490387A (en) * | 2020-11-29 | 2021-03-12 | 江苏新澄瑞材料科技有限公司 | Thin film packaging structure suitable for folding flexible display and production method |
| CN112670331A (en) * | 2020-12-24 | 2021-04-16 | 武汉天马微电子有限公司 | Organic light-emitting display panel, preparation method of packaging layer of organic light-emitting display panel and display device |
| CN114759150A (en) * | 2022-04-18 | 2022-07-15 | 武汉华星光电半导体显示技术有限公司 | OLED display panel |
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