CN109273390A - 一种双列直插类管壳通用旋转清洗夹具 - Google Patents
一种双列直插类管壳通用旋转清洗夹具 Download PDFInfo
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Abstract
本专利涉及半导体制造、封装领域,特别涉及一种双列直插类管壳通用旋转清洗夹具,包括基座、台阶底座和凹槽定位夹具,其中基座上设置有多个圆柱定位销,所述台阶底座、凹槽定位夹具上设置有多个圆形定位通孔,圆柱定位销依次穿过台阶底座、凹槽定位夹具上的圆形定位通孔,将台阶底座、凹槽定位夹具固定在基座上。所述台阶底座上设置有多个突起,所有突起构成一个整齐的阵列;所述凹槽定位夹具上设置有多个清洗孔和定位凹槽,每个清洗孔和定位凹槽与台阶底座上的与突起相匹配;本专利通过对定位凹槽和底座台阶进行不同宽度设计,亦可适用于宽型双列直插类陶瓷管壳。管壳取放便捷,可通过翻转取放,夹具上下设备便捷、稳固。
Description
技术领域
本专利涉及半导体制造、封装领域,特别涉及一种双列直插类管壳通用旋转清洗夹具。
背景技术
超声清洗对半导体器件或管壳有无法确定的损伤,所以在某些领域,为禁用或限用工艺。旋转喷淋清洗,是除超声清洗外的另一种主流清洗方式,采用水汽二流体旋转清洗,可有效去除物料表面的沾污和可动颗粒,因而在半导体制造、封装领域得到了广泛的应用。
双列直插陶瓷管壳清洗,在封装前需要对表面进行清洗,以保证产品质量和可靠性,但因该类管壳的形状特性,在旋转清洗的场合不易稳固夹持,管壳封接环和外引线镀金表面极易划伤,且管壳长短不一,以往的夹具设计须采用单一型号管壳专用的夹持夹具才能单独匹配,且夹持夹具均存在结构复杂、不便操作、夹持不稳等系列问题。幸运的是,双列直插陶瓷管壳也存在一些结构上的特点,如一般分为宽型和窄型两大类别,且各自的宽度能基本一致。
发明内容
为了解决上述问题,本发明提供一种双列直插类管壳通用旋转清洗夹具,包括基座1、台阶底座3和凹槽定位夹具4,其中基座1上设置有多个圆柱定位销2,所述台阶底座3、凹槽定位夹具4上设置有多个圆形定位通孔5,圆柱定位销2依次穿过台阶底座3、凹槽定位夹具4上的圆形定位通孔5,将台阶底座 3、凹槽定位夹具4固定在基座1上;
所述台阶底座3上设置有多个突起8,所有突起8构成一个整齐的阵列;
所述凹槽定位夹具4上设置有多个清洗孔6和定位凹槽7,每个清洗孔6与定位凹槽7和在台阶底座3上的突起8相匹配的。
进一步的,所述基座1的为中空的。
进一步的,基座1、圆柱定位销2和台阶底座3均采用SUS304不锈钢制作。
进一步的,所述定位凹槽7的尺寸比双列直插类管壳宽0.2mm、比双列直插类管壳长1mm,定位凹槽7的深度。
进一步的,圆形定位通孔5的直径为4.00~4.50mm。
进一步的,台阶底座3上突起8的宽度比双列直插类管壳窄0.2mm、长度比双列直插类管壳短0.2mm,台阶底座3上突起8的高度比管壳底面至引线边缘高度高0.2mm。
进一步的,台阶底座3上设置的每个突起8均边缘去棱角、且突起8的上表面抛光处理,每个定位凹槽7的四个内角做圆角处理、且定位凹槽7内侧面做抛光处理。
本专利有以下有益效果:
1、航空航天、军用高可靠双列直插类陶瓷管壳的旋转喷淋清洗场合;
2工装夹具设计,通过上下凹槽定位和台阶底座相互配合的方式,实现了一种能适用于各种长短不一的双列直插类陶瓷管壳的通用旋转清洗夹具。
总的来说,管壳在夹具内能够稳固夹持且本体不受应力,引线及封接环镀金表面无损伤,需清洗面通过清洗孔露出保证了清洗效果,本专利通过对定位凹槽和底座台阶进行不同宽度设计,亦可适用于宽型双列直插类陶瓷管壳。管壳取放便捷,可通过翻转取放,夹具上下设备便捷、稳固。
附图说明
图1为本专利一种双列直插类管壳通用旋转清洗夹具整体装配示意图;
图2为本专利一种双列直插类管壳通用旋转清洗夹具的凹槽定位夹具结构示意图;
图3为本专利一种双列直插类管壳通用旋转清洗夹具的台阶底座俯视图;
图4为本专利一种双列直插类管壳通用旋转清洗夹具的清洗孔及定位凹槽结构示意图;
图5为本专利一种双列直插类管壳通用旋转清洗夹具的台阶底座正视图;
图6为本专利一种双列直插类管壳通用旋转清洗夹具中双列直插类管壳与台阶底座和凹槽定位夹的装配关系示意图;
其中,1、基座,2、圆柱定位销,3、台阶底座,4、凹槽定位夹具,5、圆形定位通孔,6、清洗孔,7、定位凹槽,8、突起,9、管壳陶瓷体,10、管壳外引线。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
本发明提供一种双列直插类管壳通用旋转清洗夹具,如图1-3,包括基座1、台阶底座3和凹槽定位夹具4,其中基座1上设置有多个圆柱定位销2,所述台阶底座3、凹槽定位夹具4上设置有多个圆形定位通孔5,圆柱定位销2依次穿过台阶底座3、凹槽定位夹具4上的圆形定位通孔5,将台阶底座3、凹槽定位夹具4固定在基座1上;
如图3、图5,所述台阶底座3上设置有多个突起8,所有突起8构成一个整齐的阵列;
如图4、图6,所述凹槽定位夹具4上设置有多个清洗孔6和定位凹槽7,每个清洗孔6与定位凹槽7和在台阶底座3上的突起8相匹配的。
进一步的,所述基座1的为中空的。
进一步的,基座1、圆柱定位销2和台阶底座3均采用SUS304不锈钢制作。
进一步的,所述定位凹槽7的尺寸比双列直插类管壳宽0.2mm、比双列直插类管壳长1mm,定位凹槽7的深度。
进一步的,圆形定位通孔5的直径为4.00~4.50mm。
进一步的,台阶底座3上突起8的宽度比双列直插类管壳窄0.2mm、长度比双列直插类管壳短0.2mm,台阶底座3上突起8的高度比管壳底面至引线边缘高度高0.2mm。
进一步的,台阶底座3上设置的每个突起8均边缘去棱角、且突起8的上表面抛光处理,每个定位凹槽7的四个内角做圆角处理、且定位凹槽7内侧面做抛光处理。
在本发明实施例中,以窄型陶瓷管壳为例,其中窄型陶瓷管壳宽度最大为 8.0mm、引线跨度为7.6mm、管壳底面至引线边缘高度为6.8mm、管壳长度最大为30mm、管壳陶瓷体厚度最大2.5mm。
首先,按照图1所示,采用SUS304不锈钢制作基座1及其在四角分布,位置度公差控制±0.05mm的基座圆柱定位销2,典型圆柱定位销直径为4mm,并将基座1内部挖空形成中空状态,以减轻体重;
按图3采用SUS304不锈钢制作台阶底座3及其在四角分布,位置度公差控制±0.05mm的圆形定位通孔5,典型圆形定位通孔直径为4.2mm,台阶宽度为管壳引线跨度-0.2mm,台阶长度为28mm,可适用于D08S~D18M的所有窄型管壳,台阶高度为管壳底面至引线边缘高度+0.2mm,使管壳放置于台阶面上时引线边缘不受力,并将台阶边缘去棱角,与管壳底面接触的台阶面做抛光处理;
按图2采用SUS304不锈钢制作凹槽定位夹具4及其在四角分布,位置度公差控制±0.05mm的圆形定位通孔5,典型圆形定位通孔Φ4.2,再制作清洗孔6 及定位凹槽7,其中定位凹槽宽度为管壳宽度0.2mm,定位凹槽长度为31mm,可适用于D08S~D18M的所有窄型管壳,定位凹槽深度为台阶底座3台阶高度7.0mm+管壳陶瓷体厚度2.5mm+0.2mm,使管壳按照图4安装于台阶底座3和凹槽定位夹具4中后,管壳上下左右四面均不受夹持应力,定位凹槽7内侧面做抛光处理,四角做圆角处理。清洗孔6的长宽分别为定位凹槽7的长宽-1mm。
在本发明的描述中,需要理解的是,术语“同轴”、“底部”、“一端”、“顶部”、“中部”、“另一端”、“上”、“一侧”、“顶部”、“内”、“外”、“前部”、“中央”、“两端”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。
此外,术语“第一”、“第二”、“第三”、“第四”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量,由此,限定有“第一”、“第二”、“第三”、“第四”的特征可以明示或者隐含地包括至少一个该特征,不能理解为对本发明的限制。
在本发明中,除非另有明确的规定和限定,术语“安装”、“设置”、“连接”、“固定”、“旋转”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系,除非另有明确的限定,对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。
尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同物限定。
Claims (8)
1.一种双列直插类管壳通用旋转清洗夹具,其特征在于,包括基座(1)、台阶底座(3)和凹槽定位夹具(4),其中基座(1)上设置有多个圆柱定位销(2),所述台阶底座(3)、凹槽定位夹具(4)上设置有多个圆形定位通孔(5),圆柱定位销(2)依次穿过台阶底座(3)、凹槽定位夹具(4)上的圆形定位通孔(5),将台阶底座(3)、凹槽定位夹具(4)固定在基座(1)上;
所述台阶底座(3)上设置有多个突起(8),所有突起(8)构成一个整齐的阵列;
所述凹槽定位夹具(4)上设置有多个清洗孔(6)和定位凹槽(7),每个清洗孔(6)与定位凹槽(7)和在台阶底座(3)上的突起(8)相匹配的。
2.根据权利要求1所述的一种双列直插类管壳通用旋转清洗夹具,其特征在于,所述基座(1)的为中空的。
3.根据权利要求1所述的一种双列直插类管壳通用旋转清洗夹具,其特征在于,基座(1)、圆柱定位销(2)和台阶底座(3)均采用SUS304不锈钢制作。
4.根据权利要求1所述的一种双列直插类管壳通用旋转清洗夹具,其特征在于,所述定位凹槽(7)的尺寸比双列直插类管壳宽0.2mm、比双列直插类管壳长1mm,定位凹槽(7)的深度比台阶底座与管壳陶瓷体厚度之和深0.2mm。
5.根据权利要求1所述的一种双列直插类管壳通用旋转清洗夹具,其特征在于,清洗孔(6)比定位凹槽(7)短1mm,清洗孔(6)比定位凹槽(7)窄1mm。
6.根据权利要求1所述的一种双列直插类管壳通用旋转清洗夹具,其特征在于,圆形定位通孔(5)的直径为4.00~4.50mm。
7.根据权利要求1所述的一种双列直插类管壳通用旋转清洗夹具,其特征在于,台阶底座(3)上突起(8)的宽度比双列直插类管壳窄0.2mm、长度比双列直插类管壳短0.2mm,台阶底座(3)上突起(8)的高度比管壳底面至引线边缘高度高0.2mm。
8.根据权利要求1-6所述的任意一种双列直插类管壳通用旋转清洗夹具,其特征在于,台阶底座(3)上设置的每个突起(8)均边缘去棱角、且突起(8)的上表面抛光处理,每个定位凹槽(7)的四个内角做圆角处理、且定位凹槽(7)内侧面做抛光处理。
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