CN109261473B - Synthetic jet driver based on dielectric elastomer drive and manufacturing method thereof - Google Patents

Synthetic jet driver based on dielectric elastomer drive and manufacturing method thereof Download PDF

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CN109261473B
CN109261473B CN201810797683.6A CN201810797683A CN109261473B CN 109261473 B CN109261473 B CN 109261473B CN 201810797683 A CN201810797683 A CN 201810797683A CN 109261473 B CN109261473 B CN 109261473B
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dielectric elastomer
cavity
elastomer film
middle ring
front cavity
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CN109261473A (en
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陈花玲
汤超
孔繁林
马文涛
李博
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Xian Jiaotong University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction

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  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The invention discloses a synthetic jet driver based on dielectric elastomer driving, which comprises a front cavity, an elastic component, a dielectric elastomer film, an intermediate ring and a rear cavity, wherein the front cavity is provided with a front cavity body; the front cavity and the rear cavity are both hollow shells with one open end and one closed end, and the middle ring is a hollow shell with two open ends; the closed end of the rear cavity is provided with a through hole, the open end of the rear cavity is tightly connected with the first open end of the intermediate ring, and the second open end of the intermediate ring is connected with the open end of the front cavity; a dielectric elastomer film is arranged on the second opening end of the middle ring, a first inner cavity is formed between the dielectric elastomer film and the front cavity, and a second inner cavity is formed between the dielectric elastomer film, the middle ring and the rear cavity; the elastic member is disposed between the front cavity and the dielectric elastomer film. The synthetic jet driver disclosed by the invention is extremely simple in overall structure and motion control, has higher jet speed and ultra-light weight, and has a greater potential application value in the fields of fluid active control, aerospace exploration engineering and the like.

Description

Synthetic jet driver based on dielectric elastomer drive and manufacturing method thereof
Technical Field
The invention belongs to the technical field of active flow control, and particularly relates to a synthetic jet driver and a manufacturing method thereof.
Background
The flow control technology is one of leading-edge subjects of current research in the fluid mechanics research field, and research results of the flow control technology can be widely applied to the aerospace and navigation research fields. The flow control is divided into two categories of passive control and active control, and the passive flow control has the characteristics of no need of external energy input, convenient use and reliable performance, but the effective range of action is limited, and when the actual condition has larger deviation from the working condition during design, the control effect can be rapidly deteriorated. The active flow control technology injects energy and disturbance in the flow, so that the disturbance and the flow in the system interact to realize the purpose of self-adaptive regulation and control under different working conditions.
A synthetic jet is a non-continuous jet produced by an actuator that periodically "blows" or "sucks" surrounding fluid. The synthetic jet is essentially a zero-mass jet, belongs to the technical field of zero-mass jet, and can generate the synthetic jet without an additional air source to realize active control of flow. The main structure of the synthetic jet driver is a cavity with a vibration part, the cavity is communicated with external fluid through a small hole, and the vibration part enables the volume of the cavity to change periodically. When the volume of the cavity is increased, the pressure in the cavity is reduced, fluid in an external flow field enters the containing cavity through the jet hole, and when the volume of the cavity is reduced, the pressure in the cavity is increased, and the fluid is sprayed out of the containing cavity through the jet hole. In the process of alternately sucking fluid and discharging fluid, the fluid near the jet hole is subjected to a shearing action with larger intensity, flow separation occurs, a vortex pair is formed, and the fluid migrates to a position far away from the jet hole under the self-induced speed. In the next fluid suction process, the vortex pair generated in the early stage is far away from the jet hole and cannot be influenced by the fluid suction process, and finally the structure of the vortex pair gradually dissipates at the downstream position due to the dissipation function and is completely integrated with an external flow field. Thus, under the driving of the alternating voltage, a series of vortex pairs which continuously migrate to the downstream position are generated by the synthetic jet driver, so that the synthetic jet driver has the fluid transportation capacity. As a vibration component which is the most important part in the synthetic jet driver, at present, the traditional vibration component has small vibration deformation and is easy to generate fatigue damage, so that the requirement gap between the existing synthetic jet driver and the practical application is large, and the practical application is severely limited.
Disclosure of Invention
The invention aims to provide a synthetic jet actuator based on dielectric elastomer drive and a manufacturing method thereof, which are designed by utilizing an out-of-plane vibration mechanism of a dielectric elastomer material under dynamic voltage loading so as to overcome the defect of low synthetic jet speed caused by over-small output displacement of a vibration part of the conventional synthetic jet actuator.
In order to achieve the purpose, the invention adopts the following technical scheme:
a synthetic jet actuator based on dielectric elastomer drive comprises a shell, wherein a dielectric elastomer film is installed in the shell; the dielectric elastomer film divides the shell into a first inner cavity and a second inner cavity, and through holes communicated with the external environment are formed in the first inner cavity and the second inner cavity; an elastic component for extruding and deforming the dielectric elastomer film under a natural state is arranged in the first inner cavity.
Further, the shell comprises a front cavity, an intermediate ring and a rear cavity; the front cavity and the rear cavity are both hollow shells with one open end and one closed end, and the middle ring is a hollow shell with two open ends; the closed end of the rear cavity is provided with a jet orifice, the open end of the rear cavity is tightly connected with the second open end of the intermediate ring, and the first open end of the intermediate ring is connected with the open end of the front cavity; the first opening end of the middle ring is provided with a dielectric elastomer film, a first inner cavity is formed between the dielectric elastomer film and the front cavity, and a second inner cavity is formed between the dielectric elastomer film, the middle ring and the rear cavity.
Furthermore, the dielectric elastomer film comprises a dielectric elastomer film base material, and an upper surface flexible electrode and a lower surface flexible electrode which are attached to the upper surface and the lower surface of the dielectric elastomer film base material, wherein the upper surface flexible electrode and the lower surface flexible electrode are annular and are symmetrically arranged, and the center part of the dielectric elastomer film is an electrode-free area.
Furthermore, the upper surface flexible electrode and the lower surface flexible electrode are made of printed fluid carbon paste electrodes and are respectively connected to an external circuit through the upper surface copper foil electrode and the lower surface copper foil electrode; the voltage signals of the external circuits applied on the upper surface flexible electrode and the lower surface flexible electrode are direct current biased sinusoidal signals.
Furthermore, the front cavity, the middle ring and the rear cavity are made of photosensitive resin materials; the dielectric elastomer base material adopts VHB material, and the fluid carbon paste adopts 846 # conductive carbon paste.
Further, the elastic component comprises a spring and a connecting plate; one end of the spring is fixedly connected to the inner side of the closed end of the precursor, the other end of the spring is fixedly connected with the connecting plate, and the connecting plate is tightly attached to the dielectric elastomer film.
Further, a groove matched with the spring in size is formed in the center of the inner side of the closed end of the front cavity; the circumference of the closed end of the front cavity is provided with a plurality of centrosymmetric through holes; the surface of one side of the connecting plate connected with the spring is provided with a boss matched with the spring in size.
Furthermore, the cross sections of the front cavity, the middle ring, the rear cavity and the dielectric elastomer film are rectangular, square or circular.
A method for manufacturing a synthetic jet actuator based on dielectric elastomer driving comprises the following steps:
(1) firstly, carrying out equal biaxial mechanical pre-stretching on a base material of the dielectric elastomer film on a stretching device, and respectively arranging an upper surface flexible electrode and a lower surface flexible electrode on the upper surface and the lower surface of the stretched base material of the dielectric elastomer film to form the dielectric elastomer film;
(2) manufacturing a shell;
(3) the dielectric elastomer film is fixed in the housing to divide the housing into a first inner cavity and a second inner cavity, and the elastic component is installed in the first inner cavity.
Further, the shell comprises a front cavity, an intermediate ring and a rear cavity; in the step (2), according to the preset shape and size of the cavity, respectively manufacturing a front cavity, a middle ring and a rear cavity by adopting a 3D printing technology;
and (3) fixing the dielectric elastomer film on the first opening end of the middle ring, and sequentially connecting the front cavity, the elastic part, the middle ring and the rear cavity to form the synthetic jet driver.
Further, in the step (1), the stretched dielectric elastomer base material is fixed by a constraint frame, and the constraint frame is made of organic glass with the thickness of 1 mm.
Furthermore, in the step (2), release paper with a hollow expected electrode shape is adhered on the dielectric elastomer base material, then carbon paste is coated, and then the release paper is removed to obtain the carbon paste electrode with the preset shape.
The working principle is as follows: the invention relates to a synthetic jet device based on dielectric elastomer drive.A circular through hole is arranged at the center of the bottom of a rear cavity, and gas in the cavity is discharged and sucked through the through hole. The dielectric elastomer film is lifted into a conical shape by a spring and then a voltage of kilovolt level is applied to the dielectric elastomer film, and the film material vibrates out of plane. The dielectric elastomer film can extrude the air in the cavity to the outside through the through hole and then suck the air into the cavity again when vibrating, thus the air flow jet can be formed at the through hole, the disturbance and the control can be generated on the external flow field, and the dielectric elastomer film can be used as a propelling device (similar to an air jet) of a movement mechanism, and the whole mechanism can move by the propelling of the air flow.
Compared with the prior art, the invention has the following advantages:
the driving mechanism of the synthetic jet driver disclosed by the invention is the out-of-plane vibration characteristic of the dielectric elastomer film under the loading of dynamic voltage, the energy conversion rate is high, the dielectric elastomer film can generate great deformation under the action of an external electric field, and after excitation is removed, the material can be restored to the original shape and size. Compared with the traditional technology, the device has the advantages of low energy consumption, light weight, large deformation, easy manufacture and large deformation tolerance without fatigue damage. The synthetic jet driver has a smaller weight because the basic structure is manufactured by 3D printing of photosensitive resin materials. Compared with other vibration exciters, the vibration exciter made of the dielectric elastomer can generate larger deformation under the action of dynamic voltage, the generated synthetic jet flow has higher speed, and the synthetic jet flows with different speeds can be generated under different excitation voltages. The synthetic jet driver designed by the invention has extremely simple structure and control, and has potential application value in the fields of aviation, aerospace, navigation and other engineering.
Drawings
FIG. 1 is a schematic diagram of a synthetic jet actuator based on dielectric elastomer actuation;
FIG. 2 is a side view of a dielectric elastomer based drive for a synthetic jet drive;
FIG. 3 is an assembly view of a dielectric elastomer drive based synthetic jet drive.
Wherein, the front cavity 1, the circular groove 11, the through hole 12, the spring 2, the connecting plate 3, the boss 31, the gasket 4, the dielectric elastomer film 5, the middle ring 6 and the back cavity 7 and 71 are jet ports.
Detailed Description
The present invention will now be described in further detail with reference to the following examples and the accompanying drawings, which are illustrative and not restrictive.
Referring to fig. 1-2, the invention relates to a synthetic jet actuator based on dielectric elastomer driving, which comprises a front cavity 1, a spring 2, a connecting plate 3, a gasket 4, a dielectric elastic film 5, an intermediate ring 6 and a rear cavity 7.
The front cavity 1 and the rear cavity 7 are both hollow cylinders with one open end and one closed end, and the middle ring 6 is a hollow cylinder with two open ends; the openings at the two sides of the middle ring 6 are respectively a first opening end and a second opening end; the open end of the rear cavity 7 is tightly connected with the second open end of the intermediate ring 6, and the first open end of the intermediate ring 6 is connected with the open end of the front cavity 1; a dielectric elastomer film 5 is arranged between the open end of the front cavity 1 and the first open end of the intermediate ring 6, and the dielectric elastomer film 5 is fixed on the first open end of the intermediate ring 6 by a gasket 4; a first inner cavity is formed between the dielectric elastomer film 5 and the front cavity 1, and the end face of the closed end of the front cavity 1 is provided with a plurality of centrosymmetric through holes 12 to ensure that the pressure of the first inner cavity is the same as the external pressure; a second inner cavity is formed among the dielectric elastomer film 5, the middle ring 6 and the rear cavity 7, a jet orifice 71 is arranged in the center of the end face of the closed end of the rear cavity 7, and the jet orifice 71 is a through hole and is communicated with the second inner cavity and an external flow field.
A spring 2 and a connecting plate 3 are arranged in the first inner cavity, one end of the spring 2 is connected with the inner side of the closed end of the front cavity 1, a circular groove 11 is arranged on the inner side surface of the closed end of the front cavity 1, the inner diameter of the circular groove 11 is equal to the outer diameter of the spring 2, and the effect of connection and fixation is achieved by placing the spring 2 in the circular groove 11; the other end of the spring 2 is connected with the connecting plate 3, a boss 31 is arranged on one side face of the connecting plate 3, which is connected with the spring 2, the diameter of the boss 31 is equal to the inner diameter of the spring 2, and the boss 31 is placed in the spring 2, so that the effect of connection and fixation is achieved. The other side of the connecting plate 3 is arranged at the central part of the dielectric elastomer film 5, the spring 2 and the connecting plate 3 tightly push against the dielectric elastomer film 5, and the dielectric elastomer film 5 is compressed into a conical shape. The cross-sectional shapes of the spring 2, the connecting plate 3 and the dielectric elastomer film 5 are all circular.
The dielectric elastomer film 5 comprises a dielectric elastomer base material, and an upper surface flexible electrode and a lower surface flexible electrode which are attached to the upper surface and the lower surface of the dielectric elastomer film, wherein the upper surface flexible electrode and the lower surface flexible electrode are both in circular ring shape and are symmetrically arranged, the flexible electrodes are made by printing fluid carbon paste electrodes on the dielectric elastomer base material, and the center part of the dielectric elastomer film 5 is an electrode-free area; the upper surface flexible electrode and the lower surface flexible electrode are respectively connected to an external circuit through the upper surface copper foil electrode and the lower surface copper foil electrode; the dielectric elastomer base material adopts VHB material, and the printing fluid carbon paste electrode adopts 846 # conductive carbon paste. And the external circuit is connected with the bias sinusoidal signal amplified by the high-voltage amplifier.
The cross-sectional shapes of the front cavity 1, the intermediate ring 6, the rear cavity 7 and the dielectric elastomer film 5 were made rectangular or square, and good results were obtained.
A method for manufacturing a synthetic jet actuator based on dielectric elastomer driving comprises the following steps:
(1) firstly, mechanically pre-stretching a dielectric elastomer base material on a stretching device by equal biaxial 4 × 4 times, fixing the upper surface and the lower surface of the stretched dielectric elastomer base material by adopting a constraint frame, wherein the constraint frame adopts organic glass with the thickness of 1 mm;
(2) respectively manufacturing a front cavity 1, a middle ring 6 and a rear cavity 7 by adopting photosensitive resin through a 3D printing technology according to the preset shape and size of the cavity;
(3) fixing a dielectric elastomer film 5 on a second opening end of the middle ring 6, and connecting the front cavity 1, the spring 2, the connecting plate and the middle ring 6 in sequence, wherein the spring 2 and the connecting plate 3 enable the dielectric elastomer film 5 to be in a conical shape; finally, the intermediate ring 6 is hermetically connected with the rear cavity 7, so that the synthetic jet driver is formed.
Preferably, in step (2), in order to keep the shape of the carbon paste electrode regular, a release paper with a desired electrode shape hollowed out is attached to the dielectric elastomer substrate 5, and then the carbon paste is applied, and then the release paper is removed to obtain a carbon paste electrode with a predetermined shape.
The working principle is as follows: the biased sinusoidal signal is amplified by a high-voltage amplifier and then connected to a copper foil electrode of a dielectric elastomer film 5 printed with a circular carbon paste electrode, the thickness of the dielectric elastomer film 5 changes under the action of Maxwell stress generated by high voltage, and the connecting plate 3 drives the dielectric elastomer film 5 to generate reciprocating motion under the action of spring force so as to discharge and suck gas in the intermediate ring 6 and the rear cavity 7.
The foregoing is a detailed description of the invention with reference to specific preferred embodiments, and no attempt is made to limit the invention to the particular embodiments disclosed, or modifications and equivalents thereof, since those skilled in the art will recognize that various changes may be made without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (7)

1. A dielectric elastomer drive based synthetic jet drive comprising a housing in which is mounted a dielectric elastomer membrane (5); the shell is divided into a first inner cavity and a second inner cavity by the dielectric elastomer film (5), and the first inner cavity and the second inner cavity are both provided with through holes communicated with the external environment; an elastic component used for extruding under a natural state to deform the dielectric elastomer film (5) is arranged in the first inner cavity;
the shell comprises a front cavity (1), a middle ring (6) and a rear cavity (7); the front cavity (1) and the rear cavity (7) are both hollow shells with one open end and one closed end, and the middle ring (6) is a hollow shell with two open ends; the closed end of the rear cavity (7) is provided with a jet orifice (71), the open end of the rear cavity (7) is tightly connected with the second open end of the middle ring (6), and the first open end of the middle ring (6) is connected with the open end of the front cavity (1); a dielectric elastomer film (5) is arranged on a first opening end of the middle ring (6), a first inner cavity is formed between the dielectric elastomer film (5) and the front cavity (1), and a second inner cavity is formed between the dielectric elastomer film (5), the middle ring (6) and the rear cavity (7);
the dielectric elastomer film (5) comprises a dielectric elastomer film base material, an upper surface flexible electrode and a lower surface flexible electrode which are attached to the upper surface and the lower surface of the dielectric elastomer film base material, the upper surface flexible electrode and the lower surface flexible electrode are annular and are symmetrically arranged, and the center part of the dielectric elastomer film (5) is an electrode-free area;
the elastic component comprises a spring (2) and a connecting plate (3); one end of the spring (2) is fixedly connected to the inner side of the closed end of the precursor (1), the other end of the spring is fixedly connected with the connecting plate (3), and the connecting plate (3) is tightly attached to the dielectric elastomer film (5).
2. The synthetic jet actuator driven by the dielectric elastomer as claimed in claim 1, wherein the upper surface flexible electrode and the lower surface flexible electrode are made of printed fluid carbon paste electrodes, and are respectively connected to an external circuit through an upper surface copper foil electrode and a lower surface copper foil electrode; the voltage signals of the external circuits applied on the upper surface flexible electrode and the lower surface flexible electrode are direct current biased sinusoidal signals.
3. The synthetic jet driver driven by the dielectric elastomer is characterized in that the front cavity (1), the middle ring (6) and the rear cavity (7) are made of photosensitive resin materials; the dielectric elastomer base material adopts VHB material, and the fluid carbon paste adopts MG846 number conductive carbon paste.
4. A dielectric elastomer drive based synthetic jet drive as claimed in claim 1 wherein the front cavity (1) is provided with a recess (11) at the centre of the inside of the closed end sized to match the spring (2); the circumference of the closed end of the front cavity (1) is provided with a plurality of centrosymmetric through holes (12); the surface of one side of the connecting plate (3) connected with the spring (2) is provided with a boss (31) matched with the spring (2) in size.
5. A dielectric elastomer drive based synthetic jet drive as claimed in claim 1 wherein the cross-section of the front cavity (1), the intermediate ring (6), the back cavity (7) and the dielectric elastomer membrane (5) is rectangular, square or circular.
6. The method of making a dielectric elastomer drive based synthetic jet actuator as claimed in any one of claims 1 to 5, comprising the steps of:
(1) firstly, carrying out equal biaxial mechanical pre-stretching on a base material of the dielectric elastomer film (5) on a stretching device, and respectively arranging an upper surface flexible electrode and a lower surface flexible electrode on the upper surface and the lower surface of the stretched base material of the dielectric elastomer film to form the dielectric elastomer film (5);
(2) manufacturing a shell;
(3) a dielectric elastomer film (5) is fixed in the housing to divide the housing into a first inner chamber and a second inner chamber, and an elastic member is installed in the first inner chamber.
7. Method of manufacturing according to claim 6, characterized in that the shell comprises a front cavity (1), an intermediate ring (6) and a rear cavity (7); in the step (2), according to the preset shape and size of the cavity, a front cavity (1), a middle ring (6) and a rear cavity (7) are respectively manufactured by adopting a 3D printing technology;
in the step (3), the dielectric elastomer film (5) is fixed on the first opening end of the middle ring (6), and the front cavity (1), the elastic part, the middle ring (6) and the rear cavity (7) are sequentially connected to form the synthetic jet driver.
CN201810797683.6A 2018-07-19 2018-07-19 Synthetic jet driver based on dielectric elastomer drive and manufacturing method thereof Active CN109261473B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104654873A (en) * 2013-11-21 2015-05-27 西安嘉乐世纪机电科技有限公司 Novel electromagnetic type synthetic jet heat radiator
CN104789139A (en) * 2015-04-15 2015-07-22 浙江大学 Reversible adhesive device based on dielectric elastomer
CN107081241A (en) * 2017-03-16 2017-08-22 北京航空航天大学 The generation equipment of non-circular synthesizing jet-flow
CN108167167A (en) * 2017-12-25 2018-06-15 上海交通大学 A kind of miniature viberation membrane compressor of Combined Electrostatic and Piezoelectric Driving

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3843588C2 (en) * 1988-12-23 1998-04-09 Krautkraemer Gmbh Hardness tester for hardness testing under load and method for adjusting such a hardness tester
SG109502A1 (en) * 2002-09-04 2005-03-30 Panasonic Refrigeration Device Piezo-electric compressor with displacement amplifier
US8334637B2 (en) * 2006-09-18 2012-12-18 Liposonix, Inc. Transducer with shield
CN102032939B (en) * 2009-09-29 2015-12-16 西门子公司 Shake a grade sensor
US8453556B2 (en) * 2010-03-12 2013-06-04 Bendix Spicer Foundation Brake Llc Non-threaded method for assembling a center hole parking diaphragm and adapter push rod with a clip and washer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104654873A (en) * 2013-11-21 2015-05-27 西安嘉乐世纪机电科技有限公司 Novel electromagnetic type synthetic jet heat radiator
CN104789139A (en) * 2015-04-15 2015-07-22 浙江大学 Reversible adhesive device based on dielectric elastomer
CN107081241A (en) * 2017-03-16 2017-08-22 北京航空航天大学 The generation equipment of non-circular synthesizing jet-flow
CN108167167A (en) * 2017-12-25 2018-06-15 上海交通大学 A kind of miniature viberation membrane compressor of Combined Electrostatic and Piezoelectric Driving

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