CN109249309A - Continuous multi-station polishing machine vacuum line self-cleaning control system - Google Patents
Continuous multi-station polishing machine vacuum line self-cleaning control system Download PDFInfo
- Publication number
- CN109249309A CN109249309A CN201811335005.4A CN201811335005A CN109249309A CN 109249309 A CN109249309 A CN 109249309A CN 201811335005 A CN201811335005 A CN 201811335005A CN 109249309 A CN109249309 A CN 109249309A
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- pneumatic
- ball valve
- way ball
- vacuum line
- iii
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Links
- 238000005498 polishing Methods 0.000 title claims abstract description 70
- 238000004140 cleaning Methods 0.000 title claims abstract description 23
- 238000003860 storage Methods 0.000 claims abstract description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 230000005611 electricity Effects 0.000 claims 1
- 238000005406 washing Methods 0.000 abstract description 4
- 230000000903 blocking effect Effects 0.000 description 7
- 239000012530 fluid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002789 length control Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Continuous multi-station polishing machine vacuum line self-cleaning control system, including vacuum air storage tank, Pneumatic three-way ball valve I, air pressure force snesor I, Pneumatic three-way ball valve II, Pneumatic three-way ball valve III, polishing disk I, polishing disk II and programmable controller；Vacuum air storage tank is connected with Pneumatic three-way ball valve I, air pressure force snesor I, Pneumatic three-way ball valve II, Pneumatic three-way ball valve III are located on the total vacuum line being connected with vacuum air storage tank, and total vacuum line is connected with polishing disk I by being equipped with the vacuum line I of the gentle pressure sensor II of Pneumatic three-way ball valve IV respectively, is connected by being equipped with the vacuum line II of the gentle pressure sensor III of Pneumatic three-way ball valve V with polishing disk II；Programmable controller is connected with Pneumatic three-way ball valve III by solenoid valve I, is connected by solenoid valve II with Pneumatic three-way ball valve II.It using the present invention, can determine whether the vacuum line of each station blocks, and realize automatically washing vacuum pipeline, be conducive to the development of multistation polishing machine.
Description
Technical field
The present invention relates to a kind of continuous multi-station polishing machines, and in particular to a kind of continuous multi-station polishing machine vacuum tube
Road self-cleaning control system.
Background technique
Current polishing absorption is evacuated by vacuum pump, makes to generate negative pressure between product and load plate, in polishing process
Middle polishing fluid is by vacuum line, for a long time using be easy to causeing pipeline blockage, once pipeline blockage, need to clear up or more in time
It changes, in this way, not only causing waste of material, but also operates also fairly cumbersome.Especially, the development trend of multistation polishing machine makes
Vacuum line becomes increasingly complex, and discharge checks road blocking position and brings certain difficulty.
Currently, yet there are no related monitoring vacuum line blocking for the vacuum line of continuous multi-station polishing machine complexity
Position, and research and the report of the control system of energy automatically washing vacuum pipeline.
Summary of the invention
The technical problem to be solved by the invention is to provide a kind of blocking positions that can monitor vacuum line, alarm and stop
The continuous multi-station polishing machine vacuum line self-cleaning control system that machine cleans automatically.
The technical solution adopted by the present invention to solve the technical problems is: continuous multi-station polishing machine vacuum line is from clear
Cleaning control system, including vacuum air storage tank, Pneumatic three-way ball valve I, air pressure force snesor I, Pneumatic three-way ball valve II, Pneumatic three-way
Ball valve III, polishing disk I, polishing disk II and programmable controller；
The vacuum air storage tank is connected with Pneumatic three-way ball valve I, air pressure force snesor I respectively, the Pneumatic three-way ball valve II, gas
Dynamic three-way ball valve III is located on the total vacuum line being connected with vacuum air storage tank, and total vacuum line is pneumatic by being equipped with respectively
The vacuum line I of the gentle pressure sensor II of three-way ball valve IV is connected with polishing disk I, is gentle by being equipped with Pneumatic three-way ball valve V
The vacuum line II of pressure sensor III is connected with polishing disk II；The Pneumatic three-way ball valve I passes through solenoid valve and programmable control
Device processed is connected；
The programmable controller is connected with air pressure force snesor I, air pressure force snesor II, air pressure force snesor III respectively；
The programmable controller is connected by solenoid valve I with Pneumatic three-way ball valve III, and the solenoid valve I can control Pneumatic three-way
Ball valve III is switched to total vacuum line and connects with cleaning water source interface；
The programmable controller is connected by solenoid valve II with Pneumatic three-way ball valve II, and the solenoid valve II is controllable pneumatic
Three-way ball valve II is switched to total vacuum line and connects with compressed air interface
The programmable controller is connected by solenoid valve III with Pneumatic three-way ball valve IV, and the solenoid valve III can control pneumatic three
Pass ball valve IV connects vacuum line I；
The programmable controller is connected by solenoid valve IV with Pneumatic three-way ball valve V, and the solenoid valve IV is controllable pneumatic
Three-way ball valve V connects vacuum line II.
Further, it is additionally provided with polishing disk III, total vacuum line is passed by being equipped with Pneumatic three-way ball valve VI and atmospheric pressure
The vacuum line III of sensor IV is connected with polishing disk III, the programmable controller and air pressure force snesor IV be connected；It is described
Programmable controller is connected by solenoid valve V with Pneumatic three-way ball valve VI, and the solenoid valve V can control Pneumatic three-way ball valve
VI, connect vacuum line III.
Further, it is additionally provided with polishing disk IV, total vacuum line is passed by being equipped with Pneumatic three-way ball valve VII and atmospheric pressure
The vacuum line IV of sensor V is connected with polishing disk IV, and the programmable controller is connected with air pressure force snesor V；It is described can
Programmable controller is connected by solenoid valve VI with Pneumatic three-way ball valve VII, and the solenoid valve VI can control Pneumatic three-way ball valve
VII, connect vacuum line IV.
Further, it is additionally provided with pneumatic two-way valve, the bottom of the vacuum air storage tank passes through pipeline and pneumatic two-way valve
It is connected, the pneumatic two-way valve is connected with programmable controller.
Further, the top of the vacuum air storage tank by pipeline respectively with Pneumatic three-way ball valve I, air pressure force snesor I
It is connected,.
The present invention passes through setting vacuum air storage tank, Pneumatic three-way ball valve I, air pressure force snesor I, the vacuum air storage tank point
It is not connected with Pneumatic three-way ball valve I, air pressure force snesor I, it can be achieved that vacuum air storage tank vacuum, and detects in vacuum air storage tank
Vacuum pressure.
The present invention passes through setting Pneumatic three-way ball valve II, Pneumatic three-way ball valve III, the Pneumatic three-way ball valve II, pneumatic three
Pass ball valve III is located on the total vacuum line being connected with vacuum air storage tank, and total vacuum line is respectively by being equipped with Pneumatic three-way
The vacuum line I of the gentle pressure sensor II of ball valve IV is connected, by being equipped with Pneumatic three-way ball valve V and atmospheric pressure with polishing disk I
The vacuum line II of sensor III is connected with polishing disk II, can not only realize the vacuum suction of workpiece, but also energy signal piping is true
Empty pressure size judges whether pipeline blocks and realize that automatic detergent line provides the foundation to be subsequent.
The present invention by setting programmable controller, the programmable controller respectively with air pressure force snesor I, atmospheric pressure
Sensor II, air pressure force snesor III are connected；The programmable controller passes through solenoid valve I and III phase of Pneumatic three-way ball valve
Even；The programmable controller is connected by solenoid valve II with Pneumatic three-way ball valve II；Wherein, the programmable controller root
It is compared according to the vacuum pressure inverted signal that respective sensor inputs and judges vacuum pressure size, to judge each station
Whether vacuum line blocks, if blocking, exports alarm signal and shuts down, output signal makes solenoid valve control Pneumatic three-way ball valve
It connects the vacuum line of this station and cuts off the vacuum line of other stations, output signal makes solenoid valve I control Pneumatic three-way ball
Valve III is switched to total vacuum line and connects cleaning water source, cleans in water source filling line, according to pipeline length, controls solenoid valve I
Turn-on time, shutdown that time is up, vacuum line switching completes, then controls solenoid valve II by programmable controller output signal
Pneumatic three-way ball valve II processed is switched to total vacuum line and connects compressed air, compressed air will inject water dilution in pipeline after
Polishing fluid blows out pipeline, to achieve the purpose that the vacuum line for cleaning blocking station automatically.
In brief, the present invention works as prison by increasing monitoring, control and cleaning structure on the basis of vacuum suction pipeline
When measuring vacuum pressure deficiency, automatically washing vacuum pipeline, the waste water generated in cleaning process is by connecing liquid at polishing operation
Basin discharge.
It using the present invention, can determine whether vacuum line blocks, and realize automatically washing vacuum pipeline, material can be saved
And production cost is reduced, operation is also very easy, is conducive to the development of multistation polishing machine.
Detailed description of the invention
Fig. 1 is the schematic diagram of continuous multi-station polishing machine vacuum line；
Fig. 2 is continuous multi-station polishing machine vacuum line self-cleaning control system schematic diagram；
In figure: 1- vacuum air storage tank, 2- Pneumatic three-way ball valve I, 3- air pressure force snesor I, 4- Pneumatic three-way ball valve II, 5- is pneumatic
Three-way ball valve III, 6- Pneumatic three-way ball valve IV, 7- air pressure force snesor II, 8- polishing disk I, 9- Pneumatic three-way ball valve V, 10- gas
Pressure sensor III, 11- polishing disk II, 12- Pneumatic three-way ball valve VI, 13- air pressure force snesor IV, 14- polishing disk III, 15-
Pneumatic three-way ball valve VII, 16- air pressure force snesor V, 17- polishing disk IV, the pneumatic two-way valve of 18-, 19- programmable controller,
20- solenoid valve I, 21- solenoid valve II, 22- solenoid valve III, 23- solenoid valve IV, 24- solenoid valve V, 25- solenoid valve VI.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and embodiments.
Embodiment
Referring to Figures 1 and 2, a kind of continuous multi-station polishing machine vacuum line self-cleaning control system, including vacuum storage
Gas tank 1, Pneumatic three-way ball valve I 2, air pressure force snesor I 3, Pneumatic three-way ball valve II 4, Pneumatic three-way ball valve III 5, Pneumatic three-way
Ball valve IV 6, air pressure force snesor II 7, polishing disk I 8, Pneumatic three-way ball valve V 9, air pressure force snesor III 10, polishing disk II 11,
Pneumatic three-way ball valve VI 12, air pressure force snesor IV 13, polishing disk III 14, Pneumatic three-way ball valve VII 15, air pressure force snesor V
16, polishing disk IV 17, pneumatic two-way valve 18, programmable controller 19, solenoid valve I 20, solenoid valve II 21, solenoid valve III 22,
Solenoid valve IV 23, solenoid valve V 24 and solenoid valve VI 25；
The top of the vacuum air storage tank 1 is connected with Pneumatic three-way ball valve I 2, air pressure force snesor I 3 respectively by pipeline, described
The bottom of vacuum air storage tank 1 is connected by pipeline with pneumatic two-way valve 18；The Pneumatic three-way ball valve II 4, Pneumatic three-way ball
Valve III 5 is located on the total vacuum line being connected with vacuum air storage tank 1, and total vacuum line is respectively by being equipped with Pneumatic three-way ball
The vacuum line I of the gentle pressure sensor II 7 of valve IV 6 is connected, by being equipped with Pneumatic three-way ball valve V 9 and air pressure with polishing disk I 8
The vacuum line II of force snesor III 10 is connected, by being equipped with the gentle pressure sensing of Pneumatic three-way ball valve VI 12 with polishing disk II 11
The vacuum line III of device IV 13 is connected, by being equipped with the gentle pressure sensor V 16 of Pneumatic three-way ball valve VII 15 with polishing disk III 14
Vacuum line IV be connected with polishing disk IV 17；The Pneumatic three-way ball valve I 2, pneumatic two-way valve 18 pass through solenoid valve respectively
It is connected with programmable controller 19；
The programmable controller 19 respectively with air pressure force snesor I 3, air pressure force snesor II 7, air pressure force snesor III 10,
Air pressure force snesor IV 13, air pressure force snesor V 16 are connected；
The programmable controller 19 is connected by solenoid valve I 20 with Pneumatic three-way ball valve III 5, and the solenoid valve I 20 is controllable
Pneumatic three-way ball valve III 5 is switched to total vacuum line and connects with cleaning water source interface；
The programmable controller 19 is connected by solenoid valve II 21 with Pneumatic three-way ball valve II 4, and the solenoid valve II 21 can
Pneumatic three-way ball valve II 4 is controlled, total vacuum line is switched to and is connected with compressed air interface；
The programmable controller 19 is connected by solenoid valve III 22 with Pneumatic three-way ball valve IV 6, and the solenoid valve III 22 is controllable
Pneumatic three-way ball valve IV 6 processed connects vacuum line I；
The programmable controller 19 is connected by solenoid valve IV 23 with Pneumatic three-way ball valve V 9, and the solenoid valve IV 23 can
Pneumatic three-way ball valve V 9 is controlled, vacuum line II is connected；
The programmable controller 19 is connected by solenoid valve V 24 with Pneumatic three-way ball valve VI 12, and the solenoid valve V 24 is controllable
Pneumatic three-way ball valve VI 12 processed connects vacuum line III；
The programmable controller 19 is connected by solenoid valve VI 25 with Pneumatic three-way ball valve VII 15, and the solenoid valve VI 25 can
Pneumatic three-way ball valve VII 15 is controlled, vacuum line IV is connected.
The Pneumatic three-way ball valve I 2, Pneumatic three-way ball valve II 4, Pneumatic three-way ball valve III 5, Pneumatic three-way ball valve IV 6, gas
Dynamic three-way ball valve V 9, Pneumatic three-way ball valve VI 12, Pneumatic three-way ball valve VII 15, pneumatic two-way valve 18 can also use other
The valve of structure.
When work, vacuum pump pumping detects the vacuum pressure in vacuum air storage tank 1 by air pressure force snesor I 3, pneumatically
Three-way ball valve II 4 and Pneumatic three-way ball valve III 5 control total vacuum line, and polishing disk I 8 is by Pneumatic three-way ball valve IV 6 and always
Vacuum line connection, polishing disk II 11 are coupled by Pneumatic three-way ball valve V 9 with total vacuum line, and polishing disk III 14 passes through pneumatic
Three-way ball valve VI 12 couples with total vacuum line, and polishing disk IV 17 is coupled by Pneumatic three-way ball valve VII 15 with total vacuum line,
Each polishing disk can freely switch on or off vacuum line as needed, and the polishing disk I 8 for installing workpiece uses air pressure force snesor
II 7 detection vacuum pressures, the polishing disk II 11 for installing workpiece detect vacuum pressure using air pressure force snesor III 10, install workpiece
Polishing disk III 14 detect vacuum pressure using air pressure force snesor IV 13, the polishing disk IV 17 for installing workpiece passed using atmospheric pressure
Sensor V 16 detects vacuum pressure, installs the polishing disk of workpiece because air can pass through seam there are gap between workpiece and disk
Gap slowly enters in vacuum line, and vacuum pressure value is stablized in a range, gentle by pipeline into the air in polishing disk
Dynamic three-way ball valve enters vacuum air storage tank, influences the vacuum pressure value of vacuum air storage tank, and vacuum air storage tank 1 passes through atmospheric pressure
Sensor I 3 detects vacuum pressure, air pressure force snesor II 7, air pressure force snesor III 10, air pressure force snesor IV 13, atmospheric pressure
The vacuum pressure that sensor V 16, air pressure force snesor I 3 detect is converted into what programmable controller 19 in Fig. 2 can identify
Signal, programmable controller 19 is compared according to the signal of input judges vacuum pressure size, to judge each station
Whether vacuum line blocks, if blocking, exports alarm signal and shuts down, output signal makes solenoid valve control Pneumatic three-way ball valve
It connects the vacuum line of this station and cuts off the vacuum line of other stations, output signal makes solenoid valve I 20 control Pneumatic three-way
Ball valve III 5 is switched to total vacuum line and connects with interface F, and interface F connects cleaning water source, cleans in water source filling line, according to
Pipeline length controls the turn-on time of solenoid valve I 20, and shutdown that time is up, vacuum line switching is completed, then by PLC technology
19 output signal of device makes solenoid valve II 21 control Pneumatic three-way ball valve II 4, is switched to total vacuum line and connects with interface E, connects
Mouth E connects the compressed air of 0.5 megapascal, and compressed air blows out pipeline for the polishing fluid after water dilutes is injected in pipeline, to reach
The purpose of the vacuum line of automatic cleaning blocking station.
Claims (6)
1. continuous multi-station polishing machine vacuum line self-cleaning control system, it is characterised in that: including vacuum air storage tank, pneumatically
It three-way ball valve I, air pressure force snesor I, Pneumatic three-way ball valve II, Pneumatic three-way ball valve III, polishing disk I, polishing disk II and can compile
Range controller；
The vacuum air storage tank is connected with Pneumatic three-way ball valve I, air pressure force snesor I respectively, the Pneumatic three-way ball valve II, gas
Dynamic three-way ball valve III is located on the total vacuum line being connected with vacuum air storage tank, and total vacuum line is pneumatic by being equipped with respectively
The vacuum line I of the gentle pressure sensor II of three-way ball valve IV is connected with polishing disk I, is gentle by being equipped with Pneumatic three-way ball valve V
The vacuum line II of pressure sensor III is connected with polishing disk II；The Pneumatic three-way ball valve I passes through solenoid valve and programmable control
Device processed is connected；
The programmable controller is connected with air pressure force snesor I, air pressure force snesor II, air pressure force snesor III respectively；
The programmable controller is connected by solenoid valve I with Pneumatic three-way ball valve III, and the solenoid valve I can control Pneumatic three-way
Ball valve III is switched to total vacuum line and connects with cleaning water source interface；
The programmable controller is connected by solenoid valve II with Pneumatic three-way ball valve II, and the solenoid valve II is controllable pneumatic
Three-way ball valve II is switched to total vacuum line and connects with compressed air interface
The programmable controller is connected by solenoid valve III with Pneumatic three-way ball valve IV, and the solenoid valve III can control pneumatic three
Pass ball valve IV connects vacuum line I；
The programmable controller is connected by solenoid valve IV with Pneumatic three-way ball valve V, and the solenoid valve IV is controllable pneumatic
Three-way ball valve V connects vacuum line II.
2. continuous multi-station polishing machine vacuum line self-cleaning control system according to claim 1, it is characterised in that:
It is additionally provided with polishing disk III, total vacuum line passes through the vacuum line equipped with the gentle pressure sensor IV of Pneumatic three-way ball valve VI
III is connected with polishing disk III, the programmable controller and air pressure force snesor IV be connected；The programmable controller passes through
Solenoid valve V is connected with Pneumatic three-way ball valve VI, and the solenoid valve V can control Pneumatic three-way ball valve VI, connects vacuum line III
It is logical.
3. continuous multi-station polishing machine vacuum line self-cleaning control system according to claim 2, it is characterised in that:
It is additionally provided with polishing disk IV, total vacuum line passes through the vacuum line equipped with the gentle pressure sensor V of Pneumatic three-way ball valve VII
IV is connected with polishing disk IV, and the programmable controller is connected with air pressure force snesor V；The programmable controller passes through electricity
Magnet valve VI is connected with Pneumatic three-way ball valve VII, and the solenoid valve VI can control Pneumatic three-way ball valve VII, connects vacuum line IV
It is logical.
4. continuous multi-station polishing machine vacuum line self-cleaning control system according to claim 1 or 2 or 3, special
Sign is: being additionally provided with pneumatic two-way valve, the bottom of the vacuum air storage tank is connected by pipeline with pneumatic two-way valve, described
Pneumatic two-way valve is connected with programmable controller.
5. continuous multi-station polishing machine vacuum line self-cleaning control system according to claim 1 or 2 or 3, special
Sign is: the top of the vacuum air storage tank is connected with Pneumatic three-way ball valve I, air pressure force snesor I respectively by pipeline.
6. continuous multi-station polishing machine vacuum line self-cleaning control system according to claim 4, it is characterised in that:
The top of the vacuum air storage tank is connected with Pneumatic three-way ball valve I, air pressure force snesor I respectively by pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811335005.4A CN109249309B (en) | 2018-11-10 | 2018-11-10 | Vacuum pipeline self-cleaning control system of continuous multi-station polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811335005.4A CN109249309B (en) | 2018-11-10 | 2018-11-10 | Vacuum pipeline self-cleaning control system of continuous multi-station polishing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109249309A true CN109249309A (en) | 2019-01-22 |
| CN109249309B CN109249309B (en) | 2024-03-08 |
Family
ID=65044605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811335005.4A Active CN109249309B (en) | 2018-11-10 | 2018-11-10 | Vacuum pipeline self-cleaning control system of continuous multi-station polishing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109249309B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113732770A (en) * | 2021-09-22 | 2021-12-03 | 成都弘林机械有限公司 | Automatic vacuum area adsorption and destruction device suitable for machining center |
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| US20060052037A1 (en) * | 2003-04-24 | 2006-03-09 | Nikon Corporation | Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatus |
| CN1867424A (en) * | 2003-10-17 | 2006-11-22 | 株式会社荏原制作所 | Polishing apparatus |
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| CN205644103U (en) * | 2016-04-08 | 2016-10-12 | 珠海格力电器股份有限公司 | Water blowing and vacuumizing integrated equipment |
| CN107877207A (en) * | 2017-12-14 | 2018-04-06 | 苏州市台群机械有限公司 | Vacuum air-channel and high ray machine |
| CN208880433U (en) * | 2018-11-10 | 2019-05-21 | 宇晶机器（长沙）有限公司 | Continuous multi-station polishing machine vacuum line self-cleaning control system |
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2018
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Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1533969A (en) * | 2003-01-20 | 2004-10-06 | �����ɷ� | Vacuum absorbing system and its controlling method |
| US20060052037A1 (en) * | 2003-04-24 | 2006-03-09 | Nikon Corporation | Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatus |
| CN1867424A (en) * | 2003-10-17 | 2006-11-22 | 株式会社荏原制作所 | Polishing apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113732770A (en) * | 2021-09-22 | 2021-12-03 | 成都弘林机械有限公司 | Automatic vacuum area adsorption and destruction device suitable for machining center |
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| Publication number | Publication date |
|---|---|
| CN109249309B (en) | 2024-03-08 |
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