CN109239851B - Optical fiber coupler based on linear polarization and manufacturing and using methods thereof - Google Patents
Optical fiber coupler based on linear polarization and manufacturing and using methods thereof Download PDFInfo
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- CN109239851B CN109239851B CN201810942647.4A CN201810942647A CN109239851B CN 109239851 B CN109239851 B CN 109239851B CN 201810942647 A CN201810942647 A CN 201810942647A CN 109239851 B CN109239851 B CN 109239851B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2706—Optical coupling means with polarisation selective and adjusting means as bulk elements, i.e. free space arrangements external to a light guide, e.g. polarising beam splitters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2753—Optical coupling means with polarisation selective and adjusting means characterised by their function or use, i.e. of the complete device
- G02B6/2766—Manipulating the plane of polarisation from one input polarisation to another output polarisation, e.g. polarisation rotators, linear to circular polarisation converters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2753—Optical coupling means with polarisation selective and adjusting means characterised by their function or use, i.e. of the complete device
- G02B6/2773—Polarisation splitting or combining
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Abstract
The invention discloses an optical fiber coupler based on linear polarization and a manufacturing and using method thereof, and relates to the fields of micro-nano optics and polarized optics, the optical fiber coupler comprises a substrate and a silicon nanorod array, wherein the silicon nanorod array is formed by arranging a plurality of silicon nanorod units etched on the substrate, and the silicon nanorods in the same silicon nanorod unit have the same structural parameters; the silicon nanorods of different silicon nanorod units are rectangular parallelopiped with different structural parameters, when incident light is vertically incident, light with polarization directions along the long side and the short side of the silicon nanorods is reflected and transmitted, and the length, width and height of the silicon nanorods are configured such that the phase delay of each of the silicon nanorod units is equal to the phase distribution of the optical fiber mode after light conversion. The optical fiber coupler has a smaller size structure, small insertion loss and accurate phase adjustment, can convert two different linearly polarized light in incident light into two different optical fiber modes, and reduces the complexity of an optical device.
Description
Technical Field
The invention relates to the fields of micro-nano optics and polarized optics, in particular to a fiber coupler based on linear polarization and a manufacturing and using method thereof.
Background
As the transmission capacity of single mode fibers has approached the limit, mode division multiplexing fiber transmission systems employing few-mode fibers or multimode fibers are increasingly used. The optical fiber coupler is an important optical device in the system, and the optical fiber coupler is used for converting a fundamental mode optical signal in a single-mode optical fiber into a higher-order mode and coupling the higher-order mode optical signal into a few-mode optical fiber or a multi-mode optical fiber for transmission.
The common fiber mode conversion is mostly realized by a phase plate, a photonic integrated waveguide, a fiber bundle, a three-dimensional optical waveguide and the like. The existing optical fiber mode couplers have the defect of single function, and the optical fiber couplers applying the technologies can only convert optical signals in a single-mode optical fiber into modes in a multi-mode optical fiber. If three higher order modes are used in a mode division multiplexing system, three different fiber couplers would be used. The use of multiple couplers increases the complexity of the optical system.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a linear polarization-based optical fiber coupler and a manufacturing and using method thereof, which can convert two different linearly polarized light in incident light into two different optical fiber modes.
In a first aspect, an embodiment of the present invention provides a linear polarization-based fiber coupler for converting incident light into other fiber modes, including:
a substrate;
a silicon nanorod array formed by arranging a plurality of silicon nanorod units etched on the substrate, wherein the silicon nanorods in the same silicon nanorod unit have the same structural parameters;
the silicon nanorods of different said silicon nanorod units are rectangular parallelepiped with different structural parameters, when incident light is vertically incident, the polarization direction is reflected and transmitted along the light of the long side and the short side of said silicon nanorods, the length, width and height of said silicon nanorods are configured such that the phase delay Φ (i, j) of each said silicon nanorod unit is equal to the phase distribution of the optical fiber mode after light conversion, wherein i, j represents the (i, j) th silicon nanorod unit in the x and y axis directions.
In a possible embodiment, based on the first aspect, the substrate (1) is a silicon dioxide substrate.
Based on the first aspect, in a possible embodiment, the length, the width and the height of the silicon nanorod are all sub-wavelength dimensions.
Based on the first aspect, in a possible embodiment, all of the above-described silicon nanorods have the same height.
Based on the first aspect, in a possible embodiment, the number of the silicon nanorods in each of the above-mentioned silicon nanorod units is the same.
In a second aspect, an embodiment of the present invention provides a method for manufacturing the above-mentioned optical fiber coupler based on linear polarization, including the following steps:
determining the working wavelength, and determining the number of the needed silicon nanorod units and the phase delay of each silicon nanorod unit according to the needed optical fiber mode;
optimizing the structural parameters of the silicon nanorods: scanning the structural parameters of the silicon nanorods by adopting an electromagnetic simulation method under the working wavelength by simultaneously vertically injecting horizontal line polarized light and vertical line polarized light into the working surface of the silicon nanorod array and taking the transmissivity and the phase delay of the silicon nanorods as optimization indexes to obtain the optimal structural parameters;
the designed optical fiber coupler is manufactured by adopting a reactive ion etching process.
In a possible embodiment, based on the second aspect, the operating wavelength is in the range 1500nm-1600 nm.
In a third aspect, an embodiment of the present invention provides a method for using the above-mentioned fiber coupler based on linear polarization, including the following steps:
the modulated horizontal line polarized light and the modulated vertical line polarized light are combined by a beam combiner, and the combined light vertically enters the silicon nanorod array to form two different high-order modes respectively;
different high-order modes are coupled into the few-mode optical fiber or the multimode optical fiber through a 4f system consisting of a collimating lens and a focusing lens;
two high-order modes which are propagated in the few-mode fiber or the multimode fiber for a certain distance are injected into another silicon nanorod array to respectively form horizontal line polarized light and vertical line polarized light, and the two high-order modes are respectively coupled into two single-mode fibers after being split by the beam splitter.
Compared with the prior art, the invention has the advantages that:
(1) the optical fiber coupler provided by the invention has a smaller size structure and small insertion loss.
(2) The optical fiber coupler provided by the invention has accurate phase adjustment, can convert two different linearly polarized light in incident light into two different optical fiber modes, and reduces the complexity of an optical device.
(3) The optical fiber coupler provided by the invention only needs a single-step etching technology, and is simple to prepare.
Drawings
FIG. 1 is a schematic diagram of a fiber mode coupler according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a silicon nanorod structure according to an embodiment of the present invention;
FIG. 3 is a front view of a fiber mode coupler in an embodiment of the present invention;
FIG. 4 shows L P converted from horizontally linearly polarized light by a fiber mode coupler in an embodiment of the present invention11bIntensity distribution of the mode (left), and L P converted from vertically linearly polarized light11aLight intensity distribution of the mode (right);
FIG. 5 is a schematic diagram of optical path signals in a mode multiplexing system of the fiber mode coupler of the present invention;
fig. 6 is a schematic diagram of optical path signals when the fiber mode coupler of the present invention is used for mode demultiplexing.
In the figure, 1, a substrate, 2, a silicon nanorod unit, 3, a silicon nanorod, 4-a beam combiner, 5-a first optical fiber coupler, 6-a collimating lens, 7-a focusing lens, 8-a second optical fiber coupler, 9-a beam splitter, L, the length of a silicon nanobead, the width of a W silicon nanobead, the height of a H silicon nanobead and the period size of a P silicon nanobead.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Example 1
Referring to fig. 1, an embodiment of the present invention provides a fiber coupler based on linear polarization for converting incident light into other fiber modes. The optical fiber coupler is made of a super surface material and comprises a substrate 1 and a silicon nanorod array. The silicon nanorod array is formed by arranging a plurality of silicon nanorod units 2 etched on a substrate 1, wherein the silicon nanorods 3 in the same silicon nanorod unit 2 have the same structural parameters, and the silicon nanorods 3 in different silicon nanorod units 2 have different structural parameters, namely the silicon nanorod units 2 are divided according to the structural parameters of the silicon nanorods 3.
The silicon nanorods 3 of different silicon nanorod units 2 are rectangular parallelopiped with different structural parameters, when incident light is vertically incident, light with polarization directions along the long side and the short side of the silicon nanorods 3 is reflected and transmitted, and the length, width and height of the silicon nanorods 3 are configured such that the phase delay Φ (i, j) of each of the silicon nanorod units 2 is equal to the phase distribution of the optical fiber mode after light conversion, wherein i, j represents the ith, j silicon nanorod unit in the x and y axis directions.
The optical fiber coupler provided by the embodiment of the invention has accurate phase adjustment and can convert two different linearly polarized light in incident light into two different optical fiber modes.
Referring to fig. 2, the structural parameters include the length, width, height and period size of the silicon nanorods 3, one silicon nanorod 3 and the corresponding substrate portion thereof have a silicon nanorod structure, and the period size is the length and width of the corresponding substrate.
The substrate 1 is a silicon dioxide substrate.
The length, width and height of the silicon nanorod 3 are all sub-wavelength dimensions.
All the silicon nanorods 3 have the same height.
The quantity of the silicon nanorods 3 in each silicon nanorod unit 2 is the same.
The embodiment of the invention also provides a manufacturing method of the optical fiber coupler, which comprises the following steps:
determining the working wavelength, and determining the number of the required silicon nanorod units 2 and the phase delay of each silicon nanorod unit 2 according to the required optical fiber mode;
optimizing the structural parameters of the silicon nanorod 3: scanning the structural parameters of the silicon nanorods 3 by adopting an electromagnetic simulation method and taking the transmissivity and the phase delay of the silicon nanorods 3 as optimization indexes by simultaneously vertically injecting horizontal line polarized light and vertical line polarized light into the working surface of the silicon nanorod array under the working wavelength so as to obtain the optimal structural parameters;
the designed optical fiber coupler is manufactured by adopting a reactive ion etching process.
The working wavelength ranges from 1500nm to 1600 nm.
The embodiment of the invention also provides a using method of the optical fiber coupler, which comprises the following steps:
the modulated horizontal line polarized light and the modulated vertical line polarized light are combined by a beam combiner, and the combined light vertically enters a silicon nanorod array of an optical fiber coupler to form two different high-order modes respectively;
different high-order modes are coupled into few-mode optical fibers or multimode optical fibers through a 4f system consisting of a collimating lens and a focusing lens, so that optical fiber mode multiplexing is realized;
two high-order modes which are propagated in the few-mode fiber or the multimode fiber for a certain distance are injected into the silicon nanorod array of the other fiber coupler to form horizontal line polarized light and vertical line polarized light respectively, and the horizontal line polarized light and the vertical line polarized light are coupled into two single-mode fibers respectively after beam splitting by the beam splitter, so that fiber mode demultiplexing is realized.
Example 2
Referring to fig. 1-2, an embodiment of the present invention provides a method for manufacturing a fiber coupler based on linear polarization, including the following steps:
s1, determining the working wavelength to be 1550nm, and converting the incident horizontal linear polarized light into L P11aMode, incident vertically linearly polarized light is converted to L P11bMode, determining that four different silicon nanorod units are needed, referring to fig. 3, dividing the nanorod array into four nanorod units, labeled A, B, C and D units respectively, the phase delays generated in A, B, C and D regions for vertically polarized incident light are 0, pi, 0, respectively; the phase delays produced by A, B, C and the D region are 0, 0, π, respectively, for horizontally polarized incident light.
The phase delay of the silicon nanorods in each silicon nanorod unit is converted into L P11aThe phase distribution of the modes.
S2: optimizing the structural parameters of the silicon nanorod 3: and scanning the structural parameters of the silicon nanorods 3 by adopting an electromagnetic simulation method and taking the horizontal line polarized light and the vertical line polarized light to simultaneously vertically penetrate into the working surface of the silicon nanorod array under the working wavelength and taking the transmissivity higher than 80% and the phase delay of the silicon nanorods 3 as optimization indexes so as to obtain the optimal structural parameters.
Namely, the corresponding relation between the phase delay of the silicon nanorod to the incident light and the length and width of the silicon nanorod is obtained through numerical simulation, and the optimal structural parameters of the silicon nanorod of each silicon nanorod unit are finally obtained as follows: unit A: 275nm long, 275nm wide, 850nm high, 750nm period; unit B: the length is 250nm, the width is 370nm, the height is 850nm, and the period is 750 nm; unit C: the length is 330nm, the width is 330nm, the height is 850nm, and the period is 750 nm; a unit D: 370nm long, 250nm wide, 850nm high and 750nm periodic.
S3: the designed optical fiber coupler is manufactured by adopting a reactive ion etching process. Specifically, a silicon film with a certain thickness is plated on a silicon dioxide substrate, then photoresist is coated on the silicon film, the photoresist is exposed by adopting standard electron beam lithography, and finally, a silicon nanorod array is obtained by adopting a reactive ion etching technology.
Example 3
Referring to fig. 5 and 6, an embodiment of the present invention further provides a method for using the above optical fiber coupler, including the following steps:
s1, the modulated horizontal line polarized light and the modulated vertical line polarized light are combined by the beam combiner 4, and the combined light vertically enters the silicon nanorod array of the first optical fiber coupler 5 to form L P light beams respectively11aMode sum L P11bHigher order modes of the mode, generated L P11aAnd L P11bThe normalized electric field intensity distribution of the mode is shown in fig. 4;
s2: different high-order modes are coupled into few-mode optical fibers or multimode optical fibers through a 4f system consisting of a collimating lens 6 and a focusing lens 7, so that optical fiber mode multiplexing is realized;
s3: two high-order modes which are propagated in the few-mode fiber or the multimode fiber for a certain distance are injected into the silicon nanorod array of the second fiber coupler 8 to form horizontal line polarized light and vertical line polarized light respectively, and the two high-order modes are coupled into the two single-mode fibers respectively after being split by the beam splitter 9, so that fiber mode demultiplexing is realized.
The present invention is not limited to the above-described embodiments, and it will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and such modifications and improvements are also considered to be within the scope of the present invention. Those not described in detail in this specification are within the skill of the art.
Claims (8)
1. A linear polarization based fiber coupler for converting incident light into other fiber modes, comprising:
a substrate (1);
the silicon nanorod array is formed by arranging a plurality of silicon nanorod units (2) etched on the substrate (1), and the silicon nanorods (3) in the same silicon nanorod unit (2) have the same structural parameters;
the silicon nanorods (3) of different silicon nanorod units (2) are cuboid-shaped with different structural parameters, when light vertically enters the silicon nanorod array, the polarized light with the polarization direction along the long side and short side directions of the silicon nanorods (3) is reflected and transmitted on the silicon nanorods (3), the length, width and height of the silicon nanorods (3) are configured to enable the phase delay phi (i, j) of each silicon nanorod unit (2) to be equal to the phase distribution of the optical fiber mode after light conversion, wherein i, j represents the (i, j) th silicon nanorod unit in the x-axis direction and the y-axis direction;
the structural parameters comprise the length, the width, the height and the period size of the silicon nanorods (3), one silicon nanorod and the corresponding base part thereof are of a silicon nanorod structure, and the period size is the length and the width of the corresponding base;
the modulated polarized light vertically enters the silicon nanorod array to form two different high-order modes respectively.
2. The linear polarization based fiber coupler of claim 1, wherein: the substrate (1) is a silicon dioxide substrate.
3. The linear polarization based fiber coupler of claim 1, wherein: the length, the width and the height of the silicon nano rod (3) are all sub-wavelength sizes.
4. The linear polarization based fiber coupler of claim 2, wherein: all the silicon nanorods (3) have the same height.
5. The linear polarization based fiber coupler of claim 1, wherein: the quantity of the silicon nanorods (3) in each silicon nanorod unit (2) is the same.
6. The method of manufacturing a linear polarization based fiber coupler of claim 1, comprising the steps of:
determining the working wavelength, and determining the number of the needed silicon nanorod units (2) and the phase delay of each silicon nanorod unit (2) according to the needed optical fiber mode;
optimizing the structural parameters of the silicon nanorods (3): scanning the structural parameters of the silicon nanorods (3) by adopting an electromagnetic simulation method and taking the transmissivity and the phase delay of the silicon nanorods (3) as optimization indexes by simultaneously vertically injecting horizontal line polarized light and vertical line polarized light into the working surface of the silicon nanorod array under the working wavelength to obtain the optimal structural parameters;
the optical fiber coupler is manufactured by adopting a reactive ion etching process.
7. The method of manufacturing a linear polarization based fiber coupler according to claim 6, wherein: the range of the working wavelength is 1500nm-1600 nm.
8. The method of using a linear polarization based fiber coupler of claim 1, comprising the steps of:
the modulated horizontal line polarized light and the modulated vertical line polarized light are combined by a beam combiner, and the combined light vertically enters the silicon nanorod array to form two different high-order modes respectively;
different high-order modes are coupled into the few-mode optical fiber or the multimode optical fiber through a 4f system consisting of a collimating lens and a focusing lens;
two high-order modes which are propagated in the few-mode fiber or the multimode fiber for a certain distance are injected into the silicon nanorod array to form horizontal line polarized light and vertical line polarized light respectively, and the two high-order modes are coupled into two single-mode fibers respectively after being split by the beam splitter.
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| CN111722320B (en) * | 2019-03-22 | 2022-10-11 | 华为技术有限公司 | Mode division multiplexer, mode division multiplexing system, demultiplexing system and communication system |
| CN111090147A (en) * | 2019-11-12 | 2020-05-01 | 西湖大学 | Integrated optical waveguide integrated with periodic array of nano-structure |
| CN111025454B (en) * | 2019-12-24 | 2021-06-11 | 清华大学 | Optical fiber mode conversion device |
| CN111722420B (en) * | 2020-06-18 | 2022-07-15 | 武汉邮电科学研究院有限公司 | Super-surface-based optical spin angular momentum spatial mode converter |
| CN113225154B (en) * | 2021-04-07 | 2022-07-22 | 浙江大学 | Method, device and structure for realizing mode division multiplexing in optical fiber by utilizing super surface |
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