CN109238533A - A kind of microstress sensor based on phase bit comparison - Google Patents
A kind of microstress sensor based on phase bit comparison Download PDFInfo
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- CN109238533A CN109238533A CN201810889091.7A CN201810889091A CN109238533A CN 109238533 A CN109238533 A CN 109238533A CN 201810889091 A CN201810889091 A CN 201810889091A CN 109238533 A CN109238533 A CN 109238533A
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- 239000000835 fiber Substances 0.000 claims abstract description 17
- 238000005086 pumping Methods 0.000 claims abstract description 7
- 239000003990 capacitor Substances 0.000 claims description 120
- 230000003044 adaptive effect Effects 0.000 claims description 35
- 230000003287 optical effect Effects 0.000 claims description 29
- 239000000919 ceramic Substances 0.000 claims description 21
- 239000013307 optical fiber Substances 0.000 claims description 20
- 230000009466 transformation Effects 0.000 claims description 18
- 230000005611 electricity Effects 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 230000005669 field effect Effects 0.000 claims description 11
- 238000004891 communication Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 238000013519 translation Methods 0.000 claims description 6
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 claims description 2
- 230000006978 adaptation Effects 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000000985 reflectance spectrum Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- YMHOBZXQZVXHBM-UHFFFAOYSA-N 2,5-dimethoxy-4-bromophenethylamine Chemical class COC1=CC(CCN)=C(OC)C=C1Br YMHOBZXQZVXHBM-UHFFFAOYSA-N 0.000 description 1
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- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 206010044565 Tremor Diseases 0.000 description 1
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- 238000003486 chemical etching Methods 0.000 description 1
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- 238000005305 interferometry Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
- G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
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Abstract
A kind of microstress sensor based on phase bit comparison of the invention belongs to fiber optic sensor technology field.Its primary structure has pumping source (1), light wavelength division multiplexing (2), Er-doped fiber (3) etc..The present invention uses sinusoidal signal as modulated signal, will not generate High-frequency Interference, has the characteristics that work is more reliable, sensing accuracy is high, has a wide range of application.
Description
Technical field
The invention belongs to the technical field of fibre optical sensor, in particular to a kind of microstress sensing based on phase bit comparison
Device.
Background technique
Electromagnetism interference, resistant to chemical etching, transmission loss is small, weight small in size because having for bragg grating (FBG)
Gently, convenient for large-scale production the advantages that, and it is widely used in field of sensing technologies.Currently, strain gauge is led in engineering technology
Domain, which has, to be widely applied.It especially interacts in nanoparticle, the emerging fields such as cyto-mechanics sense utensil for microstress
There is urgent need, the safety monitoring of bridge, tunnel and fabric structure is even more to be unable to do without microstress sensor.And Prague light
Fine grating due to its above-mentioned advantage make its constitute strain gauge compared to other sensors have higher reliability,
The use being more suitable under mal-condition.
It is doctor's thesis " fiber grating sensing system of Nankai University Liu Bo with the immediate prior art of the present invention
Research and realization ", the document provides a kind of bragg fiber light based on non-equilibrium Michelson fiber-optic interferometry demodulation techniques
Grid sensor-based system (referring to Fig. 3 .4 of page 24 of the document), the optical fiber sensing system use non-equilibrium Michelson fiber-optic principle of interference,
Change the length of the arm on a wherein arm in interferometer two-arm using the modulated signal that piezoelectric ceramics (PZT) is provided, thus
Change interferometer output intensity, interferometer output intensity, in cosine function rule, is managed with the variation of PZT modulated signal if used
Think modulated signal of the sawtooth wave as PZT, then the output of optical fiber sensing system is directly cosine wave.Optical fiber sensing system passes through cloth
Glug grating perceives the variation of measurement point stress or temperature, and is reflected as the variation of reflectance spectrum central wavelength, central wavelength
Variation be presented as after above-mentioned non-equilibrium Michelson fiber-optic interferometer output cosine wave phase variation, finally by cosine wave
Phase compares with the phase of sawtooth wave, can reflect the variation of bragg grating reflectance spectrum central wavelength, thus real
Now measure the variation of extraneous stress.
In above-mentioned sensor-based system, existing greatest problem is that sawtooth wave can not accomplish absolute idealization, preferably
Sawtooth wave failing edge is vertical, and the failing edge of actual sawtooth wave always has certain gradient, so that rear class can be made defeated
There are a high dithers for cosine wave out, generally necessary in grade demodulator circuit behind in order to eliminate the high-frequency jitter signal
Using bandpass filter (BPF), DC component and high fdrequency component are filtered out.But on the one hand the high fdrequency component inherently can be to remaining
The phase-detection of string wave impacts (zero crossing change in location);On the other hand the frequency of the high-frequency jitter signal is driven by PZT
(electrical characteristics of PZT are equivalent to capacitor to the lagging characteristics of circuit performance, PZT itself, and both end voltage cannot jump, therefore
The failing edge of sawtooth wave be do not accomplish it is unlimited short) and the factors such as optical fiber elasticity itself influence, frequency size is indefinite, very
Difficulty filters out completely;Moreover, when using filter, it, can also be simultaneously other than it can be had an impact to the amplitude-frequency characteristic of output signal
The phase-frequency characteristic of signal is had an impact, i.e., filtering is that phase will receive influence near cutoff frequency, this is for relying on phase
It is very unfavorable for changing for the fibre optical sensor to measure stress variation.Therefore, existing bragg grating stress
Sensor also requires further improvement.
Summary of the invention
In order to overcome existing bragg grating strain gauge there are the shortcomings that, the present invention provides a kind of using just
Microstress sensor based on phase bit comparison of the string signal as PZT driving signal, so as to avoid the production of high-frequency interferencing signal
It is raw, and phase is generated so as to avoid filtering without using filter when handling the signal received
It influences.
The purpose of the present invention is achieved through the following technical solutions:
A kind of microstress sensor based on phase bit comparison, structure have, the 980nm of pumping source 1 and light wavelength division multiplexing 2
End is connected, and the end 1550nm of light wavelength division multiplexing 2 is connected with the one end for the optical fiber being wrapped on the first piezoelectric ceramics 11, is wrapped in
The other end of optical fiber on first piezoelectric ceramics 11 is connected with the input terminal of the first optoisolator 10, the control of the first piezoelectric ceramics 11
End processed is connected with the output port of the first PZT driving circuit 12, the input terminal and D/A converting circuit of the first PZT driving circuit 12
13 output port is connected, and the input port of D/A converting circuit 13 is connected with single-chip microcontroller 16;The output of first optoisolator 10
End is connected with the light input end of optical filter 9, and the electric control end of optical filter 9 is connected with single-chip microcontroller 16, and the light of optical filter 9 is defeated
Outlet is connected with the first port of optical circulator 7, and the second port of optical circulator 7 is connected with one end of Bragg grating group 8, light
The third port of circulator 7 is connected with the input terminal of the first photo-coupler 5,90% output end and second of the first photo-coupler 5
The input terminal of optoisolator 4 is connected, and the output end of the second optoisolator 4 is connected with one end of Er-doped fiber 3, Er-doped fiber 3
The other end is connected with the common end of light wavelength division multiplexing 2;The output of 10% output end and the second photo-coupler of first photo-coupler 5
6 input terminal is connected, and an output end of the second photo-coupler 6 is connected with the input terminal of the second faraday rotation mirror 23, and second
The another output of photo-coupler 6 is connected with the one end for the optical fiber being wrapped on the second piezoelectric ceramics 21, is wrapped in the second pressure
The other end of optical fiber on electroceramics 21 is connected with the input terminal of the first faraday rotation mirror 22, the second photo-coupler 6 it is another
A output end is connected with the input terminal of the second photoelectric conversion circuit 24;
It is characterized in that, structure in addition, the output end and function translation circuit 25 of the second photoelectric conversion circuit 24 input
End is connected, and the output end of functional transformation circuit 25 is connected with an input terminal of adaptive amplitude normalizing circuit 26, reference voltage
The output end of circuit 28 is connected with another input terminal of adaptive amplitude normalizing circuit 26, adaptive amplitude normalizing circuit 26
Output end is connected with an input terminal of phase-comparison circuit 27;The input terminal in controllable frequency source 19 is connected with single-chip microcontroller 16, defeated
Outlet is connected with another input terminal of phase-comparison circuit 27, and the output end of phase-comparison circuit 27 is connected with single-chip microcontroller 16;
The output end in controllable frequency source 19 is also connected with the input terminal of the 2nd PZT driving circuit 20, the output of the 2nd PZT driving circuit 20
End is connected with the control terminal of the second piezoelectric ceramics 21;Temperature sensor 15 is connected with single-chip microcontroller 16;Single-chip microcontroller 16 also respectively with it is defeated
Enter key 14, serial communication modular 17, display screen 18 to be connected;
The structure of the functional transformation circuit 25 is, one end of capacitor C3 and the pin 12 of trigonometric function converter U1 and
One end of resistance R2 is connected, and input terminal of the other end of capacitor C3 as functional transformation circuit 25 is denoted as port ACOS_in, with
The output end of second photoelectric conversion circuit 24 is connected;The other end of resistance R2 is grounded;The pin 2 of trigonometric function converter U1,3,
4,5,8,11,13 ground connection, pin 9,10 are connected with one end of capacitor C2 and -12V power supply, the other end ground connection of capacitor C2;Triangle
The pin 6 of function converter U1 is connected with pin 7, and pin 16 is connected with one end of+12V power supply and capacitor C1, and capacitor C1's is another
One end ground connection;The pin 1 of trigonometric function converter U1 is connected with the sliding end of slide rheostat W1, one end of slide rheostat W1
It is connected with one end of resistance R1, the other end of resistance R1 is connected with the pin 14 of trigonometric function converter U1, slide rheostat W1
Output end of the sliding end as functional transformation circuit 25, port ACOS_out is denoted as, with adaptive amplitude normalizing circuit 26
Input terminal is connected;The model AD639 of the trigonometric function converter U1;
The structure of the adaptive amplitude normalizing circuit 26 is one end of capacitor C11 and one end of resistance R21 and chip
The pin 3 of U2 is connected, and the other end ground connection of resistance R21, the other end of capacitor C11 is as the defeated of adaptive amplitude normalizing circuit 26
Enter end, be denoted as port ADAPT_in, the port ACOS_out of and function translation circuit 25 is connected;The pin 1 of chip U2, pin 7,
Pin 8, pin 14 are grounded, and pin 2 is connected with+5V power supply with pin 4, and pin 11 is connected with pin 12 and with capacitor C5's
One end and+5V power supply are connected, the other end ground connection of capacitor C5;The pin 13 of chip U2 is connected with one end of capacitor C4, capacitor C4
The other end ground connection;The pin 9 of chip U2 is connected with one end of capacitor C6, the other end ground connection of capacitor C6;The pin 5 of chip U2
It is connected with one end of resistance R20 and resistance R19, the other end of resistance R20 ground connection, the other end of resistance R19 is defeated with amplifier U8's
One end of outlet and resistance R17 are connected, the positive supply termination+5V power supply of amplifier U8, negative power end ground connection;Resistance R17's is another
End is connected with one end of one end of resistance R15 and resistance R16, and is connected to the inverting input terminal of amplifier U8;Amplifier U8's is same mutually defeated
Enter end to be connected with one end of resistance R18, the other end of resistance R18 is connected with+2.5V power supply;The other end and capacitor of resistance R15
One end of C10 is connected, and is connected to the output end of amplifier U7;Positive supply termination+5V the power supply of amplifier U7, negative power end ground connection;Electricity
The other end for holding C10 is connected with one end of slide rheostat W3 and sliding end, and is connected to the inverting input terminal of amplifier U7;Amplifier U7
Non-inverting input terminal be connected with one end of resistance R14, the other end of resistance R14 is connected with+2.5V power supply;Slide rheostat W3's
The other end is connected with one end of resistance R13;The output of the other end of resistance R16 and the sliding end of slide rheostat W2 and amplifier U6
End is connected, and one end of slide rheostat W2 is connected with one end of resistance R11;One end phase of the other end of resistance R11 and resistance R10
Even, and it is connected to the inverting input terminal of amplifier U6;Positive supply termination+5V the power supply of amplifier U6, negative power end ground connection;Amplifier U6's is same
Phase input terminal is connected with one end of resistance R12, and the other end of resistance R12 is connected with+2.5V power supply;The other end of resistance R10 with
The other end of resistance R13 and one end of resistance R7 are connected, and are connected to the output end of amplifier U5;The other end and resistance R6 of resistance R7
One end be connected, and be connected to the inverting input terminal of amplifier U5;The output end of another termination amplifier U4 of resistance R6, amplifier U5 is just
Power supply termination+5V power supply, negative power end ground connection;One end of resistance R8 is connected with one end of resistance R9, and is connected to the same of amplifier U5
The other end of phase input terminal, resistance R9 is connected with+2.5V power supply;The other end of resistance R8 is as adaptive amplitude normalizing circuit 26
Reference voltage end, be connected with the reference voltage output terminal of reference voltage circuit 28;The pin 10 of chip U2 is used as adaptive width
The output end for spending normalizing circuit 26, is denoted as port ADAPT_out, is connected with an input terminal of phase-comparison circuit 27;Chip
The pin 10 of U2 is connected with one end of capacitor C7, the homophase input of the other end of capacitor C7 and one end of resistance R22 and amplifier U3
End is connected, the other end ground connection of resistance R22;One end of resistance R3 is connected with the anode of one end of capacitor C8 and diode D1, and
It is connected to the inverting input terminal of amplifier U3, the substrate (i.e. pin 8) of amplifier U3 is connected to the inverting input terminal of amplifier U3;Amplifier U3 is just
Power supply termination+5V power supply, negative supply termination -5V power supply;The other end of capacitor C8 and the cathode of diode D1 and diode D2's
Anode is connected, and is connected to the output end of amplifier U3;The anti-phase input of the other end of resistance R3 and one end of resistance R4 and amplifier U4
End is connected, and the other end of resistance R4 is connected with the grid of the cathode of diode D2 and field-effect tube Q1, the source electrode of field-effect tube Q1
It is connected with one end of one end of capacitor C9 and resistance R5, the other end of capacitor C9 is connected and is grounded with the other end of resistance R5;?
The source electrode of effect pipe Q1 is connected with the drain electrode of field-effect tube Q1, and is connected to the non-inverting input terminal of amplifier U4;The reverse phase of amplifier U4 is defeated
Enter end to be connected with the output end of the substrate of amplifier U4 and amplifier U4;Positive supply termination+5V the power supply of amplifier U3, negative supply termination-
5V power supply;The chip U2 is variable gain amplifier chip, and model is AD8367;
The structure of the phase-comparison circuit 27 is one end of capacitor C12 and the non-inverting input terminal and resistance of amplifier U9
One end of R23 is connected, and an input terminal of the other end of capacitor C12 as phase-comparison circuit 27 is denoted as port PHASE_
In1 is connected with the port ADAPT_out of adaptive amplitude normalizing circuit 26;The other end of resistance R23 is grounded;Amplifier U9 is just
Power supply termination+5V power supply, negative power end ground connection, reverse inter-input-ing ending grounding, the end CLK of output termination d type flip flop U10A;D triggering
The port D of device U10A is grounded;The one end capacitor C13 ground connection, the end PR of another termination d type flip flop U10A;Resistance R24 mono- terminates D touching
Send out the end PR of device U10A, the end Q of another termination d type flip flop U10A;CLR termination+5V the power supply of d type flip flop U10A, d type flip flop
The end PR of the Q non-terminated d type flip flop U12A of U10A;One end of capacitor C14 and the non-inverting input terminal of amplifier U11 and resistance R25's
One end is connected, another input terminal of the other end of capacitor C12 as phase-comparison circuit 27 is denoted as port PHASE_in2, with
The port SineM_out in controllable frequency source 19 is connected;The other end of resistance R25 is grounded;Positive supply termination+5V the electricity of amplifier U11
Source, negative power end ground connection, reverse inter-input-ing ending grounding, the end CLK of output termination d type flip flop U10B;The port D of d type flip flop U10B
Ground connection;The one end capacitor C15 ground connection, the end PR of another termination d type flip flop U10B;The PR of the termination of resistance R26 mono- d type flip flop U10B
End, the end Q of another termination d type flip flop U10B;CLR termination+5V the power supply of d type flip flop U10B, the Q non-terminated D of d type flip flop U10B
The end CLR of trigger U12A;The end D and the end CLK of d type flip flop U12A is grounded, output of the end Q as phase-comparison circuit 27
End, is denoted as port PHASE_out;
The structure of the reference voltage circuit 28 is a termination+5V power supply of resistance R27, another termination amplifier U13's
Non-inverting input terminal, the plus earth of zener diode D3, cathode connect amplifier U13 non-inverting input terminal, the inverting input terminal of amplifier U13
It is connected with output end, positive supply termination+5V power supply, negative power end ground connection, output end is+2.5V power supply ,+the 2.5V in each module
Power supply is provided by the output end;A termination+2.5V power supply of slide rheostat W4, other end ground connection, sliding termination amplifier U14
Non-inverting input terminal;The anti-phase input of amplifier U14 terminates its output end, and positive supply termination+5V power supply, negative power end is grounded, defeated
Output end of the outlet as reference voltage circuit 28, is denoted as port Vref, the reference voltage with adaptive amplitude normalizing circuit 26
End is connected;
The structure in the controllable frequency source 19 is a termination+12V power supply of resistance R28, another termination triode Q1's
Base stage;The base stage of a termination triode Q2 of resistance R29, other end ground connection;A termination+12V of resistance R30, another termination three
The collector of pole pipe Q2;The anode of electrolytic capacitor C17 connects the collector of triode Q2, and cathode connects the base stage of triode Q3;Resistance
The emitter of a termination triode Q2 of R31, the anode of another termination electrolytic capacitor C16;A termination electrolytic capacitor of resistance R32
The anode of C16, other end ground connection;The cathode of electrolytic capacitor C16 is grounded;A termination+12V power supply of resistance R33, another termination three
The base stage of pole pipe Q3;The base stage of one termination triode Q3 of resistance R34, other end ground connection;A termination+12V electricity of resistance R35
Source, the collector of another termination triode Q3;The emitter of a termination triode Q3 of resistance R36, other end ground connection;Electrolysis electricity
The anode for holding C18 connects the emitter of triode Q3, cathode ground connection;The anode of electrolytic capacitor C19 connects the collector of triode Q3, bears
Pole connects one end of thermistor Rt1;The emitter of another termination triode Q2 of thermistor Rt1;Electrolytic capacitor C20 anode connects
The collector of triode Q3, cathode connect the pin 2 of chip U15;The pin 3 of a chip termination U15 of capacitor C21, another termination
The pin 2 of chip U16;The pin 2 of a chip termination U16 of capacitor C22, other end ground connection;The anode of electrolytic capacitor C23 connects core
The pin 2 of piece U16, cathode connect the base stage of triode Q2;The pin 5 of a chip termination U15 of capacitor C24, other end ground connection;Electricity
Hold the pin 5 of a chip termination U16 of C25, other end ground connection;The pin 1 and pin 10 of chip U15 connects+5V power supply, pin 4
It is grounded with pin 6;One end of 9 connecting resistance R37 of pin, one end of 8 connecting resistance R38 of pin, one end of 7 connecting resistance R39 of pin;Electricity
An input port of the other end of R37 as controllable frequency source 19 is hindered, port SineM_in1 is denoted as;The other end of resistance R38
As another input port in controllable frequency source 19, it is denoted as port SineM_in2;Port SineM_in1 and port SineM_
In2 is connected with the input terminal of single-chip microcontroller 16;Another termination+5V power supply of resistance R39;The pin 1 and pin 10 of chip U10 connect+
5V power supply, pin 4 and pin 6 are grounded;One end of 9 connecting resistance R40 of pin, one end of 8 connecting resistance R41 of pin, 7 connecting resistance of pin
One end of R42;Another termination port SineM_in1 of resistance R40;Another termination port SineM_in2 of resistance R41;Resistance
Another termination+5V power supply of R42;Output port of the cathode of electrolytic capacitor C18 as controllable frequency source 19, is denoted as SineM_
out。
The preferred 980nm laser light source of pumping source 1.
The preferred DS18B20 digital temperature sensor of temperature sensor 15.
The utility model has the advantages that
1, the present invention uses sinusoidal signal as modulated signal, compared with the prior art is modulated using sawtooth signal,
High-frequency Interference will not be generated, so that sensor-based system work is more reliable.
2, the present invention uses adaptive amplitude normalizing circuit by the amplitude auto-changing of signal after demodulation at suitable phase ratio
Compared with the size that circuit is compared, so that phase-detection error is smaller, the sensing accuracy of entire sensor-based system is effectively increased.
3, compared with prior art, frequency modulating signal of the invention is adjustable, so that sensor-based system applied field of the invention
It closes wider.
4, the present invention has temperature compensation function, effectively overcomes influence of the environment temperature to parameter sensing.
Detailed description of the invention
Fig. 1 is whole functional block diagram of the invention.
Fig. 2 is the basic circuit diagram for the functional transformation circuit that the present invention uses.
Fig. 3 is the basic circuit diagram for the adaptive amplitude normalizing circuit that the present invention uses.
Fig. 4 is the basic circuit diagram for the phase-comparison circuit that the present invention uses.
Fig. 5 is the basic circuit diagram for the reference voltage circuit that the present invention uses.
Fig. 6 is the basic circuit diagram in the controllable frequency source that the present invention uses.
Specific embodiment
The working principle of the invention is further illustrated with reference to the accompanying drawing, it should be appreciated that the component marked in attached drawing
Parameter is the preferred parameter that following embodiment uses, rather than limiting the scope of the invention.
The overall structure of the invention of embodiment 1
As shown in Figure 1, overall structure of the invention has, pumping source 1 be (Shanghai Ke Naite laser Science and Technology Ltd.
VENUS series 980nm high power single mode pump light source, model VLSS-980-B, maximum single-mode output optical power are 1200mW)
With (the fused tapered 980/1550nm pump light of Shanghai Han Yu Fibre Optical Communication Technology Co., Ltd production of light wavelength division multiplexing 2
Wave division multiplex coupler) the end 980nm be connected, the end 1550nm of light wavelength division multiplexing 2 and be wrapped in the first piezoelectric ceramics 11 (on
Hai Hanyu Fibre Optical Communication Technology Co., Ltd production 1310/1480/1550nm polarization independent optical isolator) on optical fiber one
End is connected, and is wrapped in 10 (the vast space fiber optic communication in Shanghai of the other end and the first optoisolator of the optical fiber on the first piezoelectric ceramics 11
Technology Co., Ltd. production 1310/1480/1550nm polarization independent optical isolator) input terminal be connected, the first piezoelectric ceramics
11 control terminal is connected with the output port of the first PZT driving circuit 12, and the input terminal and digital-to-analogue of the first PZT driving circuit 12 turn
The output port for changing circuit 13 is connected, and the input port of D/A converting circuit 13 is connected with single-chip microcontroller 16;First optoisolator 10
Output end and optical filter 9 (Micron Optics company produce, model FFP-TF-1060-010G0200-2.0) light
Input terminal is connected, and the electric control end of optical filter 9 is connected with single-chip microcontroller 16, the light output end and optical circulator 7 of optical filter 9
The first port of (the PIOC3-15 optical circulator of Shanghai Han Yu company production) is connected, the second port and Bradley of optical circulator 7
Lattice grating group 8 (reflectivity is 90 percent, and bandwidth is 0.6nm, and central wavelength is respectively 1550nm, 1560nm and
Three Bragg gratings of 1630nm) one end be connected, the third port of optical circulator 7 and 5 (OZ- of the first photo-coupler
OPTICS company production, model FUSED-12-1064-7/125-90/10-3U-3mm, splitting ratio 90:10) input terminal
It is connected, (Shanghai Han Yu Fibre Optical Communication Technology Co., Ltd is raw for 90% output end of the first photo-coupler 5 and the second optoisolator 4
The 1310/1480/1550nm polarization independent optical isolator of production) input terminal be connected, the output end of the second optoisolator 4 and er-doped
Optical fiber 3 (the C-Band Er-doped fiber of the high-performance 980nm pumping of Nufern company of U.S. production, model EDFC-980-HP, 3
Rice) one end be connected, the other end of Er-doped fiber 3 is connected with the common end of light wavelength division multiplexing 2.Above structure constitutes optical fiber
The basic luminaire part of sensor and transducing part.The output of 10% output end and the second photo-coupler 6 (2 of first photo-coupler 5
× 2 standard single mode photo-couplers, splitting ratio 50:50) input terminal be connected, an output end of the second photo-coupler 6 and the
The input terminal of two faraday rotation mirrors 23 (MFI-1310 of THORLABS company production) is connected, the second photo-coupler 6 it is another
A output end and the light being wrapped on the second piezoelectric ceramics 21 (cylindrical piezoelectric ceramics, outer diameter 50mm, internal diameter 40mm, high 50mm)
Fine one end is connected, and is wrapped in the other end and the first faraday rotation mirror 22 of the optical fiber on the second piezoelectric ceramics 21
The input terminal of (MFI-1310 of THORLABS company production) is connected, the another output and the second light of the second photo-coupler 6
The input terminal of power conversion circuit 24 is connected.Above-mentioned second photo-coupler 6, the first faraday rotation mirror 22, the second Faraday rotation
Mirror 23 and the second piezoelectric ceramics 21 collectively constitute Michelson interference structure.
Structure of the invention in addition, the output end and function translation circuit 25 of the second photoelectric conversion circuit 24 input terminal phase
Even, the output end of functional transformation circuit 25 is connected with an input terminal of adaptive amplitude normalizing circuit 26, reference voltage circuit
28 output end is connected with another input terminal of adaptive amplitude normalizing circuit 26, the output of adaptive amplitude normalizing circuit 26
End is connected with an input terminal of phase-comparison circuit 27;The input terminal in controllable frequency source 19 and single-chip microcontroller 16 (STC89C51) phase
Even, output end is connected with another input terminal of phase-comparison circuit 27, the output end and single-chip microcontroller 16 of phase-comparison circuit 27
It is connected;The output end in controllable frequency source 19 is also connected with the input terminal of the 2nd PZT driving circuit 20, the 2nd PZT driving circuit 20
Output end be connected with the control terminal of the second piezoelectric ceramics 21.Above structure constitutes the demodulation part of sensor.Temperature sensing
Device (15DS18B20) is connected with single-chip microcontroller 16, for the present invention provides temperature compensation functions.Single-chip microcontroller 16 is also pressed with input respectively
Key 14, serial communication modular (17MAX232), display screen 18 are connected, for parameter to be arranged, letter is communicated and shown with computer
The functions such as breath.
2 functional transformation circuit of embodiment
The structure of the functional transformation circuit 25 is, one end of capacitor C3 and the pin 12 of trigonometric function converter U1 and
One end of resistance R2 is connected, and input terminal of the other end of capacitor C3 as functional transformation circuit 25 is denoted as port ACOS_in, with
The output end of second photoelectric conversion circuit 24 is connected;The other end of resistance R2 is grounded;The pin 2 of trigonometric function converter U1,3,
4,5,8,11,13 ground connection, pin 9,10 are connected with one end of capacitor C2 and -12V power supply, the other end ground connection of capacitor C2;Triangle
The pin 6 of function converter U1 is connected with pin 7, and pin 16 is connected with one end of+12V power supply and capacitor C1, and capacitor C1's is another
One end ground connection;The pin 1 of trigonometric function converter U1 is connected with the sliding end of slide rheostat W1, one end of slide rheostat W1
It is connected with one end of resistance R1, the other end of resistance R1 is connected with the pin 14 of trigonometric function converter U1, slide rheostat W1
Output end of the sliding end as functional transformation circuit 25, port ACOS_out is denoted as, with adaptive amplitude normalizing circuit 26
Input terminal is connected;The model AD639 of the trigonometric function converter U1;The circuit has the function of anti-cosine transform, by
The signal of two photoelectric conversion circuits 24 output carries out anticosine processing.
The adaptive amplitude normalizing circuit of embodiment 3
Since the signal amplitude that functional transformation circuit 25 exports is smaller, and influenced by multiple parameters in optical path and circuit,
Size is indefinite, therefore the present invention devises adaptive amplitude normalizing circuit 26, for the signal for exporting functional transformation circuit 25
Amplitude normalization at best size, to further increase the precision of demodulation.Specific structure is one end of capacitor C11 and resistance
One end of R21 and the pin 3 of chip U2 are connected, and the other end ground connection of resistance R21, the other end of capacitor C11 is as adaptive width
The input terminal for spending normalizing circuit 26, is denoted as port ADAPT_in, and the port ACOS_out of and function translation circuit 25 is connected;Chip
Pin 1, pin 7, pin 8, the pin 14 of U2 is grounded, and pin 2 is connected with+5V power supply with pin 4, pin 11 and pin 12
It is connected and is connected with one end of capacitor C5 and+5V power supply, the other end ground connection of capacitor C5;The pin 13 of chip U2 is with capacitor C4's
One end is connected, the other end ground connection of capacitor C4;The pin 9 of chip U2 is connected with one end of capacitor C6, another termination of capacitor C6
Ground;The pin 5 of chip U2 is connected with one end of resistance R20 and resistance R19, and the other end ground connection of resistance R20, resistance R19's is another
One end is connected with one end of the output end of amplifier U8 and resistance R17, the positive supply termination+5V power supply of amplifier U8, negative supply termination
Ground;The other end of resistance R17 is connected with one end of one end of resistance R15 and resistance R16, and is connected to the anti-phase input of amplifier U8
End;The non-inverting input terminal of amplifier U8 is connected with one end of resistance R18, and the other end of resistance R18 is connected with+2.5V power supply;Resistance
The other end of R15 is connected with one end of capacitor C10, and is connected to the output end of amplifier U7;Positive supply termination+5V the electricity of amplifier U7
Source, negative power end ground connection;The other end of capacitor C10 is connected with one end of slide rheostat W3 and sliding end, and is connected to amplifier U7
Inverting input terminal;The non-inverting input terminal of amplifier U7 is connected with one end of resistance R14, the other end and+2.5V power supply of resistance R14
It is connected;The other end of slide rheostat W3 is connected with one end of resistance R13;The other end of resistance R16 is with slide rheostat W2's
The output end of sliding end and amplifier U6 are connected, and one end of slide rheostat W2 is connected with one end of resistance R11;Resistance R11's is another
One end is connected with one end of resistance R10, and is connected to the inverting input terminal of amplifier U6;Positive supply termination+5V the power supply of amplifier U6 is born
Power end ground connection;The non-inverting input terminal of amplifier U6 is connected with one end of resistance R12, the other end and the+2.5V power supply phase of resistance R12
Even;The other end of resistance R10 is connected with one end of the other end of resistance R13 and resistance R7, and is connected to the output end of amplifier U5;Electricity
The other end of resistance R7 is connected with one end of resistance R6, and is connected to the inverting input terminal of amplifier U5;Another termination amplifier of resistance R6
The output end of U4, the positive supply termination+5V power supply of amplifier U5, negative power end ground connection;One end of resistance R8 and one end of resistance R9
It is connected, and is connected to the non-inverting input terminal of amplifier U5, the other end of resistance R9 is connected with+2.5V power supply;The other end of resistance R8 is made
For the reference voltage end of adaptive amplitude normalizing circuit 26, it is connected with the reference voltage output terminal of reference voltage circuit 28;Chip
Output end of the pin 10 of U2 as adaptive amplitude normalizing circuit 26, is denoted as port ADAPT_out, with phase-comparison circuit 27
An input terminal be connected;The pin 10 of chip U2 is connected with one end of capacitor C7, the other end of capacitor C7 and the one of resistance R22
The non-inverting input terminal of end and amplifier U3 are connected, the other end ground connection of resistance R22;One end of resistance R3 and one end and two of capacitor C8
The anode of pole pipe D1 is connected, and is connected to the inverting input terminal of amplifier U3, and the substrate (i.e. pin 8) of amplifier U3 is connected to the anti-of amplifier U3
Phase input terminal;Positive supply termination+5V the power supply of amplifier U3, negative supply termination -5V power supply;The other end and diode D1 of capacitor C8
Cathode and the anode of diode D2 be connected, and be connected to the output end of amplifier U3;The other end of resistance R3 and one end of resistance R4
And the inverting input terminal of amplifier U4 is connected, the grid phase of the other end of resistance R4 and the cathode of diode D2 and field-effect tube Q1
Even, the source electrode of field-effect tube Q1 is connected with one end of one end of capacitor C9 and resistance R5, and the other end of capacitor C9 is with resistance R5's
The other end is connected and is grounded;The source electrode of field-effect tube Q1 is connected with the drain electrode of field-effect tube Q1, and is connected to the same mutually defeated of amplifier U4
Enter end;The inverting input terminal of amplifier U4 is connected with the output end of the substrate of amplifier U4 and amplifier U4;The positive supply termination of amplifier U3+
5V power supply, negative supply termination -5V power supply;The chip U2 is variable gain amplifier chip, and model is AD8367;
4 phase-comparison circuit of embodiment
As shown in figure 4, the structure for the phase-comparison circuit 27 that the present invention uses is one end of capacitor C12 and fortune
One end of the non-inverting input terminal and resistance R23 of putting U9 is connected, and the other end of capacitor C12 is defeated as one of phase-comparison circuit 27
Enter end, is denoted as port PHASE_in1, is connected with the port ADAPT_out of adaptive amplitude normalizing circuit 26;Resistance R23's is another
One end ground connection;Positive supply termination+5V the power supply of amplifier U9, negative power end ground connection, reverse inter-input-ing ending grounding, output termination D triggering
The end CLK of device U10A;The port D of d type flip flop U10A is grounded;The one end capacitor C13 ground connection, the PR of another termination d type flip flop U10A
End;Resistance R24 mono- terminates the end PR of d type flip flop U10A, the end Q of another termination d type flip flop U10A;The end CLR of d type flip flop U10A
Connect+5V power supply, the end PR of the Q non-terminated d type flip flop U12A of d type flip flop U10A;The same phase of one end of capacitor C14 and amplifier U11
One end of input terminal and resistance R25 are connected, another input terminal of the other end of capacitor C12 as phase-comparison circuit 27, note
For port PHASE_in2, it is connected with the port SineM_out in controllable frequency source 19;The other end of resistance R25 is grounded;Amplifier U11
Positive supply termination+5V power supply, negative power end ground connection, reverse inter-input-ing ending grounding, output termination d type flip flop U10B the end CLK;D
The port D of trigger U10B is grounded;The one end capacitor C15 ground connection, the end PR of another termination d type flip flop U10B;Resistance R26 mono- is terminated
The end PR of d type flip flop U10B, the end Q of another termination d type flip flop U10B;CLR termination+5V the power supply of d type flip flop U10B, D triggering
The end CLR of the Q non-terminated d type flip flop U12A of device U10B;The end D and the end CLK of d type flip flop U12A is grounded, and the end Q is as phase ratio
Compared with the output end of circuit 27, it is denoted as port PHASE_out.The standard sine wave that the circuit exports controllable frequency source 19 with it is adaptive
The sine wave (environment that its phase is detected by Bragg grating group 8 is influenced) for answering amplitude normalizing circuit 26 to export carries out phase ratio
Compared with, and comparison result is sent into single-chip microcontroller 16, single-chip microcontroller 16 calculates answering at Bragg grating group 8 according to the phase differential
Power variation.
5 reference voltage circuit of embodiment
As shown in figure 5, the structure of the reference voltage circuit 28 is, and a termination+5V power supply of resistance R27, the other end
The non-inverting input terminal of amplifier U13, the plus earth of zener diode D3 are connect, cathode meets amplifier U13 non-inverting input terminal, amplifier U13
Inverting input terminal be connected with output end, positive supply termination+5V power supply, negative power end ground connection, output end be+2.5V power supply, respectively
+ 2.5V power supply in module is provided by the output end;A termination+2.5V power supply of slide rheostat W4, other end ground connection are sliding
Moved end connects the non-inverting input terminal of amplifier U14;The anti-phase input of amplifier U14 terminates its output end, and positive supply termination+5V power supply is born
Power end ground connection, output end of the output end as reference voltage circuit 28 is denoted as port Vref, with adaptive amplitude normalizing circuit
26 reference voltage end is connected.
6 controllable frequency source of embodiment
As shown in fig. 6, the structure in controllable frequency source 19 used in the present invention is, a termination+12V power supply of resistance R28,
The base stage of another termination triode Q1;The base stage of a termination triode Q2 of resistance R29, other end ground connection;One end of resistance R30
Connect+12V, the collector of another termination triode Q2;The anode of electrolytic capacitor C17 connects the collector of triode Q2, and cathode connects three
The base stage of pole pipe Q3;The emitter of a termination triode Q2 of resistance R31, the anode of another termination electrolytic capacitor C16;Resistance
The anode of a termination electrolytic capacitor C16 of R32, other end ground connection;The cathode of electrolytic capacitor C16 is grounded;A termination of resistance R33
+ 12V power supply, the base stage of another termination triode Q3;The base stage of one termination triode Q3 of resistance R34, other end ground connection;Resistance
A termination+12V power supply of R35, the collector of another termination triode Q3;The emitter of a termination triode Q3 of resistance R36,
Other end ground connection;The anode of electrolytic capacitor C18 connects the emitter of triode Q3, cathode ground connection;The anode of electrolytic capacitor C19 connects three
The collector of pole pipe Q3, cathode connect one end of thermistor Rt1;The emitter of another termination triode Q2 of thermistor Rt1;
Electrolytic capacitor C20 anode connects the collector of triode Q3, and cathode connects the pin 2 of chip U15;A chip termination U15 of capacitor C21
Pin 3, the pin 2 of another chip termination U16;The pin 2 of a chip termination U16 of capacitor C22, other end ground connection;Electrolysis
The anode of capacitor C23 connects the pin 2 of chip U16, and cathode connects the base stage of triode Q2;The pipe of a chip termination U15 of capacitor C24
Foot 5, other end ground connection;The pin 5 of a chip termination U16 of capacitor C25, other end ground connection;The pin 1 and pin of chip U15
10 connect+5V power supply, and pin 4 and pin 6 are grounded;One end of 9 connecting resistance R37 of pin, one end of 8 connecting resistance R38 of pin, pin 7
One end of connecting resistance R39;An input port of the other end of resistance R37 as controllable frequency source 19, is denoted as port SineM_
in1;Another input port of the other end of resistance R38 as controllable frequency source 19, is denoted as port SineM_in2;Port
SineM_in1 and port SineM_in2 are connected with the input terminal of single-chip microcontroller 16;Another termination+5V power supply of resistance R39;Chip
The pin 1 and pin 10 of U10 connects+5V power supply, and pin 4 and pin 6 are grounded;One end of 9 connecting resistance R40 of pin, 8 connecting resistance of pin
One end of R41, one end of 7 connecting resistance R42 of pin;Another termination port SineM_in1 of resistance R40;The other end of resistance R41
Meet port SineM_in2;Another termination+5V power supply of resistance R42;The cathode of electrolytic capacitor C18 is as controllable frequency source 19
Output port is denoted as SineM_out.The adjustable standard sine wave of module output frequency, provides for demodulation part of the invention
Required sinusoidal signal.
7 the working principle of the invention of embodiment
In conjunction with the various embodiments described above and each attached drawing, illustrate the working principle of the invention.When work, by bragg grating
Group 8 is placed on each position (such as bridge, building load-bearing pillar) for needing monitor stress to change, by Er-doped fiber 3, optical isolation
The optical fiber laser annular chamber of the compositions such as device 4 is that bragg grating group 8 provides wideband light source, each bragg grating
A specific reflectance spectrum is had, the peak wavelength of different gratings, reflectance spectrum is different, when some measurand stress occurs
When variation, the reflectance spectrum peak wavelength of the bragg grating at this can occur to deviate accordingly, and reflected light enters by the
The Michael that two photo-couplers 6, the second piezoelectric ceramics 21, the first faraday rotation mirror 22, the second faraday rotation mirror 23 are constituted
In inferior interferometer, while controllable frequency source 19 provides a control signal sin (ω t) for Michelson's interferometer, which exists
In interferometer by bragg grating reflect light influenced, then through the second photoelectric conversion circuit 24 be converted into electric signal and by
Sin (ω t+ Δ θ) is obtained after the anti-cosine transform of functional transformation circuit 25, the signal is after adaptive amplitude normalizing circuit 26
Amplitude is adjusted to a suitable size (being controlled by reference voltage circuit 28), and signal and controllable frequency source 19 at this time generates
Sinusoidal signal sin (ω t) is compared, and phase is changed, and is come out the phase difference detection of the two by phase-comparison circuit 27
And it is sent into single-chip microcontroller 16, the phase difference real reaction stress variation of measured point finally realizes the inspection to measured point stress
It surveys.The present invention, without using sawtooth wave, trembles during modulation and demodulation so as to avoid sawtooth wave failing edge bring high frequency
Dynamic signal avoids special to the amplitude-frequency of output signal also there is no need to use bandpass filter to be filtered in demodulator circuit
Property and phase-frequency characteristic have an impact.The present invention using standard sine wave signal as PZT modulated signal, to modulated signal into
When row demodulation, modulated signal is dexterously recovered into phase using functional transformation circuit 25 and adaptive amplitude normalizing circuit 26
Controlled by the Bragg grating group 8 and suitable sinusoidal signal of amplitude, so that carrying out phase bit comparison in phase-comparison circuit 27
When, the phase difference of controlled signal and original signal can be highly precisely compared, to accurately react sensing head (i.e. Bradley
Lattice grating group 8) environmental parameter that is detected.
Since optical fiber laser annular chamber (is generally sensed with bragg grating group 8 vulnerable to environment temperature at work
Pop one's head in not in same position) influence, therefore temperature compensation function, when the environmental temperature is changed, temperature has also been devised in the present invention
Temperature change can be converted into digital signal input single-chip microcontroller 16 by converter 15, for locating for compensated optical fiber laser annular chamber
The variation of environment temperature give measurement result bring error.
Claims (3)
1. a kind of microstress sensor based on phase bit comparison, structure have, pumping source (1) and light wavelength division multiplexing (2)
The end 980nm is connected, one end phase at the end 1550nm of light wavelength division multiplexing (2) and the optical fiber being wrapped on the first piezoelectric ceramics (11)
Even, the other end for the optical fiber being wrapped on the first piezoelectric ceramics (11) is connected with the input terminal of the first optoisolator (10), and first
The control terminal of piezoelectric ceramics (11) is connected with the output port of the first PZT driving circuit (12), the first PZT driving circuit (12)
Input terminal is connected with the output port of D/A converting circuit (13), the input port of D/A converting circuit (13) and single-chip microcontroller (16)
It is connected;The output end of first optoisolator (10) is connected with the light input end of optical filter (9), the electric control of optical filter (9)
End is connected with single-chip microcontroller (16), and the light output end of optical filter (9) is connected with the first port of optical circulator (7), optical circulator
(7) second port is connected with the one end of Bragg grating group (8), the third port and the first photo-coupler of optical circulator (7)
(5) input terminal is connected, and 90% output end of the first photo-coupler (5) is connected with the input terminal of the second optoisolator (4), and second
The output end of optoisolator (4) is connected with one end of Er-doped fiber (3), the other end and light wavelength division multiplexing of Er-doped fiber (3)
(2) common end is connected;The 10% output end output of first photo-coupler (5) is connected with the input terminal of the second photo-coupler (6),
One output end of the second photo-coupler (6) is connected with the input terminal of the second faraday rotation mirror (23), the second photo-coupler (6)
Another output is connected with the one end for the optical fiber being wrapped on the second piezoelectric ceramics (21), is wrapped in the second piezoelectric ceramics (21)
On the other end of optical fiber be connected with the input terminal of the first faraday rotation mirror (22), another of the second photo-coupler (6) is defeated
Outlet is connected with the input terminal of the second photoelectric conversion circuit (24);
It is characterized in that, structure in addition, the output end and function translation circuit (25) of the second photoelectric conversion circuit (24) input
End is connected, and the output end of functional transformation circuit (25) is connected with an input terminal of adaptive amplitude normalizing circuit (26), benchmark
The output end of potential circuit (28) is connected with another input terminal of adaptive amplitude normalizing circuit (26), adaptive amplitude normalizing
The output end of circuit (26) is connected with an input terminal of phase-comparison circuit (27);The input terminal and list in controllable frequency source (19)
Piece machine (16) be connected, output end is connected with another input terminal of phase-comparison circuit (27), phase-comparison circuit (27) it is defeated
Outlet is connected with single-chip microcontroller (16);Input terminal phase of the output end in controllable frequency source (19) also with the 2nd PZT driving circuit (20)
Even, the output end of the 2nd PZT driving circuit (20) is connected with the control terminal of the second piezoelectric ceramics (21);Temperature sensor (15) with
Single-chip microcontroller (16) is connected;Single-chip microcontroller (16) also respectively with input key (14), serial communication modular (17), display screen (18) phase
Even;
The structure of the functional transformation circuit (25) is one end of capacitor C3 and the pin 12 and electricity of trigonometric function converter U1
The one end for hindering R2 is connected, and input terminal of the other end of capacitor C3 as functional transformation circuit (25) is denoted as port ACOS_in, with
The output end of second photoelectric conversion circuit (24) is connected;The other end of resistance R2 is grounded;The pin 2 of trigonometric function converter U1,
3,4,5,8,11,13 ground connection, pin 9,10 are connected with one end of capacitor C2 and -12V power supply, the other end ground connection of capacitor C2;Three
The pin 6 of angle function converter U1 is connected with pin 7, and pin 16 is connected with one end of+12V power supply and capacitor C1, capacitor C1's
Other end ground connection;The pin 1 of trigonometric function converter U1 is connected with the sliding end of slide rheostat W1, and the one of slide rheostat W1
End is connected with one end of resistance R1, and the other end of resistance R1 is connected with the pin 14 of trigonometric function converter U1, slide rheostat
Output end of the sliding end of W1 as functional transformation circuit (25), is denoted as port ACOS_out, with adaptive amplitude normalizing circuit
(26) input terminal is connected;The model AD639 of the trigonometric function converter U1;
The structure of the adaptive amplitude normalizing circuit (26) is one end of capacitor C11 and one end of resistance R21 and chip U2
Pin 3 be connected, the other end of resistance R21 ground connection, the other end of capacitor C11 is as the defeated of adaptive amplitude normalizing circuit (26)
Enter end, be denoted as port ADAPT_in, the port ACOS_out of and function translation circuit (25) is connected;Pin 1, the pin of chip U2
7, pin 8, pin 14 are grounded, and pin 2 is connected with+5V power supply with pin 4, pin 11 be connected with pin 12 and with capacitor C5
One end and+5V power supply be connected, the other end of capacitor C5 ground connection;The pin 13 of chip U2 is connected with one end of capacitor C4, capacitor
The other end of C4 is grounded;The pin 9 of chip U2 is connected with one end of capacitor C6, the other end ground connection of capacitor C6;The pipe of chip U2
Foot 5 is connected with one end of resistance R20 and resistance R19, and the other end ground connection of resistance R20, the other end of resistance R19 is with amplifier U8's
One end of output end and resistance R17 are connected, the positive supply termination+5V power supply of amplifier U8, negative power end ground connection;Resistance R17's is another
One end is connected with one end of one end of resistance R15 and resistance R16, and is connected to the inverting input terminal of amplifier U8;The same phase of amplifier U8
Input terminal is connected with one end of resistance R18, and the other end of resistance R18 is connected with+2.5V power supply;The other end and electricity of resistance R15
The one end for holding C10 is connected, and is connected to the output end of amplifier U7;Positive supply termination+5V the power supply of amplifier U7, negative power end ground connection;
The other end of capacitor C10 is connected with one end of slide rheostat W3 and sliding end, and is connected to the inverting input terminal of amplifier U7;Amplifier
The non-inverting input terminal of U7 is connected with one end of resistance R14, and the other end of resistance R14 is connected with+2.5V power supply;Slide rheostat W3
The other end be connected with one end of resistance R13;The sliding end of the other end of resistance R16 and slide rheostat W2 and amplifier U6's is defeated
Outlet is connected, and one end of slide rheostat W2 is connected with one end of resistance R11;The other end of resistance R11 and one end of resistance R10
It is connected, and is connected to the inverting input terminal of amplifier U6;Positive supply termination+5V the power supply of amplifier U6, negative power end ground connection;Amplifier U6's
Non-inverting input terminal is connected with one end of resistance R12, and the other end of resistance R12 is connected with+2.5V power supply;The other end of resistance R10
It is connected with one end of the other end of resistance R13 and resistance R7, and is connected to the output end of amplifier U5;The other end and resistance of resistance R7
One end of R6 is connected, and is connected to the inverting input terminal of amplifier U5;The output end of another termination amplifier U4 of resistance R6, amplifier U5's
Positive supply termination+5V power supply, negative power end ground connection;One end of resistance R8 is connected with one end of resistance R9, and is connected to amplifier U5's
The other end of non-inverting input terminal, resistance R9 is connected with+2.5V power supply;The other end of resistance R8 is as adaptive amplitude normalizing circuit
(26) reference voltage end is connected with the reference voltage output terminal of reference voltage circuit (28);The pin 10 of chip U2 is as certainly
The output end of amplitude of adaptation normalizing circuit (26), is denoted as port ADAPT_out, an input terminal with phase-comparison circuit (27)
It is connected;The pin 10 of chip U2 is connected with one end of capacitor C7, the other end of capacitor C7 and one end of resistance R22 and amplifier U3's
Non-inverting input terminal is connected, the other end ground connection of resistance R22;The anode of one end of resistance R3 and one end of capacitor C8 and diode D1
It is connected, and is connected to the inverting input terminal of amplifier U3, the substrate (i.e. pin 8) of amplifier U3 is connected to the inverting input terminal of amplifier U3;Fortune
Put the positive supply termination+5V power supply of U3, negative supply termination -5V power supply;The other end of capacitor C8 and the cathode and two of diode D1
The anode of pole pipe D2 is connected, and is connected to the output end of amplifier U3;The other end of resistance R3 and one end of resistance R4 and amplifier U4's
Inverting input terminal is connected, and the other end of resistance R4 is connected with the grid of the cathode of diode D2 and field-effect tube Q1, field-effect tube
The source electrode of Q1 is connected with one end of one end of capacitor C9 and resistance R5, and the other end of capacitor C9 is connected simultaneously with the other end of resistance R5
Ground connection;The source electrode of field-effect tube Q1 is connected with the drain electrode of field-effect tube Q1, and is connected to the non-inverting input terminal of amplifier U4;Amplifier U4's
Inverting input terminal is connected with the output end of the substrate of amplifier U4 and amplifier U4;Positive supply termination+5V the power supply of amplifier U3, negative supply
Termination -5V power supply;The chip U2 is variable gain amplifier chip, and model is AD8367;
The structure of the phase-comparison circuit (27) is one end of capacitor C12 and the non-inverting input terminal of amplifier U9 and resistance R23
One end be connected, an input terminal of the other end of capacitor C12 as phase-comparison circuit (27) is denoted as port PHASE_in1,
It is connected with the port ADAPT_out of adaptive amplitude normalizing circuit (26);The other end of resistance R23 is grounded;The positive electricity of amplifier U9
Source connects+5V power supply, negative power end ground connection, reverse inter-input-ing ending grounding, the end CLK of output termination d type flip flop U10A;D type flip flop
The port D of U10A is grounded;The one end capacitor C13 ground connection, the end PR of another termination d type flip flop U10A;Resistance R24 mono- terminates D triggering
The end PR of device U10A, the end Q of another termination d type flip flop U10A;CLR termination+5V the power supply of d type flip flop U10A, d type flip flop U10A
Q non-terminated d type flip flop U12A the end PR;One end of one end of capacitor C14 and the non-inverting input terminal of amplifier U11 and resistance R25
It is connected, another input terminal of the other end of capacitor C12 as phase-comparison circuit (27) is denoted as port PHASE_in2, and can
The port SineM_out for controlling frequency source (19) is connected;The other end of resistance R25 is grounded;Positive supply termination+5V the electricity of amplifier U11
Source, negative power end ground connection, reverse inter-input-ing ending grounding, the end CLK of output termination d type flip flop U10B;The port D of d type flip flop U10B
Ground connection;The one end capacitor C15 ground connection, the end PR of another termination d type flip flop U10B;The PR of the termination of resistance R26 mono- d type flip flop U10B
End, the end Q of another termination d type flip flop U10B;CLR termination+5V the power supply of d type flip flop U10B, the Q non-terminated D of d type flip flop U10B
The end CLR of trigger U12A;The end D and the end CLK of d type flip flop U12A is grounded, output of the end Q as phase-comparison circuit (27)
End, is denoted as port PHASE_out;
The structure of the reference voltage circuit (28) is a termination+5V power supply of resistance R27, and another termination amplifier U13's is same
Phase input terminal, the plus earth of zener diode D3, cathode connect amplifier U13 non-inverting input terminal, the inverting input terminal of amplifier U13 with
Output end is connected, positive supply termination+5V power supply, and negative power end ground connection, output end is+2.5V power supply ,+2.5V the electricity in each module
Source is provided by the output end;A termination+2.5V power supply of slide rheostat W4, other end ground connection, sliding termination amplifier U14's
Non-inverting input terminal;The anti-phase input of amplifier U14 terminates its output end, positive supply termination+5V power supply, negative power end ground connection, output
The output end as reference voltage circuit (28) is held, port Vref is denoted as, the reference electricity with adaptive amplitude normalizing circuit (26)
Pressure side is connected;
The structure in the controllable frequency source (19) is a termination+12V power supply of resistance R28, the base of another termination triode Q1
Pole;The base stage of a termination triode Q2 of resistance R29, other end ground connection;A termination+12V of resistance R30, three poles of another termination
The collector of pipe Q2;The anode of electrolytic capacitor C17 connects the collector of triode Q2, and cathode connects the base stage of triode Q3;Resistance R31
One termination triode Q2 emitter, it is another termination electrolytic capacitor C16 anode;A termination electrolytic capacitor C16 of resistance R32
Anode, the other end ground connection;The cathode of electrolytic capacitor C16 is grounded;A termination+12V power supply of resistance R33, three poles of another termination
The base stage of pipe Q3;The base stage of one termination triode Q3 of resistance R34, other end ground connection;A termination+12V power supply of resistance R35,
The collector of another termination triode Q3;The emitter of a termination triode Q3 of resistance R36, other end ground connection;Electrolytic capacitor
The anode of C18 connects the emitter of triode Q3, cathode ground connection;The anode of electrolytic capacitor C19 connects the collector of triode Q3, cathode
Connect one end of thermistor Rt1;The emitter of another termination triode Q2 of thermistor Rt1;Electrolytic capacitor C20 anode connects three
The collector of pole pipe Q3, cathode connect the pin 2 of chip U15;The pin 3 of a chip termination U15 of capacitor C21, another termination core
The pin 2 of piece U16;The pin 2 of a chip termination U16 of capacitor C22, other end ground connection;The anode of electrolytic capacitor C23 connects chip
The pin 2 of U16, cathode connect the base stage of triode Q2;The pin 5 of a chip termination U15 of capacitor C24, other end ground connection;Capacitor
The pin 5 of a chip termination U16 of C25, other end ground connection;The pin 1 and pin 10 of chip U15 connects+5V power supply, 4 He of pin
Pin 6 is grounded;One end of 9 connecting resistance R37 of pin, one end of 8 connecting resistance R38 of pin, one end of 7 connecting resistance R39 of pin;Resistance
An input port of the other end of R37 as controllable frequency source (19), is denoted as port SineM_in1;The other end of resistance R38
As another input port of controllable frequency source (19), it is denoted as port SineM_in2;Port SineM_in1 and port
SineM_in2 is connected with the input terminal of single-chip microcontroller 16;Another termination+5V power supply of resistance R39;The pin 1 and pin of chip U10
10 connect+5V power supply, and pin 4 and pin 6 are grounded;One end of 9 connecting resistance R40 of pin, one end of 8 connecting resistance R41 of pin, pin 7
One end of connecting resistance R42;Another termination port SineM_in1 of resistance R40;Another termination port SineM_ of resistance R41
in2;Another termination+5V power supply of resistance R42;Output port of the cathode of electrolytic capacitor C18 as controllable frequency source (19), note
For SineM_out.
2. a kind of microstress sensor based on phase bit comparison according to claim 1, which is characterized in that the pumping
Source (1) is 980nm laser light source.
3. a kind of microstress sensor based on phase bit comparison according to claim 1 or 2, which is characterized in that described
Temperature sensor (15) is DS18B20 digital temperature sensor.
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