CN109227973A - A kind of compound ultrahigh hardness saw blade of aluminium base diamond and its manufacturing method - Google Patents

A kind of compound ultrahigh hardness saw blade of aluminium base diamond and its manufacturing method Download PDF

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CN109227973A
CN109227973A CN201810948625.9A CN201810948625A CN109227973A CN 109227973 A CN109227973 A CN 109227973A CN 201810948625 A CN201810948625 A CN 201810948625A CN 109227973 A CN109227973 A CN 109227973A
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skeleton
parts
alloy composite
saw blade
toughness
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CN109227973B (en
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杨燕军
熊朝阳
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    • B28—WORKING CEMENT, CLAY, OR STONE
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    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
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    • C23C4/06—Metallic material
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    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/129—Flame spraying
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    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
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    • C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
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Abstract

The invention discloses a kind of compound ultrahigh hardness saw blade of aluminium base diamond and its manufacturing method, which includes three toughness pottery skeleton, Al alloy composite, diamond blade film layer parts；Wherein toughness pottery skeleton is specially to dredge hole ceramic skeleton by the toughening of silicon nitride ceramic body complex silicon carbide whisker；Al alloy composite be specially after the mixed end mixing carbon dust of 7A75 aluminium alloy, polyvinyl alcohol double sintering form；The Al alloy composite is wrapped in toughness pottery skeleton, and diamond blade film layer is fixed on Al alloy composite surface.Surface hardness height of the present invention, good core toughness, cracking resistance, high temperature resistant, perfect heat-dissipating, excellent cutting performance, long service life.

Description

A kind of compound ultrahigh hardness saw blade of aluminium base diamond and its manufacturing method
Technical field
The present invention relates to special material field more particularly to a kind of compound ultrahigh hardness saw blades of aluminium base diamond and its system Make method.
Background technique
Inner circle cutting technology is applied during silicon wafer slice process, which develops in later 1970s more It is mature.With the increase of silicon wafer diameter, required inner circle blade size increases in inner circle cutting technique, and blade tensile force is also corresponding Increase.The thickening of blade cutting edge simultaneously increases cutting loss, and high-speed cutting adds the damaging layer of silicon chip surface and cutter loss Greatly.These disadvantages improve efficiency inner circle cutting technology in large stretch of diameter direction, reduce production cost and are restricted.In addition when When inner circle cutter making on difficulty developed a kind of multi-wire saw (rear abbreviation wire cutting) again in the world in view of the situation Technical matters method.It is well known that with the increase of silicon wafer diameter, the shortcomings that inner circle cutting technology, makes the damage of silicon chip surface Layer increases (about 30~40 microns).Line cutting technology advantage is high-efficient (about 6-8 times of inner circle cutting technology.It is small 8 When or so can once cut out 400 disks or so in cutting process).Notch is small, and small (about inner circle cutting technology is lost in silicon rod notch 60%, this be equivalent to inside diameter slicer cut 6 disks and save out 1 piece of disk), the damaged layer on surface of silicon slice of cutting is shallower (about 10~15 microns), piece protonatomic mass human factor is few.
But line cutting technology has its apparent weakness compared with inner circle cutting technology, first is that piece thickness mean error is larger (about For 2 times of inner circle cutting technology).Second is that intelligent measurement control is not easy to realize in cutting process.Third is that the success rate of cutting process is wanted Ask higher, risk is big, once fracture of wire and when can not save, directly waste a monocrystal rod.Fourth is that can not achieve monolithic quality control System after the completion of primary cutting, could detect the cut quality of a collection of disk, and cut quality is not also identical between disk.? These aspects, inner circle cutting technology but show its superiority.It is in particular in: (1) it is high to be sliced precision.(2) it is sliced cost Low, the inside diameter slicer price of same specification grade is wire cutting machine price 1/3-1/4, and wire cutting machine also needs to configure dedicated sizing machine. (3) every all can adjust.(4) flexibly process that adjustability (5) is automatic, single chip mode handover operation when the processing of small lot more specifications Convenience.(6) inexpensive auxiliary material (wire cutting machine abrasive material and abrasive fluid will be replaced periodically).(7) it is lesser needed for different pieces are thick Adjustment time.(8) lesser adjustment time needed for different rod diameter.(9) it is convenient that knife, dress knife are repaired.Therefore it is used as mature technology technology Inner circle cutting technology do not lose its perch in ever-larger diameters developing direction, and with IC device sheet diameter Its technology is constantly brought forth new ideas simultaneously for development.
According to practical experience, it is believed that: the lesser production unit of production scale or multi items silicon wafer produce and have Fairly large production unit should consider to select inside diameter slicer first in lectotype selection.
Slicer in the prior art is due to its size and binding force, intensity and contradiction state is presented, currently on the market still There is no a kind of surface hardness height, good core toughness, cracking resistance, high temperature resistant, perfect heat-dissipating, excellent cutting performance, with long service life The slicer of cutting semiconductor.
Therefore it is badly in need of a kind of surface hardness height, good core toughness, cracking resistance, high temperature resistant, perfect heat-dissipating, machinability in the market It can good, with long service life fire-fighting ultrahigh hardness saw blade.
Summary of the invention
To solve drawbacks described above existing in the prior art, the present invention is intended to provide a kind of surface hardness is high, center toughness Good, cracking resistance, high temperature resistant, perfect heat-dissipating, excellent cutting performance, fire-fighting with long service life ultrahigh hardness saw blade.
In order to achieve the above-mentioned object of the invention, the invention adopts the following technical scheme: a kind of compound superelevation of aluminium base diamond is hard Saw blade is spent, which includes three toughness pottery skeleton, Al alloy composite, diamond blade film layer portions Point；Wherein toughness pottery skeleton is specially to dredge hole ceramic skeleton by the toughening of silicon nitride ceramic body complex silicon carbide whisker；Aluminium closes Metal/composite material be specially after the mixed end mixing carbon dust of 7A75 aluminium alloy, polyvinyl alcohol double sintering form；The aluminium alloy compound Material is wrapped in toughness pottery skeleton, and diamond blade film layer is fixed on Al alloy composite surface；
The manufacturing method of the ultrahigh hardness saw blade the following steps are included:
1) manufacture of toughness pottery skeleton
1. preparing 8 parts -10 parts of silicon carbide whisker, 50 part -60 of silicon nitride powder of 3 μm -5 μm of particle size in parts by weight Part, 1 part -1.5 parts of potassium fluoride powder, 3-5 parts of molybdenum silicide, 6 parts -8 parts of tetraethoxysilance, 3 parts -5 parts of dehydrated alcohol, pure water 3 - 5 parts, 1.5 parts -2.5 parts of thermoplastic phenolic resin of part；
2. being put into overall size and ultrahigh hardness saw blade outer dimension phase after 1. all materials that step obtains are mixed It adapts to, in the mold with 30mm-50mm spacing mesh, the mold is then placed in 800 DEG C -850 DEG C, vacuum degree 1 × 10- 3Pa-1×10-5In the environment of Pa, 5h-8h is kept the temperature, latticed precut blanks are obtained；
3. 2. latticed precut blanks that step is obtained are placed in the protective atmosphere of 2-3 times of atmospheric pressure, with 1000 DEG C with The upper heating rate for keeping 200 DEG C/h-250 DEG C/h is warming up to 1600 DEG C -1700 DEG C, soaking time 4h-7h；
4. after the completion of sintering, furnace cooling when furnace temperature T is not less than 1000 DEG C；Furnace temperature T is in 1000 DEG C half of 800 DEG C≤T < Blow-on door is cooling；800 DEG C of furnace temperature T < come out of the stove it is air-cooled, after being cooled to room temperature, that is, toughness pottery skeleton needed for obtaining；
2) manufacture of Al alloy composite
1. preparing enough 7A75 aluminum alloy micropowders, 10 parts -12 parts of carbon dust, 20 parts -25 parts of polyvinyl alcohol by weight；
2. by the stage 1) the toughness pottery skeleton that obtains is placed on rotary-tray, using supersonic velocity flame plating equipment, Using 7A75 aluminum alloy micropowder as raw material, in vacuum degree 1 × 10-1Pa-1×10-3Toughness pottery skeleton is carried out in the environment of Pa equal Spraying is homogenized, coating thickness 0.1mm-0.15mm obtains prefabricated center portion skeleton；
3. 2. prefabricated center portion skeleton that step is obtained is placed in the mold to match with ultrahigh hardness saw blade outer dimension In, keep prefabricated center portion skeleton and die space shape coaxial, and fill the 7A75 that completely 1. step prepares in mold remaining space The homogeneous mixture of aluminum alloy micropowder, carbon dust and polyvinyl alcohol is obtained to double sintering mold；
4. being placed in 700 DEG C -705 DEG C, vacuum degree 1 × 10 to double sintering mold for what 3. step obtained-2Pa-1×10- 3In the environment of Pa, 2h-3h is kept the temperature, secondary precut blanks are obtained；
5. the furnace cooling when furnace temperature T is not less than 500 DEG C of 4. secondary precut blanks that step is obtained；Furnace temperature T is in 500 DEG C≤200 DEG C of T < half-open fire doors coolings；200 DEG C of furnace temperature T < come out of the stove it is air-cooled, after being cooled to room temperature, that is, obtain needed for internal curing The Al alloy composite of flexible ceramic skeleton；
3) ultrahigh hardness saw blade manufactures
1. preparing to maintain 1 × 10-4Pa-1×10-5Pa vacuum degree, being passed through makees the argon gas that air pressure rises to 1Pa-10Pa in furnace Graphite for ionization medium, purity 99.99% is target, and target-cardinal distance is set as 75mm-80mm, and mid frequency sputtering power is 300W-320W, frequency range 30kHz-50kHz, duty ratio 80%, pulsed bias power supply are fixed on 100V, and frequency is 40kHz, duty ratio 80%, substrate temperature are room temperature, and deposition pressure is the magnetron sputtering apparatus of 0.50Pa；
2. by the stage 2) in obtain internal curing flexible ceramic skeleton Al alloy composite erect after along axle center Rotation, Al alloy composite of the magnetron sputtering apparatus for then step being used 1. to prepare to internal curing flexible ceramic skeleton Disc blade carries out magnetron sputtering, and after treatment, which is taken out, obtains required ultrahigh hardness saw blade.
Compared with prior art, by adopting the above-described technical solution, the invention has the following advantages that (1) is different from The prior art only passes through blade frame position corresponding with blade and the diamond dust and ceramic powder mixed is fixedly installed End is to mitigate the exposing degree of the blade between different size diamond particles, so that the cutting edge of diamond particles is in blade same level Line is consistent in exposing degree, while playing abrasive action, the stress of crystal itself generated when being cut is eliminated, to reach more The technical method of good cutting quality, the present invention directly adopt magnetron sputtering plating diamond-like on the matrix of high-mechanical property Film layer, according to the hardness of semiconductor, (monocrystalline silicon Mohs' hardness 6.5, is roughly equal to 980HV-1000HV；GaAs Knoop hardness 750, about Close 700HV-720HV；Germanium Mohs' hardness 6.5, is roughly equal to 800HV-820HV), select high-bond toughening material to carry out Surface hardened layer Processing, due to only blade locally sputter, have a wide range of application, applicability it is good.(2) according to cutting hardness matching, surface When hardness is used to cut the semiconductor material of integral hardness 700HV-1000HV not less than the present invention of 3500HV stock-removing efficiency it is high, Heat is low, it is not easy to lead to expensive semiconductor material burn and be damaged due to lattice transformation.(3) skeleton is using net after toughening (dredge hole is due to containing larger amount of tetraethoxysilance, dehydrated alcohol, pure water and thermoplastic in raw material to the thin hole ceramics formatted Property phenolic resin, generated naturally when being sintered under high vacuum environment), power is good for self-bonding, the anti-extrusion ability of stretch-proof is poor, has one Fixed impact resistance, in conjunction with the 7A75 aluminium alloy for investing surface by supersonic flame spraying under vacuum conditions, significantly The stress buffering depth of skeleton is increased, while providing leeway, therefore good core toughness, cracking resistance for the sliding of masterpiece used time. (4) all center portion materials are that high temperature sintering forms, therefore this quality high-temperature of the invention.(5) creatively in aluminium alloy compound Carbon dust and polyvinyl alcohol are added in material, are on the one hand considerably increased the self-bonding power of the invention of powder metallurgy, are improved punching It hits toughness and from cushion performance, on the other hand also considerably increases heat dissipation performance of the invention, therefore heat dissipation performance of the invention Thermal diffusivity not only than diamond in the art and ceramic powders composite material is high, or even than the thermal conductivity of most metals All high (matrix is aluminium alloy, and joined the carbon dust of higher proportion), therefore perfect heat-dissipating.(6) present invention breaches ceramics The prior art limitation of material and metal material binding force difference passes through the (metal active under vacuum of supersonic flame spraying under vacuum It is inherently high, but be high temperature semi-liquefied state be sprayed in thin hole pattern trellis ceramic network, binding force is excellent), and add poly- second Enol (the good organic material with ceramic junction resultant force), the knot of ceramics and metal is greatly strengthened using geometry and physical characteristic With joint efforts, the present invention is made to obtain high hardness and cutting ability further through in the self-growing differential arc oxidation of aluminum alloy surface, therefore Service performance is excellent.(7) have high support strength (ceramic skeleton), high center toughness, high surface hardness and cutting force, High self-bonding power under comprehensive function, makes that of the invention the service life is longer, reliability is higher.
Specific embodiment
Embodiment 1:
A kind of compound ultrahigh hardness saw blade of aluminium base diamond, which includes toughness pottery skeleton, aluminium Three alloy composite materials, diamond blade film layer parts；Wherein toughness pottery skeleton is specially by silicon nitride ceramics bluk recombination The toughening of silicon carbide whisker dredges hole ceramic skeleton；Al alloy composite is specially 7A75 aluminium alloy mixed end mixing carbon dust, poly- second Double sintering forms after enol；The Al alloy composite is wrapped in toughness pottery skeleton, and diamond blade film layer is fixed on Al alloy composite surface；
The manufacturing method of the ultrahigh hardness saw blade the following steps are included:
1) manufacture of toughness pottery skeleton
1. preparing silicon carbide whisker 80g, 3 μm -5 μm of particle size of silicon nitride powder 500g, potassium fluoride in parts by weight Powder 10g, molybdenum silicide 30g, tetraethoxysilance 60g, dehydrated alcohol 30g, pure water 30g, thermoplastic phenolic resin 15g；
2. being put into overall size and ultrahigh hardness saw blade outer dimension phase after 1. all materials that step obtains are mixed It adapts to, in the mold with 50mm spacing mesh, the mold is then placed in 800 DEG C, vacuum degree 1 × 10-3In the environment of Pa, protect Warm 5h obtains latticed precut blanks；
3. 2. latticed precut blanks that step is obtained are placed in the protective atmosphere of 2 times of atmospheric pressure, with 1000 DEG C or more The heating rate of 200 DEG C/h is kept to be warming up to 1600 DEG C, soaking time 4h；
4. after the completion of sintering, furnace cooling when furnace temperature T is not less than 1000 DEG C；Furnace temperature T is in 1000 DEG C half of 800 DEG C≤T < Blow-on door is cooling；800 DEG C of furnace temperature T < come out of the stove it is air-cooled, after being cooled to room temperature, that is, toughness pottery skeleton needed for obtaining；
2) manufacture of Al alloy composite
1. preparing enough 7A75 aluminum alloy micropowders, carbon dust 100g, polyvinyl alcohol 200g by weight；
2. by the stage 1) the toughness pottery skeleton that obtains is placed on rotary-tray, using supersonic velocity flame plating equipment, Using 7A75 aluminum alloy micropowder as raw material, in vacuum degree 1 × 10-1Homogenization spraying is carried out to toughness pottery skeleton in the environment of Pa, Coating thickness 0.1mm obtains prefabricated center portion skeleton；
3. 2. prefabricated center portion skeleton that step is obtained is placed in the mold to match with ultrahigh hardness saw blade outer dimension In, keep prefabricated center portion skeleton and die space shape coaxial, and fill the 7A75 that completely 1. step prepares in mold remaining space The homogeneous mixture of aluminum alloy micropowder, carbon dust and polyvinyl alcohol is obtained to double sintering mold；
4. being placed in 700 DEG C, vacuum degree 1 × 10 to double sintering mold for what 3. step obtained-2In the environment of Pa, heat preservation 2h obtains secondary precut blanks；
5. the furnace cooling when furnace temperature T is not less than 500 DEG C of 4. secondary precut blanks that step is obtained；Furnace temperature T is in 500 DEG C≤200 DEG C of T < half-open fire doors coolings；200 DEG C of furnace temperature T < come out of the stove it is air-cooled, after being cooled to room temperature, that is, obtain needed for internal curing The Al alloy composite of flexible ceramic skeleton；
3) ultrahigh hardness saw blade manufactures
1. preparing to maintain 1 × 10-4Pa-1×10-5Pa vacuum degree, being passed through makes air pressure in furnace rise to the argon gas of 1Pa as electricity From medium, the graphite of purity 99.99% is target, and target-cardinal distance is set as 75mm, and mid frequency sputtering power is 300W, frequency 30kHz, duty ratio 80%, pulsed bias power supply are fixed on 100V, frequency 40kHz, duty ratio 80%, and substrate temperature is Room temperature, deposition pressure are the magnetron sputtering apparatus of 0.50Pa；
2. by the stage 2) in obtain internal curing flexible ceramic skeleton Al alloy composite erect after along axle center Rotation, Al alloy composite of the magnetron sputtering apparatus for then step being used 1. to prepare to internal curing flexible ceramic skeleton Disc blade carries out magnetron sputtering, and after treatment, which is taken out, obtains required ultrahigh hardness saw blade.
According to the present embodiment produce ultrahigh hardness saw blade, surface hardness 3580HV, thermal conductivity 716W/ (mK), 0.2% yield strength 435MPa.
Embodiment 2
It is whole consistent with embodiment 1, it is in place of difference:
The manufacturing method of the ultrahigh hardness saw blade the following steps are included:
1) manufacture of toughness pottery skeleton
1. preparing silicon carbide whisker 100g, 3 μm -5 μm of particle size of silicon nitride powder 600g, potassium fluoride in parts by weight Powder 15g, molybdenum silicide 50g, tetraethoxysilance 80g, dehydrated alcohol 50g, pure water 50g, thermoplastic phenolic resin 25g；
2. being put into overall size and ultrahigh hardness saw blade outer dimension phase after 1. all materials that step obtains are mixed It adapts to, in the mold with 30mm spacing mesh, the mold is then placed in 850 DEG C, vacuum degree 1 × 10-5In the environment of Pa, protect Warm 8h obtains latticed precut blanks；
3. 2. latticed precut blanks that step is obtained are placed in the protective atmosphere of 3 times of atmospheric pressure, with 1000 DEG C or more The heating rate of 250 DEG C/h is kept to be warming up to 1700 DEG C, soaking time 7h；
2) manufacture of Al alloy composite
1. preparing enough 7A75 aluminum alloy micropowders, carbon dust 120g, polyvinyl alcohol 250g by weight；
2. by the stage 1) the toughness pottery skeleton that obtains is placed on rotary-tray, using supersonic velocity flame plating equipment, Using 7A75 aluminum alloy micropowder as raw material, in vacuum degree 1 × 10-3Homogenization spraying is carried out to toughness pottery skeleton in the environment of Pa, Coating thickness 0.15mm obtains prefabricated center portion skeleton；
4. being placed in 705 DEG C, vacuum degree 1 × 10 to double sintering mold for what 3. step obtained-3In the environment of Pa, heat preservation 3h obtains secondary precut blanks；
3) ultrahigh hardness saw blade manufactures
1. preparing to maintain 1 × 10-4Pa-1×10-5Pa vacuum degree, being passed through makes air pressure in furnace rise to the argon gas of 10Pa as electricity From medium, the graphite of purity 99.99% is target, and target-cardinal distance is set as 80mm, and mid frequency sputtering power is 320W, frequency 50kHz, duty ratio 80%, pulsed bias power supply are fixed on 100V, frequency 40kHz, duty ratio 80%, and substrate temperature is Room temperature, deposition pressure are the magnetron sputtering apparatus of 0.50Pa；
According to the present embodiment produce ultrahigh hardness saw blade, surface hardness 3740HV, thermal conductivity 706W/ (mK), 0.2% yield strength 447MPa.
The foregoing description of the disclosed embodiments, only for can be realized professional and technical personnel in the field or use this Invention.Various modifications to these embodiments will be readily apparent to those skilled in the art, institute herein The General Principle of definition can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, The present invention will not be limited to the embodiments shown herein, and is to fit to special with principles disclosed herein and novelty The consistent widest scope of point.

Claims (2)

1. a kind of manufacturing method of the compound ultrahigh hardness saw blade of aluminium base diamond, it is characterised in that the following steps are included:
1) manufacture of toughness pottery skeleton
1. in parts by weight prepare 8 parts -10 parts of silicon carbide whisker, 3 μm -5 μm of particle size 50 parts -60 parts of silicon nitride powder, 1 part -1.5 parts of potassium fluoride powder, 3-5 parts of molybdenum silicide, 6 parts -8 parts of tetraethoxysilance, 3 parts -5 parts of dehydrated alcohol, 3 part -5 of pure water Part, 1.5 parts -2.5 parts of thermoplastic phenolic resin；
2. be put into overall size after 1. all materials that step obtains are mixed and ultrahigh hardness saw blade outer dimension be adapted, In mold with 30mm-50mm spacing mesh, the mold is then placed in 800 DEG C -850 DEG C, vacuum degree 1 × 10-3Pa-1× 10-5In the environment of Pa, 5h-8h is kept the temperature, latticed precut blanks are obtained；
3. 2. latticed precut blanks that step is obtained are placed in the protective atmosphere of 2-3 times of atmospheric pressure, protected with 1000 DEG C or more The heating rate for holding 200 DEG C/h-250 DEG C/h is warming up to 1600 DEG C -1700 DEG C, soaking time 4h-7h；
4. after the completion of sintering, furnace cooling when furnace temperature T is not less than 1000 DEG C；Furnace temperature T is in 800 DEG C≤T <, 1000 DEG C of half blow-on Door is cooling；800 DEG C of furnace temperature T < come out of the stove it is air-cooled, after being cooled to room temperature, that is, toughness pottery skeleton needed for obtaining；
2) manufacture of Al alloy composite
1. preparing enough 7A75 aluminum alloy micropowders, 10 parts -12 parts of carbon dust, 20 parts -25 parts of polyvinyl alcohol by weight；
2. by the stage 1) the toughness pottery skeleton that obtains is placed on rotary-tray, using supersonic velocity flame plating equipment, with 7A75 aluminum alloy micropowder is raw material, in vacuum degree 1 × 10-1Pa-1×10-3Toughness pottery skeleton is carried out in the environment of Pa uniform Change spraying, coating thickness 0.1mm-0.15mm obtains prefabricated center portion skeleton；
3. 2. prefabricated center portion skeleton that step is obtained is placed in the mold to match with ultrahigh hardness saw blade outer dimension, make Prefabricated center portion skeleton and die space shape are coaxial, and the 7A75 aluminium alloy that completely 1. step prepares is filled in mold remaining space The homogeneous mixture of micro mist, carbon dust and polyvinyl alcohol is obtained to double sintering mold；
4. being placed in 700 DEG C -705 DEG C, vacuum degree 1 × 10 to double sintering mold for what 3. step obtained-2Pa-1×10-3The ring of Pa Under border, 2h-3h is kept the temperature, secondary precut blanks are obtained；
5. the furnace cooling when furnace temperature T is not less than 500 DEG C of 4. secondary precut blanks that step is obtained；Furnace temperature T be in 500 DEG C≤ 200 DEG C of T < half-open fire doors are cooling；200 DEG C of furnace temperature T < come out of the stove it is air-cooled, after being cooled to room temperature, that is, obtain needed for internal curing have it is tough The Al alloy composite of property ceramic skeleton；
3) ultrahigh hardness saw blade manufactures
1. preparing to maintain 1 × 10-4Pa-1×10-5Pa vacuum degree, being passed through makes air pressure in furnace rise to the argon gas of 1Pa-10Pa as electricity From medium, the graphite of purity 99.99% is target, and target-cardinal distance is set as 75mm-80mm, and mid frequency sputtering power is 300W- 320W, frequency range 30kHz-50kHz, duty ratio 80%, pulsed bias power supply are fixed on 100V, frequency 40kHz, duty Than being 80%, substrate temperature is room temperature, and deposition pressure is the magnetron sputtering apparatus of 0.50Pa；
2. by the stage 2) in obtain internal curing flexible ceramic skeleton Al alloy composite erect after along axle center rotate, Then Al alloy composite disc of the magnetron sputtering apparatus for using step 1. to prepare to internal curing flexible ceramic skeleton Blade carries out magnetron sputtering, and after treatment, which is taken out, obtains required ultrahigh hardness saw blade.
2. the ultrahigh hardness saw blade of the micro-arc oxidation process using the manufacture of claim 1 the method, it is characterised in that: this is super High rigidity saw blade includes three toughness pottery skeleton, Al alloy composite, diamond blade film layer parts；Wherein toughness is made pottery Porcelain body frame is specially to dredge hole ceramic skeleton by the toughening of silicon nitride ceramic body complex silicon carbide whisker；Al alloy composite is specific It is formed for double sintering after the mixed end mixing carbon dust of 7A75 aluminium alloy, polyvinyl alcohol；The Al alloy composite is wrapped in toughness Ceramic skeleton, diamond blade film layer are fixed on Al alloy composite surface.
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