CN109225742A - A kind of glue sprayer for semiconductor machining - Google Patents
A kind of glue sprayer for semiconductor machining Download PDFInfo
- Publication number
- CN109225742A CN109225742A CN201811127889.4A CN201811127889A CN109225742A CN 109225742 A CN109225742 A CN 109225742A CN 201811127889 A CN201811127889 A CN 201811127889A CN 109225742 A CN109225742 A CN 109225742A
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- Prior art keywords
- glue
- fixed
- glue spraying
- mounting plate
- slide bar
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B16/00—Spray booths
- B05B16/60—Ventilation arrangements specially adapted therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
- B05B13/025—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects or work being present in bulk
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
- B05B14/40—Arrangements for collecting, re-using or eliminating excess spraying material for use in spray booths
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B16/00—Spray booths
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
- B05B9/002—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour incorporating means for heating or cooling, e.g. the material to be sprayed
Landscapes
- Spray Control Apparatus (AREA)
- Nozzles (AREA)
Abstract
The invention belongs to semiconductor processing equipment field more particularly to a kind of glue sprayers for semiconductor machining.That the technical problem to be solved in the present invention is to provide a kind of glue sprayings is high-quality, glue spraying is uniform, glue spraying is stable, the dustless glue sprayer for semiconductor machining for carrying out glue spraying work.A kind of glue sprayer for semiconductor machining includes glue spraying case, sealing plate, first motor, first rotating shaft, Knucle-gear, the first mounting plate, the first slide bar and air exhauster；First mounting plate is fixed in glue spraying case, first mounting plate is equipped with first sliding groove, first slide bar is slidably connected with first sliding groove, rack gear is fixed in the first slide bar bottom end, first motor is fixed in glue spraying case, first rotating shaft is sequentially connected in first motor output end, and Knucle-gear is fixed in first rotating shaft, and Knucle-gear is engaged with rack.The present invention achievees the effect that glue spraying is high-quality, glue spraying is uniform, glue spraying is stable, dustless progress glue spraying work.
Description
Technical field
The invention belongs to semiconductor processing equipment field more particularly to a kind of glue sprayers for semiconductor machining.
Background technique
Photoetching is one of the important process method in semiconductor fabrication process, generally includes following steps: in semiconductor die
On piece forms photoresist layer；Selective exposure is carried out to the photoresist layer, and the photoetching after exposure is made by development step
Glue-line is further formed photoetching agent pattern, this step is also known as the patterning of photoresist layer；With the photoresist after the patterning
Layer is exposure mask, is performed etching to the semiconductor wafer；The photoresist layer is ashed after completing etching, by photoetching
Glue-line removal, and the generation type of photoresist layer can be spraying or spin coating, wherein when using spraying method, spray equipment
Photoresist is sprayed, is coated on wafer, forms photoresist layer in crystal column surface.
Chinese patent CN206046316U is directed to existing semiconductor machining glue-spraying device, and the degree of automation is low, work
Low efficiency, inconvenient for use prompt and mobile inconvenient problem, disclose a kind of efficient and convenient semiconductor machining glue-spraying device,
It can be fed to device automatically by setting belt conveyor, and the first drawing liquid pump that the first timing controller controls is arranged
Give glue spraying spray head automatically for glue simultaneously with the second drawing liquid pump of the second timing controller control, so that the degree of automation of device
Height, and work efficiency is high；Glue spraying spray head automatic lifting is driven by setting electric telescopic rod, it is convenient on belt conveyor
Semiconductor carries out glue spraying processing, electric telescopic rod is replaced original Pneumatic pressure power telescopic device, so that the high sensitivity of device
With it is easy to use；Lower end surrounding in support base is provided with four rolling, so that device movement is convenient；It is sprayed by setting
Glue spray head, and glue spraying spray head includes threaded connector, so that disassembly install convenient, and glue spraying spray head includes that many glue sprayings are small
Hole, so that the uniform mode of glue spraying, overcomes semiconductor machining glue-spraying device, the degree of automation is low, and working efficiency is low, uses
Inconvenient and mobile inconvenient problem, but due to lacking the heating device to glue, so that the mobility of glue is poor, thus
Lead to the stability, the quality of semiconductor glue spraying that reduce semiconductor spray amount, in addition, in the glue spraying for semiconductor, only
It is plane spraying, can not be uneven so as to cause glue spraying to concave-convex place's progress depth spraying of semiconductor, and not for semiconductor
It should be exposed in air and directly carry out glue spraying work, so that the dust in air is adhered on glue, so as to cause semiconductor spray
The quality of glue reduces.
To sum up, need to research and develop that a kind of glue spraying is high-quality, glue spraying is uniform, glue spraying is stable, dustless carries out glue spraying work at present
For the glue sprayer of semiconductor machining, to overcome semiconductor machining glue-spraying device there are glue sprayings of poor quality, spray in the prior art
The disadvantage that glue is uniform, glue spraying is stable.
Summary of the invention
The present invention in order to overcome in the prior art semiconductor machining glue-spraying device that there are glue sprayings is of poor quality, glue spraying uniformly,
The stable disadvantage of glue spraying, that the technical problem to be solved in the present invention is to provide a kind of glue sprayings is high-quality, glue spraying is uniform, glue spraying is stable,
The dustless glue sprayer for semiconductor machining for carrying out glue spraying work.
The present invention is reached by technological means in detail below:
A kind of glue sprayer for semiconductor machining includes glue spraying case, sealing plate, first motor, first rotating shaft, knuckle-tooth
Wheel, the first mounting plate, the first slide bar, fixture block, the first sliding block, the second mounting plate, fixed link, fixed plate, elastic component, second are slided
Bar, third mounting plate, the second sliding block, the first electronic reel, the first bracing wire, the second bracing wire, the second electronic reel, air hose,
Wind scoop, the first hose, glue pump, glue tank, the second hose, air blower, stretch cord, takes out sebific duct, rack gear and pumping at FE Glue Gun
Machine；First mounting plate is fixed in glue spraying case, and the first mounting plate is equipped with first sliding groove, and the first slide bar and first sliding groove sliding connect
It connects, rack gear is fixed in the first slide bar bottom end, and first motor is fixed in glue spraying case, and first rotating shaft is driven in first motor output end
Connection, Knucle-gear are fixed in first rotating shaft, and Knucle-gear is engaged with rack, and glue spraying case side is equipped with logical for rack gear movable first
Hole, the second mounting plate bottom are equipped with second sliding slot, and the first sliding block is fixed in the first top end of sliding rod, and the first sliding block and second sliding slot are sliding
Dynamic connection, second sliding slot inside are equipped with card hole, and fixture block is fixed in the first sliding block side, and fixture block and card hole inserting cooperate, Duo Gegu
Fixed pole is uniformly distributed at the top of the second mounting plate, and fixed plate is installed at the top of fixed link, and fixed plate is equipped with two third sliding slots, third
Sliding slot about fixed plate length direction central axes be symmetrical arranged, the second slide bar is slidably connected with third sliding slot, the second slide bar and
It is connected between third sliding slot by elastic component, the second slide bar is corresponding, and glue spraying case side is equipped with entrance, and entrance is located at first
Right above through-hole, sealing plate is articulated with glue spraying case side, and sealing plate is corresponding with first through hole, entrance, sealing plate and first
It is connected between slide bar by stretch cord, third mounting plate is fixed in glue spraying case, and third mounting plate is located above fixed plate, third
Mounting plate is equipped with the 4th sliding slot, and the second sliding block is slidably connected with the 4th sliding slot；First electronic reel is fixed in third mounting plate
Top one end, the second electronic reel are fixed in the other end at the top of third mounting plate；4th sliding slot be located at the first electronic reel,
Between second electronic reel；First bracing wire one end is fixed in the second sliding block side, the other end and the first electronic reel solderless wrapped connection；
Second bracing wire one end is fixed in the second sliding block side, the other end and the second electronic reel solderless wrapped connection；Air hose is fixed in the second sliding block
Front side；Wind scoop is fixed in air hose bottom end, and wind scoop is connected to air hose；Air hose is located at right above fixed plate, and FE Glue Gun is fixed in wind
In pipe, glue tank, glue pump, air blower are fixed in glue spraying box top；It takes out sebific duct one end to be connected to glue tank side lower end, separately
One end is connected to glue pumping glue end；Gum-injecting port is equipped at the top of glue tank, panel hinge is at the top of glue tank, baffle and gum-injecting port
Corresponding, glue spraying box top is equipped with the second through-hole, third through-hole；First hose one end is through the second through-hole and glue pump glue-extruding end
Connection, the other end are connected at the top of air hose with FE Glue Gun top；Second hose one end is exported through third through-hole and air blower
End connection, the other end are connected in air hose side；Air exhauster is fixed in glue spraying case side, is connected in air exhauster and glue spraying case.
It further, further include having the second shaft, spiral heating silk, the second motor and bearing block；Bearing block is embedded in glue
Tank side lower end, the second motor are fixed in glue tank side；Second roller end and bearing block are pivotally connected, and the second roller end is passed through
It wears bearing block and the second motor output end is sequentially connected；Spiral heating silk is fixed in the second shaft.
Further, fixed link top outer surface is equipped with external screw thread, and the fixed plate bottom is connected with screw-tightened
Device, transport screw fastener and external thread bolt connection.
It further, further include having cartridge filter and activated carbon net；It is connected between second hose and air blower by cartridge filter,
Multiple activated carbon nets are fixed in cartridge filter.
It further, further include having the first drawstring, the first hanging ring, the second drawstring and the second hanging ring；First hanging ring passes through the
One drawstring is fixed in glue spraying case inner top, is slidably connected in the first hose and the first hanging ring, and the second hanging ring is solid by the second drawstring
It is connected to glue spraying case inner top, is slidably connected in the second hose and the second hanging ring.
Further, it is also connected with temperature sensor at the top of the glue tank, temperature sensor senses element is installed on glue
In water pot.
It further, further include having the first nut, the second nut and bolt；First nut is fixed in glue tank side, the
Two nuts are fixed in baffle side, and the first nut is corresponding with the second nut, and bolt is bolted in the first nut, the second nut.
Further, glue spraying bottom portion is also equipped with universal wheel, and the universal wheel is also equipped with service brake.
Further, second slide bar side is also connected with rubber block, and two rubber blocks are corresponding.
It further, further include having strut and scraper；Scraper is fixed in the second shaft, scraper bottom end and glue by strut
Bottom connects in tank.
Compared with prior art, the invention has the following beneficial effects:
The present invention achievees the effect that glue spraying is high-quality, glue spraying is uniform, glue spraying is stable, dustless progress glue spraying work.
1, semiconductor is fixed by two second slide bars by the present invention, completes for semiconductor to be fixed in fixed plate with this
Sabot work, by starting the second motor, the second mounting plate is stretched out outside glue spraying case, in order to which semiconductor is fixed on
Sabot work in fixed plate, pulls sealing plate to seal entrance, first through hole by drawstring, so that the glue sprayer is close
Envelope state, in order to take a breath in glue spraying case, by air exhauster by glue spraying case air extract out so that glue spraying case at
For dust free room, in this way, achieving the effect that being capable of dustless progress glue spraying work.
2, the present invention is enabled wind to be first dusted to semiconductor surface by air hose, is avoided by starting air blower
The dust of semiconductor surface affects the quality of glue spraying, is extracted out glue in glue tank by glue pump, and passes through the first hose
It is conveyed to FE Glue Gun, glue spraying work is directly directly finally carried out to the semiconductor being fixed in fixed plate from FE Glue Gun, in glue spraying
Rifle to semiconductor carry out glue spraying during, since wind has constant air-flow, then for the surplus glue at semiconductor bumps into
Row removal, in this way, achieving the effect that glue spraying is high-quality, glue spraying is uniform, glue spraying is stable.
3, the present invention can be withdrawn the second bracing wire by the second electronic reel, and the first electronic reel is by the first bracing wire
It unclamps, then the second sliding block is able to drive air hose, FE Glue Gun to the movement of entrance direction, in order to the semiconductor in multiple fixed plates
Glue spraying work is carried out, so that multiple semiconductors are able to carry out glue spraying work, improves the efficiency of glue spraying work.
4, the present invention heats glue by spiral heating silk and improves semiconductor spray so that glue is more liquid
The stability of amount, the quality for improving semiconductor glue spraying, in order to further increase the mobility of glue, improve semiconductor glue spraying
Quality, can star the second motor, the second motor can drive the rotation of spiral heating silk by the second shaft, then spiral heating
Silk can carry out northern Shandong to glue, thus the quality for improving the mobility of glue, improving semiconductor glue spraying, and simultaneously, spiral
Heater strip can push glue to fast move to sebific duct is taken out, and prevent the blocking for taking out sebific duct.
5, the present invention is filtered wind by activated carbon net, prevents when wind is sent to the second hose by air blower
The semiconductor for carrying out glue spraying work is contaminated, and the quality of glue spraying is promoted with this.
Detailed description of the invention
Fig. 1 is the first schematic view of the front view of the invention.
Fig. 2 is the enlarged structure schematic diagram of A in Fig. 1 of the present invention.
Fig. 3 is second of schematic view of the front view of the invention.
Fig. 4 is the enlarged structure schematic diagram of B in Fig. 3 of the present invention.
The label in accompanying drawing is: 1- glue spraying case, 2- first through hole, 3- sealing plate, 4- entrance, 5- first motor, 6-
One shaft, 7- Knucle-gear, the first mounting plate of 8-, 9- first sliding groove, the first slide bar of 10-, 11- card hole, 12- fixture block, 13- first are sliding
Block, 14- second sliding slot, the second mounting plate of 15-, 16- fixed link, 17- external screw thread, 18- transport screw fastener, 19- fixed plate, 20-
Third sliding slot, 21- elastic component, the second slide bar of 22-, 23- third mounting plate, the 4th sliding slot of 24-, the second sliding block of 25-, 26- first
Electronic reel, the first bracing wire of 27-, the second bracing wire of 28-, the electronic reel of 29- second, 30- air hose, 31- wind scoop, 32- glue spraying
Rifle, the first hose of 33-, the second through-hole of 34-, 35- glue pump, 36- glue tank, the second hose of 37-, 38- third through-hole, 39- drum
Blower, 40- stretch cord, 41- cartridge filter, 42- activated carbon net, 43- rubber block, the second shaft of 44-, 45- spiral heating silk, 46-
Second motor, 47- bearing block, the first drawstring of 48-, the first hanging ring of 49-, the second hanging ring of 50-, the second drawstring of 51-, 52- temperature pass
Sensor, the first nut of 53-, the second nut of 54-, 55- bolt, 56- service brake, 57- universal wheel, 58- strut, 59- scraper, 101- take out
Sebific duct, 102- rack gear, 103- air exhauster, 104- gum-injecting port, 105- baffle.
Specific embodiment
The present invention is described further below in conjunction with attached drawing:
Embodiment
A kind of glue sprayer for semiconductor machining includes as shown in Figs 1-4 glue spraying case 1, sealing plate 3, first motor
5, first rotating shaft 6, Knucle-gear 7, the first mounting plate 8, the first slide bar 10, fixture block 12, the first sliding block 13, the second mounting plate 15, solid
Fixed pole 16, fixed plate 19, elastic component 21, the second slide bar 22, third mounting plate 23, the second sliding block 25, the first electronic reel 26,
First bracing wire 27, the second bracing wire 28, the second electronic reel 29, air hose 30, wind scoop 31, FE Glue Gun 32, the first hose 33, glue
Pump 35, the second hose 37, air blower 39, stretch cord 40, takes out sebific duct 101, rack gear 102 and air exhauster 103 at glue tank 36；First
Mounting plate 8 is fixed in glue spraying case 1, and the first mounting plate 8 is equipped with first sliding groove 9, and the first slide bar 10 connects with the sliding of first sliding groove 9
It connects, rack gear 102 is fixed in 10 bottom end of the first slide bar, and first motor 5 is fixed in glue spraying case 1, and first rotating shaft 6 is in first motor 5
Output end transmission connection, Knucle-gear 7 are fixed in first rotating shaft 6, and Knucle-gear 7 is engaged with rack gear 102, and 1 side of glue spraying case, which is equipped with, to be supplied
The movable first through hole 2 of rack gear 102,15 bottom of the second mounting plate are equipped with second sliding slot 14, and it is sliding that the first sliding block 13 is fixed in first
10 top of bar, the first sliding block 13 are slidably connected with second sliding slot 14, and card hole 11 is equipped on the inside of second sliding slot 14, and fixture block 12 is fixed in
First sliding block, 13 side, fixture block 12 and the inserting of card hole 11 cooperate, and multiple fixed links 16 are uniformly distributed in 15 top of the second mounting plate,
Fixed plate 19 is installed on 16 top of fixed link, and fixed plate 19 is equipped with two third sliding slots 20, and third sliding slot 20 is long about fixed plate 19
The central axes for spending direction are symmetrical arranged, and the second slide bar 22 is slidably connected with third sliding slot 20, the second slide bar 22 and third sliding slot 20
Between connected by elastic component 21, the second slide bar 22 is corresponding, and 1 side of glue spraying case is equipped with entrance 4, and entrance 4 is located at first
Right above through-hole 2, sealing plate 3 is articulated with 1 side of glue spraying case, and sealing plate 3 is corresponding with first through hole 2, entrance 4, sealing plate 3
It is connect between the first slide bar 10 by stretch cord 40, third mounting plate 23 is fixed in glue spraying case 1, and third mounting plate 23 is located at
19 top of fixed plate, third mounting plate 23 are equipped with the 4th sliding slot 24, and the second sliding block 25 is slidably connected with the 4th sliding slot 24；First electricity
Dynamic reel 26 is fixed in 23 top one end of third mounting plate, and it is another that the second electronic reel 29 is fixed in 23 top of third mounting plate
One end；4th sliding slot 24 is between the first electronic reel 26, the second electronic reel 29；First bracing wire, 27 one end is fixed in
Second sliding block, 25 side, the other end and the first electronic 26 solderless wrapped connection of reel；Second bracing wire, 28 one end is fixed in 25 side of the second sliding block
Portion, the other end and the second electronic 29 solderless wrapped connection of reel；Air hose 30 is fixed in 25 front side of the second sliding block；Wind scoop 31 is fixed in air hose 30
Bottom end, and wind scoop 31 is connected to air hose 30；Air hose 30 is located at right above fixed plate 19, and FE Glue Gun 32 is fixed in air hose 30, glue
Water pot 36, glue pump 35, air blower 39 are fixed in 1 top of glue spraying case；It takes out 101 one end of sebific duct and 36 side lower end of glue tank connects
Logical, the other end is taken out glue end with glue pump 35 and is connected to；Gum-injecting port 104 is equipped at the top of glue tank 36, baffle 105 is articulated with glue tank 36
Top, baffle 105 is corresponding with gum-injecting port 104, and the second through-hole 34, third through-hole 38 are equipped at the top of glue spraying case 1；First hose 33
One end is connected to through the second through-hole 34 with 35 glue-extruding end of glue pump, and the other end runs through 30 top of air hose and connects at the top of FE Glue Gun 32
It is logical；Second hose, 37 one end is connected to through third through-hole 38 with 39 output end of air blower, and the other end is connected in 30 side of air hose；It takes out
Mechanism of qi 103 is fixed in 1 side of glue spraying case, is connected in air exhauster 103 and glue spraying case 1.
When needing the glue sprayer to carry out spraying photoresist layer to semiconductor, firstly, starting first motor 5, the first electricity
Machine 5 can be rotated by the electronic Knucle-gear 7 of first rotating shaft 6, and since Knucle-gear 7 is engaged with rack gear 102, then rack gear 102 can be with
The rotation of Knucle-gear 7 and move, i.e. rack gear 102 can be mobile to 2 direction of first through hole, and then rack gear 102 can pass through first
Slide bar 10, the first sliding block 13 drive the second mounting plate 15 mobile to 4 direction of entrance, so that stretch cord 40 is not pulling sealing plate
3, i.e. sealing plate 3 is directly opened under the promotion of rack gear 102, until the second mounting plate 15 stretches out outside glue spraying case 1, stretches out glue spraying case
After 1 is outer, at this point it is possible to the second mounting plate 15 be pulled, so that fixture block 12 is separated with card hole 11, until the fully extended spray of fixed plate 19
Outside glue case 1, after the fully extended glue spraying case 1 of fixed plate 19 is outer, two second slide bars 22 opening is not put, and be immediately put into semiconductor
Between two second slide bars 22, at this point, unclamping the second slide bar 22, the second slide bar 22 mutually leans under the elastic force effect of elastic component 21
Holding together, i.e., the second slide bar 22 clamps semiconductor, it so completes for semiconductor to be fixed on the work of the sabot in fixed plate 19, in order to
The subsequent glue spraying work of semiconductor.
It completes after semiconductor to be fixed on to the work of the sabot in fixed plate 19, the second mounting plate 15 is pushed, so that fixture block 12
It is inserted into card hole 11, and is again started up first motor 5, so that rack gear 102 retracts in glue spraying case 1, that is, is fixed in fixed plate 19
Semiconductor is able to enter in glue spraying case 1, meanwhile, drawstring can pull sealing plate 3 to seal entrance 4, first through hole 2, so that
The glue sprayer is sealing state, in order to take a breath in glue spraying case 1；After above-mentioned semiconductor enters glue spraying case 1, starting is taken out
Mechanism of qi 103, air exhauster 103 can extract the air in glue spraying case 1 out, so that glue spraying case 1 becomes dust free room, in this way, reaching
To the effect for capableing of dustless progress glue spraying work.
In glue spraying case 1 after ventilation, air exhauster 103 is closed, the glue spraying work for influencing semiconductor is avoided, closes pumping
After machine 103, baffle 105 can be opened, at this point it is possible to photoresist is injected in glue tank 36 by gum-injecting port 104, after filling,
It is closed by baffle 105, avoids sundries from falling into glue tank 36 by gum-injecting port 104, to influence the glue spraying quality of semiconductor.
Into glue tank 36 after injecting glue, at this point, starting glue pump 35, glue pump 35 can be incited somebody to action by taking out sebific duct 101
Glue extraction in glue tank 36, and conveyed by the first hose 33 to FE Glue Gun 32, then from FE Glue Gun 32 to being fixed on fixation
Semiconductor on plate 19 carries out glue spraying work, crosses Cheng Qian at this, and air blower 39 first starts, first air blower 39 can output wind,
And conveyed by the second hose 37 to air hose 30, at this point, wind can be dusted to semiconductor surface, avoid semiconductor surface
Dust affects the quality of glue spraying, and wherein wind scoop 31 is capable of increasing the flow of wind, and carries out glue spraying to semiconductor in FE Glue Gun 32
During, since wind has constant air-flow, then the surplus glue at semiconductor bumps is removed, in this way, reaching spray
The effect that glue is high-quality, glue spraying is uniform, glue spraying is stable.
In above process, the second electronic reel 29 can withdraw the second bracing wire 28, and the first electronic reel 26 will
First bracing wire 27 is unclamped, then the second sliding block 25 is able to drive air hose 30, FE Glue Gun 32 to the movement of 4 direction of entrance, in order to more
Semiconductor in a fixed plate 19 carries out glue spraying work, so that multiple semiconductors are able to carry out glue spraying work, improves glue spraying work
The efficiency of work after glue spraying works, starts the first electronic reel 26, the second electronic reel 29, so that the second sliding block 25
It can reset, and close glue pump 35, air blower 39, in order to which the glue spraying of the glue sprayer next time works.
Wherein, as shown in figure 4, further including having the second shaft 44, spiral heating silk 45, the second motor 46 and bearing block 47；
Bearing block 47 is embedded in 36 side lower end of glue tank, and the second motor 46 is fixed in 36 side of glue tank；Second shaft, 44 end and axis
The pivot joint of seat 47 is held, and 44 end of the second shaft is sequentially connected through bearing block 47 and 46 output end of the second motor；Spiral heating silk
45 are fixed in the second shaft 44.
Start spiral heating silk 45, spiral heating silk 45 can heat glue, so that glue is more liquid, improve
The stability of semiconductor spray amount, the quality for improving semiconductor glue spraying, in order to further increase the mobility of glue, improve
The quality of semiconductor glue spraying, can star the second motor 46, and the second motor 46 can drive spiral heating by the second shaft 44
Silk 45 rotates, then spiral heating silk 45 can carry out northern Shandong to glue, to improve the mobility of glue, improve semiconductor spray
The quality of glue, and simultaneously, spiral heating silk 45 can push glue to fast move to sebific duct 101 is taken out, and prevent from taking out the stifled of sebific duct 101
Plug.
Wherein, for the ease of fixed plate 19 is removed cleaned, frictioning processing, referring to shown in Fig. 2, the fixed link 16
Top outer surface is equipped with external screw thread 17, and 19 bottom of fixed plate is connected with transport screw fastener 18, transport screw fastener 18 and outer spiral shell
Line 17 is spirally connected.
Wherein, as shown in figure 3, further including having cartridge filter 41 and activated carbon net 42；Between second hose 37 and air blower 39
It is connected by cartridge filter 41, multiple activated carbon nets 42 are fixed in cartridge filter 41.
When wind is sent to the second hose 37 by air blower 39, activated carbon net 42 can be filtered wind, prevent into
The semiconductor of row glue spraying work is contaminated, and the quality of glue spraying is promoted with this.
Wherein, the first hose 33, the second hose 37 are mutually wound in moving process in order to prevent, referring to shown in Fig. 3, also
It include the first drawstring 48, the first hanging ring 49, the second drawstring 51 and the second hanging ring 50；First hanging ring 49 is solid by the first drawstring 48
It is connected to 1 inner top of glue spraying case, is slidably connected in the first hose 33 and the first hanging ring 49, the second hanging ring 50 is solid by the second drawstring 51
It is connected to 1 inner top of glue spraying case, is slidably connected in the second hose 37 and the second hanging ring 50.
Wherein, for the ease of the temperature in real time monitoring glue tank 36, avoid temperature in glue tank 36 excessively high with this, thus
So that the case where glue fails, referring to shown in Fig. 3,36 top of glue tank is also connected with temperature sensor 52, temperature sensing
52 sensing element of device is installed in glue tank 36.
Wherein, baffle 105 automatically opens in order to prevent, further includes having the first nut 53, the second nut referring to shown in Fig. 3
54 and bolt 55；First nut 53 is fixed in 36 side of glue tank, and the second nut 54 is fixed in 105 side of baffle, the first nut
53 is corresponding with the second nut 54, and bolt 55 is bolted in the first nut 53, the second nut 54.
It needs to fix on baffle 105 and lock, by 55 precession the first nut 53 of bolt, the second nut 54；It needs to keep off
Plate 105 is opened, and then bolt 55 is selected from the first nut 53, the second nut 54.
Wherein, for the ease of the movement and positioning of the glue sprayer, referring to shown in Fig. 3,1 bottom of glue spraying case is also installed
There is universal wheel 57, the universal wheel 57 is also equipped with service brake 56.
Wherein, semiconductor is clamped between two second slide bars 22 in order to prevent to cause to damage, and avoid semiconductor sliding from second
It is split away off between bar 22, referring to shown in Fig. 2,22 side of the second slide bar is also connected with rubber block 43, two rubber blocks, 43 phase
It is corresponding.
Wherein, as shown in figure 4, further including having strut 58 and scraper 59；Scraper 59 is fixed in the second shaft by strut 58
44,59 bottom end of scraper is connected with bottom in glue tank 36.
The starting of second motor 46, the second motor 46 can drive the rotation of strut 58 and 59 turns of scraper by the second shaft 44
It is dynamic, since bottom connects in 59 bottom end of scraper and glue tank 36, i.e., when each scraper 59 passes through bottom in glue tank 36, energy
The enough glue for adhering to bottom in glue tank 36 scrapes, to avoid the waste of resource.
Control mode of the invention is controlled by manually starting and turning off the switch, the wiring diagram and power supply of dynamical element
Offer belong to the common knowledge of this field, and the present invention is mainly used to protect mechanical device, so the present invention is no longer detailed
Explain control mode and wiring arrangement.
Using technical solution of the present invention or those skilled in the art under the inspiration of technical solution of the present invention, if
Similar technical solution is counted out, and reaches above-mentioned technical effect, is to fall into protection scope of the present invention.
Claims (10)
1. a kind of glue sprayer for semiconductor machining includes glue spraying case (1), sealing plate (3) and first motor (5), spy
Sign is, further includes having first rotating shaft (6), Knucle-gear (7), the first mounting plate (8), the first slide bar (10), fixture block (12), first
Sliding block (13), the second mounting plate (15), fixed link (16), fixed plate (19), elastic component (21), the second slide bar (22), third peace
Loading board (23), the second sliding block (25), the first electronic reel (26), the first bracing wire (27), the second bracing wire (28), second it is electronic around
Line wheel (29), air hose (30), wind scoop (31), FE Glue Gun (32), the first hose (33), glue pump (35), glue tank (36), second
Hose (37), stretch cord (40), takes out sebific duct (101), rack gear (102) and air exhauster (103) at air blower (39)；First mounting plate
(8) it is fixed in glue spraying case (1), the first mounting plate (8) is equipped with first sliding groove (9), and the first slide bar (10) and first sliding groove (9) are sliding
Dynamic connection, rack gear (102) are fixed in the first slide bar (10) bottom end, and first motor (5) is fixed in glue spraying case (1), first rotating shaft
(6) it is sequentially connected in first motor (5) output end, Knucle-gear (7) is fixed in first rotating shaft (6), Knucle-gear (7) and rack gear
(102) it engages, glue spraying case (1) side is equipped with for rack gear (102) movable first through hole (2), and the second mounting plate (15) bottom is set
Have second sliding slot (14), the first sliding block (13) is fixed in the first slide bar (10) top, the first sliding block (13) and second sliding slot (14)
It is slidably connected, is equipped with card hole (11) on the inside of second sliding slot (14), fixture block (12) is fixed in the first sliding block (13) side, fixture block (12)
It inserts and cooperates with card hole (11), multiple fixed links (16) are uniformly distributed at the top of the second mounting plate (15), fixed plate (19) installation
At the top of fixed link (16), fixed plate (19) is equipped with two third sliding slots (20), and third sliding slot (20) is about fixed plate (19) length
The central axes in direction are symmetrical arranged, and the second slide bar (22) is slidably connected with third sliding slot (20), and the second slide bar (22) and third are sliding
It is connected between slot (20) by elastic component (21), the second slide bar (22) is corresponding, and glue spraying case (1) side is equipped with entrance (4), out
Entrance (4) is located at right above first through hole (2), and sealing plate (3) is articulated with glue spraying case (1) side, sealing plate (3) and first through hole
(2), entrance (4) is corresponding, is connect between sealing plate (3) and the first slide bar (10) by stretch cord (40), third mounting plate
(23) it is fixed in glue spraying case (1), third mounting plate (23) is located above fixed plate (19), and third mounting plate (23) is equipped with the 4th
Sliding slot (24), the second sliding block (25) are slidably connected with the 4th sliding slot (24)；First electronic reel (26) is fixed in third installation
One end at the top of plate (23), the second electronic reel (29) are fixed in the other end at the top of third mounting plate (23)；4th sliding slot (24)
Between the first electronic reel (26), the second electronic reel (29)；First bracing wire (27) one end is fixed in the second sliding block
(25) side, the other end and the first electronic reel (26) solderless wrapped connection；Second bracing wire (28) one end is fixed in the second sliding block (25) side
Portion, the other end and the second electronic reel (29) solderless wrapped connection；Air hose (30) is fixed on front side of the second sliding block (25)；Wind scoop (31) is affixed
In air hose (30) bottom end, and wind scoop (31) is connected to air hose (30)；Air hose (30) is located at right above fixed plate (19), FE Glue Gun
(32) it is fixed in air hose (30), glue tank (36), glue pump (35), air blower (39) are fixed at the top of glue spraying case (1)；It takes out
Sebific duct (101) one end is connected to glue tank (36) side lower end, and the other end is taken out glue end with glue pump (35) and is connected to；Glue tank (36)
Top is equipped with gum-injecting port (104), and baffle (105) is articulated at the top of glue tank (36), and baffle (105) and gum-injecting port (104) are opposite
It answers, the second through-hole (34), third through-hole (38) is equipped at the top of glue spraying case (1)；The second through-hole is run through in first hose (33) one end
(34) it is connected to glue pump (35) glue-extruding end, the other end is connected at the top of air hose (30) with FE Glue Gun (32) top；Second is soft
Pipe (37) one end is connected to through third through-hole (38) with air blower (39) output end, and the other end is connected in air hose (30) side；It takes out
Mechanism of qi (103) is fixed in glue spraying case (1) side, is connected in air exhauster (103) and glue spraying case (1).
2. a kind of glue sprayer for semiconductor machining according to claim 1, which is characterized in that further include having second turn
Axis (44), spiral heating silk (45), the second motor (46) and bearing block (47)；Bearing block (47) is embedded under glue tank (36) side
End, the second motor (46) are fixed in glue tank (36) side；Second shaft (44) end and bearing block (47) are pivotally connected, and second turn
Axis (44) end is sequentially connected through bearing block (47) and the second motor (46) output end；Spiral heating silk (45) is fixed in second
Shaft (44).
3. a kind of glue sprayer for semiconductor machining according to claim 2, which is characterized in that the fixed link (16)
Top outer surface is equipped with external screw thread (17), and fixed plate (19) bottom is connected with transport screw fastener (18), transport screw fastener
(18) it is spirally connected with external screw thread (17).
4. a kind of glue sprayer for semiconductor machining according to claim 3, which is characterized in that further include having cartridge filter
(41) and activated carbon net (42)；It is connect between second hose (37) and air blower (39) by cartridge filter (41), multiple activated carbon
Net (42) is fixed in cartridge filter (41).
5. a kind of glue sprayer for semiconductor machining according to claim 4, which is characterized in that further include having the first drawing
Rope (48), the first hanging ring (49), the second drawstring (51) and the second hanging ring (50)；First hanging ring (49) is solid by the first drawstring (48)
It is connected to glue spraying case (1) inner top, is slidably connected in the first hose (33) and the first hanging ring (49), the second hanging ring (50) passes through second
Drawstring (51) is fixed in glue spraying case (1) inner top, is slidably connected in the second hose (37) and the second hanging ring (50).
6. a kind of glue sprayer for semiconductor machining according to claim 5, which is characterized in that the glue tank (36)
Top is also connected with temperature sensor (52), and temperature sensor (52) sensing element is installed in glue tank (36).
7. a kind of glue sprayer for semiconductor machining according to claim 6, which is characterized in that further include having the first spiral shell
Cap (53), the second nut (54) and bolt (55)；First nut (53) is fixed in glue tank (36) side, and the second nut (54) is solid
It is connected to baffle (105) side, the first nut (53) is corresponding with the second nut (54), and bolt (55) is bolted in the first nut
(53), the second nut (54).
8. a kind of glue sprayer for semiconductor machining according to claim 7, which is characterized in that the glue spraying case (1)
Bottom is also equipped with universal wheel (57), and the universal wheel (57) is also equipped with service brake (56).
9. a kind of glue sprayer for semiconductor machining according to claim 8, which is characterized in that second slide bar
(22) side is also connected with rubber block (43), and two rubber blocks (43) are corresponding.
10. a kind of glue sprayer for semiconductor machining according to claim 9, which is characterized in that further include having strut
(58) and scraper (59)；Scraper (59) is fixed in the second shaft (44) by strut (58), scraper (59) bottom end and glue tank
(36) interior bottom connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811127889.4A CN109225742B (en) | 2018-09-27 | 2018-09-27 | Glue sprayer for semiconductor processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811127889.4A CN109225742B (en) | 2018-09-27 | 2018-09-27 | Glue sprayer for semiconductor processing |
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| CN109225742A true CN109225742A (en) | 2019-01-18 |
| CN109225742B CN109225742B (en) | 2021-01-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811127889.4A Active CN109225742B (en) | 2018-09-27 | 2018-09-27 | Glue sprayer for semiconductor processing |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110433996A (en) * | 2019-08-12 | 2019-11-12 | 百隆智能家居有限公司 | A kind of timber frame paint spraying apparatus |
| CN110449296A (en) * | 2019-09-16 | 2019-11-15 | 河南省博思创伟电子科技有限公司 | Spray equipment is used in a kind of production of electronic product casing |
| CN110523577A (en) * | 2019-10-08 | 2019-12-03 | 重庆凰圆汽车饰件有限公司 | A kind of bumper spray-painting plant facilitating operation |
| CN110899025A (en) * | 2019-11-29 | 2020-03-24 | 烟台知兴知识产权咨询服务有限公司 | Automobile parts processingequipment |
| CN111483861A (en) * | 2020-05-27 | 2020-08-04 | 何寅峰 | Paper outlet device of printing mechanical processing equipment |
| CN111957489A (en) * | 2020-08-20 | 2020-11-20 | 清远市志豪兴工程玻璃有限公司 | Coating equipment for glass production line |
| CN112076936A (en) * | 2020-08-31 | 2020-12-15 | 衡阳迈特制动系统有限公司 | High-efficient rubber coating device of brake block |
| CN113289823A (en) * | 2021-06-10 | 2021-08-24 | 东台市苏宝电磁屏蔽设备有限公司 | Coating equipment with dust removal mechanism for machining electromagnetic shielding door |
| CN116169569A (en) * | 2022-12-28 | 2023-05-26 | 登高电气有限公司 | Waterproof structure of power distribution box |
| CN116532296A (en) * | 2023-07-06 | 2023-08-04 | 山东多旭新材料科技有限公司 | Coating device for processing nonmetallic mineral products |
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| CN111957489A (en) * | 2020-08-20 | 2020-11-20 | 清远市志豪兴工程玻璃有限公司 | Coating equipment for glass production line |
| CN112076936A (en) * | 2020-08-31 | 2020-12-15 | 衡阳迈特制动系统有限公司 | High-efficient rubber coating device of brake block |
| CN113289823A (en) * | 2021-06-10 | 2021-08-24 | 东台市苏宝电磁屏蔽设备有限公司 | Coating equipment with dust removal mechanism for machining electromagnetic shielding door |
| CN116169569A (en) * | 2022-12-28 | 2023-05-26 | 登高电气有限公司 | Waterproof structure of power distribution box |
| CN116169569B (en) * | 2022-12-28 | 2023-11-03 | 登高电气有限公司 | Waterproof structure of power distribution box |
| CN116532296A (en) * | 2023-07-06 | 2023-08-04 | 山东多旭新材料科技有限公司 | Coating device for processing nonmetallic mineral products |
| CN116532296B (en) * | 2023-07-06 | 2023-09-19 | 山东多旭新材料科技有限公司 | Coating device for processing nonmetallic mineral products |
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Effective date of registration: 20201210 Address after: 221100 north zone and 2nd floor, building A1, East Yinshan road and South Lijiang Road, Second Industrial Park, Xuzhou high tech Industrial Development Zone, Jiangsu Province Applicant after: Jiangsu aosilite Electronic Technology Co.,Ltd. Address before: No. 1387, Huaguan Road, Tianhe District, Nanhua yujingyuan, Tianhe District, Guangzhou City, Guangdong Province, 510000 Applicant before: Xu Qiujing |
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