CN109225742B - Glue sprayer for semiconductor processing - Google Patents
Glue sprayer for semiconductor processing Download PDFInfo
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- CN109225742B CN109225742B CN201811127889.4A CN201811127889A CN109225742B CN 109225742 B CN109225742 B CN 109225742B CN 201811127889 A CN201811127889 A CN 201811127889A CN 109225742 B CN109225742 B CN 109225742B
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- glue
- fixedly connected
- glue spraying
- sliding
- spraying box
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B16/00—Spray booths
- B05B16/60—Ventilation arrangements specially adapted therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
- B05B13/025—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects or work being present in bulk
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
- B05B14/40—Arrangements for collecting, re-using or eliminating excess spraying material for use in spray booths
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B16/00—Spray booths
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
- B05B9/002—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour incorporating means for heating or cooling, e.g. the material to be sprayed
Abstract
The invention belongs to the field of semiconductor processing equipment, and particularly relates to a glue sprayer for semiconductor processing. The invention aims to solve the technical problem of providing a glue sprayer for semiconductor processing, which has the advantages of good glue spraying quality, uniform glue spraying, stable glue spraying and dust-free glue spraying operation. A glue sprayer for semiconductor processing comprises a glue spraying box, a sealing plate, a first motor, a first rotating shaft, a circular gear, a first mounting plate, a first sliding rod and an air extractor; the first mounting plate is fixedly connected in the glue spraying box, the first mounting plate is provided with a first sliding chute, a first sliding rod is slidably connected with the first sliding chute, a rack is fixedly connected at the bottom end of the first sliding rod, a first motor is fixedly connected in the glue spraying box, a first rotating shaft is in transmission connection with the output end of the first motor, a circular gear is fixedly connected in the first rotating shaft, and the circular gear is meshed with the rack. The invention achieves the effects of good glue spraying quality, uniform glue spraying, stable glue spraying and dust-free glue spraying.
Description
Technical Field
The invention belongs to the field of semiconductor processing equipment, and particularly relates to a glue sprayer for semiconductor processing.
Background
Photolithography is one of the important process methods in semiconductor manufacturing processes, and generally includes the following steps: forming a photoresist layer on a semiconductor wafer; selectively exposing the photoresist layer, and further forming a photoresist pattern on the exposed photoresist layer through a developing step, which is also called as patterning of the photoresist layer; etching the semiconductor wafer by taking the patterned photoresist layer as a mask; and ashing the photoresist layer after the etching is finished to remove the photoresist layer, wherein the photoresist layer can be formed by spraying or spin coating, and when the spraying method is used, the spraying device sprays the photoresist to be coated on the wafer to form the photoresist layer on the surface of the wafer.
Chinese patent CN206046316U discloses a high-efficiency and convenient glue spraying device for semiconductor processing, which can automatically feed the device by arranging a belt conveyor and automatically feed glue to a glue spraying nozzle by arranging a first liquid pump controlled by a first timing controller and a second liquid pump controlled by a second timing controller, aiming at the problems of low automation degree, low working efficiency, inconvenient use and inconvenient movement of the existing glue spraying device for semiconductor processing, so that the automation degree of the device is high and the working efficiency is high; the electric telescopic rod is arranged to drive the glue spraying nozzle to automatically lift, so that glue spraying treatment can be conveniently carried out on a semiconductor on the belt conveyor, and the original pneumatic power telescopic device is replaced by the electric telescopic rod, so that the device is high in sensitivity and convenient to use; the four rollers are arranged on the periphery of the lower end of the supporting base, so that the device is convenient to move; spout gluey shower nozzle through the setting, and it includes threaded connection head to spout gluey shower nozzle, make it convenient to dismantle the installation, and it includes many gluey apertures to spout gluey shower nozzle to spout gluey, make spout gluey even mode, overcome semiconductor processing with spouting mucilage binding and putting, degree of automation is low, low work efficiency, use inconvenient and remove inconvenient problem, but owing to lack the heating device to glue, make the mobility of glue relatively poor, thereby lead to having reduced the stability that the semiconductor spouts the notes volume, the quality that the glue is spouted to the semiconductor, in addition, glue spouting to the semiconductor, only plane spraying, can't carry out the degree of depth spraying to the concave and convex department of semiconductor, thereby lead to spouting gluey inhomogeneous, and should not expose directly spout gluey work in the air to the semiconductor, make the dust adhesion in the air on gluey water, thereby lead to the semiconductor to spout gluey quality reduction.
In summary, the glue spraying machine for semiconductor processing, which is good in glue spraying quality, even in glue spraying, stable in glue spraying and free of dust in glue spraying, needs to be developed at present, so that the defects of poor glue spraying quality, even glue spraying and stable glue spraying of the glue spraying device for semiconductor processing in the prior art are overcome.
Disclosure of Invention
The invention aims to overcome the defects of poor glue spraying quality, uniform glue spraying and stable glue spraying of a glue spraying device for semiconductor processing in the prior art, and the technical problem to be solved by the invention is to provide a glue spraying machine for semiconductor processing, which has the advantages of good glue spraying quality, uniform glue spraying, stable glue spraying and dust-free glue spraying.
The invention is achieved by the following specific technical means:
a glue sprayer for semiconductor processing comprises a glue spraying box, a sealing plate, a first motor, a first rotating shaft, a circular gear, a first mounting plate, a first sliding rod, a clamping block, a first sliding block, a second mounting plate, a fixing rod, a fixing plate, an elastic part, a second sliding rod, a third mounting plate, a second sliding block, a first electric reel, a first pull wire, a second electric reel, an air pipe, an air hopper, a glue spraying gun, a first hose, a glue pump, a glue tank, a second hose, a blower, an elastic rope, a glue pumping pipe, a rack and an air pump; the first mounting plate is fixedly connected in the glue spraying box, the first mounting plate is provided with a first sliding chute, a first sliding rod is connected with the first sliding chute in a sliding manner, a rack is fixedly connected at the bottom end of the first sliding rod, a first motor is fixedly connected in the glue spraying box, a first rotating shaft is in transmission connection with the output end of the first motor, a circular gear is fixedly connected with a first rotating shaft, the circular gear is meshed with the rack, the side part of the glue spraying box is provided with a first through hole for the movement of the rack, the bottom part of the second mounting plate is provided with a second sliding chute, a first sliding block is fixedly connected at the top end of the first sliding rod, the first sliding block is in sliding connection with the second sliding chute, the inner side of the second sliding chute is provided with a clamping hole, a clamping block is fixedly connected at the side part of the first sliding block, the clamping block is in inserting fit with the clamping hole, a plurality of fixing rods are uniformly distributed at the top part of the second mounting, the second sliding rod is connected with the third sliding groove through an elastic piece, the second sliding rod corresponds to the second sliding rod, the side part of the glue spraying box is provided with an inlet and an outlet, the inlet and the outlet are positioned right above the first through hole, the sealing plate is hinged to the side part of the glue spraying box, the sealing plate corresponds to the first through hole and the inlet and the outlet, the sealing plate is connected with the first sliding rod through an elastic rope, the third mounting plate is fixedly connected into the glue spraying box and positioned above the fixing plate, the third mounting plate is provided with a fourth sliding groove, and the second sliding block is in sliding connection with the fourth; the first electric reel is fixedly connected to one end of the top of the third mounting plate, and the second electric reel is fixedly connected to the other end of the top of the third mounting plate; the fourth chute is positioned between the first electric reel and the second electric reel; one end of the first pull wire is fixedly connected to the side part of the second slide block, and the other end of the first pull wire is in winding connection with the first electric reel; one end of the second pull wire is fixedly connected to the side part of the second slide block, and the other end of the second pull wire is in winding connection with the second electric reel; the air pipe is fixedly connected to the front side of the second sliding block; the air hopper is fixedly connected to the bottom end of the air pipe and is communicated with the air pipe; the air pipe is positioned right above the fixed plate, the glue spraying gun is fixedly connected in the air pipe, and the glue tank, the glue pump and the air blower are fixedly connected to the top of the glue spraying tank; one end of the glue pumping pipe is communicated with the lower end of the side part of the glue tank, and the other end of the glue pumping pipe is communicated with the glue pumping end of the glue pump; the glue spraying box is characterized in that a glue injection port is formed in the top of the glue tank, a baffle is hinged to the top of the glue tank and corresponds to the glue injection port, and a second through hole and a third through hole are formed in the top of the glue spraying box; one end of the first hose penetrates through the second through hole to be communicated with the glue outlet end of the glue pump, and the other end of the first hose penetrates through the top of the air pipe to be communicated with the top of the glue spraying gun; one end of the second hose penetrates through the third through hole to be communicated with the output end of the air blower, and the other end of the second hose is communicated with the side part of the air pipe; the air pump is fixedly connected to the side part of the glue spraying box and communicated with the inside of the glue spraying box;
the device also comprises a second rotating shaft, a spiral heating wire, a second motor and a bearing seat; the bearing block is embedded at the lower end of the side part of the glue tank, and the second motor is fixedly connected to the side part of the glue tank; the end part of the second rotating shaft is pivoted with the bearing seat, penetrates through the bearing seat and is in transmission connection with the output end of the second motor; the spiral heating wire is fixedly connected to the second rotating shaft;
the outer surface of the top end of the fixed rod is provided with an external thread, the bottom of the fixed plate is fixedly connected with a spiral fastener, and the spiral fastener is in threaded connection with the external thread;
also comprises a filter cartridge and an active carbon net; the second hose is connected with the blower through a filter cartridge, and a plurality of activated carbon nets are fixedly connected in the filter cartridge;
the lifting device also comprises a first pull rope, a first lifting ring, a second pull rope and a second lifting ring; the first lifting ring is fixedly connected to the inner top of the glue spraying box through a first pull rope, the first hose is in sliding connection with the first lifting ring, the second lifting ring is fixedly connected to the inner top of the glue spraying box through a second pull rope, and the second hose is in sliding connection with the second lifting ring;
the top of the glue tank is also fixedly connected with a temperature sensor, and a temperature sensor sensing element is arranged in the glue tank;
the device also comprises a first nut, a second nut and a bolt; the first nut is fixedly connected to the side part of the glue tank, the second nut is fixedly connected to the side part of the baffle plate, the first nut corresponds to the second nut, and the bolt is in threaded connection with the first nut and the second nut;
the bottom of the glue spraying box is also provided with a universal wheel, and the universal wheel is also provided with a foot brake;
the side part of the second sliding rod is fixedly connected with a rubber block, and the two rubber blocks correspond to each other;
the utility model also comprises a support rod and a scraper; the scraper is fixedly connected to the second rotating shaft through a support rod, and the bottom end of the scraper is in contact connection with the bottom in the glue tank.
Compared with the prior art, the invention has the following beneficial effects:
the invention achieves the effects of good glue spraying quality, uniform glue spraying, stable glue spraying and dust-free glue spraying.
1. The invention fixes the semiconductor through the two second sliding rods, so as to complete the disc loading work of fixing the semiconductor on the fixed plate, the second mounting plate can extend out of the glue spraying box by starting the second motor, so as to facilitate the disc loading work of fixing the semiconductor on the fixed plate, the inlet, the outlet and the first through hole are sealed by pulling the sealing plate through the pull rope, so that the glue spraying machine is in a sealed state, so as to facilitate the ventilation in the glue spraying box, and the air in the glue spraying box is pumped out through the air pump, so that the glue spraying box becomes a dust-free chamber, and thus, the effect of dust-free glue spraying work is achieved.
2. According to the invention, the air blower is started, so that air can firstly remove dust on the surface of the semiconductor through the air pipe, the influence of dust on the surface of the semiconductor on glue spraying quality is avoided, glue in the glue tank is pumped out through the glue pump and is conveyed to the glue spraying gun through the first hose, finally, glue spraying work is directly carried out on the semiconductor fixed on the fixing plate through the glue spraying gun, and in the process of spraying glue on the semiconductor through the glue spraying gun, because the air has constant air flow, redundant glue on concave and convex parts of the semiconductor is removed, so that the effects of good glue spraying quality, uniform glue spraying and stable glue spraying are achieved.
3. According to the invention, the second pull wire can be retracted through the second electric reel, the first pull wire is loosened through the first electric reel, and the second sliding block can drive the air pipe and the glue gun to move towards the inlet and outlet direction, so that glue spraying work can be performed on the semiconductors on the plurality of fixing plates, the glue spraying work can be performed on the semiconductors, and the glue spraying work efficiency is improved.
4. According to the invention, glue is heated by the spiral heating wire, so that the flowability of the glue is stronger, the stability of the injection amount of the semiconductor is improved, and the glue injection quality of the semiconductor is improved.
5. According to the invention, when the air blower sends air to the second hose, the air is filtered through the activated carbon net, so that the semiconductor which is spraying glue is prevented from being polluted, and the glue spraying quality is improved.
Drawings
Fig. 1 is a first front view structure diagram of the present invention.
FIG. 2 is an enlarged view of A in FIG. 1 according to the present invention.
Fig. 3 is a second front view structure diagram of the present invention.
FIG. 4 is an enlarged view of B in FIG. 3 according to the present invention.
The labels in the figures are: 1-a glue-spraying box, 2-a first through hole, 3-a sealing plate, 4-an inlet, 5-a first motor, 6-a first rotating shaft, 7-a circular gear, 8-a first mounting plate, 9-a first sliding chute, 10-a first sliding bar, 11-a clamping hole, 12-a clamping block, 13-a first sliding block, 14-a second sliding chute, 15-a second mounting plate, 16-a fixing rod, 17-an external thread, 18-a screw fastener, 19-a fixing plate, 20-a third sliding chute, 21-an elastic member, 22-a second sliding bar, 23-a third mounting plate, 24-a fourth sliding chute, 25-a second sliding block, 26-a first electric reel, 27-a first pull wire, 28-a second pull wire, 29-a second electric reel, 30-air pipe, 31-air funnel, 32-glue gun, 33-first hose, 34-second through hole, 35-glue pump, 36-glue tank, 37-second hose, 38-third through hole, 39-blower, 40-elastic rope, 41-filter cylinder, 42-activated carbon net, 43-rubber block, 44-second rotating shaft, 45-spiral heating wire, 46-second motor, 47-bearing seat, 48-first pull rope, 49-first lifting ring, 50-second lifting ring, 51-second pull rope, 52-temperature sensor, 53-first nut, 54-second nut, 55-bolt, 56-foot brake, 57-universal wheel, 58-support rod, 59-scraper, 101-glue-pumping pipe, 102-rack, 103-air extractor, 104-glue injection port and 105-baffle.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
examples
A glue sprayer for semiconductor processing is disclosed, as shown in fig. 1-4, comprising a glue spraying box 1, a sealing plate 3, a first motor 5, a first rotating shaft 6, a circular gear 7, a first mounting plate 8, a first slide bar 10, a fixture block 12, a first slide block 13, a second mounting plate 15, a fixing rod 16, a fixing plate 19, an elastic part 21, a second slide bar 22, a third mounting plate 23, a second slide block 25, a first electric reel 26, a first stay wire 27, a second stay wire 28, a second electric reel 29, an air duct 30, an air funnel 31, a glue spraying gun 32, a first hose 33, a glue pump 35, a glue tank 36, a second hose 37, an air blower 39, an elastic rope 40, a glue extracting pipe 101, a rack 102 and an air extractor 103; the first mounting plate 8 is fixedly connected in the glue spraying box 1, the first mounting plate 8 is provided with a first chute 9, a first slide bar 10 is slidably connected with the first chute 9, a rack 102 is fixedly connected at the bottom end of the first slide bar 10, a first motor 5 is fixedly connected in the glue spraying box 1, a first rotating shaft 6 is in transmission connection with the output end of the first motor 5, a circular gear 7 is fixedly connected with the first rotating shaft 6, the circular gear 7 is meshed with the rack 102, the side part of the glue spraying box 1 is provided with a first through hole 2 for the movement of the rack 102, the bottom part of the second mounting plate 15 is provided with a second chute 14, a first slide block 13 is fixedly connected at the top end of the first slide bar 10, the first slide block 13 is slidably connected with the second chute 14, the inner side of the second chute 14 is provided with a clamping hole 11, a clamping block 12 is fixedly connected at the side part of the first slide block 13, the clamping block 12 is in inserted fit with the clamping, the fixed plate 19 is provided with two third sliding grooves 20, the third sliding grooves 20 are symmetrically arranged about a central axis of the fixed plate 19 in the length direction, a second sliding rod 22 is connected with the third sliding grooves 20 in a sliding mode, the second sliding rod 22 is connected with the third sliding grooves 20 through an elastic piece 21, the second sliding rod 22 corresponds to the third sliding grooves, the side portion of the glue spraying box 1 is provided with an inlet and outlet 4, the inlet and outlet 4 is located right above the first through hole 2, the sealing plate 3 is hinged to the side portion of the glue spraying box 1, the sealing plate 3 corresponds to the first through hole 2 and the inlet and outlet 4, the sealing plate 3 is connected with the first sliding rod 10 through an elastic rope 40, the third mounting plate 23 is fixedly connected into the glue spraying box 1, the third mounting plate 23 is located above the fixed plate 19, the third mounting plate 23 is provided with; the first electric reel 26 is fixedly connected with one end of the top of the third mounting plate 23, and the second electric reel 29 is fixedly connected with the other end of the top of the third mounting plate 23; the fourth chute 24 is located between the first electric reel 26 and the second electric reel 29; one end of the first pull wire 27 is fixedly connected to the side part of the second slider 25, and the other end is wound with the first electric reel 26; one end of a second pull wire 28 is fixedly connected to the side of the second slider 25, and the other end is wound around a second electric reel 29; the air pipe 30 is fixedly connected to the front side of the second slide block 25; the air scoop 31 is fixedly connected to the bottom end of the air pipe 30, and the air scoop 31 is communicated with the air pipe 30; the air pipe 30 is positioned right above the fixing plate 19, the glue spraying gun 32 is fixedly connected in the air pipe 30, and the glue tank 36, the glue pump 35 and the blower 39 are fixedly connected at the top of the glue spraying box 1; one end of the glue pumping pipe 101 is communicated with the lower end of the side part of the glue tank 36, and the other end is communicated with the glue pumping end of the glue pump 35; the top of the glue tank 36 is provided with a glue injection port 104, the baffle 105 is hinged to the top of the glue tank 36, the baffle 105 corresponds to the glue injection port 104, and the top of the glue spraying box 1 is provided with a second through hole 34 and a third through hole 38; one end of the first hose 33 penetrates through the second through hole 34 to be communicated with the glue outlet end of the glue pump 35, and the other end of the first hose penetrates through the top of the air pipe 30 to be communicated with the top of the glue spraying gun 32; one end of the second hose 37 penetrates through the third through hole 38 to be communicated with the output end of the blower 39, and the other end is communicated with the side part of the air pipe 30; the air pump 103 is fixedly connected to the side part of the glue spraying box 1, and the air pump 103 is communicated with the inside of the glue spraying box 1.
When the photoresist layer is required to be sprayed on a semiconductor by the photoresist sprayer, firstly, the first motor 5 is started, the first motor 5 can electrically drive the circular gear 7 to rotate through the first rotating shaft 6, and as the circular gear 7 is meshed with the rack 102, the rack 102 can move along with the rotation of the circular gear 7, namely, the rack 102 can move towards the first through hole 2, and further, the rack 102 can drive the second mounting plate 15 to move towards the gateway 4 through the first slide bar 10 and the first slide block 13, so that the elastic rope 40 does not pull the sealing plate 3, namely, the sealing plate 3 is directly opened under the pushing of the rack 102 until the second mounting plate 15 extends out of the photoresist sprayer 1 and extends out of the photoresist sprayer 1, at the moment, the second mounting plate 15 can be pulled to separate the fixture block 12 from the clamp hole 11 until the fixing plate 19 extends out of the photoresist sprayer 1 completely, and after the fixing plate 19 extends out of the photoresist sprayer 1 completely, the two second sliding rods 22 are unfolded and not placed, and the semiconductor is immediately placed between the two second sliding rods 22, at the moment, the second sliding rods 22 are loosened, the second sliding rods 22 are mutually closed under the action of the elastic force of the elastic piece 21, namely, the semiconductor is clamped by the second sliding rods 22, and thus the tray loading work of fixing the semiconductor on the fixing plate 19 is completed, and the subsequent glue spraying work of the semiconductor is facilitated.
After the tray loading work of fixing the semiconductor on the fixing plate 19 is finished, the second mounting plate 15 is pushed, the clamping block 12 is inserted into the clamping hole 11, the first motor 5 is started again, the rack 102 is retracted into the glue spraying box 1, namely, the semiconductor fixed on the fixing plate 19 can enter the glue spraying box 1, and meanwhile, the pull rope can pull the sealing plate 3 to seal the inlet and outlet 4 and the first through hole 2, so that the glue spraying machine is in a sealing state, and the air exchange is carried out in the glue spraying box 1; after the semiconductor enters the glue spraying box 1, the air extractor 103 is started, and the air extractor 103 can extract air in the glue spraying box 1, so that the glue spraying box 1 becomes a dust-free chamber, and the effect of dust-free glue spraying operation is achieved.
After the ventilation in the glue spraying box 1 is finished, the air extractor 103 is closed, the glue spraying work of the semiconductor is avoided being influenced, the baffle 105 can be opened after the air extractor 103 is closed, at the moment, the photoresist can be injected into the glue tank 36 through the glue injection port 104, after the photoresist is filled, the baffle 105 is closed, impurities are prevented from falling into the glue tank 36 through the glue injection port 104, and therefore the glue spraying quality of the semiconductor is influenced.
After glue is injected into the glue tank 36, at the moment, the glue pump 35 is started, the glue pump 35 can pump out the glue in the glue tank 36 through the glue pumping pipe 101, the glue is conveyed to the glue spraying gun 32 through the first hose 33, then glue spraying work is carried out on the semiconductor fixed on the fixing plate 19 through the glue spraying gun 32, before the glue spraying process, the air blower 39 is started firstly, the air blower 39 can generate air and convey the air to the air pipe 30 through the second hose 37, at the moment, the wind energy can remove dust on the surface of the semiconductor, the influence of dust on the surface of the semiconductor on the quality of glue spraying is avoided, the air hopper 31 can increase the flow of the wind, and in the glue spraying process of the glue spraying gun 32 on the semiconductor, because the wind has constant airflow, redundant glue at concave and convex positions of the semiconductor is removed, and therefore, the effects of good glue spraying quality, even glue spraying and stable glue spraying are achieved.
In the above process, the second electric reel 29 can withdraw the second stay 28, the first electric reel 26 loosens the first stay 27, then the second slider 25 can drive the air duct 30, the glue gun 32 moves towards the direction of the inlet and outlet 4, so that the semiconductors on the plurality of fixing plates 19 can spray glue, so that the plurality of semiconductors can spray glue, the efficiency of the glue spraying work is improved, after the glue spraying work is finished, the first electric reel 26 and the second electric reel 29 are started, the second slider 25 can be reset, the glue pump 35 and the air blower 39 are closed, so that the next glue spraying work of the glue sprayer is facilitated.
As shown in fig. 4, the device further includes a second rotating shaft 44, a spiral heating wire 45, a second motor 46 and a bearing seat 47; the bearing seat 47 is embedded in the lower end of the side part of the glue tank 36, and the second motor 46 is fixedly connected to the side part of the glue tank 36; the end of the second rotating shaft 44 is pivoted with the bearing seat 47, and the end of the second rotating shaft 44 penetrates through the bearing seat 47 and is in transmission connection with the output end of the second motor 46; the spiral heater wire 45 is fixed to the second rotating shaft 44.
Start spiral heating wire 45, spiral heating wire 45 can heat glue, make the mobility of glue stronger, the stability of the volume of spouting has been promoted to the semiconductor, the quality that the glue was spouted to the semiconductor has been improved, in order to further improve the mobility of glue, the quality that the glue was spouted to the semiconductor has been improved, second motor 46 can be started, second motor 46 can drive spiral heating wire 45 through second pivot 44 and rotate, then spiral heating wire 45 can glue the east to glue, thereby improve the mobility of glue, the quality that the glue was spouted to the semiconductor has been improved, and simultaneously, spiral heating wire 45 can promote glue to taking out gluey pipe 101 fast moving, prevent the jam of taking out gluey pipe 101.
In order to facilitate the fixing plate 19 to be removed for cleaning and glue scraping, referring to fig. 2, an external thread 17 is provided on an outer surface of a top end of the fixing rod 16, a spiral fastening device 18 is fixedly connected to a bottom of the fixing plate 19, and the spiral fastening device 18 is screwed with the external thread 17.
As shown in fig. 3, a filter cartridge 41 and an activated carbon net 42 are also included; the second hose 37 and the blower 39 are connected by a filter cartridge 41, and a plurality of activated carbon nets 42 are fixed in the filter cartridge 41.
When the blower 39 sends the air to the second hose 37, the activated carbon net 42 can filter the air, so that the semiconductor which is spraying glue is prevented from being polluted, and the glue spraying quality is improved.
In order to prevent the first hose 33 and the second hose 37 from being entangled with each other during the moving process, as shown in fig. 3, the device further includes a first pull rope 48, a first hanging ring 49, a second pull rope 51, and a second hanging ring 50; the first hanging ring 49 is fixedly connected to the inner top of the glue spraying box 1 through a first pull rope 48, the first hose 33 is slidably connected with the first hanging ring 49, the second hanging ring 50 is fixedly connected to the inner top of the glue spraying box 1 through a second pull rope 51, and the second hose 37 is slidably connected with the second hanging ring 50.
In order to facilitate real-time monitoring of the temperature inside the glue tank 36, so as to avoid the situation that the glue fails due to an excessively high temperature inside the glue tank 36, referring to fig. 3, a temperature sensor 52 is further fixedly connected to the top of the glue tank 36, and a sensing element of the temperature sensor 52 is installed inside the glue tank 36.
In order to prevent the shutter 105 from automatically opening, as shown in fig. 3, the shutter further includes a first nut 53, a second nut 54, and a bolt 55; the first nut 53 is fixed on the side of the glue tank 36, the second nut 54 is fixed on the side of the baffle 105, the first nut 53 corresponds to the second nut 54, and the bolt 55 is screwed on the first nut 53 and the second nut 54.
The baffle 105 needs to be fixed and locked, and the bolt 55 is screwed into the first nut 53 and the second nut 54; the shutter 105 is opened and the bolt 55 is selected from the first nut 53 and the second nut 54.
In order to facilitate the movement and positioning of the glue sprayer, referring to fig. 3, a universal wheel 57 is further mounted at the bottom of the glue spraying box 1, and a foot brake 56 is further mounted on the universal wheel 57.
In order to prevent the semiconductor from being clamped between the two second sliding bars 22 and damaged and to prevent the semiconductor from falling off from between the second sliding bars 22, referring to fig. 2, a rubber block 43 is further fixedly connected to a side portion of the second sliding bar 22, and the two rubber blocks 43 correspond to each other.
As shown in fig. 4, the utility model also comprises a support bar 58 and a scraper 59; the scraper 59 is fixedly connected to the second rotating shaft 44 through the supporting rod 58, and the bottom end of the scraper 59 is in contact connection with the bottom inside the glue tank 36.
The second motor 46 starts, and the second motor 46 can drive branch 58 through second pivot 44 and rotate, and scraper 59 rotates, because scraper 59 bottom contact is connected in bottom and the glue jar 36, when scraper 59 passes through the bottom in the glue jar 36 at every turn, can scrape the glue of bottom adhesion in the glue jar 36 and get to avoid the waste of resource.
The control mode of the invention is controlled by manually starting and closing the switch, the wiring diagram of the power element and the supply of the power source belong to the common knowledge in the field, and the invention is mainly used for protecting mechanical devices, so the control mode and the wiring arrangement are not explained in detail in the invention.
The technical solutions of the present invention or similar technical solutions designed by those skilled in the art based on the teachings of the technical solutions of the present invention are all within the scope of the present invention to achieve the above technical effects.
Claims (1)
1. The utility model provides a glue sprayer for semiconductor processing, including glue spraying box (1), closing plate (3) and first motor (5), its characterized in that, still including first pivot (6), round gear (7), first mounting panel (8), first slide bar (10), fixture block (12), first slider (13), second mounting panel (15), dead lever (16), fixed plate (19), elastic component (21), second slide bar (22), third mounting panel (23), second slider (25), first electronic reel (26), first acting as go-between (27), second act as go-between (28), electronic reel of second (29), tuber pipe (30), wind fill (31), glue spraying gun (32), first hose (33), glue pump (35), glue water jar (36), second hose (37), air-blower (39), elasticity rope (40), glue pumping pipe (101), A rack (102) and an air extractor (103); the first mounting plate (8) is fixedly connected in the glue spraying box (1), the first mounting plate (8) is provided with a first sliding groove (9), a first sliding rod (10) is connected with the first sliding groove (9) in a sliding manner, a rack (102) is fixedly connected at the bottom end of the first sliding rod (10), a first motor (5) is fixedly connected in the glue spraying box (1), a first rotating shaft (6) is connected at the output end of the first motor (5) in a transmission manner, a circular gear (7) is fixedly connected with the first rotating shaft (6), the circular gear (7) is meshed with the rack (102), the side part of the glue spraying box (1) is provided with a first through hole (2) for the movement of the rack (102), the bottom of the second mounting plate (15) is provided with a second sliding groove (14), a first sliding block (13) is fixedly connected at the top end of the first sliding rod (10), the first sliding block (13) is connected with the second sliding groove (14) in a sliding manner, the inner side part of the second sliding groove (14) is provided with a clamping hole, the clamping block (12) is matched with the clamping hole (11) in a plug-in manner, a plurality of fixing rods (16) are uniformly distributed at the top of the second mounting plate (15), the fixing plate (19) is mounted at the top of the fixing rod (16), the fixing plate (19) is provided with two third sliding chutes (20), the third sliding chutes (20) are symmetrically arranged about the central axis of the fixing plate (19) in the length direction, the second sliding rod (22) is in sliding connection with the third sliding chutes (20), the second sliding rod (22) is connected with the third sliding chutes (20) through elastic pieces (21), the second sliding rod (22) corresponds to each other, the side part of the glue spraying box (1) is provided with an inlet and an outlet (4), the inlet and the outlet (4) are positioned right above the first through hole (2), the sealing plate (3) is hinged to the side part of the glue spraying box (1), the sealing plate (3) corresponds to the first through hole (2) and the inlet and the outlet (4), the, the third mounting plate (23) is fixedly connected in the glue spraying box (1), the third mounting plate (23) is positioned above the fixing plate (19), the third mounting plate (23) is provided with a fourth sliding chute (24), and the second sliding block (25) is in sliding connection with the fourth sliding chute (24); the first electric reel (26) is fixedly connected to one end of the top of the third mounting plate (23), and the second electric reel (29) is fixedly connected to the other end of the top of the third mounting plate (23); the fourth chute (24) is positioned between the first electric reel (26) and the second electric reel (29); one end of a first pull wire (27) is fixedly connected to the side part of the second slide block (25), and the other end of the first pull wire is wound and connected with the first electric reel (26); one end of a second pull wire (28) is fixedly connected to the side part of the second slide block (25), and the other end of the second pull wire is in winding connection with a second electric reel (29); the air pipe (30) is fixedly connected to the front side of the second sliding block (25); the air hopper (31) is fixedly connected to the bottom end of the air pipe (30), and the air hopper (31) is communicated with the air pipe (30); the air pipe (30) is positioned right above the fixing plate (19), the glue spraying gun (32) is fixedly connected in the air pipe (30), and the glue tank (36), the glue pump (35) and the air blower (39) are fixedly connected at the top of the glue spraying box (1); one end of the glue pumping pipe (101) is communicated with the lower end of the side part of the glue tank (36), and the other end is communicated with the glue pumping end of the glue pump (35); the top of the glue tank (36) is provided with a glue injection port (104), the baffle plate (105) is hinged to the top of the glue tank (36), the baffle plate (105) corresponds to the glue injection port (104), and the top of the glue spraying box (1) is provided with a second through hole (34) and a third through hole (38); one end of the first hose (33) penetrates through the second through hole (34) to be communicated with the glue outlet end of the glue pump (35), and the other end of the first hose penetrates through the top of the air pipe (30) to be communicated with the top of the glue spraying gun (32); one end of the second hose (37) penetrates through the third through hole (38) to be communicated with the output end of the blower (39), and the other end of the second hose is communicated with the side part of the air pipe (30); the air pump (103) is fixedly connected to the side part of the glue spraying box (1), and the air pump (103) is communicated with the inside of the glue spraying box (1);
the device also comprises a second rotating shaft (44), a spiral heating wire (45), a second motor (46) and a bearing seat (47); the bearing seat (47) is embedded at the lower end of the side part of the glue tank (36), and the second motor (46) is fixedly connected with the side part of the glue tank (36); the end part of the second rotating shaft (44) is pivoted with the bearing seat (47), and the end part of the second rotating shaft (44) penetrates through the bearing seat (47) and is in transmission connection with the output end of a second motor (46); the spiral heating wire (45) is fixedly connected to the second rotating shaft (44);
the outer surface of the top end of the fixing rod (16) is provided with an external thread (17), the bottom of the fixing plate (19) is fixedly connected with a spiral fastener (18), and the spiral fastener (18) is in threaded connection with the external thread (17);
also comprises a filter cartridge (41) and an active carbon net (42); the second hose (37) is connected with the blower (39) through a filter cylinder (41), and a plurality of activated carbon nets (42) are fixedly connected in the filter cylinder (41);
the lifting device also comprises a first pull rope (48), a first lifting ring (49), a second pull rope (51) and a second lifting ring (50); the first lifting ring (49) is fixedly connected to the inner top of the glue spraying box (1) through a first pull rope (48), the first hose (33) is connected with the first lifting ring (49) in a sliding mode, the second lifting ring (50) is fixedly connected to the inner top of the glue spraying box (1) through a second pull rope (51), and the second hose (37) is connected with the second lifting ring (50) in a sliding mode;
the top of the glue tank (36) is also fixedly connected with a temperature sensor (52), and a sensing element of the temperature sensor (52) is arranged in the glue tank (36);
the device also comprises a first nut (53), a second nut (54) and a bolt (55); the first screw cap (53) is fixedly connected to the side part of the glue tank (36), the second screw cap (54) is fixedly connected to the side part of the baffle plate (105), the first screw cap (53) corresponds to the second screw cap (54), and the bolt (55) is in threaded connection with the first screw cap (53) and the second screw cap (54);
the bottom of the glue spraying box (1) is also provided with a universal wheel (57), and the universal wheel (57) is also provided with a foot brake (56);
the side part of the second sliding rod (22) is also fixedly connected with a rubber block (43), and the two rubber blocks (43) correspond to each other;
also comprises a support rod (58) and a scraper (59); the scraper (59) is fixedly connected to the second rotating shaft (44) through a support rod (58), and the bottom end of the scraper (59) is in contact connection with the bottom in the glue tank (36).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811127889.4A CN109225742B (en) | 2018-09-27 | 2018-09-27 | Glue sprayer for semiconductor processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811127889.4A CN109225742B (en) | 2018-09-27 | 2018-09-27 | Glue sprayer for semiconductor processing |
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| Publication Number | Publication Date |
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| CN109225742A CN109225742A (en) | 2019-01-18 |
| CN109225742B true CN109225742B (en) | 2021-01-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811127889.4A Active CN109225742B (en) | 2018-09-27 | 2018-09-27 | Glue sprayer for semiconductor processing |
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| CN109225742A (en) | 2019-01-18 |
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Effective date of registration: 20201210 Address after: 221100 north zone and 2nd floor, building A1, East Yinshan road and South Lijiang Road, Second Industrial Park, Xuzhou high tech Industrial Development Zone, Jiangsu Province Applicant after: Jiangsu aosilite Electronic Technology Co.,Ltd. Address before: No. 1387, Huaguan Road, Tianhe District, Nanhua yujingyuan, Tianhe District, Guangzhou City, Guangdong Province, 510000 Applicant before: Xu Qiujing |
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