CN109216141A - A kind of Ion Extraction system driving device - Google Patents
A kind of Ion Extraction system driving device Download PDFInfo
- Publication number
- CN109216141A CN109216141A CN201710560156.9A CN201710560156A CN109216141A CN 109216141 A CN109216141 A CN 109216141A CN 201710560156 A CN201710560156 A CN 201710560156A CN 109216141 A CN109216141 A CN 109216141A
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- CN
- China
- Prior art keywords
- axis
- module
- electrode
- motion module
- axis motion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/15—External mechanical adjustment of electron or ion optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/15—Means for deflecting or directing discharge
- H01J2237/1502—Mechanical adjustments
Abstract
The invention discloses a kind of Ion Extraction system driving devices, it include: X-axis motion module, Y-axis motion module, Z axis motion module, R axis motion module, vacuum sealing module, electrode module, the electrode module is made of extraction ground electrode, inhibition electrode, insulation porcelain knob etc., the device main function is that the electrode module in vacuum chamber is driven to do corresponding movement relative to ion source arc chamber end tab, improve the efficiency of transmission and quality of line, ideal line emission state is formed, becomes light path part later and plays one's part to the full.
Description
Technical field
The present invention relates to a kind of equipment for making semiconductor device, i.e. ion implantation apparatus, especially a kind of Ion Extraction system
Driving device belongs to field of semiconductor devices.
Background technique
With the raising of integrated circuit processing technique, to ion implantation device, more stringent requirements are proposed, ion implanting member
The type of element is more, and the application range of ion implantation device is wider, can be applied to a variety of materials modification, semiconductor devices manufacture
And the fields such as high power device such as SiC electronic device manufacture, and require ion implantation device the degree of automation higher, operation letter
Folk prescription just, the operation is stable.
Existing Ion Extraction driving device can realize the movement of X-axis, Y-axis, Z axis straight line, and sealing means are O-ring seal
Merge being isolated for work poor point pumping realization atmosphere and vacuum with U-shaped sealing group；Another Ion Extraction driving device X-axis, Z
Axis linear motion and R axis rotation, sealing means be welding bellows seal, the first draw driving device be adapted in equidistantly
Ion implantation apparatus from transmission, second of extraction driving device are adapted to the ion implantation apparatus of general long distance transmission.Due to
High energy implanters belong to the ion implantation apparatus of long distance transmission, and the rotation of R axis is thus more needed to adjust extraction electrode
Position, make reach target chamber line be in perfect condition.Due to being machined the presence with rigging error and drawing ion energy
The difference of amount, while tool can more perform to sharpest edges there are four shaft-driven ejector.Sealing means be O-ring seal and
The Ion Extraction driving device needs of U-shaped seal combination are periodically safeguarded, and replace obturator, this is to after ion implantation apparatus
The maintenance of phase is made troubles.
Summary of the invention
The technical problem to be solved by the present invention is in view of the shortcomings of the prior art, provide a kind of Ion Extraction system drive
Device, the Ion Extraction device can be realized four freedom degree movements of extraction electrode under conditions of guaranteeing fairly static sealing,
It moves vertically including the rotary motion of R axis, X to horizontal movement, Z-direction horizontal movement and Y-direction；Two X-axis, Y-axis motion module difference
Driving electrodes module does left and right relative to ion source arc chamber end tab and moves up and down, and Z axis motion module drives front-rear direction fortune
Dynamic, R axis motion module driving electrodes module is done around the horizontal center line of inhibition electrode inlet plane revolves clockwise or counterclockwise
Transhipment is dynamic.Integral layout is gantry frame type, and guarantee mass motion system in this way has high rigidity；Whole design uses modularization
Design, improves the feasibility and interchangeability of design；Whole design uses various machinery positionings, and the device is made to have the repetition of assembly
Property, make extraction electrode before and after maintenance with the same precision of movement of phase.
Three X-axis, Y-axis and Z axis motion modules are supported using rolling guide, and the high-accuracy screw rod of motor direct-drive is done directly
Line movement.The rotation support of R axis motion module is supported using the back-to-back angular contact ball bearing that is connected, and bearing fixed form is in pre-
Tight state, R axis realize rotary motion using motor driven gear pair, and this scheme is at low cost, kinematic accuracy is high, is convenient for peace
Dress maintenance.Vacuum sealing is equipped with L-type coupling spindle using welding wave sylphon seal, welding bellows center, moves mould for R axis
Block terminal couples with electrode module.
Compared with prior art, the advantageous effect of present invention is that: the present invention draw driving device have high rigidity,
It dismounts easy to maintain；And the Ion Extraction device can be realized extraction electrode four certainly under the conditions of guaranteeing good sealing property
It is moved by degree, including the rotary motion of R axis, X move vertically to horizontal movement, Z-direction horizontal movement and Y-direction.
Detailed description of the invention
Fig. 1 is present example overall structure diagram；
Fig. 2 is present example overall structure center section plan；；
Fig. 3 is present example R axis and X-axis cross-sectional view of the structure；
Specific embodiment
As shown in Figure 1, present example includes X-axis motion module 7, Y-axis motion module 8, Z axis motion module 6, R axis fortune
Dynamic model block 5, vacuum sealing module 3, electrode module 1 and portal frame 2 etc..
Portal frame 2 is general frame core skeleton, it is fixed relative to vacuum cavity and ion source 100, and it
It insulate between ion source 100, its structure will affect the layout of mass motion module.Z axis motion module 6 passes through rolling guide
It is installed together with portal frame 2, the relative motion between them is known as Z axis movement.Y-axis motion module 8 is by guide rail 15 and slides
Block 16 is fixed on Z axis frame 14, and the relative motion between them is known as Y-axis movement, Z when guide rail 15 couples with Z axis frame 14
There is position limiting structure outstanding on axis frame 14, there is limit outstanding to tie on Y-axis frame 17 when sliding block 16 couples with Y-axis frame 17
Structure prevents guide rail installation site from changing, and other two linear moving module has been all made of same rail sliding block fixed form, in this way
It ensure that the repeatability of whole installation accuracy and assembly.X-axis motion module 7 is fixed on Y-axis frame 17 by rolling guide,
Relative motion between them is known as X-axis movement.R axis motion module 5 is fixed on X-axis frame by back to back angle contact ball bearing 27
On frame 23, the relative rotary motion between them is known as the movement of R axis.The movement of aforementioned four axis is all for changing electrode assembly
1 relative to the relative position between 100 front end arc chamber end tab of ion source.Electrode assembly 1 is mainly by inhibition electrode 101 and ground
Electrode 102 forms, and ground electrode 102 and cavity are same current potential, and ion source 100 is in high potential, inhibits electrode 101 and ion source
It insulate between 100 and ground electrode 102, inhibition electrode 101 is negative potential relative to the current potential of ion source 100.
4 one end of L-type support is fixed on gear wheel 13, and the other end is fixed on L-type axis 11, and electrode assembly 1 passes through positioning
Pin is fixed on 11 other end of L-type axis, and water cooling hole is provided among L-type axis 11, prevents L-type support 4 and 10 temperature of welding bellows
It is excessively high.10 front end of welding bellows is connected with L-type support 4, and rear end is connected with vacuum cavity, ensures that 11 phase of L-type axis in this way
Vacuum cavity can be moved but high vacuum isolation effect.
Illustrate how X-axis, Y-axis, three of Z axis linear motions realize that high-precision straight line is transported now with X-axis motion module 7
Dynamic, X-axis motor 18 is fixed on Y-axis frame 17, and screw rod 24 is deep by a pair of angular contact ball bearing 20 face-to-face in front end and rear end
Ditch ball bearing 22 is mounted on Y-axis frame 17, and X-axis motor 18 is connected by shaft coupling 19 with screw rod 24, the nut on screw rod 24
It is fixed on X drive block 21, X drive block 21 is inserted into the hole of X-axis frame 23, and then realizes the driving to X-axis.Motor is direct
The advantages that driving this movement mechanism of screw rod has driving force strong, high-precision, long-life, small back clearance.It is faced by front end a pair
Face angle contact ball bearing 20 and this mode of 22 support screw of rear end deep groove ball bearing 24 have high rigidity, and screw rod is resisted buckling and become
The advantages that shape ability is strong.Y-axis is identical with the driving structure of Z axis, so three directions of motion in the example are all having the same
Advantage.
Claims (4)
1. a kind of Ion Extraction system driving device, comprising: X-axis motion module, Y-axis motion module, Z axis motion module, R axis fortune
Dynamic model block, vacuum sealing module, electrode module, the electrode module is by structures such as extraction ground electrode, inhibition electrode, insulation porcelain knobs
At；Phase is done relative to ion source arc chamber end tab in tri- motion modules of X, Y, Z and a R axis rotary module driving electrodes module
The movement answered, four motion module integral layouts are a kind of mode of gantry frame type, and Z axis motion module is on the most top of portal frame
End, excess-three motion module is on being arranged in gantry beam；X-axis, that two motion modules of Y-axis respectively drive electrode module is opposite
Left and right is done in ion source arc chamber end tab and is moved up and down, and Z axis motion module drives front-rear direction movement, and R axis motion module is driven
Moving electrode module is done around the horizontal center line of inhibition electrode inlet plane and is moved clockwise or counterclockwise.
2. Ion Extraction system driving device according to claim 1, which is characterized in that X-axis, Y-axis and Z axis three movements
Module is supported using rolling guide, and the high-accuracy screw rod of motor direct-drive moves in a straight line.
3. Ion Extraction system driving device according to claim 1, which is characterized in that the rotation branch of R axis motion module
Support is supported using the back-to-back angular contact ball bearing that is connected, and bearing fixed form is in Pre strained state.
4. Ion Extraction system driving device according to claim 1, which is characterized in that vacuum sealing uses welding wave wave
The line seal of tube, welding bellows center are equipped with L-type coupling spindle, for coupling for R axis motion module terminal and electrode module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710560156.9A CN109216141A (en) | 2017-07-05 | 2017-07-05 | A kind of Ion Extraction system driving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710560156.9A CN109216141A (en) | 2017-07-05 | 2017-07-05 | A kind of Ion Extraction system driving device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109216141A true CN109216141A (en) | 2019-01-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710560156.9A Pending CN109216141A (en) | 2017-07-05 | 2017-07-05 | A kind of Ion Extraction system driving device |
Country Status (1)
| Country | Link |
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| CN (1) | CN109216141A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201413331Y (en) * | 2009-06-03 | 2010-02-24 | 大连齐维科技发展有限公司 | Four-axle driving mechanism |
| CN203045153U (en) * | 2012-12-10 | 2013-07-10 | 苏州天弘激光股份有限公司 | Micron order four-axis motion platform |
| CN105895493A (en) * | 2014-12-18 | 2016-08-24 | 北京中科信电子装备有限公司 | Ion extraction device |
| CN106653546A (en) * | 2015-10-28 | 2017-05-10 | 北京中科信电子装备有限公司 | Extraction electrode driving device |
-
2017
- 2017-07-05 CN CN201710560156.9A patent/CN109216141A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201413331Y (en) * | 2009-06-03 | 2010-02-24 | 大连齐维科技发展有限公司 | Four-axle driving mechanism |
| CN203045153U (en) * | 2012-12-10 | 2013-07-10 | 苏州天弘激光股份有限公司 | Micron order four-axis motion platform |
| CN105895493A (en) * | 2014-12-18 | 2016-08-24 | 北京中科信电子装备有限公司 | Ion extraction device |
| CN106653546A (en) * | 2015-10-28 | 2017-05-10 | 北京中科信电子装备有限公司 | Extraction electrode driving device |
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Application publication date: 20190115 |
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| WD01 | Invention patent application deemed withdrawn after publication |