CN109212744A - A kind of Piezoelectric Driving single-sided helix phase reflection mirror and its electric excitation method thereof - Google Patents
A kind of Piezoelectric Driving single-sided helix phase reflection mirror and its electric excitation method thereof Download PDFInfo
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- CN109212744A CN109212744A CN201811221726.2A CN201811221726A CN109212744A CN 109212744 A CN109212744 A CN 109212744A CN 201811221726 A CN201811221726 A CN 201811221726A CN 109212744 A CN109212744 A CN 109212744A
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- helix
- piezoelectric ceramics
- piezoelectric
- reflection mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
Abstract
The invention discloses a kind of Piezoelectric Driving single-sided helix phase reflection mirror and its electric excitation method thereofs, it includes: reflecting optics (2), piezoelectric ceramics (1), flexible support material (3), power connection (5) and printed circuit board (4)；Power connection (5) is connected by power supply line (6) with the electrode on piezoelectric ceramics (1) front；Reflecting optics (2) are bonded in the back side of piezoelectric ceramics (1)；Power connection (5) is mounted on printed circuit board (4), is connected with printed circuit board (4)；Flexible support material (3) are installed between the front of piezoelectric ceramics (1) and printed circuit board (4).Structure of the invention design is reasonable, by the width and spacing that change helix interdigitate electrode, the electric field of specific direction can be generated, so that piezoelectric ceramics generation is helix-deformed, and the deformation that the Piezoelectric Driving single-sided helix phase reflection mirror adjusts spiral can be changed by adjusting voltage, thus there is the characteristic easily and fast adjusted.
Description
Technical field
The present invention relates to a kind of Piezoelectric Driving single-sided helix phase reflection mirror and its electric excitation method thereofs, belong to micro-electro-mechanical systems commander
Domain.
Background technique
Vortex beams technology presents extensively in terms of optical tweezer, particulate manipulation, optic communication, telescope and micro motor
Wealthy application prospect.The method that laboratory generates vortex beams at present mainly has geometric mode transformation approach, spiral phase plate method, meter
Holography method and spatial light modulator method are calculated to obtain vortex beams；But the converting system of geometric mode transformation approach is more complex, each to join
Number is not easy to control；Holography method is calculated because diffraction efficiency is not high being only suitable for generating the vortex beams of lower-order；Although space
Optical modulator method can generate the vortex beams of high quality, but be limited to the liquid crystal of itself compared with each parameter of light beam is neatly controlled
Structure is unable to the high laser beam of processing power；Spiral phase plate method is able to achieve higher vortex beams transfer efficiency, and energy gram
The shortcomings that taking spatial light modulator converts high power-beam.Now widely used spiral phase plate is to utilize mostly
Ultraprecision Machining is processed with a certain specific spiral-shaped and size bright and clean helicoid, and a certain spiral phase plate can only
Modulate the vortex beams of a certain particular topology load.
Summary of the invention
Object of the present invention is in view of the defects existing in the prior art, provide the pressure that a kind of structure is simple, can quickly adjust
Electric drive single-sided helix phase reflection mirror, can fast modulation go out the vortex beams of a variety of topological load.
The present invention to achieve the above object, adopts the following technical scheme that
A kind of Piezoelectric Driving single-sided helix phase reflection mirror, it include: reflecting optics, piezoelectric ceramics, flexible support material,
Power connection and printed circuit board；
Power connection is connected by power supply line with the electrode on piezoelectric ceramics front；Reflecting optics are bonded in piezoelectric ceramics
Reverse side；The reverse side of piezoelectric ceramics is upward；
Power connection is installed on a printed circuit, is connected with printed circuit board；The front of piezoelectric ceramics and printed circuit
Flexible support material is installed between plate.The face down of piezoelectric ceramics.
Preferably, above-described Piezoelectric Driving single-sided helix phase reflection mirror, the front of the piezoelectric ceramics
It is uniformly distributed the interdigitate electrode with helix shape, the helix is equiangular helical spiral, and helix has Trapezoidal
The characteristics of with spacing is become；The reverse side of the piezoelectric ceramics does not have electrode (electrode of piezoelectric ceramics reverse side is completely removed).
Preferably, above-described Piezoelectric Driving single-sided helix phase reflection mirror, the width that helix has become
Changing range is 80 microns~450 microns, and corresponding spacing variation range is 200 microns~750 microns；Spiral line width and spacing
Ratio range be 0.4~0.6, optimum ratio be 0.45~0.55 between.The present invention is screened by many experiments, works as helix
When width and the ratio range optimum ratio of spacing are between 0.45~0.55, the deformation of piezoelectric ceramics can be made more to meet theory
It is spiral yarn shaped, it can guarantee obtain optimal vortex beams in this way.
The present invention can generate specific direction by the width and spacing of the above-mentioned helix interdigitate electrode of change
Electric field, so that piezoelectric ceramics generation is helix-deformed.
Preferably, above-described Piezoelectric Driving single-sided helix phase reflection mirror, piezoelectric ceramics are approximate annulus
Shape structure, the annulus have a notch.Preferably, the annulus has the notch for being less than 0.1mm, the thickness of piezoelectric ceramics
Degree is no more than 0.2mm.
Preferably, above-described Piezoelectric Driving single-sided helix phase reflection mirror, the reflecting optics and piezoelectricity
The shape of ceramics is identical with size, and is bonded in the reverse side of piezoelectric ceramics.Preferably, the reflecting optics are ultraprecise
Silicon wafer is processed, thickness is no more than 0.5mm.
Preferably, above-described Piezoelectric Driving single-sided helix phase reflection mirror, the flexible support material
For polyesters flexible rubber material.
Preferably, above-described Piezoelectric Driving single-sided helix phase reflection mirror is referred to by changing helix ten
The driving voltage of crossed electrode can change the helix-deformed size of piezoelectric ceramics.And it can be by changing spiral yarn shaped class ten
The driving voltage for referring to crossed electrode, can change the helix-deformed size of piezoelectric ceramics.
A kind of electric excitation method thereof of Piezoelectric Driving single-sided helix phase reflection mirror, specific electric excitation method thereof are as follows:
In the class interdigitate electrode of the frontal design equiangular spiral wire shaped of piezoelectric ceramics, 0 is applied to above-mentioned electrode~
When the DC voltage of 200V, piezoelectric ceramics can realize spiral-shaped quiet deformation, change the size of driving voltage, can be realized
The adjusting of helix-deformed size, so that the helical phase reflecting mirror can modulate the vortex beams with different topology load.
The utility model has the advantages that
Piezoelectric Driving single-sided helix phase reflection mirror provided by the invention, it is reasonable in design, it can quickly adjust, and energy
Enough fast modulations go out the vortex beams of a variety of topological load.
And the present invention utilizes the large deformation characteristic of piezoelectric ceramic piece, has the class ten of equiangular spiral wire shaped by designing
Refer to crossed electrode, realizes the helix-deformed of piezoelectric ceramics.By changing piezoelectric ceramic piece driving voltage within the scope of 0~200V,
The adjusting of helix-deformed size can be fast implemented, thus by changing driving voltage, which can modulate
The vortex beams of different topology load out.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of Piezoelectric Driving single-sided helix phase reflection mirror of the present invention.
The positive distribution of electrodes of piezoelectric ceramics of the present invention and field distribution schematic diagram of Fig. 2.
Fig. 3 is the helix structure scale diagrams of piezoelectric ceramics front electrode of the present invention.
Fig. 4 is the outline drawing of piezoelectric ceramics and reflecting optics of the present invention.
Specific embodiment
Embodiment 1
Shown in as shown in Figure 1, Figure 3 and Figure 4, a kind of Piezoelectric Driving single-sided helix phase reflection mirror, it includes: reflecting optics 2, pressure
Electroceramics 1, flexible support material 3, power connection 5 and printed circuit board 4；
Power connection 5 is connected by power supply line 6 with the electrode on 1 front of piezoelectric ceramics；Reflecting optics 2 are bonded in piezoelectricity pottery
The reverse side of porcelain 1, the reverse side of piezoelectric ceramics 1 is upward；
Power connection 5 is mounted on printed circuit board 4, is connected with printed circuit board 4；The front of piezoelectric ceramics 1 and printing
Polyesters flexible rubber material is installed between circuit board 4.
The front of piezoelectric ceramics 1 described above is uniformly distributed the interdigitate electrode with helix shape, the spiral
Line is equiangular helical spiral, and helix has the characteristics that Trapezoidal and becomes spacing；The reverse side of the piezoelectric ceramics 1 does not have electrode.
Above-described Piezoelectric Driving single-sided helix phase reflection mirror, piezoelectric ceramics 1 are approximate cirque structure, the annulus
With a notch.The reflecting optics 2 are identical with the shape of piezoelectric ceramics 1 and size, and are bonded in piezoelectric ceramics 1
Reverse side.
Embodiment 2
A kind of electric excitation method thereof of Piezoelectric Driving single-sided helix phase reflection mirror, specific electric excitation method thereof are as follows: when application (0
~200V) a certain voltage (such as 50V) in range when, field distribution shown in Fig. 2 will be distributed inside piezoelectric ceramic piece,
Under the action of inverse piezoelectric effect, piezoelectric ceramics sector-meeting generation is helix-deformed, so that it is helix-deformed to drive reflecting optics also to occur
(when 50V, helix-deformed maximum height is 3.2~3.8 microns), thus the spiral mirror surface formed, the spiral mirror surface
The vortex beams that topological load is 3~5 can be modulated.Since the resonance frequency range of the system is 800Hz~1000Hz, because
And voltage and helix-deformed size can be quickly adjusted within the scope of 500Hz.When driving voltage is quickly adjusted to (0~200V)
When another voltage (such as 100V) in range, under the action of inverse piezoelectric effect, piezoelectric ceramics sector-meeting occur it is helix-deformed, from
And drive reflecting optics that helix-deformed (when 100V, helix-deformed maximum height is 6.5~7.5 microns) also occurs, thus
The spiral mirror surface of formation, the spiral mirror surface can modulate the vortex beams that topological load is 7~9.
Helix as shown in Figure 2 is equiangular helical spiral, helix equation r=a.eθ(a >=1, unit mm).When to figure
When spiral yarn shaped class interdigitate electrode shown in 2 applies voltage (such as 100V) shown in figure, it will in piezoelectric ceramics
Portion generates electric field shown in Fig. 2, the direction of the electric field and polar diameter direction angle at 45 °.
Due to the inverse piezoelectric effect of piezoelectric ceramics, in region I can generate n to t to compressive strain, in region, II can be generated
N to stretching strain and t to compressive strain.As the suitable electrode width w of selectionA(300 microns) and electrode spacing dA(147 microns),
The overall stretching strain in region I and region II can be made to be equal to overall compressive strain.The totality stretching strain direction is consistent with electric field,
The totality compressive strain is vertical with direction of an electric field.It can lead to the helix-deformed of piezoelectric ceramics by above-mentioned strain characteristics.
The helix-deformed size of the above-mentioned piezoelectric ceramics of the present invention can pass through the excitation of adjusting piezoelectric ceramics front electrode
Voltage is realized.When the driving voltage increases, the electric field strength inside piezoelectric ceramics is consequently increased, so that overall draw
The numerical value of strain and overall compressive strain all increases, the biggish helicoid of deformation available in this way.In turn, the driving voltage
Become smaller, then obtains deforming lesser helicoid.Therefore, change the size of driving voltage, it is easy to obtain different distortion size
Helicoid.
Claims (8)
1. a kind of Piezoelectric Driving single-sided helix phase reflection mirror, which is characterized in that it includes: reflecting optics (2), piezoelectric ceramics
(1), flexible support material (3), power connection (5) and printed circuit board (4)；
Power connection (5) is connected by power supply line (6) with the electrode on piezoelectric ceramics (1) front；Reflecting optics (2) are bonded in pressure
The reverse side of electroceramics (1), the reverse side of piezoelectric ceramics (1) is upward；
Power connection (5) is mounted on printed circuit board (4), is connected with printed circuit board (4)；Piezoelectric ceramics (1) front with
Flexible support material (3) are installed between printed circuit board (4).
2. Piezoelectric Driving single-sided helix phase reflection mirror according to claim 1, it is characterised in that: the piezoelectric ceramics
(1) front is uniformly distributed the interdigitate electrode with helix shape, and the helix is equiangular helical spiral, helix tool
The characteristics of having Trapezoidal and becoming spacing；The reverse side of the piezoelectric ceramics (1) does not have electrode.
3. Piezoelectric Driving single-sided helix phase reflection mirror according to claim 2, it is characterised in that: the width that helix has
Spending variation range is 80 microns~450 microns, and corresponding spacing variation range is 200 microns~750 microns；Spiral line width and
The ratio range of spacing is 0.4~0.6, and optimum ratio is between 0.45~0.55.
4. Piezoelectric Driving single-sided helix phase reflection mirror according to any one of claims 1 to 3, it is characterised in that: piezoelectricity
Ceramic (1) is approximate cirque structure, which has a notch.
5. Piezoelectric Driving single-sided helix phase reflection mirror according to claim 4, it is characterised in that: the reflecting optics
(2) identical with the shape of piezoelectric ceramics (1) and size, and it is bonded in the reverse side of piezoelectric ceramics (1).
6. Piezoelectric Driving single-sided helix phase reflection mirror according to claim 5, it is characterised in that: the flexible support
Material is polyesters flexible rubber material.
7. Piezoelectric Driving single-sided helix phase reflection mirror according to claim 3, which is characterized in that by changing helix
The driving voltage of interdigitate electrode can change the helix-deformed size of piezoelectric ceramics (1).
8. a kind of electric excitation method thereof of Piezoelectric Driving single-sided helix phase reflection mirror, which is characterized in that in the front of piezoelectric ceramics
The class interdigitate electrode for designing equiangular spiral wire shaped, when applying the DC voltage of 0~200V to class interdigitate electrode, pressure
Electroceramics can be realized spiral-shaped quiet deformation, change the size of driving voltage, can be realized the adjusting of helix-deformed size,
To enable helical phase reflecting mirror to modulate the vortex beams with different topology load.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811221726.2A CN109212744A (en) | 2018-10-19 | 2018-10-19 | A kind of Piezoelectric Driving single-sided helix phase reflection mirror and its electric excitation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811221726.2A CN109212744A (en) | 2018-10-19 | 2018-10-19 | A kind of Piezoelectric Driving single-sided helix phase reflection mirror and its electric excitation method thereof |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101226274A (en) * | 2007-11-29 | 2008-07-23 | 上海交通大学 | Piezo-electricity driven deformable reflector and manufacturing method thereof |
| CN106646730A (en) * | 2016-11-23 | 2017-05-10 | 华南理工大学 | Vortex optical fiber for orbital angular momentum generation and tuning |
| CN107942508A (en) * | 2017-12-14 | 2018-04-20 | 中国人民解放军国防科技大学 | Transverse piezoelectric driving deformable mirror and assembling method thereof |
| CN110119039A (en) * | 2018-02-07 | 2019-08-13 | 桂林电子科技大学 | Spiral microarray format modulation type optical fiber vortex field generator |
-
2018
- 2018-10-19 CN CN201811221726.2A patent/CN109212744A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101226274A (en) * | 2007-11-29 | 2008-07-23 | 上海交通大学 | Piezo-electricity driven deformable reflector and manufacturing method thereof |
| CN106646730A (en) * | 2016-11-23 | 2017-05-10 | 华南理工大学 | Vortex optical fiber for orbital angular momentum generation and tuning |
| CN107942508A (en) * | 2017-12-14 | 2018-04-20 | 中国人民解放军国防科技大学 | Transverse piezoelectric driving deformable mirror and assembling method thereof |
| CN110119039A (en) * | 2018-02-07 | 2019-08-13 | 桂林电子科技大学 | Spiral microarray format modulation type optical fiber vortex field generator |
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Effective date of abandoning: 20210528 |