CN109206903A - Resin combination and resin sheet - Google Patents

Resin combination and resin sheet Download PDF

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Publication number
CN109206903A
CN109206903A CN201810698508.1A CN201810698508A CN109206903A CN 109206903 A CN109206903 A CN 109206903A CN 201810698508 A CN201810698508 A CN 201810698508A CN 109206903 A CN109206903 A CN 109206903A
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resin
resin combination
ingredient
present
mass
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柄泽泰纪
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Lintec Corp
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Lintec Corp
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08L79/085Unsaturated polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2201/00Properties
    • C08L2201/08Stabilised against heat, light or radiation or oxydation
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2203/00Applications
    • C08L2203/20Applications use in electrical or conductive gadgets

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Ceramic Engineering (AREA)

Abstract

Resin combination of the invention is the resin combination containing (A) Thermocurable ingredient, wherein, described (A) the Thermocurable ingredient contains (A1) maleimide resin and (A2) allyl resin with biphenyl backbone.

Description

Resin combination and resin sheet
Technical field
The present invention relates to resin combination and resin sheets.
Background technique
As the sealing material of power semiconductor etc., the resin combination with high-fire resistance can be used.
For example, disclosing a kind of resin combination in document 1 (Japanese Unexamined Patent Publication 2015-147849 bulletin), contain: horse Come imide compound, compound, amine compounds at least either in allyl and epoxy group and spreads out comprising acetophenone At least one kind of free-radical generating agent in biology and tetraphenyl ethane derivative.
But it in the case where containing maleimide compound as the resin combination as recorded in document 1, deposits Heat resistance improve and cementability reduce the problem of.
Summary of the invention
The purpose of the present invention is to provide a kind of resin combinations compared with the past for having had both high-fire resistance and high adhesiveness Object and resin sheet.
The resin combination of one embodiment of the present invention is the resin combination containing (A) Thermocurable ingredient, feature It is, (A) the Thermocurable ingredient contains (A1) maleimide resin and (A2) allyl resin with biphenyl backbone.
In the resin combination of one embodiment of the present invention, (A1) has the maleimide resin of biphenyl backbone Mass ratio (A1/A2) relative to (A2) allyl resin is preferably 4.5 or more.
In the resin combination of one embodiment of the present invention, preferably described (A1) has the maleimide of biphenyl backbone Resin is indicated with the following general formula (1).
In the following general formula (1), the integer that k is 1 or more, m1 and m2 are separately 1~6 integer, n1 and n2 points It independently is not 0~4 integer, R1And R2It is separately the alkyl of carbon atom number 1~6.
In the resin combination of one embodiment of the present invention, preferably also contain (B) adhesive ingredients.
In the resin combination of one embodiment of the present invention, with (A) the Thermocurable ingredient and (B) adhesive On the basis of the total amount of the solid component of ingredient, it is preferably 20 that (A1), which has the content of the maleimide resin of biphenyl backbone, Quality % or more and 80 mass % or less.
In the resin combination of one embodiment of the present invention, preferably also contain (C) inorganic filler.
In the resin combination of one embodiment of the present invention, preferably also contain (D) coupling agent.
The resin combination of one embodiment of the present invention is preferred for sealing power semiconductor or is clipped in the function Between rate semiconductor element and other electronic components.
The resin combination of one embodiment of the present invention is preferred for any one in silicon carbide and gallium nitride to having used Kind or more semiconductor element be sealed or be clipped in any one used in silicon carbide and gallium nitride or more Between semiconductor element and other electronic components.
The resin sheet of one embodiment of the present invention is characterized in that the resin group containing above-mentioned one embodiment of the present invention Close object.
According to the present invention it is possible to provide the resin combination compared with the past for having had both high-fire resistance and high adhesiveness and tree Rouge piece.
Detailed description of the invention
Fig. 1 is the diagrammatic cross-section of the laminated body of an embodiment.
Specific embodiment
[resin combination]
The resin combination of present embodiment contains (A) Thermocurable ingredient.It is somebody's turn to do (A) Thermocurable ingredient and contains (A1) tool There are the maleimide resin and (A2) allyl resin of biphenyl backbone.
Complex viscosity η of the resin combination of present embodiment before curing at 90 DEG C is preferably 1.0 × 102Pa·s Above and 1.0 × 105Pas or less.From the sight of the mobility when heating before curing of the resin combination of present embodiment Point considers that complex viscosity η is more preferably 1.0 × 103Pas or more and 1.0 × 105Pas hereinafter, particularly preferably 1.0 × 103Pas or more and 1.0 × 104Pas or less.By keeping mobility when resin combination heating before curing, When resin combination is applied to by application object, increase to by the followability of the surface shape of application object.Especially in resin group In the case where closing the form that object is resin sheet, when being applied to resin combination heating by application object, to by application object The followability of surface shape increases.
The complex viscosity η of the resin combination of present embodiment for example can by adjusting used in resin combination at Point or use level be adjusted to above range.
Complex viscosity η in this specification is coating resin combination and makes it dry, and makes resin sheet, uses viscoplasticity Value obtained from measurement device is measured the resin sheet in the complex viscosity (unit: Pas) at 90 DEG C.
((A) Thermocurable ingredient)
(A) it is formed three-dimensional netted when Thermocurable ingredient (hereinafter, sometimes referred to simply as " (A) ingredient ") is heated, had It is adhered to the property of adherend securely.(A) Thermocurable ingredient in present embodiment contains (A1) with biphenyl backbone Maleimide resin and (A2) allyl resin.Contain the horse that (A1) has biphenyl backbone by (A) Thermocurable ingredient Resin combination can be improved to the cementability of adherend in bismaleimide resin, and the complex viscosity of resin combination holds Easily reduce.Especially in (A) Thermocurable ingredient, though (A1) have biphenyl backbone maleimide resin relative to (A2) in the case that the mass ratio (A1/A2) of allyl resin is high, the complex viscosity of resin combination is also easily reduced.
(A1) in present embodiment as long as the maleimide resin with biphenyl backbone has connection in 1 molecule The resin of benzene skeleton and dimaleoyl imino, is not particularly limited, and 1 or more biphenyl is contained preferably in 1 molecule The maleimide resin of skeleton and 2 or more dimaleoyl imino.
From the viewpoint of heat resistance and cementability, (A1) preferably in present embodiment has the Malaysia acyl of biphenyl backbone Imide resin is indicated with the following general formula (1).
In above-mentioned general formula (1), the integer that k is 1 or more, the average value of k is preferably 1 or more and 10 hereinafter, more preferably 1 Above and 5 hereinafter, further preferably 1 or more and 3 or less.M1 and m2 is separately 1~6 integer, preferably 1~3 Integer, more preferably 1.N1 and n2 is separately 0~4 integer, preferably 0~2 integer, more preferably 0.R1And R2It is separately the alkyl of carbon atom number 1~6, the preferably alkyl of carbon atom number 1~3, more preferably methyl.
There is the maleimide resin of biphenyl backbone as (A1) in present embodiment, can specifically arrange and be exemplified below State general formula (2) or the following general formula (3) compound represented.
In above-mentioned general formula (2) and (3), k is identical as the k of above-mentioned general formula (1).In above-mentioned general formula (2), n1, n2, R1And R2With n1, n2, R of above-mentioned general formula (1)1And R2It is identical.
As the product of maleimide resin shown in above-mentioned general formula (3), Nippon Kayaku K. K's manufacture can be enumerated " MIR-3000-70MT " etc..
(A2) in present embodiment is not particularly limited as long as allyl resin has the resin of allyl. The allyl resin preferably allyl resin containing 2 or more allyls in 1 molecule in present embodiment.
Allyl resin in present embodiment more preferably uses the following general formula (4) to indicate.
In above-mentioned general formula (4), R3And R4It is separately alkyl, the preferably alkyl of carbon atom number 1~10 is more excellent It is selected as the alkyl of carbon atom number 1~4, the further preferably alkyl selected from methyl and ethyl.
As (A2) allyl resin, can specifically enumerate such as diallyl bisphenol.
As long as not damaging the purpose of the present invention, (A) the Thermocurable ingredient of present embodiment can containing (A1) ingredient with Curing agent other than outer thermosetting resin and (A2) ingredient.
As the thermosetting resin other than (A1) ingredient, as long as the thermosetting resin with high-fire resistance, it can be with It enumerates for example: maleimide resin, epoxy resin, benzo in addition to (A1) ingredientPiperazine resin, cyanate ester resin, with And melamine resin etc..These thermosetting resins can be used alone, or two or more is applied in combination.
It as the curing agent other than (A2) ingredient, can enumerate for example: phenolic resin and having in addition to (A2) ingredient The resinaes such as the resin of C=C double bond and amine, acid anhydrides and formaldehyde etc..These curing agent can be used alone, or combination Use two or more.
In the case where the curing agent other than the thermosetting resin or (A2) ingredient other than use (A1) ingredient, with (A) at On the basis of (that is, when the solid component of (A) ingredient in addition to solvent is set as 100 mass %) total amount of the solid component divided, Their content is preferably 10 mass % hereinafter, more preferably 5 mass % or less.
In the present embodiment, (that is, by complete in addition to solvent on the basis of the total amount of the solid component of resin combination When portion's solid component is set as 100 mass %), the content of (A) Thermocurable ingredient in resin combination be preferably 2 mass % with Upper and 75 mass % are hereinafter, more preferably 5 mass % or more and 70 mass % or less.
In the present embodiment, (A1) has the maleimide resin of biphenyl backbone relative to (A2) allyl resin Mass ratio (A1/A2) is preferably 4.5 or more.When mass ratio (A1/A2) is 4.5 or more, cementability can be kept, and into one Step improves the storage modulus of resin cured matter made of solidifying resin combination.Furthermore, it is possible to improve the resistance to of resin combination It is hot.Furthermore it is also possible to which (A2) allyl resin is inhibited to ooze out from resin combination.It should be noted that mass ratio (A1/ A2 upper limit value) is not particularly limited.For example, mass ratio (A1/A2) can be 50 or less.
In the present embodiment, (A) Thermocurable ingredient can contain curing accelerator.
As curing accelerator, can enumerate such as imidazolium compounds (for example, 2-ethyl-4-methylimidazole) etc..
(that is, by all solids in addition to solvent at being divided on the basis of the total amount of the solid component of resin combination When 100 mass %), the content of the curing accelerator in resin combination be preferably 0.005 mass % or more and 12 mass % with Under, more preferably 0.01 mass % or more and 10 mass % or less.
((B) adhesive ingredients)
In the present embodiment, in addition to (A) ingredient, resin combination preferably also containing (B) adhesive ingredients (hereinafter, Sometimes referred to simply as " (B) ingredient ").Using (B) ingredient, film forming can be assigned, can be easy resin combination being shaped to piece Shape.
(B) adhesive ingredients of present embodiment is the resin in addition to (A) ingredient, has engagement (A) ingredient or other The function of ingredient.(B) ingredient is preferably thermoplastic resin etc..(B) ingredient can be the resin with functional group.In the situation Under, though (B) adhesive ingredients can participate in by heat carry out resin combination solidification, in the present invention, (B) adhesive at Divide and is also distinguished with (A) Thermocurable ingredient.
No matter (B) adhesive ingredients is aliphatic compound or aromatic compound, can be selected extensively.(B) adhesive Ingredient is preferably selected from such as phenoxy resin, acrylic resin, methacrylic resin, polyester resin, carbamate tree At least any one resin in rouge and polyamide-imide resin is more preferably selected from benzene from the viewpoint of heat resistance At least any one resin in oxygroup resin, polyamide-imide resin and polyester resin.It should be noted that polyester resin Preferably Wholly aromatic polyester resin.(B) adhesive ingredients can be used alone, or two or more is applied in combination.
As phenoxy resin, it is however preferred to have selected from bisphenol A skeleton (hereinafter, bisphenol-A is known as " BisA " sometimes), double The phenoxy group tree of one or more of phenol F skeleton (hereinafter, Bisphenol F is known as " BisF " sometimes), biphenyl backbone and naphthalene skeleton skeleton Rouge, the more preferably phenoxy resin with bisphenol A skeleton and Bisphenol F skeleton.
(B) weight average molecular weight (Mw) of adhesive ingredients be preferably 100 or more and 1,000,000 hereinafter, more preferably 1000 with Above and 800,000 hereinafter, particularly preferably 10,000 or more and 100,000 or less.Weight average molecular weight in this specification is to utilize gel infiltration Chromatography (GelPermeation Chromatography;GPC) method measures and is scaled the value of standard polystyren.
In the present embodiment, (that is, by complete in addition to solvent on the basis of the total amount of the solid component of resin combination When portion's solid component is set as 100 mass %), the content of (B) adhesive ingredients in resin combination be preferably 0.1 mass % with Upper and 50 mass % are hereinafter, more preferably 1 mass % or more and 40 mass % or less.By keeping (B) in resin combination viscous The content of mixture ingredient is above range, and the complex viscosity for being easy to the resin combination by resin sheet before curing is adjusted to it is expected Range, operability, the piece formative of resin sheet can be improved.
In the present embodiment, on the basis of the total amount of (A) ingredient and the solid component of (B) ingredient, (A1) ingredient contains Amount is preferably 20 mass % or more and 80 mass % or less.It (A1), can be further when the content of ingredient is 20 mass % or more Improve the heat resistance of resin combination.On the other hand, it when the content of (A1) ingredient is 80 mass % or less, may be easy to resin Composition molding is sheet.
((C) inorganic filler)
In the present embodiment, in addition to (A) ingredient and (B) ingredient, resin combination preferably comprises (C) inorganic filler (hereinafter, sometimes referred to simply as " (C) ingredient ").Using (C) ingredient, the linear expansion coefficient of resin combination can be reduced, and It can be improved the storage modulus of resin combination.
It as (C) inorganic filler, can enumerate: silica filler, alumina packing and boron nitride filler etc..Wherein, Preferably silica filler.
As silica filler, can enumerate for example: fused silica and spherical silicon dioxide etc..
(C) inorganic filler can be used alone, or two or more is applied in combination.In addition, (C) inorganic filler can be into Row surface treatment.
(C) average grain diameter of inorganic filler is not particularly limited.With the value found out using common grain-distribution detection instrument Meter, the average grain diameter of (C) inorganic filler is preferably 0.1nm or more and 10 μm or less.(C) inorganic filler in this specification it is flat Equal partial size is using particle size distribution device (Nikkiso Company Limited manufactures, ProductName " NANOTRACK Wave-UT151 ") Pass through the value of dynamic light scattering determination.
(that is, by all solids in addition to solvent at being divided on the basis of the total amount of the solid component of resin combination When 100 mass %), the content of (C) inorganic filler in resin combination be preferably 10 mass % or more and 90 mass % hereinafter, More preferably 20 mass % or more and 80 mass % or less.
((D) coupling agent)
In the present embodiment, in addition to (A)~(C) ingredient, resin combination preferably also contains (D) coupling agent.
Coupling agent preferably has and functional group possessed by above-mentioned (A) Thermocurable ingredient or (B) adhesive ingredients institute The group that the functional group having reacts more preferably has and reacts with functional group possessed by (A) Thermocurable ingredient Group.
By using (D) coupling agent, the heat resistance of resin cured matter can not be damaged and improve cementability and adaptation, and And also improve water resistance (humidity resistance).
As (D) coupling agent, consider that preferably silanes is (silane coupled from its versatility and cost advantage etc. Agent).These coupling agents can be used alone, or two or more is applied in combination.In addition, relative to (A) Thermocurable ingredient 100 mass parts, usually with more than 0.1 mass parts and 20 below the mass, preferably with it is more than 0.3 mass parts and 15 mass parts with Under, more preferably with more than 0.5 mass parts and the 10 above-mentioned such coupling agent of ratio cooperation below the mass.
An example of resin combination as present embodiment can be enumerated and only be bonded containing (A) Thermocurable ingredient, (B) The resin combination of agent ingredient, (C) inorganic filler and (D) coupling agent.
In addition, other an example of the resin combination as present embodiment can be enumerated containing (A) thermosetting as described below The property changed ingredient, (B) adhesive ingredients, (C) inorganic filler, (D) coupling agent and the ingredient in addition to above-mentioned (A)~(D) ingredient Resin combination.
(other ingredients)
In the present embodiment, resin combination can be further containing selected from such as crosslinking agent, pigment, dyestuff, defoaming At least any one ingredient in agent, levelling agent, ultraviolet absorbing agent, foaming agent, antioxidant, fire retardant and ion capturing agent.
For example, in order to adjust initial bond before curing and coherency, resin combination can be further containing crosslinking Agent.
It as crosslinking agent, can enumerate for example: organic polyisocyanate compound and organic more group with imine moiety etc..These Crosslinking agent can be used alone, or two or more is applied in combination.
As organic polyisocyanate compound, can enumerate for example: aromatic polyisocyanate compound, aliphatic are more Isocyanate compound, alicyclic polyisocyanates compound and these polyisocyanate compounds trimer and make this Isocyanate-terminated carbamate prepolymer obtained from a little polyisocyanate compounds are reacted with polyol compound etc..
As the more specific example of organic polyisocyanate compound, can enumerate for example: 2,4- toluene diisocynates Ester, 2,6- toluene di-isocyanate(TDI), 1,3- benzene dimethylene diisocyanate, 1,4- benzene dimethylene diisocyanate, hexichol Methylmethane -4,4 '-diisocyanate, diphenyl methane -2,4 '-diisocyanate, 3- Dimethyl diphenylmethane diisocyanate, Hexamethylene diisocyanate, isophorone diisocyanate, dicyclohexyl methyl hydride -4,4 '-diisocyanate, dicyclohexyl first Alkane -2,4 '-diisocyanate and lysine isocyanates etc..These compounds can be used alone, or combination makes Use two or more.
As the specific example of organic more group with imine moiety, can enumerate for example: N, N '-diphenyl methane -4,4 '-two (1- aziridine formamide), trimethylolpropane tris (β-'-aziridino) propionic ester, tetramethylol methane three (β-'-aziridino) Propionic ester and N, N '-Toluene-2,4-diisocyanate, 4- bis- (1- '-aziridino formamide) triethylenemelanin etc..
Relative to above-mentioned 100 mass parts of (B) adhesive ingredients, usually with it is more than 0.01 mass parts and 12 mass parts with Under, preferably with more than 0.1 mass parts and the 10 above-mentioned such crosslinking agent of ratio cooperation below the mass.
The resin combination of present embodiment is preferred for semiconductor element.Specifically, the resin group of present embodiment It closes object and is preferred for sealing semiconductor element.In addition, the resin combination of present embodiment is preferred for being clipped in semiconductor element Between other electronic components.
Semiconductor element is preferably power semiconductor.
In addition, the resin combination of present embodiment is preferred for any one used in silicon carbide and gallium nitride Above semiconductor element is sealed or is clipped in the semiconductor of any one used in silicon carbide and gallium nitride or more Between element and other electronic components.
As other electronic components, can enumerate for example: printed circuit board and lead frame etc..
[resin sheet]
The resin sheet of present embodiment contains the resin combination of present embodiment.
The resin sheet of present embodiment can be obtained by the way that piece is made in the resin combination of present embodiment.By making Resin combination is sheet, becomes easy to the application of adherend, application when especially adherend is large area becomes It is easy.If resin combination is sheet, it can be pre-formed the shape of shape after meeting packaging process to a certain extent, because This can only maintain the sealing material of uniformity to a certain degree by application with regard to supplying.In addition, due to there is no mobility, Operability is excellent.
Allow the sheet of method of resin combination using conventionally known sheet of method, is not particularly limited.This reality The resin sheet for applying mode can be band-like piece, can also be provided with the state being rolled into a roll.The present embodiment being rolled into a roll Resin sheet can be sent out from volume and cut into desired size etc. to use.
The thickness of the resin sheet of present embodiment is for example preferably 10 μm or more, more preferably 20 μm or more.In addition, the thickness Degree preferably 500 μm hereinafter, more preferably 400 μm hereinafter, further preferably 300 μm or less.
The resin sheet of present embodiment is preferably disposably applied to multiple semiconductor elements.For example, being in resin combination When sheet, it can be used for so-called face Board level packaging (Panel Level Package), the face Board level packaging is for equipped with more The structural body application resin sheet of semiconductor element is configured in each gap of the frame in a gap, and to frame and semiconductor element Disposably it is packaged.
The excellent heat resistance of the resin sheet of present embodiment can for example be indicated by measuring the storage modulus E ' after solidifying. For the storage modulus E ' of the resin sheet of present embodiment after hardening, at 250 DEG C of temperature, preferably 1.0 × 102MPa or more, more preferably 2.0 × 102MPa or more.It is believed that the storage modulus E ' at 250 DEG C of temperature is above-mentioned model When enclosing, even if the use used at high temperature is on the way, solidfied material will not be become too soft, and be preferred for the height at 200 DEG C or more In the case where lower sealing of power semiconductor of GaN or SiC system to work of temperature etc., the reliability of encapsulation also can be improved.Gu The upper limit of storage modulus E ' after change at 250 DEG C of temperature is not particularly limited, and preferably 2.0 × 103MPa is hereinafter, more preferably It is 1.0 × 103MPa is hereinafter, further preferably 0.8 × 103MPa or less.
The storage modulus E ' of resin sheet after hardening can be measured by the method recorded in embodiment.
Storage modulus E ' after solidification can for example reach by adjusting ingredient used in resin combination or use level To above range.
[laminated body]
The diagrammatic cross-section of the laminated body 1 of present embodiment is shown in Fig. 1.
The laminated body 1 of present embodiment has the first release liner 2, the second release liner 4 and is set to the first removing Resin sheet 3 between material 2 and the second release liner 4.Resin combination of the resin sheet 3 containing present embodiment.
First release liner 2 and the second release liner 4 preferably have fissility, and the first release liner 2 is to resin sheet 3 There are difference with peeling force of second release liner 4 to resin sheet 3 for peeling force.First release liner 2 and the second release liner 4 Material is not particularly limited.The ratio between peeling force P1 of the peeling force P2 of second release liner 4 relative to the first release liner 2 (P2/ It P1) is preferably 0.02≤P2/P1 < 1 or 1 P2/P1≤50 <.
First release liner 2 and the second release liner 4 for example can be release liner itself have fissility component, with And it implements the component of lift-off processing or is laminated with the component etc. of peeling agent layer.In the first release liner 2 and the second removing material In the case that material 4 does not carry out lift-off processing, as its material, it can enumerate such as olefine kind resin and fluororesin.
First release liner 2 and the second release liner 4 can be the release liner for having peeling base and peeling agent layer, institute Stating peeling agent layer is to be coated with remover in peeling base and formed.Has the stripping of peeling base and peeling agent layer by being formed From material, operation is become easy.In addition, the first release liner 2 and the second release liner 4 can be only in a masks of peeling base Standby peeling agent layer, can also have peeling agent layer on the two sides of peeling base.
As peeling base, can enumerate for example: paper base material is laminated with the thermoplastic resins such as polyethylene on the paper base material Made of laminated paper and plastic foil etc..As paper base material, can enumerate for example: glassine paper, coated paper and cast-coated paper etc..Make For plastic foil, can enumerate for example: polyester film (for example, polyethylene terephthalate, polybutylene terephthalate (PBT) and Polyethylene naphthalate etc.) and polyolefin film (for example, polypropylene and polyethylene etc.) etc..Wherein, preferably polyester Film.
It as remover, can enumerate for example: the organic silicon remover being made of organic siliconresin;By polyvinyl ammonia The remover of class containing long chain alkyl compound that the compound containing chain alkyl such as carbamate and alkyl urea derivative is constituted;By The alkyd resin class remover that alkyd resin (for example, non-transformed property alkyd resin and convertibility alkyd resin etc.) is constituted;By alkene Hydrocarbon resin is (for example, polyethylene (for example, high density polyethylene (HDPE), low density polyethylene (LDPE) and straight-chain low density polyethylene (LDPE) etc.), have The crystalline polypropylene resin etc. of the Noblen and propylene-alpha-olefin copolymers of isotactic structure or syndiotactic structure etc.) it constitutes Olefin resin class remover;By natural rubber and synthetic rubber (for example, butadiene rubber, isoprene rubber, butylbenzene rubber Glue, methyl methacrylate butadiene rubber and nitrile rubber etc.) etc. rubber constitute rubber remover;And by (first Base) the various removers such as the crylic acid resin remover that constitutes of the acrylic resins such as acrylic acid esters co-polymer, these removings Agent can be used alone, or two or more is applied in combination.Wherein, preferably organic silicon remover.
The thickness of first release liner 2 and the second release liner 4 is not particularly limited.First release liner 2 and the second stripping Thickness from material 4 is usually 1 μm or more and 500 μm hereinafter, preferably 3 μm or more and 100 μm or less.
The thickness of peeling agent layer is not particularly limited.The case where solution of the coating containing remover forms peeling agent layer Under, the thickness of peeling agent layer is preferably 0.01 μm or more and 3 μm hereinafter, more preferably 0.03 μm or more and 1 μm or less.
The manufacturing method of laminated body 1 is not particularly limited.For example, laminated body 1 can be manufactured by process as described below. Firstly, being coated with resin combination on the first release liner 2, film is formed.Then, make the dried coating film and form resin sheet 3. Then, by being bonded resin sheet 3 at normal temperature with the second release liner 4, laminated body 1 is obtained.
[semiconductor device]
The semiconductor device of present embodiment has partly is led with what the resin combination of present embodiment or resin sheet sealed Volume elements part.
Having used the sealing of the semiconductor element of the resin sheet of present embodiment can for example carry out as follows.Place resin sheet So that it is covered semiconductor element, is crimped using vacuum layer platen press, thus sealing semiconductor element.
Using laminated body 1 of present embodiment, after having removed a release liner of laminated body 1, put Setting resin sheet makes it cover semiconductor element.Then, another release liner is removed.Then, it is crimped using vacuum layer platen press, Thus sealing semiconductor element.
Having used the engagement of the semiconductor element of the resin sheet of present embodiment can for example carry out as follows.In other electronics Resin sheet is placed on component, semiconductor element is further placed on resin sheet, then, by resin combination and semiconductor element It after part temporarily crimps, is heated, makes its solidification.Resin combination is set to be clipped in semiconductor element and other electronic components as a result, Between, semiconductor element is engaged with other electronic components.
[effect of embodiment]
Resin combination and resin sheet according to the present embodiment, can be improved heat resistance and cementability.By using this The resin combination and resin sheet of embodiment, can and cementability high by heat resistance compared with the past also high sealing tree Rouge layer carrys out sealing semiconductor element, and the adhesive strength of semiconductor element and sealing resin layer can be made to improve.
The resin combination and resin sheet of present embodiment are it may be preferable to be used for power semiconductor.Separately Outside, the resin combination and resin sheet of present embodiment can be preferably used at least any one in silicon carbide and gallium nitride The semiconductor element of kind.
As described above, the resin combination of present embodiment can be preferred for power semiconductor.In other words, at this In the semiconductor device of embodiment, semiconductor element is preferably power semiconductor.Power semiconductor is imagined 200 DEG C or more at a high temperature of work.Material requirements heat resistance used in semiconductor device with power semiconductor.This reality The resin combination of mode and the excellent heat resistance of resin sheet are applied, therefore, can be preferred for coating function in semiconductor devices It rate semiconductor element or is clipped between power semiconductor and other components.
As described above, the resin combination of present embodiment can be preferably used for times in silicon carbide and gallium nitride It anticipates more than one semiconductor element.In other words, in the semiconductor device of present embodiment, semiconductor element is preferably used Semiconductor element more than any one in silicon carbide and gallium nitride.From the aspect of the characteristic different from silicon semiconductor, Use that the semiconductor element of any one in silicon carbide and gallium nitride or more can be preferred for power semiconductor, base station is used High-output power equipment, sensor, detector or Schottky barrier diode etc..At these on the way, it is conceived to and has used carbon The heat resistance of any a kind or more of semiconductor element in SiClx and gallium nitride, the resin combination and resin of present embodiment The excellent heat resistance of piece, thus can preferably with used any a kind or more of semiconductor element in silicon carbide and gallium nitride It is applied in combination.
[deformation of embodiment]
The present invention is not limited to the embodiments, deformation or improvement in the range of can be realized the object of the invention Etc. being also included in the present invention.
In the above-described embodiment, material is removed first to the first release liner, the second release liner and setting Expect to be illustrated the laminated body of resin sheet between the second release liner, in addition it is also possible to be the only one side in resin sheet Laminated body with release liner.
In addition, semiconductor seal applications are illustrated in the embodiment of above-mentioned semiconductor device, but the present invention Resin combination and resin sheet be also used as circuit board use insulating materials in addition to this (for example, hard printed wiring board Material, flexible printed circuit board material and lamination (build-up) substrate interlayer dielectic etc.), lamination adhesive film, And bonding agent etc..
Embodiment
The present invention is illustrated in further detail hereinafter, enumerating embodiment, but the present invention is not by these embodiments Any restriction.
The preparation of resin combination
The material of preparation for resin combination is as described below.
(Thermocurable ingredient)
BMI resin -1: maleimide resin (the maleimide tree shown in above-mentioned general formula (3) with xenyl " MIR-3000-70MT " that rouge, Nippon Kayaku K. K manufacture)
Bis- [4- (4- maleimidephenoxy) phenyl] propane of BMI resin -2:2,2-
BMI resin -3: bis- (3- ethyl -5- methyl -4- maleimide phenyl) methane
Allyl resin: diallyl bisphenol
Epoxy resin: biphenyl type epoxy resin (" NC3000H " of Nippon Kayaku K. K's manufacture)
Phenolic resin: biphenyl type phenolic resin (bright and the manufacture of chemical conversion Co., Ltd. " MEH-7851-H ")
Curing accelerator: 2-ethyl-4-methylimidazole
(adhesive ingredients)
Adhesive resin: BisA/BisF mixed type phenoxy resin be (Nippon Steel & Sumitomo Metal Corporation's manufacture " ZX-1356-2 ", weight average molecular weight 65,000)
(inorganic filler)
Silica filler: fused silica (epoxy silane modification, 0.5 μm of average grain diameter, 2.0 μm of maximum particle diameter)
(other additives)
Coupling agent: 3- epoxy propoxy propyl triethoxysilane
[preparation of resin combination]
According to mixing ratio shown in table 1 (quality % (ratio for being scaled solid component)) be prepared for Examples 1 to 5 and The resin combination of comparative example 1~4.
[production of resin sheet]
Resin combination (is dissolved in methyl ethyl ketone with 40 mass % of solid component concentration and is made by resin varnish with die coating machine At coating solution) to be coated on the first release liner (poly- to benzene equipped with the peeling layer formed by alkyd resin class remover 38 μm of naphthalate, thickness) on so that resin combination after dry with a thickness of 20 μm, dry 2 at 100 DEG C Minute.Immediately by resin combination and the second release liner after drying (equipped with being shelled by organic silicon after being taken out in drying oven From dosage form at peeling layer 38 μm of polyethylene terephthalate, thickness) be bonded at normal temperature, made and be sequentially laminated with The resin sheet of first release liner, the resin sheet and the second release liner that are formed by resin combination.
The evaluation > of < resin combination before curing
[complex viscosity]
Obtained resin combination is coated on release liner, it is 2 minutes dry at 100 DEG C, it has made with a thickness of 20 μ The resin sheet of m.2 resin sheets are laminated, the resin sheet sandwich of 40 μ m thicks has been made.Further by 2 resin sheets Sandwich stacking, has made 80 μm of resin sheet sandwich, repeats the step, has thus made the measurement examination of 1280 μ m thicks Sample.For the measurement sample, the complex viscosity determined at 90 DEG C under determining instrument and determination condition as described below is (single Position: Pas).The obtained results are shown in tables 1.
Determining instrument: " MCR301 " that determination of viscoelasticity device, Anton Paar company manufacture
Determination condition: frequency 1Hz, 30~150 DEG C of temperature range, 5 DEG C/minute of heating rate
< solidify after resin combination evaluation >
The heat cure condition of resin combination: 200 DEG C, 4 hours of temperature
[storage modulus E ']
Obtained resin combination is coated on release liner, it is 2 minutes dry at 100 DEG C, make 20 μm of thickness Resin sheet.10 resin sheets are laminated, reaches 200 μm of thickness, then, is removed from release liner, sample is made.? Solidify the sample under above-mentioned heat cure condition (200 DEG C, 4 hours of temperature), measurement sample has been made.The measurement is used Sample, " DMAQ800 " manufactured using TA Instruments company, in 3 DEG C/minute of heating rate, temperature range 30~300 DEG C, the value (unit: MPa) of storage modulus E ' at 250 DEG C is determined under conditions of frequency 11Hz.The obtained results are shown in tables 1。
[peel strength]
By carrying out decompression crimping at 90 DEG C of laminating temperature, a face of obtained resin sheet (condition: is reached into pressure 100Pa, time 60 seconds) fit in pre- 6 inch Si wafers (800 μm of thickness) for being first cut into 4 equal parts, then, by with it is upper It states and carries out decompression crimping under the same conditions, close copper foil (size 30mm × 10mm, 350 μ of thickness in another face paste of resin sheet M, 3100 specification of JIS H).It should be noted that the first release liner and the second release liner of resin sheet are being pasted on respectively It is removed before Si chip and copper sheet.Then, make resin combination under above-mentioned heat cure condition (200 DEG C, 4 hours of temperature) Object solidification, is made sample.For the sample, the cupping machine (" Autograph of Shimadzu Scisakusho Ltd's manufacture is used AG-IS "), copper foil is shelled from the resin combination after solidification under conditions of peeling rate 50mm/ points, 90 degree of peel angle From the adhesive strength (unit: N/10mm) of the resin combination after determining copper foil and solidifying.The obtained results are shown in tables 1. It should be noted that, since resin cured matter is not be bonded with copper foil, can not be measured about comparative example 2.
It confirmed, compared with the resin combination of comparative example 1 and 4, the resin combination of Examples 1 to 5 can make energy storage Modulus and peel strength improve.In addition confirmed, compared with the resin combination of comparative example 2 and 3, the resin of Examples 1 to 5 Peel strength can be improved in composition.In addition, containing the maleimide resin with biphenyl backbone, such as In embodiment 4, the mass ratio of maleimide resin and allyl resin is 78: 22, compared with 70: 30 in comparative example 3, horse The ratio of bismaleimide resin is more.Nevertheless, in example 4, complex viscosity is lower than comparative example 3, can be confirmed by making And have the effect of complex viscosity brought by the maleimide resin of biphenyl backbone reduction.Thus it is confirmed that compared with The resin combination of example 1~4 is compared, and the heat resistance and cementability of the resin combination of Examples 1 to 5 are high, even if in Malaysia acyl In the case that the use level of imide resin is more, complex viscosity can also be kept as it is lower, can be improved to by application object with It is casual.

Claims (10)

1. a kind of resin combination contains (A) Thermocurable ingredient, wherein
(A) the Thermocurable ingredient contains (A1) maleimide resin and (A2) allyl resin with biphenyl backbone.
2. resin combination according to claim 1, wherein
(A1) has mass ratio (A1/ of the maleimide resin of biphenyl backbone relative to (A2) allyl resin It A2) is 4.5 or more.
3. resin combination according to claim 1, wherein
(A1) there is the maleimide resin of biphenyl backbone to be indicated with the following general formula (1),
In the general formula (1), the integer that k is 1 or more, m1 and m2 are separately 1~6 integer, and n1 and n2 difference are only It is on the spot 0~4 integer, R1And R2It is separately the alkyl of carbon atom number 1~6.
4. resin combination according to claim 1 also contains (B) adhesive ingredients.
5. resin combination according to claim 4, wherein
On the basis of the total amount of (A) the Thermocurable ingredient and the solid component of (B) adhesive ingredients, (A1) tool The content for having the maleimide resin of biphenyl backbone is 20 mass % or more and 80 mass % or less.
6. resin combination according to claim 1 also contains (C) inorganic filler.
7. resin combination according to claim 1 also contains (D) coupling agent.
8. resin combination according to any one of claims 1 to 7, be used to seal power semiconductor or It is clipped between the power semiconductor and other electronic components.
9. resin combination according to any one of claims 1 to 7, it is used for having used in silicon carbide and gallium nitride Any one more than semiconductor element be sealed or be clipped in it is described used it is any one in silicon carbide and gallium nitride Kind or more semiconductor element and other electronic components between.
10. a kind of resin sheet contains resin combination according to any one of claims 1 to 9.
CN201810698508.1A 2017-06-30 2018-06-29 Resin combination and resin sheet Pending CN109206903A (en)

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Application publication date: 20190115